Abstract: An array of movable elements is arranged on a substrate. Each element has a cavity and a movable member to move through the cavity. The pressure resistance of the elements varies, allowing actuation signals to be manipulated to activate elements with different pressure resistance at different levels of the actuation signal.

Abstract: This invention provides a dynamic interconnection system which allows to couple a pair of optical beams carrying modulation information. In accordance with this invention, two optical beams emanate from transceivers at two different locations. Each beam may not see the other beam point of origin (non-line-of-sight link), but both beams can see a third platform that contains the system of the present invention. Each beam incident on the interconnection system is directed into the reverse direction of the other, so that each transceiver will detect the beam which emanated from the other transceiver. The system dynamically compensates for propagation distortions preferably using closed-loop optical devices, while preserving the information encoded on each beam.

Abstract: A catadioptric projection objective for microlithography has at least one curved mirror that is deformable and adjusting elements that can deform the deformable mirror. The adjusting elements are matched to given image errors and their correction. The invention is suitable for astigmatism, fourfold wavefront-deformations due to lens heating, compaction, and the like.

Abstract: Disclosed is an actuator for a phase mirror array including a) a first support member extending perpendicularly from a surface of a mirror, b) a plurality of flexures engaging the first support member with the flexures being generally parallel to the surface of the mirror, c) second and third support members engaging opposing ends of the flexures, at least one of the second and third support members functioning as a first electrode, and d) a second electrode positioned in spaced parallel relationship with the flexures, whereby a voltage impressed across the first electrode and the second electrode causes displacement of the supported mirror on the support structure. The second electrode and one of the flexures can have undulating surfaces which mate in a comb relationship.

Abstract: An apparatus controls positions of plural mirror segments in a segmented mirror with an edge sensor system and a controller. Current mirror segment edge sensor measurements and edge sensor reference measurements are compared with calculated edge sensor bias measurements representing a global radius of curvature. Accumulated prior actuator commands output from an edge sensor control unit are combined with an estimator matrix to form the edge sensor bias measurements. An optimal control matrix unit then accumulates the plurality of edge sensor error signals calculated by the summation unit and outputs the corresponding plurality of actuator commands. The plural mirror actuators respond to the actuator commands by moving respective positions of the mirror segments. A predetermined number of boundary conditions, corresponding to a plurality of hexagonal mirror locations, are removed to afford mathematical matrix calculation.

Abstract: A retainer for holding an optical element includes a detector for detecting a deformation amount of the optical element, and an adjustment unit for adjusting the deformation of the optical element based on the deformation amount.

Abstract: A multiplexer (MUX) driver system controls a deformable mirror, in part, by enabling and disabling individual or multiple actuators, mechanically coupled to the deformable mirror, through use of switches (e.g., solid-state switches) electrically coupled between the actuators and a reference node. In operation, the driver system enables actuator(s) by closing respective switch(es) and driving the enabled actuator(s) to deform respective portions of the deformable mirror in a controlled manner. The driver system disables the actuator(s) by opening the respective switch(es) to decouple the actuator(s) from the reference node. The switches, in the open state, prevent respective actuators from discharging, thereby allowing a desired surface figure of the deformable mirror to be maintained for long periods of time without having to refresh the actuators.

Abstract: An improved structure and method for building large-aperture lightweight deformable mirrors uses a hinged substrate. In addition to reduced weight, the approach provides rigidity to the mirror, which is necessary for the accurate response to actuator commands and tolerance to disturbances. No stresses are induced in the substrate due to the commanded deformation of the substrate, regardless of the magnitude of the deformation. Any stresses in the substrate structure are those induced due to forces in the face sheet, which are likely to be small using advanced nano-laminate and membrane face sheet technologies. The magnitude of the deformation (dynamic range) is limited only by the actuator stroke, and not by the stresses induced in the substrate. The design therefore accommodates small-force, large-stroke actuators, as opposed to the current designs that use large-force, small-stroke actuators.

Abstract: A mirror retainer for retaining a mirror accommodated in a chamber that has a wall and a lid openably provided on the wall, and generates a reduced pressure environment, includes an elastic member for connecting the mirror elastically to the lid.

Abstract: A lithographic projection apparatus includes an active reflector in a radiation system providing a projection beam of radiation and/or in a projection system. The active reflector includes a body member, a reflective multilayer and at least one actuator controllable to adjust the surface figure of the reflecting multilayer, wherein the actuator exerts a substantial force component in a direction parallel to the surface figure of said reflective multilayer. The actuator may be operative to apply torques to said reflector.

Abstract: A lightweight active mirror. A first layer has a front side and a backside. A second layer has a front side and a backside. The backside of the second layer faces the front side of the first layer. A reflective surface is on the front side of the second layer. The reflective surface is operable to reflect desired wavelengths of electromagnetic radiation. A plurality of electroactive actuator strips arranged between the first layer and the second layer are operable to alter a curvature of the mirror. Electrical connectors are operable to cause the electroactive strips to alter the curvature of the mirror. A plurality of stiffening elements interconnected with at least one of the first layer and the second layer are operable to stiffen the mirror. A plurality of shape retaining elements attached to at least one of the first layer and the second layer are operable to deploy the mirror and to bias the mirror in a desired position.

Abstract: A mirror arrangement for reflecting electromagnetic radiation has a mirror body with a mirror side disposed towards the radiation to be reflected and at least one extension sensor located at the mirror body for detecting a deformation state of the mirror body. The mirror body includes semiconductor layer where the at least one extension sensor is located.

Abstract: A transfer optic mirror thin enough to permit small influence functions for surface changes is made from cynate ester composites. The thin mirror resulting is then shaped by a plurality of piezolectric actuators connectors to push/pull rods spread evenly over the back surface of the thin mirror a distance determined by the mirror's influence function. The mirror is held by a support with the same coefficient of expansion as the mirror so external heating and cooling does not distort the mirror. The actuators are connected to a computer so each is separately controlled to contour the mirror as desired.

Abstract: An adaptive optic mirror has a cyanate faceplate supported by a backplate which permits a plurality of actuators to be connected directly to the faceplate. Each actuator is connected via a low impedance circuit to a master control which sets each actuator independently of the others to produce a contoured mirror surface.

Abstract: A link-mechanism base is prepared within a yoke portion, and a link member is prepared in connection with the base within left and right supports. The link member connects the upper part of the supports or the upper part of the yoke portion, and the link-mechanism base. The displacement and angle of rotation of the upper part of the yoke portion are measured by using these link-mechanism base and link member, thereby measuring a change in the pointing direction of a reflector.

Abstract: A device for adjusting a view range of a vehicular monitoring device includes an overtaking pre-motion detector outputting an adjusting signal when an overtaking operation is predicted; and a controller in communication with the overtaking pre-motion detector and the vehicular monitoring device, controlling the vehicular monitoring device to move in response to the adjusting signal. The device may further output a warning signal to sound the horn or twinkle the vehicle lamp when the overtaking operation is predicted for safety consideration.

Abstract: A reflecting mirror supporting mechanism has a reflecting mirror with countersinks in the side thereof, a mirror holder (a base) for supporting the reflecting mirror, and leaf springs which urge a base-side face of each of the countersinks against the mirror holder. The reflecting mirror is movable in an in-plane direction of the reflecting mirror, and the base-side face in each of the countersinks is parallel with the rear of the reflecting mirror. A first pad is disposed in a space between the leaf spring and the base-side face. In a space between the rear of the reflecting mirror and the mirror holder, a second pad is provided which is flat in shape in a contact portion with the rear of the reflecting mirror and is spherical in shape in a contact portion with the mirror holder.

Abstract: A method and apparatus providing a micro-mirror device configured to increase a switching frequency thereof. The micro-mirror device includes a substrate with at least one address electrode positioned over the substrate to provide an electrostatic force and includes at least one support member positioned over the substrate and extending upward above the substrate. The micro-mirror device also includes a mirror and a spring member. The mirror is disposed over the at least one address electrode and coupled to the at least one support member. The mirror is configured to deflect toward the substrate in response to the at least one address electrode applying the electrostatic force to the mirror. The spring member is spaced apart between the substrate and the mirror and coupled to the at least one support member. The spring member is operable to deflect separately from the mirror and toward the substrate.

Abstract: A method and tool to smooth surface contours uses a fixed back plate mounted at a known distance to an actuator holding plate. Each of the actuators is mounted in said actuation holding plate by a support collar threaded into said actuator holding plate. Threaded with said support collar is an actuator holder with rigidly holds an actuator. A differential threaded adjustment device is then inserted through said fixed back plate and connected to say support collar and actuator holder so that each can be moved independently of the other. The actuator is made of two piezoelectric plates connected in parallel and separated by a silicon rubber o-ring.

Abstract: Adaptive optical elements for use in high precision lithography exposure are provided with an array of discrete actuators to provide highly stable and repeatable correction of the shape of an optical element to an accuracy of a small fraction of a very short wavelength of light in the EUV range of 1 to 50 nanometers, responsive to a metrology source and sensor arrangement. The actuators are matched to the deformation characteristics of the adaptive optical elements. Preferably, the actuators provide both positive and negative force for outward and/or inward deflection continuously over the surface of the mirror. The surface of the optical element may thus be accurately, controllably and repeatably deformed to within an allowable deformation limit to optimize optical performance of an optical system for high precision lithography exposure.

Abstract: A variable-profile optical device includes a light-transmission elastic member in which an elasticity of a first surface is set to be higher than that of a second surface disposed opposite to the first surface, wherein a pressure is applied to the second surface of the elastic member, so that the second surface of the elastic member is selectively deformed, and a focus distance may be varied.

Abstract: Methods and apparatus are disclosed for peripherally supporting X-ray-reflective mirrors such as used in X-ray microlithography systems and other X-ray optical systems. The methods provide effective physical support while reducing certain deformations in the reflective surface of the mirror. An embodiment of the method or mirror-support apparatus utilizes multiple “pushing” and “pushing” devices that apply a compressive stress and tensile stress, respectively, to respective locations on the peripheral-side surface of the mirror. One or more pushing devices and one or more pulling devices can be used as required. For example, at time of mirror fabrication, respective pushing devices can be placed adjacent concave-deviation regions and respective pulling devices can be placed adjacent convex-deviation regions on the reflective surface of the mirror.

Abstract: A combination of active and passive force actuators provide adjustments to the shape of an optical element to reduce or compensate for aberrations in an optical system. Passive actuators at a high spatial frequency are capable of correcting higher order steady state components of shape error while dynamic corrections of higher frequency, operationally dependent is provided allowing the number of active actuators and the power supplied to each active actuator to be reduced; reducing heating of the optical element by the active actuators and increasing stability of the system. Compound actuators including a combination of an active actuator portion with a passive actuator portion (which provides a mechanical force bias to the active actuator portion) allows increased spatial flexibility of application of forces to the optical element and other advantages.

Abstract: A deformable mirror arrangement has a plurality of constraint mechanisms contacting a deformable mirror at specified contact positions. At least three of these constraint mechanisms are rigid body servo control mechanisms such as high-bandwidth servo control mechanisms, each including a force actuator contacting the mirror at a corresponding one of the contact positions, a position sensor assisting to measure position of the mirror and a servo control unit for controlling the force actuator.

Abstract: A micromirror unit is provided which includes a frame, a mirror forming base upon which a mirror surface is formed, and a torsion connector which includes a first end connected to the mirror forming base and a second end connected to the frame. The torsion connector defines a rotation axis about which the mirror forming base is rotated relative to the frame. The torsion connector has a width measured in a direction which is parallel to the mirror surface and perpendicular to the rotation axis. The width of the torsion connector is relatively great at the first end. The width becomes gradually smaller from the first end toward the second end.

Abstract: A lithographic projection apparatus includes an active reflector in a radiation system providing a projection beam of radiation and/or in a projection system. The active reflector includes a body member, a reflective multilayer and at least one actuator controllable to adjust the surface figure of the reflecting multilayer, wherein the actuator exerts a substantial force component in a direction parallel to the surface figure of said reflective multilayer. The actuator may be operative to apply torques to said reflector.

Abstract: Structures including piezoelectric actuators, actuator arrays, and deformable mirrors and processes for fabricating the structures are provided. The fabrication processes can manufacture arrays of actuators including piezoelectric materials using wafer-processing techniques. The actuators include piezoelectric layers sandwiched between electrodes that are mounted on flexures that provide electrical connections. The piezoelectric layers can be formed on sacrificial layers while flexures are formed in trenches or vias through the sacrificial layers. Removal of the sacrificial layers frees the piezoelectric layer and permits the piezoelectric layers to dish or warp when providing the actuator action. Alternative embodiments include actuators that are bimorphs or Rainbows.

Abstract: The mirror device has a mirror 2, and a supporting mechanism which elastically supports the mirror 2 on a substrate 1 in a state in which the mirror floats from the substrate 1, so that the mirror can be inclined in an arbitrary direction. The supporting mechanism has three supporting parts 3A, 3B and 3C that mechanically connect the substrate 1 and mirror 2. Each of the supporting parts 3A, 3B and 3C has one or more plate spring parts 5 that are constructed from a thin film consisting of one or more layers. One end portion of each plate spring part 5 is connected to the substrate 1 via a leg part 9 which has a rising part that rises from the substrate 1. The other end portion of the plate spring part 5 is mechanically connected to the mirror 2 via a connecting part which has a rising part that rises from this other end portion. The mirror 2 is supported on the substrate 1 only via the plate spring part 5 of the respective 3A, 3B and 3C.

Abstract: An improved structure and method for building large-aperture lightweight deformable mirrors uses a hinged substrate. In addition to reduced weight, the approach provides rigidity to the mirror, which is necessary for the accurate response to actuator commands and tolerance to disturbances. No stresses are induced in the substrate due to the commanded deformation of the substrate, regardless of the magnitude of the deformation. Any stresses in the substrate structure are those induced due to forces in the face sheet, which are likely to be small using advanced nano-laminate and membrane face sheet technologies. The magnitude of the deformation (dynamic range) is limited only by the actuator stroke, and not by the stresses induced in the substrate. The design therefore accommodates small-force, large-stroke actuators, as opposed to the current designs that use large-force, small-stroke actuators.

Abstract: The invention relates to a method of making a surface having a shape of an angular conic section for focusing optical beams. An angular conic section is understood to be a portion of a surface, which can be generated by rotating a generating line with the desired shape about an axis of rotation. It puts to practice the formation of a mirror or a mandrel of a truncated shape with a reference contour or reference contours (2, 4), and which is provided with a device (11, 13, . . . ) for deforming the reference contour or contours along at least one direction (F). The thus-produced mirror or mandrel can be common to a plurality of modules or rings of a WOLTER type telescope. The invention relates likewise to a mandrel or a mirror with a reference contour (2), characterized in that it is provided with a device (15, 16, . . . ) for adjusting the angle that is formed by the first and the second portion.

Abstract: A deformable mirror arrangement has a plurality of constraint mechanisms contacting a deformable mirror at specified contact positions. At least three of these constraint mechanisms are rigid body servo control mechanisms such as high-bandwidth servo control mechanisms, each including a force actuator contacting the mirror at a corresponding one of the contact positions, a position sensor assisting to measure position of the mirror and a servo control unit for controlling the force actuator.

Abstract: Optical-element mountings are disclosed for holding an optical element relative to an optical column of an optical system. The optical element can have mounting protrusions extending therefrom or lack such features. An exemplary embodiment of a mounting has a respective-holding device mounted to each mounting protrusion. Each holding device has a first spring-loaded support member providing rigid support of the element in a gravity direction and flexible support in tangential, radial, and tilt directions. Each holding device also can include a second spring-loaded support member providing rigid support of the element in tangential directions and flexible support in the gravity and radial directions. Another embodiment includes multiple holding devices at respective locations relative to a mounting surface of the element. Each holding device includes a respective linking unit extending from the optical column to a respective bonding member attached to a bonding location on the mounting surface.

Abstract: A micromachined mirror scanning system having plural benders of morphs and support arms between a mirror surface of silicon and a surrounding frame. Electrical energization of the morphs with a DC voltage under the control of a computer provides a large range of mirror orientations and positions and the devices occupy a small planar package. The devices of the invention are formed from a single wafer of silicon and have low response times and large scan angles.

Abstract: A microelectromechanical system is disclosed that constrains the direction of a force acting on a first load, where the force originates from the interaction of the first load and a second load. In particular, the direction of a force acting on the first load is caused to be substantially parallel with a motion of the first load. This force direction constraint is achieved by a force isolator microstructure that contains no rubbing or contacting surfaces. Various embodiments of structures/methods to achieve this force direction constraint using a force isolator microstructure are disclosed.

Abstract: An adaptive optic mirror has a cyanate faceplate supported by a backplate which permits a plurality of actuators to be connected directly to the faceplate. Each actuator is connected via a low impedance circuit to a master control which sets each actuator independently of the others to produce a contoured mirror surface.

Abstract: An improved irradiation device for polarized light for optical alignment of a liquid crystal cell element includes a lamp, a focusing mirror for focusing of the light of the lamp, an integrator lens, and a polarization element in which the polarization element is made such that several glass plates, which are located parallel to one another at a distance, are tilted by the Brewster angle with reference to the optical axis. The rotary motion of the above described polarization element around the center of the light beam incident in the polarization element (light beam being the axis of rotation), changes the polarization direction of the polarized light with which the alignment layer of the liquid crystal cell element is irradiated. The polarization element may be located in the vicinity of the integrator lens.

Abstract: A mirror arrangement (1) for reflecting electromagnetic radiation (13) is proposed which comprises a mirror body (5) with a mirror side (11) disposed towards the radiation to be reflected and at least one extension sensor (37) provided at the mirror body (5) for detecting a deformation state of the mirror body (5). The mirror arrangement is distinguished in that the mirror body (5) comprises a semiconductor layer (5, 61) at which the at least one extension sensor (37) is provided.

Abstract: A telescope is constructed so that inertia force caused when the telescope is moved is canceled to thereby eliminate any influence on a space station, artificial satellite or the like. When a telescope body (1) rotates around an axis (X) in a direction (&agr;1), counter weights (6a, 6b) are driven by a rotator drive (10) so as to rotate in a direction (&agr;2) which is reverse to the direction (&agr;1), so that the inertia force caused is canceled. Also, when the telescope body (1) rotates around an axis (Y) in a direction (&bgr;1), counter weights 8a, 8b are rotated in a direction (&bgr;2), which is reverse to the direction (&bgr;1) so that the inertia force caused is canceled.

Abstract: A micro-mirror comprises a membrane of a dielectric polymer layer between two metal layers for supplying a high frequency ac voltage thereto for dielectric heating of the membrane, and a further polymer layer adjacent to and forming a bimorph with the second metal layer, the membrane being supported around its periphery so that the membrane produces a mirror with a curvature, and hence a focal length, dependent upon the heating. Such micro-mirrors are useful in optical signal paths in optical components, including optical receivers and variable attenuators. A detected optical signal can be used in a feedback control path to control a high frequency ac voltage source connected to the two metal layers, and hence the focal length of the micro-mirror.

Abstract: Various embodiments of reinforced mirror microstructures for a surface micromachined optical system are disclosed. Multi-layered and structurally reinforced mirror microstructures are disclosed, including both two and three-layer microstructures. Adjacent structural layers in these multi-layered mirror microstructures may be structurally reinforced and interconnected by a plurality of vertically disposed columns, or by a plurality of at least generally laterally extending rails or ribs, or some combination thereof. Various embodiments of a single layered mirror microstructure with a structural reinforcement assembly that cantilevers from a lower surface thereof is also disclosed.

Abstract: The invention relates to a device for influencing a laser beam by means of an adaptive mirror (12) in the beam path, having a piezoelectric adjusting member (17) arranged on the back of the mirror (12), it being the case that, in order to achieve low-aberration deformation of the mirror (12) for the purpose of influencing the divergence of the beam, there is provided between the adjusting member (17) and the back (24) of the mirror (12) a pressure-transmitting device (19) which acts on a large area of the deformable surface of the mirror (12).

Abstract: A mirror for use in a catadioptric system, is provided which is a substantially circular mirror having a rotationally symmetric cross section by a set of points substantially close to a curve satisfied by a differential equation as follows: 2 ⁢ F ′ ⁡ ( x ) 1 - F ′ ⁡ ( x ) 2 = d ⁡ ( x ) - x F ⁡ ( x ) where x is the radius of the mirror and F(x) is the cross-sectional shape.

Abstract: A device such as a secondary mirror of a space telescope is mounted isostatically on a support structure through an integrated compact assembly including three mounting devices, which are preferably identical and uniformly distributed around an axis of symmetry of the device to be supported. Each device is in the form of a deformable triangle in which a first arm materialized by at least a variable length arm is connected to the support structure, and in which the opposite vertex materialized by a support part is connected to the device to be supported. Friction free hinges with zero play connect the arms of the triangle together. Thus the position of the device to be supported can be corrected along six degrees of freedom.

Abstract: A system for adjusting a deformable mirror including a reaction plate, a plurality of pneumatic actuators coupled to the reaction plate, and a plurality of push-pull flexures coupled on a first end to the pneumatic actuators, and coupled on a second end to the non-reflective side the deformable mirror, the plurality of push-pull flexures being disposed at various locations on the back of the deformable mirror. The respective pairs of push-pull flexures and pneumatic actuators are operated to support and alter the shape of the deformable mirror to allow for correction of a plurality of optical aberrations.

Abstract: A cross-connect switch for fiber-optic communication networks employing a wavelength dispersive element, such as a grating, and a stack of regular (non-wavelength selective) cross bar switches using two-dimensional arrays of micromachined, electrically actuated, individually-tiltable, controlled deflection micro-mirrors for providing multiport switching capability for a plurality of wavelengths. Using a one-dimensional micromirror array, a fiber-optic based MEMS switched spectrometer that does not require mechanical motion of bulk components or large diode arrays can be constructed with readout capability for WDM network diagnosis or for general purpose spectroscopic applications.

Abstract: A reflecting apparatus includes a flexible mirror and at least one rocker arm coupling an applied force to a plurality of spaced-apart locations on the mirror to adjust the shape of the mirror. The reflecting apparatus may be used in an interferometer in the path of one of the interfering beams, and adjustments of the shape of the mirror may be used to control the interference pattern generated. The interference pattern created by the apparatus may be used to create fiber Bragg gratings and phase masks, including chirped gratings and masks. An interferometer may use such a reflecting apparatus in the path of each interfering beam.

Abstract: An adjustable optical device including an optical element, a housing having an adjusting post fixed thereto, the optical element mounted to the housing, the housing adjusting post having a plane of movement, and an adjustment mechanism, the housing flexibly connected to the adjustment mechanism, the adjustment mechanism comprising a moving adjusting member in sliding engagement with the housing adjusting post, one of the adjusting member and the housing adjusting post comprising a wedge. The housing adjusting post is urged into movement in its plane of movement in response to relative movement between the adjusting member and the adjusting post, whereby the orientation of the optical element relative to the adjusting mechanism is adjusted by movement of the moving adjusting member.

Abstract: A cross-connect switch for fiber-optic communication networks employing a wavelength dispersive element, such as a grating, and a stack of regular (non-wavelength selective) cross bar switches using two-dimensional arrays of micromachined, electrically actuated, individually-tiltable, controlled deflection micro-mirrors for providing multiport switching capability for a plurality of wavelengths. Using a one-dimensional micromirror array, a fiber-optic based MEMS switched spectrometer that does not require mechanical motion of bulk components or large diode arrays can be constructed with readout capability for WDM network diagnosis or for general purpose spectroscopic applications.

Abstract: A micromachined apparatus for reflecting light is described that is designed to reduce losses in quality or intensity of light. Mirrors are used having lengths that are longer than their widths to reduce clipping of light when a mirror is located at an angle with respect to light falling thereon. Relatively long mirror torsion components are used to reduce forces required to pivot the mirrors. Regardless of the dimensions of the mirrors and the use of long torsion components, the mirrors are still located relatively dose to one another. The relatively close positioning of the mirrors is due to a combined use of notches formed in support frames to which the torsion components are secured, oval shapes of the mirrors which take up less space than rectangular shapes, matching oval openings in the support frames, and the arrangement of the support frames in a non-rectangular array wherein tips of the support frames are located between one another.

Abstract: A deformable curvature mirror capable of controlled deformation by applying electrical voltages to electrode segments on the back of the mirror. Two plates of an electro-restrictive material, such as PZT or PMN, are jointed together with at least one conductive layer sandwiched therebetween. One plate has an outer conductive layer and a mirrored surface on the outer conductive layer. The conductive layers are electrically grounded. The other plate has a pattern of a plurality of electrode segments on the outer surface with each electrode segment having a separate electrical terminal for applying a variable electrical voltage thereto for separately transmitting a variable current through each said electrode segment and through at least the other plate for causing variable expansion of the plate and thereby selectively deforming that plate and, in turn, the deformable curvature mirror.