Abstract: An iterferometric modulator array is configured to reflect a broad band spectrum of optical wavelengths by arranging a reflector and a partially transparent substrate in a non-parallel relationship.

Abstract: A spatial light modulator includes an array of elements to modulate light in accordance with image data. The modulator has a display panel having first and second surfaces arranged adjacent to the array of elements such that the second surface is directly adjacent the array of elements to allow a viewer to view an image produced by modulation of light The modulator may also include a light source to provide light to the display panel and illumination dots on the first surface of the display panel to reflect light from the source to the array of elements.

Abstract: Improvements in an interferometric modulator that has a cavity defined by two walls.

Abstract: In various embodiments, devices, methods, and systems for adjusting the reflectivity spectrum of a microelectromechanical systems (MEMS) device are described herein. The method comprises depositing a reflectivity modifying layer with the optical cavity of an interferometric modulator, where the reflectivity modifying layer shifts or trims the shape of the interferometric modulator's wavelength reflectivity spectrum relative to the absence of the reflectivity modifying layer.

Abstract: A light guide unit includes a light guide plate and a plurality of light-exiting protrusions. The light guide plate includes a light-entering surface, an upper surface connected to the light-entering surface and a lower surface facing the upper surface. The light-exiting protrusions protrude from the upper surface of the light guide plate to have a cylindrical shape in which a cross-section size thereof increases in a direction away from the upper surface of the light guide plate, the light-exiting protrusions being disposed in a light control area which is turned on or off by a microelectromechanical system shutter. Light guided by the light guide unit to the light control area exits through the light-exiting protrusions.

Abstract: Exemplary embodiments provide a projection-type display apparatus, which can address or realize a reduction in weight and size, a reduction in power consumption, and a reduction in noise, and address or realize a reduction in price, and a control method for the projection-type display apparatus, as well as a control program for the projection-type display apparatus. The projection-type display apparatus includes a solid-state light source that emits light, a mirror device that controls an emitting direction of the incident light to thereby subject the incident light to temporal modulation, and a projecting device that projects the modulated light.

Abstract: Illumination arrangement (3) for lighting a reflective light modulator (4) under oblique light incidence, comprising, one after another along an optical axis (10), a light source (6) with a first axis (19) and a second axis (18), wherein the second axis (18) is arranged at right angles to the first axis (19) and a dimension of the light source (6) in the direction of the first axis (19) is preferably smaller than a dimension of the light source (6) in the direction of the second axis (18), a homogenizer (9) for coupling in the light radiation emitted by the light source (6) having an entrance face (8) and an exit face (11) and an illumination optics (12) for imaging the exit face (11) of the homogenizer (9) onto a light modulator (4) while maintaining the efficiency in such a way that homogeneous lighting of the light modulator can be achieved, wherein it is proposed that the light source (6) is arranged such that it is offset with respect to the homogenizer (9) transversely to the optical axis (10) or that a

Abstract: A micro-mechanical structure system according to the present invention includes: a movable structure 5, at least a portion of the movable structure 5 being formed of a single-crystalline material; an elastic supporting member 10 for supporting the movable structure 5; a stationary electrode section 13, 25 at least partially opposing the movable structure 5; and a base 22 which has a circuit section and to which the stationary electrode 13, 25 is affixed. The stationary electrode section 13, 25 includes a first electrode layer (upper stationary electrode layer) 13 positioned relative to the movable structure 5 and a second electrode layer (lower stationary electrode layer) 25 positioned relative to the base 22, the first electrode layer 13 and the second electrode layer 25 being bonded to each other via adhesion layers 15 and 16.

Abstract: The invention relates to methods and apparatus for forming a display apparatus. According to one aspect of the invention, the display apparatus includes a first substrate having an aperture layer formed thereon, a light guide for guiding light towards the aperture layer, a plurality of MEMS light modulators for modulating light passing through the aperture layer from the light guide, and a spacer substantially surrounding the light guide for keeping the light guide and the first substrate a predetermined distance apart from one another, thereby forming a gap between the first substrate and the light guide. Alternatively or in addition, the first substrate may have a control matrix formed thereon.

Abstract: A dual display is disclosed, including a first electrowetting display device and a second electrowetting display device, and a reflection transmission switching device therebetween, wherein the first electrowetting display device and the second electrowetting display device have a function of displaying images and can be switched to a transmissive mode. The invention further provides a dual display, comprising a first substrate, a second substrate opposite the first substrate, a first patterned electrode and a second patterned electrode disposed on the first substrate, a reflective layer disposed on the first patterned electrode, a first patterned hydrophobic layer over the first patterned electrode, a second patterned hydrophobic layer over the second patterned electrode, a wall defining a pixel of the dual display, a first non-polar liquid disposed on the first patterned hydrophobic layer, and a second non-polar liquid disposed on the second patterned hydrophobic layer.

Abstract: System and method for simultaneous display of multiple images using a single light modulator array. A preferred embodiment comprises a light source that produces a light with desired spectral characteristics, a color filter optically coupled to the light source, and an array of light modulators optically coupled to the color filter. The color filter filters light from the light source to produce light of desired wavelengths and the array of light modulators simultaneously displays multiple images onto a display plane. Portions of the array of light modulators are designed so that each portion can independently display an image and the light source provides needed light to display the image.

Abstract: One embodiment includes a display of interferometric modulators having a configurable resolution characteristic. Selected rows and/or columns are interconnected via a switch. The switch can include a fuse, antifuse, transistor, and the like. Depending on a desired resolution for a display, the switches can be placed in an “open” or “closed” state. Advantageously, using the switches, a display can readily be configured for differing modes of resolution. Furthermore, using the switches, a display can be configured to electrically connect certain rows or columns in the display such that the connected rows or columns can be driven simultaneously by a common voltage source.

Abstract: A micromirror device comprises a plurality of mirrors arranged on a substrate, an elastic hinge for supporting each mirror to be deflectable in a plurality of directions, an address electrode composed of first and second regions that are arranged across the deflection axis of each mirror, and a driving circuit for controlling the mirror to deflect in the directions of the first and the second regions.

Abstract: A multi-state light modulator comprises a first reflector. A first electrode is positioned at a distance from the first reflector. A second reflector is positioned between the first reflector and the first electrode. The second reflector is movable between an undriven position, a first driven position, and a second driven position, each having a corresponding distance from the first reflector. In one embodiment, the three positions correspond to reflecting white light, being non-reflective, and reflecting a selected color of light. Another embodiment is a method of making the light modulator. Another embodiment is a display including the light modulator.

Abstract: Disclosed are white particles for an image display device which includes: (i) a pair of substrates facing each other, provided that at least one of the substrates is transparent; and (ii) the white particles enclosed in a gap between the substrates, with which an image is displayed through migration of the white particles by generating an electric field between the substrates, wherein each of the white particles contains: (a) a core particles containing an inorganic oxide having a refractive index of 2.0 or more in an amount of 80 to 99 weight % based on the total weight of the core particle; and (b) a resin layer having a thickness of 10 to 1000 nm on a surface of the core particle.

Abstract: Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. Each deformable element has a deformation mechanism and an optical portion, the deformation mechanism and the optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic. The deformable modulation element may be a non-metal.

Abstract: Transflective electrowetting display device comprising electrowetting elements, each having at least one reflective area and at least one transmissive area, whereby the surface of the at least one reflective area of the structured reflector is offset in the direction of the viewing side of the display device with respect to the at least one transmissive area of the structured reflector such that a thickness of the second fluid over the at least one transmissive area is greater than the thickness of the second fluid over the at least one reflective area.

Abstract: Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. Each deformable element has a deformation mechanism and an optical portion, the deformation mechanism and the optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic. The deformable modulation element may be a non-metal.

Abstract: The present invention provides a projection apparatus comprising: a light source, a light source control unit for controlling the output of the light source; at least one spatial light modulator for modulating the illumination light from the light source by multiple pixel elements; and an optical system for projecting, onto a screen, the illumination light deflected by the spatial light modulator, wherein: the light source control unit 1) modulates the output of the illumination light from the light source during a modulation period of the spatial light modulator, and 2) non-linearly controls the gray scale of an image projected onto the screen.

Abstract: The 2-channel display system with micro electromechanical systems (MEMS, e.g. DMDs from Texas Instruments) simultaneously generates a right and a left image in two discrete modulation channels, which differ by the polarization of their light beams. More specifically, the invention relates to the chirality (handedness) of MEMS and the geometric problems associated with this handedness in superposition systems. In this application we uncover a solution to superpose the images modulated by identical MEMSs which have their mirror deflection axes oriented parallel to an axis of symmetry of the image raster of the MEMSs.

Abstract: A system and method of reducing color shift in a display includes an interferometric modulator display configured to reflect light from at least one light source and through at least one converging optical element in an optical path from the light source to a viewer via the display. In one embodiment, the converging optical element comprises a diffractive optical element.

Abstract: The spatial light modulator device (SLM) for providing a spatial light pattern which is alterable in response to an electric signal comprises a first modulator element (ME1) and a second modulator element (ME2). The first light beam (LB1) processed by the first modulator element (ME1) and the second light beam (LB2) processed by the second modulator element (ME2) can be superimposed for forming the spatial light pattern. In this way a defect in the first modulator element (ME1) can be compensated a corresponding pixel of the second modulator element (ME2). The spatial light pattern provided by the first modulator element (ME1) and the second modulator element (ME2) are complementary and combine to the desired spatial light pattern. The spatial light modulator device (SLM) may be used in a lithography apparatus (LA) or a display device (DD).

Abstract: The present disclosure provides a lithography apparatus with improved lithography throughput. The lithography apparatus includes a first lens system; a first substrate stage configured to receive a first radiation energy from the first lens system, and designed operable to move a substrate during an exposing process; a second lens system, having a higher resolution than that of the first lens system; and a second substrate stage approximate to the first substrate stage and configured to receive a second radiation energy from the second lens system, and designed operable to receive the substrate from the first substrate stage and move the substrate.

Abstract: A light guide unit includes a light guide plate and a plurality of light-exiting protrusions. The light guide plate includes a light-entering surface, an upper surface connected to the light-entering surface and a lower surface facing the upper surface. The light-exiting protrusions protrude from the upper surface of the light guide plate to have a cylindrical shape in which a cross-section size thereof increases in a direction away from the upper surface of the light guide plate, the light-exiting protrusions being disposed in a light control area which is turned on or off by a microelectromechanical system shutter. Light guided by the light guide unit to the light control area exits through the light-exiting protrusions.

Abstract: The present invention relates to an apparatus for creating a pattern on a workpiece sensitive to radiation, such as a photomask a display panel or a microoptical device. The apparatus may include a source for emitting light flashes, a spatial modulator having modulating elements (pixels), adapted to being illuminated by the radiation, and a projection system creating an image of the modulator on the workpiece. It may further include an electronic data processing and delivery system receiving a digital description of the pattern to be written, converting the pattern to modulator signals, and feeding the signals to the modulator. An electronic control system may be provided to control a trigger signal to compensate for flash-to-flash time jitter in the light source.

Abstract: The present invention provides a projection apparatus, that includes: a light source; a light source control unit for controlling the output of the light source; at least one spatial light modulator for modulating the illumination light from the light source by a plurality of pixel elements; and an optical system for projecting, onto a screen, the illumination light deflected by the spatial light modulator, wherein: the light source control unit performs a gamma (?) correction on input image data by a modulation control of the light source.

Abstract: A display having a plurality of reflective display elements. In one embodiment, the display elements comprise at least one electrode having a plurality of active areas. In one embodiment, at least two of the sizes of the active areas are different with respect to each other, e.g., they are non-uniform in size. The interferometric modulators have a plurality of states, wherein selected ones of the interferometric modulators are configured to be actuated depending differing electrostatic forces in the interferometric modulators. The electrostatic forces in the interferometric modulators are different at least in part due to variations in the sizes of the active areas of the electrodes.

Abstract: The present invention provides an image projection system comprising a spatial light modulator (SLM) comprises a plurality of pixel elements, wherein each of the pixel elements further comprises a deflectable mirror, and at least a first electrode and a second electrode for controlling the deflectable mirror to deflect to different tilt angles to reflect and modulate an illumination light for displaying an image; and a controller for applying a voltage to the second electrode wherein the voltage applied in an initial operation period is different from the voltage applied in an image display period.

Abstract: An optical deflection apparatus including a light source; an optical deflector including first and second oscillators and first and second torsion springs, the first torsion spring connecting the first and second oscillators, the second torsion spring being connected to the second oscillator, and the first and second torsion springs sharing a common torsion axis; and a driver that applies a driving force to the optical deflector; and a driving controller that supplies a driving signal to the driver. The driving controller sets a reference frequency on the basis of a resonant frequency of the optical deflector, calculates a target time at which one of the first and second oscillators makes a predetermined deflection angle on the basis of the reference frequency, and supplies such a driving signal that the one of the first and second oscillators passes through a point corresponding to the predetermined deflection angle at the target time.

Abstract: A method and system for determining specific pixel modulation states of a spatial light modulator (SLM) to print a desired pattern on a substrate are disclosed. The method includes selecting at least one super-pixel in an object plane of the desired pattern, the super-pixel being formed of at least two pixels. At least one edge of the desired pattern crosses a boundary within the super-pixel, the at least one edge being defined by specific slope and position parameters relative to the super-pixel. The method also includes (i) forming an interpolation table to tabulate pre-calculated pixel modulation states and (ii) determining the specific pixel modulation states for each of the pixels in accordance with the interpolation table. Disclosed also are a method and system for providing a spatial light modulator (SLM). The SLM includes a plurality of mirrors structured to form groups of super-pixels.

Abstract: Provided is a dynamic image regulator. The dynamic image regulator is an application device based on a micro-opto-electro-mechanical system (MOEMS). The dynamic image regulator includes a spatial light modulator comprising a plurality of holes and a plurality of controllable movable screens respectively provided at the holes, and transmitting or blocking emitted light for each respective hole; and an amplitude modulator modulating an amplitude of light passing through the spatial light modulator.

Abstract: The present invention relates to an electrowetting system comprising an electrowetting element, a driver stage for applying a voltage to the element, and a switch connecting the electrowetting element to an output of the driver stage. The element comprises a first fluid and a second, immiscible fluid. The instantaneous position of the fluids is dependent on the voltage applied to the element, the voltage being set when the switch is closed. The voltage on the element is substantially maintained during a holding state longer than 70 ms when the switch is open.

Abstract: Disclosed herein are a system and apparatus for operating a device that comprises an array of micromirrors. The system and apparatus are usable for repairing stuck micromirrors of the micromirror array during the operation. The reparation applies, at the ON state, two consecutive refresh voltages to the mirror plates of the micromirrors in the array with the pulses being separated in time longer than the characteristic oscillation time of the micromirrors. The reparation can be applied independently to the micromirrors. Alternatively, the reparation can be incorporated with a bias inversion process.

Abstract: Electrowetting display devices and fabrication methods thereof are presented. The electrowetting display device includes a first substrate and a second substrate with a polar fluid layer and a non-polar fluid layer insolvable to each other and interposed between the first and second substrates. A first transparent electrode is disposed on the first substrate. A second electrode is disposed on the second substrate. A dielectric layer is disposed on the second electrode. A hydrophilic partition wall structure is directly disposed on the dielectric layer defining a plurality of pixel regions. A layer of low surface energy material is disposed on the dielectric layer within each of the pixel region.

Abstract: A package structure and method of packaging for a MEMS device is described. A transparent substrate having an interferometric modulator array formed thereon is shown. A single or dual-layered backplate is joined to the transparent substrate with a seal. The interferometric modulator array may be exposed to the surrounding environment through an opening in either the backplate or the seal.

Abstract: System and method for utilizing two prisms spatially separated is provided. The two prisms spatially separated allows the two prisms typically found in a TIR optical relay system to be spatially separated. In an embodiment, one or more optical relay lenses are interposed between the two prisms. The prism positioned on the object side may be integrated into one or more of the optical relay lenses, thereby further simplifying the optical relay design. In another embodiment, the one or more optical relay lenses may have an optical axis that is offset from the optical axis of incoming light to cause a pupil shift. An aspherical lens may be included to correct for the pupil shift and create a more uniform illumination image.

Abstract: A microelectromechanical system (MEMS) device includes a reflective element that includes at least one stop member. The device also includes an electrode and an aperture that extends at least partially through the electrode. The aperture has a boundary. The device has an electrically nonconductive surface within the aperture or on a portion of the boundary of the aperture. A support structure separates the reflective element from the electrode. The reflective element can be moved between a first position and a second position. The stop member is spaced from the electrically nonconductive surface when the reflective element is in the first position. A portion of the stop member is in contact with the electrically nonconductive surface when the reflective element is in the second position. The reflective element and the electrode are electrically isolated from each other when the reflective element is in the second position.

Abstract: The present invention relates to a display apparatus with pixels, wherein each pixel includes a switching device, a micro-electro-mechanical system (MEMS), and a gray scale control device. The switching device can be connected to a gate line and a data line to output a corresponding data signal in response to a gate signal. The MEMS may be connected to an output electrode of the switching device to transmit or block light in response to the corresponding data signal. The gray scale control device may be coupled to the output electrode of the switching device to control a time interval during which the corresponding data signal is applied to the MEMS. Accordingly, each pixel may display a desired gray scale.

Abstract: Electrowetting display devices are presented. The electrowetting display includes a first substrate and an opposing second substrate with a polar fluid layer and a color non-polar fluid layer interposed therebetween. A first transparent electrode is disposed on the first substrate. A second electrode is disposed on the second substrate. A hydrophilic partition structure is disposed on the second substrate, thereby defining a plurality of sub-pixels. The color electrowetting display further includes an array of color pixel regions. Each pixel region consists of a set of primary color sub-pixel. Each color sub-pixel corresponds to one of different color non-polar fluid layers, and each of the different color non-polar fluid layers is isolated from each other. The colors of non-polar fluid layer in the neighboring sub-pixels are different.

Abstract: A reflective display having a plurality of transparent hemi-beads (120), each having a reflective region (80) surrounding a non-reflective region (82). Each hemi-bead has an associated light absorptive fluid droplet (122) having a normally relaxed shape contacting the non-reflective region, thereby frustrating total internal reflection of light rays at the droplet/hemi-bead interface. An electrical potential is selectably applied across selected droplets. Application of the electrical potential across a droplet deforms the droplet away from the hemi-bead associated with the droplet, such that light rays (158) incident on the non-reflective region are refracted toward substrate (124) and reflected back through hemi-bead (120) in an approximately opposite direction (166); and such that light rays (162) incident on the reflective region are semi-retro-reflected (168). Removal of the electrical potential allows the droplet to resume the relaxed shape.

Abstract: A flat panel display includes a first substrate, a thin film transistor formed on the first substrate, a second substrate facing the first substrate, and a light controller formed on the second substrate, wherein the light controller is electrically connected to the thin film transistor, wherein the light controller includes an opening plate having a plurality of first openings and a light blocker moving horizontally with respect to the opening plate to selectively pass light through the first openings.

Abstract: A controllable reflecting device having an array of bi-axial mirrors that are capable of pivoting in at least four directions is described. At least three primary colored light beams are directed at each of the bi-axial mirror in three of the four pivoting directions, one for each of the primary colored light beams and a single colored beam is reflected and directed toward a projection lens. In the fourth pivoting direction, no color beam is directed to the projection lens and black is projected.

Abstract: A method for providing a user interface, and a Digital Light Processing (DLP) display apparatus using the method. In the DLP display apparatus, a Digital Micro-mirror Device (DMD) reflects light projected on a screen by a light source, and an image sensor detects the light reflected from the DMD, so as to easily provide a user interface for the DLP display apparatus.

Abstract: System and method for reducing failures due to hinge memory in a microdisplay display system. A preferred embodiment includes setting the state of each micromirror in a digital micromirror device based on an image being displayed, recording a usage history for the micromirrors, and providing a sequence of states to each micromirror when the display system is in an inactive mode. The sequence of states provided to a micromirror is based on the micromirror's usage history. The operation of the micromirrors while a display system containing the digital micromirror device is not in active use can help to reverse or eliminate hinge memory, thereby extending the lifetime of the digital micromirror device.

Abstract: A spatial light modulator includes an array of elements to modulate light in accordance with image data. The modulator has a display panel having first and second surfaces arranged adjacent to the array of elements such that the second surface is directly adjacent the array of elements to allow a viewer to view an image produced by modulation of light. The modulator may also include a light source to provide light to the display panel and illumination dots on the first surface of the display panel to reflect light from the source to the array of elements.

Abstract: A microelectromechanical systems device having an electrical interconnect connected to at least one of an electrode and a movable layer within the device. At least a portion of the electrical interconnect is formed from the same material as a movable layer of the device. A thin film, particularly formed of molybdenum, is provided underneath the electrical interconnect. The movable layer preferably comprises aluminum.

Abstract: The present invention provides a projection display system, comprising: plural laser light sources; an illumination optical system for illuminating, in different beam axes, light beams emitted from the individual laser light sources; a deflection mirror device, constituted by plural mirror elements, for modulating the light beams illuminated by the illumination optical system; and a projection optical system for projecting a reflection light from the deflection mirror device illuminated by the light beams.

Abstract: A micromirror of a micromirror array of a spatial light modulator used in display systems comprises a mirror plate attached to a hinge that is supported by two posts formed on a substrate. Also the mirror plate is operable to rotate along a rotation axis that is parallel to but offset from a diagonal of the mirror plate when viewed from the top. An imaginary line connecting the two posts is not parallel to either diagonal of the mirror plate.

Abstract: Improvements in an interferometric modulator that has a cavity defined by two walls.

Abstract: An image projection system implemented with a spatial light modulator (SLM) comprises a plurality of pixel elements each includes a pixel memory wherein said SLM receives inputted bit data representing an image from an external image source to write the inputted data into said pixel memory wherein said SLM further adjusts a smallest period for displaying image represented by a least significant bit (LSB) of the inputted data.