Abstract: The invention relates to an air variable capacitor including a mobile comb and a fixed comb. Each of the combs include a body and teeth each having an end fixed to the body and free end. The teeth of the mobile and fixed combs being interdigital and an the air-gap of the capacitor is adjustable by the transverse movement of the teeth of the mobile comb. The teeth of the mobile comb have geometric differences between one another, in order to attenuate the transverse resonance modes of the mobile comb.

Abstract: A variable capacitor includes: a dielectric sheet disposed on a substrate and covering an electrode pattern on the substrate; a resilient conductive supporting seat mounted on the dielectric sheet for supporting an insulating operating cap on a central portion thereof; a conductive cover body covering the conductive supporting seat and permitting the operating cap to extend outward; and a biasing member for biasing the central portion of the conductive supporting seat to move away from the substrate. The cover body is connected electrically to the conductive supporting seat and a conductive contact on the substrate. When the operating cap is depressed, the operating cap forces a contact portion of the conductive supporting seat to deform such that a surface area of the deformed contact portion that contacts the dielectric sheet is increased, thereby changing the capacitance between the conductive supporting seat and the electrode pattern.

Abstract: A MEMS device and method of making same is disclosed. In one embodiment, a micro-switch includes a base assembly comprising a movable structure bearing a contact pad. The base assembly is wafer-scale bonded to a lid assembly comprising an activator and a signal path. The movable structure moves within a sealed cavity formed during the bonding process. The signal path includes an input line and an output line separated by a gap, which prevents signals from propagating through the micro-switch when the switch is deactivated. In operation, a signal is launched into the signal path. When the micro-switch is activated, a force is established by the actuator, which pulls a portion of the movable structure upwards towards the gap in the signal path, until the contact pad bridges the gap between the input line and output line, allowing the signal to propagate through the micro-switch.

Abstract: A sensor includes a first printed wiring board having a first electrode made of a metal film, a second printed wiring board facing the first printed wiring board and having a second electrode made of a metal film, the second electrode being positioned on the second printed wiring board such that the second electrode faces the first electrode of the first printed wiring board, and a dielectric body spacing the first electrode and the second electrode apart such that the first electrode, the second electrode and the dielectric body form a capacitor.

Abstract: A mechanical drive system for a vacuum capacitor is provided and includes a drive screw and a nut, wherein the nut is arranged in a housing of the vacuum capacitor, wherein the drive screw is screwed through the nut, wherein a first electrode is arranged on one side of the drive screw, wherein, by a rotation of the drive screw, the first electrode is movable relative to a second electrode, and wherein the nut is at least partially manufactured out of a plastic material.

Abstract: A micro electro mechanical system device has a first subassembly having sensor element including a coupler, and a second subassembly including a comb drive. The comb drive having stator plates and rotor plates and the coupler configured to displace the rotor plates relative to the stator plates providing a variable capacitance dependent on the displacement of the rotor plate.

Abstract: The present invention provides a capacitive RF-MEMS device comprising a vertically integrated decoupling capacitor (14). The decoupling capacitor (14) therefore does not take extra area. Furthermore, the RF-MEMS according to the invention needs less interconnects, which also saves space and which reduces the series inductance/resistance in the RF path.

Abstract: A variable capacitance element provided with a substrate, a signal line provided on the substrate, a fixed electrode provided on the substrate, and a movable electrode. The movable electrode includes a movable portion that spans the signal line and extends to above the fixed electrode, and is movable with respect to the fixed electrode, and a fixed portion that is fixed to the fixed electrode across a dielectric layer.

Abstract: A capacitive device is provided. The capacitive device includes a first electrode and a second electrode below the first electrode and spaced apart from the first electrode, wherein at least one of the first electrode and the second electrode includes a plurality of conductive step sections, the plurality of conductive step sections having different heights. The capacitive device also includes an insulating region between the first electrode and the second electrode; and at least one slot formed on one of the first electrode and the second electrode.

Abstract: A MEMS variable capacitor includes: a first connection beam having one end fixed to a substrate; a first actuation beam connected to the first connection beam; a second actuation beam connected to the first actuation beam and extending in a reverse direction; a second connection beam having one end fixed to the substrate; a third actuation beam connected to the second connection beam; a fourth actuation beam connected to the third actuation beam and extending in a reverse direction; a movable electrode provided between the second and fourth actuation beams; and a fixed electrode provided on the substrate opposed to the movable electrode. The first to fourth actuation beams have a piezoelectric film sandwiched between a lower electrode and an upper electrode, the first and third actuation beams are placed on a line, the second and fourth actuation beams are placed on a line, and the first and second actuation beams and the third and fourth actuation beams are placed symmetrically about a line.

Abstract: An electronic component includes an electronic component main body including opposed first and second main surfaces, opposed first and second side surfaces, and opposed first and second end surfaces and also includes first and second external terminal electrodes disposed on the first main surface. The first and second external terminal electrodes are spaced apart by a gap region. When a dimension in a longitudinal direction being a direction linking the first and second end surfaces of the electronic component main body is L, a dimension in a width direction being a direction linking the first and second side surfaces is W, and a dimension of the gap region along the longitudinal direction is g, W<L?g<2W and L?g+W?{2(L?g)W}1/2>(L?g)/2 are satisfied.

Abstract: A capacitive switch for microelectromechanical systems (MEMS) comprises a topmost metal plate which extends across a bridge structure formed by a polymer layer. The polymer layer comprises poly-monochoro-para-xylene (parylene-C). The space below the polymer layer contains the second plate on a substrate. Using parylene as the primary bridge material makes the bridge of the MEMS device very flexible and requires a relatively low actuation voltage to pull the bridge down and lower power is required to control the MEMS device.

Abstract: A method of manufacturing capacitive elements for a capacitive device which comprises one or more layers is provided. At least one layer is etched from a first surface to a second surface thereof to form two sections of the layer, such that the sections are movable relative to one another, and such that a wall extending from the first surface to the second surface is formed on each of the two sections, the walls defining a gap therebetween. An etching step forms multiple recesses in each wall such that multiple capacitive elements are defined between adjacent recesses, the capacitive elements of one wall being offset from those of the other wall when the sections are stationary with respect to one another. A corresponding capacitive device is also provided.

Abstract: A process for connecting two bodies forming parts of an electromechanical, fluid and optical microsystem, wherein a welding region is formed on a first body; an electrically conductive region and a spacing region are formed on a second body; the spacing region extends near the electrically conductive region and has a height smaller than the electrically conductive region. One of the first and second bodies is turned upside down on the other, and the two bodies are welded together by causing the electrically conductive region to melt so that it adheres to the welding region and collapses until its height becomes equal to that of the spacing region. Thereby it is possible to seal active parts or micromechanical structures with respect to the outside world, self-align the two bodies during bonding, obtain an electrical connection between the two bodies, and optically align two optical structures formed on the two bodies.

Abstract: A tunable capacitor using an electrowetting phenomenon includes a first electrode; a second electrode which is spaced apart from the first electrode and faces the first electrode; a fluidic channel which is disposed between the first electrode and the second electrode; a first insulating layer which is disposed between the first electrode and the fluidic channel; and a conductive fluid which is disposed in the fluidic channel and moves along the fluidic channel when a direct current (DC) potential difference occurs between the first and second electrodes. Accordingly, it is possible to fabricate the tunable capacitor with the simplified fabrication process, good reliability and durability, and no restriction on the tuning range.

Abstract: An array variable capacitor apparatus includes a line unit including a ground line and a signal line which operates as a lower electrode; and a plurality of plates which are engaged with the line unit to generate capacitance and which operate as upper electrodes, the plurality of plates being arranged in an array pattern and having different degrees of stiffness.

Abstract: A micro-electromechanical device has a substrate (60), a movable element (15), a pair of electrodes (40) arranged on the substrate and on the movable element to move the movable element, and a controller (50) to supply the electrodes. To move the movable element to an intermediate position one or more pulses are applied during the movement, timed to compensate for under or over damping of the movement. This can reduce a settling delay. It can be applied to tunable RF capacitors. To control a decrease in the gap, a single pulse of a maximum supply level compensates for the inherent slowness of the device and over damping. To compensate for under damping, the pulses have a period corresponding to a resonant frequency, and comprise peaks and troughs above and below the final supply level, such that successive ones of the peaks and troughs are closer to the given supply level.

Abstract: A capacitance arrangement comprising at least one parallel-plate capacitor comprising a first electrode means, a dielectric layer and a second electrode means partly overlapping each other. A misalignment limit is given. Said first electrode means comprises a first and a second electrode arranged symmetrically with respect to a longitudinal axis, said first and second electrodes have a respective first edge, which face each other, are linear and parallel such that a gap is defined there between. Said second electrode means comprises a third electrode with a first section and a second section disposed on opposite sides of said gap interconnected by means of an intermediate section, which is delimited by a function depending on a first parameter and a second parameter. One of said two parameters is adapted to be selected hence allowing calculation of the other parameter to determine the shape and size of the second electrode means.

Abstract: A variable capacitor is provided which is appropriate for suppressing fluctuation in driving voltage characteristic and for achieving a larger variation ratio of static capacitance. The variable capacitor includes a fixed electrode and a movable electrode. The fixed electrode includes a first opposing face, while the movable electrode includes a second opposing face that faces the first opposing face. The movable electrode further includes a curved portion that protrudes toward the fixed electrode. The variable capacitor also includes a dielectric pattern provided on the first opposing face.

Abstract: A device for generating a voltage comprises first and second plates spaced apart from each other, for being charged at respective different potentials. A third plate is placed at a first distance from the first plate so as to form a first capacitor, and a first semiconductor element is connected between the third plate and the second plate. This voltage generating device produces an output voltage having an amplitude that is dependent upon the first distance and taken between the third and second plates.

Abstract: Provided is a variable capacitance element comprising a plurality of single capacitance elements that each include (i) a fixed electrode provided on a surface of a substrate, (ii) a floating electrode provided to be separate from the fixed electrode and facing the fixed electrode, and (iii) an actuator that moves the floating electrode closer to or farther from the fixed electrode; and a floating electrode driving section that supplies the actuators with drive power to move the floating electrodes, such that a combined capacitance of the plurality of single capacitance elements becomes a prescribed capacitance.

Abstract: A variable capacitance device has a piezoelectric driving part, a movable electrode, a fixed electrode, a dielectric film and a driving control unit. The piezoelectric driving part has a piezoelectric film, an upper electrode disposed on a top surface of the piezoelectric film, a lower electrode disposed on an undersurface of the piezoelectric film and electrode slits which separate the upper electrode and the lower electrode into two, respectively. The movable electrode is provided via the electrode slits at one end of the piezoelectric driving part. The fixed electrode is disposed opposite to the movable electrode via a gap. The dielectric film is disposed opposite to the movable electrode via the gap and provided on the fixed electrode. The driving control unit adjusts a distance between the movable electrode and the fixed electrode to reduce a fluctuation of a predetermined capacitance of a variable capacitor formed between the variable electrode and the fixed electrode.

Abstract: An embodiment of the present invention provides a device, comprising a multilayered tunable dielectric capacitor, wherein said multilayers of tunable dielectric are adapted to be DC biased to reduce the dielectric constant; and wherein the DC bias is arranged so that the number of layers of tunable dielectric biased positively is equal to the number of layers of tunable dielectric biased negatively.

Abstract: The invention concerns a method for adjusting the operating gap of two mechanical elements of a substantially planar mechanical structure obtained by micro-etching. The method consists in attributing (A) to one of the elements (E) a fixed reference position (RF) in the direction of the residual gap separating said elements; connecting (C) the other element (OE) to the fixed reference position (RF) by an elastic link (S) and installing (D) between the fixed reference position (RF) and the other element (OE) at least a stop block defining an abutting gap, maximum displacement amplitude of the other element; subjecting (DE) the other element (OE) to a displacement antagonistic to the elastic link (S) up to the abutting position constituting the operating position, the residual gap being reduced to the difference between residual gap and abutting gap and less than the resolution of the micro-etching process. The invention is applicable to electromechanical resonators.

Abstract: A micromechanical device and system utilizing a supplemental reset pulse to ensure deflectable members deflect to the desired position. After loading data into a micromechanical device, a reset pulse is used to position the deflectable member to a position indicated by the data. A supplemental reset pulse is then applied to ensure the deflectable member is driven to the position indicated by the data. The method and system are also used to ensure the deflectable members are driven to a neutral position.

Abstract: A variable capacitor including a first electrode part, which is provided at a fixed part that includes a substrate, and a movable part, which has a second electrode part forming the capacity of said variable capacitor between itself and the first electrode part, and the movable part is displaced in response to a first drive signal to selectively go into an opposing status, in which the second electrode part opposes the first electrode part, and a non-opposing status, in which the second electrode part essentially does not oppose the first electrode part. This variable capacitor is able to obtain at least a two-value capacity in which the mutual ratio is large without specially requiring another capacitor or a switch, and it is able to obtain the desired capacity variation range by combining a plurality of capacitors.

Abstract: A variable capacity element has a substrate, a pair of capacitor electrodes, a pair of driver electrodes, and a pair of capacitor wirings why one of the capacitor electrodes is movable by applying a voltage between the driver electrodes. A pair of driver electrodes are connected to the pair of capacitor electrodes, being insulated from the capacitor electrodes. A pair of capacitor wiring extend in parallel each other from connecting portions with the pairs of the capacitor electrodes, being electrically connected with the capacitor electrodes.

Abstract: A capacitive transducer of multi-layer construction includes two rotor plates supported by flexible springs, the plates being spaced apart and rigidly connected by a stem. One rotor plate my be used as either a pickup electrode or a grounded target electrode for determining position, displacement, or load force. The second rotor plate may be used for electrostatic actuation without interfering with or destroying circuitry associated with the first rotor plate. A number of improvements are disclosed including a hollow rotor plate structure for reduced moving mass, buckling resistant features for the springs, improved spring anchor joint design for reduced creep and hysteresis, and material selection and matching for reduced thermal sensitivity.

Abstract: A capacitive type touch panel includes: a transparent substrate; an array of first conductors formed on a surface of the transparent substrate; an array of second conductors formed on the surface of the transparent substrate; a plurality of conductive first bridging lines, each of which interconnects two adjacent ones of the first conductors; a plurality of conductive second bridging lines, each of which interconnects two adjacent ones of the second conductors and each of which intersects insulatively a respective one of the first bridging lines; and a plurality of spaced apart insulators, each of which is disposed at an intersection of a respective one of the first bridging lines and a respective one of the second bridging lines to separate the respective first and second bridging lines.

Abstract: An electrical component capable of performing hot switching at low power consumption is disclosed. The electrical component has a first electrical component and a second electrical component connected in parallel to the first electrical component. The first electrical component includes a first electrode and a second electrode facing the first electrode with a space in between, the second electrode is moved by a first actuator portion. The second electrical component includes a third electrode and a fourth electrode facing the third electrode with a space in between, the fourth electrode is moved by a second actuator portion having a stiffness higher than a stiffness of the first actuator portion, the second electrical component has an impedance becoming higher or lower than an impedance of the first electrical component depending on a moving state of the fourth electrode.

Abstract: In an embodiment of the present invention is provided a varactor comprising a substrate, a bottom electrode positioned on a surface of the substrate, a tunable dielectric material positioned adjacent to and extending over the bottom electrode forming a step and in contact with a top electrode, and an interconnect layer in contact with the bottom electrode, the tunable dielectric and the top electrode.

Abstract: A method is for fabricating an integrated circuit formed from a substrate and including several metallic interconnection levels in which, in a same plane parallel to the main plane of the substrate, is a plurality of thick horizontal metallic interconnection lines, as well as one or several MIM capacitors fitted with metallic electrodes that are orthogonal to the main plane of the substrate.

Abstract: A micro fluidic device and method for capacitive sensing. The device includes a fluid channel including an inlet at a first end and an outlet at a second end, a cavity region coupled to the fluid channel, and a polymer based membrane coupled between the fluid channel and the cavity region. Additionally, the device includes a first capacitor electrode coupled to the membrane, a second capacitor electrode coupled to the cavity region and physically separated from the first capacitor electrode by at least the cavity region, and an electrical power source coupled between the first capacitor electrode and the second capacitor electrode and causing an electric field at least within the cavity region. The polymer based membrane includes a polymer.

Abstract: A MEMS capacitive device (90) includes a fixed capacitor plate (104) formed on a surface (102) of a substrate (100). A movable capacitor plate (114) is suspended above the fixed capacitor plate (104) by compliant members (116) anchored to the surface (102). A movable element (120) is positioned in spaced apart relationship from the movable capacitor plate (104) and has an actuator (130) formed thereon. Actuation of the actuator (130) causes abutment of a portion of the movable element (120) against a contact surface (136) of the movable plate (114). The abutment moves the movable plate (114) toward the fixed plate (104) to alter a capacitance (112) between the plates (104, 114). Another substrate (118) may be coupled to the substrate (100) such that a surface (126) of the substrate (118) faces the surface (102) of the substrate (100). The movable element (120) may be formed on the surface (126).

Abstract: One inventive aspect relates a variable capacitor comprising first and second electrically conductive electrodes, arranged above a support structure and spaced apart from each other and defining the capacitance of the capacitor. At least one of the electrodes comprises at least one bendable portion. The bendable portion(s) are actuated by a DC voltage difference which is applied over the electrodes to vary the capacitance. In preferred embodiments, the support structure comprises a layer of higher permittivity than the atmosphere surrounding the electrodes and the electrodes configure as an interdigitated structure upon actuation. Also disclosed is a 2-mask process for producing such capacitors.

Abstract: A capacitive device including at least one actuator structure formed on a substrate is provided. The capacitive device further includes a moveable structure formed on the substrate and mechanically coupled to the at least one actuator structure. The moveable structure includes a moveable capacitive plate and a bridge, formed substantially planar to the moveable capacitive plate. The bridge is used to mechanically and electrically couple the moveable capacitive plate to a signal line formed on the substrate such that the moveable capacitive plate moves up or down based on a force generated by the at least one actuator structure.

Abstract: A first electrode is formed on a semiconductor substrate. A second electrode is formed separately at a predetermined interval from the first electrode, and has at least one opening. An actuator layer is connected to the second electrode, and drives the second electrode.

Abstract: A capacitor manufacturing method provides variable capacitors whose capacitances remain stable under the influence of temperature change. Such a variable capacitor includes a fixed electrode, a movable electrode film facing the fixed electrode, and an anchor portion that provides partial connection between the fixed electrode and the movable electrode film. For making this variable capacitor, a first electrode is formed to serve as the fixed electrode. Then, an anchor portion is formed on the fixed electrode, and a sacrifice film is formed to cover the fixed electrode but partially expose the anchor portion. A second electrode is formed on the sacrifice film to serve as the movable electrode film, bonded to the anchor portion. Finally, the sacrifice film is removed.

Abstract: A method and resulting device for reducing an electrical field at an isolation gap in a capacitive actuator includes providing a bottom electrode layer and forming a pattern in the bottom electrode layer having an isolation gap between center and outer electrode components of the patterned electrode. A spacing material is deposited in the isolation gap, the spacing material having a greater height than a remainder of the patterned electrode, and a sacrificial material is deposited conformably on a surface of the patterned electrode and spacing material. The method also includes applying a deformable electrode to a surface of the sacrificial material, whereby removal of the sacrificial and spacing materials results in a greater spacing between the deformable electrode and the electrode layer at a region of the isolation gap than over a remainder of the spacing between the patterned electrode layer and deformable surface.

Abstract: A two-axis geomagnetic sensor is disclosed. The two-axis geomagnetic sensor includes a first geomagnetic sensor part including a first wafer and a first geomagnetic sensor on a surface of the first wafer; and a second geomagnetic sensor part including a second wafer and a second geomagnetic sensor on a surface of the second wafer. The first and second geomagnetic sensor parts are bonded to each other, in which the first and second geomagnetic sensors positioned in an orthogonal relation to each other. Accordingly, an occupancy area of the geomagnetic sensor can be reduced. Further, the geomagnetic sensor on each axe can have the same magnetic material properties, and alignment deviation cannot be generated.

Abstract: A digitally controlled capacitor includes a first set of N capacitors, wherein the first set has a first capacitance value and each of the M capacitors has a second capacitance value, and at least one second set of N capacitors. The second set has the first capacitance value and each of the N capacitors has a third capacitance value that is greater than the second capacitance value. M and N are integers greater than one and M is not equal to N.

Abstract: An operating control device, such as for an appliance, is disclosed comprising sensor elements with a capacitive sensing function, the elements being located underneath a metallic surface that is used as the operating field. An insulating layer is situated between the elements and the metallic surface. When pressure is applied to the metallic surface the capacitance of the sensor element is altered by capacitive coupling. This alteration of capacitance can be determined by a corresponding evaluation circuit or the like for detecting activation of the device.

Abstract: A micro-electromechanical device includes a semiconductor body, in which at least one first microstructure and one second microstructure of reference are integrated. The first microstructure and the second microstructure are arranged in the body so as to undergo equal strains as a result of thermal expansions of the body. Furthermore, the first microstructure is provided with movable parts and fixed parts with respect to the body, while the second microstructure has a shape that is substantially symmetrical to the first microstructure but is fixed with respect to the body. By subtracting the changes in electrical characteristics of the second microstructure from those of the first, variations in electrical characteristics of the first microstructure caused by thermal expansion can be compensated for.

Abstract: Micro-electro-mechanical system (MEMS) variable capacitors and actuation components and related methods are provided. A MEMS variable capacitor can include first and second feed lines extending substantially parallel to one another. Further, MEMS variable capacitors can include first and second capacitive plates being spaced apart from the first and second feed lines. The first and second capacitive plates can be separately movable with respect to at least one of the first and second feed lines for varying the capacitance between the first and second feed lines over a predetermined capacitance range.

Abstract: A MEMS variable capacitor includes: a first connection beam having one end fixed to a substrate; a first actuation beam connected to the first connection beam; a second actuation beam connected to the first actuation beam and extending in a reverse direction; a second connection beam having one end fixed to the substrate; a third actuation beam connected to the second connection beam; a fourth actuation beam connected to the third actuation beam and extending in a reverse direction; a movable electrode provided between the second and fourth actuation beams; and a fixed electrode provided on the substrate opposed to the movable electrode. The first to fourth actuation beams have a piezoelectric film sandwiched between a lower electrode and an upper electrode, the first and third actuation beams are placed on a line, the second and fourth actuation beams are placed on a line, and the first and second actuation beams and the third and fourth actuation beams are placed symmetrically about a line.

Abstract: A heat-sensitive apparatus includes a substrate with a top surface, one or more bars being rotatably joined to the surface and having bimorph portions, and a plate rotatably joined to the surface and substantially rigidly joined to the one or more bars. Each bimorph portion bends in response to being heated. The one or more bars and the plate are configured to cause the plate to move farther away from the top surface in response to the one or more bimorph portions being heated.

Abstract: Nano-electromechanical device having an electrically conductive nano-cantilever wherein the nano-cantilever has a free end that is movable relative to an electrically conductive substrate such as an electrode of a circuit. The circuit includes a power source connected to the electrode and to the nano-cantilever for providing a pull-in or pull-out voltage therebetween to effect bending movement of the nano-cantilever relative to the electrode. Feedback control is provided for varying the voltage between the electrode and the nano-cantilever in response to the position of the cantilever relative to the electrode. The device provides two stable positions of the nano-cantilever and a hysteresis loop in the current-voltage space between the pull-in voltage and the pull-out voltage.

Abstract: Provided is a variable capacitance element comprising a plurality of single capacitance elements that each include (i) a fixed electrode provided on a surface of a substrate, (ii) a floating electrode provided to be separate from the fixed electrode and facing the fixed electrode, and (iii) an actuator that moves the floating electrode closer to or farther from the fixed electrode; and a floating electrode driving section that supplies the actuators with drive power to move the floating electrodes, such that a combined capacitance of the plurality of single capacitance elements becomes a prescribed capacitance.

Abstract: An electrical touch sensor is provided. The electrical touch sensor includes: a touch detection part having at least one touch pad and generating a first signal having a same delay time regardless of whether the object is in contact with the touch pad and a second signal having a varied delay time according to whether the object is in contact with the touch pad; and a contact signal generator generating a contact signal in response to the delay time-difference between the first and second signals. Therefore, it is possible to increase operation reliability by precisely determining whether the object is in contact with the pad, when the object has charge accumulation characteristics more than a certain level, although its conductive is insufficient. In addition, the electrical touch sensor can determine whether the object is in contact with the pad using only one pad to reduce a layout area of a product.

Abstract: A high frequency MEMS 1 as a high frequency electrical element has a silicon substrate 2 wholly formed with an insulation film, a first signal line 4 provided on the silicon substrate 2, a second signal line 5 provided on the silicon substrate 2, the second signal line 5 crossing the first signal line 4 within a first region above the silicon substrate 2, and a dielectric film 9 interposed between the first signal line 4 and the second signal line 5, and provided on one of the first signal line 4 and the second signal line 5, within the first region, the first signal line 4 and the second signal line 5 being relatively movable in directions for a contacting approach and a mutual spacing in between.