Abstract: An actuator includes a movable portion which can twist around an axis, a connecting portion which extends from the movable portion and is torsionally deformed according to the twisting of the movable portion, and a support portion which supports the connecting portion, wherein the movable portion has a cross shape in a plan view, and a cross-sectional width of the connecting portion perpendicular to the axis gradually increases from a first surface of the movable portion toward a second surface of the movable portion opposite the first surface.

Abstract: An actuator includes: a movable portion that can oscillate around an oscillation axis; a connection portion that extends from the movable portion and is torsionally deformed in accordance with oscillation of the movable portion; and a support portion that supports the connection portion. The movable portion forms a cross shape in a plan view from a thickness direction of the movable portion.

Abstract: The present invention provides a vibration-actuated micro mirror device comprising a substrate having a swinging frame and a reflection mirror, and a vibration part having a first and a second vibration structures coupled to the substrate, wherein the first vibration structure is driven to generate a first complex wave formed by a first and a second wave signals while the second vibration structure is driven to generate a second complex wave formed by a third and a fourth wave signals, and the first and the third wave signals are formed with the same frequency and phase while the second and the fourth wave signals are formed with the same frequency but opposite phases. The first and the second complex waves actuate the substrate such that the swinging frame is rotated about a first axis while the reflection mirror is rotated about a second axis.

Abstract: Method for structuring a device layer of a substrate, wherein the substrate includes a carrier layer, the device layer and an intermediate layer disposed between the carrier layer and the device layer. Thereby, the intermediate layer is structured for exposing, at least in one portion, a first surface of the carrier layer facing the device layer. Starting from a second surface of the carrier layer opposing the first surface, the thickness of the device layer is reduced to a predetermined thickness at those positions where the intermediate layer is removed.

Abstract: Briefly, in accordance with one or more embodiments, a scanning platform to scan a beam as a projected image comprises a frame and a scanning mirror supported by a flexure coupled to the frame of the scanning platform. The flexure has an asymmetric structure comprising a longer flexure arm and a shorter flexure arm to locate the scanning mirror at a position offset from a center of the frame. The resonant frequency of oscillation of the scanning mirror may be maintained or otherwise determined by selecting an appropriate cross-sectional area of the longer flexure arm or the shorter flexure arm, or combinations thereof.

Abstract: Provided is a space scanner for a self-control moving object. The space scanner has a structure in which a reflective mirror is rotated and tilted. Thus, the space scanner can scan a moving object in horizontal and vertical directions to secure spatial-data, thereby performing a self-control movement.

Abstract: An optical scanning apparatus includes a laser source configured to irradiate a laser beam, a prism configured to reflect the laser beam irradiated from the laser source, a mirror configured to move the laser beam reflected from the prism by oscillating with respect to a predetermined axis and reflecting the laser beam reflected from the prism, the laser beam reflected from the prism being substantially perpendicular to a plane of the mirror in a case where the mirror is in a non-oscillating state, a waveplate positioned between the prism and the mirror and configured to polarize the laser beam reflected from the prism and the laser beam reflected from the mirror. The waveplate includes an end plane inclined with respect to the laser beam reflected from the prism to the mirror.

Abstract: An F/theta lens system for focusing high-power laser radiation in a flat image field including at least two lenses. The at least two lenses are arranged sequentially in a beam path, where the at least two lenses are made from a material that is stable when exposed to laser radiation having a power of more than 1 kW, and at least one of the lenses has at least one aspherical lens surface.

Abstract: A mirror device drive control apparatus adapted to perform drive control of a mirror device having a hysteresis characteristic.

Abstract: An oscillating element which can improve the adhesiveness thereof with an actuator is disclosed. In an oscillating element which includes a substrate which is configured to support an oscillation portion in an oscillating manner, and a driving layer which is configured to oscillate the oscillation portion, the driving layer including an adhesive layer formed on a substrate side thereof, an intermediate layer is positioned between the substrate and the driving layer. The intermediate layer is made of a material which allows surface activation bonding with the substrate, and the surface roughness of the intermediate layer on the adhesive layer side is set coarser than the surface roughness of the intermediate layer on the substrate side thus allowing the intermediate layer to easily acquire an anchoring effect with the adhesive layer.

Abstract: A method for displaying or capturing an image comprises directing an illumination beam onto a mirror of a highly resonant, mirror-mount system and applying a drive signal to a transducer to deflect the mirror. In this method, the drive signal has a pulse frequency approaching a resonance frequency of the mirror-mount system. The method further comprises reflecting the illumination beam off the mirror so that the illumination beam scans through an area where the image is to be displayed or captured, and, addressing each pixel of the image in synchronicity with the drive signal to display or capture the image.

Abstract: A method for creating a pixel image in a two-dimensional display coordinate system from sampled data derived from a collector of a scanned beam imager adapted to transmit a beam of radiation which traces a trajectory in a two-dimensional acquisition coordinate system. The trajectory contains datum locations in the acquisition coordinate system associated with the sampled data. The method includes receiving the sampled data. The method also includes adjusting a mathematical model of the trajectory based on a function of at least one of rotation, translation, and desired scaling of the model of the trajectory. The method also includes constructing the pixel image in the display coordinate system from the adjusted model of the trajectory.

Abstract: A magnetically actuated system includes a conductor and a magnetic field apparatus to generate a magnetic field. The magnetic field apparatus includes magnets and magnetically permeable materials to focus the magnetic field in areas of the conductor that produce a drive torque when the conductor carries a current.

Abstract: A mirror device drive control apparatus adapted to perform drive control of a mirror device having a hysteresis characteristic, includes: a drive section adapted to drive the mirror device with a drive signal; a detection section adapted to detect a displacement of a movable section of the mirror device, and to generate and then output a detection signal corresponding to the detection; and a start-up processing section adapted to perform a start-up process of the mirror device, wherein the start-up processing section detects a frequency of an envelope included in abnormal vibration of the movable section as a beat frequency fb based on the detection signal of the detection section, obtains a predetermined frequency f1 based on a frequency f of the drive signal of the mirror device with which the beat frequency is detected and the beat frequency fb, and drives the mirror device again with the drive signal having the frequency f1.

Abstract: A light scanning device is provided. The light scanning device includes: an oscillating mirror which oscillates rotationally and reflects a light beam to be scanned over a scanning range, the scanning range including a first scanning range and a second scanning range set across a center of the scanning range; a detection unit including a light receiving face, on which the light beam is incident, to detect the light beam; and first and second stationary mirrors which reflect the light beam reflected by the oscillating mirror to the first scanning range and the second scanning range, respectively, to be incident on the light receiving face, wherein an incident pattern of the light beam reflected by the first stationary mirror incident on the light receiving face is different from an incident pattern of the light beam reflected by the second stationary mirror incident on the light receiving face.

Abstract: A mirror device drive control apparatus adapted to perform drive control of a mirror device having a hysteresis characteristic, includes: a drive section adapted to drive the mirror device with a drive signal; a detection section adapted to detect a displacement of a movable section of the mirror device, and to generate and then output a detection signal corresponding to the detection; a control section adapted to perform control of a frequency of the drive signal so that the movable section is displaced in a predetermined range; and an abnormality detection section adapted to detect abnormal vibration of the movable section during the control by the control section, wherein the abnormality detection section detects, in response to change in frequency of the drive signal, a frequency of an envelope included in the abnormal vibration of the movable section as a beat frequency based on a detection signal of the detection section, and obtains a frequency of the drive signal for performing a restoration process o

Abstract: An optical deflecting device including a mirror member having a light reflective area. The optical deflecting device includes a plurality of electrodes that are formed on a substrate, a fulcrum member that functions as an electrode and a regulation member. The range of movement to a respect direction of the substrate is regulated by the regulation member, which includes a conductive material at least in the surface thereof.

Abstract: A Micro Electronic Mechanical System (MEMS) scan controller generating clock frequency and a control method thereof are disclosed. The MEMS scan controller is for a MEMS mirror in a bi-direction laser scanning units (LSU). By detecting resonant frequency of the MEMS mirror, the scan controller sends frequency modulation signal and amplitude modulation signal of the MEMS mirror to a bridge circuit of the MEMS mirror for adjusting and stabilizing the MEMS mirror. A clock signal corresponding to the resonant frequency of the MEMS mirror at the moment is also sent so that scan data is sent within the effective scanning window in forward direction/reverse direction. Thus high-precision scanning is achieved.

Abstract: A movable body apparatus includes a vibratory system, a vibration detecting portion, a driving portion, and a controlling portion. The vibratory system has a resonance frequency and a movable body capable of being reciprocally and rotatably vibrated. The vibration detecting portion detects a vibration condition of the movable body. The driving portion drives the vibratory system with a drive signal. The controlling portion regulates the drive signal supplied to the driving portion. The controlling portion regulates a driving frequency of the drive signal so that a delay phase difference between the drive phase of the drive signal and the vibration phase of the vibratory system obtained from detection result of the vibration detecting portion, both obtained when the vibratory system is vibrated at a predetermined frequency, is maintained.

Abstract: An optical scanning device includes a condensing optical system for collecting a light beam emitted from light source means, a deflecting system for scanningly deflecting the light beam collected by the condensing optical system, and an imaging optical system configured to image the light beam scanningly deflected by the deflecting means, on a surface to be scanned, the deflecting means having a deflecting surface reciprocally movable within a main-scan sectional plane to scanningly deflect the light beam from the condensing optical system, wherein, when the deflecting surface reciprocally moves within the main-scan sectional plane, the deflecting surface receives an angular acceleration which is able to cause deformation being asymmetric with respect to a sub-scan direction, and wherein the condensing optical system collects the light beam from the light source means to a region of the deflecting surface which is at a side of a central line of the deflecting surface with respect to the sub-scan direction whe

Abstract: A mirror axis (MA) is displaced by deformation of a holder (HD) and with resonance of an optical scanner (LS) itself according to the frequency of a voltage applied to a piezoelectric element (PE). The frequency of the applied voltage for causing a resonance deforms the holder (HD) so as to generate at least one node intersecting with respect to the length of the holder (HD) itself.

Abstract: In a bi-directionally scanning electrophotographic (EP) device, methods and apparatus include storing alignment information. In one aspect, pre-characterization parameters of the EP device are stored in memory, such as NVRAM, resistant to the removal of power. In another, actual parameters of the EP device are learned during calibration and stored in the same memory. A controller has local or remote access to the memory and makes comparisons of the pre-characterized and learned parameters to implement corrections. Especially, scan alignment corrections are implemented to alter future scanning of scan lines of latent images on a photoconductor whereby the scan lines are formed in alternating directions. Certain contemplated parameters include, but are not limited to, a scan detect to print distance from a sensor to the start of imaging, temperature, pressure, a scanning mechanism drive signal parameter, such as pulse width, or sensor delay information.

Abstract: Methods and apparatus include improving print quality of a bi-directionally scanning electrophotographic (EP) device, such as a laser printer or copy machine, according to temperature. A moving galvanometer or oscillator reflects a laser beam to create forward and reverse scan lines of a latent image. During use, the actual ambient temperature is obtained and used make corrections to improve print quality, such as by producing the latent image with a signal altered from an image data input signal to help ensure proper alignment of the forward and reverse scan lines.

Abstract: Dual axis, beam-steering devices are disclosed. An exemplary device includes a support platform having a top surface. A reflective surface is coupled to the top surface of the support platform. First and second galvanometers are coupled via respective linkages to the support platform such that the first galvanometer rotates the support platform about a first rotational axis, and the second galvanometer rotates the support platform about a second rotational axis that is orthogonal to the first rotational axis. The support platform can be simultaneously rotated with respect to both the first rotational axis and the second rotational axis to steer a beam of electromagnetic energy (e.g. light beam) reflected by the reflective surface.

Abstract: A large micro-mirror, e.g. 3 mm by 4 mm, in accordance with the present invention has sufficient rigidity to ensure a low mirror curvature, e.g. a radius of curvature greater than 5 meters, and a low mass in order to ensure a high oscillation frequency, e.g. greater than 1000 Hz. A method of making the micro-mirror utilizes bulk micro-machining technology, which enables the manufacture of a honeycomb structure sandwiched between two solid and smooth silicon layers without any indentations or holes. The honeycomb sandwich structure provides the rigidity and low mass needed to obtain a micro-mirror with a low mirror curvature and high resonant frequency.

Abstract: In a piezoelectric transducer element, on a base body having a fixing part and a movable part which are connected with each other, a piezoelectric body which is sandwiched between a lower electrode and an upper electrode is formed in a state where the piezoelectric body extends between and over the fixing part and the movable part of the base body. The piezoelectric body converts a change in potential between the lower electrode and the upper electrode into mechanical displacement of the movable part relative to the fixing part or the mechanical displacement into the change in potential. The upper electrode includes a pad electrode for connection which is formed above the fixing part, and the lower electrode is not formed in a region above the fixing part and below the pad electrode.

Abstract: In an electrophotographic (EP) device, methods and apparatus include determining a delay of one or more sensors (hsync) to accurately know when to start the process of scanning latent images. In one aspect, the sensor includes a leading and trailing edge defined along a direction of laser beam scan travel. Determining the delay includes learning a position of a laser beam on the sensor at a time when a controller connected to the sensor receives a signal from the sensor indicating the sensor is being sufficiently impinged upon by the laser beam. It also includes learning a latest possible position of the laser beam along the direction of laser scan travel where the laser beam can be turned on and still have the sensor assert a signal indicating it has been sufficiently impinged upon by the laser beam. Bi-directionally scanning EP devices are also disclosed, including controllers, photoconductors, sensors, etc.

Abstract: To provide an optical scanning sensor which performs an object detection with high accuracy by suppressing the mutual interference between scanning light and reflection light, the optical scanning sensor comprises a light projecting unit that projects light, an optical scanning actuator that emits the light from the light projecting unit via a reflecting mirror and performs scanning with the light emitted by causing the mirror to swing, and a light receiving unit that receives, via the mirror, reflection light by an external object of scanning light emitted by the optical scanning actuator. The mirror includes a first surface that reflects the light projected by the light projecting unit and emits the light reflected outward as the scanning light, and a second surface that is parallel to and discontinuous in a reflection area with the first surface and reflects and emits the reflection light to the light receiving unit.

Abstract: An oscillating body apparatus comprises an oscillating plate oscillatably supported around a torsion axis by a support portion for a fixing portion and driving the oscillating plate around the torsion axis by a resonance frequency, the oscillating plate having a region forming a groove portion for adjusting a mass of the oscillating plate, and, the resonance frequency being configured to be adjustable by the formation of the groove portion in the region.

Abstract: A light deflector is disclosed that includes a movable mirror serving as a deflector supported by a rotary shaft and configured to deflect a light beam emitted from a light source and scan an area to be scanned; a rotation part configured to cause the movable mirror to vibrate in a reciprocating manner by periodically applying a rotational torque to the movable mirror; a driving circuit configured to control the rotation part; a circuit board having the driving circuit provided thereon, the circuit board being configured to support the movable mirror as a unit; a contact plane contacting the circuit board in a plane perpendicular to the rotary shaft of the movable mirror; and a positioning part configured to determine the position of the rotary shaft in the contact plane.

Abstract: An electrostatic actuator as provided having a movable part, a supporter, a first connector, a second connector, first and second connector electrodes, and first and second supporter electrodes. The first and second connector electrodes project respectively from the first and second connectors towards the supporter, and are provided so as to be asymmetrical with respect to a line or a surface passing through the center of mass of the movable part, and which are perpendicular to the first axis. The first and second supporter electrodes project respectively from the supporter towards the first and second connectors, and that are provided so as to be asymmetrical with respect to a line and a surface which pass through the center of mass of the movable part and which are perpendicular to the first axis.

Abstract: An electrostatic actuator is provided with a movable part, and a connector. The movable part is in the form of a plate and is swingable around a swing axis which is parallel to the flat surface of the plate. The connector supports the movable part such that the movable part is swingable around the swing axis. The connector has a keeper that extends from the connector in a direction parallel to the swing axis. The movable part has a reflecting surface which reflects light and a rear surface which is the rear of the reflecting surface. The keeper supports the rear surface.

Abstract: Method for structuring a device layer of a substrate, wherein the substrate includes a carrier layer, the device layer and an intermediate layer disposed between the carrier layer and the device layer. Thereby, the intermediate layer is structured for exposing, at least in one portion, a first surface of the carrier layer facing the device layer. Starting from a second surface of the carrier layer opposing the first surface, the thickness of the device layer is reduced to a predetermined thickness at those positions where the intermediate layer is removed.

Abstract: A light scanning unit including a light source unit emitting a collimated light beam, and a beam deflector deflecting and scanning the collimated light beam and having a mirror surface that oscillates, a light scanning method and an image forming apparatus employing the light scanning unit are disclosed. The light source unit may be made to oscillate synchronously with the oscillation of the beam deflector so that the incident angle of the collimated light beam on the beam deflector changes in synchronization with the oscillation of the beam deflector, thereby allowing an increase of the maximum deflection angle of the light beam deflected and scanned by the beam deflector.

Abstract: System and method for synchronizing the low speed mirror movement of a mirror display system with incoming frame or video signals, and synchronizing buffered lines of video data to the independently oscillating scanning mirror. According to one embodiment of the invention, the peak portions of the low speed cyclic drive signal are synchronized with the incoming frames of video by compressing or expanding the peak portion or turn around portion so that each video frame begins at the same location on the display screen. The actual position of the high frequency mirror is determined by sensors and a “trigger” signal is generated to distribute the signals for each scan line such that the scan lines are properly positioned on the display.

Abstract: An optical scanning device is disclosed that includes a light source unit, a light source drive unit, a deflection unit, a scanning image optical system, and a light beam detection unit. In the optical scanning device, the light source drive unit controls an amount of light emission of the light source unit, and a light emission amount control period in which the light source unit is forcibly turned OFF is set to the light source drive unit during a period from when the deflection unit deflects to an edge of a scanning angle for scanning the main scanning area to when the deflection unit deflects to a maximum deflection angle of the deflection unit within a non-image forming period.

Abstract: A mirror device and a method for audio feedback of a MEMS mirror device are presented. The mirror device includes a mirror with a reflective surface located to intercept a modulated beam of light produced by a laser. The mirror oscillates on a hinge axis structure A microphone detects the mirror oscillation information. The mirror device further includes a mirror driver system and a video controller system. The mirror driver system causes the mirror to rotate about the hinge axis structure. The video controller system uses the information received from the microphone, and the information received from the mirror-driver controller, to control the output of the laser.

Abstract: A scanning apparatus for a printer or similar instrument. A multiharmonic oscillator is used to provide a composite motion of a laser beam or other light beam to scan an imaging surface. The multiharmonic oscillator may have multiple sections each having a different resonant frequency. One section includes a reflector that intercepts the light beam, and drive electronics move the reflector so the light beam scans the imaging surface. Linear and complex non-linear motions of the light beam may be achieved. Microelectromechanical systems (MEMS) technology may be used to fabricate the oscillator.

Abstract: An image display apparatus includes a laser light source that emits laser light, a focusing optical system that focuses the laser light emitted from the laser light source, a scanner that scans the light that has exited from the focusing optical system to form an intermediate image, a divergent angle converter on which the intermediate image is formed, the divergent angle converter enlarging the divergent angle of the incident laser light and outputting the laser light with the enlarged divergent angle, and a projection element that projects the laser light that has exited from the divergent angle converter toward a surface on which the laser light is projected. The focusing optical system focuses the laser light onto the divergent angle converter.

Abstract: A method of tilting a micromirror includes providing a substrate, a sloped electrode outwardly from the substrate, and a sloped electrode positioning system outwardly from the substrate. The method also includes applying, by the sloped electrode positioning system, forces sufficient to position the sloped electrode in an orientation that slopes away from the substrate.

Abstract: A laser radar according to an embodiment of the invention includes a beam irradiation head which emits a laser beam and a control circuit which controls the beam irradiation head to perform scan in a two-dimensional direction with the laser beam. In the laser radar, the beam irradiation head includes a laser beam source; a mirror to which the laser beam emitted from the laser beam source is incident; and a driving mechanism which rotates the mirror in first and second directions about a first rotating axis and a second rotating axis perpendicular to the first rotating axis respectively. The control circuit controls the rotation of the mirror in the first direction and the second direction such that a scan region of the laser beam becomes a rectangular shape.