Acousto-optic Patents (Class 359/285)
  • Patent number: 11378662
    Abstract: The bi-directional optical integrated circuit device array includes a plurality of bi-directional optical integrated circuit unit devices integrated on a substrate and arranged in two-dimensions. Each of the bi-directional optical integrated circuit unit devices includes a single wavelength laser light source integrated on the substrate, a bi-directional optical device integrated on the substrate and optically connected to the laser light source, and an antenna integrated on the substrate and optically connected to the bi-directional optical device.
    Type: Grant
    Filed: October 3, 2018
    Date of Patent: July 5, 2022
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Dong-jae Shin, Kyoung-ho Ha, Seong-gu Kim, Yong-hwack Shin, Chang-gyun Shin, Dong-sik Shim, Chang-bum Lee, Jung-ho Cha
  • Patent number: 11378863
    Abstract: A system for nonlinear frequency conversion includes an acousto-optic modulator for diffracting a portion of an input laser beam as a first-order beam and transmitting a non-diffracted portion of the input laser beam as a zeroth-order beam. The system also includes a nonlinear crystal arranged to receive and frequency convert each of the zeroth-order and first-order beams to generate two respective frequency-converted laser beams, whereby, when the acousto-optic modulator changes the average-power ratio between the zeroth-order and first-order beams, variations of the heat load in the nonlinear crystal are minimized. Either one of the two frequency-converted laser beams may be used as an output laser beam of the system, while the other one of the two frequency-converted laser beams serves to stabilize the heat load in the nonlinear crystal when the acousto-optic modulator is operated to change the average power in the output laser beam.
    Type: Grant
    Filed: April 15, 2021
    Date of Patent: July 5, 2022
    Assignee: Coherent Kaiserslautern GmbH
    Inventors: Markus Lührmann, Christoph O. Schäfer, Stefan Niedlich, Ralf Knappe
  • Patent number: 11209717
    Abstract: Apparatus and methods for generating controllable, narrow-band radiation at short wavelengths, driven by two colors injected into a structured waveguide. The use of multicolor excitation with the structured waveguide allows the use of very small guided beam diameters, without damaging the waveguide. Reduced guided wave mode area combined with low intensities required to drive wave-mixing frequency conversion allow the use of very compact, high average power, moderate peak intensity femtosecond fiber laser technology to drive useful conversion efficiency of laser light into the deep-UV and vacuum-UV at MHz repetition rates.
    Type: Grant
    Filed: December 14, 2018
    Date of Patent: December 28, 2021
    Assignee: Kapteyn-Murnane Laboratories, Inc.
    Inventors: Sterling J. Backus, Henry C. Kapteyn, David G. Winters
  • Patent number: 11169030
    Abstract: A laser detection system and method of two way communication comprising: a Mach Zehnder interferometer, the Mach Zehnder interferometer comprising: an entry beam splitter for splitting incident light into a first arm, having an arm length L1 and a second arm having an arm length L2; a modulation stage for receiving a modulation signal and applying a phase difference to the second arm, the magnitude of the phase difference depending upon the magnitude of the modulation signal; an exit beam splitter for recombining light from the first arm with light from the second arm to create a first output and a second output; a detection stage comprising a first detector at the first output for detecting intensity modulation caused by interference of the recombined light; and a signal processor communicably connected to both the modulation stage and the detection stage.
    Type: Grant
    Filed: March 6, 2020
    Date of Patent: November 9, 2021
    Assignee: ASTON UNIVERSITY
    Inventor: David Benton
  • Patent number: 11119383
    Abstract: Acousto-optical modulators, such as a SAW modulators, with telescope arrays and superimposed volume gratings for light field generation are disclosed. These devices can employ pixelated demagnification and have layers of output optics, such as reflective gratings and/or arrays of transmissive refractive or diffractive lenses that manipulate the light emitted by the SAW modulator. In other cases, superimposed volume gratings are used, in which pixilation occurs in angle space.
    Type: Grant
    Filed: July 20, 2018
    Date of Patent: September 14, 2021
    Assignee: The Charles Stark Draper Laboratory, Inc.
    Inventors: Steven J. Byrnes, Gregg E. Favalora, Ian Ward Frank, Joseph J. Register, Michael G. Moebius
  • Patent number: 10754223
    Abstract: A system may include a laser source configured to generate a first laser light beam, an atom trap, and a multi-channel acousto-optic modulator (AOM). The multi-channel AOM may include a beamsplitter to split the first laser light beam into a plurality of second laser light beams for the atom trap, a common acousto-optic medium configured to receive the plurality of second laser light beams, and a respective plurality of electrodes coupled to the common acousto-optic medium for each of the second laser light beams. The system may also include a plurality of radio frequency (RF) drivers each configured to generate respective RF drive signals for each of the plurality of electrodes.
    Type: Grant
    Filed: June 22, 2018
    Date of Patent: August 25, 2020
    Assignee: HARRIS CORPORATION
    Inventors: Randall K. Morse, Peter A Wasilousky, Lee M. Burberry, Michael R. Lange, Catheryn D. Logan, Christopher A. Corey
  • Patent number: 10739448
    Abstract: In one general aspect, a non-transitory computer-readable storage medium can be configured to store instructions that when executed cause a processor to perform a process. The process can include producing a segment of a laser signal where the segment of the laser signal has a duration, and producing a first reference signal based on the laser signal. The process can include calculating a first phase deviation corresponding with a first portion of the duration based on the first reference signal, and producing a second reference signal based on the laser signal. The process can include calculating a second phase deviation corresponding with a second portion of the duration based on the second reference signal, and calculating a phase deviation of the segment of the laser signal based on a combination of the first phase deviation and the second phase deviation.
    Type: Grant
    Filed: November 14, 2018
    Date of Patent: August 11, 2020
    Assignee: DSCB Solutions, Inc.
    Inventors: Richard Sebastian, Kendall Belsley
  • Patent number: 10691208
    Abstract: A touchscreen system for generating localised haptic excitations includes a touchscreen panel for measuring force and/or capacitance. The touchscreen system includes one or more first piezoelectric transducers arranged to generate excitations in the touchscreen panel along a first line. The touchscreen system includes one or more second piezoelectric transducers arranged to generate excitations in the touchscreen panel along a second line which is inclined to the first line at an angle. The touchscreen system includes a pressure and/or capacitance sensing module connected to the touchscreen panel and configured to measure a force and/or capacitance from the touchscreen panel.
    Type: Grant
    Filed: April 27, 2018
    Date of Patent: June 23, 2020
    Assignee: Cambridge Touch Technologies Ltd.
    Inventors: Silviu Toma, Babak Bastani
  • Patent number: 10628484
    Abstract: A device includes a coil and magnetic mass movable next to the coil in response to vibrations to generate a back electromotive force signal. An amplifier generates, from the back EMF signal, a vibration signal. A processing device converts the vibration signal to time-frequency domain signal as two-dimensional matrix of frequencies mapped against time slots. Pre-process voiced data of the time-frequency domain signal to generate a reduced-noise signal. Average signal values within a frequency window, and that exist at a first time slot, of the reduced-noise signal to generate a complex frequency coefficient. Shift the frequency window across the frequencies to generate multiple complex frequency coefficients that identify speech energy concentration. Replicate signal values at a fundamental frequency within the voiced data to multiple harmonic frequencies to generate an expanded voice source signal. Combine the speech energy concentration with the expanded voice source signal to recreate original speech.
    Type: Grant
    Filed: May 16, 2018
    Date of Patent: April 21, 2020
    Assignee: Board of Trustees of the University of Illinois
    Inventors: Romit Roy Choudhury, Nirupam Roy
  • Patent number: 10612977
    Abstract: A wavelength calibration apparatus includes a light source configured to deliver a backlight beam characterized by a backlight spectrum. The apparatus includes a gas reference cell configured to absorb light from the backlight beam and transmit an imprinted light beam characterized by an imprinted light spectrum. The apparatus further includes a spectrometer configured to (i) receive the transmitted imprinted light beam from the gas reference cell and to apply a plurality of reference spectral selection factors to spectrally resolve the imprinted light beam into reference indicia groups, (ii) detect a plurality of reference spectral power readings, and (iii) deliver a reference dataset for associating the reference spectral power readings with the reference spectral selection factors. A wavelength calibrator of the apparatus determines a wavelength calibration factor based on a difference between the reference dataset and a standard dataset.
    Type: Grant
    Filed: July 18, 2018
    Date of Patent: April 7, 2020
    Assignee: THE CHARLES STARK DRAPER LABORATORY, INC.
    Inventor: Gilbert D. Feke
  • Patent number: 10424027
    Abstract: A sensing system includes a magnetic induction sensor. The magnetic induction sensor includes an induction coil for measuring a magnetic induction and for providing an output electrical signal representative of at least one component of the magnetic induction. The magnetic induction sensor further includes an electro-optical transducer for converting the electrical signal into an optical signal. The magnetic induction sensor also includes at least one impedance matching circuit electrically connected with an output of the induction coil and electrically connected with an input of the electro-optical transducer. The sensing system further includes at least one fiber optic sensing cable coupled to the magnetic induction sensor that optically communicates optical signals from the magnetic induction sensor.
    Type: Grant
    Filed: November 17, 2015
    Date of Patent: September 24, 2019
    Assignee: Halliburton Energy Services, Inc.
    Inventors: Glenn Andrew Wilson, Yan Wah Michael Chia
  • Patent number: 10175424
    Abstract: A multiple channel fiber pigtailed acousto-optic (AO) device comprises: a first multiple fiber collimator pigtail comprising a plurality of input fibers, a second multiple fiber collimator pigtail comprising a plurality of output fibers, wherein each of the plurality of output fibers is a conjugate of each of the plurality of input fibers, respectively, and an acousto-optic modulator (AOM) disposed between the first multiple fiber collimator pigtail and the second multiple fiber collimator pigtail, wherein the input fibers form input ports providing input beams to the AOM and the output fibers form output ports receiving output beams from the AOM, wherein at least one output fiber of the plurality of output fibers is coupled to an input fiber of the plurality of input fibers.
    Type: Grant
    Filed: May 31, 2016
    Date of Patent: January 8, 2019
    Assignee: Advanced Optowave Corporation
    Inventors: Chun He, Xiaojie Zhao
  • Patent number: 10114268
    Abstract: Provided is an acousto-optic device including an elastic medium; a meta structure formed on a first surface of the elastic medium, and an elastic-wave generating unit which generates an elastic wave in the elastic medium. The meta structure includes a first layer and a second layer that is formed on the first layer. The at least one of the first layer and the second layer includes a predetermined repetitive pattern.
    Type: Grant
    Filed: January 23, 2014
    Date of Patent: October 30, 2018
    Assignees: SAMSUNG ELECTRONICS CO., LTD., AJOU UNIVERSITY INDUSTRY-ACADEMIC COOPERATION FOUNDATION
    Inventors: Seung-hoon Han, Wan-joo Maeng, Won-taek Seo, Hoon Song, Hae-kwan Oh, Kee-keun Lee
  • Patent number: 10097771
    Abstract: Optical apparatus includes an image sensor and objective optics, which are configured to collect and focus optical radiation over a range of wavelengths along a common optical axis toward a plane of the image sensor. A dispersive element is positioned to spread the optical radiation collected by the objective optics so that different wavelengths in the range are focused along different, respective optical axes toward the plane.
    Type: Grant
    Filed: August 11, 2016
    Date of Patent: October 9, 2018
    Assignee: APPLE INC.
    Inventors: Alexander Shpunt, Niv Gilboa, Haim Bezdin
  • Patent number: 10025080
    Abstract: A laser-scanning microscope having an illumination-beam path and a detection-beam path and a microscope objective. A component for generating a plurality of scanning beams from at least one illumination beam is located in the illumination-beam path. A wedge-shaped, light-transmitting first component part provided in the illumination beam path generates spatially offset partial beams, the scanning beams being generated at the first component part by multiple reflections at an at least partially partially-reflecting surface. The microscope has a one-dimensional scanner for moving the scanning beams over a sample in the illumination beam path. The scanning beams have at least partially relative to one another a non-zero angle upstream of the objective in the illumination direction. The scanning beams can intersect at least partially in the objective pupil of the microscope objective.
    Type: Grant
    Filed: March 12, 2015
    Date of Patent: July 17, 2018
    Assignee: Carl Zeiss Microscopy GmbH
    Inventor: Matthias Wald
  • Patent number: 9946081
    Abstract: An apparatus, system and method for microscopy. The apparatus, system and method includes a stage configured to receive an item; a tunable acoustic gradient index of refraction (TAG) lens having a first aspect positioned to image the received item, wherein the first aspect of the TAG lens is configured to have an optical power profile in accordance with an operational frequency of the TAG lens; one or more lenses configured to magnify an image of the received item at a viewing point; and at least one pulsed light source configured to illuminate the received item and to pulse at one or more points within the optical power profile of the TAG lens.
    Type: Grant
    Filed: December 15, 2015
    Date of Patent: April 17, 2018
    Inventor: Craig B. Arnold
  • Patent number: 9829518
    Abstract: A coherent wideband acousto-optic RF spectrum analyzer for processing an input RF signal, having a CW laser providing a first laser beam, a Bragg cell used in a deflection mode with the laser beam incident thereon and receiving the input RF signal, and in response thereto producing multiple diffracted modulated light beams, a Fourier Transform lens with the modulated light beams incident thereon and in response thereto producing optical signal beams producing a Fourier Transform image in an image plane spaced apart from the Fourier Transform lens, and a photosensitive, optically re-writable medium positioned in the image plane with the optical signal beams incident thereon, the medium having an optical distribution pattern to function as a mask to attenuate a selected portion of the RF spectrum of the optical signal beams and produce an attenuated optical beam.
    Type: Grant
    Filed: February 25, 2014
    Date of Patent: November 28, 2017
    Assignee: Loki Systems LLC
    Inventors: William M. Brooks, Frederick N. Magee
  • Patent number: 9784676
    Abstract: A substrate inspection device includes a laser emitting unit, arranged at one side of a transmission device, and configured to emit a laser beam to each substrate to be inspected on the transmission device when the substrate to be inspected is moved to an inspection position; a laser receiving unit, arranged at the other side of the transmission device, and configured to receive the laser beam transmitted through the substrate to be inspected; and a calculation unit, configured to calculate transmissibility of the laser beam relative to the substrate to be inspected based on an intensity of the laser beam emitted by the laser emitting unit and an intensity of the laser beam received by the laser receiving unit, and determine whether a line width of a black matrix in the substrate to be inspected is within a predetermined range of the line width based on the transmissibility.
    Type: Grant
    Filed: June 15, 2015
    Date of Patent: October 10, 2017
    Assignees: BOE TECHNOLOGY GROUP CO., LTD., HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventors: Peng Luo, He Wang, Xin Fang, Jiajia Peng, Xiang Liu
  • Patent number: 9560455
    Abstract: A multi-membrane microphone including an audio processing circuit is disclosed. The membranes are configured to output to a plurality of amplifiers a plurality of sensing signals in response to sound. The amplifiers in turn create amplified signals by amplifying the sensing signals and introduce a plurality of offsets into the amplified signals, respectively. The audio processing circuit includes a controller that sequentially measures the offset for each amplifier a corresponding membrane is inactive and stores the offset. The controller also compensates each amplified signal by the corresponding offset during operation of the multi-membrane microphone.
    Type: Grant
    Filed: June 26, 2015
    Date of Patent: January 31, 2017
    Assignee: STMICROELECTRONICS S.R.L.
    Inventor: Eugenio Miluzzi
  • Patent number: 9477101
    Abstract: An acousto-optic device capable of increasing a range of a diffraction angle of output light by using a nanostructured acousto-optic medium, and an optical scanner, an optical modulator, a two-dimensional/three-dimensional (2D/3D) conversion stereoscopic image display apparatus, and a holographic display apparatus using the acousto-optic device. The acousto-optic device may include a nanostructured acousto-optic medium formed by at least two different mediums repeatedly alternating with each other, wherein at least one of the at least two different mediums includes an acousto-optic medium. The acousto-optic device having the aforementioned structure may increase the range of a diffraction angle of output light.
    Type: Grant
    Filed: January 27, 2012
    Date of Patent: October 25, 2016
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Seung-hoon Han, In-kyeong Yoo, Sang-yoon Lee, Hong-seok Lee, Moon-gyu Han, Sun-kook Kim
  • Patent number: 9378989
    Abstract: The present invention is related to a method and apparatus for cleaning a substrate, in particular a semiconductor substrate such as a silicon wafer. The substrate is placed in a tank containing a cleaning liquid, at an angle with respect to acoustic waves produced in said liquid. The angle corresponds to the angle of transmission, i.e. the angle at which waves are not reflected off the substrate surface. A damping material is provided in the tank, arranged to absorb substantially all waves thus transmitted through the substrate. A significant improvement in terms of cleaning efficiency is obtained by the method of the invention.
    Type: Grant
    Filed: April 23, 2012
    Date of Patent: June 28, 2016
    Assignees: IMEC, Katholieke Universiteit Leuven, KU LEUVEN R&D
    Inventors: Paul Mertens, Steven Brems, Elisabeth Camerotto, Marc Hauptmann
  • Patent number: 9213175
    Abstract: An apparatus, system and method for microscopy. The apparatus, system and method includes a stage configured to receive an item; a tunable acoustic gradient index of refraction (TAG) lens having a first aspect positioned to image the received item, wherein the first aspect of the TAG lens is configured to have an optical power profile in accordance with an operational frequency of the TAG lens; one or more lenses configured to magnify an image of the received item at a viewing point; and at least one pulsed light source configured to illuminate the received item and to pulse at one or more points within the optical power profile of the TAG lens.
    Type: Grant
    Filed: October 29, 2012
    Date of Patent: December 15, 2015
    Inventor: Craig B. Arnold
  • Patent number: 9197969
    Abstract: An optical microphone includes: an acousto-optic medium section having a pair of principal surfaces and at least one lateral surface provided therebetween; a restraint section which is in contact with the at least one lateral surface for preventing a shape change of the acousto-optic medium section; and a light emitting section for emitting a light wave so as to propagate through the acousto-optic medium section between the pair of principal surfaces. The pair of principal surfaces are in contact with an environmental fluid through which an acoustic wave to be detected is propagating and are capable of freely vibrating, and an optical path length variation of a light wave propagating through the acousto-optic medium section, which is caused by the acoustic wave that comes into the acousto-optic medium section from at least one of the pair of principal surfaces and propagates through the acousto-optic medium section, is detected.
    Type: Grant
    Filed: July 25, 2013
    Date of Patent: November 24, 2015
    Assignee: Panasonic Intellectual Property Management Co., Ltd.
    Inventors: Takuya Iwamoto, Kazuo Yokoyama, Masahiko Hashimoto, Ushio Sangawa, Yuriko Kaneko
  • Patent number: 9173039
    Abstract: An optical microphone for detecting an acoustic wave propagating through an environmental fluid by using a light wave, includes: an acoustic wave receiving section having a propagation medium portion through which an acoustic wave propagate and a first support portion for supporting the propagation medium portion; a light source for outputting a light wave so that the light wave passes through the propagation medium portion across the acoustic wave propagating through the propagation medium portion; a light-blocking portion having an edge line for splitting the light wave having passed through the propagation medium portion into a blocked portion and a non-blocked portion; and a photoelectric conversion section for receiving a portion of the light wave having passed through the propagation medium portion which has not been blocked by the light-blocking portion to output an electric signal.
    Type: Grant
    Filed: October 24, 2013
    Date of Patent: October 27, 2015
    Assignee: Panasonic Intellectual Property Management Co., Ltd.
    Inventors: Takuya Iwamoto, Masahiko Hashimoto, Ushio Sangawa, Yuriko Kaneko
  • Patent number: 9069227
    Abstract: The invention is directed to an acousto-optic lens (AOL) and corresponding method. The AOL of the invention comprises a first and second acousto-optic deflector, each being arranged to support a respective acoustic wave. The AOL includes a driver for synthesizing first and second drive signals for the respective first and second acousto-optic deflectors. The driver is arranged to synthesize the drive signals so as to be phase-modulated by functions that can be expressed as a Taylor series having one or more coefficients greater than second order. The functions are preferably non-sinusoidal and have sufficient magnitude at the higher orders to effect one or more of fixed aberration correction, dynamic aberration correction and Z-scanning.
    Type: Grant
    Filed: April 13, 2012
    Date of Patent: June 30, 2015
    Assignee: UCL BUSINESS PLC
    Inventors: Paul A. Kirkby, K. M. Naga Srinivas Nadella, R. Angus Silver
  • Patent number: 9030726
    Abstract: A gaming system including an electronic gaming machine (EGM) having a multi-layer display is described. In particular, the EGM can be configured with a display that provides a 3D-like image. An acousto-optical modulator interstitial component can be positioned between two liquid crystal displays to mitigate moiré interference. A piezoelectric transducer can be attached to a glass interstitial component or to a display panel of a multi-layer display in order to control the moiré interference.
    Type: Grant
    Filed: May 25, 2012
    Date of Patent: May 12, 2015
    Assignee: IGT
    Inventors: Chauncey W. Griswold, Stewart Thoeni, Jean Pierre LeGras, Charles W. Johnson
  • Publication number: 20140376078
    Abstract: A scanning optical microscope includes a light source, a light converging optical system, a stage, a scanning unit which displaces an illumination light and the stage relatively, a detecting optical system, and a photodetector. A light modulation element and a relay optical system are disposed on the light converging optical system side of the light source, and a modulated signal having only amplitude changed is input to the light modulation element, and the light modulation element is positioned such that the illumination light emerged from the light modulation element with respect to the modulated signal of a predetermined amplitude coincides with an optical axis of the light converging optical system, and a position of a pupil of the light converging optical system and a position of the light modulation element are conjugate through at least the relay optical system.
    Type: Application
    Filed: June 6, 2014
    Publication date: December 25, 2014
    Inventors: Yoshihiro SHIMADA, Makio UENO, Shingo TAMANO, Naoki HAYASHI, Eiji YOKOI
  • Patent number: 8908725
    Abstract: The invention relates to an external cavity tunable laser. The laser comprises an extracavity collimating lens arranged outside a laser cavity, and a laser output mirror, a laser gain medium, an intracavity collimating lens, an active optical phase modulator and a tunable optical filter all arranged sequentially inside the laser cavity. The laser further comprises an active polarization rotator arranged behind the tunable optical filter, a polarization beam splitter arranged behind the active polarization rotator, a first etalon and a first total reflection mirror arranged in the direction vertical to the optic axis of a laser cavity output lens, a second etalon and a second total reflection mirror arranged in the direction of the optic axis of the laser cavity output lens, and a laser drive and control circuit.
    Type: Grant
    Filed: August 23, 2013
    Date of Patent: December 9, 2014
    Inventor: Peiliang Gao
  • Patent number: 8879138
    Abstract: A surface plasmon polariton modulator capable of locally varying a physical property of a dielectric material to control a surface plasmon polariton. The surface plasmon polariton modulator includes a dielectric layer, including first and second dielectric portions, which is interposed between two metal layers. The second dielectric portion has a refractive index which varies with an electric field, a magnetic field, heat, a sound wave, or a chemical and/or biological operation applied thereto. The surface plasmon polariton modulator is configured to control one of an advancing direction, an intensity, a phase, or the like of a surface plasmon using an electric signal. The surface plasmon polariton modulator can operate as a surface plasmon polariton multiplexer or a surface plasmon polariton demultiplexer.
    Type: Grant
    Filed: January 15, 2013
    Date of Patent: November 4, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Hwansoo Suh, Chang-won Lee, Yeon-sang Park, Jineun Kim
  • Patent number: 8848277
    Abstract: A method and apparatus for protecting the seed laser in a laser produced plasma (LPP) extreme ultraviolet (EUV) light system are disclosed in one embodiment, a Bragg AOM is used as a switch on the beam path from the seed laser to other optical components and ultimately to an irradiation site. Power is applied to the Bragg AOM and pulses from the seed laser are thus deflected onto the desired beam path rather than passing straight through the Bragg AOM. Once the pulses have passed through the Bragg AOM, power to the Bragg AOM ceases, so that any reflections from the irradiation site will pass straight through the Bragg AOM and will not be deflected back to the seed laser. Use of the Bragg AOM rather than components previously used results in lower power consumption and better protection for the seed laser.
    Type: Grant
    Filed: January 9, 2013
    Date of Patent: September 30, 2014
    Assignee: ASML Netherlands B.V.
    Inventors: Richard L. Sandstrom, Jonathan D. Grava
  • Publication number: 20140253891
    Abstract: A lithographic apparatus comprises an alignment system including a tunable narrow pass-band filter configured to receive a broad-band radiation and to filter the broad-band radiation into narrow-band linearly polarized radiation. The tunable narrow pass-band filter is further configured to modulate an intensity and wavelength of the narrow-band radiation and to provide a plurality of pass-band filters at a same time or nearly the same time. The alignment system further includes a relay and mechanical interface configured to receive the narrow-band radiation and to adjust a profile of the narrow-band radiation based on physical properties of alignment targets on a substrate. The adjusted narrow-band radiation is focused on the alignment targets using a focusing system.
    Type: Application
    Filed: May 19, 2014
    Publication date: September 11, 2014
    Applicants: ASML Holding N.V., ASML Netherlands B.V.
    Inventors: Arie Jeffrey DEN BOEF, Earl William EBERT, JR., Harry SEWELL, Keith William ANDRESEN, Sanjeev Kumar SINGH
  • Patent number: 8831050
    Abstract: A tunable laser, including: a laser resonant cavity; a laser gain medium; an intra-cavity collimating lens; an acousto-optic tunable filter; a device exciting sound waves in an acousto-optic crystal; a radio frequency signal source providing radio frequency energy for the energy transducer and adjusting the oscillation wavelength of the laser resonant cavity by changing radio signal frequency; an optical phase modulator disposed between the intra-cavity collimating lens and the acousto-optic crystal; an optical etalon disposed between the optical phase modulator and the laser gain medium; a wavelength locker disposed at one of zero-order diffraction optical paths of intra-cavity light; a pigtailed collimator coupling laser output light to an optical fiber; a pumping source exciting the laser gain medium; a phase modulator driver for driving the optical phase modulator; and a signal control processing circuit.
    Type: Grant
    Filed: September 28, 2012
    Date of Patent: September 9, 2014
    Assignee: GP Photonics, Inc.
    Inventor: Peiliang Gao
  • Patent number: 8724209
    Abstract: An acousto-optic (AO) device includes an AO interaction crystal for receiving and propagating a light ray along an optical propagation direction (OPD). A piezoelectric transducer is on at least one surface of the AO interaction crystal for receiving an electrical signal and emitting an acoustic wave into the AO interaction crystal. An electrode is on the piezoelectric transducer for coupling the electrical signal to the piezoelectric transducer. The electrode is a patterned electrode that includes a plurality of different transverse edge positions. The plurality of different transverse edge positions span a position range of at least five percent of an average height (Havg) of the electrode.
    Type: Grant
    Filed: December 14, 2011
    Date of Patent: May 13, 2014
    Assignee: Gooch and Housego PLC
    Inventor: Christopher N. Pannell
  • Publication number: 20140092463
    Abstract: A structured illumination apparatus includes a light modulator being disposed in a light path of an exit light flux from a light source, and in which a sonic wave propagation path is arranged in a direction traversing the exit light flux; a driving unit generating a sonic standing wave in the sonic wave propagation path by giving a driving signal for vibrating a medium of the sonic wave propagation path to the light modulator; an illuminating optical system making at least three diffracted lights of the exit light flux passed through the sonic wave propagation path to be interfered with one another, and forming interference fringes of the diffracted lights on an observational object; and a controlling unit controlling a contrast of the interference fringes by modulating a phase of at least one diffracted light among the diffracted lights in a predetermined pitch.
    Type: Application
    Filed: December 3, 2013
    Publication date: April 3, 2014
    Applicant: NIKON CORPORATION
    Inventors: Tatsushi NOMURA, Hisao OSAWA, Naoki FUKUTAKE
  • Patent number: 8687268
    Abstract: Methods, systems and apparatus for manipulating electromagnetic radiation such as laser beams. A method and apparatus for correcting magnification chromatic aberration utilizes one or more dispersive lenses such that long wavelength components are magnified less than short wavelength components. A telecentric relay is preferred to achieve this aim. Further, the use of polarizers to block the undesired zeroth order components of diffraction emanating from acousto-optic deflectors (AODs) is disclosed. Furthermore, specific designs of AOD including narrow transducer AODs which produce a diverging acoustic wave and AODs having two transducers and a selection switch are disclosed.
    Type: Grant
    Filed: September 14, 2012
    Date of Patent: April 1, 2014
    Assignee: UCL Business PLC
    Inventors: Paul Anthony Kirkby, K. M. Naga Srinivas Nadella, Robin Angus Silver
  • Patent number: 8681412
    Abstract: An acousto-optical system is described comprising at least one acousto-optical element having at least one transducer that is attached to a crystal, a driver unit for generating at least one acoustic signal for driving acousto-optical elements modifying light transmitted through the acousto-optical element and comprising at least one digital data processing unit, at least one digital-to-analog converter transforming the digital combination signal into an initial analog driver signal, and an amplifier for amplifying the initial analog driver signal to become said analog electronic driver signal. Further, a microscope and a method of operating the acousto-optical element is are described. Various objectives are achieved like more flexibility, real time compensation for non-linearity and reducing the number, size, costs and energy consumption of electronic components.
    Type: Grant
    Filed: June 1, 2011
    Date of Patent: March 25, 2014
    Assignee: Leica Microsystems CMS GmbH
    Inventors: Bernd Widzgowski, Holger Birk, Volker Seyfried
  • Patent number: 8649646
    Abstract: An apparatus for inspecting a specimen, such as a semiconductor wafer, is provided. The apparatus comprises a laser energy source, such as a deep ultraviolet (DUV) energy source and an optical fiber arrangement. The optical fiber arrangement comprises a core surrounded by a plurality of optical fibers structures used to frequency broaden energy received from the laser energy source into frequency broadened radiation. The frequency broadened radiation is employed as an illumination source for inspecting the specimen. In one aspect, the apparatus comprises a central core and a plurality of structures generally surrounding the central core, the plurality of fibers surround a hollow core fiber filled with a gas at high pressure, a tapered photonic fiber, and/or a spider web photonic crystalline fiber, configured to receive light energy and produce frequency broadened radiation for inspecting the specimen.
    Type: Grant
    Filed: October 24, 2007
    Date of Patent: February 11, 2014
    Assignee: KLA-Tencor Corporation
    Inventor: Richard William Solarz
  • Patent number: 8610996
    Abstract: A tunable multiple laser pulse scanning microscope and a method of operating the same is described, applying two pulsed laser beams with distinct wavelengths incident on a scanning spot of a sample to be imaged simultaneously or at a specific time delay. The microscope comprises at least two pulsed laser light sources emitting laser light of distinct wavelengths, an acousto-optic tunable filter (AOTF) for tuning at least one of the laser pulses, a delay stage provided upstream of the AOTF, and an actuator for moving delay stage depending on the time delay. As a result, the wavelength of at least one type of pulses is tuned, and the delay between at least two pulses of distinct wavelengths is adjusted.
    Type: Grant
    Filed: May 6, 2010
    Date of Patent: December 17, 2013
    Assignee: Leica Microsystems CMS GmbH
    Inventors: Vishnu Vardhan Krishnamachari, William C. Hay
  • Patent number: 8593722
    Abstract: The invention provides a method of laser processing that includes the steps of: generating a sequence of RF pulses corresponding to a sequence of laser pulses having a laser pulse repetition rate, the RF pulses including transmitting RF pulses at transmitting RF frequencies and non-transmitting RF pulses at non-transmitting RF frequencies for causing the sequence of laser pulses to be deflected in respective transmitting and non-transmitting directions, each RF pulse comprising an RF frequency, an RF amplitude and a duration; controlling each RF pulse such that the sequence of RF pulses provides a modulated RF drive signal that is modulated to provide a balanced thermal loading on the acousto-optic deflector; applying the modulated RF drive signal to the acousto-optic deflector; and deflecting at least one laser pulse with the acousto-optic deflector using the modulated RF drive signal to irradiate a selected target position with a predetermined pulse energy.
    Type: Grant
    Filed: July 5, 2012
    Date of Patent: November 26, 2013
    Assignee: Electro Scientific Industries, Inc.
    Inventors: James Cordingley, Dimitry Maltsev
  • Patent number: 8537476
    Abstract: A support system for a vibrating component of an optical assembly that is adjacent to a frame, wherein the component is driven to vibrate along an X-direction of a three-dimensional Cartesian coordinate system. The support system includes a support member connected to the frame. The support system has contact elements that are adjustable for movement into and out of contact with the vibrating component to constrain motion of the vibrating component in the Y-direction and in the Z-direction, without constraining motion of the vibrating component in the X-direction.
    Type: Grant
    Filed: June 6, 2008
    Date of Patent: September 17, 2013
    Assignee: Hinds Instruments Inc.
    Inventors: James C. Mansfield, Baoliang Wang
  • Patent number: 8520288
    Abstract: A method and apparatus for resonant gas phase optical phase modulation is disclosed. The method may include passing a laser beam longitudinally through a tube open to air at both ends and setting air inside the tube into resonant acoustic oscillation, thereby temporally modulating the refractive index of the air, which temporally modulates the optical phase of the laser beam.
    Type: Grant
    Filed: May 24, 2011
    Date of Patent: August 27, 2013
    Assignee: Lockheed Martin Corporation
    Inventor: Brett Castile
  • Publication number: 20130155485
    Abstract: An acousto-optic (AO) device includes an AO interaction crystal for receiving and propagating a light ray along an optical propagation direction (OPD). A piezoelectric transducer is on at least one surface of the AO interaction crystal for receiving an electrical signal and emitting an acoustic wave into the AO interaction crystal. An electrode is on the piezoelectric transducer for coupling the electrical signal to the piezoelectric transducer. The electrode is a patterned electrode that includes a plurality of different transverse edge positions. The plurality of different transverse edge positions span a position range of at least five percent of an average height (Havg) of the electrode.
    Type: Application
    Filed: December 14, 2011
    Publication date: June 20, 2013
    Applicant: GOOCH AND HOUSEGO PLC
    Inventor: CHRISTOPHER N. PANNELL
  • Publication number: 20130146769
    Abstract: An optical pulse generating apparatus that supplies pump light and probe light includes a light source and a modulation unit configured to modulate light emitted from the light source, thereby dividing the light into the pump light and the probe light. The modulation unit is configured such that a frequency for modulating the light is variable. The modulation unit changes a difference between a moment of the pump light incident on an object and a moment of the probe light incident on the object by changing the frequency.
    Type: Application
    Filed: July 26, 2011
    Publication date: June 13, 2013
    Applicant: CANON KABUSHIKI KAISHA
    Inventor: Toshihiko Ouchi
  • Patent number: 8427725
    Abstract: The present invention relates to a light modulating device, comprising a SLM and a pixelated optical element, in which a group of at least two adjacent pixels of the SLM in combination with a corresponding group of pixels in the pixelated optical element form a macropixel, the pixelated optical element being of a type such that its pixels comprise a fixed content, each macropixel being used to represent a numerical value which is manifested physically by the states of the pixels of the SLM and the content of the pixels of the pixelated optical element which form the macropixel.
    Type: Grant
    Filed: October 20, 2008
    Date of Patent: April 23, 2013
    Assignee: Seereal Technologies S.A.
    Inventors: Gerald Futterer, Bo Kroll, Steffen Buschbeck
  • Publication number: 20130083389
    Abstract: A photonic integrated circuit and related method are presented. A photonic integrated circuit comprises a source of radiation, one or more optical amplifiers, a transceiver, and optical waveguides. The optical waveguides couple light between the source of radiation, the one or more optical amplifiers, and the transceiver. The one or more optical amplifiers are configured to increase an optical power of the light up to at least 10 mW. The photonic integrated circuit may be used to perform laser Doppler velocimeter type measurements.
    Type: Application
    Filed: September 27, 2012
    Publication date: April 4, 2013
    Applicant: Optical Air Data Systems, L.L.C.
    Inventor: Optical Air Data Systems, L.L.C.
  • Patent number: 8405898
    Abstract: A device for correcting the wavelength dependence in diffraction-based optical systems in which certain orders of diffraction are filtered is disclosed, comprising at least one diffractive optical spatial light modulator that has controllable structures, and at least one light source for illuminating the spatial light modulator. Associated orders of diffraction are created which, depending on the wavelength, have a lateral chromatic offset relative to the position of the different extensions thereof on a filter plane defined by the focal length of a downstream optically focusing system, the lateral chromatic offset being in relation to the normal line to the surface of the spatial light modulator. The equinumerous orders of diffraction of different wavelengths overlap to an sufficient extent on a predefined filter plane in relation to both the direction and the extension thereof.
    Type: Grant
    Filed: February 29, 2008
    Date of Patent: March 26, 2013
    Assignee: Seereal Technologies S.A.
    Inventor: Jean-Christophe Olaya
  • Patent number: 8379287
    Abstract: A surface plasmon polariton modulator capable of locally varying a physical property of a dielectric material to control a surface plasmon polariton. The surface plasmon polariton modulator includes a dielectric layer, including first and second dielectric portions, which is interposed between two metal layers. The second dielectric portion has a refractive index which varies with an electric field, a magnetic field, heat, a sound wave, or a chemical and/or biological operation applied thereto. The surface plasmon polariton modulator is configured to control one of an advancing direction, an intensity, a phase, or the like of a surface plasmon using an electric signal. The surface plasmon polariton modulator can operate as a surface plasmon polariton multiplexer or a surface plasmon polariton demultiplexer.
    Type: Grant
    Filed: April 20, 2011
    Date of Patent: February 19, 2013
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Hwansoo Suh, Chang Won Lee, Yeonsang Park, Jineun Kim
  • Publication number: 20130032735
    Abstract: A laser apparatus may include: a master oscillator configured to output a pulsed laser beam at a repetition rate; at least one amplifier disposed on a beam path of the pulsed laser beam; at least one optical shutter disposed on the beam path of the pulsed laser beam; and a controller configured to switch the at least one optical shutter.
    Type: Application
    Filed: December 15, 2011
    Publication date: February 7, 2013
    Applicant: GIGAPHOTON INC
    Inventors: Krzysztof Nowak, Osamu Wakabayashi, Hideo Hoshino
  • Patent number: 8369367
    Abstract: A tunable laser system utilizes a frequency shift compensated acousto-optic tunable filter. The wavelength accuracy and stability is achieved by a wavelength locker utilizing two separate intracavity light beams without the need to use beam splitters to significantly reduce the space typically needed by a conventional wavelength locker, and provide more stable operation and easy assembly. The acoustic optical tunable filter includes an acousto-optical crystal with a transducer coupled to the crystal to generate acoustic waves, and an optical mirror to reflect the diffracted light beam back to the acousto-optical medium again such that the frequency shift by two diffractions is compensated. By using different laser gain mediums, acoustic wave driving frequencies and acousto-optical crystals, this invention can be used to make tunable lasers in wide range of optical wavelengths for many different applications.
    Type: Grant
    Filed: March 26, 2009
    Date of Patent: February 5, 2013
    Inventor: Peiliang Gao
  • Publication number: 20120307257
    Abstract: The present invention provides a light source apparatus capable of producing stable oscillation and performing high-speed wavelength sweeping over a desired wavelength range. A swept light source apparatus in which oscillation wavelength is continuously changeable is provided. The apparatus includes, inside a resonator, an optical amplification medium that amplifies light, a first device configured to disperse light emitted from the optical amplification medium and thus produce beams having different wavelengths, a second device functioning as a non-focusing optical element and configured to collimate the beams having different wavelengths resulting from the dispersion by the first device, and a selecting device configured to select a beam having a specific wavelength from among the beams collimated by the second device. The beam having the specific wavelength selected by the selecting device is fed back to the optical amplification medium.
    Type: Application
    Filed: January 27, 2011
    Publication date: December 6, 2012
    Applicant: CANON KABUSHIKI KAISHA
    Inventors: Minoru Yoshii, Eiichi Fujii