Having Significant Infrared Or Ultraviolet Property Patents (Class 359/350)
  • Patent number: 8604684
    Abstract: A UV stable optical element and an LED lamp using such an element are disclosed. Embodiments of the invention include an optical element made at least in part from an inherently UV stable polyester, so that consumable UV-stabilizing additives are not needed. Thus, the substrate of the optical element can maintain transparency and other desirable characteristics over longer periods of time in the face of high ultraviolet light exposure. In some embodiments, the optical element includes the inherently UV stable polyester and a phosphor for remote wavelength conversion. In some embodiments, the UV stable polyester is an aromatic polyester such as polyarylate. The optical element according to example embodiments of the invention can be used in an LED lamp.
    Type: Grant
    Filed: May 16, 2011
    Date of Patent: December 10, 2013
    Assignee: Cree, Inc.
    Inventor: Paul Kenneth Pickard
  • Publication number: 20130321904
    Abstract: Glass formulations and methods of setting the characteristics and formulations are described. The method includes determining climate characteristics of an area in which the glasses to be used, using the climate characteristics to determine heating and cooling costs for the geographical area, using the heating costs as part of a model to select an optimum glass assembly comprising a dual pane glass assembly, using an optimization model by providing higher weighting on low emissivity in a northern climates, and high or waiting of solar control in a more southern climate.
    Type: Application
    Filed: May 17, 2013
    Publication date: December 5, 2013
    Inventor: Darryl J. Costin
  • Publication number: 20130321903
    Abstract: Methods of forming a sheet glass product comprising a plurality of growth-limited glass bump spacers. According to the methods, a glass pane of the sheet glass product is irradiated with laser radiation to locally heat the glass pane at a plurality of spacer localities and induce growth of a plurality of glass bump spacers in the glass pane. The growth of the plurality of glass bump spacers is limited by utilizing a growth-limiting plate comprising a scattering surface portion. The scattering surface portion of the growth-limiting plate mitigates damage to the growth-limiting plate and may also mitigate damage to the glass pane. Vacuum insulated glass products and systems for forming a growth-limited sheet glass product are also provided.
    Type: Application
    Filed: May 29, 2012
    Publication date: December 5, 2013
    Inventors: Richard Robert Grzybowski, Daniel Ralph Harvey, Alexander Mikhailovich Streltsov
  • Patent number: 8599480
    Abstract: A laser scanning microscope has an illumination beam path and a detection beam path. A beamsplitter is provided which reflects the illumination light in direction of the sample and transmits the detection light in direction of the detection arrangement. An additional beamsplitter is provided for reflecting the illumination light and for transmitting the detection light, this additional beamsplitter being arranged in the illumination beam path downstream of the first beamsplitter in the illumination direction, and this additional beamsplitter substantially transmits the illumination light reflected at the first beamsplitter and the detection light, but acquires a wavelength range substantially different from the first beamsplitter with respect to its reflectivity.
    Type: Grant
    Filed: January 21, 2010
    Date of Patent: December 3, 2013
    Assignee: Carl Zeiss Microscopy GmbH
    Inventors: Matthias Danckwerts, Ralf Wolleschensky, Joerg Steinert, Robert Hauschild, Stefan Wilhelm
  • Patent number: 8597550
    Abstract: There is provided a method for producing a polarizing film having far superior water resistance to conventional polarizing films by contacting a liquid containing cationic polymers with a surface of a polarizing film.
    Type: Grant
    Filed: February 4, 2009
    Date of Patent: December 3, 2013
    Assignee: Nitto Denko Corporation
    Inventors: Toru Umemoto, Junzo Miyazaki, Shoichi Matsuda, Sadahiro Nakanishi
  • Publication number: 20130314772
    Abstract: An IR-cut filter includes a substrate and an infrared filtering film. The substrate is made of sapphire, and includes a first surface and a second surface opposite to the first surface. The infrared filtering film covers the first surface of the substrate and increases the reflectivity in relation to infrared light, thus filtering out the infrared light. The infrared filtering film includes a number of first high refraction index layers and a number of first low refraction index layers alternately stacked on the first surface of the substrate.
    Type: Application
    Filed: December 19, 2012
    Publication date: November 28, 2013
    Inventors: Ga-Lane CHEN, Chung-Pei WANG, Chao-Tsang WEI
  • Publication number: 20130314771
    Abstract: The invention relates to an arrangement for mounting an optical element, in particular in an EUV projection exposure apparatus, comprising at least one actuator which exerts a controllable force on the optical element; wherein between the actuator and the optical element a mechanical coupling in the form of a pin is embodied in such a way that, relative to the drive axis of the actuator, the ratio of the stiffness of the mechanical coupling in an axial direction to the stiffness in a lateral direction is at least 100; and at least one damping element which brings about a damping of a natural vibration form of the pin in a lateral direction.
    Type: Application
    Filed: July 12, 2013
    Publication date: November 28, 2013
    Inventors: Bernhard Geuppert, Rodolfo Rabe, Ulrich Schoenhoff
  • Publication number: 20130313448
    Abstract: A light splitting and detecting system including at least one light splitting and detecting apparatus is provided. The light splitting and detecting apparatus is capable of receiving a first wavelength optical signal and a second wavelength optical signal. The light splitting and detecting apparatus includes a filter, light detecting unit, a first wavelength filtering unit and a slit. The filter is disposed on the transmission path of the first wavelength optical signal and the second wavelength optical signal. The first wavelength filtering unit is disposed between the filter and the light detecting unit. The slit is disposed between the first wavelength filtering unit and the light detecting unit and expose the light detecting unit.
    Type: Application
    Filed: February 28, 2013
    Publication date: November 28, 2013
    Applicants: ASIA OPTICAL INTERNATIONAL LTD., SINTAI OPTICAL (SHENZHEN) CO., LTD.
    Inventors: Chia-Tse Sun, Kuo-Shun Huang, Chia-Jen Lee
  • Patent number: 8592787
    Abstract: An EUV light source is configured for generating an EUV light for an exposure device. The EUV light source includes a chamber, a target supply device configured for supplying a target into the chamber, an optical system for introducing laser light from a driver laser into the chamber and irradiating the target with the laser light to turn the target into plasma from which EUV light is emitted, and an EUV collector mirror in the chamber. The EUV collector mirror may include a multilayered reflecting surface with grooves and collect the EUV light from the plasma to a focal spot. The grooves can be arranged in a concentric fashion, and be configured for diffracting at least light at a wavelength which is the same as that of the laser light from the driver laser.
    Type: Grant
    Filed: April 2, 2012
    Date of Patent: November 26, 2013
    Assignee: Gigaphoton Inc.
    Inventors: Masato Moriya, Osamu Wakabayashi, Georg Soumagne
  • Publication number: 20130301118
    Abstract: The present invention relates to a window glass for a vehicle, attached to a body flange of the vehicle at a circumferential edge portion thereof, including: an infrared ray shielding portion which reflects or absorbs infrared rays on a large part of the window; and electromagnetic wave transmitting portions having a substantially rectangular shape, which transmit at least a predetermined electromagnetic wave, at each of lower end portions on both sides in a width direction of the vehicle.
    Type: Application
    Filed: July 12, 2013
    Publication date: November 14, 2013
    Inventors: Masanobu OGAWA, Junzo Ooe, Takuma Sawaya, Takashi Kitagawa
  • Publication number: 20130292584
    Abstract: An optical element includes a substrate and a film on the substrate. The substrate made of sapphire. The film is configured for increasing transmission of ultraviolet lights. The film is stacked by a plurality of high refractive index layers and a plurality of low refractive index layers alternately stacked on the substrate.
    Type: Application
    Filed: October 19, 2012
    Publication date: November 7, 2013
    Inventor: CHAO-TSANG WEI
  • Patent number: 8573790
    Abstract: An optical element that includes a substrate having two surfaces, each of the surfaces having a micro-relief structure that includes numerous fine protrusions, and a film that includes one or more layers including a metal layer and that is formed on one of the micro-relief structures.
    Type: Grant
    Filed: October 6, 2010
    Date of Patent: November 5, 2013
    Assignee: Nikon Corporation
    Inventors: Yutaka Hamamura, Kiyoshi Kadomatsu, Yasutoshi Takada, Yoshiro Tani
  • Publication number: 20130286469
    Abstract: A filter reflects first light having a first wavelength, and transmits second light having a second wavelength shorter than the first wavelength. The filter includes a plurality of plate members positioned parallel to each other with gaps therebetween in a first direction. An enveloping surface formed by end surfaces of the plurality of plate members forms a flat surface, which is nonparallel to the first direction. The filter transmits the second light to the second direction.
    Type: Application
    Filed: June 27, 2013
    Publication date: October 31, 2013
    Inventors: Naoya IIZUKA, Fumitaro MASAKI, Akira MIYAKE
  • Publication number: 20130279000
    Abstract: A far infrared reflecting laminate wherein layers [A] to [C] are sequentially arranged in this order: [A] a substrate; [B] a far-infrared reflecting layer having structure [B1] or [B2], [B1] a single layer of a metal containing 95 to 100% by mass of silver; or [B2] a multilayer structure composed of a metal layer containing 95 to 100% by mass of silver and a layer containing a metal oxide and/or a metal nitride and having a refractive index of 1.5 to 3; and [C] a surface hard-coat layer containing a crosslinking resin having one or more polar groups selected from a phosphoric acid group, a sulfonic acid group, and an amide group and having a thickness of 0.4 to 2.0 ?m.
    Type: Application
    Filed: January 11, 2012
    Publication date: October 24, 2013
    Applicant: Toray Industries, Inc.
    Inventors: Yukihiro Maeda, Kiyohiko Ito
  • Patent number: 8564879
    Abstract: A composite infrared target simulation display system for field testing of infrared (IR) search and track, guidance and general sensory systems. The system includes one or more tileable emitter arrays scalable without systemic size limitation. The emitter arrays are square faced tiles housing power and control electronics to autonomously display a stored infrared test image according to parameters distributed by a control host and a timing signal. A face of the emitter array is divided into regularly spaced pixel positions, each made up of multiple IR emitters operating in differing regions of the IR band to display an image. Multiple emitter array tiles are joined to form a complete system. Each emitter of each pixel position is individually addressable to be individually controllable with respect to emittance state for displaying an image. Multiple images may be sequentially displayed to replicate a simulated target signature in motion.
    Type: Grant
    Filed: March 26, 2010
    Date of Patent: October 22, 2013
    Assignee: The United States of America as Represented by the Secretary of the Navy
    Inventors: Deran S. Eaton, Robert M. Daily, Yolanda Torres, Joseph J. Dulcey
  • Publication number: 20130271825
    Abstract: This invention provides an optical sheet for use in for example a liquid crystal display, which prevents scratching and wet-out due to contact between films and minimizes the drop in performance of the optical sheet due to adhesive stains when an additional protective film is adhered and then peeled off.
    Type: Application
    Filed: December 29, 2011
    Publication date: October 17, 2013
    Applicant: KOLON INDUSTRIES, INC.
    Inventors: Kyung Jong Kim, Chang Won Park, Eui Young Shin, Chang Pyo Hong, Hong Gu Hwang
  • Publication number: 20130271827
    Abstract: A method for reducing damage and contamination to an optical element in an extreme ultra-violet (EUV) reticle inspection system, including, presenting an illumination source to a reticle inspection system, and displacing the optical element in the path of the illumination source from a first portion to a second portion, wherein the first portion is damaged and the second portion is not damaged, and the optical element has a plurality of portions.
    Type: Application
    Filed: April 10, 2013
    Publication date: October 17, 2013
    Applicant: KLA-Tencor Corporation
    Inventors: Gildardo Delgado, Frank Chilese
  • Publication number: 20130271610
    Abstract: The invention relates to a polycrystalline IR transparent material produced by sintering chalcogenide powder, e.g., ZnS powder, using hot uniaxial pressing followed by hot isostatic pressing. The microstructure of the material described in this disclosure is much finer than that found in material produced using the state of the art process. By using a powder with a particle size fine enough to improve sintering behavior but coarse enough to prevent a lowering of the wurtzite-sphalerite transition temperature, a highly transparent material with improved strength is created without degrading the optical properties. A high degree of transparency is achieved during hot pressing by applying pressure after the part has reached a desired temperature. This allows some degree of plastic deformation and prevents rapid grain growth which can entrap porosity. The crystallographic twins created during this process further inhibit grain growth during hot isostatic pressing.
    Type: Application
    Filed: April 16, 2012
    Publication date: October 17, 2013
    Inventors: Keith Gregory ROZENBURG, Eric Hector URRUTI
  • Patent number: 8559108
    Abstract: A grating for EUV-radiation includes a plurality of reflecting lines. Each reflecting line includes a plurality of first reflecting dots, and a plurality of second reflecting dots arranged between each other. The first reflecting dots and the second reflecting dots are configured to reflect EUV-radiation with a mutual phase difference of 180±10 degrees mod 360 degrees.
    Type: Grant
    Filed: December 19, 2008
    Date of Patent: October 15, 2013
    Assignee: ASML Netherlands B.V.
    Inventors: Borgert Kruizinga, Martijn Gerard Dominique Wehrens, Michiel David Nijkerk, Kornelis Frits Feenstra
  • Publication number: 20130264672
    Abstract: A glass wafer is provided that is made of a copper ions containing phosphate or fluorophosphate glass. The glass wafer has a diameter greater than 15 centimeters and a thickness of less than 0.4 millimeters. The glass wafer has two plane-parallel surfaces at least one of which is polished.
    Type: Application
    Filed: March 18, 2013
    Publication date: October 10, 2013
    Applicant: Schott AG
    Inventors: Bianca SCHREDER, Jochen FREUND, Ute WOELFEL, Claude MARTIN, Christophe BAUR, Steffen REICHESL, Marc CLEMENT
  • Patent number: 8551675
    Abstract: A pellicle membrane is mounted between an outer frame and an inner frame. At least one of the frames is attached to the reticle without using conventional adhesives. The pellicle and reticle may be used in a lithography system. The pellicle allows radiation to pass through the pellicle to the reticle and may prevent particles from passing through the pellicle.
    Type: Grant
    Filed: August 11, 2011
    Date of Patent: October 8, 2013
    Assignee: Intel Corporation
    Inventors: Florence Eschbach, Paul Zimmerman, Alexander Tregub, Fu-Chang Lo
  • Publication number: 20130261867
    Abstract: A robot navigation system includes a robot, a navigation beacon, and a cover structure. The robot includes a chassis, an omni-directional receiver, and at least one directional receiver. The navigation beacon includes an omni-directional infrared emitter and at least one directional infrared emitter. The cover structure is configured to block infrared transmissions between the at least one directional infrared emitter and the directional receiver while simultaneously permitting transmissions between the omni-directional infrared emitter and the omni-directional receiver. The cover structure may be made of a black silicone material.
    Type: Application
    Filed: March 30, 2012
    Publication date: October 3, 2013
    Inventors: Scott Thomas BURNETT, Jared Randall MAROON
  • Publication number: 20130258455
    Abstract: An optical element includes a transparent substrate and an infrared absorbing layer on an object-side surface of the transparent substrate. The infrared absorbing layer is a thermo sensitive ink printed or deposited on the transparent substrate. The thermo sensitive ink is cured to blue color.
    Type: Application
    Filed: June 27, 2012
    Publication date: October 3, 2013
    Applicant: HON HAI PRECISION INDUSTRY CO., LTD.
    Inventor: SHAO-KAI PEI
  • Publication number: 20130250403
    Abstract: An optical transmission window includes a dielectric substrate that is transparent at an infrared wavelength. A titanium dioxide coating is disposed on an external surface of the dielectric substrate. The titanium dioxide coating has an optical thickness of m plus one-half of the infrared wavelength, where m is a whole number greater than or equal to zero.
    Type: Application
    Filed: March 22, 2012
    Publication date: September 26, 2013
    Applicant: PALO ALTO RESEARCH CENTER INCORPORATED
    Inventor: Patrick Yasuo Maeda
  • Publication number: 20130240734
    Abstract: Methods of measuring a sample characteristic and accessories for infrared (IR) spectrometers are provided. An accessory includes an input port and an output port having an optical path therebetween, a surface plasmon resonance (SPR) structure for contacting a sample, a mirror system, and an optical element for producing collimated light. The SPR structure produces internally reflected light responsive to broadband IR light, modified by a SPR between the SPR structure and the sample. The mirror system directs the broadband IR light from the input port to the SPR structure and directs the internally reflected light from the SPR structure to the output port, producing output light indicative of a characteristic of the sample associated with the SPR. The optical element is disposed along the optical path between the input port and the output port.
    Type: Application
    Filed: July 28, 2011
    Publication date: September 19, 2013
    Applicant: University of Delaware
    Inventors: Karl Booksh, Nicola Menegazzo, Yoon-Chang Kim, Laurel Kegel, Derrick Allen
  • Patent number: 8536551
    Abstract: An extreme ultraviolet light source apparatus using a spectrum purity filter capable of obtaining EUV light with high spectrum purity. The apparatus includes a chamber; a target supply unit for supplying a target material; a driver laser using a laser gas containing a carbon dioxide gas as a laser medium, for applying a laser beam to the target material to generate plasma; a collector mirror for collecting and outputting the extreme ultraviolet light radiated from the plasma; and a spectrum purity filter provided in an optical path of the extreme ultraviolet light, for transmitting the extreme ultraviolet light and reflecting the laser beam, the spectrum purity filter including a mesh having electrical conductivity and formed with an arrangement of apertures having a pitch not larger than a half of a shortest wavelength of the laser beam applied by the driver laser.
    Type: Grant
    Filed: June 11, 2009
    Date of Patent: September 17, 2013
    Assignee: Gigaphoton Inc.
    Inventors: Masato Moriya, Osamu Wakabayashi, Tamotsu Abe, Takashi Suganuma, Akira Endo, Akira Sumitani
  • Publication number: 20130235375
    Abstract: The present invention relates to a sensor substrate for surface-enhanced spectroscopy, which is transparent in the infrared and/or visible spectral range and is penetrated by a plurality of continuous channels. In the channels, a plurality of metallic nanotubes spaced from one another in the longitudinal direction of the channels are formed as antenna elements by portions of metallic coating. The proposed sensor substrate can be produced with a large area in a simple manner and enables selective adjustment of the plasmon resonance via the length of the antenna elements.
    Type: Application
    Filed: March 7, 2013
    Publication date: September 12, 2013
    Applicant: Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.
    Inventor: Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.
  • Publication number: 20130228695
    Abstract: A device for collecting EUV light from a plasma generation region includes first and second EUV collector mirrors. The first EUV collector mirror has a first spheroidal reflective surface and arranged such that a first focus of the first spheroidal reflective surface lies in the plasma generation region and a second focus of the first spheroidal reflective surface lies in a predetermined intermediate focus region. The second EUV collector mirror has a second spheroidal reflective surface and arranged such that a third focus of the second spheroidal reflective surface lies in the plasma generation region and a fourth focus of the second spheroidal reflective surface lies in the predetermined intermediate focus region.
    Type: Application
    Filed: February 15, 2013
    Publication date: September 5, 2013
    Applicant: GIGAPHOTON INC.
    Inventors: Hakaru MIZOGUCHI, Osamu WAKABAYASHI
  • Publication number: 20130221247
    Abstract: A collector mirror exchanging apparatus capable of safely and easily exchanging a collector mirror for collecting extreme ultra violet light emitted from plasma generated within a chamber of an extreme ultra violet light source apparatus. The collector mirror exchanging apparatus includes: a supporting base for supporting a collector mirror or a collector mirror structure; and a guiding rail disposed on the supporting base and regulating a moving direction of the collector mirror or the collector mirror structure; wherein at least the collector mirror is taken out of the chamber by moving the collector mirror or the collector mirror structure along the guiding rail on the supporting base.
    Type: Application
    Filed: March 18, 2013
    Publication date: August 29, 2013
    Applicant: GIGAPHOTON INC.
    Inventor: GIGAPHOTON INC.
  • Publication number: 20130215497
    Abstract: A screen protector is revealed. The screen protector includes a first microstructure layer, a transparent protective layer, a second microstructure layer, a plurality of ink layer, and a silicone layer. The transparent protective layer is disposed over the first microstructure layer and the second microstructure layer is arranged over the transparent protective layer. The ink layers are stacked in a frame form and disposed over the second microstructure layer. The silicone layer is also a frame arranged over the ink layers. The screen protector provides high anti-glare and anti-reflective effect by the arrangement of the first microstructure layer and the second microstructure layer. Moreover, the screen protector is applied conveniently due to disposition of the ink layers and the silicone layer.
    Type: Application
    Filed: May 25, 2012
    Publication date: August 22, 2013
    Applicant: YUXI TECHNOLOGY CO., LTD.
    Inventors: SHENG-CHIEN CHAN, CHERNG-WEN YU
  • Patent number: 8513626
    Abstract: Patterning effects on a substrate are reduced during radiation-based heating by filtering the radiation source or configuring the radiation source to produce radiation having different spectral characteristics. For the filtering, an optical filter may be used to truncate specific wavelengths of the radiation. The different configurations of the radiation source include a combination of one or more continuum radiation sources with one or more discrete spectrum sources, a combination of multiple discrete spectrum sources, or a combination of multiple continuum radiation sources. Furthermore, one or more of the radiation sources may be configured to have a substantially non-normal angle of incidence or polarized to reduce patterning effects on a substrate during radiation-based heating.
    Type: Grant
    Filed: January 12, 2007
    Date of Patent: August 20, 2013
    Assignee: Applied Materials, Inc.
    Inventors: Balasubramanian Ramachandran, Joseph Michael Ranish, Aaron Muir Hunter
  • Publication number: 20130208352
    Abstract: An image combiner for a viewing device, such as a night vision device, is disclosed for combining a first image, such as generated symbology, with a second image, such as a view of an outside scene in reduced lighting conditions. A waveguide is provided for capturing the first image from a first viewing direction, and for directing the first image in a second viewing direction, the second viewing direction being substantially coincident with a viewing direction of the second image, such that the first image can combine with the second image. At least a portion of the waveguide is arranged to substantially transmit the second image, such that the second image can pass substantially through the waveguide.
    Type: Application
    Filed: October 13, 2011
    Publication date: August 15, 2013
    Inventors: Michael David Simmonds, Alexander Angus Cameron, Colin Richard Mills
  • Publication number: 20130207004
    Abstract: Source-collector modules for use with EUV lithography systems are disclosed, wherein the source-collector modules employ a laser-produced plasma EUV radiation source and a grazing-incidence collector. The EUV radiation source is generated by first forming an under-dense plasma, and then irradiating the under-dense plasma with infrared radiation of sufficient intensity to create a final EUV-emitting plasma. The grazing incidence collector can include a grating configured to prevent infrared radiation from reaching the intermediate focus. Use of debris mitigation devices preserves the longevity of operation of the source-collector modules.
    Type: Application
    Filed: February 7, 2013
    Publication date: August 15, 2013
    Applicant: Media Lario, S.R.L.
    Inventor: Media Lario, S.R.L.
  • Publication number: 20130208351
    Abstract: An inspection port, and a housing with an inspection port, for use in inspecting an interior volume are provided. The inspection port has a viewing assembly for rotatable securement about an axis of rotation at an inspection opening of a panel defining a side of an interior volume. The viewing assembly has an inspection enclosure for extending into the interior volume. The inspection enclosure has a region with a window opening having a window axis angled relative to the axis of rotation. The housing has an inspection opening at or over which the inspection port is mounted.
    Type: Application
    Filed: March 28, 2013
    Publication date: August 15, 2013
    Inventor: Desmond P. Faria
  • Patent number: 8507885
    Abstract: The exposure device is able to supply only EUV radiation to a mask, while eliminating radiation other than the EUV radiation. A multi layer made from a plurality of Mo/Si pair layers is provided upon the front surface of a mirror, and blazed grooves are formed in this multi layer. Radiation which is incident from a light source device is incident upon this mirror, and is reflected or diffracted. Since the reflected EUV radiation (including diffracted EUV radiation) and the radiation of other wavelengths are reflected or diffracted at different angles, accordingly their directions of progression are different. By eliminating the radiation of other wavelengths with an aperture and/or a dumper, it is possible to irradiate a mask only with EUV radiation of high purity.
    Type: Grant
    Filed: June 12, 2012
    Date of Patent: August 13, 2013
    Assignee: Gigaphoton Inc.
    Inventors: Masato Moriya, Osamu Wakabayashi, Georg Soumagne
  • Publication number: 20130188245
    Abstract: Nanostructured photonic materials and associated components for use in devices and systems operating at ultraviolet (UV), extreme ultraviolet (EUV), and/or soft Xray wavelengths are described. Such a material may be fabricated with nanoscale features tailored for a selected wavelength range, such as at particular UV, EUV, or soft Xray wavelengths or wavelength ranges. Such a material may be used to make components such as mirrors, lenses or other optics, panels, lightsources, masks, photoresists, or other components for use in applications such as lithography, wafer patterning, biomedical applications, or other applications.
    Type: Application
    Filed: January 18, 2013
    Publication date: July 25, 2013
    Inventor: Supriya Jaiswal
  • Publication number: 20130188163
    Abstract: A mirror for EUV radiation includes a mirror body, which has at least one EUV radiation-reflecting region and at least two EUV radiation-permeable regions. A spatial separation of the illumination and imaging beam paths is possible with small angles of incidence and a large object-side numerical aperture.
    Type: Application
    Filed: March 8, 2013
    Publication date: July 25, 2013
    Applicant: CARL ZEISS SMT GMBH
    Inventor: Carl Zeiss SMT GmbH
  • Patent number: 8491823
    Abstract: To obtain a water-resistant polarizing film free from deterioration in dichroic ratio caused by water-resistant treatment, it is critical that adjacent sulfonic acid groups or sulfonate groups in the organic dyes to be used for the polarizing film are spaced at moderate intervals.
    Type: Grant
    Filed: January 23, 2009
    Date of Patent: July 23, 2013
    Assignee: Nitto Denko Corporation
    Inventors: Junzo Miyazaki, Shoichi Matsuda, Kyoko Nishiguchi
  • Publication number: 20130182121
    Abstract: A mirror comprises a doubly curved surface and is formed by pressing or casting. Additionally, a casing comprises a mirror including a doubly curved surface and formed by pressing or casting. An infrared device includes an infrared sensor or an infrared source and a mirror having a doubly curved surface formed by pressing or casting.
    Type: Application
    Filed: May 8, 2007
    Publication date: July 18, 2013
    Inventors: Juergen Huppertz, Bedrich Hosticka, Daniel Wuerfel
  • Patent number: 8488237
    Abstract: Various embodiments provide a Cassegrain-like telescope. The Cassegrain-like telescope includes a primary mirror; a secondary mirror spaced apart from the primary mirror, the primary mirror and the second mirror configured to form a focal surface; and an optical aberrations corrector having a plurality of lenses, the optical aberrations corrector being disposed between the secondary mirror and the focal surface, the optical aberration corrector being configured to correct optical aberrations of the primary mirror and the secondary mirror. A material of the plurality of lenses is selected to transmit radiation in a wavelength range between approximately 0.4 ?m and approximately 12 ?m, and is selected to have variations in refractive index below about 0.05 so as to reduce chromatic aberration to a level such that an average root mean square of wave front error (RMS WFE) is less than approximately 0.08.
    Type: Grant
    Filed: January 12, 2011
    Date of Patent: July 16, 2013
    Assignee: Raytheon Company
    Inventor: Lacy G. Cook
  • Publication number: 20130176614
    Abstract: An EUV collector mirror shell of an EUV collector for EUV lithography includes a body which has a light incidence-side front part having a reflective optically active area, a rear part, and a cavity between the front and rear parts. The cavity extends essentially along the entire optically active area, and the cavity serves to receive a cooling medium. The body also has at least one inlet and at least one outlet for the cooling medium. A plurality of flow-influencing elements are in the cavity, extending from the front part to the rear part, and connecting the front part to the rear part and monolithically formed with the front and rear parts.
    Type: Application
    Filed: January 29, 2013
    Publication date: July 11, 2013
    Applicant: CARL ZEISS LASER OPTICS GMBH
    Inventor: Carl Zeiss Laser Optics GmbH
  • Patent number: 8481984
    Abstract: An extreme ultraviolet light source apparatus using a spectrum purity filter capable of obtaining EUV light with high spectrum purity. The apparatus includes a chamber; a target supply unit for supplying a target material; a driver laser using a laser gas containing a carbon dioxide gas as a laser medium, for applying a laser beam to the target material to generate plasma; a collector mirror for collecting and outputting the extreme ultraviolet light radiated from the plasma; and a spectrum purity filter provided in an optical path of the extreme ultraviolet light, for transmitting the extreme ultraviolet light and reflecting the laser beam, the spectrum purity filter including a mesh having electrical conductivity and formed with an arrangement of apertures having a pitch not larger than a half of a shortest wavelength of the laser beam applied by the driver laser.
    Type: Grant
    Filed: June 11, 2009
    Date of Patent: July 9, 2013
    Assignee: Gigaphoton Inc.
    Inventors: Masato Moriya, Osamu Wakabayashi, Tamotsu Abe, Takashi Suganuma, Akira Endo, Akira Sumitani
  • Publication number: 20130170020
    Abstract: Apparatus and methods to provide a surface having a tunable emissivity are disclosed. An example apparatus includes an impedance layer comprising a layer of dielectric material to be attached to an electrically reflective ground plane, and a plurality of resonators arranged within the impedance layer, wherein an emissivity of the apparatus is based on a characteristic of the resonators.
    Type: Application
    Filed: January 3, 2012
    Publication date: July 4, 2013
    Inventor: Keith J. Davis
  • Patent number: 8472112
    Abstract: Provided are infrared films comprising a substrate, a layer of an aminium radical cation compound in a crystalline state and an organic polymer selected from the group consisting of a divinyl ether polymer, a fluoropolymer, and a silicone polymer, and, optionally, a water repellent layer overlying the layer of the aminium compound. Such infrared films are stable in their optical properties and useful for security markings, test strips for analysis of fluids, and other optical articles for detection in the infrared. Also provided are methods for making such infrared films.
    Type: Grant
    Filed: October 28, 2009
    Date of Patent: June 25, 2013
    Assignee: Optodot Corporation
    Inventor: Steven Allen Carlson
  • Patent number: 8472111
    Abstract: An apparatus and method for performing optical microscopy are disclosed. In at least one embodiment, the apparatus includes a deep ultraviolet light source configured to generate light having a wavelength within a window in the deep ultraviolet region of the electromagnetic spectrum within which a local minimum in the absorption coefficient of Oxygen occurs. Further, the apparatus includes a lens device that receives at least a first portion of the generated light, directs at least some of the first portion of the generated light toward a location, receives reflected light from the location, and directs at least some of the reflected light toward a further location. Additionally, the apparatus includes a camera device that is positioned at one of the further location and an additional location, where the camera device receives at least a second portion of the reflected light, whereby an image is generated by the camera device.
    Type: Grant
    Filed: June 12, 2007
    Date of Patent: June 25, 2013
    Assignees: The Arizona Board of Regents on behalf of the University of Arizona, Invent Technologies LLC
    Inventors: Barry Gelernt, Thomas D. Milster
  • Patent number: 8467125
    Abstract: Disclosed herein is an image taking optical system including at least one lens provided on an optical path; a first infrared-ray absorption filter made from a resin material with a film shape and provided on the optical path; a multi-layer film provided with an infrared-ray absorption function and provided on the optical path; and a second infrared-ray absorption filter made from a resin material with a film shape and provided on the optical path, wherein the first infrared-ray absorption filter, the multi-layer film and the second infrared-ray absorption filter are provided at locations arranged along the optical path in a direction from a photographing-object side to an image side, and the multi-layer film has a spectroscopic-characteristic adjustment function and a light reflection characteristic.
    Type: Grant
    Filed: September 21, 2010
    Date of Patent: June 18, 2013
    Assignee: Sony Corporation
    Inventor: Hitoshi Nakanishi
  • Publication number: 20130148194
    Abstract: The present invention generally relates to nanoantenna arrays and methods of their fabrication. In particular, one aspect relates to nanoantenna arrays comprising nanostructures of predefined shapes in predefined patterns, which results in collective excitement of surface plasmons. In some embodiments the nanoantenna arrays can be used for spectroscopy and nanospectroscopy. Another aspects of the present invention relate to a method of high-throughput fabrication of nanoantenna arrays includes fabricating a reusable nanostencil for nanostensil lithography (NSL) which provides a mask to deposit materials onto virtually any support, such as flexible and thin-film stretchable supports. The nanostencil lithography methods enable high quality, high-throughput fabrication of nanostructures on conducting, non-conducting and magnetic supports. The nanostencil can be prepared by etching nanoapertures of predefined patterns into a waffer or ceramic membrane.
    Type: Application
    Filed: October 22, 2010
    Publication date: June 13, 2013
    Applicant: TRUSTEES OF BOSTON UNIVERSITY
    Inventors: Hatice Altug, Ahmet Ali Yanik, Shyamsunder Erramilli, Ronen Adato, Serap Aksu, Min Huang, Alp Artar
  • Patent number: 8462425
    Abstract: As disclosed herein, in a first aspect, a device may comprise: an oscillator producing a light output on a beam path; a target material for interaction with light on the beam path at an irradiation site; a beam delay on the beam path the beam delay having a beam folding optical arrangement; and a switch positioned along the beam path and interposed between the oscillator and the beam delay; the switch closable to divert at least a portion of light on the beam path from the beam path, the switch having close time, t1 and the beam path having a length, L1, along the path from the switch to the irradiation site; with t1<cL1, where c is the speed of light on the path, to protect the oscillator.
    Type: Grant
    Filed: March 31, 2011
    Date of Patent: June 11, 2013
    Assignee: Cymer, Inc.
    Inventors: Kai-Chung Hou, Richard L. Sandstrom, William N. Partlo, Daniel J. W. Brown, Igor V. Fomenkov
  • Publication number: 20130135712
    Abstract: The disclosure is directed to a method of making yttrium oxide, Y2O3, coatings on substrates suitable for use at infrared wavelengths, including use in the 2-12 ?m range. The coating method eliminates or substantially eliminates the absorptions peaks that typically appear at approximately 3.0 ?m, 6.6 ?m and 7.1 ?m. This is achieved by using Y metal as the yttrium source in combination with an oxygen-containing plasma to form the Y2O3, coating in place of the using Y2O3 as the coating material source The disclosure is further directed to optics suitable for use in the infrared that have such coatings. The transmission spectrum of the coated substrate made according to the method described herein is greater than the transmission spectrum of the uncoated substrate over the wavelength range of 4 ?m to 12 ?m.
    Type: Application
    Filed: November 28, 2012
    Publication date: May 30, 2013
    Inventors: Horst Schreiber, Jue Wang, Scott J. Wilkinson
  • Patent number: 8441724
    Abstract: An optical filter composite is provided having effective filtering of infrared emissions, such as solar or laser emissions, while providing very high visible light transmission, preserving the ability to differentiate and recognize colors and providing a pleasing overall color as compared to the prior art. The present invention provides for filters that are formed by lamination, infusion and/or coating processes using filtering assemblies having a neutral color with high visible light transmission while also producing high levels of filtration in the infrared and near infrared range to provide effective protection against harmful emissions in these ranges while also producing a filter that has a color that is more pleasing and desirable to the wearer.
    Type: Grant
    Filed: July 8, 2010
    Date of Patent: May 14, 2013
    Assignee: Sperian Eye & Face Protection, Inc.
    Inventors: Xiaorong You, Phil Johnson