Abstract: When a mirror (230) rotates with a maximum angle, a distance from the rotation center of the mirror (230) to the edge of the mirror (230) along a direction horizontal to an electrode substrate (300) is larger than a distance from a perpendicular, perpendicular to the horizontal direction and extending through the rotation center, to the distal end of an electrode (340a-340d) along the horizontal direction. Even when the mirror (230) rotates to come into contact with the electrode substrate (300), since the electrode (340a-340d) does not exist at a position with which the mirror (230) comes into contact when rotating, the mirror (230) and the electrode (340a-340d) can be prevented from being electrodeposited.

Abstract: A mirror system comprising: a mirror; at least one piezoelectric motor having a coupling surface for coupling the motor to a moveable body; at least one spherical contact surface coupled to the mirror; and a motor mounting frame that holds a piezoelectric motor of the at least one piezoelectric motor and presses the piezoelectric motor coupling surface to a contact surface of the spherical contact surface; wherein the motor is controllable to apply force to the contact surface that rotates the mirror.

Abstract: A multi-layer hidden hinge and actuator design for high fill factor biaxial MEMS mirror array for wavelength selective switches (WSS) based on a silicon-on-insulator (SOI) process with wafer bonding and coarsely aligned orthogonal vertical comb and/or parallel plate actuator. Each micro-mirror in the MEMS linear piano micro-mirror array comprises a micro-mirror layer, a hinge layer and an electrode/substrate layer. Preferably, the roll and tilt electrodes are substantially disposed along the roll axis to provide a high fill factor. The structure is formed by fabricating the layers separately in SOI structure and then bonding them together.

Abstract: A beam-steering system having high positional resolution and fast switching speed is disclosed. Embodiments of the beam-steering system comprise a diffraction limited optical system that includes a reflective imager and two controllably rotatable MEMS elements. The optical system is characterized by a folded optical path, wherein light propagating on the path is incident on each MEMS element more than once. Each MEMS element imparts an optical effect, such as angular change, on the output beam. By virtue of the fact that the optical system is multi-bounce optical system, the optical effect at each MEMS element is multiplied by the number of times the light hits that MEMS element.

Abstract: Equalization device for the optical pathways of parallel optical beams (f1, f2) between two planes (P1, P2), including a plane of reflection. These beams have an impact (A1, A2, B1, B2) with the planes. It comprises parallel mirrors each intercepting one of the beams at a point (O1, O2). Each beam has a first section (f11, f12) between the plane of reflection (P1) and a mirror, and a second section (f12, f22) between the mirror and the other plane (P2). Two mirrors and the beam sections they intercept allow the two points (O1, O2) to be separated by a distance (d?), parallel to a distance (d?) separating two auxiliary beams (f1?, f2?) symmetric to one of the first sections relative to a normal to the plane of reflection at the associated impact, and allow angle (?) of the mirrors with the beams to verify: d?(1?cos 2?)=d?[sin 2?(tg??sin 2?)?cos 2?]? being the angle between the sections and a normal to the plane of reflection at the impact.