Abstract: In an example, a system includes a digital micromirror device (DMD). The DMD includes a hinge and one or more spring tips coupled to the hinge, where the hinge is configured to tilt toward a raised address electrode. The DMD includes a micromirror including a recessed mirror shelf and a reflective surface, where the recessed mirror shelf is coupled to the hinge, and where the recessed mirror shelf is configured to contact at least one of the one or more spring tips responsive to the hinge tilting toward the raised address electrode.

Abstract: A laser beam scanning (“LBS”) display device is configured with an optical system that includes a laser beam emitter configured to emit a laser beam. The optical system also includes a driver configured to generate a driving signal for controlling a mirror, such as a microelectromechanical systems (“MEMS”) mirror. The optical system also includes a controller configured to generate a driving signal while rejecting a system disturbance response.

Abstract: Disclosed is a display device including a base substrate including a circuit wiring, a semiconductor light emitting element connected to the circuit wiring and emitting light in response to an applied voltage, an envelope layer sealing the semiconductor light emitting element, a transparent protective film stacked on the envelope layer and having flexibility, and a black dye layer coated on the transparent protective film and having a preset transmissivity.

Abstract: Methods, devices and systems that allow three-dimensional printing of material with high resolution are described. One example system includes a two-photon polymerization (TPP) subsystem including a first light source coupled to an optical fiber positioned to deliver a first laser light to a scanning optical device, and an optical projection subsystem comprising a second light source configured to provide a second light to a digital projection device. A dichroic mirror is positioned to receive light corresponding to the first and the second light source, and an objective lens positioned to provide illumination to a target material for 3D printing. The dichroic mirror is configured to allow light from one of the light sources to pass therethrough to the objective lens, and to allow light corresponding to the other light source to be reflected towards the objective lens to enable simultaneous illumination of the target material.

Abstract: A projector for illuminating a target area is presented. The projector includes an array of emitters positioned on a substrate according to a distribution. Each emitter in the array of emitters has a non-circular emission area. Operation of at least a portion of the array of emitters is controlled based in part on emission instructions to emit light. The light from the projector is configured to illuminate the target area. The projector can be part of a depth camera assembly for depth sensing of a local area, or part of an eye tracker for determining a gaze direction for an eye.

Abstract: An optical apparatus includes a deflection unit configured to deflect illumination light from a light source to scan an object and to deflect reflected light from the object, a light guiding unit configured to guide the illumination light from the light source to the deflection unit and to guide the reflected light from the deflection unit to a light receiving element, and an optical system configured to guide the illumination light from the deflection unit to the object and to guide the reflected light from the object to the deflection unit. The optical system includes a front lens unit that consists of lenses located closer to the object than an intermediate image and a rear lens unit that consists of lenses located closer to the deflection unit than the intermediate image. The rear lens unit consists of three or more and five or less positive lenses.

Abstract: An optical scanning system includes one or more Micro-Electro-Mechanical System (MEMS) Micro-Mirror Arrays (MMAs) used to scan a field-of-view (FOV) over a field-of-regard (FOR). The MEMS MMA is configured such that optical radiation from each point in the FOV does not land on or originate from out-of-phase mirror segments and a diffraction limited resolution of the optical system is limited by the size of the entrance pupil and not by the size of individual mirrors.

Abstract: Disclosed are an electrostatically driven comb structure of an MEMS (Micro Electro Mechanical System), a micro-mirror using the same, and a preparation method therefor.

Abstract: A microelectromechanical systems (MEMS) device includes a MEMS die and an electrical circuit electrically connected to the MEMS die. The electrical circuit includes a first capacitor that produces a first output signal based on a signal received from the MEMS die, and a second capacitor that produces a second output signal based on a signal received from the MEMS die. The electrical circuit is configured to determine a nominal capacitance of the MEMS die based on a ratio of the first output signal to the second output signal and a ratio of the capacitances of the first and second capacitors.

Abstract: An intensity spectrum designing unit of a data generating device includes an initial value setting unit that sets a plurality of objects of a first generation of an intensity spectrum function A(?) and a phase spectrum function ?(?), an evaluation value calculating unit that calculates an evaluation value for each of a plurality of objects of an n-th generation, an object selecting unit that selects two or more objects used for generating a plurality of objects of an (n+1)-th generation among objects of the n-th generation on the basis of superiority of the evaluation value, and a next-generation generating unit that generates a plurality of objects of the (n+1)-th generation on the basis of the selected two or more objects. The evaluation value calculating unit, the object selecting unit, and the next-generation generating unit repeat processes while 1 is added to n until a predetermined condition is satisfied.

Abstract: An optical system including a dual-layer microelectromechanical systems (MEMS) device, and methods of fabricating and operating the same are disclosed. Generally, the MEMS device includes a substrate having an upper surface; a top modulating layer including a number of light modulating micro-ribbons, each micro-ribbon supported above and separated from the upper surface of the substrate by spring structures in at least one lower actuating layer; and a mechanism for moving one or more of the micro-ribbons relative to the upper surface and/or each other. The spring structures are operable to enable the light modulating micro-ribbons to move continuously and vertically relative to the upper surface of the substrate while maintaining the micro-ribbons substantially parallel to one another and the upper surface of the substrate. The micro-ribbons can be reflective, transmissive, partially reflective/transmissive, and the device is operable to modulate a phase and/or amplitude of light incident thereon.

Abstract: A microelectromechanical system (MEMS) structure includes at least first and second metal vias. Each of the first and second metal vias includes a respective planar metal layer having a first thickness and a respective post formed from the planar metal layer. The post has a sidewall, and the sidewall has a second thickness greater than 14% of the first thickness.

Abstract: A linear comb drive may include a stator. The linear comb drive may include a rotor. At least one of the stator or the rotor may include a comb with one or more horizontally-extending fingers that have a tooth-shape formed by one or more prongs that extend vertically from the one or more fingers in a plane formed by the one or more fingers.

Abstract: A tactile and proximity sensor includes a light source, a light receiving section, and a cover. The light source emits light. The light receiving section receives light and generates a signal providing a result of the received light. The cover includes an elastic body that deforms under external force and that covers the light source and the light receiving section. The cover includes a reflective section that reflects light between the light source and the light receiving section and a transmission section that allows light to pass through in a first direction from the light source and that allows light to pass through in a second direction from the light receiving section.

Abstract: An example includes: a substrate having a first package surface, having a second package surface opposite the first package surface, and having a die cavity with a depth extending into the first package surface; a semiconductor die having bond pads on a first die surface and having a second die surface opposite the first die surface, the semiconductor die having a die thickness, the second die surface of the semiconductor die mounted in the die cavity; a cover over a portion of the first die surface; conductors coupling the bond pads of the semiconductor die to bond fingers on the first package surface of the substrate; and dielectric material over the conductors, the bond fingers, the bond pads, at least a portion of the first semiconductor die and at least a portion of the cover, wherein the dielectric material extends above the first package surface of the substrate.

Abstract: A display system including a tracking subsystem configured to track one of a pose of a head of a viewer or a pose of an eye of the viewer. The display system further includes an image correction module configured to, for each pixel of at least a subset of pixels of an input image, determine a pixel view angle for the pixel based on the pose of the head or the pose of the eye, determine a corrected pixel value based on an input pixel value of the pixel in the input image and based on the pixel view angle; and provide the corrected pixel value for the pixel in an angle-corrected image corresponding to the input image. The display system further includes a display panel to display the angle-corrected image.

Abstract: An optical filter may include a substrate. The optical filter may include a first mirror and a second mirror. Each of the first mirror and the second mirror may include a plurality of quarterwave stacks. The plurality of quarterwave stacks may include a plurality of layers comprising a first material, a second material, and a third material. The optical filter may include a spacer disposed between the first mirror and the second mirror.

Abstract: Disclosed herein is a control system for a projection system, including a first subtractor receiving an input drive signal and a feedback signal and generating a first difference signal therefrom, the feedback signal being indicative of position of a quasi static micromirror of the projection system. A type-2 compensator receives the first difference signal and generates therefrom a first output signal. A derivative based controller receives the feedback signal and generates therefrom a second output signal. A second subtractor receives the first and second output signals and generates a second difference signal therefrom. The second difference signal serves to control a mirror driver of the projection system. A higher order resonance equalization circuit receives a pre-output signal from an analog front end of the projection system that is indicative of position of the quasi static micromirror, and generates the feedback signal therefrom.

Abstract: A system includes an optical film stack, where the optical film stack includes a substrate and a first inorganic layer on the substrate. The optical film stack also includes a first dielectric layer on the first inorganic layer and a first metal layer on the first dielectric layer. The optical film stack also includes a second dielectric layer on the first metal layer and a second inorganic layer on the second dielectric layer. The optical film stack also includes a second metal layer on the second inorganic layer.

Abstract: A reflective display device includes a layer of pigment material that is divided into a plurality of pixels, the pigment material in each pixel displaying information by reflecting light. The reflective display device further includes a light source embedded in the layer of a pigment material, wherein the light source emits light that is reflected by the pigment material.

Abstract: A layered hinge design providing an improved shock and vibration performance for a two-axis MEMS Micromirror featuring combs drive actuation with independent drive and control for rotating the Micromirror along two-axis of rotation. The two-axis MEMS Micromirror is fabricated using Double SOI wafer as the primary starting material. In addition, a plurality of actuation voltages are driven via conductive layers forming one or more hinges allowing the Micromirror to rotate along the two-axis of rotation. The layered hinge design achieves set angles that are highly stable over time and provides a robust and reliable micromirror that is easy to drive with multiple DC voltages, and moderately insensitive to temperature, shock and vibration.

Abstract: A method of performing a computation using a quantum computer includes generating a plurality of laser pulses used to be individually applied to each of a plurality of trapped ions that are aligned in a first direction, each of the trapped ions having two frequency-separated states defining a qubit, and applying the generated plurality of laser pulses to the plurality of trapped ions to perform simultaneous pair-wise entangling gate operations on the plurality of trapped ions. Generating the plurality of laser pulses includes adjusting an amplitude value and a detuning frequency value of each of the plurality of laser pulses based on values of pair-wise entanglement interaction in the plurality of trapped ions that is to be caused by the plurality of laser pulses.

Abstract: An optical film includes a substrate layer and a plurality of optical layers stacked on the substrate layer. The at least two optical layers have microstructures that complement to each other. The optical layer close to the substrate layer is the first optical layer, and the optical far from the substrate layer is the second optical layer. The refractive index of the first optical layer is smaller than the second optical layer, and the microstructure of the second optical layer has an acute angle. Because of the arrangement of the optical layers, the contrast of light intensity can be reduced, and the uniformity can be improved. The invention also provides a backlight module and a display device including the optical film.

Abstract: A tunable optical metamaterial system includes a tunable optical metamaterial, an actuator module to selectively activate the tunable optical metamaterial, and a control system to selectively control the actuator module. The tunable optical metamaterial includes a substrate composed at least in part of an electroactive polymer (EAP), and an optically active particle array that includes a plurality of optically active elongated members populated spaced apart on the substrate in two or more orientations to form confocal lenses that are optically responsive to the expansion of the substrate. The control module, is configured to control the optical properties of the tunable optical metamaterial by causing the electrical activation of the substrate via the actuator module to selectively expand the substrate in a manner that alters the spacing between the optically active elongated members.

Abstract: An axially swept light sheet fluorescence microscope has illumination optics capable scanning the focus region of a line beam along an illumination optical axis to illuminate a light sheet in a sample plane, and detection optics capable of collecting fluorescence light from the sample plane and imaging the collected light on a light detector with a rolling shutter. A microcontroller synchronizes the rolling shutter with the scanning of the focus region. The illumination optics performs the axial scanning using a linear phased array of independently controllable electrostatically driven optical elements controlled by the microcontroller.

Abstract: In described examples, a system (e.g., a microelectromechanical system) includes a substrate, a support coupled to the substrate and a first and second element. The first element includes a contactor spring having a first portion coupled to the support and having a second portion including a cavity having a sloped surface. A clearance from the sloped surface to the substrate is widened as the sloped surface extends away from the first portion. The second portion includes a first contact surface adjacent to the sloped surface. The second element is coupled to the substrate and has a second contact surface adjacent to the first contact surface. One of the first element and the second element is adapted: in a first direction to urge the first contact surface and the second contact surface together; and in a second direction to urge the first contact surface and the second contact surface apart.

Abstract: A projection direction change device includes a mirror that reflects light emitted from a projection lens unit of a projector, a mirror support part that rotatably supports the mirror around a first axis and a second axis, a first drive part that rotary drives the mirror around the first axis, and a second drive part that rotary drives the mirror around the second axis. An intersecting point of the first and second axes is positioned closer to the projection lens unit than a geometric barycenter of the mirror is.

Abstract: An array layout of VCSELs is intentionally mis-aligned with respect to the xy-plane of the device structure as defined by the crystallographic axes of the semiconductor material. The mis-alignment may take the form of skewing the emitter array with respect to the xy-plane, or rotating the emitter array. In either case, the layout pattern retains the desired, row/column structure (necessary for dicing the structure into one-dimensional arrays) while reducing the probability that an extended defect along a crystallographic plane will impact a large number of individual emitters.

Abstract: A micro-optic device, including: a substrate; a plurality of image elements; and a plurality of focusing elements, each focusing element focuses light towards, or causes light to be diverged from or constructively interfere at a real or imaginary focal point, the focusing elements causing the image elements to be sampled so as to project imagery which is observable to a user from at least a first viewing angle, wherein a first focusing structure including at least a first group of the focusing elements and a first imagery structure including at least a first group of the image elements are integrated into a first unitary structure on a first side of the substrate.

Abstract: A Micro-Electro-Mechanical Systems (MEMS) device includes a substrate, an electronic circuit mounted on the substrate, a movable element mounted on the substrate whose movement is controlled by application of an operating voltage by the electronic circuit, a stopper mounted on the substrate that stops the movement of the movable element through mechanical contact of the stopper with the movable element, and an auto-inspection mechanism that applies a test voltage between the movable element and the stopper and determines whether or not a leak current is present. The auto-inspection mechanism is mounted, at least in part, on the substrate. The test voltage is lower than the operating voltage.

Abstract: Disclosed are an active complex spatial light modulation method and apparatus for an ultra-low noise holographic display. The active complex spatial light modulation apparatus includes a substrate and a petal antenna including three petal patterns arranged on the substrate, dividing a complex plane into three phase sections, and modulating the input light into three-phase amplitude values corresponding to the phase sections. The petal antenna may have a point symmetry shape based on the center point of the petal antenna.

Abstract: A spatial light modulator (SLM) including a two-dimensional (2D) array of n rows of m pixels, and a stacked drive circuit including at least one, one-dimensional (1D) array of n*m drivers monolithically integrated on the same substrate and methods of fabricating and methods of using the same in materials processing applications are provided. Generally, each pixel includes at least one modulator, and is configured to modulate light incident thereon in response to drive signals received from the stacked drive circuit. The 1D array of the stacked drive circuit includes a single row of n*m drivers arranged adjacent to and laterally separated from the 2D array of pixels. Other embodiments are also described.

Abstract: A bionic visual navigation control system for autonomous aerial refueling docking includes: a tanker/receiver bottom layer control module, a multi-wind disturbances hose-drogue stable control module, an enable and select module, a close-range bionic vision relative navigation module, and a receiver relative position precise control module. A bionic visual navigation control method for autonomous aerial refueling docking is also provided. The present invention aims at improving the reliability, anti-interference and accuracy of the close-range relative navigation in the autonomous air refueling docking stage, and designs a matching relative position accurate control method with control switch, thereby improving the accuracy of close-range navigation and control, thereby promoting the successful realization of probe-and-drogue autonomous aerial refueling and improving the autonomy of UAVs.

Abstract: A projection image apparatus includes an image display element that generate image light according to an input image signal, a transparent parallel plain plate that is swing-drive-controlled about one or two of two axes, the transparent parallel plain plate changing an optical path of the image light to perform pixel shift about the one or two of the two axes, a resampling processor that performs resampling process for the input image signal, and a controller that selectively executes one of the following three actions in response to a number of pixels and a frame rate of the input image signal, (1) to avoid the resampling process and the pixel shift, (2) the resampling process related to pixel shift about the one axis and pixel shift about the one axis, and (3) the resampling process related to pixel shift about the two axes and pixel shift about the two axes.

Abstract: A method includes forming a first aluminum silicon layer on a metal layer and forming a titanium nitride layer (or other titanium-based layer) on a surface of the aluminum-silicon layer opposite the metal layer. The method further includes etching the titanium nitride layer to create a titanium nitride pad and forming a torsion hinge in the metal layer. The titanium nitride pad is on the torsion hinge. The method also includes depositing a sacrificial layer over the torsion hinge and titanium nitride pad, forming a via in the sacrificial layer from a surface of the sacrificial layer opposite the torsion hinge to the titanium nitride pad, depositing a metal mirror layer on a surface of the sacrificial layer opposite the torsion hinge and into the via, and removing the sacrificial layer.

Abstract: An optical unit includes first to third prisms. The first prism has a first coated surface configured to reflect illumination light in a first wavelength band, a first surface, and a first light transmitting surface. The second prism has a second coated surface configured to reflect the illumination light in a second wavelength band, a second surface, and a second light transmitting surface. The third prism has a third light transmitting surface, and a fourth light transmitting surface. The first prism is formed with normal lines of the first coated surface, the first surface, and the first light transmitting surface being out of coplanar with each other, and/or the second prism is formed with normal lines of the second coated surface, the second surface, and the second light transmitting surface being out of coplanar with each other.

Abstract: A metrology apparatus for and a method of determining a characteristic of interest relating to at least one structure on a substrate. The metrology apparatus comprises a sensor and an optical system. The sensor is for detecting characteristics of radiation impinging on the sensor. The optical system comprises an illumination path and a detection path. The optical system is configured to illuminate the at least one structure with radiation received from a source via the illumination path. The optical system is configured to receive radiation scattered by the at least one structure and to transmit the received radiation to the sensor via the detection path.

Abstract: A retail ready package configured for division into two separate product display cases is disclosed wherein two rows of products are arranged side-by-side within the package in a vertical front facing display orientation relative to the left and right lower front panels of the package.

Abstract: A continuous-time recurrent neural network (CTRNN) is described that exploits the nonlinear dynamics of micro-electro-mechanical system (MEMS) devices to model a neuron in accordance with a neuron rate model that is the basis for dynamic field theory. Each MEMS device in the CTRNN is configured to simulate a neuron population by exploiting the characteristics of bi-stability and hysteresis inherent in certain MEMS device structures. In an embodiment, the MEMS device is a microbeam or cantilevered microbeam device that is excited with an alternating current (AC) voltage at or near an electrical resonance frequency associated with the MEMS device. In another embodiment, the MEMS device is an arched microbeam device that is excited with a direct current voltage and exhibits snap-through behavior due to the physical design of the structure. A CTRNN can be implemented using a number of MEMS devices that are interconnected, the connections associated with varying connection coefficients.

Abstract: An exposure device, an exposure method and a photolithography method are provided. The exposure device includes an exposure light source and an optical-path assembly, the optical-path assembly is configured to guide light emitted by the exposure light source to an exposing position, the optical-path assembly includes a light valve array, the light emitted by the exposure light source is able to be guided to the light valve array and then guided to the exposing position after the light is transmitted or reflected by the light valve array, the light valve array includes a plurality of light valve units, and optical transmittance or reflectivity of each of the light valve units is adjustable.

Abstract: A microfluidic valve comprises a first reservoir, a second reservoir, an inertial pump and a channel connecting the first reservoir to the second reservoir. The second reservoir is to receive fluid from the first reservoir through the channel under a pressure gradient. The inertial pump is within the channel proximate the second reservoir and distant the first reservoir.

Abstract: A method for manufacturing a semiconductor device comprises the steps of providing a semiconductor body with a main plane of extension, and forming a trench in the semiconductor body from a top side of the semiconductor body in a vertical direction which is perpendicular to the main plane of extension of the semiconductor body. The method further comprises the steps of coating inner walls of the trench with an isolation layer, depositing a metallization layer within the trench, and depositing a passivation layer within the trench such that an inner volume of the trench is free of any material, wherein inner surfaces that are adjacent to the inner volume are treated to be hydrophobic at least in places. Furthermore, a semiconductor device is provided.

Abstract: Devices and methods of operating partitioned actuator plates to obtain a desirable shape of a movable component of a micro-electro-mechanical system (MEMS) device. The subject matter described herein can in some embodiments include a micro-electro-mechanical system (MEMS) device including a plurality of actuation electrodes attached to a first surface, where each of the one or more actuation electrode being independently controllable, and a movable component spaced apart from the first surface and movable with respect to the first surface. Where the movable component further includes one or more movable actuation electrodes spaced apart from the plurality of fixed actuation electrodes.

Abstract: Embodiments of the disclosure are generally directed to systems and methods for switchable electroactive devices for head-mounted displays (HMDs). In particular, a method may include (1) applying an electric field to an electroactive element of an electroactive device via electrodes of the electroactive device that are electrically coupled to the electroactive element to compress the electroactive element, which comprises a polymer material defining nanovoids, such that an average size of the nanovoids is decreased and a density of the nanovoids is increased in the electroactive element, wherein the electroactive device is positioned at a distance from a user's eye, and (2) emitting image light from an emissive device positioned such that at least a portion of the image light is incident on a surface of the electroactive device facing the user's eye.

Abstract: A semiconductor device including a circuit substrate, a chip package, and a stiffener ring is provided. The chip package is disposed on and electrically connected to the circuit substrate, the chip package includes a pair of first parallel sides and a pair of second parallel sides shorter than the pair of first parallel sides. The stiffener ring is disposed on the circuit substrate, the stiffener ring includes first stiffener portions extending along a direction substantially parallel with the pair of first parallel sides and second stiffener portions extending along the direction substantially parallel with the pair of second parallel sides. The first stiffener portions are connected to the second stiffener portions, and the second stiffener portions is mechanically weaker than the first stiffener portions. A semiconductor device including stiffener lids is also provided.

Abstract: In various embodiments, laser devices include a thermal bonding layer featuring an array of carbon nanotubes and at least one metallic thermal bonding material.

Abstract: A Fourier transform is performed on a first waveform function in a frequency domain, and a second waveform function in a time domain including a temporal intensity waveform function and a temporal phase waveform function is generated. A replacement of the temporal intensity waveform function based on a desired waveform is performed for the second waveform function. The second waveform function is modified so as to bring a spectrogram of the second waveform function close to a target spectrogram generated in advance in accordance with a desired wavelength band. An inverse Fourier transform is performed on the modified second waveform function, and a third waveform function in the frequency domain is generated. Data is generated on the basis of an intensity spectrum function or a phase spectrum function of the third waveform function.

Abstract: A spectral beam combining system includes a plurality of input fibers and a prism having a curved input surface. The plurality of input fibers are attached to the curved input surface. The spectral beam combining system also includes an immersion grating defined on a second surface of the prism, a protective cap disposed over the immersion grating, and an output surface.

Abstract: A light field imaging system includes a lens configured to collect light transmitted from an object; a polarizer configured to polarize the light; a polarization switching unit configured to repeatedly switch the polarization direction of the light in first and second polarization directions; first and second polarization dependent lens arrays configured to operate as a lens when the polarization direction of the light is the first and second polarization direction, respectively, and having a staggered arrangement; an image sensor configured to obtain a first image from the light collected by the first polarization dependent lens array and obtain a second image from the light collected by the second polarization dependent lens array; and an image processing unit configured to combine the first image and the second image to generate a high resolution image having higher resolution than the first image and the second image.

Abstract: According to one embodiment, a display device includes a display panel, a light source, a lightguide, and reflective elements. The lightguide includes a first end facing the light source, a first surface opposed to the display panel, and a second surface. The reflective elements are disposed inside the lightguide, the elements configured to reflect light passing through the first end to spread in the lightguide and to transmit the light through the first surface. Reflective elements are arranged to be apart from the first or second surface with a certain distance and has a reflective surface facing the first surface and projects toward the second surface, the reflective surface is inclined such that the light from the first end can be irradiated to the first surface.