Having Significant Signal Handling Circuitry (e.g., Linearizing, Emissivity Compensation) Patents (Class 374/128)
  • Patent number: 10078021
    Abstract: An apparatus for measuring body core temperature includes a light guide. The light guide can be coupled to an earpiece, or it can be a standalone device. The apparatus also includes a sensor positioned at one end of the light guide, and a processor coupled to the sensor. The sensor is operable to sense infrared radiation from an infrared source at the opposite end of the light guide. The processor is operable to determine a temperature of the infrared source at the opposite end of the light guide via a transfer function that correlates a measurement of the infrared radiation observed by the sensor and an effect of radiation of the light guide.
    Type: Grant
    Filed: September 23, 2015
    Date of Patent: September 18, 2018
    Assignee: Honeywell International Inc.
    Inventors: Christopher Scott Larsen, Brian Keith Olmsted
  • Patent number: 9976908
    Abstract: Devices and corresponding methods can be provided to monitor or measure temperature of a target or to control a process. Targets can have low, unknown, or variable emissivity. Devices and corresponding methods can be used to measure temperatures of thin film, partially transparent, or opaque targets, as well as targets not filling a sensor's field of view. Temperature measurements can be made independent of emissivity of a target surface by, for example, inserting a target between a thermopile sensor and a background surface maintained at substantially the same temperature as the thermopile sensor. In embodiment devices and methods, a sensor temperature can be controlled to match a target temperature by minimizing or zeroing a net heat flux at the sensor, as derived from a sensor output signal. Alternatively, a target temperature can be controlled to minimize the heat flux.
    Type: Grant
    Filed: March 10, 2014
    Date of Patent: May 22, 2018
    Assignee: Exergen Corporation
    Inventors: Jason N. Jarboe, Francesco Pompei
  • Patent number: 9710900
    Abstract: A method of analyzing a thermal image of a body section is disclosed. The method comprises obtaining a thermospatial representation of the body section, calculating a surface integral of the thermal data over the surface, and determining the likelihood that a thermally distinguishable region is present in the body section, based on a value of the surface integral.
    Type: Grant
    Filed: December 30, 2013
    Date of Patent: July 18, 2017
    Assignee: Real Imaging Ltd.
    Inventors: Israel Boaz Arnon, Yoel Arieli
  • Patent number: 9028135
    Abstract: A non-contact pyrometer and method for calibrating the same are provided. The pyrometer includes a radiation sensor configured to measure at least a portion of a radiance signal emitted from a target medium and output a voltage that is a function of an average of the absorbed radiance signal, and an optical window disposed proximate the radiation sensor and configured to control a wavelength range of the radiance signal that reaches the radiation sensor. The pyrometer may further include a reflective enclosure configured to receive the target medium therein, wherein the radiation sensor and the optical window are disposed within the reflective enclosure, an amplifier in communication with an output of the radiation sensor, and a data acquisition system in communication with an output of the amplifier.
    Type: Grant
    Filed: January 12, 2012
    Date of Patent: May 12, 2015
    Assignee: United States of America as represented by the Administrator of the National Aeronautics and Space Administration
    Inventors: Asia N. Quince, Alexander Stein
  • Patent number: 8891948
    Abstract: A photodiode excellent in responsivity receives flashes of light emitted from flash lamps in the process of heating a semiconductor wafer by irradiation with flashes of light, and the waveform of the intensity of the flashes of light versus time is acquired using voltage data obtained from an output from the photodiode. Then, a temperature calculating part performs a heat conduction simulation using the acquired data to calculate the temperature of the semiconductor wafer irradiated with the flashes of light from the flash lamps. The temperature of the semiconductor wafer is computed using data corresponding to the intensity of the flashes of light obtained from the output from the photodiode. This allows the determination of the surface temperature of the semiconductor wafer irradiated with the flashes of light, irrespective of the waveform of the emission intensity of the flash lamps.
    Type: Grant
    Filed: May 17, 2011
    Date of Patent: November 18, 2014
    Assignee: Dainippon Screen Mfg. Co., Ltd.
    Inventors: Tatsufumi Kusuda, Kazuyuki Hashimoto
  • Patent number: 8481917
    Abstract: A system and a method for calibrating an ambient light sensor (ALS) are disclosed. The ALS, an adjustable resistor and a switch are located on a first surface of a printed circuit board (PCB), and the adjustable resistor and the switch are connected in series between an adjustable probe of the ALS and the ground. A resistor is connected between two pads located on a second surface of the PCB via two probes touching the pads. A controller connected to the PCB reads a light sensitivity of the ALS and calculates a calculated resistance value of the adjustable resistor by a formula “detected light sensitivity/resistance value of the resistor=objective light sensitivity/resistance value of the adjustable resistor”, wherein the objective light sensitivity and the resistance value of the resistor are given.
    Type: Grant
    Filed: November 4, 2009
    Date of Patent: July 9, 2013
    Assignees: Amlink (Shanghai) Ltd., Ampower Technology Co., Ltd.
    Inventors: Li-Mei Chen, Ming-Fu Chen, Yi-Hsun Lin
  • Patent number: 8376610
    Abstract: A method and apparatus for automated field calibration of temperature sensors uses a series of readings including a reading of a known source, such as an LED, for use in calculating a factor that is compared to a reference for adjusting the sensor output signal. Calibration readings are taken more frequently after start up to compensate for sensor drift during storage, as opposed to less frequent readings during operation to compensate for slower sensor drift while operational.
    Type: Grant
    Filed: September 9, 2008
    Date of Patent: February 19, 2013
    Assignee: Fluke Corporation
    Inventors: Sam Paris, Charles Steven Pint
  • Patent number: 8251578
    Abstract: An infrared temperature sensing device with projecting function is using for sensing temperature of a measured body. The infrared temperature sensing device includes a temperature-sensing element, a Fresnel lens, a microprocessor and a projecting module. The temperature-sensing element is used for sensing infrared radiation and deriving at least a temperature signal. The Fresnel lens is located between the measured body and the temperature-sensing element for focusing the infrared radiation on the temperature-sensing element. The microprocessor is electrically connected to the temperature-sensing element. The projecting module is electrically connected to the microprocessor and projecting at least a body temperature value corresponding to the temperature signal.
    Type: Grant
    Filed: September 21, 2011
    Date of Patent: August 28, 2012
    Assignee: Polygreen Germany GmbH
    Inventor: Chao-Man Tseng
  • Publication number: 20120063487
    Abstract: An ear thermometer with an infrared sensor, a control unit and a power supply unit in a housing has a wireless communication interface. The wireless communication interface is a WLAN or Bluetooth interface for communication with a base station, in which temperature measurement values are displayed and stored.
    Type: Application
    Filed: September 15, 2011
    Publication date: March 15, 2012
    Applicant: Robert Bosch GmbH
    Inventor: Andrej Albrecht
  • Publication number: 20120057615
    Abstract: An infrared clinical thermometer able to communicate is disclosed. The infrared clinical thermometer has a control module arranged inside a casing and electrically connected with an infrared body temperature sensation unit, a communication interface, a measurement key, a transmission key, and a power key. When intending to measure body temperature, the user presses the power key to start the infrared clinical thermometer. According to the signal of the measurement key, the control module controls the infrared body temperature sensation unit to detect body temperature. When intending to transmit measurement results, the user links the communication interface to the computer via a detachable communication cable and then presses the transmission key or common key. Then, the control module transmits measurement results to the computer. The infrared clinical thermometer is detachably linked to the computer and thus easy to measure temperature and transmit data.
    Type: Application
    Filed: August 25, 2011
    Publication date: March 8, 2012
    Inventor: Vincent WENG
  • Publication number: 20110216806
    Abstract: An ear thermometer with an ear canal sensing device and a measurement method thereof is disclosed. The ear thermometer mainly comprises two sensors. One is an approach sensor installed on a probe. The approach sensor used as the ear canal sensing device determines whether the probe is inserted into an ear canal. Also, the approach sensor is used as the basis to switch the measurement mode to an ear temperature mode or a second measurement mode, such as the forehead temperature mode, surface temperature mode, or room temperature mode. The other is an infrared sensor used to measure temperatures. After the approach sensor determines the measurement mode, the infrared sensor measures the temperature to obtain a signal. Then, the signal is processed through a control module to be shown on a display unit.
    Type: Application
    Filed: October 15, 2010
    Publication date: September 8, 2011
    Applicant: RADIANT INNOVATION INC.
    Inventor: VINCENT WENG
  • Patent number: 7965054
    Abstract: A vacuum pump capable of accurately detecting a rotor temperature based on a change in permeability of a magnetic material. Two targets are fixed to a nut opposed to a gap sensor. The nut is made of pure iron, and a surface of the nut opposed to the gap sensor serves as a target. The target has a Curie temperature greater than a temperature monitoring range, and each of the targets has a Curie temperature falling within the temperature monitoring range. When the targets become opposed to the gap sensor in turn according to rotation of a rotor, three types of signals are output from the gap sensor. The difference-signal generation means generates a difference signal of each the targets, on the basis of a signal of the target. The difference signal is compared with a reference signal V0 for detecting the Curie temperatures to detect a rotor temperature.
    Type: Grant
    Filed: July 26, 2007
    Date of Patent: June 21, 2011
    Assignee: Shimadzu Corporation
    Inventors: Yoshio Tsunazawa, Akira Arakawa, Junichiro Kozaki, Masaki Ohfuji
  • Patent number: 7891866
    Abstract: A system and method for determining the temperature of an object without physically contacting the object. The method involves reading a spectral radiation of the object over a plurality of wavelengths to obtain a set of radiation data related to a temperature of the object. A known characteristic of a black body is determined at a plurality of predetermined, different test temperatures. The spectral data and the characteristic of the black body at the various test temperatures are used to calculate a temperature of the object.
    Type: Grant
    Filed: February 18, 2008
    Date of Patent: February 22, 2011
    Assignee: The Boeing Company
    Inventors: Mark D. Rogers, Loyal B. Shawgo
  • Patent number: 7781512
    Abstract: A system for curing a binders applied to glass fibers is disclosed. The curing of the binder is accomplished by passing the binder coated glass fibers through a curing oven having one or more temperature zones. The temperature of the binder coated glass fibers is monitored and the temperature in the curing oven is adjusted to ensure proper heating of the glass fibers thereby ensuring uniform curing of the binder composition. Temperature measurements are made either as the product traverses the oven or as the cured product exits the curing oven. The invention is particularly useful for curing acrylic thermoset binders and formaldehyde-free binders.
    Type: Grant
    Filed: July 9, 2004
    Date of Patent: August 24, 2010
    Assignee: Johns Manville
    Inventors: Mark William Charbonneau, Derek C. Bristol, Harrison John Brown, Charles John Freeman
  • Publication number: 20100183044
    Abstract: An object is to realize an ear thermometer that is configured to easily arrange a sensor in a sensor mirror and is suitable for mass production. The ear thermometer has a probe. The probe includes a probe body and a temperature measuring part joined with the probe body. The temperature measuring part includes a flange coupled with the probe body and a front end part extending from the flange, the front end part incorporating a sensor mirror.
    Type: Application
    Filed: June 12, 2008
    Publication date: July 22, 2010
    Applicant: BIO ECHO NET INC
    Inventor: Hideki Tanaka
  • Publication number: 20100135354
    Abstract: A mechanism of a monitoring unit of an electric rotating machinery covered in a housing that intercepts photoelectron transmission, the mechanism has: a monitoring window penetrating a part of the housing and configured to allow passage of photoelectrons and not to allow passage of gas; a camera arranged outside the monitoring window and configured to receive radiated photoelectron generated in the housing and passing through the monitoring window and to generate image data from the radiated photoelectron; and a computing unit configured to process the image data. The computing unit has reference image data storage means for storing image data resulting from blackbody radiation occurring in a reference state in the housing, as reference image data, and temperature calculating means for comparing the image data with the reference image data, thereby to calculate the temperature in the housing.
    Type: Application
    Filed: October 5, 2006
    Publication date: June 3, 2010
    Inventors: Takeshi Watanabe, Yuji Yao
  • Patent number: 7661876
    Abstract: Infrared Ir Thermometer Calibration Systems and Methods are Disclosed in which the temperature of an IR thermometer calibration system is controlled such that radiation emitted by a target at a given input temperature is equal to the radiation emitted by a graybody heated to the input temperature and having an emissivity equal to an emissivity setting of an IR thermometer to be calibrated using the IR thermometer calibration system.
    Type: Grant
    Filed: November 14, 2007
    Date of Patent: February 16, 2010
    Assignee: Fluke Corporation
    Inventor: Frank E. Liebmann
  • Patent number: 7340293
    Abstract: An approach to noninvasively, remotely and accurately detect core body temperature in a warm-blooded subject, human or animal, via thermal imaging. Preferred features such as the use of in-frame temperature references, specific anatomical target regions and a physiological heat transfer model help the present invention to overcome pitfalls inherent with existing thermal imaging techniques applied to physiological screening applications. This invention provides the ability to noninvasively, remotely and rapidly screen for diseases or conditions that are characterized by changes in core body temperature. One human application of this invention is the remote screening for severe acute respiratory syndrome (SARS), since fever is a common, early symptom. Other diseases and conditions that affect the core body temperature of humans or animals may also be noninvasively and remotely detected with this invention.
    Type: Grant
    Filed: May 25, 2004
    Date of Patent: March 4, 2008
    Inventor: Gary L. McQuilkin
  • Patent number: 7329044
    Abstract: Temperature states of a clinical thermometer body and an environment are estimated by temperatures measured by a first temperature sensor integrally formed together with an infrared sensor arranged to the distal end of a probe and a second temperature sensor arranged on the bottom side of a probe holder, and processes suitable for the respective temperature states are performed. An estimation error or the reliability of an estimation value is calculated by the temperatures to notify a user of the estimation error or the reliability by an LCD or the like.
    Type: Grant
    Filed: June 23, 2004
    Date of Patent: February 12, 2008
    Assignee: Omron Healthcare Co., Ltd.
    Inventors: Taiga Sato, Hiroyuki Ota, Tetsuya Sato, Yoshihide Onishi
  • Patent number: 7313501
    Abstract: According to one embodiment of the invention a method for determining the location of a potential defect in a device includes scanning a surface of the device with a temperature sensor while operating the device. The method also includes measuring a temperature of the device by a temperature sensor at a plurality of locations while scanning. Based upon the measured temperatures, a temperature profile is constructed for the device. The method also includes comparing the constructed temperature profile to a reference profile to determine a location of the potential defect in the device.
    Type: Grant
    Filed: February 2, 2005
    Date of Patent: December 25, 2007
    Assignee: Texas Instruments Incorporated
    Inventor: Dat T. Nguyen
  • Patent number: 7304272
    Abstract: A system for adjusting parameters of a temperature sensor for settling time reduction is disclosed. The system includes an input for receiving a signal for triggering an adjustment of one or more parameters associated with one or more portions of the temperature sensor. And, an adjuster that includes a current sourcing/sinking adjuster, a feedback loop current adjuster and a feedback loop resistance adjuster coupled to the input. The adjuster adjusts one or more voltages associated with one or more portions of the temperature sensor in response to a receipt of the signal for triggering an adjustment to achieve the settling time reduction.
    Type: Grant
    Filed: December 20, 2005
    Date of Patent: December 4, 2007
    Assignee: National Semiconductor Corporation
    Inventors: Dan D'Aquino, Mehmet Aslan
  • Patent number: 7192186
    Abstract: A multimeter with non-contact temperature measurement capability. The multimeter is contained in a housing, and has outputs relating to measured electrical parameters. There is also an output display contained in the housing, for displaying results to a user. A non-contact optically-based temperature sensing device is coupled to the housing, and has an output related to sensed temperature. Circuitry contained in the housing processes both the multimeter outputs and the temperature sensing device output, and transmits the processed output to the output display.
    Type: Grant
    Filed: June 1, 2006
    Date of Patent: March 20, 2007
    Assignee: Extech Instruments Corporation
    Inventor: Gerald W. Blakeley, III
  • Patent number: 7056012
    Abstract: A multimeter with non-contact temperature measurement capability. The multimeter is contained in a housing, and has outputs relating to measured electrical parameters. There is also an output display contained in the housing, for displaying results to a user. A non-contact optically-based temperature sensing device is coupled to the housing, and has an output related to sensed temperature. Circuitry contained in the housing processes both the multimeter outputs and the temperature sensing device output, and transmits the processed output to the output display.
    Type: Grant
    Filed: September 4, 2003
    Date of Patent: June 6, 2006
    Assignee: Extech Instruments Corporation
    Inventor: Gerald W. Blakeley, III
  • Patent number: 7052176
    Abstract: A system and method for remotely measuring the temperature of an object using microwave radiometry that may be used in hostile environments. A single pole-single throw reflective PIN diode switch is operable in a PASS mode and a BLOCK mode. In the PASS mode, the switch passes the power received from the object to a low-noise block converter (“LNB”) for amplification. In the BLOCK mode, the switch blocks the object power and reflects the load noise power of an ambient temperature load to the LNB. A detector diode detects the amplified power output during both the BLOCK and PASS mode and the AC signal from the detector is converted to an output signal proportional to the difference in the noise powers detected in the PASS and BLOCK modes.
    Type: Grant
    Filed: July 9, 2004
    Date of Patent: May 30, 2006
    Assignees: University of Texas System, Texas State University
    Inventors: Karl David Stephan, John Anthony Pearce
  • Patent number: 6939038
    Abstract: A multiple measurement memory-type electronic thermometer includes an ear temperature measuring unit, a microprocessor, a keypad unit, a display unit, and a memory unit. The ear temperature measuring unit, the display unit, and the memory unit are controlled by the microprocessor. When the activation key of the keypad unit is pressed by the user, being controlled by the microprocessor, the ear temperature unit is activated to perform measurement. The measuring result of the ear temperature unit is sent back to the microprocessor, displayed by the display unit, and saved in the memory unit. The memory unit is partitioned into a plurality of independent memory sectors. Each sector includes a queue data structure, such that the ear temperature measured from each person and the measuring time can be stored in the corresponding memory sector. Therefore, measurement of multiple people can be performed, memorized and retrieved.
    Type: Grant
    Filed: January 20, 2004
    Date of Patent: September 6, 2005
    Assignee: Innovatech Inc.
    Inventor: Chin-Chih Hsieh
  • Patent number: 6871999
    Abstract: A method for the correction of the output signal of an infra red radiation multiple element sensor comprises the steps of determining and storing a parameter of a sensor element of the sensor and of generating a corrected signal of the sensor element in accordance with the stored parameter, where the storage of the parameter takes place in a memory supplied by the manufacturer and where prior to the correction being carried out, the parameter is transmitted to a correction device which is separate from the sensor. A sensor has several sensor elements (11a to 11i) which generate an output signal and a memory (14) provided on the sensor for the storage of at least one parameter of at least one sensor element.
    Type: Grant
    Filed: December 22, 2000
    Date of Patent: March 29, 2005
    Assignee: Perkinelmer Optoelectronics GmbH
    Inventors: Jörg Schieferdecker, Karlheinz Storck
  • Patent number: 6839507
    Abstract: In a system for thermal processing of a semiconductor substrate, an RTP system employs a reflector plate which is highly reflective of radiation in a target wavelength range, and less reflective of radiation outside that target wavelength range. In one embodiment, the reflector plate has a highly reflective portion overlying a less reflective portion, wherein the highly reflective portion is highly reflective of radiation in the target wavelength range. As radiation emitted by the substrate is received on the reflector, the radiation in the target wavelength range is reflected, thereby facilitating measurement of the substrate temperature by the pyrometer(s), while radiation outside the target wavelength range is absorbed, thereby facilitating cooling of the substrate.
    Type: Grant
    Filed: October 7, 2002
    Date of Patent: January 4, 2005
    Assignee: Applied Materials, Inc.
    Inventors: Bruce Adams, Aaron Hunter
  • Patent number: 6839651
    Abstract: A prediction type electronic thermometer having an actively controlled heater element thermally isolating the probe tip from the probe shaft. Rapid and accurate temperature measurements are made using predictive algorithms. Control circuitry reads input from the temperature sensing element to compute best heater control signals so that the temperature of the probe shaft rapidly follows changes in the temperature of the probe tip. Thermal isolation between probe shaft and tip impedes heat flow from the heater element to the tip providing more accurate measurements. Rapid and accurate management of shaft temperature allows heat from the patient being measured to be most efficiently transmitted to the temperature sensor element resulting in very fast temperature measurements.
    Type: Grant
    Filed: June 27, 2001
    Date of Patent: January 4, 2005
    Assignee: Sherwood Services AG
    Inventors: Loren Lantz, Robert B. Gaines
  • Patent number: 6821016
    Abstract: Temperature states of a clinical thermometer body and an environment are estimated by temperatures measured by a first temperature sensor integrally formed together with an infrared sensor arranged to the distal end of a probe and a second temperature sensor arranged on the bottom side of a probe holder, and processes suitable for the respective temperature states are performed. An estimation error or the reliability of an estimation value is calculated by the temperatures to notify a user of the estimation error or the reliability by an LCD or the like.
    Type: Grant
    Filed: June 4, 2002
    Date of Patent: November 23, 2004
    Assignee: Omron Corporation
    Inventors: Taiga Sato, Hiroyuki Ota, Tetsuya Sato, Yoshihide Onishi
  • Patent number: 6815235
    Abstract: The present invention is generally directed to various methods of controlling the formation of metal silicide regions, and a system for performing same. In one illustrative embodiment, the method comprises forming a layer of refractory metal above a feature, performing at least one anneal process to convert a portion of the layer of refractory metal to at least one metal silicide region on the feature, and measuring at least one characteristic of at least one metal silicide region while the anneal process is being performed. In another illustrative embodiment, the method comprises forming a layer of refractory metal above a feature, performing at least one anneal process to convert a portion of the layer of refractory metal to at least one metal silicide region on the feature, and performing at least one scatterometric measurement of the metal silicide region after at least a portion of the anneal process is performed to determine at least one characteristic of the metal silicide region.
    Type: Grant
    Filed: November 25, 2002
    Date of Patent: November 9, 2004
    Assignee: Advanced Micro Devices, Inc.
    Inventor: Richard J. Markle
  • Publication number: 20040170215
    Abstract: An imager temperature sensor and a current correction apparatus are provided which use dark pixel measurements from an imager chip during operation together with a fabrication process constant as well as a chip dependent constant to calculate chip temperature. The chip temperature may be used to generate a current correction signal. The correction signal is used to tune a current on the imager chip to correct for temperature variations.
    Type: Application
    Filed: March 12, 2004
    Publication date: September 2, 2004
    Inventors: Giuseppe Rossi, Gennadiy A. Agranov
  • Patent number: 6756591
    Abstract: A method and device for photothermal imaging tiny metal particles which are immersed in a given medium like a living cell deposited onto a transparent glass slide. The given medium and immersed tiny metal particles are illuminated through separate phase reference laser beam and sensitive probe laser beam, with the sensitive probe laser beam including a heating laser beam undergoing through impingement on the given medium slight phase changes induced by photothermal effect due to a local heating, in the absence of any substantial phase changes to the phase reference laser beam. Illuminating is performed by focusing the separate phase reference and sensitive probe laser beam through the transparent glass slide at a given depth within the given medium and a transmitted phase reference laser beam and a transmitted sensitive probe laser beam undergoing the slight phase changes are generated.
    Type: Grant
    Filed: March 14, 2003
    Date of Patent: June 29, 2004
    Assignees: Centre National de la Recherche, Universite de Bordeaux I
    Inventors: Brahim Lounis, Michel Orrit, Philippe Tamarat, David Boyer, Laurent Cognet
  • Patent number: 6682216
    Abstract: This invention is a fiber-based multi-color pyrometry set-up for real-time non-contact temperature and emissivity measurement. The system includes a single optical fiber to collect radiation emitted by a target, a reflective rotating chopper to split the collected radiation into two or more paths while modulating the radiation for lock-in amplification (i.e., phase-sensitive detection), at least two detectors possibly of different spectral bandwidths with or without filters to limit the wavelength regions detected and optics to direct and focus the radiation onto the sensitive areas of the detectors. A computer algorithm is used to calculate the true temperature and emissivity of a target based on blackbody calibrations. The system components are enclosed in a light-tight housing, with provision for the fiber to extend outside to collect the radiation.
    Type: Grant
    Filed: December 16, 1999
    Date of Patent: January 27, 2004
    Assignee: The Regents of the University of California
    Inventors: Ward Small IV, Peter Celliers
  • Patent number: 6538238
    Abstract: A sensor assembly for glass-ceramic cooktop appliances includes an optical detector having an reference component and an active component. The active component is arranged to receive radiation from the glass-ceramic plate, and the reference component is insulated from radiation from the glass-ceramic plate. The sensor assembly further includes a temperature sensor and a heater located adjacent to the reference component and a controller having a first input connected to the optical detector and a second input connected to the temperature sensor. The controller is responsive to the optical detector and the temperature sensor to calibrate the sensor assembly. Calibration is accomplished by noting the temperature reading of the temperature sensor after the burner assembly has not been used for a predetermined period of time to obtain a first calibration point. Then, the burner assembly is activated so that the temperature of the glass-ceramic plate is raised, and the output of the optical detector is noted.
    Type: Grant
    Filed: February 12, 2002
    Date of Patent: March 25, 2003
    Assignee: General Electric Company
    Inventors: Ertugrul Berkcan, Emilie Thorbjorg Saulnier
  • Publication number: 20020146057
    Abstract: Disclosed is a temperature sensing device and system including a processor, a memory, and optics for collecting incident infrared energy to produce a temperature signal. The device and system function in accordance with a disclosed method to derive one or more signal parameters from the infrared energy, such as signal strength and signal dilution, and compare the parameter(s) with acceptable, pre-defined limits. A filtered or unfiltered temperature indication is provided if all parameters lies within pre-defined limits, and a different temperature indication is displayed if one or more parameters exceeds pre-defined limits.
    Type: Application
    Filed: April 9, 2002
    Publication date: October 10, 2002
    Inventors: William R. Barron, Thomas Larrick
  • Patent number: 6402371
    Abstract: A radiation detector for axillary temperature measurement comprises a wand having an axially directed radiation sensor at one end and an offset handle at the opposite end. The radiation sensor is mounted within a heat sink and retained by an elastomer in compression. The radiation sensor views a target surface through an emissivity compensating cup and a plastic film. A variable reference is applied to a radiation sensor and amplifier circuit in order to maintain full analog-to-digital converter resolution over design ranges of target and sensor temperature with the sensor temperature either above or below target temperature.
    Type: Grant
    Filed: March 23, 2001
    Date of Patent: June 11, 2002
    Assignee: Exergen Corporation
    Inventors: Francesco Pompei, Janus Ternullo
  • Patent number: 6398406
    Abstract: A method for determining the temperature of a surface upon which a coating is grown using optical pyrometry by correcting Kirchhoff's law for errors in the emissivity or reflectance measurements associated with the growth of the coating and subsequent changes in the surface thermal emission and heat transfer characteristics. By a calibration process that can be carried out in situ in the chamber where the coating process occurs, an error calibration parameter can be determined that allows more precise determination of the temperature of the surface using optical pyrometry systems. The calibration process needs only to be carried out when the physical characteristics of the coating chamber change.
    Type: Grant
    Filed: June 1, 2000
    Date of Patent: June 4, 2002
    Assignee: Sandia Corporation
    Inventors: William G. Breiland, Alexander I. Gurary, Vadim Boguslavskiy
  • Patent number: 6379038
    Abstract: The present invention relates to a device useful for the measurement of the temperature of a radiating body. More particularly, the present invention relates to a radiation pyrometer that detects and compensates for emissivity that changes with wavelength, as in metals. Additionally the present invention relates to a device that enhances the resolution and repeatability of the measured temperature of the radiating body. Additionally, the present invention relates to the technique utilized to enhance the resolution and repeatability of the measured temperature.
    Type: Grant
    Filed: June 21, 1999
    Date of Patent: April 30, 2002
    Inventor: Ralph A. Felice
  • Patent number: 6375350
    Abstract: Apparatus for measuring the temperature of an electrically heated pot which uses the Planck formula and employs an infrared reflective hemisphere; first and second infrared wave guides, and first and second infrared filters and infrared detectors as well as a calculating device.
    Type: Grant
    Filed: August 8, 2000
    Date of Patent: April 23, 2002
    Assignee: Quantum Logic Corp
    Inventor: Alexander Stein
  • Patent number: 6374150
    Abstract: The present invention describes a method of end point detecting a process. According to the present invention a surface characteristic is continually measured while the substrate is being processed. A predetermined change in the surface characteristic is utilized a signal and end to the processing step.
    Type: Grant
    Filed: July 30, 1998
    Date of Patent: April 16, 2002
    Assignee: Applied Materials, Inc.
    Inventors: Gregory F. Redinbo, Jallepally Ravi, Michael Rivkin
  • Publication number: 20020020696
    Abstract: A method of detecting a temperature of an object in a multiple-reflection environment by a radiation pyrometer includes the steps of detecting a radiation strength emitted from a target region of an object, applying a correction to the radiation strength so as to correct the effect of multiple reflections of a radiation emitted from the object, applying a correction to the radiation strength so as to correct a reflection loss caused at an end surface of an optical medium interposed between the object and a sensing head of the pyrometer, applying a correction to the radiation strength with regard to an optical absorption loss caused in the optical medium, and applying a correction to the radiation strength with regard to a stray radiation coming in to the sensing head from a source other than the target region of the object.
    Type: Application
    Filed: April 20, 2001
    Publication date: February 21, 2002
    Inventors: Masayuki Kitamura, Eisuke Morisaki, Yun Mo
  • Patent number: 6299346
    Abstract: A method and apparatus for active pyrometric measurement of the temperature of a body whose emissivity varies with wavelength. The emissivity is inferred from reflectivity measured at two wavelengths in an irradiation wavelength band and extrapolated to a wavelength in an emission wavelength band. The extrapolated emissivity is used to correct a blackbody estimate of the temperature of the body in the emission wavelength band. The extrapolation, being temperature-dependent, is done iteratively. Both reflectivity and emission measurements are performed via a common optical head that is shaped, and is positioned relative to the body, so that the optical head has a sufficiently large solid angle of acceptance that the measured temperature is independent of superficial roughness of the body.
    Type: Grant
    Filed: March 7, 2000
    Date of Patent: October 9, 2001
    Assignee: C. I. Systems LTD
    Inventors: Yaron Ish-Shalom, Yael Baharav
  • Publication number: 20010019574
    Abstract: A radiation detector for axillary temperature measurement comprises a wand having an axially directed radiation sensor at one end and an offset handle at the opposite end. The radiation sensor is mounted within a heat sink and retained by an elastomer in compression. The radiation sensor views a target surface through an emissivity compensating cup and a plastic film. A variable reference is applied to a radiation sensor and amplifier circuit in order to maintain full analog-to-digital converter resolution over design ranges of target and sensor temperature with the sensor temperature either above or below target temperature.
    Type: Application
    Filed: March 23, 2001
    Publication date: September 6, 2001
    Applicant: Exergen Corp
    Inventors: Francesco Pompei, Janus Ternullo
  • Patent number: 6283630
    Abstract: A temperature measuring method measures the temperature of a measuring object, such as a semiconductor wafer, by a radiation thermometer capable of approximating the relation between its output and the temperature of the measuring object by a predetermined straight line and of being calibrated by properly determining a slope and a y-intercept for the straight line. The measuring method carries out a procedure including the steps of measuring the reflectivity of a measuring object regarding the light of a wavelength that is not transmitted by the measuring object, and determining a slope and a y-intercept for a proper straight line for the measuring object on the basis of results of processing the measuring object by a predetermined process, such as a film forming process, that provides a result, such as the thickness of a film, corresponding to process temperature.
    Type: Grant
    Filed: October 8, 1999
    Date of Patent: September 4, 2001
    Assignee: Tokyo Electron Limited
    Inventor: Minoru Yazawa
  • Publication number: 20010014111
    Abstract: To provide a method and equipment for measuring a radiation temperature both capable of measuring temperatures of a substrate more accurately and stably than ever and equipment for manufacturing semiconductors therein such a radiation temperature measuring method can be applied. A reflectometer 21 irradiates, on a wafer W having Si and SiO2 layers, light of a wavelength that transmits the Si layer and is reflected from the SiO2 layer (an interface between Si and SiO2) to measure reflectance. With the reflectance and radiation energy at the wavelength of the wafer W measured by a radiation thermometer, a temperature of the wafer W is calculated. Thereby, even when a thin film is formed on a rear face of the substrate to blot and to result in a change of a state thereof, by the use of a stable interface in the substrate, temperatures can be measured with precision and stability.
    Type: Application
    Filed: February 16, 2001
    Publication date: August 16, 2001
    Inventor: Masahiro Shimizu
  • Patent number: 6267501
    Abstract: A method for measuring the temperature of a scene using a detector having at least one reference pixel, with an integratable sampling circuit associated with each pixel. Initially, an ambient reference temperature is observed with the reference pixel(s) to provide a parameter, generally voltage, indicative of that temperature to provide a constant voltage output indicating that temperature by varying the sampling circuit integration time. Each non-reference pixel is exposed to different scene and ambient temperatures and the integration time for each set of data for each pixel is recorded. For each pixel, an equation is provided relating integration time to pixel voltage when the ambient temperature and the scene temperature are the same to correct for offsets and an equation is provided relating integration time and offset corrected pixel value to the difference between the ambient temperature and the scene temperature when the ambient temperature and scene temperature differ for correction of responsivity.
    Type: Grant
    Filed: April 1, 1999
    Date of Patent: July 31, 2001
    Assignee: Raytheon Company
    Inventors: Martin A. Wand, Kenneth Rachels, John F. Brady, Michael Weinstein, David D. Ratcliff
  • Publication number: 20010009268
    Abstract: A solid state optical spectrometer for combustion flame temperature determination comprises: a first photodiode device for obtaining a first photodiode signal, the first photodiode device comprising a silicon carbide photodiode and having a range of optical responsivity within an OH band; a second photodiode device for obtaining a second photodiode signal, the second photodiode device comprising a silicon carbide photodiode and a filter, the second photodiode device having a range of optical responsivity in a different and overlapping portion of the OH band than the first photodiode device; and a computer for obtaining a ratio using the first and second photodiode signals and using the ratio to determine the combustion flame temperature.
    Type: Application
    Filed: February 27, 2001
    Publication date: July 26, 2001
    Applicant: General Electric Company
    Inventors: Dale Marius Brown, Kanin Chu
  • Patent number: 6217212
    Abstract: A method and device for detecting an incorrect position of a semiconductor wafer during a high-temperature treatment of the semiconductor water in a quartz chamber which is heated by IR radiators, has the semiconductor wafer lying on a rotating support and being held at a specific temperature with the aid of a control system. Thermal radiation which is emitted by the semiconductor wafer and the IR radiators is recorded using a pyrometer. The radiation temperature of the recorded thermal radiation is determined. The semiconductor wafer is assumed to be in an incorrect position if the temperature of the recorded thermal radiation fluctuates to such an extent over the course of time that the fluctuation width lies outside a fluctuation range &Dgr;T which is regarded as permissible.
    Type: Grant
    Filed: October 28, 1998
    Date of Patent: April 17, 2001
    Assignee: Wacker Siltronic Gesellschaft für Halbleitermaterialien AG
    Inventors: Georg Brenninger, Wolfgang Sedlmeier, Martin Fürfanger, Per-Ove Hansson
  • Patent number: 6183127
    Abstract: A system and method for determining the reflectivity of a workpiece during processing in a heating chamber of a thermal processing apparatus. The system first determines directly the reflectivity of the workpiece outside of the heating chamber of the thermal processing apparatus, and then determines the reflectivity of the workpiece during processing within the heating chamber of the thermal processing apparatus by correlating the ex situ wafer reflectivity with the intensity of the radiation reflected from the wafer within the heating chamber.
    Type: Grant
    Filed: March 29, 1999
    Date of Patent: February 6, 2001
    Assignee: Eaton Corporation
    Inventors: Jeffrey P. Hebb, Ali Shajii
  • Patent number: 6179466
    Abstract: A method of correcting a temperature probe reading in a thermal processing chamber for heating a substrate, including the steps of heating the substrate to a process temperature and using a first, a second and a third probe to measure the temperature of the substrate. The first probe has a first effective reflectivity and the second probe has a second effective reflectivity. The first probe produces a first temperature indication, the second probe produces a second temperature indication and the third probe produces a third temperature indication. The first and second effective reflectivities may be different. From the first and second temperature indications, a corrected temperature reading for the first probe may be derived, wherein the corrected temperature reading is a more accurate indicator of an actual temperature of the substrate than an uncorrected readings produced by both the first and second probes.
    Type: Grant
    Filed: March 18, 1998
    Date of Patent: January 30, 2001
    Assignee: Applied Materials, Inc.
    Inventors: Bruce W. Peuse, Gary E. Miner, Mark Yam, Aaron Hunter, Peter Knoot, Jason Mershon