Abstract: In some embodiments, a projection objective for lithography includes an optical arrangement of optical elements between an object plane and an image plane. The arrangement generally has at least one intermediate image plane, the arrangement further having at least two correction elements for correcting aberrations, of which a first correction element is arranged optically at least in the vicinity of a pupil plane and a second correction element is arranged in a region which is not optically near either a pupil plane or a field plane.

Abstract: An optical system has an optical component with a curved surface and zero optical power. The optical system is configured so that the optical component is the first optical structure encountered by radiation entering the optical system from externally thereof. According to a different aspect, a method is provided for making an optical system that has an optical component with a surface, where the optical component is the first optical structure encountered by radiation entering the optical system from externally thereof. The method includes configuring the surface to be curved, and configuring the optical component to have zero optical power.

Abstract: Image-intensifying glasses 100 are disclosed that are suitable for certain commercial and entertainment applications by virtue of their light weight, small size, and economical production, compared to certain other night vision products. In one disclosed embodiment, input light passes through two Amici prisms 144 and 148 and a field-flattening lens 150 to reach an image intensifier 152. The intensified image it produces is reflected off a first folding mirror 162, passes through a lens 154, reflects off a curved mirror 156, and passes back through the lens 154 the other way. The intensified image then passes through two additional, non-doublet lenses 158 and 160, between which an intermediate image exists. The intensified image then reflects off the “lens,” or visor 130, of the glasses and proceeds to the pupil of eye 131 of the wearer. Alternative embodiments use a helmet visor, mirror, or other (at least partially) reflective surface for the final reflection.

Abstract: A projection optical system for enlarging and projecting a light flux from an image display panel modulating an irradiation light, onto a screen in an oblique direction, the projection optical system includes: a lens system including a plurality of lenses, the lens system refracting the light flux from the image display panel; a single convex mirror reflecting the light flux from the lens system, the lens system and the convex mirror being arranged in an order from the image display panel; and a stop disposed in an optical path after an emission from the lens system to an incidence on the convex mirror.

Abstract: A visual display device includes an image display element 3 and an ocular optical system 5 that allows a viewer to observe an image displayed on the image display element 3 as a virtual image in a remote location. The ocular optical system 5 has at least one reflection optical element 5a, at least one transmission optical element 5b, and a visual axis 101 including a central main light beam in the reverse raytrace of the ocular optical system 5 which is directed from the center of an entrance pupil E toward the reflection optical element 5a through the transmission optical element 5b. The number of times of image formation is different between in a first cross-section including the visual axis 101 and in a second cross-section which is perpendicular to the first cross-section and includes the visual axis 101.

Abstract: An imaging optical system includes a plurality of mirrors that image an object field in an object plane into an image field in an image plane. At least one of the mirrors is obscured, and thus has a opening for imaging light to pass through. The fourth-last mirror in the light path before the image field is not obscured and provides, with an outer edge of the optically effective reflection surface thereof, a central shadowing in a pupil plane of the imaging optical system. The distance between the fourth-last mirror and the last mirror along the optical axis is at least 10% of the distance between the object field and the image field. An intermediate image, which is closest to the image plane, is arranged between the last mirror and the image plane. The imaging optical system can have a numerical aperture of 0.9. These measures, not all of which must be effected simultaneously, lead to an imaging optical system with improved imaging properties and/or reduced production costs.

Abstract: In one or more embodiments, an all-reflective optical system includes a primary mirror of ellipsoidal configuration, a secondary mirror of hyperboloidal configuration facing the primary mirror, and an eye-piece that includes: a positive-powered tertiary mirror having a majority of positive power that is expected in the eye-piece and configured to substantially collimate light rays incident thereon; and a negative-powered near-flat quaternary mirror having lesser power than the tertiary mirror and configured to receive the substantially collimated light rays from the tertiary mirror, further collimate the received light rays and reflect the further collimated light rays to an exit pupil. The primary mirror, the secondary mirror and the eye-piece thereby form an afocal optical system.

Abstract: A projection optical apparatus capable of providing high image quality and having a reduced size. The projection optical apparatus comprises a light valve and a projection optical system including a first optical system (5) having a transmissive-refractive element and a second optical system (3?) having a reflective-refractive element. An image formed on the light valve is projected by the projection optical system on a projection surface (4). The optical axis in the first optical system (5) is folded both vertically and horizontally. The first group (5A) of the first optical system is contained in a space (dead space) whose lower limit is defined by a lower edge of the second optical system (3?)/thereby reducing the depth of the apparatus.

Abstract: Image-intensifying glasses 100 that are suitable for certain commercial and entertainment applications by virtue of their light weight, small size, and economical production, compared to certain other night vision products. In one disclosed embodiment, input light passes through two Amici prisms 144 and 148 and a field-flattening lens 150 to reach an image intensifier 152. The intensified image it produces is reflected off a first folding mirror 162, passes through a lens 154, reflects off a curved mirror 156, and passes back through the lens 154 the other way. The intensified image then passes through two additional, non-doublet lenses 158 and 160, between which an intermediate image exists. The intensified image then reflects off the “lens,” or visor 130, of the glasses and proceeds to the pupil of eye 131 of the wearer. Alternative embodiments use a helmet visor, mirror, or other (at least partially) reflective surface for the final reflection.

Abstract: A reduction projection objective for projection lithography has a plurality of optical elements configured to image an effective object field arranged in an object surface of the projection objective into an effective image field arranged in an image surface of the projection objective at a reducing magnification ratio |?|<1. The optical elements form a dry objective adapted with regard to aberrations to a gaseous medium with refractive index n?<1.01 filling an image space of finite thickness between an exit surface of the projection objective and the image surface. The optical elements include a largest lens having a maximum lens diameter Dmax and are configured to provide an image-side numerical aperture NA<1 in an effective image field having a maximum image field height Y?. With COMP=Dmax/(Y?·(NA/n?)2) the condition COMP<15.8 holds.

Abstract: A projection optical system comprising a first optical system configured to form a first image conjugated with an object and a second optical system configured to project a second image conjugated with the first image toward a projection surface, in which at least one of the first optical system and second optical system comprises at least one optical element(s) movable relative to the object is provided, wherein an image distance of the projection optical system is changed and a size of the second image is changed, by moving at least one of the optical element(s) relative to the object.

Abstract: A reduction projection objective for projection lithography has a plurality of optical elements configured to image an effective object field arranged in an object surface of the projection objective into an effective image field arranged in an image surface of the projection objective at a reducing magnification ratio |?|<1. The optical elements form a dry objective adapted with regard to aberrations to a gaseous medium with refractive index n?<1.01 filling an image space of finite thickness between an exit surface of the projection objective and the image surface. The optical elements include a largest lens having a maximum lens diameter Dmax and are configured to provide an image-side numerical aperture NA<1 in an effective image field having a maximum image field height Y?. With COMP=Dmax/(Y?·(NA/n?)2) the condition COMP<15.8 holds.

Abstract: The disclosure relates to a projection objective for imaging an object field in an object plane having a field aspect ration (x/y) of at least 1.5 into an image field in an image plane. In general, the projection objective has at least two optically effective surfaces for guiding imaging light in a beam path between the object field and the image field. The projection objective can take up an installed space having a cuboid envelope that is spanned by a length dimension and two transverse dimensions.

Abstract: An objective having a plurality of optical elements arranged to image a pattern from an object field in an object surface of the objective to an image field in an image surface region of the objective at an image-side numerical aperture NA>0.8 with electromagnetic radiation from a wavelength band around a wavelength ?, includes a number N of dioptric optical elements, each dioptric optical element i made from a transparent material having a normalized optical dispersion ?ni=ni(?0)?ni(?0+1 pm) for a wavelength variation of 1 pm from a wavelength ?0. The objective satisfies the relation ? ? i = 1 N ? ? ? ? n i ? ( s i - d i ) ? ? 0 ? NA 4 ? A for any ray of an axial ray bundle originating from a field point on an optical axis in the object field, where si is a geometrical path length of a ray in an ith dioptric optical element having axial thickness di and the sum extends on all dioptric optical elements of the objective. Where A=0.

Abstract: A projection optical system having a magnification side and a reduction side for forming a magnified image on a magnification side image surface conjugate with a reduction side conjugate image surface includes, arranged in order from the reduction side, a first imaging system including a plurality of lens elements and lens components and a second imaging system including a mirror having a concave, aspheric reflecting surface. An intermediate image is formed between the first imaging system and the second imaging system. The projection optical system satisfies specified conditions related to the travel of principal rays through the projection optical system and related to the Abbe number of a lens element having positive refractive power of the first imaging system. A projection display device includes the projection optical system and may include a light valve for modulating a light beam for projection on a screen.

Abstract: A catadioptric optical imaging system and method is provided, in which up to four (4) reticles are imaged to a single imaging location (e.g. for imaging substrates), in a manner designed to provide high throughput, with a relatively high resolution, and with substrates whose size may approach 450 mm.

Abstract: A telescope includes: a concave mirror reflecting light from an object; an image pickup element receiving light from the mirror; a compensation optical system for guiding light from the mirror to the image pickup element; a lens barrel integrally holding the image pickup element and the compensation optical system; and a drive mechanism for driving the lens barrel to change the angle of the optical axis of the compensation optical system with respect to the optical axis of the concave mirror.

Abstract: A variable magnification optical system projects an image onto a screen with a sufficient magnification without requiring a large-sized mirror. The variable magnification optical system includes a first optical system through which a light beam modulated with an image signal corresponding to the image is passed; a second optical system disposed downstream of the first optical system in a direction of travel of the light beam along an optical axis; and a reflective optical element having a magnification power that is configured to reflect the light beam from the second optical system toward the screen. A magnification of the image projected on the screen is changed by moving the reflective optical element relative to the object plane, thus changing a distance between the screen and the reflective optical element, while an incident angle of the light beam on the screen is maintained substantially constant.

Abstract: New and useful concepts for an imaging optical system configured to simultaneously image a reticle to a pair of imaging locations are provided, where the imaging optics comprise a pair of arms, each of which includes catadioptric imaging optics. In addition, the imaging optics are preferably designed to image a reticle simultaneously to the pair of imaging locations, at a numerical aperture of at least 1.3, and without obscuration of light by the imaging optics.

Abstract: A projection optical system for use in an image projection apparatus illuminating a lightbulb forming an image in accordance with a modulating signal with illumination light from a light source is disclosed. The projection optical system includes first and second optical systems arranged along an optical path defining an upstream-downstream direction in the order described from upstream to downstream on the downstream side of the lightbulb. The first optical system includes at least one dioptric system and has positive power. The second optical system includes at least one reflecting surface having power and has positive power. The image formed by the lightbulb is formed as an intermediate image in the optical path, and the intermediate image is magnified and projected.

Abstract: A catadioptric projection objective includes a plurality of optical elements arranged to image an off-axis object field arranged in an object surface onto an off-axis image field arranged in an image surface of the projection objective. The optical elements form: a first, refractive objective part that can generate a first intermediate image from radiation coming from the object surface and including a first pupil surface; a second objective part including at least one concave mirror that can image the first intermediate image into a second intermediate image and including a second pupil surface optically conjugated to the first pupil surface; and a third objective part that can image the second intermediate image onto the image surface and including a third pupil surface optically conjugated to the first and second pupil surface.

Abstract: An optical sheet includes a substrate onto which light is incident, and a convex part protruded from the substrate by a predetermined thickness. A thickness of the convex part increases from an edge to a center thereof.

Abstract: A relatively high spectral bandwidth objective employed for use in imaging a specimen and method for imaging a specimen is provided. The objective includes a lens group having at least one focusing lens configured to receive light energy and form focused light energy. The focused light energy forms an intermediate image. The objective further includes at least one field lens located in proximity to an intermediate image, and a catadioptric arrangement positioned to receive the intermediate light energy from the at and form controlled light energy. The catadioptric arrangement may include at least one Mangin element and can include a meniscus lens element.

Abstract: Objectives and other optical assemblies include a reflective surface that is truncated at or near a focus based on a curvature of the reflective surface. A specimen is situated at or near the focus of the reflective surface, so that the reflective surface captures and collimates optical radiation emitted from the specimen. The reflective surface can be defined on an optical substrate along with a lens surface, so that an illumination flux is focused on the specimen by the lens surface, and a secondary light flux produced in response to the illumination flux is captured and collimated by the reflective surface.

Abstract: A system for use with a reduced size catadioptric objective is disclosed. The system including the reduced size objective includes various subsystems to allow enhanced imaging, the subsystems including illumination, imaging, autofocus, positioning, sensor, data acquisition, and data analysis. The objective may be employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range, and elements of the objective are less than 100 mm in diameter. The objective comprises a focusing lens group and at least one field lens oriented to receive focused light energy from the focusing lens group and provide intermediate light energy. The objective also includes a Mangin mirror arrangement. The design imparts controlled light energy with a numerical aperture in excess of 0.65 and up to approximately 0.90 to a specimen for imaging purposes, and the design may be employed in various environments.

Abstract: An objective having a plurality of optical elements arranged to image a pattern from an object field in an object surface of the objective to an image field in an image surface region of the objective at an image-side numerical aperture NA>0.8 with electromagnetic radiation from a wavelength band around a wavelength ?, includes a number N of dioptric optical elements, each dioptric optical element i made from a transparent material having a normalized optical dispersion ?ni=ni(?0)?ni(?0+1 pm) for a wavelength variation of 1 pm from a wavelength ?0. The objective satisfies the relation ? ? i = 1 N ? ? ? ? n i ? ( s i - d i ) ? ? 0 ? NA 4 ? A for any ray of an axial ray bundle originating from a field point on an optical axis in the object field, where si is a geometrical path length of a ray in an ith dioptric optical element having axial thickness di and the sum extends on all dioptric optical elements of the objective. Where A=0.

Abstract: A reduced size catadioptric inspection system employing a catadioptric objective and immersion substance is disclosed. The objective may be employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range, and can provide numerical apertures in excess of 0.9. Elements are less than 100 millimeters in diameter and may fit within a standard microscope. The objective comprises a focusing lens group, a field lens, a Mangin mirror arrangement, and an immersion substance or liquid between the Mangin mirror arrangement and the specimen. A variable focal length optical system for use with the objective in the catadioptric inspection system is also disclosed.

Abstract: A catadioptric optical system having a high numerical aperture operates in a wide spectral range. The catadioptric optical system includes a correcting plate, a first reflective surface and a second reflective surface. The correcting plate conditions electromagnetic radiation to correct at least one aberration. The first reflective surface is positioned to reflect the electromagnetic radiation conditioned by the correcting plate. The second reflective surface is positioned to focus the electromagnetic radiation reflected by the first reflective surface onto a target portion of a substrate. The electromagnetic radiation reflected by the first reflective surface and focused by the second reflective surface is not refracted by a refractive element, thereby enabling the catadioptric optical system to operate in a broad spectral range.

Abstract: A projection objective for imaging a pattern provided in an object surface onto an image surface of the projection objective has an object-side imaging subsystem for creating a final intermediate image closest to the image surface from radiation coming from the object surface and an image-side imaging subsystem for directly imaging the final intermediate image onto the image surface. The image-side imaging subsystem includes at least one aspheric primary correcting lens having an aspheric primary correcting surface. The object-side imaging subsystem includes a secondary correcting group having at least one secondary correcting lens having an aspheric secondary correcting surface. Conditions involving maximum incidence angles and subaperture offsets at the correcting surfaces are given which should be observed to obtain sufficient aberration correction at very high image-side numerical apertures NA.

Abstract: Image-intensifying glasses 100 are disclosed that are suitable for certain commercial and entertainment applications by virtue of their light weight, small size, and economical production, compared to certain other night vision products. In one disclosed embodiment, input light passes through two Amici prisms 144 and 148 and a field-flattening lens 150 to reach an image intensifier 152. The intensified image it produces is reflected off a first folding mirror 162, passes through a lens 154, reflects off a curved mirror 156, and passes back through the lens 154 the other way. The intensified image then passes through two additional, non-doublet lenses 158 and 160, between which an intermediate image exists. The intensified image then reflects off the “lens,” or visor 130, of the glasses and proceeds to the pupil of eye 131 of the wearer. Alternative embodiments use a helmet visor, mirror, or other (at least partially) reflective surface for the final reflection.

Abstract: A luminous flux optically modulated by an image display device is projected to be magnified on a screen by a projection optical system includes: a first optical system having a positive first lens group including eight lenses, a negative second lens group including three lenses, and a third lens group including an aspheric single lens; and a second optical system including an aspheric reflecting mirror. The projection optical system is an off-axial optical system, and forms the intermediate image between the first optical system and the second optical system. Moreover, the expressions T1/Y<12.5 and T12/f1<6.0 are satisfied where T1 is the overall length of the first optical system, Y is the maximum light ray height on an image display device, T12 is the distance between the first optical system and the second optical system, and f1 is the focal length of the first optical system.

Abstract: There is a need for providing a projection optical system that is appropriate for maintaining high resolution with low distortion, miniaturizing a reflector, decreasing the number of reflectors, and decreasing the depth and the bottom (or top) of a display used for a rear projection television, for example. The projection optical system according to the invention enlarges and projects images from a primary image surface existing at a reducing side to a secondary image surface existing at an enlarging side. The projection optical system has a first optical system L11 and a second optical system L12. The first optical system L11 forms an intermediate image (position II) of the primary image surface. The second optical system L12 has a concave reflector AM1 that forms the secondary image surface resulting from the intermediate image. A light beam travels from the center of the primary image surface and to the center of the secondary image surface and crosses an optical axis.

Abstract: The disclosure relates to a method of manufacturing a projection objective, and a projection objective, such as a projection objective configured to be used in a microlithographic process. The method can include defining an initial design for the projection objective and optimizing the design using a merit function. The method can be used in the manufacturing of projection objectives which may be used in a microlithographic process of manufacturing miniaturized devices.

Abstract: A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective has a first, refractive objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part including at least one concave mirror for imaging the first intermediate imaging into a second intermediate image; and a third, refractive objective part for imaging the second intermediate imaging onto the image plane; wherein the projection objective has a maximum lens diameter Dmax, a maximum image field height Y?, and an image side numerical aperture NA; wherein COMP1=Dmax/(Y?·NA2) and wherein the condition COMP1<10 holds.

Abstract: A lens, an apparatus, and a system, as well as a method and article, may operate to receive a plurality of left-eye rays through a first plurality of separating facets of a lens at an image-acquisition plane, and to receive a plurality of right-eye rays through a second plurality of separating facets of the lens at the image-acquisition plane. Data acquired from the image plane may be used to construct a stereoscopic image, including a moving, panoramic stereoscopic images. Lenses, image-capture devices, and projectors may be implemented that operate using three or more viewpoints.

Abstract: A common-aperture optical system includes a reflective telescope having a common boresight, an entrance pupil, an exit pupil, and a beam path extending from the entrance pupil to and beyond the exit pupil. A beam splitter intersects the beam path so that the beam path is incident upon the beam splitter. A light sensor is positioned to receive an input light beam traveling along the beam path after the beam path intersects the beam splitter and passes the exit pupil of the reflective telescope. A light source produces an output light beam incident upon the beam splitter and positioned to inject the output light beam into an inverse of the beam path and toward the entrance pupil of the reflective telescope. A diverger corrects at least one of the input light beam and the output light beam.

Abstract: In a catadioptric projection objective for imaging a pattern of a mask arranged in an object surface (as) of the projection objective into an image field arranged in the image surface (IS) of the projection objective, with a demagnifying imaging scale, having at least one concave mirror (CM) and at least one intermediate image, the object plane and the image plane are originated parallel to one another. A deflection system (DS) for deflecting bundles of rays from one part of the projection objective into another part of the projection objective is arranged between the object plane and the image plane. The deflection system contains an image rotating reflection device which is designed to effect an image rotation through 180° by multiple reflection at planar reflection surfaces situated at an angle with respect to one anther, whereby the imaging scale has the same sign in two planes perpendicular to an optical axis and perpendicular to one another.

Abstract: A catadioptric objective includes a plurality of optical elements arranged along an optical axis to image a pattern from an object field in an object surface of the objective to an image field in an image surface region of the objective at an image-side numerical aperture NA with electromagnetic radiation from a wavelength band around a central wavelength ?. The optical elements include a concave mirror and a plurality of lenses. The projection objective forms an image of the pattern in a respective Petzval surface for each wavelength ? of a wavelength band, the Petzval surfaces deviating from each other for different wavelengths. In embodiments, a longitudinal departure p of the Petzval surface at a given wavelength from a planar reference surface at an edge field point of the image field (at maximum image height y?), measured parallel to the optical axis in the image surface region, varies with the wavelength ? according to dp/d?<(0.2?/NA2)/nm.

Abstract: A catadioptric projection objective for imaging of a pattern, which is arranged on the object plane of the projection objective, on the image plane of the projection objective has a first objective part for imaging of an object field to form a first real intermediate image, a second objective part for production of a second real intermediate image using the radiation coming from the first objective part; and a third objective part for imaging of the second real intermediate image on the image plane. The second objective part is a catadioptric objective part with a concave mirror A first folding mirror for deflection of the radiation coming from the object plane in the direction of the concave mirror and a second folding mirror for deflection of the radiation coming from the concave mirror in the direction of the image plane are provided.

Abstract: A projection optical system for use in an image projection apparatus illuminating a lightbulb forming an image in accordance with a modulating signal with illumination light from a light source is disclosed. The projection optical system includes first and second optical systems arranged along an optical path defining an upstream-downstream direction in the order described from upstream to downstream on the downstream side of the lightbulb. The first optical system includes at least one dioptric system and has positive power. The second optical system includes at least one reflecting surface having power and has positive power. The image formed by the lightbulb is formed as an intermediate image in the optical path, and the intermediate image is magnified and projected.

Abstract: An optical imaging system for imaging at least two planes of a light beam spaced apart in the beam direction, in particular of a laser light beam, onto a common target site, for example a detector, has at least one optically imaging element arranged in the beam path of the light beam. The at least one optically imaging element is a collecting primary mirror, and arranged downstream of the primary mirror are at least two secondary mirrors that can be brought alternately into the beam path, the secondary mirrors being designed such that one secondary mirror permits imaging of one plane, and the other secondary mirror permits imaging of the other plane of the light beam onto the target site in each case.

Abstract: A scanning exposure apparatus of the present invention is one for transferring a pattern of a first object onto a second object while projecting an image of the first object placed on a first plane, onto the second object placed on a second plane and changing a positional relation between the image of the first object and the second object in a scanning direction. The scanning exposure apparatus has a first projection optical system having a first field of view on the first plane and adapted to project an enlargement image of a portion of the first object in a first projection region on the second plane, based on light from the first field of view, and a second projection optical system having a second field of view on the first plane and adapted to project an enlargement image of a portion of the first object in a second projection region on the second plane, based on light from the second field of view.

Abstract: A projection exposure lens has an object plane, optical elements for separating beams, a concave mirror, an image plane, a first lens system arranged between the object plane and the optical elements for separating beams, a second double pass lens system arranged between the optical elements for separating beams and the concave mirror, a third lens system arranged between the optical elements for separating beams and the image plane. The second lens system has a maximum of five lenses.

Abstract: A system for multiple mode imaging is disclosed. The catadioptric system has an NA greater than 0.65, and preferably greater than 0.9, highly corrected for low and high order monochromatic aberrations. The system employs unique illumination entrances and optics to collect reflected, diffracted, and scattered light over a range of angles. Multiple imaging modes are possible by varying the illumination geometry and apertures at the pupil plane. Illumination can enter the catadioptric optical system using an auxiliary beamsplitter or mirror, or through the catadioptric elements at any angle from 0 to 85 degrees from vertical. The system may employ a relayed pupil plane, used to select different imaging modes, provide simultaneous operation of different imaging modes, Fourier filtering, and other pupil shaping operations.

Abstract: The light of a broad energy band can be observed by reflecting the light of the broad energy band, for example, the light from the visible light region to the x-ray region at a high reflectance respectively, by a composite telescope including a normal incidence optical system and an oblique incidence optical system. A broadband telescope comprise an oblique incidence optical system unit in which the light is obliquely incident on a surface part for reflecting the incident light, a normal incidence optical system unit in which the light is substantially vertically incident on a surface part for reflecting the incident light, and an analyzer for spectrum analysis of the light reflected by the surface part of the obliquely incidence optical system unit and the light reflected by the surface part of the normal incidence optical system unit.

Abstract: An imaging system for imaging an object field arranged in an object surface of the imaging system onto an image field arranged in an image surface of the optical system while creating at least one intermediate image including: a first imaging subsystem for creating the intermediate image from radiation coming from the object surface, the first imaging subsystem having a first optical axis; and a second imaging subsystem different in construction from the first imaging subsystem for imaging the intermediate image onto the image surface, the second imaging subsystem having a second optical axis; wherein the first optical axis is offset with respect to the second optical axis by an axis offset at the intermediate image and wherein the intermediate image has a correction status adapted to the axis-offset such that the correction status of the image field is essentially free from aberrations caused by the axis-offset.

Abstract: A reduced size catadioptric inspection system employing a catadioptric objective and immersion substance is disclosed. The objective may be employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range, and can provide numerical apertures in excess of 0.9. Elements are less than 100 millimeters in diameter and may fit within a standard microscope. The objective comprises a focusing lens group, a field lens, a Mangin mirror arrangement, and an immersion substance or liquid between the Mangin mirror arrangement and the specimen. A variable focal length optical system for use with the objective in the catadioptric inspection system is also disclosed.

Abstract: A projection exposure lens has an object plane, optical elements for separating beams, a concave mirror, an image plane, a first lens system arranged between the object plane and the optical elements for separating beams, a second double pass lens system arranged between the optical elements for separating beams and the concave mirror, a third lens system arranged between the optical elements for separating beams and the image plane. The second lens system has a maximum of five lenses.

Abstract: A projection optical system that receives light from a display element to project an image displayed by the display element onto a screen with enlargement at a varying magnification achieved by varying the projection distance to the screen has: a refractive optical system composed of one or more refractive lenses and having a positive optical power; and a concave-surfaced mirror disposed to the screen side of the refractive optical system and having a plane-symmetric reflective surface. The projection optical system includes at least one optical element designed to be movable for focusing. The projection optical system forms an intermediate image between the refractive optical system and the concave-surfaced mirror. Moreover, a prescribed conditional formula is fulfilled.

Abstract: A wide-angle imaging optical system includes a refractive optical system (3), a reflective optical system, and an image-forming optical system (5). The reflective optical system includes a first reflection surface (1) that directly reflects rays of light from an object, and a second reflection surface (2) that reflects rays of light from the first reflection surface (1). An open portion is provided between the first reflection surface (1) and the second reflection surface (2), and rays of light from the object enter the open portion. A light-transmitting portion (2a) is provided in the second reflection surface (2) and transmits rays of light that have entered the refractive optical system (3). An aperture (1a) is provided in the first reflection surface (1) and allows rays of light from the second reflection surface (2) and the refractive optical system (3) to enter the image-forming optical system (5).