Abstract: A system for controlling an acousto-optic device includes an acousto-optic device having an acoustic transducer and configured to store a number of design specific parameters for a parametric tuning algorithm. the system includes a frequency synthesizer coupled to the acousto-optic device and configured to provide a radio frequency tuning signal to the acousto-optic device via the acoustic transducer. A programmable controller is coupled to the acousto-optic device and the frequency synthesizer and wherein is configured to read the design specific parameters and to receive a second number of parameters comprising one or more of environmental parameters, setup specific parameters and user specified performance parameters. the programmable controller is also configured to apply the design specific parameters and the other parameters to the design specific parametric tuning algorithm to select a radio frequency tuning signal that optimizes a user specified performance parameter.

Abstract: The present invention relates to a method for creating a pattern on a workpiece sensitive to electromagnetic radiation. Electromagnetic radiation is emitted onto a computer controlled reticle having a multitude of modulating elements (pixels). The pixels are arranged in said computer controlled reticle according to a digital description. An image of said computer controlled reticle is created on said workpiece, wherein said pixels in said computer controlled reticle are arranged in alternate states along at least a part of one feature edge in order to create a smaller address grid. The invention also relates to an apparatus for creating a pattern on a workpiece. The invention also relates to a semiconducting wafer and a mask.

Abstract: A wavelength selecting apparatus includes a wavelength selecting filter and that a monitoring filter are similar acousto-optic tunable filters; a light source that outputs light having a specific wavelength to the monitoring filter; a light receiving unit that detects a wavelength of light that has passed the monitoring filter; and a control unit that outputs, to the wavelength selecting filter, a control signal having a control frequency to selectively pass light of a desirable wavelength. The light source includes a light emitting element that emits light of a wide wavelength band; and an optical filter having at least two transmission bands through which the light passes to the monitoring filter. The control unit, based on at least two wavelengths of the light output by the light source, outputs a control signal having a control frequency corresponding to the desirable wavelength.

Abstract: An AOTF control apparatus, which applies an RF signal to an AOTF to allow a selected light to pass through the AOTF, includes: a first calculating unit calculating a relationship between a frequency of the RF signal and a wavelength of the selected light based on a frequency of the RF signal that allows a reference light to pass through the AOTF; and a second calculating unit calculating a relationship between a power of the RF signal and an attenuation amount of the selected light based on an input/output power of the reference signal at the input/output of the AOTF.

Abstract: A system and method for the temporal and phase modulation of beams through a series of electronically controlled grating modulators, as acousto optic devices (AODs), is provided where incoming electromagnetic radiation may be advanced or retarded by introducing a time delay of the associated optical phase fronts and implementing a varying chirped wave on an AOD.

Abstract: An optical acoustoelectric transducer having a directivity pattern like a better 8 by receiving by a light-receiving element a reflected fraction of the light from a light-emitting device disposed at the center of a bottom plate that is parallel to a diaphragm, has an opening through which an acoustic wave enters, and is connected to supporting side plates. An optical acoustoelectric transducer having uniform amplitude characteristics in a wide frequency range by mixing by a mixer circuit the outputs of a plurality of optical microphones having diaphragms of mutually different thicknesses so as to make the receiving sensitivity uniform in different frequency ranges. A directional optical acoustoelectric transducer having a small size and wide band characteristics by arranging a plurality of light-emitting devices (LD) and a plurality of light-receiving elements (PD) corresponding to a plurality of diaphragms arranged parallel.

Abstract: An acousto-optic modulator includes a (100), (010) or (001) single crystal silicon acousto-optic interaction medium, and at least one transducer for emitting an acoustic wave attached to the single crystal. The transducer has a first electrode layer disposed on one side and a second electrode layer disposed on its other side. The transducer is aligned to the single crystal so that the direction of acoustic propagation in the silicon crystal is substantially along the (100), (010) or (001) direction. A q-switched laser includes a modulator according to the invention.

Abstract: An optical tunable laser design (100) for the optic telecommunication industry is disclosed in this invention. This new design is economical, reliable, robust and with superior optical performances. The design offers broadband tunability, high output power, narrow laser line-width and high SMSR. And in addition, the tunable laser is distinguishable from conventional designs by the mere facts that there are no moving parts, therefore, making it very reliable, and the tuning method of this invention is non-thermal and non-mechanical making its tuning very fast in the sub-millisecond range. In the manufacturing front, it is low cost and easy to produce. It can be achieved with automation equipment like those used in the IC placement and PC assembly industry, therefore, the products as that disclosed in this invention can be provided with significantly reduced production costs and marketed with very competitive price.

Abstract: A method of processing light includes generating a beam of light and periodically diffracting the beam of light by an acoustooptic cell to produce diffracted light having at least one direction change from the generated light. The method further includes spatially integrating the diffracted light and providing the spatially integrated light to a spatial light modulator.

Abstract: A method of wavelength selection control is disclosed.

Abstract: An apparatus for processing a coherent light pulse comprises a piezoelectric material having an optical interface surface and a surface acoustic wave (SAW) producing device disposed on the piezoelectric material. A coherent light pulse is dithered at a high frequency when it is reflected off of or transmitted through the optical interface surface. The SAW-producing device may be adapted to generate a travelling SAW or a standing SAW on the optical interface surface.

Abstract: An optical tunable filter that includes an tunable acousto-opto deflector (AOD) for deflecting a broad band beam to an expander for projecting the broad band beam to a set of grating for generated a tuned output beam corresponding to a deflection from the AOD and a wavelength resolution of the set of gratings. The AOD further includes an RF driver for tuning the AOD with an RF driving signal. The AOD further comprises a directional tuning acousto-optic crystal. The optical beam expander further includes a first and a second beam expanding prisms that composed of a material suitable for a dense wavelength division multiplexing (DWDM) application over a wavelength range covering S, C and L bands.

Abstract: An apparatus for inspecting a specimen, such as a semiconductor wafer, is provided. The apparatus comprises a laser energy source, such as a deep ultraviolet (DUV) energy source and an optical fiber arrangement. The optical fiber arrangement comprises a core surrounded by a plurality of optical fibers structures used to frequency broaden energy received from the laser energy source into frequency broadened radiation. The frequency broadened radiation is employed as an illumination source for inspecting the specimen. In one aspect, the apparatus comprises a central core and a plurality of structures generally surrounding the central core, the plurality of fibers surround a hollow core fiber filled with a gas at high pressure, a tapered photonic fiber, and/or a spider web photonic crystalline fiber, configured to receive light energy and produce frequency broadened radiation for inspecting the specimen.

Abstract: An acousto-optic (AO) device for generating a highly apodized acoustic wave field includes a piezoelectric transducer crystal for emitting an acoustic wave having a ground electrode disposed on one side of the piezoelectric crystal, and a patterned electrode layer disposed on a side of the piezoelectric crystal opposite the ground electrode. The patterned electrode layer includes a continuous region proximate to its center and a discontinuous region, a pattern in the discontinuous region including a plurality of spaced apart features electrically connected to the continuous region. An AO interaction crystal which receives the acoustic wave is attached to the ground electrode or the patterned electrode layer.

Abstract: This document discusses, among other things, an imaging guidewire that includes one or more optical fibers communicating light along the guidewire. At or near its distal end, one or more blazed or other fiber Bragg gratings (FBGs) directs light to a photoacoustic transducer material that provides ultrasonic imaging energy. Returned ultrasound is sensed by an FBG sensor. A responsive signal is optically communicated to the proximal end of the guidewire, and processed to develop a 2D or 3D image. In one example, the guidewire outer diameter is small enough such that an intravascular catheter can be passed over the guidewire. Techniques for improving ultrasound reception include using a high compliance material, resonating the ultrasound sensing transducer, using an attenuation-reducing coating and/or thickness, and/or using optical wavelength discrimination.

Abstract: A communication system uses a beam of light; a beam expanding lens; a lens for collimating the expanded beam into a column of collimated light; a plurality of acoustic transducers to project acoustic emanations perpendicularly to the column of collimated light, wherein each of the acoustic transducers is placed with respect to the column of collimated light to affect a different region of the column; a lens for collecting the collimated light from the collimating lens and light as affected by the acoustic emanation, wherein the collimating lens focuses the collected collimated light at a focal region; an optical filter at the focal region to separate the light as affected by the transducers from light not so affected; and a detector for detecting the light affected by the acoustic emanations.

Abstract: Digital control of frequency and/or amplitude modulation techniques of an intracavity and/or extracavity AOM (60) facilitate substantially full extinction of a laser beam (90) to prevent unwanted laser energy from impinging a workpiece (80); facilitate laser pulse amplitude stability through closed-loop control of pulse-to-pulse laser energy; facilitate beam-positioning control including, but not limited to, closed-loop control for applications such as alignment error correction, beam walk rectification, or tertiary positioning; and facilitate employment of more than one transducer on an AOM (60) to perform any of the above-listed applications.

Abstract: Acoustic-optic devices which use a crystal of tellurium into which is launched acoustic shear waves by a lithium niobate transducer in accordance with an input RF signal. Tellurium used in the devices exhibits a figure of merit in the range of around 5,000 to 10,000.

Abstract: An acousto-optical tunable filter, comprising planar optical waveguide (2) for propagation of light beam (14), and arranged sequentially along the path of the light radiation: a means for forming a light beam, transducer (16) of acoustic waves suited to generate acoustic wave (15) that is capable of interacting with the beam light waves and cause their diffraction within a predetermined wavelength range, and a means for selecting the diffracted portion of the light beam.

Abstract: The disclosed invention provides a variable lenslet array system that comprises an acousto-optic medium and at least one acoustic wave generator that is positioned adjacent to the acousto-optic medium. The acoustic wave generator is adapted to generate standing acoustic waves into the acousto-optic medium. The wavelength of the resonant acoustic waves is variable in respect to the medium dimensions or can be varied by changing the driving frequency of the wave generator. The standing acoustic waves within the acousto-optic medium change locally the index of refraction. A wave front of a light beam, which crosses these periodic changes of the index of refraction, becomes corrugated and effectively, an array of lenslets is formed.

Abstract: An acousto optic element comprises optically transparent acousto optic medium having light incoming plane, light outgoing plane facing light incoming plane, transducer joining plane, and inclined plane tilted to transducer joining plane and piezoelectric transducer on which two opposing planes i.e., electrode layers and are formed and the transducer is connected to transducer joining plane of acousto optic medium through one of the electrode layers, wherein a deposited layer or a coating layer is formed on at least one of ultrasonic transducer or the acousto optic medium, the layer preventing ultrasonic waves generated by oscillation of ultrasonic transducer leaking onto acousto optic medium as a leakage-ultrasonic wave and propagating there, thus obtaining a high light-fading ratio.

Abstract: Digital control of frequency and/or amplitude modulation techniques of an intracavity and/or extracavity AOM (60) facilitate substantially full extinction of a laser beam (90) to prevent unwanted laser energy from impinging a workpiece (80); facilitate laser pulse amplitude stability through closed-loop control of pulse-to-pulse laser energy; facilitate beam-positioning control including, but not limited to, closed-loop control for applications such as alignment error correction, beam walk rectification, or tertiary positioning; and facilitate employment of more than one transducer on an AOM (60) to perform any of the above-listed applications.

Abstract: A scanning microscope that defines an illumination beam path and a detection beam path, having an objective that is arranged in both the illumination beam path and the detection beam path, is disclosed. The scanning microscope is characterized by an interchangeable module that is also arranged in the illumination beam path and a [sic] detection beam path and that separates the illumination beam path and detection beam path at a fixed angular relationship to one another and comprises at least a first acoustooptical component. Also disclosed is an optical element having at least three ports.

Abstract: A lightweight, compact image projection module, especially for mounting in a housing having a light-transmissive window, is operative for causing selected pixels in a raster pattern to be illuminated to produce an image of high resolution of VGA quality in color. A compact acousto-optical modulator is used to modulate a green laser beam used to produce the image.

Abstract: An extended optical sensor comprises a plurality of equally spaced intensity-based point sensors connected in parallel such that the optical path lengths are the same within the extended sensor enclosure. The input to the extended sensor is a single optical fiber as is the output.

Abstract: A directed beam position sensing system and method includes a beam source configured to emit a beam. A satellite beam generator is aligned to receive the beam and to transmit a main beam portion and to generate a pair of symmetrically positioned satellite beams. A first detector arrangement is positioned to detect a first satellite beam of the pair and to generate a first detector signal. A second detector arrangement is positioned to detect a second satellite beam of the pair, and to generate a second detector signal, wherein the first detector signal and the second detector signal are used to determine a position of the main beam. In accordance with another aspect of the present application, further provided is a second pair or satellite beams, wherein the first pair of satellite beams is generated at one of an x axis or a y axis, and the second pair of satellite beams is generated in the other axis.

Abstract: Electronically agile optical filtering modules for equalizing light propagation differences in at least two spaced optical beam pathways in the modules. The modules use optical polarization rotation devices that may include acousto-optic tunable filter (AOTF) devices, liquid crystal devices, and magneto-optic devices. Such devices may be subject to polarization dispersion losses (PDL) and polarization mode dispersion (PMD) that may be different for when light travel along different light paths through the device. By redirecting light beams back along a different bi-directional path through the devices which may exhibit non-uniform performance across orthogonal polarizations, PDL and PMD may be reduced.

Abstract: An optical arrangement for spatially separating an illumination light beam and a detection light beam includes an acousto-optical component that splits the detection light beam by birefringence. A compensation element is provided that compensates, in a single passage of the detection light beam, for the splitting of the detection light beam.

Abstract: An optical tunable laser design for the optical telecommunication industry is disclosed in this invention. This new design is economical, reliable, robust and with superior optical performances. The design offers broadband tunability, high output power, narrow laser line-width and high SMSR. And in addition, the tunable laser is distinguishable from conventional designs by the mere facts that there are no moving parts, therefore, making it very reliable, and the tuning method of this invention is non-thermal and non-mechanical making its tuning very fast in the sub-millisecond range. In the manufacturing front, it is low cost and easy to produce. It can be achieved with automation equipment like those used in the IC placement and PC assembly industry, therefore, the products as that disclosed in this invention can be provided with significantly reduced production costs and marketed with very competitive price.

Abstract: An improved system for mounting an optical assembly of a photoelastic modulator (PEM) to permit free vibration of the optical assembly without introducing any stress or strain on the optical element. Moreover, the mounting system, which includes a mounting block (50), elastomeric mount (32), support flanges (36, 38), and a mounting rail (40), facilitates accurate and easy assembly of the optical element into its enclosure (26).

Abstract: This invention relates to an acousto-optical tunable filter generally of the kind described in U.S. Pat. No. 6,266,462. More specifically, the invention relates to a filter and its construction, the filter including a support, first and second mounts at spaced locations on the support, an optical fiber having first and second mounted portions secured to the first and second mounts respectively and a filtering section between the first and second mounted portions, a signal generator operable to generate a periodic signal, and an electro-acoustic transducer having a terminal connected to the signal generator and an actuating portion, the electric signal causing vibration of the actuating portion, and the actuating portion being connected to the filtering section so that the vibration generates a transverse wave traveling along the filtering section. The filter has an improved damper to more effectively dampen waves traveling along the filtering section.

Abstract: The present invention provides an ultraviolet acoustooptic device including: a radio-frequency signal input part; a transducer unit for converting a radio-frequency signal into a mechanical vibration; and an acoustooptic medium whose optical characteristic varies according to the mechanical vibration. In the ultraviolet acoustooptic device, light entering the acoustooptic medium is ultraviolet light having a wavelength of 380 nm or shorter, and the acoustooptic medium is formed of an oxide single crystal containing at least boron as a component of its unit cell, a LiNbO3 crystal, or a LiNbO3 crystal doped with MgO. Thus, an acoustooptic device can be obtained in which no laser damage nor optical damage is caused, and an ultraviolet acoustooptic device and an optical imaging apparatus using the same can be provided that do not necessarily require to be water-cooled.

Abstract: A diffraction-optical component for providing a radiation-diffracting grating structure is proposed, comprising a surface wave device including a substrate 43, a surface wave source 47 excitable with an adjustable frequency for producing surface waves on a surface 45 of the substrate 43 and an interaction region 17 of the substrate surface 45 which is provided for the radiation to interact with a grating structure provided by the surface waves produced.

Abstract: A single-ended laser device for locating reflective targets within a given surveillance volume, said apparatus comprising: a body of material excitable to emit electromagnetic radiation at frequencies within a characteristic fluorescence peak, said body having an effective exit aperture; a single retro-reflective member having an optic center and positioned to receive radiation from said body and to redirect said radiation into said surveillance volume through said effective exit aperture of said body, said effective aperture being oppositely disposed on said body from said single member, said single member cooperating with said body to form a field of view within said surveillance volume substantially equal to the solid angle defined by the square of the length of a line joining said optic center of said single member with the center of said effective exit aperture divided into the area of said exit aperture transverse to said line; means for exciting said body to an energy level substantially equal to th

Abstract: An RF power controller arrangement prevents excessive RF power-based thermal loading of an RF signal processing device, such an as acousto-optic modulator, by controllably constraining the product of the average on-duration of a baseband modulation signal and RF input power to realize no more than a prescribed value of RF energy supplied to the modulator.

Abstract: An optical arrangement for directing illumination light to a sample and for directing the detection light proceeding from the sample to a detector has a spectrally selective influencing means in the beam path of the detection light, which influences the polarization properties of the illumination light reflected or scattered from the sample in such a way that a polarizing beam splitter splits the illumination light reflected or scattered from the sample out of the detection light.

Abstract: A system for inspecting a specimen, such as a semiconductor wafer that uses a laser light source for providing a beam of light. The beam is applied to a traveling lens acousto-optic device having an active region and responsive to an RF input signal to selectively generate plural traveling lenses in the active region. The traveling lens acousto-optic device is operative to receive the light beam and generate plural flying spot beams, at the respective focus of each of the generated traveling lenses. A light detector unit, having a plurality of detector sections, each detector section having a plurality of light detectors and at least one multi-stage storage device operative to receive in parallel an input from the plurality of light detectors, is used to generate useable scan data. Information stored in each of the storage devices is serially read out concurrently from the multiple stages.

Abstract: A process for fabricating micro-acousto-optic modulators using microelectronics fabrication technology. First, a set of trenches is etched into a substrate. Then, a transducer material is deposited into these trenches, followed by removal of any transducer material located above the surface of the substrate. Next, a second set of trenches is etched on both sides of the transducer material, between the transducer material and the substrate. Then, an electrode material is deposited into the second set of trenches. Finally, any electrode material located above the surface of the substrate is removed such that the surface of the substrate is co-planar with the electrode and transducer materials.

Abstract: An RF power controller arrangement prevents excessive RF power-based thermal loading of an RF signal processing device, such an as acousto-optic modulator, by controllably constraining the product of the average on-duration of a baseband modulation signal and RF input power to realize no more than a prescribed value of RF energy supplied to the modulator.

Abstract: An optical modulator includes an optical waveguide, a modulating electrode, a conductive layer, an electric signal input section, and connector members. At least a portion of the optical waveguide is made of an electro-optic material. The modulating electrode includes a first conductor line and a second conductor line, which are coupled together electromagnetically, and applies a modulating electric field to a portion of the optical waveguide. The conductive layer forms a first microstrip line with the first conductor line and a second microstrip line with the second conductor line, respectively. Through the electric signal input section, an RF modulating signal is supplied to the modulating electrode. The connector members connect the first and second conductor lines together at both ends. In this optical modulator, the first and second conductor lines function as an odd-mode resonator for the RF modulating signal.

Abstract: An optical tunable laser design for the optical telecommunication industry is disclosed in this invention. This new design is economical, reliable, robust and with superior optical performances. The design offers broadband tunability, high output power, narrow laser line-width and high SMSR. And in addition, the tunable laser is distinguishable from conventional designs by the mere facts that there are no moving parts, therefore, making it very reliable, and the tuning method of this invention is non-thermal and non-mechanical making its tuning very fast in the sub-millisecond range. In the manufacturing front, it is low cost and easy to produce. It can be achieved with automation equipment like those used in the IC placement and PC assembly industry, therefore, the products as that disclosed in this invention can be provided with significantly reduced production costs and marketed with very competitive price.

Abstract: A wavelength converter has a phase modulated periodically modulated structure, where a nonlinear optical coefficient is periodically modulated at a fundamental period &Lgr;0 and the phase of the modulation varies nearly continuously, and the phase variation of the modulation unit structure is repeated at a period &Lgr;ph (>&Lgr;0). A conversion efficiency is made maximum when a phase mismatch amount &Dgr;&bgr; equals 2&pgr;/&Lgr;0±2&pgr;i/&Lgr;ph (i=0, 1, . . . , n, where n is a positive integer), 2&pgr;/&Lgr;0±2&pgr;(2i+1)/&Lgr;ph (i=0, 1, . . . , n), or 2&pgr;/&Lgr;0+2&pgr;i/&Lgr;f (i=m, m+1, . . . .

Abstract: A method and apparatus for accurately and precisely controlling the frequency (wavelength) and periodic frequency modulation of a laser are provided. An ADC (Analog to Digital Converter) is used to sample the output of a modified interferometer used as a delay line discriminator, and quadrature components of the sampled output are generated. An arctangent function (e.g., atan2) is applied to convert the quadrature components to a phase measure that is proportional to the laser frequency. Correlator circuits (e.g., cost-efficient correlator circuits) are provided to extract average frequency, modulation peak deviation, and modulation phase error signals. Control-loop feedback using the extracted signals is used to adjust the average frequency, modulation deviation, and modulation phase to respective set points.

Abstract: The present invention relates to acousto-optic applications of parametric optical apparatuses that use the mechanical energy of elastic oscillations to convert light over a wide range of wavelengths and amplitudes and to generate coherent light.

Abstract: A multi-channel acousto-optic modulator contains an integrated structure for providing active compensation for transient thermal effects. A plurality of electro-thermal elements in the form of resistive strips are interleaved with acoustic wave launching transducers, to which signals are applied for modulating respective acoustic waves launched into an acousto-optic medium. The resistive strips receive electrical signals that controllably introduce respective thermal energy components into the acousto-optic medium adjacent to the signal launch transducers, in a manner that causes the overall spatial distribution of thermal energy in the acousto-optic medium to have a prescribed characteristic. By establishing an thermal gradient characteristic across all the channels of the RF signal processor, and compensating each channel on an individual basis, the invention effectively compensates for time-dependent variations in heating, resulting in a substantially level thermal behavior.

Abstract: An optical arrangement having a light source, preferably a laser, for generating a light beam (1); at least one acoustooptical deflection device (3) for the light beam (1); and a correction device for correcting beam aberrations produced by the deflection device (3) is configured, in the interest of flexible and reliable correction of aberrations occurring because of the deflection, in such a way that the correction device comprises an adaptive optical system (2). Also described is a method for the deflection of light beams (1) with a light source, preferably a laser, for generating a light beam (1); at least one acoustooptical deflection device (3) for the light beam (1); and a correction device for correcting beam aberrations produced by the deflection device (3), in which an adaptive optical system (2) is used as the correction device.

Abstract: An acousto-optical add/drop multiplexer includes an acousto-optical switch including a first optical port coupled to a first polarization splitter, at least one polarization converter coupled between the first polarization splitter and a second polarization splitter, and second and third optical ports coupled to the second splitter. A first circulator is coupled to the first optical port, a mirror is coupled to the second optical port, and a second circulator is coupled to the third optical port. A wavelength selective optical cross-connect may be realized by coupling two such acousto-optical add/drop multiplexers by a single optical fiber to their respective third optical ports.

Abstract: An acousto-micro-optic deflector (AMOD) is provided. This device uses a special combination of an acousto-optic deflector (AOD) and a micro-optic deflector (MOD) to provide agile gimballess beam steering over large angles. The combination is driven such that the entire field of regard of the device is accessible, and continuous contact with the target point is maintained.

Abstract: Acousto-optical filter systems for filtering a light beam by generating undiffracted and diffracted light beams within a birefringent crystal and by suppressing the diffracted beam within or at a face of the crystal. Where the two beams are noncollinear, an aperture provides diffracted beam suppression. Where the two beams have different polarization directions, the diffracted beam is suppressed by a polarization analyzer, internal reflection of each beam at a Brewster angle at the surface, total internal reflection of the diffracted beam at the surface, or a suitably oriented multilayer thin film at the surface. Variation of the acoustic frequency provides tunability of the filter.

Abstract: A first medium having an acousto-optic activity and a second medium are combined to form a net medium having a net acousto-optic activity greater than the acousto-optic activity of the first medium, where the improvement is substantiated via measurements made at specific viewing conditions, and where the second medium can be chosen because it effects at least one of three key properties of the net medium.