Abstract: A virtual image display apparatus includes a first display device for a right eye, a second display device for a left eye, and an adjustment device configured to adjust display positions, and the first display device and the second display device are configured to guide imaging light in a second direction intersecting a first direction in which the first display device and the second display device are aligned, and display the first image and the second image and the adjustment device makes an adjustment to provide an overlapping area in which the first image and the second image are visually recognized in the overlapping area and an independent area in which the first image and the second image are visually recognized independently.

Abstract: A near-eye optical system, for receiving an image beam, includes an optical waveguide, configured to expand the image beam in a direction, and including a near-eye surface and a structure surface. The structure surface includes a light incident area and is opposite to the near-eye surface. The light incident area is located in a transmission path of the image beam. A plurality of reflective inclined surfaces are disposed on the structure surface and located at one side of the light incident surface and arranged along the direction. The structure surface is sequentially divided into the light incident area and a plurality of optical areas along the direction. A line number density of the reflective inclined surfaces in the optical area closest to the light incident area in the direction is less than a line number density of the reflective inclined surfaces in the optical area furthest from the light incident area in the direction.

Abstract: Swimming goggles of the present invention include a pair of lenses. Each lens has a window. The window is connected with a ventilated waterproof device that is watertight but not airtight, through which a heat on an inner side of the lens produced by human body in form of fog and water particles permeates toward an outer side of the lens; relatively, fog on the outer side of the lens is soon turned into water drops through condensation, the water drops are too large to undergo reverse permeation into the inner side of the lens; because of the effect of surface tension within the condensed water drops, water molecules pull each other as a stable state and are unable to be separated from the water drops toward the inner side of the lens so that the water leakage of the swimming goggles is eliminated and waterproof function is achieved.

Abstract: The invention provides a reflector (2) comprising a reflector wall (20), the reflector wall (20) comprising a first wall surface (22) and a second wall surface (23) defining said reflector wall (20), the reflector wall (20) comprising a light transmissive material (21), wherein the reflector wall (20) has a first dimension (d1) and a second dimension (d2) defining a first reflector wall area, wherein each wall surface (22,23) comprises a plurality of parallel arranged elongated corrugations (210), wherein the corrugations have corrugation heights (h2) relative to recesses (220) between adjacent corrugations (210) and corrugation widths (w2) defined by the distance between adjacent recesses (220) at the respective wall surfaces (22,23), wherein the corrugations (210) have curved corrugation surfaces (230) between said adjacent recesses (220) having corrugation radii (r2) at the respective wall surfaces (22,23), and wherein over at least part of one of the first dimension (d1) and the second dimension (d2) one

Abstract: The present inventions is related to the optical lenses that use subwavelength structures to perform an optical function, the applications of such lenses, and the methods of making the same. Particularly, the present invention provide an optical lens(es), termed “subwavelength Moiré index lens” or “SMIL” for manipulating light. The SMIL comprises a thin material layer having an effective optical index that has a Moiré pattern of two or more periodic structures. The SMIL allows a lens to be ultrathin, flat, numerical aperture nearly one, scalable to large area, and manufacturable at low cost. The present invention also provides the systems based on SMIL, such lens systems, LEDs and photodetectors, and the fabrication methods of the SMIL.

Abstract: To provide an optical connector and an optical transmission module that are suitable for a plurality of optical transmission paths two-dimensionally arranged. An optical connector according to the present technology is an optical connector for a plurality of optical transmission paths arranged in a two-dimensional array and includes a first lens, a second lens, a third lens, and a fourth lens. The first lens reflects emitted light from a first optical transmission path of the plurality of optical transmission paths. The second lens reflects emitted light from a second optical transmission path of the plurality of optical transmission paths. The third lens collimates light reflected by the first lens. The fourth lens collimates light reflected by the second lens.

Abstract: An optical system is provided, for use in an electronic device, for example of the kind utilizing a head up display system. The optical system comprising: a light-transmitting waveguide substrate configured for receiving input light indicative of an image being projected, guiding said input light s by total internal reflection, and coupling the light out of the substrate to propagate along an output path in a predetermined direction; at least one transparent optical element accommodated in said output path and interfacing at least a portion of a surface of said waveguide substrate; an interface region between at least a portion of the surface of said waveguide substrate and a surface of the optical element being a patterned interface configured to provide optical coupling between the waveguide substrate and said optical element while maintaining the total internal reflection condition R of light propagation within said light-transmitting waveguide.

Abstract: A light engine includes a housing containing a rectangular aperture, a polarizer disposed in the housing facing the aperture, a light emitting diode (LED) array disposed in the housing, and a light guide configured to guide light emitted from the LED array toward the aperture, such that light is emitted through the aperture.

Abstract: A device for measuring solution concentration includes housing, a catadioptric structure, an electromagnetic radiation emitter and an electromagnetic radiation detector. The housing is formed with a detecting part for receiving a solution to be detected. The catadioptric structure is received in the housing, and includes a ray entrance portion, a first total internal reflection part, a second total internal reflection part and a ray exit portion. An accommodation part corresponds to the detecting part. The emitter is disposed at one side of the ray entrance portion, and a ray sequentially passes the ray entrance portion, the detecting part, the solution to be detected, and the first total internal reflection part. Then, the ray is totally internally reflected and converged to the second total internal reflection part, and is reflected again. Finally, the ray passes the ray exit portion and is received by the detector.

Abstract: Control panels with controls for controlling components that are reconfigurable by a user by selective placement of tiles corresponding to each of the controls and components. The controls can further be actuated by detecting an object and its motion in proximity of the selectively placed tiles.

Abstract: According to one embodiment, an image display apparatus includes a light source, a modulation unit, a first array and a second array. The modulation unit modulates intensity and a color of the light to generate beams corresponding to each of modulated pixels included in a modulated pixel group. The first array is formed by juxtaposing a plurality of first deflection elements each having a generating line parallel to a vertical direction of the modulated pixels. The second array is formed by juxtaposing a plurality of second deflection elements each having a generating line tilted by an angle represented by tan?1(?×m/n) with respect to a generating line of the first deflection element.

Abstract: An eyepiece for a head mounted display includes a light relay body, a total internal reflection (“TIR”) interface, and a focusing lens. The light relay body has a first end coupled to receive CGI light from an image source and a second end including a viewing region from which the CGI light is emitted. The TIR interface is disposed in the viewing region at an oblique angle relative to an eye-ward side of the light relay body through which the CGI light is emitted from the eyepiece. The TIR interface is oriented to redirect the light towards the eye-ward side of the light relay body. The focusing lens is disposed along the eye-ward side of the light relay body in alignment with the TIR interface to bring the CGI light into focus for a near-to-eye arrangement.

Abstract: Devices and methods for maintaining the brightness of laser emitter bar outputs having multiple emitters for coupling and other applications. In some embodiments, at least one brightness enhancement optic may be used in combination with a beam reformatting optic.

Abstract: A lens array includes: at least one lens including a first lens surface and a second lens surface. The first lens surface is formed to tilt at a predetermined tilt angle with respect to the second lens surface. The first lens surface is formed to be eccentric by an eccentric distance in such a direction that the optical axis of the second lens surface and an optical axis of the first lens surface intersect on a side of the first lens surface.

Abstract: An optical raster element for an illumination system of a microlithographic projection exposure apparatus includes an array of refractive optical elements extending on a planar or curved surface. At least two of the optical elements are arranged side by side along a reference direction with a pitch of less than 2 mm. They have a height perpendicular to the surface of less than 50 ?m and a surface profile along the reference direction which includes a central section, two transition sections adjacent the central section and two end sections adjacent the transition sections. The curvatures in the two transition sections are greater than the curvatures in the central section and the end sections. The optical raster element is intended for being used as a first channel plate in an optical integrator (honeycomb condenser) and can reduce the maximum light intensities occurring in or behind the second channel plate.

Abstract: A lens unit includes first and second arrays of microlenses. The microlenses in the first array have mutually parallel optical axes and are aligned in a meridional direction orthogonal to their optical axes. The microlenses in the second array are aligned in the same direction as the lenses in the first array, and have optical axes that coincide with the optical axes of corresponding microlenses in the first array. The microlenses in the first array collimate light incident in a sagittal plane orthogonal to the meridional direction. The microlenses in the second array focus the collimated light in the sagittal plane. The lens unit is useful in the scanning heads of scanning devices, the LED heads of LED printers, and in the exposure devices of other electrophotographic image forming apparatus.

Abstract: In an image display device where a lenticular lens, a display panel, and a light source are provided in order from a viewer side, when cylindrical lenses of the lenticular lens are arrayed in a horizontal direction, in first-viewpoint pixels and second-viewpoint pixels of the display panel, openings whose sides which intersect with straight lines in the horizontal direction are not parallel to a vertical direction are formed. And, a shape of the openings of a pair of pixels mutually adjacent in the vertical direction is made line-symmetric with respect to edges of the pixels extending in the horizontal direction as an axis.

Abstract: An optical integrator is able to keep down a light-quantity loss in modified illumination with an illumination optical apparatus. An optical integrator of a wavefront division type according to the present invention has a plurality of refracting surface regions which refract incident light, and a plurality of deflecting surface regions provided corresponding to the plurality of refracting surface regions and adapted for changing a traveling direction of the incident light. The plurality of refracting surface regions include a plurality of first refracting surface regions includes an arcuate contour with the center projecting in a first direction, and a plurality of second refracting surface regions includes an arcuate contour with the center projecting in a second direction.

Abstract: Device for splitting a light beam (1), including at least one lens array (3) with a plurality of lenses (3a-3i) of which at least two have a mutually differing, positive focal length, wherein the light beam (1) that is to be split can pass through the at least one lens array (3) and form at least some mutually separated, at least partially convergent subbeams (1a-1i) after passing through the plurality of lenses (3a-3i), and deflecting means (4) with a plurality of deflecting elements that are arranged downstream of the at least one lens array (3) and can deflect at least some of the subbeams (1a-1i), wherein at least two of the deflecting elements have a different spacing (da-di) from the at least one lens array (3).

Abstract: An external-cavity one-dimensional multi-wavelength beam combiner that performs wavelength beam combining along a stacking dimension of a laser stack formed of a plurality of laser arrays, each laser array configured to generate optical radiation having a unique wavelength, and each of the plurality of laser arrays including one or more laser emitters arranged along an array dimension of the laser stack. The multi-wavelength beam combiner includes an optical imaging element configured to image each of the laser emitters along a slow axis of the laser emitters, an optical focusing element arranged to intercept the optical radiation from each of the plurality of laser arrays and combine the optical radiation along a stacking dimension of the laser stack to form a multi-wavelength optical beam, and a diffraction element positioned at a region of overlap of the optical radiation to receive and transmit the multi-wavelength optical beam.

Abstract: A lens sheet for both a microlens and a lenticular lens includes a first lenticular lens layer having semicircular convex lenses which are arranged in parallel; a refraction control adhesive layer formed under the first lenticular lens layer; a second lenticular lens layer formed under the refraction control adhesive layer and having semicircular convex lenses which are arranged in parallel; a focal distance layer formed under the second lenticular lens layer; and a three-dimensional layer formed under the focal distance layer, wherein an extension direction of the semicircular convex lenses arranged in the first lenticular lens layer and an extension direction of the semicircular convex lenses arranged in the second lenticular lens layer are crossed with each other.

Abstract: A lens array set for a projection apparatus is provided. The lens array set comprises a first lens array and a second lens array. The first lens array has a plurality of first lens units which are rectangle-shaped and a side thereof that defines the first direction. The second lens array, which is parallel with the first lens array, has a plurality of second lens units which has a rectangle shape and a side thereof that defines the second direction. Each of the second lens units is set correspondingly to each of the first lens units, and the center of each second lens unit and the center of each first lens unit are coaxial. A rotation angle is substantially defined between the first direction and the second direction depending on the difference between the rectangle shapes of the first and the second lens units. When adopting the present invention in the projection apparatus, the light source efficiently provides light for the micro-display.

Abstract: A micro-lens array and a method for fabricating a micro-lens includes forming a first lens formation material layer on and/or over a micro-lens formation area of a semiconductor substrate, and then forming a portion of the lens formation material layer as a first micro-lens using a first mask. A second lens formation material layer is formed adjacent to the first micro-lens on and/or over the micro-lens formation area. The second lens formation material layer is also formed as a second micro-lens using a second mask which is a different type from that of the first mask.

Abstract: An arrangement for collimating and turning an optical beam utilizing a pair of two-dimensional lenses to separate the collimation into separate one-dimensional operations, while using one of the two-dimensional lenses to also perform the turning operation. A first two-dimensional lensing surface is disposed at the endface of a launching waveguide. This first two-dimensional lensing surface provides collimation along one axis of the system (for example, the X axis). A second two-dimensional lensing surface is provided by introducing a defined curvature to a turning mirror in the system. The curvature of the turning mirror is designed to create collimation (or focusing, if desired) in the orthogonal beamfront (in this case, the Y axis beamfront), while also re-directing the propagating signal into the desired orientation.

Abstract: A lens array includes a plurality of lenses having respective optical axes that are approximately parallel to each other, wherein the plurality of lenses are configured in a direction approximately perpendicular to the optical axes and are formed integrally with each other, and a maximum inclination angle of a lens surface on each of a predetermined number of the plurality of lenses is less than or equal 50.8 degrees or less, the maximum inclination angle being defined as a maximum value of an angle formed by an optical axis and a normal line of a lens surface of one of the predetermined number of the plurality of lenses.

Abstract: This invention presents a projection-receiving surface that has a surface having an undulating contour. The undulating contour comprises a plurality of alternating convex cylindrical surface segments and concave cylindrical surface segments. The convex cylindrical surface segments and concave cylindrical surface segments of the undulating contour of the surface arranged with cylindrical axes in a direction. The surface can further have an additional surface feature comprising striations, cusps, and/or nanoflaked reflector leaves. The striations are arranged crosswise to the undulating contour. The surface can be a reflection surface of a front projection-receiving surface.

Abstract: A method is disclosed for screening color separations of a lenticular image with a lenticular frequency of the lenticular lenses needed for viewing the lenticular image. An amplitude-modulated halftone image is calculated for each of the color separations at a screen angle and at a screen frequency, the tangent of the screen angle being a rational number. For a specific color separation, a screen angle relating to the direction perpendicular to the image strips of the lenticular image is defined, a pair of whole numbers whose ratio is equal to the tangent of the screen angle is determined, and the screen frequency of the color separation is calculated as the product of the lenticular frequency and the square root of the sum of the squares of the two whole numbers.

Abstract: A method for illuminating the surface of an object by using a source beam is provided. The source beam is partitioned into as many illumination sub-beams as there are surface elements to be illuminated, and their aperture is modulated as a function of the predetermined luminous intensity to be assigned to the surface element. Each surface element is illuminated with the aid of one of said illumination sub-beams. Used for illuminating the imagers of projection devices, this method makes it possible to add a second modulation stage allowing the display contrast of the images to be improved.

Abstract: A lens sheet for both a microlens and a lenticular lens includes a first lenticular lens layer having semicircular convex lenses which are arranged in parallel; a refraction control adhesive layer formed under the first lenticular lens layer; a second lenticular lens layer formed under the refraction control adhesive layer and having semicircular convex lenses which are arranged in parallel; a focal distance layer formed under the second lenticular lens layer; and a three-dimensional layer formed under the focal distance layer, wherein an extension direction of the semicircular convex lenses arranged in the first lenticular lens layer and an extension direction of the semicircular convex lenses arranged in the second lenticular lens layer are crossed with each other.

Abstract: Device for illuminating an area, in particular for illuminating a mask (14), for example for a lithographic application, with at least one light source (1) for producing light (3) that can be used for the illumination, optics means (2) for shaping the light (3) produced by the at least one light source (1), and separation means (4, 4?, 4?) capable of dividing the light (3) to be used for the illumination into several mutually separated partial beams (5), so that these partial beams (5) can illuminate the area to be illuminated with a spacing therebetween. The present invention also relates to a device for applying light to a work area.

Abstract: An external-cavity one-dimensional multi-wavelength beam combiner that performs wavelength beam combining along a stacking dimension of a laser stack formed of a plurality of laser arrays, each laser array configured to generate optical radiation having a unique wavelength, and each of the plurality of laser arrays including a plurality of laser emitters arranged along an array dimension of the laser stack. The multi-wavelength beam combiner includes a cylindrical telescope configured to image each of the laser emitters along a slow axis of the laser emitters, a transform lens arranged to intercept the optical radiation from each of the plurality of laser arrays and combine the optical radiation along a stacking dimension of the laser stack to form a multi-wavelength optical beam, and a diffraction element positioned at a region of overlap of the optical radiation to receive and transmit the multi-wavelength optical beam.

Abstract: An illumination system including at least one coherent light source, a light uniforming device and a lenticular sheet module is provided. The coherent light source is capable of emitting a coherent beam. The light uniforming device is disposed on a transmission path of the coherent beam. The lenticular sheet module disposed on a transmission path of the coherent beam and between the coherent light source and the light uniforming device, includes a first lenticular sheet and a second lenticular sheet. The first lenticular sheet includes a plurality of first rod-like lenticulars disposed side by side extending along a first extending direction. The second lenticular sheet disposed between the first lenticular sheet and the light uniforming device, includes a plurality of second rod-like lenticulars disposed side by side extending along a second extending direction. The first extending direction and the second extending direction make an angle greater than 0 degree.

Abstract: There is provided a light source unit which includes a luminescent light source which receives excitation light so as to emit light of a predetermined wavelength band, excitation light sources which shine excitation light on to the luminescent light source, a reflection space having the luminescent light source in an interior thereof and an emission space which emits luminescent light source light emitted from the reflection space from an emission port whose area is made smaller than the area of the luminescent light source and a projector which employs the light source unit.

Abstract: A printing medium includes: a rectangular lens sheet that has a surface formed in a predetermined lens shape; and a thin base that is fixed to a rear surface of the lens sheet on which no lens is formed and has an extending portion extending from one side of the lens sheet to the outside. In the printing medium, when a region corresponding to the rear surface of the lens sheet is referred to as a unit region, the extending portion includes a plurality of unit regions adjacent to one another with adjacent portions, which are common sides, interposed therebetween, and a first printing surface and a second printing surface having predetermined images formed thereon are formed in corresponding unit regions on one surface of the base that is fixed to the rear surface of the lens sheet or the other surface of the base. In addition, at least one unit region is additionally interposed between the unit region where the first printing surface is formed and the unit region where the second printing surface is formed.

Abstract: An optical fiber micro array lens is provided along with an associated fabrication method. The micro array lens is fabricated from a mesh of optical fibers. The mesh includes a first plurality of cylindrical optical fibers. Each fiber from the first plurality has a flat bottom surface and a hemicylindrical top surface. The top and bottom surfaces are aligned in parallel with a central fiber axis. The mesh also includes a second plurality of cylindrical optical fibers. Each fiber from the second plurality has a hemicylindrical bottom surface overlying and in contact with the top surfaces of the first plurality of optical fibers, and a flat top surface. The top and bottom surfaces are aligned in parallel with a central fiber axis. Each contact of the first and second plurality of optical fibers forms a lens assembly in a micro array of lenses.

Abstract: This invention presents a projection-receiving surface that has a surface having an undulating contour. The undulating contour comprises a plurality of alternating convex cylindrical surface segments and concave cylindrical surface segments. The convex cylindrical surface segments and concave cylindrical surface segments of the undulating contour of the surface arranged with cylindrical axes in a direction. The surface can further have an additional surface feature comprising striations, cusps, and/or nanoflaked reflector leaves. The striations are arranged crosswise to the undulating contour. The surface can be a reflection surface of a front projection-receiving surface.

Abstract: A crystallization apparatus includes a light modulation element, and an image forming optical system that forms a light intensity distribution set based on light transmitted through the light modulation element on an irradiation surface. The crystallization apparatus irradiates a non-single crystal semiconductor film with light having the light intensity distribution to generate a crystallized semiconductor film. A curvature radius of at least one isointensity line of a light intensity substantially varies along the isointensity line in the light intensity distribution on the irradiation surface, and a curvature radius of at least a part of the isointensity line has a minimum value of 0.3 ?m or below.

Abstract: A laser beam emission is collimated by optics. The collimated beam is shaped into an expanding planar laser beam by line generator optics. The expanding planar laser beam is collimated by other optics such that a beam having a generally rectangular cross-section is derived. The resulting beam can be used in ink drop detection and/or other applications.

Abstract: An optical fiber micro array lens is provided along with an associated fabrication method. The micro array lens is fabricated from a mesh of optical fibers. The mesh includes a first plurality of cylindrical optical fibers. Each fiber from the first plurality has a flat bottom surface and a hemicylindrical top surface. The top and bottom surfaces are aligned in parallel with a central fiber axis. The mesh also includes a second plurality of cylindrical optical fibers. Each fiber from the second plurality has a hemicylindrical bottom surface overlying and in contact with the top surfaces of the first plurality of optical fibers, and a flat top surface. The top and bottom surfaces are aligned in parallel with a central fiber axis. Each contact of the first and second plurality of optical fibers forms a lens assembly in a micro array of lenses.

Abstract: An optical fiber micro array lens is provided along with an associated fabrication method. The micro array lens is fabricated from a mesh of optical fibers. The mesh includes a first plurality of cylindrical optical fibers. Each fiber from the first plurality has a flat bottom surface and a hemicylindrical top surface. The top and bottom surfaces are aligned in parallel with a central fiber axis. The mesh also includes a second plurality of cylindrical optical fibers. Each fiber from the second plurality has a hemicylindrical bottom surface overlying and in contact with the top surfaces of the first plurality of optical fibers, and a flat top surface. The top and bottom surfaces are aligned in parallel with a central fiber axis. Each contact of the first and second plurality of optical fibers forms a lens assembly in a micro array of lenses.

Abstract: Apparatus for homogenizing a laser beam includes a lenslet array. In some embodiments, the lenslets have a negative power. The lenslet array may include from 16 to 36 effective lenslets in some embodiments, or any other suitable number in alternative embodiments. Some embodiments additionally include a re-focusing lens for directing the beamlets onto a target so that the beamlets overlap and the energy distribution is homogenized. In an alternative embodiment, the lenslet array and re-focusing lens are combined in one optic.

Abstract: An optical integrator has characteristics to suppress influence of relative positioning error of a pair of optical members on an illuminance distribution and on a shape of an illumination field. The optical integrator is a wavefront splitting type optical integrator having a first optical member and a second optical member in order from the entrance side of light. The first optical member has first entrance surfaces having a refractive power in a first direction and substantially no refractive power in a second direction, and first exit surfaces having a refractive power in the first direction and substantially no refractive power in the second direction. The second optical member has second entrance surfaces having a refractive power in the second direction and substantially no refractive power in the first direction, and second exit surfaces having a refractive power in the second direction and substantially no refractive power in the first direction.

Abstract: A backlight device 10 according to the invention includes an optical member 17 provided on a surface light source. The optical member 17 includes a lenticular lens sheet 14 having a plurality of cylindrical lenses CL1 arranged in parallel to one another and a lenticular lens sheet 15 provided on the lenticular lens sheet 14 and having a plurality of cylindrical lenses CL2 arranged in parallel to one another. Therefore, light emitted obliquely to the front surface can be restrained and improved front side brightness is provided.

Abstract: Device for splitting a light beam (1), including at least one lens array (3) with a plurality of lenses (3a-3i) of which at least two have a mutually differing, positive focal length, wherein the light beam (1) that is to be split can pass through the at least one lens array (3) and form at least some mutually separated, at least partially convergent subbeams (1a-1i) after passing through the plurality of lenses (3a-3i), and deflecting means (4) with a plurality of deflecting elements that are arranged downstream of the at least one lens array (3) and can deflect at least some of the subbeams (1a-1i), wherein at least two of the deflecting elements have a different spacing (da-di) from the at least one lens array (3).

Abstract: An illumination optical system for illuminating a surface to be illuminated with a light beam from a light source, in a first plane which is parallel with the optical axis of the illumination optical system, the light beam from the light source is split, and a plurality of first light source images are formed in a first light source image zone with the use of the thus split light beams; light beams from the plurality of first light source images being led to the surface to be illuminated, in a second plane which is parallel with the optical axis of the illumination optical system and which is perpendicular to the first plane, the light beam from the light source is split, and a plurality of second light source images are formed in a second light source image zone, with the use of the thus split light beams, light beams from the plurality of second light source images being led to the surface to be illuminated, where the width of the first light source image zone in the first plane is greater than that of the

Abstract: Device for illuminating an area, in particular for illuminating a mask (14), for example for a lithographic application, with at least one light source (1) for producing light (3) that can be used for the illumination, optics means (2) for shaping the light (3) produced by the at least one light source (1), and separation means (4, 4?, 4?) capable of dividing the light (3) to be used for the illumination into several mutually separated partial beams (5), so that these partial beams (5) can illuminate the area to be illuminated with a spacing therebetween. The present invention also relates to a device for applying light to a work area.

Abstract: An optical apparatus comprises a light source, an optical member and a spatial light modulator. The optical member comprises optically transmissive material and has a textured major surface receiving light from the light source. The textured surface comprises first and second pluralities of non-intersecting elongate features. The pluralities are angled with respect to each other by less than about 90° and intersect each other so as to form total internal reflection structures. The spatial light modulator has rows or columns of pixels for receiving light from the optical member at a major surface. The light source may be (i) a light guide, or (ii) a source of light providing, to the optical member, light having a peak luminance that is shifted from a normal direction to the textured major surface by more than about 30°.

Abstract: A dioptric element array substrate 10 includes: a first dioptric element array 2 having a plurality of first dioptric elements 2a arranged two-dimensionally; a second dioptric element array 4 having a plurality of second dioptric elements 4a having a first refractive index arranged two-dimensionally in one-to-one correspondence with the first dioptric elements; and a third dioptric element array 5 having a second refractive index different from the first refractive index. Principal rays of beams incident on the first dioptric element array at different angles and converged with the first dioptric element array are collimated with the second and third dioptric element arrays.

Abstract: Since the arrangement of the optical elements in the optical system is limited because of their characteristic, designing the optical system for forming the desired laser beam is difficult. An object of the present invention is to design the optical system having the desired function without being affected by the limit in the arrangement of the optical elements. Consequently, an off-axis cylindrical lens array is used as a cylindrical lens array acting on a long-side direction of the beam.

Abstract: There is provided an illumination system for microlithography with wavelengths?193 nm that includes a primary light source, a first optical component, a second optical component, an image plane, and an exit pupil. The first optical component transforms the primary light source into a plurality of secondary light sources that are imaged by the second optical component in the exit pupil. The first optical element and the second optical element are reflective. The first optical component includes a first optical element having a plurality of first raster elements that are imaged into the image plane, producing a plurality of images being superimposed, at least partially, on a field in the image plane. The first optical component includes a collector unit and a second optical element having a plurality of second raster elements.