Abstract: A table comprising a base and a plurality of support members supported by the base is used to shape a mirror. The height of the plurality of support members is adjusted to form a predetermined shape. A mirror is placed over the plurality of support members, such that the mirror assumes the predetermined shape. A frame is then attached to the mirror such that when the mirror and frame are lifted off the table, the mirror substantially retains the predetermined shape.

Abstract: A Micromirror Array Lens with self-tilted micromirrors comprising a plurality of self-tilted micromirrors and configured to form a designed optical surface profile by self-tilted micromirrors. Each self-tilted micromirror comprises a substrate, at least one stiction plate configured to be attracted to the substrate by adhesion force, a micromirror plate having a reflective surface, coupled to the stiction plate elastically and configured to have a required motion when the stiction plate is attracted to the substrate, and at least one pivot structure disposed between the substrate and the micromirror plate and configured to provide a tilting point or area for the motion of the micromirror plate. The designed optical surface profile determines the required motion of the micromirror plate and a surface profile shape memory is built in the structure of the micro-mechanical elements of the self-tilted micromirrors so that each micromirror plate has the required motion.

Abstract: A differential curvature sensing device for measuring a wavefront curvature by employing increased spatial sampling for wavefront testing with mid-frequency error recovery. The device includes a sampling sensor having an output beam, an optical element to split said output beam, a lenslet array in the path of each beam to generate corresponding sampling grids, a shearing element for shifting the grid points in horizontal and vertical directions to produce plural sampling grids having plural grid points for use generating a spatial sampling grid having a density for mid-spatial frequency recovery. The displacement of the shifting less than a pitch size of the lenslet array, and a measuring device measuring plural slopes of plural wavefronts at each grid point to obtain a wavefront normal curvature and corresponding twist curvature terms to determine a principal curvature and directions. The sensor is a Shack-Hartman sensor, shearing interferometer sensor and other discrete-point sampling sensors.

Abstract: A correction and focusing device for a beam, through the deformation of a mirror, wherein it incorporates a frame supporting the mirror, at least one curve generator applying at least one torque to at least one extremity of the mirror, and correction actuators spaced along the mirror so as to apply stresses to the different zones of the mirror.

Abstract: A deformable hinge for use in microelectromechanical devices comprises a protection layer that is electrically conductive. The protection layer is on top of another hinge layer; and is more resistive than the hinge layer to the etchant used in during patterning and/or release processes during fabrication of the microelectromechanical device. As a result, the hinge layer can be protected from being damaged during the fabrication process.

Abstract: Actuator arrays for use in adaptive-optical elements and optical systems containing at least one such element are disclosed. The actuator arrays provide more precise control of the shape of the adaptive-optical surface while utilizing fewer actuators than conventional systems. An adaptive-optical system of an embodiment includes an array of force devices coupled to a deformable optical surface. The force devices of the array are arranged in braking groups and force-altering groups such that each force device belongs to a respective combination of braking group and force-altering group. A respective force controller is coupled to the force devices of each force-altering group, and a respective braking controller is coupled to the force devices of each braking group.

Abstract: A thin nearly wireless adaptive optical device capable of dynamically modulating the shape of a mirror in real time to compensate for atmospheric distortions and/or variations along an optical material is provided. The device includes an optical layer, a substrate, at least one electronic circuit layer with nearly wireless architecture, an array of actuators, power electronic switches, a reactive force element, and a digital controller. Actuators are aligned so that each axis of expansion and contraction intersects both substrate and reactive force element. Electronics layer with nearly wireless architecture, power electronic switches, and digital controller are provided within a thin-film substrate. The size and weight of the adaptive optical device is solely dominated by the size of the actuator elements rather than by the power distribution system.

Abstract: An interferometric modulator comprising a substrate, a movable membrane and one or more stiction bumps disposed between the substrate and the movable membrane. The stiction bumps are configured to mitigate stiction between the substrate and the movable membrane.

Abstract: Fabricating a deformable mirror by providing a plurality of actuators and a support structure supporting and at least partially surrounding the actuators; applying an optical membrane across the actuators and at least a portion of the support structure; the optical membrane including a first area, a second area and an intermediate area elastically decoupling the first and second areas; bonding the first area to the actuators and the second area to the support structure; and polishing the optical membrane.

Abstract: A projection objective of a microlithographic projection exposure apparatus has a plurality of optical elements, for example lenses or mirrors. The objective furthermore includes an actuator for exerting a mechanical force that deforms a selected optical element of the projection objective. A manipulator modifies the spatial position of one of the optical elements as a function of the force exerted by the actuator.

Abstract: An endoscope has a tubular shaft whose interior contains components, in particular lenses, spacers, diaphragms, prisms and filters of an optical system, said components being at least partially surrounded by a support piece made of shrunk material. It is proposed that the components be surrounded by a transparent and tube-sleeve-shaped shrunk material which has been shrunk before the components are introduced into the tubular shaft.

Abstract: A deformable mirror formed out of two layers of a nanolaminate foil attached to a stiff substrate is introduced. Deformation is provided by an electrostatic force between two of the layers. The internal stiffness of the structure allows for high-spatial-frequency shapes. The nanolaminate foil of the present invention allows for a high-quality mirror surface. The device achieves high precision in the vertical direction by using foils with accurately controlled thicknesses, but does not require high precision in the lateral dimensions, allowing such mirrors to be fabricated using crude lithography techniques. Such techniques allow structures up to about the meter scale to be fabricated.

Abstract: A control of gobos defend by records in the gobo. The gobos are formed by menued shapes.

Abstract: A system and method for dispersion-force-based actuation are disclosed. In some embodiments, a light beam is used to change the dispersion force between two spaced apart surfaces. The change in the dispersion force causes a change in the gap between the surfaces. The actuation system can be used in conjunction with a deformable mirror to provide an improved adaptive optics system.

Abstract: An optical element with multi-layer composites that deforms to reduce optical aberrations in off-axis optic. Methods are also described in relation to the optical element.

Abstract: The disclosed technology provides a dynamic interconnection system which allows to couple a pair of optical beams carrying modulation information. In accordance with the disclosed technology, two optical beams emanate from transceivers at two different locations. Each beam may not see the other beam point of origin (non-line-of-sight link), but both beams can see a third platform that contains the system of the disclosed technology. Each beam incident on the interconnection system is directed into the reverse direction of the other, so that each transceiver will detect the beam which emanated from the other transceiver. The system dynamically compensates for propagation distortions preferably using closed-loop optical devices, while preserving the information encoded on each beam.

Abstract: A thin nearly wireless adaptive optical device capable of dynamically modulating the shape of a mirror in real time to compensate for atmospheric distortions and/or variations along an optical material is provided. The device includes an optical layer, a substrate, at least one electronic circuit layer with nearly wireless architecture, an array of actuators, power electronic switches, a reactive force element, and a digital controller. Actuators are aligned so that each axis of expansion and contraction intersects both substrate and reactive force element. Electronics layer with nearly wireless architecture, power electronic switches, and digital controller are provided within a thin-film substrate. The size and weight of the adaptive optical device is solely dominated by the size of the actuator elements rather than by the power distribution system.

Abstract: The variable-shape mirror is provided with a support base and a minor portion that is disposed to face the support base and that has on a side thereof facing away from the support base a minor surface which is irradiated with a light beam. There are also provided piezoelectric elements that are sandwiched between the support base and the mirror portion and that vary the shape of the mirror surface. The piezoelectric elements are bonded, through a thin layer of metal that is separately provided for bonding, to at least one of the support base and the mirror portion. A driving voltage to the piezoelectric elements is supplied through the thin layer of metal.

Abstract: Systems and methods for shifting the phase of incident light to induce a continuous phase variation in an azimuthal direction. A phase mask apparatus includes a conical mirror assembly and a flexible annular reflector that substantially surrounds at least a portion of the conical mirror assembly. The flexible annular reflector is configured to receive reflected light from the conical mirror assembly. A plurality of driver assemblies are operative to deform the flexible annular reflector as to produce the desired phase response in light reflected from the annular reflector.

Abstract: A thin, nearly wireless adaptive optical device capable of dynamically modulating the shape of a mirror in real time to compensate for atmospheric distortions and/or variations along an optical material is provided. The device includes an optical layer, a substrate, at least one electronic circuit layer with nearly wireless architecture, an array of actuators, power electronic switches, a reactive force element, and a digital controller. Actuators are aligned so that each axis of expansion and contraction intersects both substrate and reactive force element. Electronics layer with nearly wireless architecture, power electronic switches, and digital controller are provided within a thin-film substrate. The size and weight of the adaptive optical device is solely dominated by the size of the actuator elements rather than by the power distribution system.

Abstract: An exposure apparatus illuminates a pattern on an original form, introduces light from the pattern to a plate, and exposes the plate. The exposure apparatus includes at least one optical element, and forcing member that applies a force to the at least one optical element in a non-contact manner.

Abstract: A micromirror unit is provided which includes a frame, a mirror forming base upon which a mirror surface is formed, and a torsion connector which includes a first end connected to the mirror forming base and a second end connected to the frame. The torsion connector defines a rotation axis about which the mirror forming base is rotated relative to the frame. The torsion connector has a width measured in a direction which is parallel to the mirror surface and perpendicular to the rotation axis. The width of the torsion connector is relatively great at the first end. The width becomes gradually smaller from the first end toward the second end.

Abstract: A discretely controlled micromirror array lens (DCMAL) consists of many discretely controlled micromirrors (DCMs) and actuating components. The actuating components control the positions of DCMs electrostatically. The optical efficiency of the DCMAL is increased by locating a mechanical structure upholding DCMs and the actuating components under DCMs to increase an effective reflective area. The known microelectronics technologies can remove the loss in effective reflective area due to electrode pads and wires. The lens can correct aberrations by controlling DCMs independently. Independent control of each DCM is possible by known microelectronics technologies. The DCM array can also form a lens with arbitrary shape and/or size, or a lens array comprising the lenses with arbitrary shape and/or size.

Abstract: A high authority deformable optical system includes an optical faceplate; a base; a plurality of circuit boards, each including at least one actuator; each actuator engaging at one end the base and at the other the optical faceplate; each printed circuit board providing conductor paths between its associated actuators and a connector device for selectively energizing the actuators.

Abstract: A deformable mirror control device is provided with improved response characteristic by devising the mode of control even if the deformable mirror has a large time constant in comparison with the response speed required in applications such as the retinal camera. The deformable mirror device comprises a deformable mirror 10 having a reflective surface deformed with an applied voltage, and a voltage control circuit 20 for controlling the voltage applied to the deformable mirror 10. Here, the voltage control circuit 20 produces a steady-state voltage at which the reflective surface of the deformable mirror 10 takes an intended shape in a steady state, and produces a transient voltage that causes the reflective surface of the deformable mirror 10 to deform toward the intended shape, and also produces a transient voltage that causes the shape of the reflective surface of the deformable mirror 10 to shift quickly toward the intended shape.

Abstract: A high-bandwidth deformable fast steering mirror (“HDFSM”) system, including an electromechanical fast steering mirror (“FSM”) apparatus, and a deformable mirror (“DM”) apparatus mounted on the electromechanical FSM apparatus. The DM apparatus further includes a DM substrate, a backplane assembly, a plurality of electrostrictive actuators in physical communication with and between the DM substrate and the backplane assembly, for deforming the DM substrate, and a plurality of strain gauges, each strain gauge mounted on one of the plurality of electrostrictive actuators, the plurality of strain gauges measuring individual positions of the plurality of electrostrictive actuators and transmitting the positions as actuator position signals. The high-bandwidth deformable FSM also includes a closed-loop control system, the control system controlling the electromechanical FSM apparatus and the DM apparatus based upon a command input and the actuator position signals.

Abstract: A closed loop compensation system including a deformable mirror including an array of spaced actuators. An array of spaced sensors is mapped in optical space to reside between pairs of actuators. A lens system receives a wavefront from the deformable mirror and focuses sub-apertures of the wavefront onto individual ones of the spaced sensors. A sequencer addresses each actuator and associated sensor in the arrays. A compute unit is configured to respond to the sequencer to set a first actuator to an adjusted stroke position and then adjust the stroke of subsequent actuators to locate, to a pre-established position, the focused sub-aperture on a sensor in the pathway between each particular subsequent actuator and a neighboring previously adjusted portion of the mirror to compensate for sub-aperture tilt while maintaining relative phase between sub-apertures.

Abstract: The invention relates to a deformable system comprising a part of a rectangular block shape, such as a beam, coupled to an actuator enabling the part to be deformed by generating curvature in the length direction, the system being characterized in that said part presents a main portion to be deformed, which main portion carries projections at its ends such that, in longitudinal section, the part presents an elongate U-shape, and in that the actuator presents levers coming to bear against said projections in order to transmit thereto a force suitable for producing deformation of the part.

Abstract: An improved device for reflecting, radiating, or receiving electromagnetic radiation, acoustic waves, or other energy forms through the use of a membrane stretched across a lightweight, round, frame structure. A near perfectly round and flat semi-rigid backplane surface (1) and a near perfectly round ring or stack of rings (2) are mutually reinforced, forming a raised circumferential planar surface, and a cavity within. A membrane (3) is attached to the top of the rings, forming one wall of a sealed chamber. A source of sub-ambient pressure (4) is applied to the chamber, causing a primary uniform deformation in the membrane for the purpose of manipulating electromagnetic radiation, acoustic waves, or other energy. The backplane surface also deforms uniformly, increasing the strength of the structure. A flat, rigid floating batten (5) prevents waves or wrinkles from forming in the membrane material.

Abstract: This invention relates to a hybrid deformable mirror. A deformable mirror is provided comprising a reflective surface provided on a substrate and a layer of deformable material attached to the substrate that is operable to deform the mirror and wherein the substrate is supported by an actuator that is operable to deform the mirror.

Abstract: A deformable optical device includes a reflection device having a first reflecting surface and a second surface, an actuator (e.g., an integrated circuit piezoelectric actuator) having a support device and moveable extensions extending therefrom, which are coupled to the second surface, and electrodes coupled to corresponding ones of the extensions. Wavefront aberrations are detected and used to generate a control signal. The extensions are moved based on the control signal. The movement deforms the reflecting surface to correct the aberrations in the wavefront.

Abstract: An array of high fill factor mirrors has each mirror be coupled across two deformable spring bars that are deformed using a drive. The two deformable springs are parallel to each other, and coupled together, e.g., by a cross bar. A support is coupled at one end to the cross bar and at its opposite end to the mirror. Coupled across the deformable spring bars on the opposite side thereof from the mirror support, is at least one moveable drive plate. Motion by the moveable drive plate causes the deformable spring bars to torque, e.g., in the local vicinity of the connection of the drive plate to the deformable spring bars. The torque causes the deformable spring bars to move downward, e.g., near their centers. As a result, cross bar, and hence the mirror, move downward.

Abstract: An arrangement for use with a micro-mechanical beam, in which a plurality of support structures are configured to directly attach to the micro-mechanical beam to increase bending stiffness of the micro-mechanical beam without significantly influencing torsional stiffness. At least two of the support structures are arranged to touch each upon reaching a predetermined bending action of the micro-mechanical beam and prevent a further bending action of the micro-mechanical beam, and at least two of the support structures are non-identical.

Abstract: A manufacturing method for variable shape mirrors, which is suitable for mass production, includes a bonding step for sandwiching support pillars and piezoelectric elements between a support substrate and a mirror substrate, and bonding at least the support substrate and the support pillar to each other, the support substrate and the piezoelectric element to each other, and the mirror substrate and the support pillars to each other, respectively, and an elastic film forming step for forming a flat elastic film on the outer surface of the mirror substrate, and a reflection film forming step for forming a reflection film on the elastic film.

Abstract: An outer-rearview-mirror unit for a motor vehicle comprises an electrical switching device with a number of positions, which controls electrical supply of a plurality of shape-memory wires that control oscillation of the reflecting plate of the mirror. The electrical switching device has a single control lever with a number of positions projecting from a support, which, in the mounted condition of the mirror, is in a position coinciding with that of the base of the mirror, on the inside of the passenger compartment of the motor vehicle.

Abstract: A catadioptric projection objective for microlithography has at least one curved mirror that is deformable and adjusting elements that can deform the deformable mirror. The adjusting elements are matched to given image errors and their correction. The invention is suitable for astigmatism, fourfold wavefront-deformations due to lens heating, compaction, and the like.

Abstract: A discretely controlled micromirror array lens (DCMAL) consists of many discretely controlled micromirrors (DCMs) and actuating components. The actuating components control the positions of DCMs electrostatically. The optical efficiency of the DCMAL is increased by locating a mechanical structure upholding DCMs and the actuating components under DCMs to increase an effective reflective area. The known microelectronics technologies can remove the loss in effective reflective area due to electrode pads and wires. The lens can correct aberrations by controlling DCMs independently. Independent control of each DCM is possible by known microelectronics technologies. The DCM array can also form a lens with arbitrary shape and/or size, or a lens array comprising the lenses with arbitrary shape and/or size.

Abstract: In a reflecting mirror, a plurality of segmented mirrors are grouped into a plurality of groups of a cluster, and are supported by a plurality of sub mirror cells. The plurality of sub mirror cells are supported by a mirror cell, and all the segmented mirrors are supported by the mirror cell. A reference cell is supported by a plurality of force support mechanisms disposed in the mirror cell with the reference cell being nearly in a weightlessness state. Projections and depressions are prevented from occurring in an axial direction of the reflecting mirror due to a self weight deformation, and the reference cell can be used as a reference surface for control of the positions of the plurality of segmented mirrors and those of the plurality of cluster mirrors in the axial direction of the reflecting mirror.

Abstract: A variable focal length deformable mirror has an inner ring and an outer ring that simply support and push axially on opposite sides of a mirror plate. The resulting variable clamping force deforms the mirror plate to provide a parabolic mirror shape. The rings are parallel planar sections of a single paraboloid and can provide an on-axis focus, if the rings are circular, or an off-axis focus, if the rings are elliptical. The focal length of the deformable mirror can be varied by changing the variable clamping force. The deformable mirror can generally be used in any application requiring the focusing or defocusing of light, including with both coherent and incoherent light sources.

Abstract: The present invention provides a resonance type micro-oscillating member capable of retraining a fluctuation of angular velocity, and specifically provides a micro-oscillating member, which is a nested micro-oscillating member, wherein there exist a reference oscillation mode which is the characteristic oscillation mode of a reference frequency, and an even numbered oscillation mode which is the characteristic oscillation mode of a frequency being approximate even number times the reference frequency.

Abstract: A reflector module for a projection system includes a base, a reflecting component provided with a reflecting surface, an axle unit, and at least one actuator. The base has a surrounding wall with a bottom side, and a bottom wall connected to the surrounding wall for closing the bottom side of the surrounding wall. The reflecting component is disposed in the base, and has side edges and an underside surface. The axle unit is disposed on the side edges of the reflecting component, and interconnects the surrounding wall of the base and the reflecting component such that the reflecting component is mounted tiltably in the base about the axle unit. The actuator is mounted between the bottom wall of the base and the underside surface of the reflecting component, and is operable to drive movement of the reflecting component to cause the reflecting surface to oscillate about the axle unit.

Abstract: A method, or corresponding apparatus, for controlling deformation of a structure, in part, includes applying a command signal at a first signal level to at least one actuator mechanically coupled to a structure, the first signal level known to produce an energy level in the actuator(s) substantially the same as an energy level currently stored by the actuator(s). The method enables the actuator(s) to respond to the command signal by applying an electrical reference to the actuator(s). The method drives the command signal from the first signal level to a second signal level, changing the actuator(s) in at least one dimension as a function of the command signal, which results in a corresponding deformation of the structure. The method electrically disables the actuator(s) by removing the electrical reference, which results in maintaining deformation of the structure defined by energy stored by the actuator(s).

Abstract: A reflecting mirror support mechanism has at least one reflecting mirror panel (1), a support base (3) to finally support the reflecting mirror panel (1), and at least one reflecting mirror support member (2). The reflecting mirror support member (2) has a structure in which a base section (2A) is mounted on the support base (3) and plural branch sections (2B) are mounted to the reflecting mirror panel (1).

Abstract: An active hybrid optical component includes a substrate including a mounting surface; a replicated optical surface mounted on the mounting surface; and a plurality of actuators for deforming the substrate to impose a predetermined finished optical shape to the replicated optical surface.

Abstract: An integrated actuator meniscus mirror includes an optical substrate having a mirror surface on one side and a support structure on the other for controllably altering the shape of the mirror surface without a reaction mass.

Abstract: An integrated actuator meniscus mirror includes an optical substrate having a mirror surface on one side and a support structure on the other and a plurality of actuators embedded in the support structure, spaced from and generally parallel to the mirror surface for applying bending moments to the mirror surface for controllably altering the shape of the mirror surface.

Abstract: An integrated wavefront correction module including a mounting device a deformable mirror carried by the mounting device for correcting for high spatial and temporal frequency error in an incident wavefront and a tip-tilt correction mechanism including a base and a plurality of tip-tilt actuators interconnected between the base and one of the flexible and fixed portions and a plurality of support posts interconnected between the base and the other of the flexible and fixed portions or alternatively the tip-tilt correction mechanism may include at least one actuator platform, a base, a first set of tip-tilt actuators for adjustably supporting the at least one actuator platform from the base and a second set of tip-tilt actuators for adjustably supporting the mounting device from the at least one actuator platform for adjusting the mounting device and the deformable mirror together to compensate for tip-tilt errors in the incident wavefront with the tip-tilt actuators being operated typically at mid-range in or

Abstract: An array of micromirror array lenses is invented. The micromirror array lens consists of many micromirrors and actuating components. Each micromirror array lens is variable focal length lens with high speed focal length change. The lens can have arbitrary type and/or size as desired and desired arbitrary optical axis and can correct aberration by controlling each micromirror independently. Independent control of each micromirror is possible by known microelectronics technologies. The actuating components control the positions of micromirrors electrostatically and/or electromagnetically. The optical efficiency of the micromirror array lens is increased by locating a mechanical structure upholding micromirrors and the actuating components under micromirrors. The known microelectronics technologies remove the loss in effective reflective area due to electrode pads and wires.

Abstract: A fluid pressure support mechanism has a container in which fluid pressure is applied and fluid tubes are connected to the fluid pressure support mechanisms and to a fluid pressure control unit in such a way as to make all the fluid pressure support mechanisms communicate with each other, then a fluid pressure control unit applies the fluid pressure to the containers in the respective fluid pressure support mechanisms via the fluid tubes and controls the fluid pressure, and an electrically attractive actuator translates a mirror in an axial direction with one degree of freedom for translation by attracting force produced by a driven member and an electromagnet.

Abstract: Actuator arrays for use in adaptive-optical elements and optical systems containing at least one such element are disclosed. The actuator arrays provide more precise control of the shape of the adaptive-optical surface while utilizing fewer actuators than conventional systems. An adaptive-optical system of an embodiment includes an array of force devices coupled to a deformable optical surface. The force devices of the array are arranged in braking groups and force-altering groups such that each force device belongs to a respective combination of braking group and force-altering group. A respective force controller is coupled to the force devices of each force-altering group, and a respective braking controller is coupled to the force devices of each braking group.