Abstract: In the field of the production of very high frequencies, for example from 1 gigahertz to several terahertz, by beating the frequencies of two laser beams together, a device includes a resonant optical cavity having very stable dimensions receiving the beams, with for each beam, an interrogation device of the resonant cavity supplying an electrical signal representing the difference in frequency between the light frequency of the beam and a resonance frequency of the resonant cavity. The frequency of each beam is servo controlled to minimize the frequency difference observed. The laser beams are produced by a dual-frequency laser producing two beams of different frequencies and orthogonal polarizations. A polarization separator is used for separate servo control of the beams according to polarization, and a polarizer is placed behind a main output of the resonant cavity producing an electromagnetic beam mixing the two polarizations and amplitude-modulated at the beat frequency.

Abstract: One embodiment is directed towards a stabilized laser including a laser to produce light at a frequency and a resonator coupled to the laser such that the light from the laser circulates therethrough. The laser also includes Pound-Drever-Hall (PDH) feedback electronics configured to adjust the frequency of the light from the laser to reduce phase noise in response to light sensed at the reflection port of the resonator and transmission port feedback electronics configured to adjust the frequency of the light from the laser toward resonance of the resonator at the transmission port in response to the light sensed at the transmission port of the resonator, wherein the transmission port feedback electronics adjust the frequency at a rate at least ten times slower than the PDH feedback electronics.

Abstract: A laser beam combining device includes three lasers, a polarizer, and a mode converter. The second laser device, the mode converter, and the third laser device are located on a first straight line in that order. The polarizer intersects with the first straight line at an imaginary joint point. An included angle between the first straight line and the polarizer is about 45 degrees. The polarizer and the mode converter are positioned between the second laser device and the third laser device. The polarizer is adjacent to the second laser device. The mode converter is adjacent to the third laser device. The first laser device faces the polarizer and is located on a second straight line perpendicular to the first straight line and passing through the joint point. The three laser devices emit TE mode red, green and blue laser beams, respectively.

Abstract: Described herein is a laser (1) having a cavity for supporting oscillation of an electromagnetic signal to provide lasing action. A gain element (5) provides a source of stimulated emission for amplifying the oscillating signal. The laser also includes a wavelength selective element (7), which includes a reflecting element and a polarization modifying element. The reflecting element selectively defines a predetermined wavelength and the polarization modifying element selectively modifies the polarization of the signal component at the predetermined wavelength so as to provide high selectivity. The wavelength selective element (7) rotates the signal polarization at the predetermined wavelength into an orthogonal state. A polarization filter (9) filters out the signal components having wavelengths not corresponding to the predetermined wavelength and a polarization rotation element (11) again rotates the polarization of the signal into an orthogonal state.

Abstract: A polarization modulation device for wideband laser comprises a first polarization maintaining optical fiber, a second polarization maintaining optical fiber, and a non-polarization maintaining optical fiber. The non-polarization maintaining optical fiber includes a first polarization controller coupled with the first polarization maintaining optical fiber, and a second polarization controller coupled with the second polarization maintaining optical fiber.

Abstract: A compact, lightweight, laser target designator uses a TIR bounce geometry to place an end-pumped gain element functionally in the center of the resonator path, thereby allowing the resonator path to be terminated by a pair of crossed Porro prisms, so that the designator produces a high quality beam that is insensitive to alignment and temperature, and is low in manufacturing cost. Some embodiments fold the Porro legs of the resonator path back toward the gain element for compactness. Embodiments use a single gain element as both an oscillator gain element with TIR and as an output amplifier gain element without TIR. Various embodiments use block optical elements in a planar layout on a standard support medium such as aluminum to facilitate automated manufacturing.

Abstract: The embodiments of the present invention disclose an External Cavity Laser (ECL), relate to the field of Wave Division Multiplexing-Passive Optical Network (WDM-PON) technology, and effectively solve a problem of unstable output optical power of the ECL caused by polarization dependence. The ECL includes a gain medium, a filter, and a Faraday Rotator Mirror (FRM). The gain medium, the filter and the FRM constitute an oscillation cavity, and light emitted by the gain medium oscillates back and forth in the oscillation cavity.

Abstract: The present invention discloses a wavelength modulation heterodyne light source, which comprises: a modulation unit, a wavelength modulated light source and a birefringent crystal. The modulation unit produces a triangular or sine wave modulating signal, and transmits the modulating signal to the wavelength modulated light source to generate a wavelength modulated light signal, then the modulated light signal is refracted by the birefringent crystal with two different optical paths caused by the two different refractivity of the crystal to generate a heterodyne light. With the application of the present invention, the heterodyne light source can be made to a relatively small size and save much cost compared with known heterodyne light sources at present.

Abstract: Various exemplary embodiments relate to an optical isolator in an integrated optical circuit including: a first optical modulator configured to provide a first periodic phase modulation on an input optical signal; a second optical modulator configured to provide a second periodic phase modulation on the modulated optical signal; and an optical waveguide having a length L connecting the first optical modulator to the second optical modulator; wherein the phase difference between the first and second periodic phase modulation is ?/2, and wherein the length L of the optical waveguide causes a phase delay of ?/2 on an optical signal traversing the optical waveguide.

Abstract: A light source device is provided with a coherent light source for emitting the coherent light, and a pattern changer for changing an interference pattern of the coherent light on a surface of the illumination object. The pattern changer includes a photorefractive crystal which is arranged between the coherent light source and the illumination object and on an optical path of the coherent light and exhibits a photorefractive effect, and a changer for changing at least one of a light intensity distribution, a polarization direction, a wavelength and an intensity of coherent light incident on the photorefractive crystal. The illumination object is illuminated with the coherent light.

Abstract: The present invention relates to a polarized light emitting diode (LED) device and the method for manufacturing the same, in which the LED device comprises: a base, a light emitting diode (LED) chip, a polarizing waveguide and a packaging material. In an exemplary embodiment, the LED chip is disposed on the base and is configured with a first light-emitting surface for outputting light therefrom; and the waveguide, being comprised of a polarization layer, a reflection layer, a conversion layer and a light transmitting layer, is disposed at the optical path of the light emitted from the LED chip; and the packaging material is used for packaging the waveguide, the LED chip and the base into a package.

Abstract: The invention relates to a precision optical frequency tunable laser. The laser includes: a laser gain medium, an intracavity collimating lens, an active optical phase modulator, a tunable acousto-optic filter and an intracavity total reflection mirror all arranged sequentially in a laser cavity, and the tunable laser further includes an active polarization rotator, a polarization beam splitter, two etalons, a temperature control system attached to the etalons, two total reflection mirrors, a radio frequency signal source, a laser pumping source, an active optical phase modulator drive source, an active polarization rotator drive source and a laser drive control circuit. Through the temperature control system attached to the etalons, stable laser output and the precision optical frequency tuning less than 1 GHz within a wide spectrum range can be realized, thereby greatly reducing the bandwidth requirements in achieving narrowband filtering for the tunable acousto-optic filter.

Abstract: An extreme ultraviolet light generation system used with a laser apparatus may be provided, and the extreme ultraviolet light generation system may include: a chamber including at least one window for at least one laser beam and a target supply unit for supplying a target material into the chamber; and at least one polarization control unit, provided on a laser beam path, for controlling a polarization state of the at least one laser beam.

Abstract: The present invention relates to an apparatus for generating an ultra-short ultra-high intensity pulse laser, comprising: a pulse laser providing unit which generates an ultra-short ultra-high intensity pulse laser, stretches pulse width, then selects and provides only a pulse laser having a predetermined polarizing angle; a polarization characteristic adjusting unit which divides the pulse laser provided by the pulse laser providing unit into S-polarizing component light and P-polarizing component light, varies the phase difference and amplitude difference between the S-polarizing component light and the P-polarizing component light, and combines the two types of light to generate a pulse laser with varied polarization characteristics; and a pulse compression unit which compresses the pulse width of the pulse laser, the polarization characteristics of which are varied by the polarization characteristic adjusting unit, and outputs the pulse laser.

Abstract: An optical transmitter includes a laser configured to emit light, a power of the light increasing with temperature decreasing, a Faraday rotator configured to rotate a polarization direction of the light in accordance with the temperature, and a first polarizer that has a principal axis inclined at a given angle and inputs the light output from the Faraday rotator.

Abstract: An electro-optic waveguide polarization modulator includes cladding layers, and a waveguide core sandwiched between the cladding layers, wherein the waveguide core has a higher refractive index than the cladding layers. The modulator further includes primary electrodes arranged on the opposite side of one cladding layer to the core and a secondary electrode arranged on the opposite side of another cladding layer to the core. The electrodes are arranged to provide an electric field having field components in perpendicular directions within the waveguide core so as to modulate the refractive index such that electromagnetic radiation propagating through the core is converted from a first polarization state to a second polarization state. The modulator further includes a grading layer sandwiched between the cladding layers and the core, the grading layer having an effective refractive index intermediate between that of the waveguide core and the cladding layer.

Abstract: An optical amplifier receives a seed laser having a wavelength of 1064 nm. Amplification occurs in a segmented Nd:YVO4 gain medium pumped with a pump source. Each segment of the gain medium has a length and dopant concentration and together the segments enhance power absorption in the gain medium enabling use of a higher power end pump which increases pulse energy and average power of the laser. The first end of the gain medium includes a wedge surface which arranges a quad-pass optical amplifier to achieve high extraction efficiency.

Abstract: A degree of polarization control device includes: a calcium fluoride crystal substrate for transmitting a laser beam; a polarization monitor for measuring the degree of polarization of a laser beam transmitted through the calcium fluoride crystal substrate; and a controller for controlling the rotation angle of the calcium fluoride crystal substrate according to the degree of polarization measured by the polarization monitor; the calcium fluoride crystal substrate being formed by a flat plate having a laser beam entering surface and a laser beam exiting surface running in parallel with the (111) crystal face, the Brewster angle being selected for the incident angle, the rotation angle around the [111] axis operating as a central axis being controlled by the controller.

Abstract: A vertical-cavity surface-emitting laser array includes a substrate having an element forming area, multiple columnar structures formed in the element forming area on the substrate, and at least one metal wire formed adjacent to the multiple columnar structures. Each columnar structure includes a lower semiconductor reflector of a first conductivity type, an upper semiconductor reflector of a second conductivity type, and an active region formed between the lower semiconductor reflector and the upper semiconductor reflector. The columnar structure emits light in a direction perpendicular to the substrate. The at least one metal wire has a distortion applying segment that extends in the same direction relative to the multiple columnar structures.

Abstract: A patterned retarder is described that may be used with a laser source array to obtain a combined beam suitable for three-dimensional laser image projection using orthogonal polarization states and/or orthogonal color spaces.

Abstract: Materials, methods, structures and device including the same can provide a semiconductor device such as an LED using an active region corresponding to a non-polar face or surface of III-V semiconductor crystalline material. In some embodiments, an active diode region contains more non-polar III-V material oriented to a non-polar plane than III-V material oriented to a polar plane. In other embodiments, a bottom region contains more non-polar m-plane or a-plane surface area GaN than polar c-plane surface area GaN facing an active region.

Abstract: In a frequency-tripled fiber-MOPA, a pre-amplified plane-polarized seed-pulse having a fundamental frequency is divided into two pulse-components, plane-polarized in polarization-orientations at 90-degrees to each other. The fundamental-wavelength pulse-components are amplified in a common amplifier-fiber. The amplified components are separately propagated on different optical paths. One of the amplified components is frequency-doubled. The frequency-doubled component on one path and fundamental-frequency component on the other path are then combined on a common-path and sum-frequency mixed to provide a frequency-tripled pulse.

Abstract: laser devices described may emit a beam of electromagnetic radiation having a large wavelength (e.g., mid-infrared, far-infrared) and exhibiting a low angle of divergence. In some embodiments, the wavelength of the electromagnetic radiation is between 3 microns and 500 microns and the divergence angel is less than 15 degrees. Electromagnetic waves may be produced from a single monolithic laser device which includes a laser waveguide (e.g., quantum cascade laser waveguide) and a collimating element having at least one indented region (e.g., a plurality of periodically disposed grooved structures). A portion of the electromagnetic radiation may propagate as surface waves (e.g., surface plasmons) along the surface of the collimating element where indented regions in the collimating element may decrease the propagation velocity of the surface waves. A portion of the electromagnetic radiation may also be substantially convinced within a grooved structure of the collimating element (e.g., as channel polaritons).

Abstract: A laser anti-reflection device includes a polarizing beam splitter, a ?/4 wave plate and an absorber disposed in an outgoing light path of a laser emitting linearly polarized light with a wavelength of ?. The linearly polarized light from the laser passes through the polarizing beam splitter and the ?/4 wave plate in turn to become a circularly polarized light beam. Part of the circularly polarized light beam is then reflected by a workpiece to be processed along the original light path and passes the ?/4 wave plate to become a linearly polarized light beam with a polarization direction vertical to that of the outgoing linearly polarized light beam. The vertical polarized beam passes the polarizing beam splitter, deviates from the light path of the outgoing linearly polarized light beam and reaches the absorber. The laser anti-reflection device prevents reflected light from damaging the laser from high power lasers.

Abstract: An optical device may include: an optical module disposed in a beam delivery path of a laser beam; a beam adjusting unit disposed in the beam delivery path for adjusting the beam delivery path of the laser beam; a measuring unit disposed in the beam delivery path for detecting the beam delivery path; and a control unit for controlling the beam adjusting unit based on a detection result of the beam delivery path of the laser beam detected by the measuring unit.

Abstract: A gas discharge chamber that uses a calcium fluoride crystal which reduces a breakage due to mechanical stress (window holder and laser gas pressure), thermal stress from light absorption, and the like, increases the degree of linear polarization of output laser, and suppresses degradation due to strong ultraviolet (ArF, in particular) laser light irradiation. A first window (2) and a second window (3) of the gas discharge chamber have an incident plane and an emitting plane in parallel with a (111) crystal plane of their calcium fluoride crystal. With respect to an arrangement where laser light entering the calcium fluoride crystal passes through a plane including a <111> axis and a <001> axis of each of the first window (2) and the second window (3) as seen from inside the chamber (1), the first window (2) and the second window (3) are arranged in positions rotated in the same direction by the same angle about their <111> axis.

Abstract: In the case of a lens array type homogenizer optical system, the incident angle and intensity of a laser beam 1 entering a large-sized lens (long-axis condenser lens 22) of a long-axis condensing optical system, which is provided on the rear side, are changed for every shot by performing laser irradiation while long-axis lens arrays 20a and 20b are reciprocated in a direction corresponding to a long axial direction of a linear beam (X-direction). Therefore, vertical stripes are significantly reduced. Further, the incident angle and intensity of a laser beam 1 entering a large-sized lens (projection lens 30) of a short-axis condensing optical system, which is provided on the rear side, are changed for every shot by performing laser irradiation while short-axis lens arrays 26a and 26b are reciprocated in a direction corresponding to a short axial direction of a linear beam (Y-direction). Therefore, horizontal stripes are significantly reduced.

Abstract: A laser apparatus for generating extreme ultraviolet (EUV) light at a wavelength of approximately 13 nm is provided. The laser apparatus may be combined with a reduced projection reflective optical system. Systems and methods for generating EUV light are also provided.

Abstract: In at least one embodiment a laser system includes a fiber laser source, a polarization controller and a wavelength converter. The relative power distribution between a pump wavelength and a signal wavelength is controllable using the polarization controller. An optional phase compensator is used to control polarization state of the output laser beam. In various embodiments the relative power distribution among multiple wavelengths may be controlled over a range of at least about 100:1.

Abstract: Two pulsed lasers (14) or sets of lasers propagate beams of pulses (20) having orthogonally related polarization states. A beam combiner (24) combines the orthogonal beams to form a combined beam propagating along a common beam path (16) to intersect an optical modulator (30) that selectively changes the polarization state of selected pulses of either beam to provide a composite beam (18) including similarly polarized pulses from the orthogonal beams. The composite polarized beam has a composite average power and a composite repetition rate that are greater than those provided by either laser. The optical modulator can also selectively control the polarization states of pulses from either laser to pass through or be blocked by a downstream polarizer (32). Additional modulators may facilitate pulse shaping of the pulses. The system is scalable by addition of sets of single lasers or pairs of lasers with beam combiners and modulators.

Abstract: An EUV light generation system includes a driver laser comprising a master oscillator such as a semiconductor laser, a spatial filter, gas slab amplification devices, relay optical systems, and high-speed axial-flow amplifiers. The slab amplification devices include beam adjusting optical units disposed, respectively, at input and output sides of the slab amplifiers SA to convert the beam profile and/or polarization direction and/or an elongated direction of the beam profile with the slab amplifiers is parallel to a free space axis AF of the slab waveguides, i.e. parallel to the discharge electrodes.

Abstract: A system includes a chamber, a laser beam apparatus configured to generate a laser beam to be introduced into the chamber, a laser controller for the laser beam apparatus to control at least a beam intensity and an output timing of the laser beam, and a target supply unit configured to supply a target material into the chamber, the target material being irradiated with the laser beam for generating extreme ultraviolet light.

Abstract: An optical apparatus comprising a gain medium exhibiting polarisation dependent absorption along two axes, the gain medium having a weakly absorbing axis and a strongly absorbing axis, an optical pump source arranged to direct pump light towards a first face of the gain medium such that the pump light entering the gain medium has a component of its polarisation parallel to the weakly absorbing axis, a polarisation modifying apparatus and one or more reflectors which are together arranged to modify the polarisation of pump light which exits the gain medium through a second face of the gain medium, and to direct the pump light with modified polarisation back towards said second face of the gain medium.

Abstract: Described herein is a laser (1) having a cavity for supporting oscillation of an electromagnetic signal to provide lasing action. A gain element (5) provides a source of stimulated emission for amplifying the oscillating signal. The laser also includes a wavelength selective element (7), which includes a reflecting element and a polarization modifying element. The reflecting element selectively defines a predetermined wavelength and the polarization modifying element selectively modifies the polarization of the signal component at the predetermined wavelength so as to provide high selectivity. The wavelength selective element (7) rotates the signal polarization at the predetermined wavelength into an orthogonal state. A polarization filter (9) filters out the signal components having wavelengths not corresponding to the predetermined wavelength and a polarization rotation element (11) again rotates the polarization of the signal into an orthogonal state.

Abstract: The invention is directed to the provision of a wavelength conversion-type ultraviolet light source apparatus that can obtain a stable output. A light source apparatus according to one mode of the invention includes: a laser light source 1 which produces fundamental light L1; at least one nonlinear optical crystal 3 which takes the fundamental light L1 or a harmonic thereof as incident light and outputs wavelength-converted light L2; and polarization adjusting means 2 which is placed in an optical path of the incident light and causes an output of the wavelength-converted light L2 to change by changing its refractive index for a polarized component of the incident light. The polarization adjusting means 2 changes the amount of change of the refractive index in accordance with an electrical signal output from a photodetector 7.

Abstract: A control system and apparatus for use with an ultra-fast laser is provided. In another aspect of the present invention, the apparatus includes a laser, pulse shaper, detection device and control system. A multiphoton intrapulse interference method is used to characterize the spectral phase of laser pulses and to compensate any distortions in an additional aspect of the present invention. In another aspect of the present invention, a system employs multiphoton intrapulse interference phase scan. Furthermore, another aspect of the present invention locates a pulse shaper and/or MIIPS unit between a laser oscillator and an output of a laser amplifier.

Abstract: A system includes a chamber, a laser beam apparatus configured to generate a laser beam to be introduced into the chamber, a laser controller for the laser beam apparatus to control at least a beam intensity and an output timing of the laser beam, and a target supply unit configured to supply a target material into the chamber, the target material being irradiated with the laser beam for generating extreme ultraviolet light.

Abstract: A master oscillator may include: a pumping laser that outputs pumping light; a seed laser that is oscillated by the pumping light; an amplifier that amplifies the pulsed laser light outputted by the seed laser using the pumping light; at least one optical shutter disposed in the optical path between the seed laser and the amplifier; and a controller that causes the pumping laser to oscillate continuously at a predetermined repetition rate and that controls the optical shutter to open and close.

Abstract: A laser and monitoring system is provided. In another aspect of the present invention, the system includes a laser, pulse shaper and detection device. A further aspect of the present invention employs a femtosecond laser and binary pulse shaping (BPS). Still another aspect of the present invention uses a laser beam pulse, a pulse shaper and a SHG crystal. In yet another aspect of the present invention, a multiphoton intrapulse interference phase scan (hereinafter “MIIPS”) method is used to characterize the spectral phase of femtosecond laser pulses and to correct them. A further aspect of the system of the present invention is employed to monitor environmental chemicals and biological agents, including toxins, explosives, and diseases.

Abstract: A GaN-based semiconductor laser (1) emits first laser light of a single polarization and having a first wavelength. An optical resonator (30) includes a solid-state laser medium which is excited by incidence of the laser light and which oscillates second laser light having a second wavelength different from the first wavelength. A polarization switch (6) switches over at least one of polarization directions of the first laser light and the second laser light to thereby change the wavelength of laser light to be emitted from the optical resonator (30) or the intensity ratio between a plurality of laser light to be emitted from the optical resonator (30). With the above arrangement, a plurality of laser light can be used effectively.

Abstract: The invention relates to a device (1) for generating short pulses, said device being characterized in that it comprises: a polarized pulse laser (10, 2, 3) having a polarization direction; a bi-refringent optical fiber (6) having bi-refringence axes, wherein said polarization direction is not co-linear with said bi-refringence axes; an output polarizer (9) provided at the output of said fiber, said polarizer being capable of selecting a polarization at the output of said fiber; wherein said pulse laser in a longitudinally quasi-single mode laser.

Abstract: A degree of polarization control device includes: a calcium fluoride crystal substrate for transmitting a laser beam; a polarization monitor for measuring the degree of polarization of a laser beam transmitted through the calcium fluoride crystal substrate; and a controller for controlling the rotation angle of the calcium fluoride crystal substrate according to the degree of polarization measured by the polarization monitor; the calcium fluoride crystal substrate being formed by a flat plate having a laser beam entering surface and a laser beam exiting surface running in parallel with the (111) crystal face, the Brewster angle being selected for the incident angle, the rotation angle around the [111] axis operating as a central axis being controlled by the controller.

Abstract: Provided is a fiber laser including a mode filter for selectively attenuating, among modes included in laser light propagating through a multi-mode fiber, any mode other than a radially polarized mode. Among the modes included in the laser light propagating through the multi-mode fiber, the fiber laser causes the radially polarized mode to resonate, so as to emit radially polarized laser light. The mode filter includes a long-period fiber grating obtained by writing, to a multi-mode fiber capable of guiding the radially polarized mode, a grating for selectively attenuating any waveguide mode other than the radially polarized mode.

Abstract: In the case of a lens array type homogenizer optical system, the incident angle and intensity of a laser beam 1 entering a large-sized lens (long-axis condenser lens 22) of a long-axis condensing optical system, which is provided on the rear side, are changed for every shot by performing laser irradiation while long-axis lens arrays 20a and 20b are reciprocated in a direction corresponding to a long axial direction of a linear beam (X-direction). Therefore, vertical stripes are significantly reduced. Further, the incident angle and intensity of a laser beam 1 entering a large-sized lens (projection lens 30) of a short-axis condensing optical system, which is provided on the rear side, are changed for every shot by performing laser irradiation while short-axis lens arrays 26a and 26b are reciprocated in a direction corresponding to a short axial direction of a linear beam (Y-direction). Therefore, horizontal stripes are significantly reduced.

Abstract: A degree of polarization control device includes: a calcium fluoride crystal substrate for transmitting a laser beam; a polarization monitor for measuring the degree of polarization of a laser beam transmitted through the calcium fluoride crystal substrate; and a controller for controlling the rotation angle of the calcium fluoride crystal substrate according to the degree of polarization measured by the polarization monitor; the calcium fluoride crystal substrate being formed by a flat plate having a laser beam entering surface and a laser beam exiting surface running in parallel with the (111) crystal face, the Brewster angle being selected for the incident angle, the rotation angle around the [111] axis operating as a central axis being controlled by the controller.

Abstract: An ultra-short pulsed laser system comprises an optical combiner, optical amplifier, optical pulse compressor, and optical separator. The optical combiner is configured to combine a primary optical pulse with a secondary optical signal to generate a combined optical signal. The primary optical pulse and the secondary optical signal have a distinguishable characteristic. The optical amplifier is configured to optically amplify the combined optical signal. The optical pulse compressor is configured to compress at least the primary optical pulse contained within the optically amplified combined optical signal and output a compressed combined optical signal. The optical separator is configured to separate the compressed combined optical signal into an output primary optical pulse and an output secondary optical signal according to the distinguishable characteristic.

Abstract: A wavelength conversion laser light source, including a solid-state laser medium configured to generate fundamental light; a wavelength conversion element configured to convert the fundamental light into second harmonic light which has a higher frequency than the fundamental light; and a conductive material in contact with the wavelength conversion element, wherein the wavelength conversion element includes a polarization inverted structure formed with a polarization inversion region, and a first lateral surface which perpendicularly intersects with the polarization inversion region, and the conductive material is in contact with the first lateral surface.

Abstract: A laser source device includes: a light emission unit which emits laser beam having first wavelength; a first mirror which selectively reflects S-polarized light contained in the first wavelength laser beam emitted from the light emission unit in a direction different from the direction toward the light emission unit and transmits second wavelength laser beam; a second mirror which receives laser beam reflected by the first mirror and reflects laser beam having first wavelength and contained in the received laser beam toward the first mirror; and a wavelength conversion element disposed between the first mirror and the second mirror and converts at least a part of S-polarized light contained in the received first wavelength laser beam into laser beam having second wavelength.

Abstract: A driver laser for an extreme ultra violet light source device capable of suppressing self-oscillation light, amplifying a laser beam efficiently, and reducing a device size. The driver laser has an oscillator for generating a laser beam to output the generated laser beam, and at least one amplifier for amplifying the laser beam output from the oscillator to output the amplified laser beam. The amplifier includes a discharge unit which amplifies the laser beam by using energy of a laser medium excited by discharge, a feedback mirror which leads the laser beam output from the discharge unit to the discharge unit, a polarizer which leads the laser beam output from the oscillator into the discharge unit and also reflects the laser beam output from the discharge unit to a predetermined direction, and a self-oscillation light filter which attenuates self-oscillation light output from the discharge unit.

Abstract: A multi-beam laser beam control system includes a laser transmitter configured to emit light in a plurality of beamlets. A sensor is configured to receive light from the beamlets. A processor is communicably coupled to the sensor and configured to compute a relative phase of a wavefront of at least one beamlet based on output from the sensor. A controller is communicably coupled to the processor and to the laser transmitter. The controller is configured to adjust a phase of at least one of the beamlets.