Having Emissivity Compensating Or Specified Radiating Surface Patents (Class 374/126)
  • Patent number: 10282955
    Abstract: A heat transfer sensor includes a support body, a first thermocouple probe, a second thermocouple probe, and a third thermocouple probe. Each thermocouple probe is mounted to the support body and includes a hollow cylinder, a thermocouple, and an insulator. The thermocouple is mounted to an interior of the associated hollow cylinder and is configured to generate a first voltage based on a temperature of the associated hollow cylinder. The insulator is mounted between the associated hollow cylinder and the top wall. The first hollow cylinder has an emissivity ?0.25. The second hollow cylinder has an emissivity ?0.75. The third thermocouple probe has an emissivity that is >0.25 and <0.75 or measures a temperature of an environment surrounding the support body. A convective heat transfer and an incident radiation are computed using the first and second voltage and either the third voltage or the air temperature.
    Type: Grant
    Filed: May 18, 2017
    Date of Patent: May 7, 2019
    Inventors: Rodman Linn, Scott Goodrick, Joseph John O'Brien
  • Patent number: 10184804
    Abstract: A sensor interface or network of interfaces utilizes high-temperature electronics to operate at elevated temperatures for applications that include aircraft and automobile engines, vehicle frames, refineries, nuclear and chemical production plants, and in downhole drilling for petroleum and natural gas. The interface or network provide connectors for a variety of sensors with analog and digital outputs, and can in turn provide data to an automated electronic control system or a monitor. Because the sensor interface may be placed in so-called “hot zones” nearer to the sensors being monitored than other systems that use conventional electronics, the sensor interface can increase noise immunity, increase reliability, decrease cost, reduce weight, and increase space.
    Type: Grant
    Filed: January 16, 2014
    Date of Patent: January 22, 2019
    Assignee: Orbital Research Inc.
    Inventors: Michael C. Willett, Greg S. Shaw
  • Patent number: 10175091
    Abstract: A remote sensor control system provides a sensor reading from an insulated environment at a certain interval dependent upon the threat level. The remote sensor control system has a control module and a remote module. The control module is disposed outside the insulated environment. The control module includes an energy source configured to produce an energy beam. The remote module is disposed at least partially within the insulated environment. The remote module is configured to receive the energy beam from the energy source. The remote module includes a battery, a sensor reader configured to sample a sensor, and an optical power gate configured to provide power from the battery to the sensor reader upon receiving said energy beam from the energy source.
    Type: Grant
    Filed: December 9, 2016
    Date of Patent: January 8, 2019
    Assignee: Altec Industries, Inc.
    Inventor: Joshua Daniel Mueller
  • Patent number: 10142722
    Abstract: According to some embodiments of the present invention there is provided a method of using an earphone output speaker as a microphone for a phone call between two and/or more participants, or for measuring biometric data of a user. The method may comprise playing a received signal to an electro-acoustic output transducer of an earphone. The method may comprise instructing an audio processing circuit of a local client terminal to record an audio signal from the same electro-acoustic output transducer. The method may comprise calculating a voice signal and/or a biometric measurement based on a function combining the recorded audio signal, the received signal, and filtration coefficients, using a processing unit of the local client terminal. The method may comprise sending the voice signal and/or a biometric measurement through an output interface of the local client terminal.
    Type: Grant
    Filed: May 18, 2015
    Date of Patent: November 27, 2018
    Assignee: Bugatone Ltd.
    Inventors: Edmund Ben-Ami, Noam Petrank
  • Patent number: 10107689
    Abstract: Provided are: an infrared temperature sensor which is reduced in film deformation and achieves higher accuracy, while ensuring reliability; and a device which uses this infrared temperature sensor. An infrared temperature sensor is provided with: a film which absorbs infrared light; a case which covers and holds the film so as to form airtight spaces between itself and the film, and which is provided with a light guide part that has an opening and guides infrared light and a shielding part that has a shielding wall and shields infrared light; ventilation portion which allow air permeation between the spaces and the outside; a heat-sensitive element for infrared detection, which is arranged on the film at a position that corresponds to the light guide part; and a heat-sensitive element for temperature compensation, which is arranged on the film at a position that corresponds to the shielding part.
    Type: Grant
    Filed: August 6, 2014
    Date of Patent: October 23, 2018
    Assignee: SEMITEC Corporation
    Inventor: Toshiyuki Nojiri
  • Patent number: 10101213
    Abstract: A system and method for calibrating an imaging system includes a shutter that is moveable in to the optical path of the imaging system to generate an image of the shutter surface, which is flat and uniform. The shutter can be moved in and out of the optical path between first and second positions. The shutter is heated while in the second position and then returned to the first position. Data sets generated at two different temperatures enable the image generated by the imaging system in normal use to be to be adjusted for responsivity and variation in DC offset of the specific pixel array.
    Type: Grant
    Filed: August 12, 2014
    Date of Patent: October 16, 2018
    Assignee: LEONARDO MW LTD
    Inventor: Luke Alexander Pillans
  • Patent number: 10024719
    Abstract: A measuring object for use in a heating apparatus for the thermal treatment of substrates is described, wherein the measuring object is the substrate to be treated or an object which in use has a substantially known temperature relation to the substrate to be treated, wherein the measuring object comprises a surface having at least one surface area, which acts as a measuring surface for an optical temperature measurement. A predetermined structure in the form of a plurality of recessions is formed in the surface area, in order to influence the emissivity of the surface area.
    Type: Grant
    Filed: June 13, 2014
    Date of Patent: July 17, 2018
    Assignee: CENTROTHERM PHOTOVOLTAICS AG
    Inventors: Dieter Zernickel, Steffen Mueller
  • Patent number: 9970821
    Abstract: A high SNR in-situ measurement of sample radiance in a low-temperature ambient environment is used to accurately characterize sample emissivity for transmissive, low-emissivity samples. A low-e mirror is positioned behind the sample such that the sample and low-e mirror overfill the field-of-view (FOV) of the radiometer. The sample is heated via thermal conduction in an open environment. Thermal conduction heats the sample without raising the background radiance appreciably. The low-e mirror presents both a low emission background against which to measure the sample radiance and reflects radiance from the back of the sample approximately doubling the measured signal. The low-e mirror exhibits a reflectance of at least 90% and preferably greater than 98% and an emissivity of at most 7.5% and preferably less than 2% over the spectral and temperature ranges at which the sample emissivity is characterized.
    Type: Grant
    Filed: April 16, 2015
    Date of Patent: May 15, 2018
    Assignee: Raytheon Company
    Inventors: Steven F. Cook, Colton L. Noble, Justan V. Forsyth
  • Patent number: 9927308
    Abstract: A system for calibrating sensors in a wafer is provided. The system includes a container for containing liquid and configured to accommodate the wafer in the liquid; a temperature controller for controlling a temperature of the liquid; and an electrical connection mechanism for receiving electrical signals to the sensors when the temperature of the liquid reaches a preset level during operation. The system also includes a device that receives the signals from the sensors and calibrates the sensors based on the temperature of the liquid and the received signals from the sensors.
    Type: Grant
    Filed: May 11, 2015
    Date of Patent: March 27, 2018
    Assignee: Maxim Integrated Products, Inc.
    Inventors: Dewight Lee Warren, Chad David Erickson, Benjamin Alvin Draper
  • Patent number: 9865513
    Abstract: A semiconductor device manufacturing method includes an element forming step of forming an element structure on a front surface of a substrate and forming a back structure on a back surface of the substrate, and a film forming step of performing film forming on a front surface of the element structure while measuring the temperature of the substrate by using a radiation thermometer that applies infrared rays of a wavelength ?i to the back structure to obtain an infrared emissivity of the substrate. The back structure has a first layer exposed to the outside and a second layer in contact with the first layer, the refractive index of the second layer being smaller than that of the first layer, and the layer thickness of the first layer is set in a range from (2n?1)?i/8 to (2n+1)?i/8, with n being a positive even number.
    Type: Grant
    Filed: May 21, 2014
    Date of Patent: January 9, 2018
    Assignee: Mitsubishi Electric Corporation
    Inventors: Takuichiro Shitomi, Kazuhisa Koga, Satoshi Rittaku
  • Patent number: 9795305
    Abstract: A temperature probe includes a handle and a shaft extending from the handle. The shaft includes a distal end, a proximal end, and a tip at the distal end. The temperature probe also includes a capacitance sensor disposed on one of the handle and the shaft, the capacitance sensor configured to measure a change in capacitance when positioned proximate a conductor. The temperature probe further includes a temperature sensor disposed on the shaft, the temperature sensor configured to measure a body cavity temperature of a patient.
    Type: Grant
    Filed: February 5, 2016
    Date of Patent: October 24, 2017
    Assignee: Welch Allyn, Inc.
    Inventors: Matthew D. Mullin, Matthew J. Kinsley, Eric Andreassen, David E. Quinn, Henry J. Smith, III, John A. Lane, John Delaney, Scott A. Martin, Michael J. Anson
  • Patent number: 9623675
    Abstract: A liquid discharging apparatus includes a discharge unit that is capable of discharging a liquid, a heating unit that is capable of heating a medium onto which the liquid is discharged, a detection unit that detects an energy that is emitted from a detection range, a control unit that is capable of changing an output of the heating unit on the basis of an energy that the detection unit detects, and a sensing target portion, which has a sensing target surface from which an energy is detected by the detection unit, and the sensing target surface is processed in order to reduce mirror reflection of input light.
    Type: Grant
    Filed: June 4, 2015
    Date of Patent: April 18, 2017
    Assignee: Seiko Epson Corporation
    Inventor: Osamu Hara
  • Patent number: 9612056
    Abstract: An apparatus, a system and a method are disclosed. An exemplary apparatus includes a first portion configured to hold an overlying wafer. The first portion includes a central region and an edge region circumscribing the central region. The first portion further including an upper surface and a lower surface. The apparatus further includes a second portion extending beyond an outer radius of the wafer. The second portion including an upper surface and a lower surface. The lower surface of the first portion in the central region has a first reflective characteristic. The lower surface of the first portion in the edge region and the second portion have a second reflective characteristic.
    Type: Grant
    Filed: March 23, 2012
    Date of Patent: April 4, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yi-Hung Lin, Li-Ting Wang, Tze-Liang Lee
  • Patent number: 9516243
    Abstract: A surface of an object is irradiated using an infrared light beam. The infrared light beams reflected at the object are received by an infrared camera which captures a first intensity of the reflected infrared light beams on a detector of the infrared camera. Ambient radiation reflected at the object and the characteristic radiation of the object are detected by capturing a second intensity of the reflected ambient radiation and the characteristic radiation of the object on the detector of the infrared camera. The emissivity of the object is calculated based on the first intensity and the second intensity.
    Type: Grant
    Filed: July 11, 2012
    Date of Patent: December 6, 2016
    Assignee: SIEMENS AKTIENGESELLSCHAFT
    Inventors: Max Rothenfusser, Michael Stockmann
  • Patent number: 9307912
    Abstract: A method of determining a temperature of a patient includes measuring a first temperature of the patient with a temperature device without contacting the patient with the device, and measuring a second temperature of the patient by contacting a measurement site of the patient with the device. The method also includes determining a temperature value indicative of a core temperature of the patient based on the first and second temperatures.
    Type: Grant
    Filed: August 8, 2012
    Date of Patent: April 12, 2016
    Assignee: WELCH ALLYN, INC.
    Inventors: Matthew D. Mullin, John A. Lane, David E. Quinn, Michael J. Anson
  • Patent number: 9261406
    Abstract: A process measurement system for measuring a parameter of a work surface includes a light source configured to provide a material processing beam, an optical delivery system optically coupled to the light source and configured to homogenize and direct the material processing beam to the work surface, the optical delivery system including a process optic for optically coupling the material processing beam to the work surface in a predetermined way, the optical delivery system including a delivery waveguide having an output face optically coupled to the process optic, and an optical pyrometer in optical communication with the optical delivery system and configured to receive a pyrometer signal emitted from the work surface and coupled into said output face.
    Type: Grant
    Filed: August 27, 2012
    Date of Patent: February 16, 2016
    Assignee: nLIGHT Photonics Corporation
    Inventors: R. Kirk Price, Scott C. Cannon
  • Patent number: 9250134
    Abstract: An assembly including an optically excited infrared nondestructive testing active thermography system is disclosed. The optically excited infrared nondestructive testing active thermography system includes one or more illumination sources, at least one first reflector, at least one second reflector and a computing resource. The at least one first reflector is arranged about the one or more illumination sources. The at least one first reflector has a near focal point and a far focal point. The one or more illumination sources is/are positioned at least proximate the near focal point of the at least one first reflector. The at least one second reflector is positioned at least proximate the far focal point. The computing resource is communicatively-coupled to a motor that is coupled to the at least one second reflector for manipulating the at least one second reflector between at least: a first spatial orientation and a second spatial orientation.
    Type: Grant
    Filed: September 23, 2014
    Date of Patent: February 2, 2016
    Assignee: Thermal Wave Imaging, Inc.
    Inventors: Steven M. Shepard, Timothy Young, Maria Frendberg Beemer
  • Patent number: 9089926
    Abstract: A method for monitoring a processing region of a workpiece on which laser processing is being carried out, in which method the radiation emitted by the processing region is detected by a detector system in a space-resolved manner, wherein the radiation of the processing region is detected for each elemental area of the processing region imaged onto the detector system at least two wavelengths simultaneously. Accurate process monitoring may thereby be carried out.
    Type: Grant
    Filed: November 4, 2006
    Date of Patent: July 28, 2015
    Assignee: TRUMPF Werkzeugmaschinen GmbH + Co. KG
    Inventors: Dieter Pfitzner, Tim Hesse, Winfried Magg
  • Patent number: 8901460
    Abstract: After flash irradiation on a semiconductor wafer is started and then the temperatures of front and back surfaces of the semiconductor wafer become equal to each other, the temperature of the back surface of the semiconductor wafer, which has a known emissivity, is measured with a radiation thermometer. The emissivity of the front surface of the semiconductor wafer is calculated based on the intensity of radiated light from a black body having an equal temperature to the temperature of the back surface thereof, and the intensity of radiated light actually radiated from the front surface of the semiconductor wafer. Then, the temperature of the front surface of the semiconductor wafer heated by the flash irradiation is calculated based on the calculated emissivity and the intensity of the radiated light from the front surface of the semiconductor wafer that has been measured after the flash irradiation is started.
    Type: Grant
    Filed: May 10, 2012
    Date of Patent: December 2, 2014
    Assignee: Dainippon Screen Mfg. Co., Ltd
    Inventors: Kazuyuki Hashimoto, Tatsufumi Kusuda
  • Patent number: 8812168
    Abstract: A method and apparatus measuring temperature of a steel sheet. A reference plate including a temperature controller is disposed opposite to the steel sheet. The reference plate temperature of the reference plate is measured by a contact thermometer. A radiation pyrometer is trained on the steel sheet at an angle such that alternate reflection of radiation energy by the reference plate and the objective steel sheet occurs once or twice. The radiosity of the steel sheet is measured by the radiation pyrometer. A temperature obtained by converting the radiosity into a temperature of a blackbody that radiates energy equivalent to the radiosity is used as a radiosity temperature. The temperature controller executes a control operation to make the temperature of the reference plate coincide with the radiosity temperature. The radiosity temperature is used as the temperature of the steel sheet.
    Type: Grant
    Filed: June 18, 2007
    Date of Patent: August 19, 2014
    Assignee: Kobe Steel, Ltd.
    Inventors: Keiichi Yamashita, Tsuneaki Nishikawa
  • Patent number: 8591103
    Abstract: An infrared thermometer includes a probe and an infrared sensor. The probe with an infrared target absorbs thermal radiation to provide a substantially consistent source of infrared radiation and an aperture for preventing contamination of the infrared target while permitting the transmission of thermal radiation to the target. The infrared sensor is configured for sensing infrared radiation from the infrared target. The infrared target is positioned within the probe such that it absorbs thermal radiation that comes from the aperture and thereafter emits thermal radiation to the infrared sensor.
    Type: Grant
    Filed: August 26, 2010
    Date of Patent: November 26, 2013
    Assignee: Welch Allyn, Inc.
    Inventors: John A. Lane, David E. Quinn
  • Publication number: 20120170612
    Abstract: An inexpensive thermopile temperature detector is particularly adapted to monitoring of electrical equipment, such as a power bus bar, within an enclosed area such as a cabinet. The detector may have a plastic housing, a thermopile sensor and a plastic Fresnel lens. Each sensor also includes a calibrated element such that, but for calibration, the same sensor may be used for various applications for different target sizes and distance or, more generally, with respect to effective target percentage of field of view.
    Type: Application
    Filed: December 29, 2011
    Publication date: July 5, 2012
    Inventor: Francesco Pompei
  • Patent number: 7997121
    Abstract: A milliwave melter monitoring system is presented that has a waveguide with a portion capable of contacting a molten material in a melter for use in measuring one or more properties of the molten material in a furnace under extreme environments. A receiver is configured for use in obtaining signals from the melt/material transmitted to appropriate electronics through the waveguide. The receiver is configured for receiving signals from the waveguide when contacting the molten material for use in determining the viscosity of the molten material. Other embodiments exist in which the temperature, emissivity, viscosity and other properties of the molten material are measured.
    Type: Grant
    Filed: July 11, 2008
    Date of Patent: August 16, 2011
    Assignee: Savannah River Nuclear Solutions, LLC
    Inventors: William E. Daniel, Paul P. Woskov, Shanmugavelayutham K. Sundaram
  • Patent number: 7781512
    Abstract: A system for curing a binders applied to glass fibers is disclosed. The curing of the binder is accomplished by passing the binder coated glass fibers through a curing oven having one or more temperature zones. The temperature of the binder coated glass fibers is monitored and the temperature in the curing oven is adjusted to ensure proper heating of the glass fibers thereby ensuring uniform curing of the binder composition. Temperature measurements are made either as the product traverses the oven or as the cured product exits the curing oven. The invention is particularly useful for curing acrylic thermoset binders and formaldehyde-free binders.
    Type: Grant
    Filed: July 9, 2004
    Date of Patent: August 24, 2010
    Assignee: Johns Manville
    Inventors: Mark William Charbonneau, Derek C. Bristol, Harrison John Brown, Charles John Freeman
  • Patent number: 7696500
    Abstract: A test source that combines infrared energy and visible light to produce a uniform output of energy in the visible and infrared spectra is disclosed. The test source includes an infrared energy source and a visible light source. The infrared energy source has a white coating thereon. The visible light source emits visible light onto the infrared light source, which generates a combination of infrared energy and visible light outwardly into the surrounding atmosphere.
    Type: Grant
    Filed: March 20, 2008
    Date of Patent: April 13, 2010
    Assignee: Electro Optical Industries, Inc.
    Inventors: Randall L. Trent, Robert O. Wageneck, Jason A Mazzetta, Stephen D. Scopatz
  • Patent number: 7661876
    Abstract: Infrared Ir Thermometer Calibration Systems and Methods are Disclosed in which the temperature of an IR thermometer calibration system is controlled such that radiation emitted by a target at a given input temperature is equal to the radiation emitted by a graybody heated to the input temperature and having an emissivity equal to an emissivity setting of an IR thermometer to be calibrated using the IR thermometer calibration system.
    Type: Grant
    Filed: November 14, 2007
    Date of Patent: February 16, 2010
    Assignee: Fluke Corporation
    Inventor: Frank E. Liebmann
  • Publication number: 20090287360
    Abstract: A method and apparatus measuring temperature of a steel sheet. A reference plate including a temperature controller is disposed opposite to the steel sheet. The reference plate temperature of the reference plate is measured by a contact thermometer. A radiation pyrometer is trained on the steel sheet at an angle such that alternate reflection of radiation energy by the reference plate and the objective steel sheet occurs once or twice. The radiosity of the steel sheet is measured by the radiation pyrometer. A temperature obtained by converting the radiosity into a temperature of a blackbody that radiates energy equivalent to the radiosity is used as a radiosity temperature. The temperature controller executes a control operation to make the temperature of the reference plate coincide with the radiosity temperature. The radiosity temperature is used as the temperature of the steel sheet.
    Type: Application
    Filed: June 18, 2007
    Publication date: November 19, 2009
    Applicant: Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.)
    Inventors: Keiichi Yamashita, Tsuneaki Nishikawa
  • Patent number: 7591586
    Abstract: A method of precisely measuring temperature of an object without having to setting the emissivity of the object over a wide temperature range from low to high temperature with a single radiation thermometer. The temperature-measuring device of the present invention includes a reference object having an emissivity of substantially 1 in a prescribed wavelength range; a bandpass filter transmitting radiant energy in the prescribed wavelength range; and a radiation thermometer for observing temperature by taking in the radiant energy transmitted through the bandpass filter.
    Type: Grant
    Filed: August 9, 2007
    Date of Patent: September 22, 2009
    Assignee: Japan Aerospace Exploration Agency
    Inventor: Akira Ohnishi
  • Publication number: 20090200279
    Abstract: An apparatus for thermally processing a substrate includes a first radiation source configured to heat a substrate and emit radiation at a heating wavelength, focusing optics configured to direct radiation from the first radiation source to the substrate, and a second radiation source configured to emit radiation at a second wavelength different from the heating wavelength and at a lower power than the first radiation source. Radiation from the second radiation source is directed onto the substrate. The apparatus further includes a first detector configured to receive reflected radiation at the second wavelength and a computer system configured to receive an output from the first detector and adjust a focus plane of the first radiation source relative to the substrate. The second radiation source is configured to have substantially the same focus plane as the first radiation source.
    Type: Application
    Filed: February 11, 2008
    Publication date: August 13, 2009
    Inventor: Jiping Li
  • Patent number: 7346386
    Abstract: Body temperature measurements are obtained by scanning a thermal radiation sensor across the side of the forehead over the temporal artery. A peak temperature measurement is processed to compute an internal temperature of the body as a function of ambient temperature and the sensed surface temperature. The function includes a weighted difference of surface temperature and ambient temperature, the weighting being varied with target temperature through a minimum in the range of 96° F. and 100° F. The radiation sensor views the target surface through an emissivity compensating cup which is spaced from the skin by a circular lip of low thermal conductivity.
    Type: Grant
    Filed: October 14, 2003
    Date of Patent: March 18, 2008
    Assignee: Exergen Corporation
    Inventor: Francesco Pompei
  • Publication number: 20080037610
    Abstract: A method of precisely measuring temperature of an object without having to setting the emissivity of the object over a wide temperature range from low to high temperature with a single radiation thermometer. The temperature-measuring device of the present invention includes a reference object having an emissivity of substantially 1 in a prescribed wavelength range; a bandpass filter transmitting radiant energy in the prescribed wavelength range; and a radiation thermometer for observing temperature by taking in the radiant energy transmitted through the bandpass filter.
    Type: Application
    Filed: August 9, 2007
    Publication date: February 14, 2008
    Applicant: Japan Aerospace Exploration Agency, Institute of Space and Astronautical Sciencec
    Inventor: Akira Ohnishi
  • Patent number: 7313501
    Abstract: According to one embodiment of the invention a method for determining the location of a potential defect in a device includes scanning a surface of the device with a temperature sensor while operating the device. The method also includes measuring a temperature of the device by a temperature sensor at a plurality of locations while scanning. Based upon the measured temperatures, a temperature profile is constructed for the device. The method also includes comparing the constructed temperature profile to a reference profile to determine a location of the potential defect in the device.
    Type: Grant
    Filed: February 2, 2005
    Date of Patent: December 25, 2007
    Assignee: Texas Instruments Incorporated
    Inventor: Dat T. Nguyen
  • Patent number: 7231307
    Abstract: In some embodiments, a temperature measuring apparatus is provided with a light receiving portion having a plurality of light receiving units for measuring heat quantity of divided temperature detecting area in a noncontact manner, a thermal sensor for detecting temperature of each of the plurality of light receiving units, a calculation portion for calculating a temperature of each of the divided temperature detecting areas based on the temperature obtained by the thermal sensor and the relative temperature difference obtained by the light receiving portion, a correction information holding portion for holding correction information on known reference temperature of the temperature detecting area and its corresponding calculated result outputted from the calculation portion obtained when heat quantity of the temperature detecting area is set to the reference temperature, and a correction portion for correcting the calculated result of the calculation portion based on the correction information.
    Type: Grant
    Filed: August 11, 2005
    Date of Patent: June 12, 2007
    Assignee: Sanyo Electric Co., Ltd.
    Inventors: Youji Takei, Masao Tsukizawa
  • Patent number: 7169717
    Abstract: A method of producing a calibration wafer having at least a predetermined emissivity, including providing a wafer of semiconductor material; subjecting the bulk material of the wafer to doping with foreign atoms and/or generating lattice defects to obtain the predetermined emissivity; and coating the wafer to obtain a further optical characteristic.
    Type: Grant
    Filed: November 13, 2003
    Date of Patent: January 30, 2007
    Assignee: Mattson Thermal Products GmbH
    Inventors: Christoph Merkl, Markus Hauf, Rolf Bremensdorfer
  • Patent number: 7037733
    Abstract: When the emissivity ? on the reverse face of a substrate 10 is measured during annealing processing for the substrate 10, films made from a material that varies the emissivity ?, such as a first DPS film 15 used for forming a plug 15A, a second DPS film 17 used for forming a capacitor lower electrode 17A and a third DPS film 20 used for forming a capacitor upper electrode 20A, are formed on the top face of the substrate 10. On the other hand, no film made from a material that varies the emissivity ?, such as a DPS film, is formed on the reverse face of the substrate 10.
    Type: Grant
    Filed: July 1, 2002
    Date of Patent: May 2, 2006
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Satoshi Shibata, Junji Hirase, Tatsuo Sugiyama, Emi Kanasaki, Fumitoshi Kawase, Yasushi Naito
  • Patent number: 6964515
    Abstract: A temperature determining device is composed of a temperature detecting unit that detects a temperature of a determination object member based on an intensity of infrared rays from the object member, a unit for determining a temperature for correction that determines a temperature of an opposing member opposed to the object member or a temperature of a member whose temperature changes in correlation to a change in the temperature of the opposing member, and a calculating unit that corrects the detected temperature obtained by the temperature detecting unit using the temperature as the temperature for correction obtained by the unit for determining a temperature for correction. Thus, stable temperature determination can be performed accurately without being influenced by infrared rays from around a determination object member.
    Type: Grant
    Filed: December 2, 2003
    Date of Patent: November 15, 2005
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Kenji Asakura, Keisuke Fujimoto, Masaaki Nakano
  • Patent number: 6847012
    Abstract: The invention relates to a device for measuring the temperature of substrates, notably semiconductor wafers. The device comprises at least one radiation sensor for measuring the radiation emitted by the substrate and an element (19) which restricts the field of vision of the radiation sensor and is positioned between the substrate and the radiation sensor. The substrate temperature can be determined correctly and simply, even if the substrate vibrates or is tilting, owing to the fact that the edges (20) of the element extend in a straight line. The invention also relates to a corresponding method.
    Type: Grant
    Filed: January 19, 2000
    Date of Patent: January 25, 2005
    Assignee: Steag RTP Systems GmbH
    Inventor: Markus Hauf
  • Patent number: 6839507
    Abstract: In a system for thermal processing of a semiconductor substrate, an RTP system employs a reflector plate which is highly reflective of radiation in a target wavelength range, and less reflective of radiation outside that target wavelength range. In one embodiment, the reflector plate has a highly reflective portion overlying a less reflective portion, wherein the highly reflective portion is highly reflective of radiation in the target wavelength range. As radiation emitted by the substrate is received on the reflector, the radiation in the target wavelength range is reflected, thereby facilitating measurement of the substrate temperature by the pyrometer(s), while radiation outside the target wavelength range is absorbed, thereby facilitating cooling of the substrate.
    Type: Grant
    Filed: October 7, 2002
    Date of Patent: January 4, 2005
    Assignee: Applied Materials, Inc.
    Inventors: Bruce Adams, Aaron Hunter
  • Patent number: 6815235
    Abstract: The present invention is generally directed to various methods of controlling the formation of metal silicide regions, and a system for performing same. In one illustrative embodiment, the method comprises forming a layer of refractory metal above a feature, performing at least one anneal process to convert a portion of the layer of refractory metal to at least one metal silicide region on the feature, and measuring at least one characteristic of at least one metal silicide region while the anneal process is being performed. In another illustrative embodiment, the method comprises forming a layer of refractory metal above a feature, performing at least one anneal process to convert a portion of the layer of refractory metal to at least one metal silicide region on the feature, and performing at least one scatterometric measurement of the metal silicide region after at least a portion of the anneal process is performed to determine at least one characteristic of the metal silicide region.
    Type: Grant
    Filed: November 25, 2002
    Date of Patent: November 9, 2004
    Assignee: Advanced Micro Devices, Inc.
    Inventor: Richard J. Markle
  • Patent number: 6756591
    Abstract: A method and device for photothermal imaging tiny metal particles which are immersed in a given medium like a living cell deposited onto a transparent glass slide. The given medium and immersed tiny metal particles are illuminated through separate phase reference laser beam and sensitive probe laser beam, with the sensitive probe laser beam including a heating laser beam undergoing through impingement on the given medium slight phase changes induced by photothermal effect due to a local heating, in the absence of any substantial phase changes to the phase reference laser beam. Illuminating is performed by focusing the separate phase reference and sensitive probe laser beam through the transparent glass slide at a given depth within the given medium and a transmitted phase reference laser beam and a transmitted sensitive probe laser beam undergoing the slight phase changes are generated.
    Type: Grant
    Filed: March 14, 2003
    Date of Patent: June 29, 2004
    Assignees: Centre National de la Recherche, Universite de Bordeaux I
    Inventors: Brahim Lounis, Michel Orrit, Philippe Tamarat, David Boyer, Laurent Cognet
  • Patent number: 6682216
    Abstract: This invention is a fiber-based multi-color pyrometry set-up for real-time non-contact temperature and emissivity measurement. The system includes a single optical fiber to collect radiation emitted by a target, a reflective rotating chopper to split the collected radiation into two or more paths while modulating the radiation for lock-in amplification (i.e., phase-sensitive detection), at least two detectors possibly of different spectral bandwidths with or without filters to limit the wavelength regions detected and optics to direct and focus the radiation onto the sensitive areas of the detectors. A computer algorithm is used to calculate the true temperature and emissivity of a target based on blackbody calibrations. The system components are enclosed in a light-tight housing, with provision for the fiber to extend outside to collect the radiation.
    Type: Grant
    Filed: December 16, 1999
    Date of Patent: January 27, 2004
    Assignee: The Regents of the University of California
    Inventors: Ward Small IV, Peter Celliers
  • Patent number: 6641302
    Abstract: A thermal process apparatus for a semiconductor substrate, including a heating source heating the semiconductor substrate by irradiating a light on one side of the semiconductor substrate, a reflection plate facing to the semiconductor substrate in a state where a reflection cavity is formed with another side of the semiconductor substrate, a thermometer having a light-receiving part provided on the refection plate so as to measure a temperature of the semiconductor substrate by catching a radiation beam from the semiconductor substrate heated by the heating source by the light-receiving part; and light absorption means provided around the light-receiving part for absorbing a diffuse reflection light generated in the reflection cavity.
    Type: Grant
    Filed: September 26, 2001
    Date of Patent: November 4, 2003
    Assignee: Tokyo Electron Limited
    Inventors: Yicheng Li, Takashi Shigeoka, Takeshi Sakuma
  • Patent number: 6585410
    Abstract: A self-calibrating nulling radiometer for non-contact temperature measurement of an object, such as a body of water, employs a black body source as a temperature reference, an optomechanical mechanism, e.g., a chopper, to switch back and forth between measuring the temperature of the black body source and that of a test source, and an infrared detection technique. The radiometer functions by measuring radiance of both the test and the reference black body sources; adjusting the temperature of the reference black body so that its radiance is equivalent to the test source; and, measuring the temperature of the reference black body at this point using a precision contact-type temperature sensor, to determine the radiative temperature of the test source.
    Type: Grant
    Filed: May 3, 2001
    Date of Patent: July 1, 2003
    Assignee: The United States of America as represented by the Administrator of the National Aeronautics and Space Administration
    Inventor: Robert Ryan
  • Patent number: 6584426
    Abstract: An electronic thermometer including a probe to be inserted in to a portion of an outer ear to be measured by the thermometer, an infrared quantity detection means for detecting an infrared radiation quantity which is entered through the probe, a temperature computation means for applying the detected infrared radiation quantity in a predetermined computation expression to compute out a temperature such as body temperature, an infrared transmission data reading means for taking data corresponding to an infrared transmission quantity passing through the probe, and a control means for controlling the computation expression according to the taken data corresponding to the infrared transmission quantity.
    Type: Grant
    Filed: October 26, 1999
    Date of Patent: June 24, 2003
    Assignee: Omron Corporation
    Inventor: Hiroyuki Ota
  • Patent number: 6572264
    Abstract: To provide a radiation thermometer capable of measuring a body temperature more accurately than it has been conventionally possible, by taking into account an infrared ray that is emitted from a front end of the probe portion and reflected from an eardrum or an external acoustic opening. The radiation thermometer has body temperature calculating means for calculating a body temperature according to a predetermined arithmetic expression based on an emissivity when the emissivity of the eardrum or the external acoustic opening is less than 1, an output of infrared-ray detecting means and an output of temperature-measuring means.
    Type: Grant
    Filed: August 11, 2000
    Date of Patent: June 3, 2003
    Assignee: Citizen Watch Co., Ltd.
    Inventor: Shunji Egawa
  • Patent number: 6561694
    Abstract: A method and apparatus for calibrating temperature measurements that are taken with a first radiation detector for measuring thermal radiation given off by a reference substrate are provided. The method includes the steps of heating the reference substrate, which carries at least one reference material having a known melting point temperature, to or over the melting point temperature and measuring the thermal radiation of the reference substrate during the heating step, during a cooling period that follows the heating, or during both the heating and the cooling periods. The method also includes the step of correlating a measurement plateau of the thermal radiation which occurs during the measuring step with the known melting point temperature.
    Type: Grant
    Filed: April 19, 2001
    Date of Patent: May 13, 2003
    Assignee: STEAG RTP Systems GmbH
    Inventors: Wilfried Lerch, Markus Hauf
  • Patent number: 6530687
    Abstract: The present invention aims to exclude the influence of stray light dye to a heating lamp when measuring the temperature of an object to be treated, such as a wafer, with the use of a radiation thermometer. The present invention utilizes the relationship between a power W supplied from an output control section 28 to lamps 22 and optical energy radiated from the lamps 22. Influence which the light radiated from the lamps 22 exerts on the output voltage of a photodiode 18 is experimentally found beforehand as a function of the power W, and stored in a computing section 26. The computing section 26 subtracts the influence of stray light from the lamps 22, which is included in the output voltage of the photodiode 18, from the output value of the photodiode 18 on the basis of the value of the power W transmitted from the output control section 28, and calculates the temperature of a susceptor 8.
    Type: Grant
    Filed: September 7, 2000
    Date of Patent: March 11, 2003
    Assignee: Tokyo Electron Limited
    Inventors: Tomohiro Suzuki, Shigeru Kasai, Masahiro Shimizu, Minoru Yazawa
  • Patent number: 6517238
    Abstract: A system and method for determining lateral thermal diffusivity of a material sample using a heat pulse; a sample oriented within an orthogonal coordinate system; an infrared camera; and a computer that has a digital frame grabber, and data acquisition and processing software. The mathematical model used within the data processing software is capable of determining the lateral thermal diffusivity of a sample of finite boundaries. The system and method may also be used as a nondestructive method for detecting and locating cracks within the material sample.
    Type: Grant
    Filed: January 18, 2001
    Date of Patent: February 11, 2003
    Assignee: The United States of America as represented by the United States Department of Energy
    Inventors: Jiangang Sun, Chris Deemer
  • Patent number: 6488407
    Abstract: The present invention intends to improve the accuracy of temperature measurement when measuring the temperature of a semiconductor wafer by a radiation thermometer on the basis of the idea of virtual blackbody simulated by multiple reflection of light. A system includes a wafer (W), a circular reflector 1 of a radius R disposed opposite to the wafer (W), and a probe (2) disposed in a through hole formed in the reflector (1). The probe (2) is a through hole. The radiation intensity of radiation passed the through hole is determined by image data provided by a CCD camera disposed behind the back surface of the reflector (1). An error in measured radiation intensity of radiation falling the probe (2) due to light that enters a space between the wafer (W) and the reflector (1) and a space between the reflector (1) and the probe (2) and light leaks from the same spaces is corrected, the emissivity of the wafer (W) is calculated and the temperature of the wafer (W) is determined.
    Type: Grant
    Filed: March 17, 2000
    Date of Patent: December 3, 2002
    Assignee: Tokyo Electron Limited
    Inventors: Masayuki Kitamura, Eisuke Morisaki, Nobuaki Takahashi, Takashi Shigeoka
  • Publication number: 20020141477
    Abstract: A radiant light from a reaction chamber is measured outside the chamber, and a relation between a change of a radiation ratio of the radiant light, and a change of a thickness of a thin film is acquired, when a CVD apparatus is used to form the film on a substrate in the chamber. After acquiring the relation between the change of the radiation ratio and the change of the film thickness, the change of the radiation ratio is measured, when the CVD apparatus is used to form the film. The thickness of the film is estimated from the change of the radiation ratio measured in measuring the change of the radiation ratio from the relation between the change of the radiation ratio and the change of the film thickness acquired in acquiring the relation between the change of the radiation ratio and the change of the film thickness.
    Type: Application
    Filed: March 28, 2002
    Publication date: October 3, 2002
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Hiroshi Akahori, Shuichi Samata