Abstract: A device for handling a fluid includes a corona discharge device and an electric power supply. The corona discharge device includes at least corona discharge electrode and at least one collector electrode positioned proximate each other so as to provide a total inter-electrode capacitance within a predetermined range. The electric power supply is connected to supply an electric power signal to the corona discharge and collector electrodes so as to cause a corona current to flow between the corona discharge and collector electrodes. An amplitude of an alternating component of the voltage of the electric power signal generated is no greater than one-tenth that of an amplitude of a constant component of the voltage of the electric power signal.

Abstract: A platen for electrostatic wafer clamping apparatus comprising a platen body of dielectric material and grains of electrically conductive material diffused in the dielectric material so that the platen has a relatively large electrostatic capacitance due to the diffusion of the conductive grains with the result that the platen provides an increased clamping force regardless of humidity. In accordance with another aspect of the invention, the thickness of the platen body can be decreased by an amount sufficient to maintain a constant clamping force with reduced applied voltage, to eliminate any residual voltage on the platen and to increase the speed of wafer release. The grains of electrically conductive material are present in an amount of from about 2.5 percent to about 15.0 percent of the volume of the platen body, and the grains of electrically conductive material are selected from the group consisting of carbonated transition metals, nitrified transition metals and carbonated grains.

Abstract: A static electricity removal apparatus capable of raising an alternating rate at which ions are generated according to the speed of an object requiring static electricity removal using a high-frequency high voltage AC voltage includes: at least one discharge electrode assembly having a plurality of needle-shaped electrodes aligned with each other, each needle-shaped electrode receiving the high-frequency high voltage AC voltage and generating ions using a corona discharge; a ground electrode for facilitating ion generation by the plurality of needle-shaped electrodes; a high-frequency high voltage generation unit connected to the at least one discharge electrode assembly, the voltage generation unit generating the high-frequency high voltage AC voltage outputted to the plurality of needle-shaped electrodes; and an ion blower adapted to blow ions from the plurality of needle-shaped electrodes to the object requiring static electricity removal.

Abstract: A charging apparatus of a printer for charging a photoreceptor medium to a predetermined electric potential which includes a first electrode and a second electrode separated a predetermined distance from the first electrode and facing the photoreceptor medium, the charging apparatus includes a high voltage generating unit for generating a voltage set to the first electrode, a first varister connected to one end of the second electrode, a second varister having one end connected to the first varister in parallel and the other end connected to a ground terminal, a switching unit connected to the second varister in parallel and switched on/off, and an engine controller for controlling a duty of switching on/off of the switching unit to control a voltage maintained at the second electrode. Thus, the structure of a circuit is simplified and the size of the printer can be reduced.

Abstract: A plasma etch process for etching BPSG employing two primary etchants at low flows and pressures, and a relatively low temperature environment within the etch chamber, which includes a fluorine scavenger in the form of silicon. The two primary etchant gases are CHF3 and CH2F2, delivered at flow rates on the order of between about 10 and 40 sccm for CHF3 and between about 10 and 40 sccm for CH2F2. Small quantities, on the order of 10 sccm or less, of other gases such as C2HF5 and CF4 may be added.

Abstract: An image forming apparatus includes an image bearing member and a charge member for electrically charging the image bearing member while contacting the image bearing member. An oscillating voltage, including a component of AC voltage, is applied to the charge member. A first detector detects an average of the AC current applied to the charge member. A second detector detects a value of the AC current corresponding to a peak of the AC voltage. A controller effects control such that when a detected current value is smaller than a first predetermined value, the detected current value of the first detector is at the first predetermined value, and when the detected current value of the first detector is larger than the first predetermined value, a current value of the second detector is at a second predetermined value.

Abstract: An image forming apparatus includes an image bearing member and a charge member contacted to the image bearing member for electrically charging the image bearing member. An oscillating voltage including an AC voltage component is applied to the charge member. A first detector detects an AC current applied to the charge member and a second detector detects the AC current corresponding to a peak or a neighborhood of the peak of the AC voltage. A controller effects control such that current detected by the second detector is a predetermined level when the current detected by the first detector is within a predetermined range, and such that current detected by the first detector is a predetermined level when the current detected by the first detector is outside the predetermined range.

Abstract: An ionizing structure for ambient air treatment wherein the structure, optionally having ceiling-mounting provisions, incorporates an ionizing element forwardly directed in the direction of airflow through the structure, an electrical power supply coupled to the ionizing element for applying thereto a stepped-up, negative, direct-current voltage of the order of several thousand volts, and a buffer, in effect, in the form of electrical circuit means, e. g. a filter, operatively interposed between the power supply and the blower for preventing feedback of eddy-voltage spikes, transients and the like as may be generated in the power supply to the operative parts of the blower, thus preventing damage to the blower.

Abstract: In a capacitive element driving apparatus which changes, by an output circuit, the electrode potentials of the electrostatic capacitive element of a transducer forming a capacitive load such as a piezoelectric member to drive and control the electrostatic capacitive element, when the electrode potentials start changing and simultaneously change in the same direction by the function of a same-direction detection circuit, the potentials to be applied to the electrodes are controlled with a high impedance. While a portion between the electrodes of the electrostatic capacitive element of the transducer is being charged or discharged, the potentials to be applied are controlled with a low impedance lower than the high impedance.

Abstract: The invention relates to a device for producing active oxygen ions in the air for improved air quality, comprising at least one air ionizer and an electric transformer producing sufficient electrical high voltage for air ionization. The air ionizer is coupled to a sensor which detects the oxidizable gas content in the air (air pollution sensor). On the basis of the detected content of such oxidizable gases, the electrical energy which is guided to the air ionizer is transformed by an electrical control device in such a way that only low-level ionization occurs at low concentration of oxidizable gases. Said ionization is sensor-controlled and can automatically be increased to a maximum value when the concentration of oxidizable gases rises.

Abstract: In one corona charging arrangement described in the specification, a coronode supplied with AC voltage is contacted by an insulating member in the form of a mesh of insulating filaments or an imperforate dielectric insulating member or filaments wound around an insulating member and retaining the coronode in fixed position with respect to the insulating member. In another embodiment, the insulating member is a layer of dielectric material coated on a coronode in the form of a corona wire and a capacitor is connected between the AC voltage source and the coronode. By providing an insulating structure for a coronode and applying a DC biased AC voltage to the coronode, improved charging efficiency with respect to prior art arrangements is obtained while reducing generation of ozone and nitrates and increased charging currents are obtained to provide high charging rates without arcing.

Abstract: An image forming apparatus includes a constant-current power supply to supply operation currents to a charging unit and a removing unit, and keep the total of the operation currents at a predetermined value; and a correction circuit to detect a fluctuation in the operation current of the removing unit, and correct the predetermined value of the constant-current power supply circuit according to the detection results.

Abstract: A computer is disclosed having a power supply assembly that may be rotated into a first position for operating the computer, rotated into a second position for servicing components within the computer, or removed from the computer quickly and easily. The power supply assembly is mounted to a chassis via first and second pivot pins that define an axis of rotation and engage first and second bearing surfaces. The first pivot pin may be disengaged from the first bearing surface without removing a fastener. In one embodinent, the first pivot pin is disengaged from the first bearing surface by relative movement between the first pivot pin and the first bearing surface along the axis of rotation. In another embodiment, the first pivot pin is disengaged from the first bearing surface by passing it through a slot in the bearing surface orthogonal to the axis of rotation.

Abstract: The electrostatic chucking device 2 comprises an electrostatic chuck 4; a temperature detecting unit 10 for detecting the temperature of the electrostatic chuck 4; a power supply 9 connected to the electrostatic chuck 4 and used for impressing a DC voltage to the electrostatic chuck 4 to provide it with an attracting force; and a controller 11 for controlling the value of the DC voltage impressed by the power supply 9 according to the temperature of the electrostatic chuck detected by the temperature detecting unit 10.

Abstract: An image-forming apparatus is provided with: a rotatable photoreceptor; a charging device for charging the surface of the photoreceptor to a predetermined electric potential. A device for corona discharging, the charging device has a control electrode for controlling the quantity of corona ions that are allowed to reach the photoreceptor. A latent image forming device for forming an electrostatic latent image on the photoreceptor that has been charged by the charging device by use of light irradiation. There is a developing device for developing the electrostatic latent image by using a developer; and a control voltage supply device for supplying a control voltage to the control electrode and for switching the control voltage to a plurality of stages from a low-voltage side to a high-voltage side until the surface electric potential of the photoreceptor has risen to a predetermined electric potential.

Abstract: The total of the ion current leaving electrodes of one polarity and the ion current flowing to those electrodes, is measured as the current in the ground return path of the corresponding generator. For a brand-new ionizer, the value of that total ion current for electrodes of each polarity under normal operating conditions will substantially be the maximum ion current the positive and negative electrodes are capable of generating. The changes in the current in the ground return path reflect changes in the ionizing efficiency of the electrodes caused among other factors, by contamination. The values of the currents may be scaled up or down to the arbitrary unit. Using this scaling allows to have a signal that is normalized regardless of the length of the ionizer and number of the ionizing electrodes.

Abstract: Positive and negative ion output are balanced in an electrical ionizer having positive and negative ion emitters, and positive and negative high voltage power supplies associated with the respective positive and negative ion emitters. At least one of the positive and negative high voltage power supplies switches between a high state and a low state. An ion balance sensor is located close to the ion emitters and outputs a voltage value. An ion balance sensor set point voltage value is stored. The voltage value is set to provide a balanced ion condition in the work space near the electrical ionizer. During operation of the electrical ionizer, the output voltage value of the ion balance sensor is compared with the set point voltage value.

Abstract: An electrical apparatus includes a reaction chamber. A stream of contaminated gasses flows through the chamber. An elongated coronating electrode is positioned in the reaction chamber for producing a corona discharge within the chamber. A multi-stage Fitch generator connected to the electrode produces a high level, rapidly pulsating voltage in the electrode. Controlled amounts of an inert gas or inert gas-air mixture are combined with the contaminated gases to provide a high concentration of inert gas in the reaction chamber. In the inert gas-enriched atmosphere, the pulsating corona discharge produces a high concentration of metastable intermediates that greatly increase the rate of chemical conversion of the contaminants. Switching circuitry allows the pulsating voltage output of the Fitch generator to be superimposed on a constant direct current voltage in the electrode, setting up an electrostatic field in the reaction chamber for removing conversion byproducts from the gas stream.

Abstract: An AC corona charging arrangement includes a corona generating device connected through a capacitive connection to an AC voltage source and partially surrounded by a conductive shield connected to DC voltage source. In one embodiment the corona generating device is a wire having a diameter of about 50 microns and in another embodiment the corona generating device is a row of pins connected through corresponding capacitance to the AC voltage source. The presence of a capacitance between the AC voltage source and the corona generating device provides a curve representing the relationship between the current between the charging device and an adjacent conductive plate and the shield voltage which is concave downwardly, resulting in a high charging rate and greater uniformity of charging of a photoreceptor surface.

Abstract: It is an exemplified object of the present invention to provide a transfer-current control circuit that may reduce the smaller number of current control circuits and wires than the conventional while maintaining the controllable number of currents. The present invention divides the transfer output circuit into main and auxiliary controller modules. The main controller module has a configuration similar to the conventional transfer output circuit. The auxiliary controller module provides the same number of current control circuits as the number of input signal lines. The main controller module is connected to the auxiliary controller module in a wired-OR manner. A method of controlling the transfer-current control circuit based on first and second parameters forms part of the invention.

Abstract: A device for providing an RF signal burst to an external load includes a voltage-controlled oscillator to generate a drive signal having a frequency f.sub.VCO fixed by an oscillator control signal. An RF driver stage coupled to the external load receives the drive signal and generates an RF signal burst in response to the drive signal. A current transformer coupled between the RF driver stage and the external load senses the current in the RF driver stage and generates a reference current having the same phase as the sensed current. A phase detector receives the reference current along with the drive signal and generates a phase detection signal that provides a measure of the phase of the current in the RF driver stage with respect to the drive signal. The phase detection signal can be used to adjust the oscillator control signal to drive the oscillator frequency to a desired value.

Abstract: An electro-kinetic electro-static air conditioner includes a self-contained ion generator that provides electro-kinetically moved air with ions and safe amounts of ozone. The conditioner may be sized to condition air in a closet, or may include an illumination source and be sized to be attached to an AC wall outlet to provide a night light function as well as a conditioning function. The ion generator includes a high voltage pulse generator whose output pulses are coupled between first and second electrode arrays. Preferably the first array comprises one or more pin-like electrodes and the second array comprises one or more washer-like electrodes. Preferably a ratio between effective area of an electrode in the second array compared to effective area of an electrode in the first array exceeds about 15:1 and preferably is about 20:1. An electric field produced by the high voltage pulses between the arrays produces an electrostatic flow of ionized air containing safe amounts of ozone.

Abstract: An electrostatic actuator and a method for actuating a micro-machine structure. The micro-machine structure has a stationary part and a movable part that is relatively movable between a rest position and an activated position and is resiliently connected to the stationary part. The stationary part and the movable part form a flexible sub-structure having a resonant frequency. The actuator comprises a first electrode disposed on the stationary part and a second electrode disposed on the movable part. The actuator also includes a wave generator, connected to the first electrode and the second electrode, for generating an alternating voltage signal to the first electrode and a reference voltage signal to the second electrode so as to impart an electrostatic force between the stationary and movable parts and to move the movable part from the rest position to the activated position. The electrostatic force for fixed amplitude wave has a constant force component and a vibratory force component.

Abstract: A particularly configured aperiodic grid for a grid-controlled AC corona charger for uniformly charging a dielectric member, of an electrostatographic reproduction apparatus, moving along a travel path in operative relation to the corona charger. The corona charger includes an insulating housing and an electrically biased grid, in which the grid transparency is larger than a nominal transparency at the upstream edge of the charger grid, transparency is nominal at the center of the grid, and transparency is smaller than nominal at the downstream edge of a charger grid. The invention, which has been demonstrated for negative primary charging, preferably uses a trapezoidal AC waveform having a DC offset for corona excitation, and may be practiced over a large range of process speeds. The invention is also practiced using trapezoidal waveforms having negative duty cycles in the range 50% (conventional AC) to 90% (negative DC).

Abstract: The total of the ion current leaving electrodes of one polarity and the ion current flowing to those electrodes, is measured as the current in the ground return path of the corresponding generator. For a brand-new ionizer, the value of that total ion current for electrodes of each polarity under normal operating conditions will substantially be the maximum ion current the positive and negative electrodes are capable of generating. The changes in the current in the ground return path reflect changes in the ionizing efficiency of the electrodes caused among other factors, by contamination. The values of the currents may be scaled up or down to the arbitrary unit. Using this scaling allows to have a signal that is normalized regardless of the length of the ionizer and number of the ionizing electrodes.

Abstract: An air ionizing apparatus that produces both positive and negative ions has a housing with air inlet and outlet passages, a plurality of spaced apart air ionizing electrodes and a high voltage supply which applies positive and negative voltages to separate electrodes. A fan creates an airflow that carries the ions out of the housing, the fan preferably being between the electrodes and the outlet passages to promote intermixing of positive and negative ions.

Abstract: This invention is a remote charging system for use with an electrical storage device mounted in an electric or electric/hybrid vehicle. The system includes a power transmission unit capable of transmitting electrical energy to the electrical storage device via a wireless energy beam. The vehicle includes an antenna capable of receiving the wireless energy beam and transferring the electrical energy to the storage device. The vehicle further includes a translocator for transmitting a coded signal to the power transmission unit corresponding to the location of the vehicle and thereby activating the power transmission unit. The power transmission unit receives and locks onto the coded signal and thereby tracks the vehicle during the charging operation. The translocator signal is transmitted until the electrical storage unit reaches a predetermined level of charge.

Abstract: Method and apparatus for restoring a support surface of a substrate support to a pre-process condition. The method comprises the steps of providing a surrogate substrate on the degraded support surface, providing the surrogate substrate with a ground connection and establishing an electric field between the support surface and the surrogate substrate to remove accumulated charges in the support surface. The apparatus comprises a process chamber having a surrogate substrate on a the support surface and connected to ground. The surrogate substrate is a semiconductor wafer or a plate or sheet of metallic material. The ground connection is established by striking a plasma that contacts the surrogate substrate and an electrical ground reference. The electric field established between the support surface and the surrogate substrate "pushes" any accumulated charges out of the support surface. Removal of the accumulated charges improves and extends the chucking ability of the support surface.

Abstract: An apparatus for ionizing air to remove particulate matter. The apparatus including an ionizer and a bracket for mounting the ionizer and a bracket for mounting the ionizer in a duct or enclosure. The ionizer includes a series of electrodes which span a portion of the duct. The electrodes are energized by a high voltage circuit and an ionic wind is created between the electrode and duct. The ionic wind sweeps particles in the air to the duct which provides a collector electrode. In another embodiment, a ring collector electrode is also provided for spanning the inner portion of the duct. The high voltage circuit includes a DC power supply, a high voltage transformer, a high voltage multiplier stage and a push-pull switching circuit. The DC power supply receives AC power and generates a DC output which is coupled to the primary of the transformer. The push-pull switching circuit produces a controlled and efficient AC output in the transformer by alternately switching the primary winding.

Abstract: A miniature air purifier produces a corona discharge surrounding a needle-like emitter point connected to a negative DC power supply. The power supply operates from a nine volt battery and contains a step-up voltage inverter having a single transformer outputting high voltage spikes with a voltage multiplier operating on the output of the inverter. The production of high voltage spikes of about 200 Hz rather than a sinusoidally varying voltage significantly reduces current consumption. The needle-like emitter point is located about 1/4-inch from an 80% open mesh metallic grid held at ground potential. Corona discharge at the emitter point ionizes the air and creates ozone, and nitric oxide both of which combine with direct electron impact decomposition to detoxify and destroy a wide variety of airborne pollutants including pathogens, chemicals and allergens.

Abstract: A field emission cold cathode device is driven to make an emission current constant without limiting the available choice of materials for a gate electrode. A positive voltage with reference to OV is applied from a gate power supply to gate electrode of the field emission cold cathode device to enable emitter disposed respectively near the gate electrode to emit electrons. After the positive voltage with reference to OV is applied, a negative voltage with reference to OV is applied from the gate power supply to the gate electrode at a predetermined time.

Abstract: An electrostatic chuck (20) for holding a substrate (45) is described. One version of the chuck (20) suitable for mounting on a base (25), comprises (i) an electrostatic member (33) having an electrode (50) therein, and (ii) an electrical lead (60) extending through the base (25) to electrically engage the electrode (50) of the electrostatic member (33). When the chuck (20) is used to hold a substrate (45) in a process chamber (80) containing erosive process gas, the substrate (45) covers and substantially protects the electrical lead (60) from erosion by the erosive process gas. In a preferred version of the chuck (20), an electrical connector (55) forming an integral extension of the electrode (50), electrically connects the electrode (50) to a voltage supply terminal (70) used to operate the chuck (20).

Abstract: A high voltage generator is provided for use in applications where current demand is low but a high voltage is required. The generator comprises an array of photosensitive elements, such as an array of photovoltaic elements produced by laser scribing or etching of a wafer of material conventionally used for solar cells, the number of elements employed and their interconnection being such that a high voltage output of at least 1 kV is obtained.

Abstract: This invention is a remote charging system for use with an electrical storage device mounted in an electric or electric/hybrid vehicle. The system includes a power transmission unit capable of transmitting electrical energy to the electrical storage device via a wireless energy beam. The vehicle includes an antenna capable of receiving the wireless energy beam and transferring the electrical energy to the storage device. The vehicle further includes a translocator for transmitting a coded signal to the power transmission unit corresponding to the location of the vehicle and thereby activating the power transmission unit. The power transmission unit receives and locks onto the coded signal and thereby tracks the vehicle during the charging operation. The translocator signal is transmitted until the electrical storage unit reaches a predetermined level of charge.

Abstract: A negative ion generator is provide with a plurality of needle assemblies, each of which has a distinct needle end point. The generator includes a drive circuit for providing high voltages to the needle end points and a selection circuit by which the amount of and/or the frequency at which the ions are produced. The needle assemblies are replaceable by the user by way of plug and socket style connections. An indicating means is provided for indicating to the user of the generator the condition of the needle assemblies and when the needles should be replaced. The drive circuit can include a safety current route in the event of an earth fault.

Abstract: An apparatus for use in electrostatically applying coating material to an object includes a nozzle which directs a flow of coating material toward the object. A power supply unit provides an electric field to electrostatically charge the coating material. Control circuitry is provided to monitor the operating efficiency of the power supply unit and to provide an output signal when there is an impending failure of the power supply unit. The control circuitry monitors the relationship between an input current to the power supply unit and an output current from the power supply unit. When the relationship between the input current to the power supply unit and the output current from the power supply unit is outside of a predetermined range, the control circuitry is effective to provide an output signal to notify an operator that there is an impending power supply unit failure.

Abstract: A control circuit configured to control a reference voltage of a reference node of an electrostatic chuck power supply is disclosed. The electrostatic chuck power supply is configured to clamp a substrate to a bipolar electrostatic chuck. The electrostatic chuck has a first buried conductor and a second buried conductor. The electrostatic chuck power supply has a first output configured for being coupled with the first buried plate. The first output has a first output voltage referenced to the reference voltage of the reference node. The electrostatic chuck power supply also has a second output configured for being coupled with the second buried plate. The first output has a first output voltage referenced to the reference voltage of the reference node.

Abstract: Ionizing method and apparatus includes a pair of inverters to supply ionizing voltages to ionizing electrodes only during alternate halves of a duty cycle in which one inverter is actuated to operate at high oscillating frequency while the other inverter is inactive, and thereafter in an alternate half of the duty cycle in which the one inverter is inactive and the other inverter is actuated to operate at high oscillating frequency. Each inverter includes a return current path that combines in a common return path in which return currents may be monitored for selective control of one or both of the inverters. Small step-up transformers and other components operating at high oscillation frequency promote confined packaging of high voltage generators for convenient mounting adjacent a pair of ionizing electrodes to reduce lengths of heavily-insulated high-voltage cables between generators and electrodes.

Abstract: A lift pin 95 for dechucking a substrate 15 held to a chuck 50 by residual electrostatic charge, the substrate being processed in a plasma formed using RF currents, is described. The lift pin 95 comprises (a) a movable elongated member 110 having a tip 115 suitable for lifting and lowering the substrate 15 off the chuck 50, and capable of forming an electrically conductive path between the substrate 15 and a current sink 105. The electrically conductive path comprises at least one of the following: (1) a frequency selective filter capable of filtering RF currents flowing therethrough so that substantially no RF currents flow through the filter; or (2) a resistor having a resistance sufficiently elevated to reduce the voltage caused by RF currents flowing therethrough, by at least about 50%.

Abstract: A method and apparatus for securely clamping a substrate to an electrostatic chuck during processing of a substrate. The method generally includes the steps of forming an initial electrostatic clamping force between the electrostatic chuck and the substrate, modifying the initial electrostatic clamping force when an rf voltage is applied to the electrostatic chuck during processing, and restoring the initial electrostatic clamping force with an offset voltage applied to the electrostatic chuck. The present invention also includes an electrostatic chuck having at least one electrode and a dielectric on the surface of the electrode for supporting a substrate. A voltage source is coupled to the electrode for electrostatically clamping the substrate to the surface of the electrostatic chuck with an initial electrostatic force. An rf source is coupled to the electrode for applying rf voltage to the electrostatic chuck and causing a change in the initial electrostatic force.

Abstract: A ceramic electrostatic chucking device having electrostatic clamping electrodes suitable for clamping wafers and flat panel displays. The chucking device includes a top insulating layer, the clamping electrode, a second insulating layer, a first metallization layer for distributing power to one of the clamping electrodes, a third insulating layer, a second metallization layer for distributing power to the other clamping electrode, a fourth insulation layer, inner and outer heater electrodes, a fifth insulating layer, a third metallization layer for distributing power to the heater electrodes, and at least one additional insulating layer. The insulating layers include groups of electrically conductive feedthroughs for interconnecting the electrodes and metallization layers.

Abstract: Method and apparatus are provided for determining a warpage of a wafer (14) for providing a minimum clamping voltage to an electrostatic chuck (ESC) when the wafer is subsequently processed thereon. The apparatus includes an electrostatic chuck (12, 120) and a control arrangement (16, 18, 20). The electrostatic chuck includes a clamping surface (13, 130) for clamping a wafer thereto by a clamping force that is dependent on a clamping voltage applied to the electrostatic chuck. The control arrangement is used to detect an inherent warpage in the wafer prior to a processing of that wafer, and determine a minimum clamping voltage from the measured warpage that is to be applied to the electrostatic chuck during a subsequent processing of the wafer. The minimum clamping voltage has a value for each wafer that securely clamps the wafer to the clamping surface and avoids excessive warpage and backside abrasion of the wafer.

Abstract: A dielectric workpiece is clamped to a holder in a vacuum plasma processor chamber by applying the plasma to a surface of the workpiece exposed to the plasma simultaneously with applying a relatively high voltage to an electrode on the holder. The electrode is in close proximity to a portion of the workpiece not exposed to the plasma so (1) the electrode is at a voltage substantially different from the plasma, (2) electrostatic charge is applied to the exposed surface by the plasma, and (3) an electrical conducting path is provided via the plasma from the electrostatic charge to a terminal at a potential substantially different from the voltage applied to the electrode. Sufficient electrostatic clamping force is applied through the thickness of the workpiece by a voltage difference between the DC voltage applied to a single electrode and charge applied by the plasma to the exposed face to hold the substrate on the holder.

Abstract: A corona charger for depositing an electrostatic charge on a charge retentive surface, without the creation of sheeting defects, the charger includes a coronode, and a power supply operating in cycles and providing in each of the cycles electrical power to the coronode to produce a net positive charging current with voltage to the coronode from the power supply operating in a portion of each cycle with a positive polarity to generate positive corona emissions. The power supply operates so that an AC component of the voltage provided by the power supply has a positive polarity in the range of about 60% to about 85% of each cycle. When operating in a broader range of greater than 50% but less than 100%, DC equivalent current to the coronode is controlled below a value causing sheeting.

Abstract: A bipolar electrostatic chuck system having a bipolar electrostatic chuck for securely holding a wafer on the surface of the bipolar electrostatic chuck. The bipolar electrostatic chuck system includes a negative-offset power supply for providing a positive potential level and a negative potential level. The positive potential level is positively biased relative to a common reference voltage level by a first magnitude while the negative potential level is negatively biased relative to the same common reference voltage level by a second magnitude, which is larger than the first magnitude. Further, the bipolar electrostatic chuck includes a positive pole, which is coupled to the negative-offset power supply for biasing the positive pole at the positive potential level when the negative-offset power supply is turned on.

Abstract: A method of providing unbalanced voltages to a bipolar electrostatic chuck of a substrate processing chamber. The method includes providing a variable balanced voltage power supply, which is configured for producing, responsive to a control signal, balanced differential output voltages on a first and second terminals of the variable balanced voltage power supply. The method further includes coupling the first terminal of the variable balanced voltage power supply to a first node. The first node is coupled to a first resistive element of a resistor bridge. The method also includes coupling the second terminal of the variable balanced voltage power supply to a second node. The second node is coupled to a second resistive element of the resistor bridge. The first resistive element is lower in resistance value than the second resistive element.

Abstract: A miniature air purifier produces a corona discharge surrounding a needle-like emitter point connected to a negative DC power supply. The power supply operates from a nine volt battery and contains a step-up voltage inverter having a single transformer outputting high voltage spikes with a voltage multiplier operating on the output of the inverter. The production of high voltage spikes of about 200 Hz rather than a sinusoidally varying voltage significantly reduces current consumption. The needle-like emitter point is located about 1/4-inch from an 80% open mesh metallic grid held at ground potential. Corona discharge at the emitter point ionizes the air and creates ozone, and nitric oxide both of which combine with direct electron impact decomposition to detoxify and destroy a wide variety of airborne pollutants including pathogens, chemicals and allergens.

Abstract: An electrostatic chuck system having an electrostatic chuck for securely holding a wafer on a surface of the electrostatic chuck. The electrostatic chuck system comprises a wafer bias sensor coupled to a first portion of the electrostatic chuck for sensing an alternating current signal at the first portion. The wafer bias sensor outputs, responsive to the alternating current signal, a direct current voltage level representative of a direct current bias level of the wafer. The electrostatic chuck system further comprises a variable electrostatic chuck power supply coupled to the wafer bias sensor. The variable electrostatic chuck power supply provides a first potential level to the first portion of the electrostatic chuck.

Abstract: An electrostatic chuck (20) for holding a substrate (45) in a process chamber (80) having a voltage supply terminal (65) for charging the chuck (20). The chuck includes an electrostatic member (25) comprising at least one electrode (30), an electrically insulated holding surface (40) for holding a substrate (45) thereon, and an electrical contact surface (48) for providing charge to the electrode. A unidirectionally conducting coupler layer (70) electrically couples the contact surface (48) of the electrostatic member to the voltage supply terminal to conduct charge substantially only in a single direction from the terminal to the contact surface. Preferably, an electrical connector (50) having a junction surface (55) bonded to the contact surface (55) of the electrode, and a terminal surface (60) for electrically contacting the voltage supply terminal (65), is used to electrically couple the unidirectionally conducting coupler layer (70) to the voltage supply terminal (65).

Abstract: An electronic projectile (10) for use with a standard cartridge (1). Projectile (10) and cartridge (1) are loaded into standard firearms and fired like a standard bullet. After leaving the barrel of a firearm, plastic sheaths (8L) and (8R) fall away and electrodes (19L) and (19R) extend outward on wires (40L) and (40R). On impact the electrodes penetrate the skin of the target making electrical contact with internal tissue of a target. Within projectile (10) a battery (50) powers internal electronics (30) to charge output capacitors (22) and (24) to high voltage. When the capacitors are fully charged a switch (58) completes the circuit and discharges the capacitors through the target. Switch (58) discharges the capacitors 20 to 100 times per second. These pulses continue for several seconds to incapacitate the target. The polarity of the current is changes once or twice per second to alternate between acidic and basic ions being formed around the electrodes to sterilize the puncture sight.