Having Significant Infrared Or Ultraviolet Property Patents (Class 359/350)
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Publication number: 20120170113Abstract: An infrared transmission optics formed with an anti-reflection pattern is provided. The infrared transmission optics is manufactured in the steps of i) applying a PR layer on the surface of an optics plate, ii) manufacturing an etching barrier pattern of a sinusoidal wave shape on the PR layer, and iii) manufacturing a pattern of a projection form on the plate where the etching barrier pattern is formed, through an etching process.Type: ApplicationFiled: December 22, 2011Publication date: July 5, 2012Applicant: INDUSTRY-ACADEMIC COOPERATION FOUNDATION YONSEI UNIVERSITYInventor: Shinill Kang
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Publication number: 20120153422Abstract: An imaging device includes at least one photosite formed in a semiconducting substrate and fitted with a filtering device for filtering at least one undesired radiation. The filtering device is buried in the semiconducting substrate at a depth depending on the wavelength of the undesired radiation.Type: ApplicationFiled: December 12, 2011Publication date: June 21, 2012Applicants: STMicroelectronics (Grenoble 2) SAS, STMicroelectronics SA, STMicroelectronics (Rousset) SASInventors: David Coulon, Benoit Deschamps, Frédéric Barbier
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Publication number: 20120147351Abstract: A transmissive spectral purity filter is configured to transmit extreme ultraviolet radiation (?<20 nm). The filter comprises a grid-like structure comprising a plurality of microscopic apertures fabricated in a carrier material such as silicon. The grid-like structure in at least part of its area is formed so as to have, within an expected range of operating conditions, a negative Poisson's ratio. By forming the grid of a material that likes to expand or contract simultaneously in orthogonal directions, the management of differential thermal expansion is improved. Various geometries are possible to achieve a negative Poisson's ratio. The aperture geometry may that of a re-entrant polygon or re-entrant shape having curved sides. Examples include a so-called re-entrant or auxetic honeycomb, in which each aperture is hexagonal, as in the regular honeycomb, but the form is a re-entrant hexagon rather than a regular hexagon.Type: ApplicationFiled: July 14, 2010Publication date: June 14, 2012Applicant: ASML Netherlands B.V.Inventors: Martin Jacobus Johan Jak, Wouter Anthon Soer
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Patent number: 8198613Abstract: The EUV light source device eliminates radiation other than EUV radiation from the light which it emits, and supplies only the EUV radiation to an exposure device. A composite layer consisting of a plurality of Mo/Si pair layers is provided upon the front surface of an EUV collector mirror, and blazed grooves are formed in this composite layer. Radiation emitted from a plasma is incident upon this EUV collector mirror, and is reflected or diffracted. The reflected EUV radiation (including diffracted EUV) proceeds towards an intermediate focal point IF. The radiation of other wavelengths proceeds towards some position other than this focal point IF, because its reflection angle or diffraction angle is different. A SPF shield having an aperture portion is provided at the focal point IF. Accordingly, only the EUV radiation passes through the aperture portion and is supplied to the exposure device, while the other radiation is intercepted by the shield.Type: GrantFiled: May 20, 2009Date of Patent: June 12, 2012Assignees: Komatsu Ltd., Gigaphoton, Inc.Inventors: Masato Moriya, Osamu Wakabayashi, Georg Soumagne
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Publication number: 20120126123Abstract: A method of measuring specimen characteristics that includes holding a specimen on a gap array structure that includes gaps regularly arrayed in at least one array direction, applying a linearly-polarized electromagnetic wave to the gap array structure on which the specimen is held, detecting the electromagnetic wave scattered by the gap array structure, and measuring characteristics of the specimen based on a frequency characteristic of the detected scattered electromagnetic wave, wherein a polarizing direction of the linearly-polarized electromagnetic wave and a principal surface of the gap array structure are not parallel to each other.Type: ApplicationFiled: January 27, 2012Publication date: May 24, 2012Inventors: Takashi Kondo, Kazuhiro Takigawa, Seiji Kamba
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Patent number: 8179944Abstract: The disclosure is directed to a thin-film for use in below 300 nm laser systems that can be applied to a variety of substrate types. The thin film consists of a blocking layer of a selected material and a matching structure, the matching structure consisting of 1-7 layers of a selected material. The blocking layer serves to minimize or eliminate the transmission of below 300 nm laser light into an adhesive that is used to bond the substrate to a holder. The matching layer(s) minimize internal reflectance of below 300 nm laser light from the blocking layer back into the substrate.Type: GrantFiled: October 18, 2010Date of Patent: May 15, 2012Assignee: Corning IncorporatedInventors: Jay F Anzellotti, Horst Schreiber
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Publication number: 20120113503Abstract: An enhanced battery compartment associated with a night vision monocular device (NVMD) can support multiple battery types. For each battery type, a NVMD can receive an input voltage from a power source within an interior chamber of the enhanced battery compartment. The power source can be a AA battery or a CR123A battery and no additional adapter is required when the enhanced battery compartment has been attached to the NVMD. The NVMD can conform to an Army Navy Personal Viewer System 14 (AN/PVS-14) device. The NVMD can regulate the input voltage from the power source and provide an output voltage conforming to a pre-determined setting. In one embodiment, regulation of the input voltage can be performed by a component external to the enhanced battery compartment and installed in the NVMD, such as a subsystem or subassembly of the NVMD. The NVMD can activate a monocular subassembly associated with the NVMD utilizing the output voltage.Type: ApplicationFiled: November 9, 2010Publication date: May 10, 2012Applicant: NIGHTLINE, INC.Inventors: WALTER LEE GRASHEIM, JOAQUIN RAVENTOS
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Publication number: 20120099188Abstract: An optically transmissive structure for laser protection is provided including a plurality of metallic layers of material interspersed with a plurality of dielectric layers of material. The metallic layers are interposed with the dielectric layers; the metallic layers include individual layers each having a thickness smaller than a skin depth of the metal at a selected wavelength; and the dielectric layers separating two metallic layers have a thickness equal to or smaller than the selected wavelength in the dielectric layer of material. A method for fabricating the above structure is also provided. An optically transmissive structure for laser protection including a plurality of metal layers interposed with dielectric material layers is also provided. A transmittance of the structure is greater than fifty percent (50%) for an incident light having a wavelength of 550 nm; and an optical density of the structure is greater than two (2) for an incident light having a wavelength between 1000 nm and 1400 nm.Type: ApplicationFiled: July 29, 2011Publication date: April 26, 2012Applicant: AEgis Technologies Group, Inc.Inventors: Neset Akozbek, Milan Buncick, Carlos Kengla
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Patent number: 8164759Abstract: An imaging microoptics, which is compact and robust, includes at least one aspherical member and has a folded beam path. The imaging microoptics provides a magnification |??| of >800 by magnitude. Furthermore, a system for positioning a wafer with respect to a projection optics includes the imaging microoptics, an image sensor positionable in the image plane of the imaging microoptics, for measuring a position of an aerial image of the projection optics, and a wafer stage with an actuator and a controller for positioning the wafer in dependence of an output signal of the image sensor.Type: GrantFiled: March 12, 2010Date of Patent: April 24, 2012Assignee: Carl Zeiss SMT GmbHInventors: Hans-Juergen Rostalski, Heiko Feldmann
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Publication number: 20120092759Abstract: A heat-ray shielding glass products (e.g., solar control double glass) which have excellent heat-ray shielding property, especially thermal insulation property and enhanced durability under the condition of existence of moisture (under high humidity), and which can be prepared in low cost is provided. The solar control double glass 40 comprises a solar control glass 30 having a glass plate 21 and a heat-ray reflection layer 24 comprising an electrically-conductive polymer provided thereon and another glass plate 37, the solar control glass and the another glass being arranged at an interval such that the heat-ray reflection layer faces the another glass and the interval forming a hollow layer 38, and the heat-ray reflection layer 24 has a surface resistivity of not more than 10,000?/?.Type: ApplicationFiled: June 24, 2010Publication date: April 19, 2012Applicant: BRIDGESTONE CORPORATIONInventors: Yuji Suzuki, Hiroshi Nakamura
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Publication number: 20120081706Abstract: A spectrometer comprises a detector array and a prism. The prism comprises a first prism element comprising a substantially crystalline crown material, and a second prism element contacting the first prism element, the second prism element comprising a substantially crystalline flint material. The spectrometer further includes optics configured to direct light at least twice through the prism. The prism is configured to disperse light received from the optics at an incident angle therethrough into constituent spectra in visible and infrared wavelength bands that are dispersed from the prism at angles offset from the incident angle. The constituent spectra are directed onto the detector array with approximately equal dispersion across the visible and infrared wavelength bands. Among other things, desirable material selections for the first and second prism elements are also disclosed.Type: ApplicationFiled: May 11, 2011Publication date: April 5, 2012Applicant: RAYTHEON COMPANYInventors: Lacy G. COOK, John F. SILNY
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Publication number: 20120062883Abstract: The present invention provides a method of making highly charged, monodisperse particles which do not absorb deep ultraviolet (UV) light and a method of making crystalline colloidal array (CCA) deep UV narrow band radiation filters by using these highly charged monodisperse particles. The CCA filter rejects and/or selects particular regions of the electromagnetic spectrum while transmitting adjacent spectral regions. The filtering devices of the present invention are wavelength tunable over significant spectral intervals by changing the incident angle of the CCA filter relative to the light. Larger wavelength changes can be obtained by changing the concentrations of particles in the CCAs. The present invention also includes applications of the CCA filter to hyperspectral imaging and Raman imaging devices.Type: ApplicationFiled: September 7, 2011Publication date: March 15, 2012Inventors: Sanford A. Asher, Luling Wang, David Tuschel
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Patent number: 8133414Abstract: Selective fractionation and separation of melanin and use of fractionated or separated melanin in connection with light filters is disclosed. Further, light filters that use yellow melanin or melanin like materials prepared to have a yellow color and a melanin transmission spectrum in combination with a photochromic dye are disclosed. The yellow form of melanin has minimal impact on the perception of light intensity with transmission values greater than 80%. The combination allows for a single light filter suitable for both night driving and sunglass applications and which also preserve color perception.Type: GrantFiled: November 17, 2008Date of Patent: March 13, 2012Assignee: Photoprotective Technologies, Inc.Inventors: James M. Gallas, Ira Hessel
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Patent number: 8128242Abstract: A method of manufacturing a semiconductor device able to reduce the number of manufacturing steps and attain the rationalization of a manufacturing line is disclosed. The semiconductor device is a high-frequency module assembled by mounting chip parts (22) and semiconductor pellets (21) onto each of wiring substrates (2) formed on a matrix substrate (27) after inspection. A defect mark (2e) is affixed to a wiring substrate (2) as a block judged to be defective in the inspection of the matrix substrate (27), then in a series of subsequent assembling steps the defect mark (e) is recognized and the assembling work for the wiring substrate (2) with the defect mark (2e) thereon is omitted to attain the rationalization of a manufacturing line.Type: GrantFiled: April 1, 2009Date of Patent: March 6, 2012Assignee: The University of ChicagoInventors: David Grier, Eric Dufresne
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Publication number: 20120050703Abstract: An EUV collector for collecting and transmitting radiation from an EUV radiation source includes at least one collector mirror for reflecting an emission of the EUV radiation source, which is rotationally symmetric with respect to a central axis. The EUV collector also includes a cooling device for cooling the at least one collector mirror. The cooling device has at least one cooling element, which has a course with respect to the collector mirror, in each case, such that the projection of the course into a plane perpendicular to the central axis has a main direction, which encloses an angle of at most 20° with respect to a predetermined preferred direction. The collector transmits improved quality radiation to illuminate an object field.Type: ApplicationFiled: August 22, 2011Publication date: March 1, 2012Applicant: CARL ZEISS SMT GMBHInventors: Michael Layh, Udo Dinger
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Publication number: 20120038812Abstract: A three-mirror anastigmatic with at least one non-rotationally symmetric mirror is disclosed. The at least one non-rotationally symmetric mirror may be an electroformed mirror shell having a non-rotationally symmetric reflective surface formed by a correspondingly shaped mandrel.Type: ApplicationFiled: August 11, 2010Publication date: February 16, 2012Inventor: Iain A. Neil
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Publication number: 20120038897Abstract: An optical element (14) transparent for radiation with a wavelength ? in the ultraviolet wavelength range below 250 nm, in particular at 193 nm, comprises a substrate (17) with a refractive index ns larger than 1.6, and an antireflection coating (16) formed on at least part of the surface of the substrate (17) between the substrate (17) and an ambient medium with a refractive index nA, preferably with nA=1.0. The antireflection coating (16) consists of a single layer of a material with a refractive index nL of about nL=?{square root over (nAnS)}, in particular nL>1.3, and the optical thickness dL of the single layer is about ?/4. The optical element (14) is preferably part of a projection objective (5) in a microlithography projection exposure apparatus (1) and located adjacent to a light-sensitive substrate (10).Type: ApplicationFiled: October 25, 2011Publication date: February 16, 2012Inventors: Christoph ZACZEK, Alexandra Pazidis
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Patent number: 8116002Abstract: A reflection grating device with a continuous non-reflecting dielectric adjusting layer disposed between a grating structure and one or more continuous reflecting layers is disclosed that operates in an order of interest, such as the 1st order or 3rd order of diffraction, with high efficiency and near-exclusion of unwanted orders. Such devices can be employed, for example, in telecommunication and laser applications.Type: GrantFiled: August 27, 2008Date of Patent: February 14, 2012Assignee: Lumella Inc.Inventor: John Hoose
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Patent number: 8113434Abstract: Embodiments for electro-optical identification are disclosed.Type: GrantFiled: June 30, 2006Date of Patent: February 14, 2012Assignee: Britta Technologies, LLCInventor: Fred Charles Thomas, III
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Publication number: 20120019904Abstract: Disclosed is a filter for a light receiving element, which can sufficiently eliminate disturbance due to sunlight and the like out of doors. A filter for a light receiving element according to one embodiment of the present invention is used for a light receiving element which receives signal light having a known spectral distribution. The filter for a light receiving element according to one embodiment of the present invention is configured so that when the energy density of the ambient light in the light receiving element is represented by N1 and the energy density of the signal light in the light receiving element is represented by N2, N1/(N2)2 is minimized under constraints.Type: ApplicationFiled: September 9, 2011Publication date: January 26, 2012Applicant: NALUX CO., LTD.Inventor: Yasuaki INOUE
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Publication number: 20110317257Abstract: Anti-reflection glass, of a smooth and smooth tact, with an aspect that does not reflect light and pleasant at sight and glass products made therefrom are disclosed and described. Such products may in some aspects have characteristics defined by values of transmittance, absorbance, reflectance, roughness and a series of micrographs realized with a microscope of atomic force to see the morphology and structure of the anti-reflection glass.Type: ApplicationFiled: October 19, 2009Publication date: December 29, 2011Inventor: Juan Luis Rendon Granados
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Patent number: 8085434Abstract: The appearance of a color print viewed under UV illumination is predicted using a target comprising color patches each printed using a known coverage of printer colorant(s). In one case, the target is illuminated using a UV light source and an electronic image of the target is captured using a digital camera or the like. In another case, a spectrophotometer is used both with and without a UV cutoff filter to measure the target. The captured image data or the spectrophotometric measurements are used to derive a UV printer characterization model that relates any arbitrary combination of printer colorants to a predicted UV color appearance value. Metameric colorant mixture pairs for visible light and UV light viewing can be determined using the UV model together with a conventional visible light printer characterization model. A visual matching task is used to determine a correction factor for the UV printer characterization model.Type: GrantFiled: March 21, 2008Date of Patent: December 27, 2011Assignee: Xerox CorporationInventors: Raja Bala, Yonghui Zhao
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Publication number: 20110303824Abstract: Planar sub-wavelength structures provide superlensing, i.e., electromagnetic focusing beyond the diffraction limit. The planar structures use diffraction to force the input field to converge to a spot on the focal plane. The sub-wavelength patterned structures manipulate the output wave in such a manner as to form a sub-wavelength focus in the near field. In some examples, the sub-wavelength structures may be linear grating-like structures that can focus electromagnetic radiation to lines of arbitrarily small sub-wavelength dimension, or two dimensional grating-like structures and Bessel (azimuthally symmetric) structures that can focus to spots of arbitrarily small sub-wavelength dimensions. The particular pattern for the sub-wavelength structures may be derived from the desired focus. Some examples describe sub-wavelength structures that have been implemented to focus microwave radiation to sub-wavelength dimensions in the near field.Type: ApplicationFiled: August 22, 2011Publication date: December 15, 2011Applicant: THE REGENTS OF THE UNIVERSITY OF MICHIGANInventors: Anthony Grbic, Roberto D. Merlin
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Publication number: 20110297852Abstract: A mirror is provided which may include: a substrate; a thermal diffusion layer provided on a principal surface of the substrate, the thermal diffusion layer having a higher thermal conductivity than the substrate; and a reflective layer provided on the thermal diffusion layer, the reflective layer having a lower thermal conductivity than the thermal diffusion layer.Type: ApplicationFiled: March 22, 2011Publication date: December 8, 2011Inventors: Hidenobu Kameda, Osamu Wakabayashi, Masato Moriya
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Patent number: 8067082Abstract: A white film including polymer film wherein both the thermal shrinkage rate in the longitudinal direction and that in the transverse direction of the film are not less than ?0.2% and not more than 0.5% at 90° C., and a backlight for liquid crystal displays using such a white film. Since the white film hardly suffers from undulation or rise in its end portions, it is most suitable as a reflection film for backlights of liquid crystal displays. Since a backlight for liquid crystal displays using this white film can be used for a long time, it is applicable to liquid crystal displays of various electrical/electronic devices.Type: GrantFiled: November 9, 2005Date of Patent: November 29, 2011Assignee: Toray Industries, Inc.Inventors: Tomoko Kanaya, Tadami Matsuyama, Yoshihiko Sakaguchi, Osamu Watanabe
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Publication number: 20110272002Abstract: A sunlight collecting system generally comprises a light receiving module, a first light directing pipe, a second light directing pipe, and a third light directing pipe. The light receiving module includes a primary reflector and a secondary reflector. The primary reflector is structured in a way that an array of reflecting units can condense and direct sunlight to the secondary reflector, which in turn directs the sunlight sequentially into the first, second and third light directing pipes and finally to a residence house or office building for illumination, landscape gardening, decoration, temperature adjustment, power generation, energy storage, and so on. The installation of the system allows the light receiving module to rotate horizontally or vertically around an axis to an orientation best suitable for collecting the sunlight. The system is easy to install and it collects and directs sunlight efficiently.Type: ApplicationFiled: May 3, 2011Publication date: November 10, 2011Inventor: KEH-SHIUM LIU
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Patent number: 8048343Abstract: Light filters that use yellow melanin or melanin like materials prepared to have a yellow color and a melanin transmission spectrum in combination with a photochromic dye are disclosed. The yellow form of melanin has minimal impact on the perception of light intensity with transmission values greater than 80%. The combination allows for a single light filter suitable for both night driving and sunglass applications and which also preserve color perception.Type: GrantFiled: May 4, 2006Date of Patent: November 1, 2011Assignee: Photoprotective TechnologiesInventors: James M. Gallas, Ira Hessel
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Publication number: 20110249245Abstract: A method of thermally conditioning an optical element operating in a vacuum environment. The optical element includes a first body having at least one optical surface and at least one heat transfer surface. The first body is dynamically controlled in position and/or orientation. The method includes controlling a temperature of a second body to a desired temperature, the second body including a second heat transfer surface; positioning the second body adjacent the first body and dynamically controlling the second body in position and/or orientation so as to maintain the first and second heat transfer surfaces in a substantially constant arrangement without contact between the bodies; and delivering a gas as a heat transfer medium into a heat transfer space defined by the first and second heat transfer surfaces, while controlling the pressure of the gas in the heat transfer space to between about 30 Pa and about 300 Pa.Type: ApplicationFiled: April 6, 2011Publication date: October 13, 2011Applicant: ASML Netherlands B.V.Inventors: Franciscus Johannes Joseph JANSSEN, Erik Roelof Lopstra
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Publication number: 20110249262Abstract: A filter wheel and a spectrometer including the filter wheel are disclosed. The filter wheel has a first support structure on which a first plurality of filters are mounted and a second support structure on which at least one filter is provided. A radiation source generates a radiation beam, and a beam splitter splits the radiation beam into a first detection path and a second detection path. The first plurality of filters are selectively movable into the first detection path. The at least one filter on the second support structure is arranged to be disposed in the second detection path. The spectrometer includes a first radiation detector that detects radiation that passes through the selected filter in the first detection path, and a second radiation detector that detects radiation passing through the filter in the second detection path.Type: ApplicationFiled: November 2, 2009Publication date: October 13, 2011Applicant: KONINKLIJKE PHILIPS ELECTRONICS N.V.Inventor: James T. Russell
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Patent number: 8034436Abstract: A fluorescent article includes an underlayer colored fluorescent film and an overlayer colored fluorescent film, which is provided over the underlayer colored fluorescent film. The underlayer colored fluorescent film includes a first fluorescent colorant in an underlayer polymer matrix. The overlayer colored fluorescent film includes a second fluorescent colorant in an overlayer polymer matrix. The second fluorescent colorant in the overlayer film at least partially blocks light in a first wavelength range while allowing transmission of an amount of light in a second wavelength range effective to make the first fluorescent colorant fluoresce.Type: GrantFiled: October 25, 2006Date of Patent: October 11, 2011Assignee: Avery Dennison CorporationInventor: Guang-Xue Wei
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Publication number: 20110242515Abstract: A collector system for extreme ultraviolet (EUV) radiation includes a collector mirror and a radiation-collection enhancement device (RCED) arranged adjacent an aperture member of an illuminator. The collector mirror directs EUV radiation from an EUV radiation source towards the aperture member. The RCED redirects a portion of the EUV radiation that would not otherwise pass through the aperture of the aperture member or that would not have an optimum angular distribution, to pass through the aperture and to have an improved angular distribution better suited to input specifications of an illuminator. This provides the illuminator with greater amount of useable EUV radiation than would otherwise be available from the collector mirror alone, thereby enhancing the performing of an EUV lithography system that uses such a collector system with a RCED.Type: ApplicationFiled: March 11, 2011Publication date: October 6, 2011Inventors: Natale M. Ceglio, Gopal Vasudevan
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Publication number: 20110242631Abstract: A composition for producing optical elements having a gradient structure, particularly for holographic applications, is formed by a refractive index gradient. The composition is produced from one or more polymerizable and/or polycondensable monomers and at least one biological polymer. A potential difference is generated for the directed diffusion of the monomers by inducing a local polymerization or polycondensation. The result is the formation of a refractive index gradient.Type: ApplicationFiled: December 21, 2009Publication date: October 6, 2011Inventors: Peter William de Oliveira, Michael Veith, Peter Koenig, Jenny Kampka, Anette Kraegeloh
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Publication number: 20110220799Abstract: Disclosed are a nanogap device for field enhancement, which includes: a film made of an electrically conductive material; and a nanogap formed on the film and having a gap-width between a Thomas-Fermi screening length and a skin depth, the Thomas-Fermi screening length and the skin depth being determined by an electromagnetic wave and the electrically conductive material, and system for nanoparticle detection using the same.Type: ApplicationFiled: November 27, 2008Publication date: September 15, 2011Inventors: Dai Sik Kim, Hyeong Ryeol Park, Min An Seo
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Publication number: 20110221908Abstract: Systems and methods are disclosed that provide an infrared-transmissive dome, such as for infrared imaging applications. For example, an infrared-transmissive dome, for an embodiment, includes a main body providing a hollow, hemispherical-shaped dome; wherein the main body is made of an ultra-high molecular weight or a very-high molecular weight polyethylene material; and wherein the main body has a wall thickness equal to or less than approximately 0.012 inches to allow infrared transmittance greater than approximately sixty five percent through the main body for infrared imaging in a wavelength range of approximately three to fourteen micrometers.Type: ApplicationFiled: March 11, 2010Publication date: September 15, 2011Applicant: FLIR SYSTEMS, INC.Inventors: Theodore R. Hoelter, Barbara Sharp, Warn Burt, Robert Pietsch, Marcel Tremblay
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Patent number: 8018649Abstract: An IR camera comprising an optical system further comprises an additional optical element arranged in the form of a disk that is transparent to the infrared radiation in the beam path and at least a first motor arranged to tilt the additional optical element around a first axis substantially perpendicular to the beam path, and a control device for controlling said at least first motor in dependence of a first registered movement of the camera.Type: GrantFiled: January 22, 2008Date of Patent: September 13, 2011Assignee: Flir Systems ABInventors: Christoffer Strömberg, Ove Gustafsson
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Publication number: 20110216395Abstract: An adjustable clip for securing a grazing-incident collector (GIC) shell to a spider having spokes is disclosed. The clip includes a base adapted to be secured to a spider spoke and having an upper surface. The clip includes a fork member having two prongs each with end pads at respective prong ends, and having a first hinge portion at an end opposite the prong ends. A hinge leaf is secured to the base upper surface and has a second hinge portion that operably engages the first hinge portion, thereby forming a hinge that allows for rotatable adjustment of the fork member relative to the base. Movement of the GIC shell when performing optical alignment is accommodated by the clip self-adjusting by its end pads moving over the GIC shell outer surface. When GIC shell alignment is achieved, the end pads are secured to the GIC shell outer surface, thereby turning the clip into a rigid support member that secures the GIC shell in place relative to the spider.Type: ApplicationFiled: March 8, 2010Publication date: September 8, 2011Inventors: Giorgio Pirovano, Riccardo Ghislanzoni, Jacques Kools
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Patent number: 8012651Abstract: A pellicle membrane is mounted between an outer frame and an inner frame. At least one of the frames is attached to the reticle without using conventional adhesives. The pellicle and reticle may be used in a lithography system. The pellicle allows radiation to pass through the pellicle to the reticle and may prevent particles from passing through the pellicle.Type: GrantFiled: December 14, 2007Date of Patent: September 6, 2011Assignee: Intel CorporationInventors: Florence Eschbach, Paul Zimmerman, Alexander Tregub, Fu-Chang Lo
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Publication number: 20110211185Abstract: A spectral purity filter is configured to allow transmission therethrough of extreme ultraviolet (EUV) radiation and to refract or reflect non-EUV secondary radiation. The spectral purity filter may be part of a source module and/or a lithographic apparatus.Type: ApplicationFiled: July 9, 2009Publication date: September 1, 2011Applicant: ASML Netherlands B.V.Inventors: Martin Jacobus Johan Jak, Vadim Yevgenyevich Banine, Maarten Marinus Johannes Wilhelmus Van Herpen, Wouter Anthon Soer, Andrei Mikhailovich Yakunin
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Patent number: 8004760Abstract: Various embodiments related to rear-projection image display are disclosed. For example, one disclosed embodiment provides a projector for projecting an image and a screen configured to display the image. The screen comprises a filter layer having a light reception side and an image display side. The filter layer includes an array of trapezoidal transmissive elements and an array of trapezoidal absorption elements, where a wider base of each of the trapezoidal transmissive elements faces the light reception side of the filter layer, and where a wider base of each of the trapezoidal absorption elements faces the image display side of the filer layer.Type: GrantFiled: October 28, 2009Date of Patent: August 23, 2011Assignee: Microsoft CorporationInventors: Zhiqiang Liu, Prafulla Masalkar, Karlton Powell
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Publication number: 20110199577Abstract: An article for use in an OCT method, the article comprising a solid substrate and nanoparticles dispersed in or on the substrate in at least one light transmissive portion of the article such that the nanoparticles result in an increased extinction of the light transmissive portion along a transmission direction of the light transmissive portion compared to the substrate being free of nanoparticles. The extinction of the light transmissive portion along the transmission direction is less than 6, wherein the extinction is defined as a negative decadic logarithm of a ratio of an intensity of light which is transmitted through the light transmissive portion to an intensity of light which is incident on the light transmissive portion, wherein the light is in at least one of a visible and a near infrared wavelength range.Type: ApplicationFiled: August 17, 2010Publication date: August 18, 2011Applicant: Carl Zeiss Surgical GmbHInventors: Marco Wilzbach, Martin Hacker, Christoph Hauger
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Patent number: 7978402Abstract: Articles transparent to infrared radiation and resistant to impact and wear are provided. The article comprises a substrate and a composite coating disposed over the substrate and extending from an interface with the substrate to an external surface. The composite coating comprises a first phase and a second phase. The second phase has a higher resistance to erosive wear than the first phase. The coating comprises a compositional gradient proceeding from a first composition at the interface of the coating with the substrate to a second composition at the external surface, the first composition comprising a higher concentration of the first phase than that of the second composition.Type: GrantFiled: June 28, 2007Date of Patent: July 12, 2011Assignee: General Electric CompanyInventors: Sean Michael Sweeney, Timothy James Yosenick, Dalong Zhong, Milivoj Konstantin Brun, Sergio Paulo Martins Loureiro, Venkat Subramaniam Venkataramani, Mohan Manoharan
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Patent number: 7964754Abstract: Disclosed are a diimmonium salt and a near infrared ray absorption film including the same which is used for blocking the near infrared ray. The diimmonium salt for a near infrared ray absorption film is represented by Formula 1 of the specification, wherein, n is an integer of 1 or 2, R1 to R8 are independently a substituted or unsubstituted linear or branched C1-C10 alkyl group, the substituent for the alkyl group is selected from the group consisting of a cyano group, a nitro group, a carboxyl group, a sulfone group, a halogen atom, a hydroxyl group, a C1 -C8 alkoxy, alkoxyalkoxy, acyloxy, or alkylamino group, and C6-C18 aryl or aryloxy group, and X is a substituted fluoro alkyl phosphate anion represented by Formula 2 of the specification, wherein, x is an integer of 0 or 1, y is an integer of 1, 2 or 3, z is an integer of 6-y, and R9 to R13 are independently a hydrogen atom (H) or a fluorine atom (F).Type: GrantFiled: September 5, 2007Date of Patent: June 21, 2011Assignee: SK Chemicals Co., Ltd.Inventors: Min-Hyuk Lee, Ju-Sik Kang, Jeong-Ho Park, Sung-Yung Lee
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Publication number: 20110141446Abstract: A projection objective, such as for EUV lithography, for imaging a pattern arranged in an object plane into an image plane with the aid of electromagnetic radiation from the extreme ultraviolet range is provided. The projection objective includes a plurality of mirrors provided with reflective coatings and arranged between the object plane and the image plane. At least one of the mirrors includes a graded reflective coating with a rotationally-asymmetric coating thickness profile in the mirror plane on a substrate with a rotationally-asymmetric or rotationally-symmetric surface profile. The projection objective can exhibit increased overall transmission.Type: ApplicationFiled: November 22, 2010Publication date: June 16, 2011Applicant: CARL ZEISS SMT GMBHInventors: Reinhold Walser, Thomas Schicketanz
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Patent number: 7959310Abstract: An optical arrangement, in particular a projection system, illumination system or beam shaping system for EUV lithography, including at least one optical element that is arranged in a beam path of the optical arrangement and that reflects radiation in the soft X-ray- or EUV wavelength range, wherein at least during operation of the optical arrangement at least one of, preferably each of, the reflective optical elements in the beam path, at least at the optical surface, has an operating temperature of approximately 30° C. or more, preferably of approximately 100° C. or more, particularly preferably of approximately 150° C. or more, and even more preferably of approximately 250° C. or more, and wherein the optical design of the at least one reflective optical element is selected such that its optical characteristics are optimised for operation at the operating temperature. Also presented is a method for providing a reflective optical element with such an optical design.Type: GrantFiled: September 13, 2007Date of Patent: June 14, 2011Assignees: Carl Zeiss SMT GmbH, ASML Netherlands B.V.Inventors: Dirk Heinrich Ehm, Annemieke Van De Runstraat, Bastiaan Theodoor Wolschrijn, Arnoldus Jan Storm, Thomas Stein, Marco G. H. Meijerink, A. G. Ton M. Bastein, Esther L. J. Van Soest-Vercammen, Norbertus Benedictus Koster, Frits G. H. M. Gubbels, Peter J. Oprel, Michiel Nienoord, Michel Riepen, Johannes Hubertus Josephina Moors
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Patent number: 7957077Abstract: A molded optical filter is provided having effective filtering of energy emissions at an optical density (OD) of greater than 4 in three energy emission bands corresponding to the wavelengths of laser emissions while preserving the wearer's ability to differentiate and recognize colors and having a pleasing overall color. The selective optical filter is a moldable polymer filter that has three dyes therein to produce sharp notch filtering ranges at about 530 nm, 700 nm and 1060 nm and a fourth color balance dye therein to adjust the overall color of the filter making it more pleasing and desirable to the wearer.Type: GrantFiled: January 5, 2010Date of Patent: June 7, 2011Assignee: Sperian Eye & Face Protection, Inc.Inventors: Marianne Krieg-Kowald, Mark McLear
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Patent number: 7952805Abstract: A transparent solar control film may have a single or multiple layer core that includes at least one layer of an orientated thermoplastic polymer material. Infrared radiation absorbing nanoparticles that preferentially absorb at least about 100 times more infrared radiation than visible radiation may be dispersed within the at least one layer of an oriented thermoplastic polymer layer. The transparent solar control film may have a haze value of less than about 5 percent.Type: GrantFiled: August 22, 2006Date of Patent: May 31, 2011Assignee: 3m Innovative Properties CompanyInventors: Daniel J. McGurran, Edward J. Kivel, Jeffrey A. Boettcher, Laurence R. Gilbert, Mitsuhiro M. Kominami, Raghunath Padiyath, Stephen J. Strauss
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Publication number: 20110100424Abstract: The subject of the invention is a transparent substrate (6), especially glass substrate, comprising an antireflection coating on at least one of its faces, which is made of a multilayer (A) of thin layers having alternately high and low refractive indices. The multilayer is characterized in that the high-index first layer (1) and/or the high-index third layer (3) are based on a zinc tin mixed oxide, with a ratio, expressed in atomic percent, of the tin to the zinc that is greater than 1.Type: ApplicationFiled: March 10, 2009Publication date: May 5, 2011Applicant: SAINT-GOBAIN GLASS FRANCEInventors: Stephanie Roche, Erwan Mahe, Laurent Labrousse
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Publication number: 20110085232Abstract: Example apparatus have a radiation-receiving surface configured to receive electromagnetic radiation, including a sub-wavelength grating supported by a substrate. The sub-wavelength grating has a side-wall profile that may be configured and optimized to obtain desired spectral properties.Type: ApplicationFiled: October 8, 2010Publication date: April 14, 2011Applicants: The Penn State Research FoundationInventors: Douglas H. Werner, Theresa S. Mayer, Clara R. Baleine
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Publication number: 20110080635Abstract: A image display device of the present invention forms and displays an image by light emitted from a light source. The image display device includes a wavelength selection means (2) arranged on the light path of light emitted from the light source and that, as the reflected light of this light, reflects light belonging to a first wavelength range and light belonging to a second wavelength range that differs from the first wavelength range at a predetermined period.Type: ApplicationFiled: June 13, 2008Publication date: April 7, 2011Inventor: Katsuyuki Takeuchi
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Patent number: 7901787Abstract: An object of the present invention is to provide a resin composite-type optical element capable of cutting off ultraviolet light even though it uses a photocurable resin. A resin composite-type optical element of the embodiment of the present invention is a resin composite-type optical element having a base material and a resin layer, and the resin layer has at least a first resin layer which is a molded product of a photocurable resin and which has an internal transmittance of not less than 85% for light of the wavelength of 400 nm in the thickness of 100 ?m and an internal transmittance of not more than 3% for light of the wavelength of 360 nm in the thickness of 100 ?m.Type: GrantFiled: March 18, 2010Date of Patent: March 8, 2011Assignee: Nikon CorporationInventor: Akiko Miyakawa