Abstract: A mounting assembly, for mounting a reflection mirror within a laser scanning unit, includes a mounting structure, and a pair of urging members. The mounting structure includes a base member, and a first pair of support protrusions and a second pair of support protrusions configured on the base member. Each of the first pair of support protrusions and the second pair of support protrusions includes a first support protrusion having a first top surface, and a second support protrusion having a second top surface. The first support protrusion is capable of supporting an end portion of the reflection mirror on the first top surface. Each urging member of the pair of urging members is adapted to be secured over the second top surface of the second support protrusion for urging the end portion of the reflection mirror on the first support protrusion.

Abstract: A micromechanical component having a base part, a swiveling part, which has an electrically conductive material, and a swiveling part insulation which electrically insulates a first and a second section of the swiveling part from each other. A first flexible, electrically conductive connecting element connects the base part to the first swiveling part section, and a second flexible, electrically conductive connecting element connects the base part to the second swiveling part section.

Abstract: This invention deals with novel method and apparatus for positioning and motion control of the optical elements (mirrors and lenses) of a Fresnel solar concentrator tracking array which approximately eliminates gravitational torque by use of a central universal pivot or gimbals. Linkage torque is produced by induced and/or permanent dipole coupling to an electronic grid to produce angular deflection, and rotational motion that is enhanced by the presence of highly polarizable material. This system is ideally suited for maximization of solar energy focused by the array onto a receiver. Since there are no mechanical linkages, the instant invention is applicable for fabrication from the mini- to the nano-technology realm. The elimination of gravitational torque by balancing the optical elements on a universal pivot or gimbals greatly reduces the power required for the optical elements to track the sun and focus sunlight onto a receiver.

Abstract: A micromechanical device described has an oscillation system with an oscillation body and an elastic suspension, by which the oscillation body is oscillatorily suspended. The elastic suspension has at least two spring beams. An adjuster for adjusting a resonant frequency of the oscillation system by changing the position of the at least two spring beams of the elastic suspension towards each other is provided.

Abstract: A method and apparatus is provided for scanning an object, featuring scanning an incident beam in a substantially curved scan pattern; and moving an object at a predetermined rate along an axis substantially orthogonal to a plane of the curved scan pattern so that a two dimensional image can be formed by successive passes of a circularly scanned spot. In particular, a laser beam scans around an objective lens at a fixed radius RL with a fixed input angle ?d. When scanned in this manner, the laser beam before the objective lens forms a “cone” of directions (so herein it is referred to as a “conical scan”). Scanning in this fashion produces the curved scan pattern at the object (substrate). By moving the object (substrate) at the predetermined rate along the axis orthogonal to the plane of the curved scan pattern, the two dimensional image can be formed by successive passes of the circularly scanned spot.

Abstract: An oscillator device includes an oscillation system having first and second oscillators and first and second resilient supporting members, wherein the oscillation system has at least two frequencies of natural oscillation mode around a torsion axis which include a first resonance frequency f1 and a second resonance frequency f2, wherein there is a relationship that f2 is approximately two-fold of f1, and wherein a drive control member supplies, to a driving member, a driving signal which is comprised of a driving signal based on synthesizing a first driving signal having a first driving frequency and a second driving signal having a second driving frequency, and which is such driving signal that, among the first and second driving frequencies, a lower-frequency side driving frequency Df1 and a higher-frequency side driving frequency Df2 satisfy a relationship Df1×2=Df2 and that Df2 satisfies a relationship f2?|?f/2|<Df2<f2+|?f/2|.

Abstract: Disclosed is a display device adapting a resolution improvement device capable of effectively improving a resolution in a projecting display device and a method thereof. A display device according to the present invention comprises: a light source; an image forming means for forming an image using a light emitted from the light source and an input image signal; a projection means for projecting an image formed in the image forming means on a screen; a displacement means for displacing an image displayed on the screen to be displaced; a driving means for driving the displacement to be moved; and an input signal applying means for applying an input signal to the driving means for the displacement means to be rotated in a predetermined direction. According to the present invention, different images are displayed on a screen periodically. It seems that the greater number of pixels is used than the real number in a sense of sight.

Abstract: A micro-image acquisition and transmission system is provided. In a preferred embodiment, the system is comprised of an image acquisition chip comprising an electronic imager, control electronics and a micro powered rotary stage comprising a transceiver array that acts as a hub to optically link a group of distributed image acquisition chips. A preferred embodiment is further comprised of a transceiver array chip comprising one or more micro-powered rotary stages having a transceiver array assembly disposed thereon. The micro-powered rotary stage is supported by a micro-brush bearing.

Abstract: An optical device includes: a movable plate disposed in a distribution range of light input from outside, and having a light reflecting surface adapted to reflect the light; a shaft member adapted to support the movable plate so that the movable plate can swing around a predetermined axis; a ferromagnetic member provided to the movable plate; and a drive section configured to generate electromagnetic force between the drive section and the ferromagnetic member to thereby swing the movable plate, wherein a portion of the drive section, included in the distribution range of the light, is formed of a surface having a normal vector with which the light is reflected to outside of a predetermined range.

Abstract: In a piezoelectric actuator (8) comprising a layered piezoelectric element (14) which consists of alternately stacked expansion and contraction layers (14a) and electrode layers (14b), a driving shaft (15) of which one end is fixed to one end of the piezoelectric element (14) in expansion and contraction direction, a movable member (15) frictionally engaging with the driving shaft (15) and a collar (17) bonded to the circumference of the piezoelectric element (14), by bonding the collar (17) to the circumference of the plurality of the expansion and contraction layers (14a) with an adhesive (G) so that fastening force of the collar (17) to the expansion and contraction layers (14a) is imbalanced with reference to the center of the cross section of the piezoelectric element (14) so that the piezoelectric element (14) expands and contracts in an imbalanced manner to incline the driving shaft (15) to displace minutely the movable member (16).

Abstract: Implementations of actuators that use flexures to provide support to the actuators and pivoting mechanisms to the actuators. Such actuators can be electromagnetically activated actuators that include a magnet stator and a coil rotor mounted on a flexure.

Abstract: A two-dimensional galvanometer scanner is disclosed in which two coils are disposed on two adjacent sides of the scanning mirror in order to provide for movement along two orthogonal axes. Preferably, a ball holder and metallic ball are used to implement a ball and socket connection to permit the scanning mirror or other optical element to be moved in the two dimensions.

Abstract: A mirror support device has a frame with a mounting surface on which a mirror is mounted at an angle. An elastic member has a first end, a second end, and a plurality of pressing portions. The first end is fixed to the top of the frame, and the second end urges the mirror towards the mounting surface to fix the mirror to mounting surface. The plurality of pressing portions abut against the mirror when the second end urges the mirror towards the mounting surface. The pressing portion increases and more effectively apply a pressing force for supporting and fixing the mirror. Therefore, the mirror is fixed more securely and stably without deviation and deformation, and light scanning error and image quality degradation is prevented.

Abstract: A bistable electroactive polymer transducer is provided for electrically actuated deformation of rigid electroactive polymer members. The polymers have glass transition temperatures (Tg) above ambient conditions and turn into rubbery elastomers above Tg and have high dielectric breakdown strength in the rubbery state. They can be electrically deformed to various rigid shapes with maximum strain greater than 100% and as high as 400%. The actuation is made bistable by cooling below Tg to preserve the deformation. The dielectric actuation mechanism includes a pair of compliant electrodes in contact with a dielectric elastomer which deforms when a voltage bias is applied between the pair of electrodes. In some of the transducers of the present invention, the dielectric elastomer is also a shape memory polymer. The deformations of such bistable electroactive polymers can be repeated rapidly for numerous cycles.

Abstract: An oscillator device includes a supporting member, a movable member, an elastic supporting member configured to elastically support the supporting member and the movable member around an oscillation axis, and a driving member configured to drive the movable member, wherein the elastic supporting member includes a plurality of springs and at least one spring constant adjusting member configured to couple the plurality of springs with each other.

Abstract: A digital micro-mirror device comprising an array of micro-mirror assemblies positioned on a substrate. Each micro-mirror assembly comprises: a mirror spaced apart from the substrate; a stem supporting the mirror; and first and second electrodes positioned on either side of the stem. The stem is comprised of a resiliently flexible material, such that the mirror can tilt either towards the first electrode or towards the second electrode by an electrostatic force. The digital micro-mirror device may be used in data projectors and the like.

Abstract: A deformable mirror system includes a deformable mirror, which comprises a deformation part with a reflection surface formed thereon, a fixing part configured to fix the deformation part, and a pair of electrodes disposed facing the deformation part and the fixing part, respectively, and a deformable mirror drive device. The deformable mirror drive device includes a drive unit configured to generate drive force so as to deform the deformation part, a capacitance detection unit configured to detect capacitance between the pair of electrodes, a conversion unit configured to convert a target deformation quantity signal into a target capacitance signal on the basis of a relationship between the capacitance and deformation quantity of the deformation part, and a control unit configured to decide drive force generated from the drive unit so as to coincide an output from the conversion unit with an output from the capacitance detection unit.

Abstract: A micro electro mechanical system device includes a fixed electrode that includes a first electrode group; and a movable electrode that moves with respect to the fixed electrode as voltage is applied and includes a second electrode group that opposes the first electrode group. Further, electrodes of at least one among the first electrode group and the second electrode group are connected via a resistor.

Abstract: A movable beam (182a) and a movable beam (182b) each having one end fixed to a frame portion (181) of a mirror substrate (108) are provided inside the frame portion (181). The movable beam (182a) and the movable beam (182b) each having one end fixed to a corresponding to one of two opposite inner sides of the frame portion (181) are aligned at a predetermined distance on the same line in the direction in which the two sides face each other. Each of the movable beam (182a) and the movable beam (182b) has the other end displaceable in the normal line direction of the mirror substrate (108) and therefore has a cantilever structure. A mirror (183) is arranged between the movable beam (182a) and the movable beam (182b) and connected to them via a pair of connectors (109a, 109b).

Abstract: An exemplary digital display device includes a light source, a converging member, a micro-electrical-mechanical system (MEMS) chip, and a projection member. The converging member is for converging the light emitted from the light source onto the MEMS chip. The MEMS chip is for selectively reflecting light transmitted from the converging member to form an alphanumeric character to the projection member. The projection member is for projecting the alphanumeric character onto a projection screen.

Abstract: A three-dimensional space scanner can obtain spatial data by scanning a space around a mobile object not only in the horizontal direction but also in the vertical direction to measure a distance to a surrounding obstacle using a mirror that is driven to rotate as well as to tilt.

Abstract: A micro movable device includes: a micro movable substrate including a micro movable unit, the micro movable unit including a frame section, a movable section, and a coupling section which couples the frame section and the movable section to each other; a support base; a first spacer and a second spacer which are provided between the frame section of the micro movable substrate and the base, the first and second spacers joining the frame section and the base to each other; and a fixation member provided between the frame section of the micro movable substrate and the base, the fixation member including a spacer portion which joins the frame section and the base to each other and an adhesive portion which covers the spacer portion and joins the frame section and the base to each other, the fixation member being provided between the first and second spacers.

Abstract: The present invention relates to a method for producing a micro-mirror actuator and the corresponding actuator. In the method, the actuator is generated from a layered construction made of at least three main layers (101, 103, 107), which are at least sectionally electrically insulated from one another via intermediate layers (102, 104, 106). The layers are structured to form the micro-mirror element and the electrodes, the structuring being performed in such a way that a closed frame (310) is formed from at least the uppermost layer (107) around the inner area of the actuator, which allows a hermetic encapsulation of the inner area by application of a cover plate onto the frame.

Abstract: A deformable mirror formed out of two layers of a nanolaminate foil attached to a stiff substrate is introduced. Deformation is provided by an electrostatic force between two of the layers. The internal stiffness of the structure allows for high-spatial-frequency shapes. The nanolaminate foil of the present invention allows for a high-quality mirror surface. The device achieves high precision in the vertical direction by using foils with accurately controlled thicknesses, but does not require high precision in the lateral dimensions, allowing such mirrors to be fabricated using crude lithography techniques. Such techniques allow structures up to about the meter scale to be fabricated.

Abstract: The present invention is directed to a bi-axial pivoting type actuator having a first movable section, a second movable section supporting the first movable section, and backlining. A first conductive portion and a second conductive portion for independently applying a driving voltage to each of the first movable section and the second movable section are provided on the second movable section, in a state of being split by isolation trenches and being stabilized by the backlining provided under the second movable section. By providing such backlining, mutual stabilization of the first conductive portion and the second conductive portion in an electrically isolated state, and simplification of the production steps for the actuator are realized. By providing a mirror on the first conductive portion of the actuator of the present invention as such, it becomes possible to provide a bi-axial pivoting type mirror device through a simple production process.

Abstract: A semiconductor structure provided with an insulation structure in a moving unit is manufactured easily. An optical scanning mirror (semiconductor structure) is formed by processing an SOI substrate consists of a first silicon layer, an oxide film and a second silicon layer. A moving unit, which is supported on a fixed frame through first hinges, is formed on the first silicon layer. The moving unit is divided into a plurality of regions by forming trenches (insulation structure). A supporting member formed of the oxide film and the second silicon layer is formed just below the trenches. The plurality of regions of the moving frame divided by the trenches are joined to the supporting member so that the moving unit is swingable with the supporting member. Thereby, the supporting member is formed by simple etching processes, and thus, mechanical strength of the moving unit is ensured.

Abstract: A micro-movable device includes a frame, a movable section including a body section, and a torsion coupling section for coupling the frame with the movable section to define an axis of oscillation of the movable section, wherein the frame includes a first extending portion and a second extending portion that are spaced apart from each other in a direction parallel to the axis and extend along the body section, and oppose the body section via a gap.

Abstract: Presented herein are systems, methods and devices relating to miniature actuatable platform systems. According to one embodiment, the systems, methods, and devices relate to controllably actuated miniature platform assemblies including a miniature mirror.

Abstract: An actuator using a piezoelectric element and a method of driving the same. The actuator includes at least one piezoelectric cell moving by displacement according to an input voltage, at least one piezoelectric sensor sensing the displacement of the at least one piezoelectric cell, an error detector detecting an error in the at least one piezoelectric sensor, and a feedback signal generator generating a feedback signal corresponding to the error, thereby performing micromirror driving and sensing.

Abstract: Disclosed are several embodiments of a micro-electro-mechanical systems (MEMS) mirror and a mirror scanner employing the same. An optical scanning unit employing such mirror scanner and an image forming apparatus including the optical scanning unit are also disclosed. The MEMS mirror may include a movable unit, which may in turn include a mirror portion and a magnet frame portion. The mirror portion may have mirror surfaces on the face surface(s) thereof. The magnet frame portion may include an opening into which a magnet is received. The MEMS mirror may also include a first fixing end and a second fixing end, to which the moving unit may be elastically supported by one or more elastic members that allows oscillating or pivoting movement of the moving unit.

Abstract: A scanning system, including a main housing, and at least one optical wedge (12) rotatable about a shaft means (40) located within the main housing (26), wherein a laser beam having an optical axis and incident on the optical wedge (12), is refracted at least once by the wedge; characterized in that the shaft means (40) passes through the center of the at least one wedge (12) and that the optical axis of the incident laser beam is substantially parallel to, but laterally offset from, the shaft means (40).

Abstract: A high-fill-factor and large-aperture tip-tilt micromirror array is disclosed. Electrothermal actuation can be used to obtain a large scan range, and the actuation engine can be hidden underneath the mirror plate for high fill factor. In one embodiment, inverted-series-connected (ISC) bimorph actuators can be used to achieve tilt and piston scanning. Embodiments can be used to implement optical phased array technology for steering active and passive electro-optical systems based on MEMS mirrors.

Abstract: Provided are an image processing device, the operating speed of which is increased by reducing mirror bounce, a photographing apparatus having the same, and a photographing method. The image processing device includes a mirror disposed to revolve with respect to a shaft, a first guide unit disposed in a path of revolution of the mirror to lessen vibration of the mirror when the mirror revolves, and a first elastic unit applying predetermined elastic force onto the first guide unit while being engaged with the first guide unit.

Abstract: A detection means (52) detects optimum driving voltages of a mirror device. A correction means (53) corrects driving voltage values in a table (54b) based on the optimum driving voltages. This makes it possible to drive the mirror to an optimum pivot angle even when the optimum pivot angle of the mirror changes due to, e.g., mirror drift or a change in the environment such as temperature.

Abstract: A vibrating mirror element includes a base member, a substrate made of metal, integrally formed with a mirror portion, a movable portion swingably supporting the mirror portion from both sides and functioning as a lower electrode, and a mounting portion supporting the movable portion and mounted on the base member, a piezoelectric film provided on the movable portion of the substrate and vibrating the mirror portion by application of a periodic voltage, and an upper electrode provided on the piezoelectric film.

Abstract: An optical element holder is provided with a holding frame having a side surface provided spaced apart by a specific distance from an end portion of the correction lens in a longitudinal direction by deeming a light scanning direction as the longitudinal direction and holding the correction lens so as to cover the correction lens except for at least an incident portion and an exiting portion of light, and a pushing member that pushes the correction lens toward the holding frame, so that displacement in the light scanning direction due to heat of the optical element is lessened.

Abstract: When a light intensity upon a perturbation is detected, an error calculation/correction unit (85) in a control unit (8) corrects and updates the above-described initial manipulated variables based on perturbation manipulated variables and manipulated variables, i.e., operation manipulated variables to obtain the maximum light intensity from the light intensity value at each perturbation manipulated variable, thereby adjusting the tilt angle of a mirror. More specifically, assuming that the time series data of an acquired output light intensity can be approximated to a cosine function, the error calculation/correction unit (85) calculates a phase difference ? between the cosine function and a sine or cosine function used to set x- and y-axis perturbation patterns for a circular trajectory perturbation. Manipulated variables at coordinates defined by the phase difference ? and polar coordinates of a radius voltage to perturb the mirror are calculated.

Abstract: An optical deflector includes a mirror having a reflective plane; a torsion bar extending outwardly from a side of said mirror; a support surrounding said mirror; a piezoelectric cantilever including a supporting body and a piezoelectric body formed on the supporting body, one end of said piezoelectric cantilever being connected to said torsion bar, the other end of the piezoelectric cantilever being connected to said support, said piezoelectric cantilever, upon application of a driving voltage to the piezoelectric body, exhibiting a bending deformation due to piezoelectricity so as to rotate said torsion bar, thereby rotarily driving said mirror through said torsion bar; and an impact attenuator connected to said support, the impact attenuator being disposed in a gap between said mirror and said support.

Abstract: An actuator to drive a mirror of a holographic information storing apparatus, the actuator including: piezoelectric cells; support members mounted on the piezoelectric cells; a hinge member mounted on the support member; and a post mounted on the hinge member, to support the mirror. The hinge member includes a bar disposed parallel to a rotation axis of the mirror, and a curved portion that extends from the bar.

Abstract: A tilt mirror is disclosed. The tilt mirror can include: a reflection portion, which may reflect incident light; a first cantilever, which may be formed on either end of the reflection portion, and which may generate a stress in one direction; a second cantilever, which may be formed on either end of the reflection portion beside the first cantilever, and which may generate a stress in the other direction; and a connector portion, which may connect the reflection portion with one end of the first cantilever and with one end of the second cantilever such that the stress generated in the one direction and the stress generated in the other direction are transferred to the reflection portion. The tilt mirror provides a simple composition that can be utilized to alter the path for rays of light.

Abstract: A piezoelectric mirror device (11) comprises a frame portion (12) having a centrally located opening (13), a mirror portion (14) positioned at the opening (13), a pair of mirror support portions (15) adapted to support the mirror portion (14) rotatably relative the frame portion (12) and a pair of drive portions (16) that is a multilayer structure of lower electrodes (17), piezoelectric element (18) and an upper electrode (19). The mirror support portions (15) are formed of a material having a Young's modulus of up to 160 GPa, and the frame portion (12) includes a cutout (13a) at a part of a site wherein there are the drive portions (16) positioned. The cutout (13a) is in contact with the opening (13).

Abstract: A mirror drive apparatus includes: a movable unit including a mirror used to switch an optical path in an imaging apparatus; a drive mechanism capable of switching the movable unit between a first and second attitudes by pivoting the movable unit around a predetermined pivotal axis; an elastic member and a locking mechanism provided on one side of the pivotal axis, the elastic member producing an urging force for switching the movable unit from the first attitude to the second attitude, the locking mechanism capable of maintaining the first attitude of the movable unit on which the urging force acts and releasing the movable unit; and a toggle mechanism provided on the other side of the pivotal axis and capable of switching the movable unit between the first attitude and the second attitude by urging the movable unit so that the movable unit takes the first or second attitude.

Abstract: The present invention provides a mirror device, comprising: a plurality of deflectable mirrors; an elastic member for deflectably supporting the mirror; a drive electrode for driving the mirror; a control circuit for giving electric charge to the drive electrode and controlling the deflecting direction of the mirror; and a substrate on which the drive electrode and the elastic member, wherein the drive electrode is placed within an area on the substrate the mirror is projected on, has an outer form constituted by sides approximately in parallel to the outer peripheral lines of the present mirror and by sides approximately parallel to the deflection axis of the present mirror, or a form obtained by dividing the aforementioned outer form into a plurality thereof, and also fills the role of a stopper for regulating the deflection angle of the mirror.

Abstract: A positioning unit is configured to position an optical element in a barrel, and includes a holder configured to hold the optical element, a first intermediate plate mounted with the holder, a second intermediate plate configured to support the first intermediate plate, a plurality of drivers each configured to drive the second intermediate plate with respect to a plurality of axes, and each fixed inside of the barrel, and a positioning part configured to position the first intermediate plate relative to the second intermediate plate, wherein the second intermediate plate couples ends of the plurality of drivers with one another.

Abstract: A mirror driving circuit applies a voltage to drive a mirror and switches an optical path of light output from a channel of an input port to a channel of an output port. The mirror driving circuit includes an offset-voltage applying unit that applies an offset voltage to the mirror, an applied-voltage determining unit that determines an applied voltage to be applied to the mirror based on a relation between the channel of the input port and the channel of the output port forming a path of the light, and a voltage applying unit that applies to the mirror a remaining voltage obtained by subtracting the offset voltage from the applied voltage.

Abstract: An electrode includes a fixed electrode and a movable electrode. The electrode drives a mirror disposed on the side of the movable electrode by generating electrostatic force between the fixed electrode and the movable electrode when voltage is applied. The fixed electrode and the movable electrode are formed so that a distance between the fixed electrode and the movable electrode increases as an overlapping area between the fixed electrode and the movable electrode increases.

Abstract: An optical scanning unit includes: a light source configured to emit a light beam; a lens arranged so that the light beam emitted from the light source passes therethrough; a rotatable deflector configured to deflect the light beam coming from the lens, the deflected light beam being guided to a light receiving member; a movable lens holder configured to hold the lens, the lens holder being provided in a space between the light source and the deflector; a support member having a first face located on a first side thereof, the first face facing toward a vertically-downward direction and extending in a direction substantially parallel to a reference-axis defined between the light source and the deflector, there also being a second face located on a second side, the second face being arranged opposite to the first face; and a force-transferring member configured to transfer a force to the lens holder for moving the lens holder along the first face of the support member, the force being applied to the force-trans

Abstract: An optical deflection device for a display application includes a semiconductor substrate comprising an upper surface region defining an upper surface plane. The optical deflection device also includes one or more electrode devices provided overlying the upper surface region and a hinge device including a silicon material and coupled to the upper surface region at a predetermined height above the upper surface plane. The optical deflection device further comprises a plurality of landing pads including a silicon material and coupled to the upper surface region at the predetermined height from the upper surface plane and a mirror structure. The mirror structure includes a post portion coupled to the hinge device and a mirror plate portion coupled to the post portion.

Abstract: A micro movable element including a movable portion; first and second driving electrodes; first and second conductor portions electrically connected to the first and second driving electrodes, respectively; an intermediate insulating portion disposed between the first conductor portion and the second conductor portion; and a partly laminated structure portion including the first conductor portion, the intermediate insulating portion and the second conductor portion, wherein the first conductor portion has an opposed face making contact with the intermediate insulating portion, a side face adjacent to the opposed face and an edge portion forming the boundary between the opposed face and the side face, part of the edge portion opposed to the second conductor portion is covered with an insulating film, and parts of the first and second driving electrodes are not covered with an insulating film.

Abstract: A deformable mirror system includes a deformable mirror, which comprises a deformation part with a reflection surface formed thereon, a fixing part configured to fix the deformation part, and a pair of electrodes disposed facing the deformation part and the fixing part, respectively, and a deformable mirror drive device. The deformable mirror drive device includes a drive unit configured to generate drive force so as to deform the deformation part, a capacitance detection unit configured to detect capacitance between the pair of electrodes, a conversion unit configured to convert a target deformation quantity signal into a target capacitance signal on the basis of a relationship between the capacitance and deformation quantity of the deformation part, and a control unit configured to decide drive force generated from the drive unit so as to coincide an output from the conversion unit with an output from the capacitance detection unit.