Abstract: A method and system for calculating a heat flow to a sample in a differential scanning calorimeter (DSC). The DSC has a sensor within an enclosure comprising an absolute temperature measurement detector for measuring the temperature of a base position on the sensor, a first differential temperature detector for measuring the temperature difference between a sample position and the base position, and a second differential temperature detector for measuring the temperature difference between a reference position and a sample position. Thermal resistances and heat capacities of the DSC are calibrated. The DSC is operated, and the heat flow to the sample is calculated using a method that accounts for the leakage heat flows.

Abstract: A heating value meter for gases has an outer cylindrical mantle with an outer thermostatic heating apparatus and at least one inlet for introduction of air and at least one inlet for introduction of test or calibration gas. The outer mantle has an outer heating mantle and a bottom part containing an outer sensor of the outer thermostatic apparatus. A cylindrical measuring block is located coaxially inside the outer mantle and is equipped with an axially inserted internal sensor of an electrical remote thermometer of an internal thermostatic apparatus. The heating mantle, the outer sensor, an electrical heating block and an internal sensor, are interconnected via the outer and internal thermostatic apparatus and are adjusted for maintaining a constant temperature by regulation of the electrical input to the electrical heating block, or by the input to the heating mantle where, in addition, the measuring apparatus is connected by an electric lead to the electrical heating block.

Abstract: An apparatus and method for the monitoring and measurement of chemical and/or biological deposition in heat exchangers and other fluid processing vessels. The new and original sensing system includes at least two hollow fluid vessels conductively mounted across a constant heat transfer path. Thin film heat flux sensors are attached to a heat transfer surface of the vessels in order to measure changes in differential heat flux that occur when deposition begins to accumulate in the vessel. In this way, it is shown that differential heat flux measurements can be used to detect and measure the early onset of chemical and/or biological deposition.

Abstract: Thermally analysis of layers and multiple layer structures used in the semiconductor processing arts is disclosed. A modulated calorimetric analysis may be used to determine a thermal signature that characterizes the chemical properties of a sample of material. The signature may include one or more thermal properties such as heat capacities. The signature may be used to compare and infer the suitability of a material for use in an integrated circuit manufacturing process. A thermal signature for a material that is not known to be suitable for manufacturing integrated circuits may be compared with a thermal signature for a standard material that is known to be suitable in order to determine whether the aforementioned material is suitable. Multiple layer structures may also be analyzed, compared, and inferred, and approaches for determining thermal signatures for any individual layer of the multiple layer structure are disclosed.

Abstract: Disclosed is a temperature correction method for a thermal analysis apparatus which measures electric current, voltage, and electric resistance of a measurement sample while changing the temperature of the measurement sample set between a pair of electrodes. The paired electrodes are connected by a reference substance, and a weight is set on the reference substance. The temperature at the time when the reference substance is fused and the weight falls cutting the reference substance is measured actually as melting point by a temperature sensor. Based on a difference between the actually measured value and a literature value of the melting point of the reference substance, the temperature measured by the temperature sensor is corrected.

Abstract: A method and system for calculating a heat flow to a sample in a differential scanning calorimeter (DSC). The DSC has a sensor within an enclosure comprising an absolute temperature measurement detector for measuring the temperature of a base position on the sensor, a first differential temperature detector for measuring the temperature difference between a sample position and the base position, and a second differential temperature detector for measuring the temperature difference between a reference position and a sample position. Thermal resistances and heat capacities of the DSC are calibrated. The DSC is operated, and the heat flow to the sample is calculated using a method that accounts for the leakage heat flows.

Abstract: A sensor includes at least two microsensor chips in a housing.

Abstract: This invention relates to a method for determining the absolute temperature of a substance, comprising the steps of: sensing the absolute temperature of the substance and generating an absolute value associated therewith; sensing a temperature difference between the temperature of a reference body and the temperature of the substance and generating a difference value associated therewith; determining an optimised value of the absolute temperature of the substance by means of said absolute value and said difference value. The invention also relates to an apparatus for performing the method; a temperature control system for controlling the temperature of a substance; and an instrument comprising a substance, and such a temperature control system.

Abstract: The present invention provides a nano-calorimeter device operable for measuring and characterizing the thermodynamic and other physical properties of materials that are confined to essentially nano-scale dimensions. The nano-calorimeter device including a thin film membrane having a first surface and a second surface. The nano-calorimeter device also including a frame structure disposed adjacent to and in thermal contact with the first surface of the thin film membrane, the frame structure defining a plurality of hollow cells adjacent to and in thermal contact with the first surface of the thin film membrane.

Abstract: A method and apparatus for thermally investigating a material by driving the material through a temperature profile composed of isothermal and non-isothermal segments is disclosed, which enable determination of a kinetic component in a measured heat flow signal caused by the exposure of the material to the temperature profile.

Abstract: A calorimeter that includes a sample cell, a reference cell, a pressure system that applies a variable pressure to the sample cell, and a pressure controller that controls the pressure applied by the pressure system to the sample cell. By applying identical pressure perturbations to both the sample and reference cells over a range of temperatures, the calorimeter can be used to accurately calculate both the thermal coefficient of expansion of various substances, and the volume change of molecules undergoing a structural transition.

Abstract: A device for thermal sensing is based on only one thermopile. The junctions of the thermopile are coupled thermally to a first region which includes a first substance while the hot junctions of the thermopile are coupled thermally to a second region which includes a second substance. The first and second regions are separated and thermally isolated from each other. The device can further include a membrane to thermally and electrically isolate the thermopile and to mechanically support the thermopile.

Abstract: A method and system for calculating a heat flow to a sample in a differential scanning calorimeter (DSC). The DSC has a sensor within an enclosure comprising an absolute temperature measurement detector for measuring the temperature of a base position on the sensor, a first differential temperature detector for measuring the temperature difference between a sample position and the base position, and a second differential temperature detector for measuring the temperature difference between a reference position and a sample position. Thermal resistances and heat capacities of the DSC are calibrated. The DSC is operated, and the heat flow to the sample is calculated using a method that accounts for the leakage heat flows.

Abstract: It is an object to obtain a calorimeter characterized by excellent mechanical strength, and a manufacturing method thereof, when a plurality of calorimeters are arranged inside a single substrate. The calorimeter has an absorbent for converting energy of radioactive rays into heat and a resistor for converting heat into an electrical signal using superconductive transition are arranged on a membrane for determining thermal conductivity with the membrane being attached to a substrate, the substrate having a tri-layer structure comprising an etching layer, an etching stop layer and a support substrate, the membrane being arranged separated by the thickness of the etching stop layer and the etching layer.

Abstract: A system and method is disclosed for helping determine a condition of selected tissue of a patient based on a set of thermal images of the selected tissue acquired over a time period. The image set has image regions with corresponding characteristics indicative of a temperature condition of an associated part of the selected tissue, which had been subjected to a thermal challenge during part of the image acquisition time period. Feature values are determined based on the characteristics of selected image regions. A classifier is applied to the features to provide an indication of the condition of the selected tissue, such as indicating a likelihood of malignancy.

Abstract: Disclosed is a temperature correction method for a thermal analysis apparatus which measures electric current, voltage, and electric resistance of a measurement sample while changing the temperature of the measurement sample set between a pair of electrodes. The paired electrodes are connected by a reference substance, and a weight is set on the reference substance. The temperature at the time when the reference substance is fused and the weight falls cutting the reference substance is measured actually as melting point by a temperature sensor. Based on a difference between the actually measured value and a literature value of the melting point of the reference substance, the temperature measured by the temperature sensor is corrected.

Abstract: A method and system for non-destructive, reference-free thermographic detection of sub-surface defects uses an infrared camera to capture multiple, spatially different images of a sample that has been heated and allow to cool to equilibrium temperature. The temperature-time data obtained for each pixel in each image is converted into the logarithmic domain and a least squares fit is conducted on the data to generate a polynomial expression corresponding to the temperature-time data for a given pixel. This polynomial expression can be transformed into the original time domain to obtain temperature-time data with improved signal-to-noise characteristics.

Abstract: The present invention is intended to provide a calorimeter for converting a quite small amount of heat into an electrical signal, especially a radiation detector providing improved energy resolution and count rate, by using a superconducting transition edge. The calorimeter has an absorber for absorbing radiation and producing heat. This absorber is formed on a resistor whose resistance value is varied by the heat. The resistor is formed on a membrane that controls escape of the heat. The calorimeter is characterized in that it is further fitted with a heat dissipation device for letting active electrons produced in the calorimeter escape to the outside.

Abstract: In order to provide means for suppressing vibration of a balance arm of a thermogravity apparatus when changing a sample at low cost and with a minimal footprint, there is therefore provided a balance arm having a sample holder, a detector for detecting an amount of shift of the balance arm from an equilibrium position, a control circuit for carrying out feedback control towards the equilibrium position of the balance arm, a driver for driving the balance arm towards the equilibrium position, an exchange stage detector for detecting when a sample is being changed, and a fixed output holding circuit for maintaining the output of the driver at a fixed level while the exchange stage is indicated by the exchange stage detector, wherein output of the driver is fixed during the sample exchange stage.

Abstract: A process for thermal imaging scanning of a swaged heater of an anode subassembly of a hollow cathode assembly, comprising scanning a swaged heater with a thermal imaging radiometer to measure a temperature distribution of the heater; raising the current in a power supply to increase the temperature of the swaged heater; and measuring the swaged heater temperature using the radiometer, whereupon the temperature distribution along the length of the heater shall be less than plus or minus 5 degrees C.

Abstract: A method and apparatus for thermally investigating a material by driving the material through a temperature profile composed of isothermal and non-isothermal segments is disclosed, which enable determination of a kinetic component in a measured heat flow signal caused by the exposure of the material to the temperature profile.

Abstract: Systems and methods for analyzing a viscoelastic property of a combinatorial library of materials including a plurality of full bridge devices operable for measuring a temperature-modulated elongation property of each of a plurality of combinatorial materials, wherein each of the plurality of full bridge devices comprises a plurality of strain gauges operable for measuring a temperature-modulated elongation property of each of the plurality of combinatorial materials, and wherein each of the plurality of combinatorial materials is disposed on a surface of the plurality of full bridge devices. The systems and methods also including an algorithm disposed within a computer, the algorithm operable for equating the temperature-modulated elongation property of the combinatorial materials with a thermal property of the combinatorial materials.

Abstract: A colorimeter has an absorber for absorbing radiation energy and converting the radiation energy into thermal energy. A resistor is connected to the absorber for converting thermal energy into an electrical signal. A membrane is connected to the resistor for controlling a thermal discharge from the resistor. A substrate is connected to the membrane and has a tri-layer structure comprised of an etching layer having a preselected thickness, an etching stop layer and a support substrate. The membrane is spaced-apart from a main surface of the etching stop layer by the preselected thickness of the etching layer.

Abstract: A system and method for obtaining the contact thermal resistance for a sample and pan without a priori knowledge of the properties of either sample, by measuring the reversing heat capacity of a sample and its pan (or an empty pan on the reference side of the DSC) at a long period and a short period during a quasi-isothermal MDSC experiment and then finding the value of contact thermal resistance that makes the short and long period heat capacities match. Several different methods may be used to find the contact thermal resistance using quasi-isothermal MDSC with a long and a short period. Two methods are direct calculation methods that use the results from an MDSC experiment used with model equations to calculate the contact thermal resistance. A third method is another direct calculation method, based upon the phase angle between the heat flow and temperature signals. A fourth and fifth method use curve fitting of the apparent heat capacity for multiple values of pan contact thermal resistance.

Abstract: A method of measuring the concentration of a molten bath component comprises the steps of placing a test sample in contact with the molten bath sample, measuring a change in temperature of that sample due to dissolution of the test sample, and determining the concentration of the component in that molten bath based on the change in sample temperature. The test sample can comprise alumina, and the molten bath can comprise a cryolite bath. The test sample can be placed in a probe chamber, which is then immersed in the molten bath, opened to permit the sample of the molten bath to enter the probe chamber, and closed prior to the step of measuring a change in temperature of the sample of the molten bath. An apparatus for measuring the concentration of the component in a molten bath is also disclosed.

Abstract: A cooling system for thermal analysis equipment provides rapid cool down and steady state operation of a differential scanning calorimeter (DSC) at any predetermined temperature between a minimal temperature and room temperature using a throttle-cycle cooler based on a single stage compressor. The cooling system operates with a mixed refrigerant that includes some liquid fraction at the inlet to a cryostat that houses the key cold elements for the cooling system. A temperature actuated automatic throttle valve in the cooling system increases refrigerant mass flow rate when the differential scanning calorimeter increases the heat load (and vice-versa) that is generally provided by a heater. At the same time, the valve design provides a high mass flow during cool down and automatic flow rate reduction at an intermediate temperature as the overall system approaches an operating condition during cool down.

Abstract: A method and system for calculating a heat flow to a sample in a differential scanning calorimeter (DSC). The DSC has a sensor within an enclosure comprising an absolute temperature measurement detector for measuring the temperature of a base position on the sensor, a first differential temperature detector for measuring the temperature difference between a sample position and the base position, and a second differential temperature detector for measuring the temperature difference between a reference position and a sample position. Thermal resistances and heat capacities of the DSC are calibrated. The DSC is operated, and the heat flow to the sample is calculated using a method that accounts for the leakage heat flows.

Abstract: A system and method for obtaining the contact thermal resistance for a sample and pan without a priori knowledge of the properties of either sample, by measuring the reversing heat capacity of a sample and its pan (or an empty pan on the reference side of the DSC) at a long period and a short period during a quasi-isothermal MDSC experiment and then finding the value of contact thermal resistance that makes the short and long period heat capacities match. Several different methods may be used to find the contact thermal resistance using quasi-isothermal MDSC with a long and a short period. Two methods are direct calculation methods that use the results from an MDSC experiment used with model equations to calculate the contact thermal resistance. A third method is another direct calculation method, based upon the phase angle between the heat flow and temperature signals. A fourth and fifth method use curve fitting of the apparent heat capacity for multiple values of pan contact thermal resistance.

Abstract: A modulated differential scanning calorimeter (MDSC) and a method for practicing MDSC that uses two separate temperature difference signals—the difference between the temperatures of the sample and reference positions and the difference between the temperatures of the sample position and a base position. This approach accounts for heat flows associated with the sample and reference pans, and for the difference in sample and pan heating rates to provide more accurate heat flow measurement and improve resolution. It also greatly reduces or eliminates the frequency dependence of the heat capacity calibration factor, which allows for the use of shorter modulation periods. Shorter modulation periods allow the use of higher underlying heating rates, allowing users to decrease the duration of their MDSC experiments.

Abstract: A method and apparatus for thermally analyzing a sample of a material by detecting a heat flow between the sample and a heat source (1, 2) and ,evaluating a functional relation between the measured heat flow and an associated temperature is based on controlling the heating power of the heat source (1, 2) so as to cause the heat source to follow a temperature program (Tp) as a function of time superposed with a stochastic variation (FSIP), (FIG. 2).

Abstract: An improved and accurate enthalpy tunnel is presented, designed to condition and control airflow patterns within the main tunnel and air sampling subsystem so as to present a homogenous volume immediately upon introduction into the enthalpy tunnel. The air volume velocity is slowed and the air volume is completely mixed in a settling chamber which also serves to maintain the static discharge pressure on the unit under test. The rectangular design in use in the industry is replaced with circular geometry, using a cylindrical tunnel shape as opposed to a rectangular shape. The circular geometry creates a flat, uniform velocity profile. This tunnel improves the design of current art enthalpy tunnels by using a single nozzle instead of a bank of nozzles, presenting to the sampling mechanism a smooth, stable and uniform flow profile. The sampling method used in the prior art is replaced with a sampling tunnel that also conditions its air flow profile, leading to consistent sampling.

Abstract: An improved differential thermal analysis/differential scanning calorimetry (collectively, DSC) assembly with a furnace block assembly having a measurement chamber and a furnace heater. The measurement chamber has a sensor assembly for receiving a sample material and a reference material. The furnace block assembly is coupled to a generally cylindrical cooling flange through a distributed thermal resistor that allows a constrained heat flow between the furnace assembly and cooling flange. The thermal resistor can also withstand the mechanical stresses associated with the differential expansion and contraction of the furnace assembly and cooling flange without permanent deformation of the thermal resistor. The cooling flange can be coupled to various cooling devices, permitting operation of the overall DSC instrument in a variety of temperature regimes for a variety of applications.

Abstract: A calorimeter that includes a sample cell, a reference cell, a pressure system that applies a variable pressure to the sample cell, and a pressure controller that controls the pressure applied by the pressure system to the sample sell. By applying identical pressure perturbations to both the sample and reference cells over a range of temperature, the calorimeter can be used to accurately calculate both the thermal coefficient of expansion of various substances, and the volume change of molecules undergoing a structural transition.

Abstract: A method and system for non-destructive, reference-free thermographic detection of sub-surface defects uses an infrared camera to capture images of a sample that has been heated and allow to cool to equilibrium temperature. The temperature-time data obtained for each pixel in each image is converted into the logarithmic domain and a least squares fit is conducted on the data to generate a polynomial expression corresponding to the temperature-time data for a given pixel. This polynomial expression can be transformed into the original time domain to obtain temperature-time data with improved signal-to-noise characteristics. Defects can be detected by observing the zero-crossing characteristic of the second derivative of the polynomial.

Abstract: An insulating substrate provided with two types of metallic or alloy circuit patterns for detecting temperature difference between a sample side and a reference side, and also a metallic resistance circuit pattern, is fixed to a heat sink, and the heat sink is temperature controlled. If a temperature difference between the sample and the reference is detected, electrical power supplied to a compensation heater using metallic resistors is adjusted by a differential heat compensation circuit so that the temperature difference is immediately returned to zero, and a difference in supplied power is output as a differential heat flow.

Abstract: A method of measuring the absolute value of thermal conductivity of low thermal conducting solid materials is disclosed. Thermal conductivity and heat capacity of the sample are determined simultaneously in a single measurement with the prerequisite that these values are frequency independent. This method is realized on power-compensated differential scanning calorimeters without any modification in the measuring system. DSC is calibrated in a standard way for temperature and heat flow. The method uses temperature-time profiles consisting of one fast temperature jump of 0.5 to 2 K and an isotherm. The measuring time for each temperature is less than 1 min. As input parameters only sample thickness and contact area with the DSC furnace (or sample diameter if the sample is disk shaped) are needed together with sample mass. In addition to the sample thermal conductivity and heat capacity the effective thermal contact between sample and DSC furnace is determined.

Abstract: A platinum/Rhodium resistance thermal probe is used as an active device which acts both as a highly localized heat source and as a detector to perform localized differential calorimetry, by thermally inducing and detecting events such as glass transitions, meltings, recystallizations and thermal decomposition within volumes of material estimated at a few &mgr;m3. Furthermore, the probe is used to image variations in thermal conductivity and diffusivity, to perform depth profiling and sub-surface imaging. The maximum depth of the sample that is imaged is controlled by generating and detecting evanescent temperature waves in the sample.

Abstract: A method for calculating sample heat flow in a differential scanning calorimeter. A preferred embodiment of the invention calculates the heat flow to the sample while accounting for the effect of heat storage in the sample pans and the difference in heating rate between sample and reference. Accounting for heat flow associated with the pans and the difference between sample and reference heating rates gives a more accurate sample heat flow measurement and improves resolution, which is the ability to separate closely spaced thermal events in the heat flow result.

Abstract: A method of determining a thermal coefficient of expansion of a substance, the method including providing a first liquid holder containing a solution including the substance, and a second liquid holder containing a liquid in which the substance is not present; applying a pressure perturbation to the solution in the first liquid holder and to the liquid in the second liquid holder at a known temperature; determining a differential heat effect between the first and second liquid holders in response to the pressure perturbation; calculating, from the differential heat effect, the heat effect of the substance in response to the pressure perturbation; and determining, from the calculated heat effect, the thermal coefficient of expansion of the substance at the known temperature.

Abstract: A computer system having thermal control logic that efficiently cools the computer system. In accordance with one embodiment of the invention, the thermal control logic couples to a CPU module and a fan. The CPU module includes a pair of temperature response elements. One temperature response element located near or on the CPU core logic or die on which the CPU is fabricated. The other temperature response element is located near or on an exterior surface of the CPU module. The thermal control logic monitors the temperature of recorded by each temperature response element and controls the speed of the fan and the frequency of the CPU core clock independently. Preferably, the thermal control logic adjusts the fan speed as a function of the temperature recorded by the temperature element adjacent an exterior surface of the CPU module. The thermal control logic also adjusts the frequency of the CPU clock signal as a function of the temperature recorded by the temperature response element adjacent the CPU core.

Abstract: A sensor for a heat flux differential scanning calorimeter in which one absolute temperature measurement and two differential temperature measurements are used. The sensor is calibrated and used based on a four-term model heat flow equation. The calibration is carried out in two experiments which are used to calculate the sensor thermal resistance for the sample and reference positions, respectively, and the sensor heat capacity for the sample and reference positions, respectively. Differential scanning calorimeters using this sensor exhibit improved resolution, improved baseline performance and improved dynamic response.

Abstract: A power compensation differential scanning calorimeter that uses one absolute temperature measurement, two differential temperature measurements, a differential power measurement, and a five-term heat flow equation to measure the sample heat flow. The calorimeter is calibrated by running two sequential calibration experiments. In a preferred embodiment, the first calibration experiment uses empty sample and reference pans, and the second calibration experiment uses sapphire specimens in the sample and reference holders. In an alternate embodiment, sapphire calibration specimens are used in both the first and second calibration experiments.

Abstract: A sample holder and a reference holder are arranged coaxially. Heat conductors making heat exchange with a heat sink are joined to the heat sink at the same position. The inside diameter of the heat sink can be made close to the diameter of the sample container without spoiling the stability of the baseline that is a feature of heat-flux DSC. The heat capacity of the heat sink can be decreased. Therefore, the response to the temperature as it is elevated and lowered can be improved greatly.

Abstract: Humidity dependency of a physical property of the sample is evaluated while introducing the saturated vapor corresponding to the wet-bulb temperature into the sample chamber in which the temperature is controlled corresponding to the dry-bulb temperature of the wet-and dry-bulb type hygrometer. At this point, by changing the temperature corresponding to the wet-bulb temperature at the timing when physical property signals of the sample become stable, the different saturated vapor is introduced into the sample chamber, then the humidity of the sample chamber is automatically changed in a stepwise manner. The humidity of the sample chamber is always changed after the physical properties of the sample becomes stable, so that the knowledge about the time required for the sample to reach the equilibrium state is not necessary, and humidity dependency of physical properties of the sample can be measured accurately.

Abstract: Under a same heating condition as a sample to be measured, a physical property is measured for a reference substance whose temperature dependency of a physical property value is previously known. Reversely, a temperature profile of the reference substance is read so that the temperature profile is applied to a physical property measurement result for the sample. Thus, thermal analysis for the large diameter sample is made accurately without the necessity of arranging a temperature sensor in the vicinity of the sample.

Abstract: A heat flux type differential scanning calorimeter has a heat reservoir made of a thermal conducting material. A thermally conductive plate is disposed in the heat reservoir for supporting an unknown sample and a reference sample symmetrically with respect to a center of the reservoir. A thermally conductive support member is disposed in contact with the thermally conductive plate and supports the thermally conductive plate in the heat reservoir. A heat buffer plate is disposed between the thermally conductive support member and the heat reservoir so that the thermally conductive support member and the heat reservoir are contacted only through the heat buffer plate.

Abstract: A device for measuring the thermal conductivity of a fluid comprising a first detection section with at least one duct in which a gas flows and at least one heat sensitive resistance element placed in that duct, and a second detection section for the detection of an electrical resistance of the heat sensitive resistance elements. The device also comprises a thermoregulator to maintain the first detection section at a constant first temperature and a further thermoregulator to maintain at least part of the second detection section at a constant second temperature independent of the first temperature.

Abstract: A calorimeter that includes a sample cell, a reference cell, a pressure system that applies a variable pressure to the sample cell, and a pressure controller that controls the pressure applied by the pressure system to the sample cell. By applying identical pressure perturbations to both the sample and reference cells over a range of temperatures, the calorimeter can be used to accurately calculate both the thermal coefficient of expansion of various substances, and the volume change of molecules undergoing a structural transition.

Abstract: A method for calculating sample heat flow in a differential scanning calorimeter. A preferred embodiment of the invention calculates the heat flow to the sample while accounting for the effect of heat storage in the sample pans and the difference in heating rate between sample and reference. Accounting for heat flow associated with the pans and the difference between sample and reference heating rates gives a more accurate sample heat flow measurement and improves resolution, which is the ability to separate closely spaced thermal events in the heat flow result.

Abstract: A thermal analyzer scans temperature by thermally altering a sample and measuring a thermal change based on physical and chemical changes of the sample as a function of time and/or temperature. The thermal analyzer includes a heat-generating section for heating a sample. The heat-generating section includes a first semiconductor substrate of a first conductivity type forming a thin-film heater with a cavity section in a lower section thereof and a second semiconductor substrate of a second conductivity type connected to the first substrate. The cavity section forms a sample holding section for holding the sample. The thermal analyzer further includes a temperature detecting section for detecting a temperature of the sample holding section. The sample holding section and the temperature detecting section are monolithically formed on the thin-film heater or an area proximate the thin-film heater in a thin-film supporting section for supporting the thin-film heater.