Abstract: A micromirror device includes: a mirror part; a first actuator in which a pair of semi-annular actuator parts surrounds the mirror part; a connecting part that connects the mirror part and the first actuator such that the mirror part is rotatable around a first axis; a fixing part that is disposed at an outer periphery of the first actuator; and a second actuator in which a pair of meandering type actuator parts are disposed with the first actuator interposed therebetween. Each of the pair of meandering type actuator parts is disposed such that a longitudinal direction of the rectangular plate-like part is a direction along the first axis, one end of each meandering type actuator part is connected to an outer periphery of each of the pair of semi-annular actuator parts, and another end of each meandering type actuator part is connected to the fixing part.

Abstract: An actuator device includes: a support portion; a movable portion; a first connection portion connecting the movable portion to the support portion on a first axis so that the movable portion is swingable around the first axis; and a first wiring provided on the first connection portion. The first wiring includes a first main body formed of a metal material having a Vickers hardness of 50 HV or more. The first main body includes a first surface facing the first connection portion and a second surface other than the first surface. The second surface has a shape in which a curvature is continuous over the entire second surface in a cross-section perpendicular to an extension direction of the first wiring.

Abstract: The present invention includes an optical deflector that changes a deflection angle depending on an applied voltage, a voltage control unit that applies a voltage to the optical deflector, and a storage unit that stores a value of a voltage to be output by the voltage control unit. The voltage control unit outputs a voltage of a value stored in the storage unit to the optical deflector. The storage unit stores a goal voltage V=ggoal(t), which provides a deflection angle ? with the goal time dependency ?=?goal(t).

Abstract: A micro-sized optical device may comprise a mirror suspended on a set of hinges that are mounted to the substrate and that are configured to tilt the mirror about an axis, wherein a hinge of the set of hinges is a two-layer structure with a pivot point that aligns with a mass center of the mirror; and a three-layer comb actuator structure associated with the hinge of the set of hinges, wherein the three-layer comb actuator structure includes a rotor comb actuator, a first stator comb actuator, and a second stator comb actuator.

Abstract: A mirror unit 2 includes a mirror device 20 including a base 21 and a movable mirror 22, an optical function member 13, and a fixed mirror 16 that is disposed on a side opposite to the mirror device 20 with respect to the optical function member 13. The mirror device 20 is provided with a light passage portion 24 that constitutes a first portion of an optical path between the beam splitter unit 3 and the fixed mirror 16. The optical function member 13 is provided with a light transmitting portion 14 that constitutes a second portion of the optical path between the beam splitter unit 3 and the fixed mirror 16. A second surface 21b of the base 21 and a third surface 13a of the optical function member 13 are joined to each other.

Abstract: The present invention provides a method for preparing a microgroove array surface with a nearly cylindrical surface based on an air molding method, and relates to the technical field of functional surface preparation. The method includes the following steps: (1) preparing a microgroove array surface, uniformly spreading a layer of a liquid polymer film to be formed on the auxiliary plate, and placing a spacer block in an empty position on the microgroove array surface; (2) placing the auxiliary plate spread with the liquid polymer film on the spacer block on the microgroove array surface, maintaining this state, and feeding the auxiliary plate into a vacuum drying oven; and (3), setting a pressure in the vacuum drying oven according to a designed pressure, heating and solidifying the liquid polymer film, and separating the microgroove array surface to obtain the microgroove array surface with the nearly cylindrical surface.

Abstract: In an optical device, a movable unit includes a main body portion, a frame portion that surrounds the main body portion with a predetermined interval from the main body portion, and a plurality of connection portions which connect the main body portion and the frame portion to each other. A width of each of the connection portions is larger than an interval between the main body portion and the frame portion, and is smaller than a distance from a connection position with each of the connection portions in the frame portion to any of a connection position with each of a pair of first torsion support portions and a connection position with each of a pair of second torsion support portions.

Abstract: An optical unit includes: a base which includes a main surface; a mirror device which includes a movable mirror portion and is disposed on the base; a frame member that is provided on the main surface so as to surround the mirror device; and a window member that is bonded to the frame member and has a flat plate shape. The frame member includes a first wall portion which is provided on the main surface and includes a first top surface on the side opposite to the main surface, a second wall portion which is provided on the main surface so as to face the first wall portion and includes a second top surface on the side opposite to the main surface.

Abstract: An optical scanning device includes a light source that emits a light beam, a lens member, and a housing that supports the lens member. The housing and the lens member are provided with a housing-side engagement and a lens member-side engagement respectively that engage with each other. The housing-side engagement and the lens member-side engagement are capable of pivoting the lens member around an axis along an optical axis direction of the light beam passing through a contact contacted through concavo-convex engagement with each other.

Abstract: In an optical device, an elastic support unit includes a pair of levers which face in a second direction perpendicular to a first direction, a pair of first torsion support portions which are connected between the levers and the base, a pair of second torsion support portions which are connected between the pair of levers and the movable unit, and a first link member that bridges the levers. The levers and the first link member define a light passage opening. Each of connection positions between the levers and the first torsion support portions is located on a side opposite to the movable unit with respect to the center of the light passage opening in a third direction perpendicular to the first direction and the second direction. A maximum width of the light passage opening in the second direction is defined by a gap between the levers in the second direction.

Abstract: An actuator element of a MEMS device on a substrate is provided to create large, out-of-plane deflection. The actuator element includes a metallic layer having a first portion contacting the substrate and a second portion having an end proximal to the first portion. A distal end is cantilevered over the substrate. A first insulating layer contacts the metallic layer on a bottom contacting surface of the second cantilevered portion from the proximal to the distal end. A second insulating layer contacts the metallic layer on a portion of a top contacting surface at the distal end. The second portion of the metallic layer is prestressed. A coefficient of thermal expansion of the first and second insulating layers is different than a coefficient of thermal expansion of the metallic layer. And, a Young's modulus of the first and second insulating layer is different than a Young's modulus of the metallic layer.

Abstract: A piezoelectric optical micro-electro-mechanical systems (POMEMS) device includes a glass layer having a first surface and an opposite second surface. The device may also include a first moisture barrier layer having a first surface and an opposite second surface in which the second surface of the first moisture barrier layer is substantially coextensive with and interfaces with the first surface of the glass layer. A piezo stack may be attached on the first side of the first moisture barrier layer. The device may also include a second moisture barrier layer having a first surface and an opposite second surface. The first surface of the second moisture barrier is substantially coextensive with and interfaces with the second surface of the glass layer. A semiconductor substrate may be attached on the second side of the second moisture barrier layer.

Abstract: A micromirror device having a cap, a function layer, and a window layer, which are disposed on top of one another and parallel to a main extension plane, the function layer being situated between the cap and the window layer, and a micromirror is patterned out of the function layer. The micromirror device has a stop, which is designed to restrict a deflection of the micromirror in a direction perpendicular to the main extension plane.

Abstract: An imaging apparatus includes: an imaging apparatus main body for imaging an observation target contained in a container; and a liquid droplet adhesion determination unit that acquires pattern information of liquid droplets adhering to a bottom surface on an outer side of the container based on an image of the observation target imaged by the imaging apparatus main body and determines whether or not the liquid droplets adhere to the bottom surface based on the pattern information. In a case where the liquid droplet adhesion determination unit determines that the liquid droplets adhere to the bottom surface on the outer side of the container, the imaging apparatus main body images the observation target again after performing liquid droplet removal processing.

Abstract: A mirror holding mechanism includes: a reflection mirror, a mirror holding member, and a cam member. The mirror holding member has two side surface portions sandwiching the reflection mirror in an X direction. In the side surface portion, a guide hole through which a shaft portion protruding from the reflection mirror to an outer side in the X direction is formed so as to pass through the side surface portion. The guide hole is formed into a long hole longitudinally extending in a Y direction. The cam member is disposed on an outer side of the side surface portion in the X direction and rotatably held by the side surface portion. On the cam member, a cam surface with which a distal end part of the shaft portion comes into contact is formed. When the cam member rotates, the shaft portion moves in the Y direction.

Abstract: A 4-channel parallel-optical (SR4) device for monitoring an emission power includes an emission assembly for emitting laser, a receiving assembly for receiving the laser, and a monitoring assembly for monitoring the emission power of the emission assembly. The emission assembly includes an emission chip, a first inclined mirror for total reflecting the laser, and a second inclined mirror for refracting and reflecting the laser. The receiving assembly includes a third inclined mirror or total reflecting and focusing the laser. An inner angle of the first inclined mirror is matched with an inner angle of the second inclined mirror to horizontally transmit the laser towards the optical fiber.

Abstract: A water-droplet detecting apparatus according to an embodiment includes a setting unit, a first extraction unit, a second extraction unit, and a determination unit. The setting unit sets concentric circles having a center at arbitrary one point of a captured image of an image capturing unit. The first extraction unit extracts candidate pixels based on gradients of pixels on a circumference of each of the concentric circles. The candidate pixels are candidates for pixels that are estimated to indicate a water droplet adhered to the image capturing unit. The second extraction unit extracts one or more candidate circles based on the candidate pixels extracted by the first extraction unit. The one or more candidate circles are candidates for circles that indicate a shape of the water droplet. The determination unit determines whether or not the water droplet is adhered based on an extraction result of the second extraction unit.

Abstract: A mirror driving device is provided. A pair of piezoelectric actuator units are disposed at both sides of a mirror unit so as to sandwich the mirror unit, and each piezoelectric actuator unit is connected with an end portion of the mirror unit through a linking unit. The linking unit has a structure including one or more plate-shaped members whose longitudinal direction is a direction perpendicular to a rotation axis, and functions as a plate-shaped hinge unit in which a plate-shaped member is deformed so as to be deflected in the thickness direction by the drive of the piezoelectric actuator unit. The linking unit is provided with a sensor unit that detects the stress to be generated in the linking unit during the rotational drive of the mirror unit by a resonant vibration.

Abstract: An optical device includes: an optical portion that has a light incident face onto which light is incident; a movable portion that is swingable while supporting the optical portion; a shaft portion that supports the movable portion so as to swing the movable portion around a swing axis; and a supporting portion that supports the shaft portion. The supporting portion has a rib structure which is formed by connecting ribs. The rib structure is provided on a single surface of the supporting portion.

Abstract: The present invention provides an electrostrictive element capable of preventing breakdown of a dielectric film. An electrostrictive element 1 includes a dielectric film 2 composed of an elastomer, a film electrode 3 formed inside a peripheral edge on at least one surface of the dielectric film 2 and capable of expanding and contracting so as to follow expansion and contraction of the dielectric film 2, and a frame 4 to keep the dielectric film 2 in an expansion state. The film electrode 3 includes portions 6, 7, 8 having a lower conductivity or a portion 9 having a higher rigidity than the other portion on a portion to be subjected to a greater total stress of a mechanical stress and an electrical stress than the other portion of the dielectric film 2.

Abstract: Processes for making high multiplex arrays for use in analyzing discrete reactions at ultra high multiplex with reduced optical noise, and increased system flexibility. The high multiplex arrays include substrates having integrated optical components that increase multiplex capability by one or more of increasing density of reaction regions, improving transmission of light to or collection of light from discrete reactions regions. Integrated optical components include reflective optical elements which re-direct illumination light and light emitted from the discrete regions to more efficiently collect emitted light. Particularly preferred applications include single molecule reaction analysis, such as polymerase mediated template dependent nucleic acid synthesis and sequence determination.

Abstract: An optical scanning device includes an optical housing; an elongated optical element arranged in the optical housing and having a shape extending in a main-scanning direction; a retaining member provided at a side opposite to a surface of the optical housing on which the optical element is arranged to maintain an attachment attitude of the optical element in the optical housing; a curvature adjusting unit configured to adjust a curvature of the elongated optical element in a scanning line via the retaining member; a tilt adjusting unit configured to adjust a tilt of the optical element in the scanning line by making the optical element rotate on an optical axis via the retaining member; and a positioning unit configured to position the optical element in the optical axis direction, and provided in the optical housing and having such a shape that the optical element fits the positioning unit.

Abstract: An optical reflecting device includes a movable plate having a reflecting surface, a first support portion, a first drive part, a first frame, and a monitor part for detecting the rotation of the movable plate. The first support portion is connected to the movable plate. The first drive part is formed in the first support portion and rotates the movable plate about a first axis. The first frame contains the movable plate and the first support portion, and is connected to the first support portion. The monitor part extends from that portion of the outer periphery of the movable plate which is most distant from the first axis.

Abstract: A micromechanical component having a control element is described, which is connected via at least one supply line spring having a supply line spring constant to a mounting support in an adjustable manner, and a drive device having at least one actuator component situated on the control element. Via at least one line component guided over the at least one supply line spring an electric potential or a current signal is able to be provided to the actuator component in such a way that the control element is able to be set by the drive device into a motion with respect to the mounting support. The control element is additionally connected to the mounting support, and the supply line spring constant is less than vibratory spring constant. Also described is a method for producing a micromechanical component.

Abstract: An optical membrane device comprises a substrate, at least one support block on a surface of the substrate, and at least one plate. A torsion beam supports the plate above the substrate on the support block. The optical membrane device also includes an optical membrane structure supported by the plate above the substrate and at least one electrode on the substrate underneath the plate. In one implementation, the optical membrane device further comprises a tether for coupling the optical membrane structure to the plate. The tether extends between the optical membrane structure and the plate. In another implementation, the substrate of the optical membrane device has an optical port through the substrate directly below the optical membrane structure. The plate is substantially balanced around the torsion beam to minimize a sensitivity to orientation in a gravitational field.

Abstract: On/off digital drive signals are used to create arbitrary spatial and temporal ribbon movement patterns in MEMS ribbon arrays.

Abstract: A micro-electromechanical component includes: an electrically conductive substrate having an upper side and an underside; a structured electrically conductive first functional layer fashioned on the upper side of the substrate; an elastically deflectable actuator device suspended via a spring device fashioned in the first functional layer; a movable first electrode device extending vertically through the substrate and connected to the actuator device; and a stationary second electrode device extending vertically through the substrate, at a distance from the first electrode device, the actuator device being configured to be deflected through the application of an electrical voltage between the first and the second electrode device.

Abstract: A micromechanical component is described having a first substrate that has a first front side a first rear side facing away from the first front side; first printed conductors that are fashioned on the first front side of the first substrate; a plurality of actuator devices that are fashioned on and/or in the first substrate and that are electrically bonded to the first printed conductors, the actuator devices each having at least one stator electrode and each having at least one actuator electrode that works together with the at least one stator electrode, which are fashioned such that a voltage can be applied between the actuator electrode and cooperating stator electrode in such a way that the actuator electrode can be displaced relative to the stator electrode

Abstract: An image stabilizing apparatus includes a shift member holding a lens, a first driver moving the shift member in a first direction in a plane orthogonal to an optical axis, and a second driver moving the shift member in a second direction in the plane orthogonal to the optical axis. The first driver includes a first magnet, a first coil, and a first yoke in order in an optical axis direction, the second driver includes a second magnet, a second coil, and a second yoke in order in the optical axis direction, the first yoke has a protrusion that protrudes in the first direction at least one of end portions extending in a direction orthogonal to the first direction, and the second yoke has a protrusion that protrudes in the second direction at least one of end portions extending in a direction orthogonal to the second direction.

Abstract: A light source apparatus includes a semiconductor laser which emits a laser beam, a coupling lens which converts the laser beam emitted from the semiconductor laser into a light flux, and a cylindrical lens into which the light flux is allowed to come from the coupling lens. The cylindrical lens is integrally formed with a lens portion, an outer circumferential portion which is arranged at an outer circumference of the lens portion, and a support portion which extends from the outer circumferential portion toward the semiconductor laser and which supports the coupling lens.

Abstract: A beam steering mirror device includes a mirror having an optical part with a reflecting or optical surface and a mirror body. The optical part is essentially thermally de-coupled from the body. A biaxial suspension of the mirror body has two rotation axes arranged essentially perpendicular with respect to each other and being located in a common plane. The suspension includes a set of four flexible pivots with a pair of pivots assigned to each rotation axis. The mirror is arranged with regard to the biaxial suspension such that its center of mass is approximately located in the intersection point of the two rotation axes. The device also includes motors for moving of the mirror body around the two rotation axes, sensors for determining the tilting angle of the mirror, and a housing for the mirror, the biaxial suspension, the motors and the sensors.

Abstract: Provided is an image-capturing apparatus including a connecting portion having an opening through which a beam coming from an observation device is incident; an optical-path switching portion that switches an optical path of the beam incident along an incident optical axis; image-capturing devices that capture an image of the beam passing along the switched optical path. A first image-capturing device is provided so as to be rotatable about an axis parallel to the central axis thereof. The optical-path switching portion is provided so as to be pivotable such that a reflecting surface thereof is disposed on or retracted from the incident optical axis. When the reflecting surface is retracted, the beam is incident on a second image-capturing device. When the reflecting surface is disposed, the beam is reflected by the reflecting surface and incident on at least the first image-capturing device.

Abstract: A device for generating optical vortex of desired topological charge is disclosed. The device comprises a circular mirror having hole at its centre and a radial slit. The mirror comprises a piezoelectric actuator. The actuator comprises a hollow tube having inner diameter equal to the diameter of the hole of the mirror, a through cut extending along the length of the tube from an inner till an outer diameter, and an inner and outer electrode being formed on inner and outer wall of the tube respectively, wherein the length of the electrode increases continuously in the azimuth direction across said outer wall. The Actuator is coaxially joined to the mirror such that the slit formed between the inner and outer diameter of the tube overlaps with the radial slit. Shape of the mirror undergoes azimuthal expansion upon applying excitation voltage across electrodes forming single turn helix to generate optical vortex.

Abstract: A solar powered rainbow-making device produces a visual display that is created by the interplay of light and a light refractive element that form constantly changing patterns from a rotating crystal. The rotating display device includes a circular-shaped refractive element that is mounted on a base and is turned by a motor driven transmission gear train. The crystal rotates about a horizontal axis as sunlight is transformed into a color spectrum that moves in a circular fashion. The color images can include a plurality of distinct rainbow images that are projected onto the walls and other structures in the immediate environment.

Abstract: Apparatus, systems and methods for use in analyzing discrete reactions at ultra high multiplex with reduced optical noise, and increased system flexibility. Apparatus include substrates having integrated optical components that increase multiplex capability by one or more of increasing density of reaction regions, improving transmission of light to or collection of light from discrete reactions regions. Integrated optical components include reflective optical elements which re-direct illumination light and light emitted from the discrete regions to more efficiently collect emitted light. Particularly preferred applications include single molecule reaction analysis, such as polymerase mediated template dependent nucleic acid synthesis and sequence determination.

Abstract: MEMS and fabrication techniques for positioning the center of mass of released structures in MEMS are provided. A MEMS device includes a substrate and a released structure connected to the substrate via a flexure. The released structure includes a frame rotatable with respect to the substrate, and an elongate first member having a longitudinal axis extending perpendicularly from an undersurface of the frame and a free end remote from the frame. A recess is formed in an end face of the free end. The recess has a longitudinal axis substantially parallel to the longitudinal axis of the first member and a transverse area smaller than an area of the end face.

Abstract: The present invention provides an optical system comprising a lens element, a display unit displaced transversely from the lens element, at least one actuator coupled to at least one of the lens element or the display unit and capable of changing position of the lens element relative to the display unit in a lateral direction, and an electronic control system capable of driving the at least one actuator to move in a programmed manner to control positioning of the lens element relative to the display unit.

Abstract: A method for adapting the parameters of a controller for micromechanical actuators, including the following steps: acting on the micromechanical actuator with a test signal which has a step, detecting a test signal response of the micromechanical actuator to the test signal, identifying an absolute position of at least one mode in the detected test signal response, and adapting at least one of the parameters of the controller based on the identified absolute position of the at least one mode. Moreover, a corresponding device is described.

Abstract: Provided is a light-scanning device may be designed to have a high resonance frequency and a large scanning angle. A mirror unit vibrates by using an arbitrary straight line as a rotation axis. A pair of first beam portions are disposed on a straight line that is parallel to the rotation axis, and support the mirror unit. A pair of second beam portions are disposed so as to be line-symmetrical to the pair of the first beam portions about the rotation axis as an axis of symmetry, and support the mirror unit. A pair of first arm portions respectively support the pair of first beam portions. A pair of second arm portions respectively support the pair of second beam portions. A pair of third beam portions support the mirror unit between the first beam portions and the second beam portions.

Abstract: A micro-electromechanical reflector is described including an electrode substrate having a first surface and a second surface, which is opposite to the first surface, on whose first surface a carrier layer is situated, a plurality of electrode recesses, which are introduced under the carrier layer from the first surface into the electrode substrate, a plurality of second electrode recesses, which are introduced from the second surface into the electrode substrate, at least one torsion spring structure which is formed in the carrier layer over one of the first electrode recesses, a carrier substrate, which is attached to the second surface of the electrode substrate, and a reflector surface, which is situated on the carrier layer.

Abstract: A micro-electromechanical reflector includes an electrode substrate having first and second surfaces opposite to the first surface, on whose first surface a monocrystalline silicon layer is situated, a plurality of electrode recesses, which are introduced from the second surface into the electrode substrate, at least one torsion spring structure, which is implemented in the monocrystalline silicon layer above one of the electrode recesses, a carrier substrate, which is applied to the second surface of the electrode substrate, and a reflector surface situated on the monocrystalline silicon layer. At least one first electrode, movably mounted in the electrode substrate via the torsion spring structure, and at least one second electrode, mechanically fixedly anchored to the carrier substrate and the monocrystalline silicon layer, are formed by the electrode recesses.

Abstract: A micromechanical component includes a mounting, and a mirror plate which is adjustable with respect to the mounting about at least one rotational axis and which has a mirror side and a rear side which faces away from the mirror side. The mirror plate is connected to the mounting at least via four springs. Each of the four springs extends partially along the rear side of the mirror plate and is connected to the mirror plate via one support post each, which in each case contacts an anchoring area situated on the rear side. Also described is a micromirror device, as well as a manufacturing method for a micromechanical component.

Abstract: The present invention is a rotary actuator having segments, which are spaced apart and are connected by means of at least one support structure, and at least one actuator for exerting forces, characterized in that the support structure is substantially rotationally symmetrical about an axis and is composed of elements which are not oriented parallel to the axis or which are twisted through an angle in relation to the axis, and the elements can be changed by rotation about the axis and the actuator can exert forces to at least one of the segments and the support structure in the direction of the axis.

Abstract: Apparatuses with actuators having actuator-side attachment areas disposed thereon, an optical element having mirror-side attachment areas disposed thereon and springs are described, wherein an optical element is connected to actuators via two or four springs.

Abstract: A laser marker/pointer for projecting circular or elliptical laser beam patterns onto a target surface such as a portion of a presentation screen or to assist in the aiming of a firearm, comprises a handheld shell body in which is mounted a laser light source, a rotating optical mirror driven by a motor, and an electronic drive circuit, whereby the aspect ratio of the marking pattern is determined by the geometric relationship of the motor shaft axis, the laser beam, and the mirror surface. The motor drive circuit when initially powered (along with the laser diode), applies full power (a continuous DC voltage to the motor to overcome inertia), followed by a pulsed voltage to lower the duty cycle of the motor, increase battery life, and reduce rotational noise.

Abstract: A laser marker/pointer for projecting circular or elliptical laser beam patterns onto a target surface such as a portion of a presentation screen or to assist in the aiming of a firearm, comprises a handheld shell body in which is mounted a laser light source, a rotating optical mirror driven by a motor, and an electronic drive circuit, whereby the aspect ratio of the marking pattern is determined by the geometric relationship of the motor shaft axis, the laser beam, and the mirror surface. The motor drive circuit when initially powered (along with the laser diode), applies full power (a continuous DC voltage to the motor to overcome inertia), followed by a pulsed voltage to lower the duty cycle of the motor, increase battery life, and reduce rotational noise.

Abstract: A microactuator arrangement for the deflection of electromagnetic radiation, with a mirror plate which is suspended on a drive frame in a movable manner about a first rotation axis via spring elements, wherein the drive frame is suspended on a chip frame in a movable manner about a second rotation axis via spring elements, wherein the drive frame is not closed and comprises a recess adjacent to the mirror plate and wherein the chip frame at least in the region of the recess of the drive frame is not closed, in a manner such that a deflected and/or incident beam is not inhibited by the drive frame and the chip frame.

Abstract: The invention relates to a laser assembly (100) having a laser (L) for generating primary laser pulses (1), beam splitting optics (15) for splitting a primary laser pulse into a plurality of temporally staggered sub-pulses, and having focusing optics (17-19) for focusing the sub-pulses in or on an object (20) so that every sub-pulse is focused in a separate focus volume (F). The invention is characterized in that the mutual spatial and/or temporal relationship of the focus volumes (F) of the sub-pulses originating from a common primary laser pulse is variably adjustable. The invention also relates to a corresponding method.

Abstract: A drive apparatus and a beam-steering apparatus fabricated from a MEMS process. The apparatus has a first layer, a second layer and a plurality of fluid-filled volumes defined there between. A plurality of flexible structures such as bellows structures are defined on the first layer and are configured whereby a predetermined pressure in each of the volumes results in a predetermined displacement of the flexible structures. Pressurization means selectively changes the pressures in each of the volumes to define the predetermined displacement of the flexible structures. An electromagnetically reflective or mirror element and a plurality of drive beams are affixed to the reflective element and to one of the plurality of flexible structures whereby selected pressurization of the fluid in the volumes causes a predetermined displacement of the flexible structure to displace the reflective element about the plane of its surface.

Abstract: Provided is a Micro-Electro-Mechanical Systems (MEMS) device for actuating a gimbaled element, the device including a symmetric electromagnetic actuator for actuating one degree of freedom (DOF) and a symmetric electrostatic actuator for actuating the second degree of freedom.