Abstract: A temperature sensing device for an integrated circuit comprises an oscillator (2) having a characteristic frequency dependent on the temperature and a digital counter (16) arranged to count a number of pulses generated by the oscillator (2) in a given time interval, or the time taken for the oscillator to generate a given number of pulses. Either of these gives a measured value. The device is configured to use a difference between the measured value and a stored reference value in a linearisation algorithm to estimate a temperature.

Abstract: The present invention relates to a temperature detection device for detecting the bottom temperature of cookware on a cooking hob (10). The temperature detection device comprises a pad (16) formed as a flat sheet. The pad (16) is provided for covering at least one cooking zone of the cooking hob (10). The pad (16) is provided as an underlayment of the cookware. The pad (16) is made of a heat resistant material. The temperature detection device comprises at least one SAW (surface acoustic wave) temperature sensor (18). The temperature detection device comprises at least one sensor antenna (20). The SAW temperature sensor (18) is electrically connected to the sensor antenna (20). The SAW temperature sensor (18) is embedded inside the pad (16). The sensor antenna (20) is embedded inside the pad (16) or arranged in a casing (24) above the pad (16).

Abstract: An ultrasonic thermometer for measuring a temperature profile along a measurement axis of a structure, comprising a continuous measurement pathway of a structure (310) having a longitudinal measurement axis and proximal (202) and distal ends (204), and at least two backscatterers (332) formed therein transverse to the longitudinal axis and separated by a predetermined separation distance.

Abstract: A crystal oscillator (31) (Y-cut) has a temperature characteristic in which its oscillating frequency significantly changes with temperature, whereas a crystal oscillator (32) (AT-cut) has a temperature characteristic in which its oscillating frequency is stable with temperature. Crystal oscillators (31, 32) are cut from a raw material of the same type and configured to be substantially equal in shape, material, and size, and provide a combination of oscillation frequencies such that the frequency of a signal generated by a differential frequency circuit (35) will be less than or equal to 10 kHz within a measuring temperature range of 21 to 30° C. The frequency of a signal generated by differential frequency generating circuit (35) is output to a measurement apparatus main unit and a frequency counting circuit (15) measures the frequency of this signal by a reciprocal counting method to obtain at least eight or more significant digits.

Abstract: A piezoelectric device package may include: a case having a plurality of terminals disposed on a lower surface thereof; a piezoelectric device disposed in the case; a temperature measuring device disposed on one surface of the piezoelectric device in the case and having a thin film form; and a cover member enclosing an upper portion of the case.

Abstract: A piezoelectric device package may include: a case having a plurality of terminals formed on a lower surface thereof; a piezoelectric device formed in the case; a temperature measuring device formed on the lower surface of the case and having a thin film form; and a cover member enclosing an upper portion of the case.

Abstract: A temperature sensing device for an integrated circuit comprises an oscillator (2) having a characteristic frequency dependent on the temperature and a digital counter (16) arranged to count a number of pulses generated by the oscillator (2) in a given time interval, or the time taken for the oscillator to generate a given number of pulses. Either of these gives a measured value. The device is configured to use a difference between the measured value and a stored reference value in a linearisation algorithm to estimate a temperature.

Abstract: Methods and apparatuses for Micro-Electro-Mechanical Systems (MEMS) resonator to monitor temperature in an integrated circuit. Fabricating the resonator in an interconnect layer provides a way to implement thermal detection means which is tolerant of manufacturing process variations. Sensor readout and control circuits can be on silicon if desired, for example, a positive feedback amplifier to form an oscillator in conjunction with the resonator and a counter to count oscillator frequency.

Abstract: Methods and apparatuses for Micro-Electro-Mechanical Systems (MEMS) resonator to monitor the platform temperature. Fabricating the resonator on a relatively low cost flexible polymer substrate rather than silicon provides mechanical flexibility as well as design flexibility with respect to sensor placement. Sensor readout and control circuits can be on silicon if desired, for example, a positive feedback amplifier to form an oscillator in conjunction with the resonator and a counter to count oscillator frequency.

Abstract: An apparatus and method for determining temperature is disclosed. An ultrasonic signal is generated that propagates through a buffer and a portion of the signal is reflected at an interface. A time of flight is measured between generating the ultrasonic signal and detecting the reflected portion. The temperature is determined based on the time of flight of the reflected signal.

Abstract: There are provided an apparatus and a method for measuring a temperature. The apparatus includes: a temperature sensor measuring a temperature and providing the measured temperature; a temperature comparing unit comparing the measured temperature with a preset reference temperature and providing a comparison result signal; a quartz oscillating unit generating an oscillating frequency signal according to temperature; a frequency counting unit counting a frequency of the oscillating frequency signal and providing a frequency count value; and a signal processing unit determining a temperature according to the comparison result signal and the frequency count value.

Abstract: Methods and systems are disclosed for determining an amount of bond between a structure and sensor. A method may include performing a process associated with a sensor bonded to a structure and generating measured data in response to the process. The method may further include comparing the measured data to known reference data to determine integrity of a bond between the sensor and the structure. A system may include a sensor system including at least one sensor bonded to a structure. The system may further include a sensing system configured to initiate an application of one or more stimuli to the at least one sensor and monitor a property associated with the at least one sensor. The sensing system may further be configured to determine an amount of bond between the at least one sensor and the structure based on the monitored property.

Abstract: The present invention relates to a temperature information assembly for a cooking hob (18). The temperature information assembly comprises at least one SAW (surface acoustic wave) temperature sensor (10) permanently or removably attached or attachable at or in a cooking pot (24), at least one sensor antenna (12) permanently or removably attached or attachable at the cooking pot (24) and electrically connected to the SAW temperature sensor (10), at least one reader (14) permanently or removably attached or attachable in or on the cooking hob (18), and at least one reader antenna (16) permanently or removably attached or attachable in or on the cooking hob (18) and electrically connected to the reader (14). The SAW temperature sensor (10) is wireless connected or connectable to the reader (14) via the sensor antenna (12) and the reader antenna (16). The reader (14) is electrically connected or connectable to a control unit (22) of the cooking hob (18) in order to control the cooking process.

Abstract: A device for detecting the temperature of an asphalt material to be processed by a road finishing machine includes at least one temperature measuring head, the at least one temperature measuring head being integrated into an ultrasonic sensor for detecting the filling level of the asphalt material.

Abstract: An acoustic signal traversing a hot gas is sampled at a source and a receiver and is represented in overlapping windows that maximize useable signal content. Samples in each window are processed to represented in different sparsified bins in the frequency domain. Determining a signal delay between the source and the receiver from a summation of maximum smoothed coherence transform cross-correlation values of different data windows wherein a sparseness of a mean smoothed coherence transform cross-correlation of windows is maximized. Determining a set of delay times wherein outliers are deleted to estimate a time of flight from which a temperature of the hot gas is calculated.

Abstract: A condition measurement apparatus is provided and includes a gas turbine engine combustor having an end cover, a liner defining a liner interior and a fuel nozzle communicative with the liner interior, the end cover being formed to separate a cold side thereof, which is a relatively low temperature environment, from a hot side thereof, which is a relatively high temperature environment in which the liner and the fuel nozzle are disposed, the combustor being formed to define a fuel flow path extending through piping disposed at the cold side of the end cover by which fuel is deliverable to the fuel nozzle, and a condition sensing device operably mounted on the piping.

Abstract: A wireless temperature sensor includes an electrical conductor and a dielectric material on the conductor. The conductor is electrically unconnected and is shaped for storage of an electric field and a magnetic field. In the presence of a time-varying magnetic field, the conductor resonates to generate harmonic electric and magnetic field responses, each of which has a frequency associated therewith. The material is selected such that it experiences changes in either dielectric or magnetic permeability attributes in the presence of a temperature change. Shifts from the sensor's baseline frequency response indicate that the material has experienced a temperature change.

Abstract: This temperature sensor (2) includes an HBAR resonator (10), a unit (20) for determining the difference between two distinct resonance frequencies at a temperature T, measured between two electrodes of a same pair of the HBAR resonator and a unit (30) for determining the temperature of the resonator from the difference in frequencies and from a one-to-one function providing the match between the temperature and the frequency difference. The resonator (10) is formed by a stack of a first electrode (18), a transducer (12), a second electrode (19), and acoustic substrate (14) and the cuts of the transducer (12) and of the substrate (14) are selected so as to obtain high electro-acoustic couplings and a difference in frequency temperature sensitivities between two distinct vibration modes co-existing within the resonator, greater than or equal to 1 ppm·K?1.

Abstract: A system and method for monitoring the properties of a fluid, such as water, in a steam pipe without mechanically penetrating the wall of the pipe. The system uses a piezoelectric transducer to launch an ultrasonic probe signal into the pipe. Reflected ultrasonic signals are captured in a transducer, which can be the same transducer that launched the probe signal. The reflected signals are subjected to data processing, which can include filtering, amplification, analog-to-digital conversion and autocorrelation analysis. A result is extracted which is indicative of a property of the fluid, such as a height of the condensed fluid, a cavitation of the condensed fluid, and a surface perturbation of the condensed fluid. The result can be recorded, displayed, and/or transmitted to another location. One embodiment of the system has been constructed and tested based on a general purpose programmable computer using instructions recorded in machine-readable non-volatile memory.

Abstract: The invention is a device for measuring the temperature of the vibrating beam of a vibrating-beam sensor. It comprises a resonator (10) vibrating in torsion in resonant mode and exhibiting a torsional vibration node (N), said node being its zone of fixing in the vicinity of the middle of the length (L3) of the vibrating beam, said fixing allowing thermal transfers between the resonator and the beam. The frequency of the resonator and the variations of this frequency are representative respectively of the mean temperature T of the beam and of the variations of this temperature T, the effects of which may be compensated by a model.

Abstract: Methods and systems (10) based on guided wave thermography for non-destructively inspecting structural flaws that may be present in a structure (15). For example, such systems and methods may provide the ability to selectively deliver sonic or ultrasonic energy to provide focusing and/or beam steering throughout the structure from a fixed transducer location (12, 14, 16). Moreover, such systems and methods may provide the ability to selectively apply sonic or ultrasonic energy having excitation characteristics (FIGS. 11 and 12) which may be uniquely tailored to enhance the thermal response (FIGS. 5 and 7) of a particular flaw geometry and/or flaw location.

Abstract: Continuous casting moulds used in automated installations casting metal melts into strands require comprehensive, reliable real-time monitoring. Currently used systems are susceptible to damage and limited to just a few sensors, as arrangements involving a higher number of sensors have proven impractical due to the substantial effort they cause when exchanging a mould. To overcome this obstacle it is suggested to use wirelessly interrogable passive surface acoustic wave (SAW) sensors for monitoring of physical parameters in continuous casting moulds, and install at least one wireless link section in the signal path between SAW sensors and their reader devices. Continuous casting moulds thus become easily exchangeable with their sensors installed, making it industrially practicable to equip continuous casting moulds with a significantly higher number of sensors than previously feasible.

Abstract: An ultrasonic surgical apparatus and method of use including a signal generator outputting a drive signal having a frequency, an oscillating structure, receiving the drive signal and oscillating at the frequency of the drive signal, a bridge circuit, detecting the mechanical motion of the oscillating structure and outputting a signal representative of the mechanical motion, and a microcontroller receiving the signal output by the bridge circuit, the microcontroller determining an instantaneous frequency at which the oscillating structure is oscillating based on the received signal, and comparing the instantaneous frequency to a known frequency value and estimating a temperature of the oscillating structure based on the comparison.

Abstract: A novel measurement technique is employed using surface acoustic wave (SAW) devices, passive RF, and radiation-sensitive films to provide a wireless passive radiation sensor that requires no batteries, outside wiring, or regular maintenance. The sensor is small (<1 cm2), physically robust, and will operate unattended for decades. In addition, the sensor can be insensitive to measurement position and read distance due to a novel self-referencing technique eliminating the need to measure absolute responses that are dependent on RF transmitter location and power.

Abstract: The invention relates to an integrated temperature sensor (1) comprising: means (2000) for generating a pulse train (DATA_IN) at an oscillation frequency, means (3000) for counting the number of pulses during a fixed period of time independent of a temperature to be measured (T) and for generating a plurality of bits (b11, b10, . . . , b0) indicating the number of pulses in the pulse train (DATA_IN), and means (4000) for generating a serial digital signal (DATA_OUT) from said bits (b11, b10, . . . , b0), in which the means (2000) for generating a pulse train (DATA_IN) include a plurality of logic gates (2410, 2420, 2430, 2440, 2450) which can introduce a delay dependent on the temperature to be measured (T), said means (2000) generating a pulse train (DATA_IN) the oscillation frequency of which is dependent on said temperature to be measured (T). The invention also relates to a temperature measurement method and to a transponder for a wireless system.

Abstract: A temperature measurement system capable of operating in harsh environments including a temperature sensor having an antenna, diode, and dielectric layer disposed on the object of interest is provided, wherein the antenna includes a buried portion that extends through and is electrically coupled to the object of interest, and an exposed portion disposed upon an outer surface of the dielectric layer and the diode is coupled between the object of interest and the exposed portion of the antenna. The antenna is configured to receive interrogating signals from a transmitter, and to transmit response signals corresponding to the resonant frequency of the temperature sensor and its harmonics, which are indicative of the measured temperature of the object of interest. A receiver detects the response signals and correlates the frequency to a known temperature response of the dielectric material. Methods of making and using the temperature measurement system are also provided.

Abstract: A system for use in freezing or thawing a biopharmaceutical material includes a container means and a support member. The container means has a receiving cavity receiving the biopharmaceutical material therein. The support member is connected to and supported by the container means. A transmitter is configured to propagate an ultrasonic pulse into the biopharmaceutical material and is located in a support member cavity of the support member. An ultrasonic sensor is configured to sense a reflection of the pulse in the biopharmaceutical material and is located in the support member cavity. A controller is coupled to the transmitter and the sensor. The controller is configured to determine a phase change of the biopharmaceutical material based on the propagation of the pulse by the transmitter and the sense of the reflection by the sensor.

Abstract: A pressure and temperature sensor comprising comprises at least a first resonator of the SAW type comprising a piezoelectric substrate, thinned at least locally, of the membrane type, a second resonator of the SAW type comprising a piezoelectric substrate and a third resonator of the SAW type comprising a piezoelectric substrate, characterized in that the first, the second and the third resonators are respectively on the surface of first, second and third individual piezoelectric substrates, each of the individual substrates being positioned on the surface of a common base section, locally machined away under said first resonator in such a manner as to liberate the substrate from said resonator so as to render it operational for the measurement of pressure. A method of fabrication for such a sensor is also provided.

Abstract: The present invention relates to a measurement method of dew-point in low temperature, and more specifically to a measurement method of accurately distinguishing dew-point and frost-point using a quartz crystal microbalance dew-point sensor in a low temperature of 0° C. or less. To this end, the present invention provides a measurement method of distinguishing dew and frost point using a quartz crystal microbalance dew-point sensor in low temperature, comprising the steps of: measuring a resonant frequency of a quartz crystal microbalance dew-point sensor while slowly dropping temperature; observing shock waves of the resonant frequency; and determining dew point or frost point through the observation of the resonant frequency and shock waves of the quartz crystal microbalance dew-point sensor.

Abstract: An approach for the thermomechanical characterization of phase transitions in polymeric materials (polyethyleneterephthalate) by band excitation acoustic force microscopy is developed. This methodology allows the independent measurement of resonance frequency, Q factor, and oscillation amplitude of a tip-surface contact area as a function of tip temperature, from which the thermal evolution of tip-surface spring constant and mechanical dissipation can be extracted. A heating protocol maintained a constant tip-surface contact area and constant contact force, thereby allowing for reproducible measurements and quantitative extraction of material properties including temperature dependence of indentation-based elastic and loss moduli.

Abstract: An ultrasonic thermometer for measuring a temperature profile along a measurement axis of a solid structure, comprising a continuous measurement pathway of a solid structure (310) having a longitudinal measurement axis and proximal (202) and distal ends (204), and at least two backscatterers (332) formed therein transverse to the longitudinal axis and separated by a predetermined separation distance.

Abstract: A method for performing ultrasonic testing comprising, in one embodiment, the steps of firing an ultrasonic transducer to generate an ultrasonic pulse that passes through a delay line, measuring a delay echo time of flight, and determining the temperature of the delay line using the delay echo time of flight, thereby eliminating the need for additional temperature measuring devices. Other embodiments further comprise the step of using the temperature of the delay line to determine the temperature of a test object, and using the temperature of the test object to determine a thickness of the test object that is compensated for thermal expansion and temperature dependent ultrasonic velocity.

Abstract: A temperature sensing apparatus and method are described to detect a change in a frequency due to a change in a temperature. An infrared light sensing apparatus and method are also provided. The temperature sensing apparatus may include an electrode to generate an electrical signal, a piezoelectric layer to convert the electrical signal into an acoustic wave, and a temperature sensitive layer formed by doping impurities in one or more structures formed on a substrate. Additionally, the infrared light sensing apparatus may convert into heat infrared light incident to an infrared light absorption layer, using an infrared light reflection layer and the infrared light absorption layer. A temperature sensitive layer may detect a change in a resonant frequency based on a change in a temperature of the heat, and may detect a change in infrared light based on the change in the resonant frequency.

Abstract: A system for compensating a thermal effect is provided and includes a substrate structure and a microcantilever. The substrate structure includes a first piezoresistor. The first piezoresistor is buried in the substrate structure and has a first piezoresistance having a first relation to a first variable temperature. The microcantilever has the thermal effect and a second piezoresistance having a second relation to the first variable temperature, wherein the thermal effect is compensated based on the first and the second relations.

Abstract: A temperature measuring probe with a hollow outer shell including an electrically conductive section and an electrically insulating section. A temperature sensor including a resonator is disposed in the electrically conductive section and electrically conductively connected to the electrically conductive section. An antenna including a shortened monopole is disposed in the electrically insulating section. The temperature sensor and the antenna are electrically conductively connected to each other. A respective material and respective dimension of the electrically insulating section and the antenna are matched such that an effective resistance of the antenna is approximately equal to an effective resistance of the temperature sensor in an operating frequency range of the temperature sensor.

Abstract: A temperature measurement system capable of operating in harsh environments including a temperature sensor having an antenna, diode, and dielectric layer disposed on the object of interest is provided, wherein the antenna includes a buried portion that extends through and is electrically coupled to the object of interest, and an exposed portion disposed upon an outer surface of the dielectric layer and the diode is coupled between the object of interest and the exposed portion of the antenna. The antenna is configured to receive interrogating signals from a transmitter, and to transmit response signals corresponding to the resonant frequency of the temperature sensor and its harmonics, which are indicative of the measured temperature of the object of interest. A receiver detects the response signals and correlates the frequency to a known temperature response of the dielectric material. Methods of making and using the temperature measurement system are also provided.

Abstract: There is provided a wireless measuring apparatus that efficiently measures the frequency characteristics of a sensor unit mounted on an object to be measured. The wireless measuring apparatus is a wireless measuring apparatus that measures the frequency characteristics of a sensor unit (10) mounted on an object (40) to be measured, including the sensor unit (10) having a piezo-resonator (11), an antenna (20) that forms a circuitry with the sensor unit (10), and a measuring element (30) that supplies high frequency electricity changed in different frequency to the circuitry and measures the frequency characteristics of the reflected electricity strength received from the circuitry.

Abstract: A SAW-based micro-sensor apparatus for simultaneously monitoring acceleration/vibration and temperature utilizing a sensing element configured as a SAW device (e.g., SAW resonator or SAW delay line). The SAW device can be located in different locations on a substrate with respect to a thin piezoelectric diaphragm comprising an inertial mass. The temperature-compensated acceleration/vibration can be measured utilizing a frequency difference between an acceleration sensitive SAW resonator (e.g., SAW-g) and a temperature sensitive SAW resonator (e.g., SAW-T). The temperature can be measured utilizing a frequency shift provided by the SAW-T and a temperature reference SAW resonator (e.g., SAW-R). Similarly, the phase response of different reflectors of the SAW delay line can be utilized to differentially measure the acceleration/vibration and temperature.

Abstract: A temperature-measuring substrate (50) for use in a heat treatment apparatus (2) for performing heat treatment of a substrate W to be processed, includes: a substrate body (62); an oscillator (64) including a piezoelectric element (68) and provided in the substrate body; and an antenna portion (66) connected to the oscillator and provided beside or around the periphery of the substrate body. The temperature-measuring substrate can reduce the attenuation of radio waves emitted by the oscillator.

Abstract: Disclosed is an oscillator that relies on redundancy of similar resonators integrated on chip in order to fulfill the requirement of one single quartz resonator. The immediate benefit of that approach compared to quartz technology is the monolithic integration of the reference signal function, implying smaller devices as well as cost and power savings.

Abstract: A wireless passive temperature sensor comprising a surface acoustic wave (SAW) delay line is constructed on a piezoelectric substrate having a thermal coefficient of frequency. An array of addressable, wireless passive temperature sensors can be used to monitor an array of temperature points on a structure using a wireless reader. Each sensor can be monitored by measuring the frequency of maximum reflection in their respective bands. A wireless passive heat flux gauge uses two temperature sensors with different frequency and/or time delay responses to measure that temperature differential across a thermal conductor that has a well characterized thermal conductivity and thickness.

Abstract: Aspects of a method and system for a temperature sensing crystal Integrated circuit with digital temperature output are provided. In this regard, an indication of temperature may be generated in an integrated circuit (IC) comprising a memory, a crystal or crystal oscillator, and at least a portion of an analog-to-digital converter. The temperature indication may be digitized via the analog-to-digital converter. Operation of one or more circuits may be controlled based on the digital temperature indication. The digital temperature indication may be communicated over a communication bus. An analog portion of the analog-to-digital converter may be integrated in the IC and may comprise, for example, a delta-sigma modulator. A digital portion of the analog-to-digital converter may be external to the IC and may comprise, for example, a digital filter.

Abstract: A sensor system for determining a physical, measured variable, and includes a sensor and a control/evaluation unit, which are spatially separated from one another and electrically conductively connected via a cable having at least two conductors, wherein provided in the sensor are a temperature measuring element for determining temperature and a sensor identifier for sensor identification. The control/evaluation unit drives the temperature measuring element and the sensor identifier via a shared conductor with a positive voltage or a negative voltage, and, depending on the applied voltage, reads a temperature measured value of the temperature element or an identifying value of the sensor identifier.

Abstract: A stirring determining device that determines whether stirring by a stirrer, which stirs liquid contained in a vessel using sound wave generated by a sound-wave generating unit that is attached to the vessel, is successful or unsuccessful. The stirring determining device includes a temperature sensor that measures a temperature of the liquid; and a determining unit that determines whether stirring of the liquid contained in the vessel is successful or unsuccessful depending on the temperature of the liquid measured at least before and after the stirring by the temperature sensor.

Abstract: Methods of performing ultrasonic testing are disclosed, comprising the step of determining a temperature gradient of an ultrasonic wedge. In one embodiment of the invention, the method further comprises the steps of determining a sound velocity gradient of the ultrasonic wedge to determine the time it takes for sound waves emanating from a plurality of ultrasonic transducer elements attached to the ultrasonic wedge to reach a point of interest within a test object, and firing each of the ultrasonic transducer elements in a timed sequence based on the times such that sound waves from each of the ultrasonic transducer elements reach the point of interest at the same time. In other embodiments of the invention, the total attenuation and acoustic impedance of a sound wave traveling through the ultrasonic wedge is determined to adjust the amplitude of the sound wave such that the sound wave has sufficient amplitude to perform the ultrasonic testing.

Abstract: A method for assembling a sensor assembly for use with a turbomachine is provided. The method includes providing a cover that includes a first portion and a second portion that extends from the first portion. A cavity is defined within the first portion. Moreover, a sensing device that is configured to measure at least one variable of a component of the turbomachine is inserted into the cavity. The second portion is removably coupled to a surface of the turbomachine component such that the cover securely couples the sensing device to the turbomachine component.

Abstract: A ground-contacting component of a vehicle, consisting partly of polymeric compounds, in which at least one wireless temperature measurement system 7 based on surface acoustic wave or bulk acoustic wave technology is embedded in a region of a polymeric compound liable to reach temperatures above 100° C. and/or to be influenced by a surrounding region of a polymeric compound liable to reach temperatures above 100° C. during use of the vehicle. Also disclosed are a tire 1 and the use of a wireless temperature measurement system based on acoustic surface wave or bulk acoustic wave technology.

Abstract: The invention provides an insulated container having a temperature monitoring device that can be used to maintain an object stored in the container at a temperature that is below the normal operating temperature of the temperature monitoring device while still permitting the taking of measurements of the interior of the container. The container includes an RF transponder having an RF antenna, a temperature sensor, and a battery that is operatively connected to the transponder and the temperature sensor. The temperature sensor is positioned in the container so that it is in a temperature monitoring relationship with the interior space of the container. The battery is positioned at least partially in one of the walls of the container at a location that is spaced apart from the temperature sensor and that is selected so that the battery does not experience a temperature that is below an operating temperature of the battery.

Abstract: A micromechanical device includes a micromechanical functional structure and an electromagnetic radiation heating associated with the micromechanical functional structure, which is formed to cause a spatially and temporally defined temperature or a spatially and temporally defined temperature course in the micromechanical functional structure.

Abstract: The present invention provides a heating apparatus for heating objects to be processed, which can detect a temperature of the objects to be processed with higher precision and accuracy, thereby to achieve higher precision temperature control. A heating apparatus 2 includes a processing vessel 8 configured to contain therein a plurality of objects W to be processed, the objects W including objects 58a to 58e to be processed for temperature measurement, each object 58a to 58e having each corresponding elastic wave element 60a to 60e, a heating means 10 adapted for heating the objects W to be processed, and a holding means 22 adapted to hold the objects W to be processed. To the processing vessel 8, a transmitter antenna 52 adapted to transmit an electric wave for measurement toward each elastic wave element 60a to 60e, and a receiver antenna 52 adapted to receive an electric wave having a frequency corresponding to the temperature and generated from each elastic wave element 60a to 60e are provided.