Abstract: An optical device is provided for projecting a light beam. The device comprises a first planar reflector movable about a first axis is disposed in a path of a focused light beam for deflecting the incident light beam; a concave reflective surface fixed in position located in the path of the deflected light beam, has a circular shape extending along at least one of its axis and is spaced apart from the planar reflector by a distance which is approximately equal to the radius of that circular shape; and a second planar reflector moveable about a second axis located in a plane substantially vertical to a plane comprising the first axis and wherein the second planar reflector is positioned in the path of the light reflected by the concave reflective surface such that the light beam is projected onto a target plane with a substantially flat field of focus.

Abstract: A MEMS arrangement is provided that has a top plane containing a rotatable element such as a mirror. There is a middle support frame plane, and a lower electrical substrate plane. The rotatable element is supported by a support frame formed in the middle support frame plane so as to be rotatable with respect to the frame in a first axis of rotation. The frame is mounted so as to be rotatable with respect to a second axis of rotation. Rotation in the first axis of rotation is substantially independent of rotation in the second axis of rotation.

Abstract: An image display apparatus that displays an image by scanning of coherent light includes: a light source portion that emits the coherent light; a scanning portion that scans the coherent light; a concave reflection portion having a concave surface from which the coherent light is reflected; and an incident position changing unit that changes an incident position of the coherent light onto the concave surface in a curvature direction of the concave surface.

Abstract: A micro electro mechanical device includes an inner frame provided with a movable part and an outer frame provided in a circumference of the inner frame. The outer frame has a fixing part fixed by a joining material. A first torsion bar is provided between the outer frame and the inner frame so as to swingably support the inner frame on the outer frame. A first opening is formed in the outer frame in a vicinity of the first torsion bar. The first opening is positioned between the fixing part of the outer frame and the first torsion bar.

Abstract: When a light intensity upon a perturbation is detected, an error calculation/correction unit (85) in a control unit (8) corrects and updates the above-described initial manipulated variables based on perturbation manipulated variables and manipulated variables, i.e., operation manipulated variables to obtain the maximum light intensity from the light intensity value at each perturbation manipulated variable, thereby adjusting the tilt angle of a mirror. More specifically, assuming that the time series data of an acquired output light intensity can be approximated to a cosine function, the error calculation/correction unit (85) calculates a phase difference ? between the cosine function and a sine or cosine function used to set x- and y-axis perturbation patterns for a circular trajectory perturbation. Manipulated variables at coordinates defined by the phase difference ? and polar coordinates of a radius voltage to perturb the mirror are calculated.

Abstract: Etendue maintaining polarization switching occurs, according to various embodiments, with a mirror that quickly transitions between two positions. Light having uniform polarization is transmitted to the mirror. Light reflected off of the mirror in one of the two positions has its polarization changed, whereas light reflected off of the mirror in the other of the two positions has its polarization maintained. Thereafter, the polarization-changed light and the polarization-maintained light easily may be recombined in an entendue-maintaining manner. Because the recombined light includes two different polarization states, stereoscopic images may be generated.

Abstract: In some aspects, the present disclosure is directed to, among other things, a device. The device may include a mirror with a first material and a pivoting system with a second material. The fracture toughness of the second material may be at least 20 M-Pa(m1/2). The pivoting system may be configured to pivot the mirror around an axis.

Abstract: In order to keep the entire unit compact e.g. in a laser inscribing unit in spite of the laser beam impacting the card to be inscribed in an orthogonal manner a relatively large amount of beam deflections is necessary partially through mirrors that are fixated relative to one another. In order to minimize the assembly and adjustment complexity plural beam deflections are caused subsequent to one another through a prism element where the beam deflections are implemented through particular reflection surfaces. The prism element is received in a prism support which is configured to be pivoted and rotated in its entirety for assembly and adjustment purposes.

Abstract: The mirror swing range control device is capable of reducing a production cost of the control device and precisely adjusting a swing range of a mirror section.

Abstract: An optical reflection device includes a flexible substrate, an elastic portion connected with an end of the flexible substrate, an optical reflector coupled with the flexible substrate via the elastic portion, a first electrode layer provided on the flexible substrate, and a piezoelectric layer provided on the first electrode layer. The optical reflection device may have a small size.

Abstract: A method for creating a pixel image in a two-dimensional display coordinate system from sampled data derived from a collector of a scanned beam imager adapted to transmit a beam of radiation which traces a trajectory in a two-dimensional acquisition coordinate system. The trajectory contains datum locations in the acquisition coordinate system associated with the sampled data. The method includes receiving the sampled data. The method also includes adjusting a mathematical model of the trajectory based on a function of at least one of rotation, translation, and desired scaling of the model of the trajectory. The method also includes constructing the pixel image in the display coordinate system from the adjusted model of the trajectory.

Abstract: A micro oscillating element includes a frame and an oscillation section connected to the frame via a torsional joining section. The oscillation section includes a movable functional section, an arm section and a first comb-tooth electrode. The arm section extends from the functional section. The first comb-tooth electrode includes first electrode teeth extending from the arm section in a direction intersecting the arm section. The micro oscillating element further includes a second comb-tooth electrode to cooperate with the first comb-tooth electrode for causing the oscillation section to oscillate about an oscillation axis defined by the torsional joining section. The second comb-tooth, electrode includes second electrode teeth extending from the frame in a direction intersecting the arm section.

Abstract: Methods, systems, and apparatus for resetting a micro-mirror devices. In one aspect, a micro-mirror device includes a mirror plate tiltable about a hinge, two electrodes located on different sides of the hinge, a memory storing state data for the electrodes, and a state modifier operable to receive the state data for the electrodes from the memory and, during a reset of the mirror plate, change the state for at least one of the electrodes from the state specified by the state data stored in memory to a different state.

Abstract: A micro-oscillation element includes a base frame, an oscillating portion, and a link portion connecting the base frame and the oscillating portion to each other. The oscillating portion has a movable functional portion, a first driving electrode connected to the movable functional portion, and a weight portion joined to the first driving electrode. The link portion defines an axis of the oscillating motion of the oscillating portion. The second driving electrode, fixed to the base frame, generates driving force for the oscillating motion in cooperation with the first driving electrode.

Abstract: According to the present invention, a stable operation of an actuator is realized. An actuator 1 according to the present invention includes: a movable section 5; a stationary section 10 for supporting the movable section 5; driving electrode portions 8 and 9 for driving the movable section 5; and a repulsion generation section 6 for generating a repulsion acting between the movable section 5 and the stationary section 10. The repulsion generation section 6 is provided at a position of the stationary section 10 opposing the movable section 5. At least a portion of the repulsion generation section 6 opposes an end of the movable section 5 that is located closer to the movable comb electrodes 9 than to hinges 7. By applying the same driving voltage to the movable section 5 and the repulsion generation section 6, a repulsion is generated. The repulsion acts in a direction of suppressing a rotation of the movable section 5 around an axis which is perpendicular to the planar direction of the movable section 5.

Abstract: An image projection system (100) has a laser (102, 104, 106) providing at least one beam (103, 105, 107) to a scan mirror apparatus (130) for scanning the at least one beam (103, 105, 107) in two orthogonal directions (404, 406). The scan mirror (130) includes an oscillating portion (204, 904) disposed contiguous to a frame (202) and includes a reflective portion (218, 918) capable of reflecting the beam (103, 105, 107). Circuitry (500) is provided for measuring the capacitance between interdigitated teeth (212, 214, 912, 914) on the frame (202) and the oscillating portion (204, 904).

Abstract: A digital micromirror projection display system is disclosed in which “off” pixel light is recaptured and recycled. In the disclosed system, a digital micromirror device directs incident light for “on” pixels in the image to be displayed through projection lenses to a projection screen. The digital micromirror device directs incident light for “off” pixels back toward the light source for recapture by a light integrator. Both the incident and projected light can pass through a rear group of projection lenses, with the first projection lens being disposed near the digital micromirror device. A mirror directs the incident light toward the digital micromirror device, and the “off” pixel light from the digital micromirror device toward the light integrator. As a result, “off” pixel light can be recycled without degrading image contrast, in a manner that can place fast projection lenses close to the digital micromirror device to save cost.

Abstract: A control method of stabilizing the oscillation amplitude of a torsion oscillator is described. The method includes the steps of: driving a torsion oscillator at a predetermined frequency with a drive energy level by a control module to generate a scanning angle of the incident light beam, wherein the drive energy level is associated with the predetermined frequency; comparing the scanning angle corresponding to the drive energy level with a designate scanning angle by the control module; and adjusting the drive energy level based on the comparison result until the scanning angle of the torsion oscillator is equal to the designate scanning angle.

Abstract: The invention relates to an apparatus for generating a scannable optical delay for a beam of light and an apparatus for Fourier domain optical coherence tomography having said apparatus for generating a scannable optical delay in its reference arm (15). The light beam is directed to a pivotably driven mirror (10) from where it is reflected to a fixed mirror (12), and from there back retro reflected along the reference arm (5). Lens optics (9) are provided to ensure accurate optical alignment in several pivot positions of the pivotably driven mirror (10).

Abstract: The present invention relates to an exposure device for forming circuit patterns onto a surface of an object. The exposure device includes at least one spatial light modulator which includes a plurality of reflection elements being arranged in a matrix fashion, at least one optical source which supplies exposure light to the reflection elements, and a bias voltage controller which applies a first voltage to the reflection elements, thereby setting the reflection elements to a first state and which does not apply a voltage to the reflection elements, thereby setting the reflection elements to a second state. In addition, the exposure light is delivered to the surface of the object in the first state, and the exposure light is not delivered to the surface of the object in the second state.

Abstract: Disclosed herein is an image projecting apparatus, including: a one-dimension type light modulating device for modulating a light in accordance with image information; a projection optical system; and a light deflecting device for deflecting an image light in a direction approximately perpendicular to an extension direction of a one-dimensional image light emitted from the one-dimensional light modulating device; wherein the light deflecting device is composed of a first light deflecting device arranged between the projection optical system and the one-dimension type light modulating device, and a second light deflecting device arranged on an emission side of the projection optical system; the second light deflecting device is detachably mounted.

Abstract: Provided is a method and system for facilitating use of a plurality of individually controllable elements to modulate the intensity of radiation received at each focusing element of an array of focusing elements to control the intensity of the radiation in the areas on the substrate onto which the focusing elements direct the radiation.

Abstract: A mirror assembly to interact with a beam of radiation of a lithographic apparatus is disclosed. The mirror assembly includes a mirror, a piezo electric actuator, and a mover structure, the mover structure connected to the mirror, an assembly of the mirror and the mover structure being pivotable about a pivot point, the piezo electric actuator having a contacting surface to establish a slip-stick contact with the mover structure.

Abstract: A laser system for ophthalmic surgery includes a laser engine to generate a pulsed laser beam, and an XY scanner, to receive the generated pulsed laser beam, and to output a scanning laser beam, the XY scanner including an X scanner, including two X scanning minors, and a Y scanner, including two Y scanning minors. The XY scanner can modify essentially independently an angle the outputted scanning laser beam makes with an optical axis, and a position at which the outputted scanning laser beam intersects a subsequent reference plane perpendicular to the optical axis.

Abstract: A controllable light angle selecting device (100) is provided. It comprises a fixed light selecting means (110) adapted to transmit light incident thereon within a limited acceptance angle, optically connected to at least one light redirecting means (120) capable of obtaining a variable angular difference between light entering said light redirecting means (120) and light exiting said light redirecting means. A photometer, comprising a controllable light angle selector arranged in the path of light between a light source and a light measuring sensor is also provided.

Abstract: An optical device includes a mass section in a plate shape including a light reflector with light reflectivity, a supporting section for supporting the mass section, a pair of elastic sections with elastic deformability for coupling the mass section to the supporting section in a pivotally movable manner, and a driving unit for pivotally moving the mass section, the driving unit including a magnetic section provided to the mass section, magnetized in a direction perpendicular to a surface of the mass section, a pair of magnetic poles with different polarities, provided in a manner to face each other in a direction perpendicular to a pivotal movement central axis with the magnetic portion intervened on the basis of a top view of the mass section in a non-driven condition, and a magnetic field generator having a coil for generating a magnetic force between the pair of magnetic poles.

Abstract: An actuator 1 according to the present invention includes: a first movable section 5; a second movable section 6 supporting the first movable section 5; and a stationary section 13 supporting the second movable section 6. The second movable section 6 includes: a first conductive portion 6a for applying a first voltage to the first movable section 5; a second conductive portion 6b to which a second voltage is applied; and backlining 15 for stabilizing the first conductive portion 6a and the second conductive portion 6b to each other in an electrically insulated state. The backlining 15 stabilizes the first conductive portion 6a and the second conductive portion 6b from a face of the actuator 1 opposite from the face on which the mirror section 34 is provided.

Abstract: In certain embodiments, a MEMS actuator is provided comprising a frame and a movable structure coupled to the frame. A vertical comb drive is provided between the frame and the movable structure to actuate the movable structure.

Abstract: The present invention provides an electromagnetically actuating optical deflecting elements which can be manufactured out of reduced number of components and are capable of being actuated at lower frequencies and at wider deflecting angles without causing mechanical influences of the metal wiring on beams of the optical deflecting element. For that purpose, the electromagnetically actuating optical deflecting element comprises: a movable part having a light reflecting plane and a coil; a base component having a magnetic field generating means; and a pair of beams which axially support said movable part on to the base component, The movable part is actuated by an electromagnetic force generated by an electric current flowing through the coil and the magnetic field generating means.

Abstract: A mirror actuator includes a base block; a first pivot shaft fixedly attached to the base block; a first pivot portion pivotally supported on the first pivot shaft; a second pivot shaft fixedly attached to the first pivot portion and perpendicularly intersecting with the first pivot shaft; a second pivot portion pivotally supported on the second pivot shaft; and a mirror attached to the second pivot portion. In the above arrangement, the first pivot portion and the second pivot portion respectively have a first bearing portion and a second bearing portion for bearing the first pivot shaft and the second pivot shaft at one position.

Abstract: An optical communications system has a selective block/add capability of an optical channel. An optical beam separator receives and separates an input mixed optical beam into a separated optical channel and a remainder optical beam. A block/add unit receives as an input the separated optical channel and produces as an output a controllably modified separated optical channel. The block/add unit includes a source of an add input optical signal, and a controllable mirror. The controllable mirror is controllable between a first state in which the controllable mirror does not block the path of the separated optical channel, so that the separated optical channel is the output of the block/add unit, and a second state in which the controllable mirror blocks the path of the separated optical channel, and also reflects the add input optical signal as the output of the block/add unit.

Abstract: A wavelength selective switch includes a port array including three or more input and output ports arranged on a first plane in which first and second axes lie along the first axis, a dispersive element to disperse a light beam launched from an input port in a second plane in which the second axis and a third axis lie, a focusing optical element to focus dispersed light beams, and a mirror array to couple a focused light beam to an output port through the elements. The array has a mirror substrate arranged across the second plane. The substrate includes movable mirrors arranged in a line and allowed to be two-dimensionally tilted. The substrate is arranged so that its surface facing the focusing optical element has a tilt angle about the first axis with respect to a third plane in which the third and first axes lie.

Abstract: A vertical comb electro-static actuator for rotating a micro-electro-mechanical micro-mirror device about a tilt axis or rotation. The rotor comb fingers of the comb drive extend from a sub-frame of the micro-mirror, which includes a prestressed layer for bending the rotor comb fingers at an angle to the substrate and mirrored platform, enabling the platform, the hinges, the rotor comb fingers and the stator comb fingers to be formed in the same layer, i.e. the same etching step.

Abstract: An actuator that can be driven at a reduced voltage and manufactured with ease, and a method for manufacturing the same are provided. The actuator includes second supporting portions 31 and 32 secured to a supporting substrate 4 through a spacer, fixed portions 33 and 34 secured to the supporting substrate 4 with no intervention of the spacer, fixed comb electrodes 331 and 341 integrally formed the fixed portions 33 and 34 and meshing with movable comb electrodes 211 and 212 in a spaced-apart relationship, and bridge portions 35 and 36 for connecting the fixed portions 33 and 34 to the second supporting portions 31 and 32.

Abstract: An energy signal processing system (10) includes a first shaft assembly (14) rotatable about an azimuth axis (16), and a second shaft assembly (18) coaxially mounted for rotation about the azimuth axis (16). The first shaft assembly (14) defines a zenith plane (20) inclined with respect to the azimuth axis (16). The system (10) includes an energy signal processing element (22) rotatable about a processing element axis (24) that intersects and is generally perpendicular to the azimuth axis (16), as well as a means for rotating the element (22) about the element axis (24) such that: energy signals travelling substantially along a preselected path axis (12) and impinging the energy signal processing element (22) are processed or deflected substantially along the azimuth axis (16); or vice versa; or energy signals generated by the energy signal processing element (22) are directed substantially along the preselected path axis (12).

Abstract: A method of tilting a micromirror includes providing a substrate, a sloped electrode outwardly from the substrate, and a sloped electrode positioning system outwardly from the substrate. The method also includes applying, by the sloped electrode positioning system, forces sufficient to position the sloped electrode in an orientation that slopes away from the substrate.

Abstract: An actuator that can be driven at a reduced voltage and manufactured with ease, and a method for manufacturing the same are provided. The actuator includes second supporting portions 31 and 32 secured to a supporting substrate 4 through a spacer, fixed portions 33 and 34 secured to the supporting substrate 4 with no intervention of the spacer, fixed comb electrodes 331 and 341 integrally formed the fixed portions 33 and 34 and meshing with movable comb electrodes 211 and 212 in a spaced-apart relationship, and bridge portions 35 and 36 for connecting the fixed portions 33 and 34 to the second supporting portions 31 and 32.

Abstract: A micro mirror device includes a first hinge supported by a substrate, a mirror plate tiltable around the first hinge and having a first set of arms facing the substrate, and a second set of arms on the substrate. The first set of arms and the second set of arms can be interdigitated when the mirror plate is tilted. The micro mirror device includes a first lateral guard on the substrate (or the mirror plate). The first lateral guard can limit movement of the mirror plate to a position in a first direction substantially parallel to an upper surface of the substrate to prevent the first set of arms from contacting the second set of arms when the arms are in the interdigitated position.

Abstract: A multi-layer hidden hinge and actuator design for high fill factor biaxial MEMS mirror array for wavelength selective switches (WSS) based on a silicon-on-insulator (SOI) process with wafer bonding and coarsely aligned orthogonal vertical comb and/or parallel plate actuator. The present invention relates to a micro-mirror in a MEMS linear piano micro-mirror array comprising a micro-mirror layer, a hinge layer and an electrode/substrate layer. The structure is formed by fabricating the layers separately in SOI structure and then bonding them together.

Abstract: An electrostatic actuator comprising: first and second comb arrays of electrodes arranged on a base, the electrodes of the first and second comb arrays being interleaved; a third comb array of electrodes spring mounted over the first and second comb arrays, the electrodes of the third comb array being essentially aligned with the electrodes of the second comb array; means for applying a first voltage to the third comb array and a second voltage to the first and second comb arrays to generate an attractive force acting on the third comb array to move the third comb array toward the second comb array; and, means for applying the first voltage to the second and third comb arrays and the second voltage to the first comb array to generate a repulsive force acting on the third comb array to move the third comb array away from the second comb array.

Abstract: A micro-oscillation element includes a movable main section, a first frame and a second frame, and a first connecting section that connects the movable main section and the first frame and defines a first axis of rotation for a first rotational operation of the movable main section with respect to the first frame. The element further includes a second connecting section that connects the first frame and the second frame and defines a second axis of rotation for a second rotational operation of the first frame and the movable main section with respect to the second frame. A first drive mechanism is provided for generating a driving force for the first rotational operation. A second drive mechanism is provided for generating a driving force for the second rotational operation. The first axis of rotation and the second axis of rotation are not orthogonal.

Abstract: An image display device of the present invention includes two lamps A and B as light sources. A mirror is pivotally moved to supply light from the lamp A, B to an optical system. In the case where the lamp A is used, the mirror is temporarily driven in the direction of lamp B before the lamp A is activated. Thereafter, the mirror is returned to the position where the lamp A is used, and is pressed against a restraining member. Thereby, the mirror is positioned at a proper angle with respect to the light from the lamp A when the lamp A is activated.

Abstract: A micro-movable device includes a frame, a movable section including a body section, and a torsion coupling section for coupling the frame with the movable section to define an axis of oscillation of the movable section, wherein the frame includes a first extending portion and a second extending portion that are spaced apart from each other in a direction parallel to the axis and extend along the body section, and oppose the body section via a gap.

Abstract: An image display apparatus that displays an image through scanning by a plurality of beam lights, includes: a light source section that supplies the beam lights; and a scanning section that subjects to scanning the beam lights coming from the light source section. In the image display apparatus, the light source section is driven for a tone representation using the beam lights each having a light amount that is assigned a weight depending on how many bits are allocated in a range from minimum to maximum, and allocates at least two of the beam lights to at least one higher-order bit in the range.

Abstract: A diffuser-reflector assembly for use with a photographic flash lamp (800) comprises, in one aspect, an elastic base (100) having rigid first inserts (125 and 130), two arms (105 and 110), a shaft (135), a pivot assembly (150), and one or more frames (116, 121) that hold second inserts (115, 120). The diffuser-reflector assembly installs slidably onto the light-emitting end of a flash lamp (800). The second inserts can have various optical properties. They can be specular or diffuse reflectors, color or neutral density filters, or a combination. The frames and inserts can be swung on the arms and independently pivoted over a wide range of angles above the lamp, thereby providing a wide range of lighting effects. The frames and arms are held in place by friction and can be adjusted by manual force. The entire assembly can be made of simple parts that snap together.

Abstract: A wide angle display system, comprising a scanner having at least one reflective surface and an axis of rotation, a dome having a reflective inner surface, the inner surface having an axis of revolution which is coincident with the axis of rotation of the scanner, at least one linear arrangement of light sources producing beams of light. The reflective surface of the scanner reflects the beams of light towards the reflective inner surface of the dome which in turn collimates the beams of light and reflects them towards an observer positioned within the wide angle display system.

Abstract: When a light intensity upon a perturbation is detected, an error calculation/correction unit (85) in a control unit (8) corrects and updates the above-described initial manipulated variables based on perturbation manipulated variables and manipulated variables, i.e., operation manipulated variables to obtain the maximum light intensity from the light intensity value at each perturbation manipulated variable, thereby adjusting the tilt angle of a mirror. More specifically, assuming that the time series data of an acquired output light intensity can be approximated to a cosine function, the error calculation/correction unit (85) calculates a phase difference ? between the cosine function and a sine or cosine function used to set x- and y-axis perturbation patterns for a circular trajectory perturbation. Manipulated variables at coordinates defined by the phase difference ? and polar coordinates of a radius voltage to perturb the mirror are calculated.

Abstract: A micro mirror device includes a first hinge supported by a substrate, a mirror plate tiltable around the first hinge and having a first set of arms facing the substrate, and a second set of arms on the substrate. The first set of arms and the second set of arms can be interdigitated when the mirror plate is tilted. The micro mirror device includes a first lateral guard on the substrate (or the mirror plate). The first lateral guard can limit movement of the mirror plate to a position in a first direction substantially parallel to an upper surface of the substrate to prevent the first set of arms from contacting the second set of arms when the arms are in the interdigitated position.

Abstract: An optical scanning probe is provided and includes an optical scanning element which scans a subject with light, and a signal switching section for switching a drive signal for making the optical scanning element perform optical scanning. The optical scanning element includes a movable portion having a micro mirror which is displaced in a first rotating direction and a second rotating direction, and first and second drivers which apply physical acting forces to the movable portion. The signal switching section has a function for switching a driving preparation signal for attracting the movable portion in either the first rotating direction or the second rotating direction into a scanning drive signal for attracting the movable portion in the first rotating direction and the second rotating direction alternately. The maximum voltage of the driving preparation signal is set value to be higher than the maximum voltage of the scanning drive signal.

Abstract: A mirror control device includes a pivotally supported mirror (230), electrodes (340a-340d) spaced apart from the mirror (230), a driving voltage generation means (401) for generating a driving voltage corresponding to the desired tilt angle of the mirror (230) for each electrode, a bias voltage generation means (402) for generating, as a bias voltage for each electrode, a voltage which causes the tilt angle of the mirror (230) to have the same predetermined value upon being independently applied to each of the electrodes (340a-340d), and an electrode voltage applying means (403) for adding, for each electrode, the bias voltage to the driving voltage and applying the voltage after addition to a corresponding one of the electrodes (340a-340d).