Abstract: A deformable mirror device has a flexible layer with a front surface that forms a mirror surface or to which a mirror layer forming mirror surface is attached. The flexible layer consists homogeneously of a first material. Protrusions extend from the back surface of the flexible layer. The protrusions consist homogeneously of the first material or a material with substantially the same thermal expansion coefficient. A plurality actuators are coupled to the protrusions and via the protrusions to the flexible layer, to deform the flexible layer. The flexible layer and the protrusions may be part of an integral body of the first material, or bonded to the flexible layer. The distal end of each protrusion has a curved surface that at least partly has a spherical shape.

Abstract: This liquid crystal element comprises a liquid crystal layer LC and a plurality of unit-electrodes U1 and U2, each including a first electrode E1 that is linearly formed, a second electrode E2 that is linearly formed and receives a voltage different from that of the first electrode E1, and a resistive layer HR having higher electric resistivity than the first electrode E1 and the second electrode E2, characterized in that the resistive layer HR in each of the plurality of unit-electrodes U1 and U2 is separated from the resistive layer HR in the adjacent unit-electrodes U1 and U2 and is disposed in a region AR between the first electrode E1 and the second electrode E2 in a plan view, and at least some unit-electrodes U2 from among the plurality of unit-electrodes U1 and U2 have an auxiliary electrode EC in the region AR, the auxiliary electrode EC being linearly formed with a line width equal to or smaller than the line width of at least one of the first electrode E1 and the second electrode E2.

Abstract: A liquid crystal element is provided that can inhibit occurrence of voltage drop between one end and the other end of each electrode. A liquid crystal element (100) includes a liquid crystal layer LQ, a plurality of first arcuate electrodes (1), and a plurality of second arcuate electrodes (2). The first arcuate electrodes (1) are disposed concentrically about an optical axis (AX) of the liquid crystal element (100) and applies first voltage (V1) to the liquid crystal layer (LQ). The second arcuate electrodes (2) are disposed concentrically about the optical axis (AX) and applies second voltage (V2) to the liquid crystal layer (LQ).

Abstract: To measure an effect of a wavelength-dependent measuring light reflectivity RRet of a lithography mask, a measuring light beam is caused to impinge on said lithography mask within a field of view of a measuring apparatus. The measuring light has a wavelength bandwidth between a wavelength lower limit and a wavelength upper limit differing therefrom. The reflected measuring light emanating from an impinged section of the lithography mask is captured by a detector. A filter with a wavelength-dependent transmission within the wavelength bandwidth is introduced into a beam path of the measuring light beam between the measuring light source and the detector. The measuring light reflected by the lithography mask is captured again by the detector once the filter has been introduced. The wavelength-dependent reflectivity RRet, or an effect of the wavelength-dependent reflectivity RRet is determined on the basis of the capture results.

Abstract: Articles and systems for dark microscopy and related methods are generally described.

Abstract: A method for controlling a deformable mirror surface shape based on a radial primary function processes samples of a neural network training set, obtains elements of the neural network training set, characterizes the complex surface shape of the deformable mirror in each sample by using a radial primary function, takes characterization parameters of the surface shape in the each sample as an input of a neural network, and trains the neural network by taking a voltage of each piezoelectric ceramic corresponding to the complex surface shape as a corresponding output of the neural network. Training times of the neural network are consistent with a number of the samples. Finally, the trained neural network is obtained to verify the training effect of the neural network. According to the characterization parameters of the required surface, the neural network is used to control the deformable mirror to generate the required surface.

Abstract: A thermally actuated adaptive optic includes a base, a reflector, and a plurality of actuators coupled therebetween. The reflector has a light-receiving front surface, and a back surface facing the base. Each actuator includes a bracket rigidly bonded to the reflector at a perimeter of the reflector, and an inner rod and an outer rod. Each rod is rigidly connected between the bracket and the base, with the inner rod being closer to a center of the reflector. The length of each rod is temperature dependent. In another adaptive optic, the rods are instead bonded directly to the reflector. This adaptive optic may be modified to implement an integrally formed, thermally actuated support. The disclosed adaptive optics are suitable for use in laser systems, allow for significant cost savings over piezoelectric devices, provide a reflective area free of surface-figure perturbations caused by the actuator-interfaces, and are relatively simple to manufacture.

Abstract: An optical module includes a support, a movable part supported by the support so as to be swingable about an axis, a mirror provided to the movable part, a drive coil provided to the movable part, a temperature monitoring element provided to the support, and a magnet that generates a magnetic field acting on the drive coil. The support is thermally connected to the magnet.

Abstract: A MEMS (micro-electromechanical system) actuator element includes a substrate, a stationary first electrode structure with an edge structure, a second electrode structure with an edge structure, wherein the second electrode structure is deflectably coupled to the substrate by means of a spring structure and electrostatically deflectable by means of the first electrode structure to move the edge structure of the second electrode structure into an intermediate position between a minimum and maximum vertical deflection position, wherein the minimum and maximum deflection position specify a maximum deflection path, wherein the edge structures of the first and second electrode structures are to each other and are vertically spaced apart in the minimum deflection position and wherein, in the maximum deflection position, the vertical immersion path of the edge structure of the second electrode structure into the edge structure of the first electrode structure is up to 0.5 times the maximum deflection path zS.

Abstract: A liquid crystal element is provided that can inhibit occurrence of voltage drop between one end and the other end of each electrode. A liquid crystal element (100) includes a liquid crystal layer LQ, a plurality of first arcuate electrodes (1), and a plurality of second arcuate electrodes (2). The first arcuate electrodes (1) are disposed concentrically about an optical axis (AX) of the liquid crystal element (100) and applies first voltage (V1) to the liquid crystal layer (LQ). The second arcuate electrodes (2) are disposed concentrically about the optical axis (AX) and applies second voltage (V2) to the liquid crystal layer (LQ).

Abstract: Various examples are provided related to amplified deformable mirrors (ADMs). In one embodiment, an ADM includes a deformable mirror and a flexible dielectric matrix deposited on a front side of the deformable mirror. A pathlength of a wavelength, ?0, of electromagnetic radiation passing through the dielectric matrix can be amplified by a distribution of dielectric particles embedded in the dielectric matrix.

Abstract: An optical system includes a first set of electrodes arranged in a concentric pattern and a liquid crystal material in electrical communication with the first set of electrodes. The optical system also includes a second set of electrodes arranged in a two-dimensional pattern and in electrical communication with the liquid crystal material.

Abstract: Data center interconnections, which encompass WSCs as well as traditional data centers, have become both a bottleneck and a cost/power issue for cloud computing providers, cloud service providers and the users of the cloud generally. Fiber optic technologies already play critical roles in data center operations and will increasingly in the future. The goal is to move data as fast as possible with the lowest latency with the lowest cost and the smallest space consumption on the server blade and throughout the network.

Abstract: A mirror, in particular for a microlithographic projection exposure apparatus, has an optical effective surface and includes a substrate (11, 61, 71, 81, 91), a reflection layer system (16, 66, 76, 86, 96) for reflecting electromagnetic radiation impinging on the optical effective surface (10a, 60a, 70a, 80a, 90a), an electrode arrangement (13, 63, 73, 83) composed of a first material having a first electrical conductivity, the electrode arrangement being provided on the substrate, and a mediator layer (12, 62, 72, 82, 92) composed of a second material having a second electrical conductivity. The ratio between the first electrical conductivity and the second electrical conductivity is at least 100. The mirror also includes at least one compensation layer (88) which at least partly compensates for the influence of a thermal expansion of the electrode arrangement (83) on the deformation of the optical effective surface (80a).

Abstract: An optical device includes a mirror, and a plurality of actuators configured to deform a shape of a reflecting surface of the mirror. At least some of the plurality of actuators are arranged on a plurality of concentric circles arranged in such a manner that the concentric circles are arranged denser as positions of the concentric circles are located farther from a center of the reflecting surface of the mirror, and at least some of the plurality of actuators are arranged at equal intervals in circumferential directions of the concentric circles.

Abstract: An extreme ultraviolet light generation apparatus includes: A. a chamber in which extreme ultraviolet light is generated by a target substance being irradiated with a laser beam to generate plasma from the target substance; B. a vessel as a tubular member forming the chamber; C. a reference member supporting the vessel; D. a collector mirror configured to condense the extreme ultraviolet light in the chamber, the collector mirror being attached to the reference member in a replaceable manner and covered by the vessel to be housed in the chamber; and E. a vessel movement mechanism provided to the reference member and configured to move the vessel between a first position at which the vessel covers the collector mirror and a second position at which the vessel is retracted from the first position to expose the collector mirror.

Abstract: A process for exposing at least one region of a face, known as the front face, of an electronic device, the process including the following steps: A bonding step for a cover (600) to the front face, the bonding being undertaken such that the cover (600) forms a closed cavity (650) with the region, advantageously hermetically sealed; Formation of an encapsulation coating (700), of thickness E1, covering the front face and the cover (600); A thinning step for the encapsulation coating (700), the thinning step including removal of a removal thickness E2, less than the thickness E1, of the encapsulation coating (700), the removal thickness E2 being adjusted such that an opening is formed in the cover (600).

Abstract: A method of fabricating pre-structured functional wafers, pre-structured functional cuboid or wafer stack, and a method of fabricating an array of functional multilayer stack actuators made of relaxor ferroelectric single crystal piezoelectric thin layers comprising sequentially repeated steps of wafer dicing and trench refilling into relatively thick wafer(s). A bulk-micromachined dimensioned deformable mirror device comprising a base supporting substrate, a plurality of stack actuators that is made by segmenting a pre-structured relaxor ferroelectric single crystal piezoelectric cuboid or wafer stack, a plurality of pedestals disposed on the plurality of stack actuators; a deformable membrane mirror mounted on said pedestals; and a plurality of addressable electrode contacts.

Abstract: Mixed heliostat field combining, in the same field, heliostats of different sizes and/or with different types of facets, all of them having at least one facet and being canted or not, and either having spherical, cylindrical, flat or quasi-flat (spherical with a high curvature radius) facets, such that the solar field is optimised in order to minimise shadows and blockages between heliostats, as a result of correct positioning of the heliostats in the field.

Abstract: Disclosed is a system configured to project a beam of radiation onto a target portion of a substrate within a lithographic apparatus. The system comprises a mirror (510) having an actuator (500) for positioning the mirror and/or configuring the shape of the mirror, the actuator also providing active damping to the mirror, and a controller (515a, 515b) for generating actuator control signals for control of said actuator(s). A first coordinate system is used for control of said actuator(s) when positioning said mirror and/or configuring the shape of said mirror and a second coordinate system is used for control of said actuator(s) when providing active damping to said mirror.

Abstract: The following invention relates to an optical device for use in a system that requires optical zoom or focus abilities, particularly for providing pre-set zoom parameters with a very low energy requirement. There is provided an optical magnification device comprising at least one pair of optically aligned deformable reflectors, wherein each reflector pair has at least two configurations, wherein selection of a first and a second configuration of said deformable reflector pairs provides pre-defined magnification states, such that in any configuration one reflector is substantially concave and the other is substantially convex; at least one controller may cause both the reflectors to move between said at least two configurations.

Abstract: An adjustable support assembly for an object to be accurately positioned relative to a base, in particular for a secondary mirror of an optical mirror telescope, has at least one support structure connected to the base and to the object. The support structure has at least two struts extending in a non-parallel manner relative to each other, where each strut has associated therewith a drivable actuator element in such a way that the actuator element applies a force onto the strut that deflects the strut transversely to the longitudinal extension thereof. The support structure may be supported in an articulated manner relative to the base.

Abstract: A downward illumination assembly comprising a lamp housing, a power supply module removably supported on a power supply module support surface, and an LED module carried by the lamp housing and coupled to the power supply module. The power supply module extends through an opening in the housing wall with at least a portion of the module being disposed outside the lamp housing and can be installed and removed interiorly of the lamp housing through the open lower end of the lamp housing.

Abstract: A deformable mirror includes a mirror substrate having a continuous reflective surface and a plurality of actuators connected to the mirror substrate at a plurality of coupling portions. In the deformable mirror, the mirror substrate has first regions and a second region thicker than the first regions and the first regions are formed around the coupling portions.

Abstract: An actuator includes: a movable portion that swingably moves around a first axis; a first shaft that extends from the movable portion and swingably supports the movable portion around the first axis; a frame portion that is connected to the first shaft and swingably moves around a second axis that intersects the first axis; a second shaft that extends from the frame portion and swingably supports the frame portion around the second axis; a support portion connected to the second shaft; a coil provided on the frame portion; and a magnet that produces a magnetic field that acts on the coil, wherein the frame portion is so formed that the frame portion surrounds the movable portion, the first shaft, the second shaft, and the support portion in a plan view viewed in a thickness direction of the movable portion.

Abstract: A mirror unit includes: a mirror; a plurality of non-contact type actuators including movable elements and stators, and configured to change a shape of the mirror; a supporting plate to which the stators are fixed; and a structure configured to hold the mirror and the supporting plate. The movable elements are attached to a surface of the mirror that is opposite to an optical surface, and the structure holds the supporting plate via a kinematic mount.

Abstract: An ophthalmologic apparatus includes an aberration measuring unit configured to measure wavefront aberration of returning light, and a reflective optical modulation device configured to modulate the returning light. A control unit controls the reflective optical modulation device to correct the wavefront aberration of the returning light based on a measurement result of the aberration measuring unit. The reflective optical modulation device includes a reflection mirror of which the diameter of an effective region (effective diameter) that reflects the measurement light or the returning beam is 7.5 mm or less, and 61 or more actuators that act on the reflection mirror within the effective diameter. Each of the actuators includes an interdigital electrode having a maximum displacement of 7.5 ?m or more.

Abstract: The invention relates to an electric lamp (102) comprising a primary semiconductor light source (104) in thermal communication with a primary reflector (106). Herein, the primary reflector (106) is reflective, transparent and/or translucent. The primary reflector (106) is configured for transferring heat generated by the primary semiconductor light source (104) during operation away from said primary semiconductor light, source (104). As a result, the electric lamp (102) according to the invention effectively reduces the number of parts comprised in the electric lamp (102), thereby lowering the costs of manufacturing the electric lamp (102).

Abstract: The invention relates to a deformable mirror (1) comprising a deformable reflector member (2) possessing a reflecting surface (3), at least one actuator (6) suitable for driving said reflector member (2) to move substantially along a deformation direction (XX?) so as to be capable of deforming the reflecting surface (3), and at least one position sensor (14) arranged in the interstitial space (12) lying between the reflecting surface (3) and the widest cross-section (S6MAX) of the actuator (6), on an intermediate reference support (11), in such a manner as to be capable of evaluating the position of the reflecting surface (3), the sensor (14) occupying a cross-section (S14) transversely to the deformation direction that, in projection along said deformation direction (XX?), presents at least one overlap zone (SR) with the widest cross-section of the actuator (S6MAX). Such deformable mirrors are suitable for use in adaptive optics.

Abstract: System for establishing a surface shape. The system includes a compliant substrate including the surface and having a reverse side, and a plurality of discrete actuators engaging the reverse side and arranged in a selected pattern to control the surface shape as individual discrete activators are activated. It is preferred that the actuators have multiple discrete stable states of elongation. A particularly preferred embodiment uses actuators that are binary with two stable states of elongation.

Abstract: A device for correcting optical defects of a telescope mirror, compatible with use in a space environment, is provided, where the criteria of weight, reliability, service life, cost and resistance to extreme temperatures are fundamental. The device comprises at least one controllable-length element, means for controlling the length of this element, this element being connected to the mirror by its ends in zones that are diametrically or diagonally opposed and close to the periphery of this mirror, the connection between the controllable-length element and the mirror comprising attachments that are rigid on the axis joining these two attachment zones and flexible in the other degrees of freedom.

Abstract: System for manufacturing facets comprising a frame a series of mirrors and multiple securing parts in which said parts are the key to the invention and are formed by a rod and a circular metal sheet provided with a series of small circular perforations, where the rod and the circular sheet are attached by electric arc welding or any other equivalent fixation and the purpose of which is to secure a curved mirror to the rear structure or frame of a heliostat.

Abstract: The embodiment of the invention provides a supporting and a shape-regulating device for a reflector of a heliostat, which relates to the solar field.

Abstract: Support for facets that maintains the facet attached to the structure of a heliostat, which comprises a connecting plate, a threaded bolt, a fixed attachment of the connecting plate to the facet, and a movable attachment between the connecting plate and the threaded bolt. The movable attachment enables assembling and disassembling the facet without having to reorient thereof as well it enables to orientate the facet without having to place the facet.

Abstract: The present invention employs an actuator including: a movable portion connected to a reflecting member having a reflective surface; a movable comb electrode disposed at a distance from the reflecting member, supported by the movable portion, and extended in a direction parallel to the reflective surface; a stationary comb electrode supported by a supporting portion, extends in the direction parallel to the reflective surface, and disposed alternately with the movable comb electrode; and a voltage controller that applies a voltage to the movable comb electrode and the stationary comb electrode to displace the movable comb electrode and the movable portion in a direction normal to the reflective surface. A portion that supports the movable comb electrode and a portion that supports the stationary comb electrode are disposed such that the movable comb electrode and the stationary comb electrode pass each other.

Abstract: An illumination optical unit for a projection exposure apparatus serves for guiding illumination light toward an illumination field, in which a lithography mask can be arranged. A first facet mirror has a plurality of individual mirrors that provide illumination channels for guiding illumination light partial beams toward the illumination field. The individual mirrors each bear a multilayer reflective coating. A second facet mirror is disposed downstream of the first facet mirror in the beam path of the illumination light. A respective facet of the second facet mirror with at least one of the individual mirrors of the first facet mirror completes the illumination channel for guiding the illumination light partial beam toward the illumination field.

Abstract: An optical component comprising a mirror array having a multiplicity of mirror elements, which each have at least one degree of freedom of displacement, and which are each connected to at least one actuator for displacement, has a multiplicity of local regulating devices for damping oscillations of the mirror elements, wherein each of the regulating devices in each case has at least one capacitive sensor having at least one moveable electrode and at least one electrode arranged rigidly relative to the carrying structure.

Abstract: The invention relates to a portable light manipulator including a frame and a manipulator cloth that is stretched or can be stretched on the frame, wherein the frame includes at least one tension bar, which has at least two moving sections that can be moved in the longitudinal direction of the tension bar and are connected to one another or can be connected to one another, said moving sections being spring-loaded so as to be capable of being forced apart from one another by spring force in the longitudinal direction of the tension bar.

Abstract: Optical devices can comprise a deformable mirror and a system for deforming said mirror. A deformation system comprises a first mechanical structure comprising a first surround, one or more electromechanical actuators attached to the first mechanical structure, a second mechanical structure comprising a substantially planar bottom and a second surround, both deformable, the bottom being attached to the first surround, the second surround being attached to the surround of the mirror, a rigid stud being attached to the bottom, substantially planar and centerd on the bottom, the electromechanical actuator or actuators exerting predetermined forces or bending moments on the stud so as to generate a particular distribution of the bending moments on the surround of the mirror, deforming it according to a geometrical form representative or of one or more predetermined geometrical aberrations.

Abstract: A mirror unit includes: a mirror; a plurality of non-contact type actuators including movable elements and stators, and configured to change a shape of the mirror; a supporting plate to which the stators are fixed; and a structure configured to hold the mirror and the supporting plate. The movable elements are attached to a surface of the mirror that is opposite to an optical surface, and the structure holds the supporting plate via a kinematic mount.

Abstract: A deformable mirror unit 7A including a plurality of segment mirrors 71 each having a surface 71a, a flexible member 72 configured to connect the plurality of segment mirrors 71 to each other, a driver 74 configured to apply a driving force to at least one of the segment mirror 71 and the flexible member 72 so as to change at least one of a position and a tilt of the reflection surface 71a of each of the plurality of segment mirrors 71, and a connector 73 configured to connect the driver 74 to at least one of the segment mirror 71 and the flexible member 72 and to be rotatable so as to change a light reflecting direction by the at least one reflection surface 71a is provided.

Abstract: A deformable mirror includes a mirror substrate having a continuous reflective surface and a plurality of actuators connected to the mirror substrate at a plurality of coupling portions. In the deformable mirror, the mirror substrate has first regions and a second region thicker than the first regions and the first regions are formed around the coupling portions.

Abstract: The present invention relates to a deformable mirror (1) comprising a deformable membrane (2) with a reflective outer face (3) and an opposite face (4), a rigid support plate (7), and at least one force actuator (5, 6). Each actuator (5, 6) comprises at least two elements (5, 6) suitable for interacting with each other remotely so as to generate a force in a direction that is substantially perpendicular to the surface of the initially non-deformed membrane (2), and suitable for being displaced relative to each other in the direction of said generated force so as to cause said membrane (2) to be deformed locally. One of the two elements (5, 6) is incorporated into the support plate (7) and the other element is coupled to the membrane (2). One of said two elements (5, 6) is suitable for controlling the intensity of said generated force.

Abstract: The invention relates to arrangements for actuating an element in a microlithographic projection exposure apparatus. In accordance with one aspect, an arrangement for actuating an element in a microlithographic projection exposure apparatus comprises a first number (nR) of degrees of freedom, wherein an adjustable force can be transmitted to the optical element in each of the degrees of freedom, and a second number (nA) of actuators, which are coupled to the optical element in each case via a mechanical coupling for the purpose of transmitting force to the optical element, wherein the second number (nA) is greater than the first number (nR). In accordance with one aspect, at least one of the ac-tuators is arranged in a node of at least one natural vibration mode of the optical element.

Abstract: An array of reflective elements in which at least one of the reflective elements is mounted on a mounting which comprises a rod at least partially located within a sleeve. A first end of the rod is fixed to a first end of the sleeve and a second end of the rod is moveable, the sleeve including a first resiliently flexible portion which is configured to bend in order to allow the movement of the second end of the rod to take place, wherein the reflective element is mounted at the first end of the sleeve such that bending of the sleeve causes rotation of the reflective element.

Abstract: The invention concerns an arrangement for thermal actuation of a mirror in a microlithographic projection exposure apparatus, wherein the mirror has an optical effective surface and at least one access passage extending from a surface of the mirror, that does not correspond to the optical effective surface, in the direction of the effective surface, wherein the arrangement is designed for thermal actuation of the mirror via electromagnetic radiation which is propagated in the access passage, wherein the arrangement further has at least one heat radiating mechanism which produces the electromagnetic radiation which is propagated in the access passage, and wherein the heat radiating mechanism is actuable along the access passage.

Abstract: Provided is an actuator formed in a substrate including a handle layer, an elastic body layer, and an insulating layer, the actuator including a movable portion supported to a support portion by an elastic body, a movable comb electrode formed on the movable portion, a fixed comb electrode supported by the support portion, and electrode wirings connected to the respective comb electrodes in which the elastic body supports the movable portion such that the movable portion is displaceable in a direction perpendicular to the substrate in accordance with voltages applied to the comb electrodes; the comb electrodes are made up of the handle layer, and the elastic body is made up of the elastic body layer; and a handle layer separation groove is provided to electrically separate between the handle layers of the support portions supporting the comb electrodes, and a structure reinforcing portion is formed across the separation groove.

Abstract: A frozen surface technology is provided that can be used to provide a precisely defined surface. The frozen surface technology can include the use of a frozen membrane. For instance, frozen membrane mirrors and methods of producing frozen membrane mirrors are provided. The frozen membrane mirror includes a membrane material having a reflective surface. Active control is used to maintain a desired figure of the reflective surface while a solidifying material is applied to a back side of the membrane material. Active control of the figure of the reflective surface is maintained while the solidifying material cures. Once the solidifying material has been applied and cured, active control can be removed.

Abstract: An illumination optical unit for projection lithography has a first polarization mirror device to reflect and polarize of illumination light. A second mirror device, which is disposed downstream of the polarization mirror device reflects an illumination light beam. At least one drive device is operatively connected to at least one of the two mirror devices. The two mirror devices are displaceable relative to one another via the drive device between a first relative position, which leads to a first beam geometry of the illumination light beam after reflection at the second mirror device, and a second relative position, which leads to a second beam geometry of the illumination light beam after reflection at the second mirror device, which is different from the first beam geometry. This results in a flexible predefinition of different illumination geometries, in particular of different illumination geometries with rotationally symmetrical illumination.

Abstract: A deformable optical device includes a reflection device having a first reflecting surface and a second surface, an actuator (e.g., an integrated circuit piezoelectric actuator) having a support device and moveable extensions extending therefrom, which are coupled to the second surface, and electrodes coupled to corresponding ones of the extensions. Wavefront aberrations are detected and used to generate a control signal. The extensions are moved based on the control signal. The movement deforms the reflecting surface to correct the aberrations in the wavefront.