Abstract: A method and apparatus for measuring the temperature of an object, such as a substrate, during processing. The object is illuminated by a light source. Infrared light that is transmitted through the object is then collected and transmitted to a photodiode. The amount of light transmitted through the substrate varies as a function of substrate temperature. The photodiode generates a signal in response to the light transmitted to the photodiode and an analyzing device generates a real-time temperature reading based on the signal. The photodiode may include at least one silicon photodiode or a plurality of photodiodes made from germanium or indium/gallium/arsenide.

Abstract: A calibration instrument for calibrating a temperature probe, such as pyrometer, uses a stable light source and a filter to simulate a blackbody of a known temperature. An alignment tool aligns a light-emitting surface of the calibration instrument to the input of the temperature probe. The calibration instrument may include a fiber optic bundle to transmit light from the light source to the light emitting surface.

Abstract: A mirror is moved in parallel to a print card to reflect the infrared radiated from the print card. The reflected infrared is detected by a detector such as an infrared camera though a wind rectifying plate which can permeate the infrared but interrupts the air stream between the inside and outside of a card rack. The signal corresponding to the detected infrared is processed by a personal computer to measure the temperature distribution.

Abstract: The present invention is generally directed to a system and process for accurately determining the temperature of an object, such as a semi-conductive wafer, by sampling from the object radiation being emitted at a particular wavelength. In one embodiment, a single reflective device is placed adjacent to the radiating object. The reflective device includes areas of high reflectivity and areas of low reflectivity. The radiation being emitted by the object is sampled within both locations generating two different sets of radiation measurements. The measurements are then analyzed and a correction factor is computed based on the optical characteristics of the reflective device and the optical characteristics of the wafer. The correction factor is then used to more accurately determine the temperature of the wafer. In an alternative embodiment, if the radiating body is semi-transparent, a reflective device is placed on each side of the object, which compensates for the transparency of the object.

Abstract: An apparatus for measuring the temperature of a substrate in a thermal processing chamber. The substrate is suspended above a reflector to form a reflecting cavity. A probe of a temperature sensor has an input end positioned to receive radiation from the reflecting cavity and an output end optically coupled to a detector to provide a temperature reading. The temperature sensor is configured to reduce the effect that radiation which has an axis of propagation within an angle of an axis normal to the reflector, e.g., substantially normal radiation from a portion of the substrate adjacent to the input end of the probe, has on the temperature reading.

Abstract: A temperature measuring device includes an optical fiber, a metallic protective tube covering the optical fiber, and a heat insulation coating covering the metallic protective tube such that the optical fiber is covered with the metallic protective tube and the heat insulation coating to form a double-covered optical fiber. The heat insulation coating contains carbon particles as an additive. In addition, a radiation thermometer is connected to the double-covered optical fiber, and a tip of the double-covered optical fiber forms a temperature measuring element for collecting and transmitting radiation to the radiation thermometer.

Abstract: The present invention is generally directed to a system and process for accurately determining the temperature of an object, such as a semi-conductive wafer, by sampling from the object radiation being emitted at a particular wavelength. In one embodiment, a single reflective device is placed adjacent to the radiating object. The reflective device includes areas of high reflectivity and areas of low reflectivity. The radiation being emitted by the object is sampled within both locations generating two different sets of radiation measurements. The measurements are then analyzed and a correction factor is computed based on the optical characteristics of the reflective device and the optical characteristics of the wafer. The correction factor is then used to more accurately determine the temperature of the wafer. In an alternative embodiment, if the radiating body is semi-transparent, a reflective device is placed on each side of the object, which compensates for the transparency of the object.

Abstract: Apparatus for measuring the temperature of workpieces, particularly semiconductor wafers, during their processing, including a head assembly having a head plate circumscribed by a raised rim for receiving the workpiece and for spacing it from the head plate to define an enclosed volume between the head plate, rim, and workpiece; a thermally-conductive member, e.g., an optical fiber, passing through the head assembly and having one end exposed to the enclosed volume such that it receives thermal radiation therefrom; and a thermal detector aligned with the opposite end of the thermally-conductive member for detecting the thermal radiation received by it from the enclosed volume and for converting same to an electrical signal representing a measurement of the temperature of the enclosed volume.

Abstract: Apparatus for measuring wafer support pedestal temperature in a semiconductor wafer processing system. The apparatus measures infrared energy emitted by the bottom of the pedestal via a tube having one end inserted in a bore through the underside of the cathode pedestal base. The distal end of the tube is coupled to a temperature sensor. Both the tube and temperature sensor are fitted with insulating sleeve adapters to suppress unwanted RF signals from coupling to the sensor.

Abstract: A durable tympanic thermometer that resists damage from a drop comprises an IR thermometer probe having a reinforced speculum for reception within a human ear near the tympanum, a metal brick holding the probe to the body of the infrared thermometer, a barrel within the speculum acting as an infrared waveguide, an insulating and shock absorbing seal surrounding the barrel, a window within the barrel remote from the end of the speculum nearest the tympanum, a thermometer housing, an infrared responsive sensor, and electrical components to translate and display a sensor-generated signal into a visible temperature reading.

Abstract: A probe tip in combination with a seal assembly that prevents debris and other contaminants from entering the probe tip. In the preferred embodiment, the seal comprises a tube with a filter holder assembly attached at the distal end of the holder. The filter holder assembly includes an infrared filter seated inside a screw-on member that is attached to a holder member with a sealing member located directly behind the infrared filter. During manufacturing, a predetermined force is applied to the proximal end of the tube which drives the distal end of the tube and filter holder assembly against the probe tip opening, thereby forming a watertight seal thereto. In alternative embodiments, the seal assembly may be comprised of a collar and gasket combination instead of a filter holder assembly.

Abstract: An improved method for aligning the aiming beams of an infrared heat sensor included the steps of providing a heat source at a target site, orienting the infrared heat sensor so that output signal is maximized to orient an optical axis toward the target site, and aligning the aiming beams relative to the target site.

Abstract: System and method for determining thermal characteristics, such as temperature, temperature uniformity and emissivity, during thermal processing using shielded pyrometry. The surface of a semiconductor substrate is shielded to prevent interference from extrinsic light from radiant heating sources and to form an effective black-body cavity. An optical sensor is positioned to sense emitted light in the cavity for pyrometry. The effective emissivity of the cavity approaches unity independent of the semiconductor substrate material which simplifies temperature calculation. The shield may be used to prevent undesired backside deposition. Multiple sensors may be used to detect temperature differences across the substrate and in response heaters may be adjusted to enhance temperature uniformity.

Abstract: An emissivity compensating non-contact system for measuring the temperature of a semiconductor wafer. The system includes a semiconductor wafer emissivity compensation station for measuring the reflectivity of the wafer at discrete wavelengths to yield wafer emissivity in specific wavelength bands. The system further includes a measurement probe which is optically coupled to a semiconductor process chamber. The probe senses wafer self emission using one or more optical detectors and a light modulator. A background temperature determining mechanism independently senses the temperature of a source of background radiation. Finally, a mechanism calculates the temperature of the semiconductor wafer based on the reflectivity, self-emission and background temperature.

Abstract: Wall temperatures of a reactor vessel are monitored by arranging an optical fibre in thermal contact with the wall and employing an optical time domain reflectometry system to monitor the respective temperatures at different points along the fibre. Such a monitoring method can be cheaper and more reliable than comparable prior art methods. An alarm may be triggered automatically when hot spots are detected.

Abstract: A waveguide for tympanic thermometer formed by an elongate hollow member having substantially ellipsoidal shape truncated at both ends along its major axis direction. The waveguide is interposed between a tympanic membrane of which the temperature is to be measured and an infrared radiation sensor so as to guide the infrared radiation from the tympanic membrane to the sensor. Alternatively, the waveguide may also be a hollow member including an end portion having a gradually reduced inner diameter toward the side of sensor. The gradually reduced end portion is preferably of a truncated half ellipsoidal shape having a length between about 1/10 to about 1/3 of the distance from the sensor to the distal end of the waveguide.

Abstract: A calibration instrument for calibrating a temperature probe, such as pyrometer, uses a stable light source, such as a light emitting diode, to simulate a blackbody of a known temperature. The light source is located inside a chamber and emits light through an aperture. The calibration instrument may be inserted into a thermal processing chamber, or the temperature probe may be removed from the chamber. An alignment tool aligns the aperture to the input of the temperature probe. The calibration instrument may be integrated with the alignment tool, or it may be removable.

Abstract: An improved ratio type infrared thermometer utilizes integrating amplifiers for each waveband having the integration time automatically set so that the output voltage utilizes the full range of an analog to digital convertor. The gain and offset of the amplifiers is not ambient temperature dependent so accurate digital representations of the signal for each waveband are provided. The linearized output of each detector is optionally provided so that special or proprietary algorithms for computing the temperature of colored objects can be utilized. A special feature for downloading of updated new programs utilizes a "programming jumper" and an attenuation warning signal is provided for selected levels of attenuation.

Abstract: A reactor for processing a substrate includes a first housing defining a processing chamber and supporting a light source and a second housing rotatably supported in the first housing and adapted to rotatably support the substrate in the processing chamber. A heater for heating the substrate is supported by the first housing and is enclosed in the second housing. The reactor further includes at least one gas injector for injecting at least one gas into the processing chamber onto a discrete area of the substrate and a photon density sensor extending into the first housing for measuring the temperature of the substrate. The photon density sensor is adapted to move between a first position wherein the photon density sensor is directed to the light source and a second position wherein the photon density sensor is positioned for directing toward the substrate. Preferably, the communication cables comprise optical communication cables, for example sapphire or quartz communication cables.

Abstract: The heat energy in a reactor used to process substrates is controlled to allow a more accurate measurement of the substrate temperature. The method of substrate temperature measurement is applicable to any reactor geometry and any type of heat source. Further, the method does not affect the process and so the performance of the reactor is unaffected when the substrate temperature measurement method is utilized. At a first predetermined time t1 during the process cycle, power to the heat source is turned off. At a second predetermined time t2, i.e., at the end of a time interval after the power is turned off, the heat energy from the reactor is measured for a predefined time interval, i.e., from second predetermined time t2 to a third predetermined time t3. After the measurement, i.e., at a fourth predetermined time t4, the power to the heat source is turned-on again and the process cycle continues. The time window over which the power is turned-off, i.e.

Abstract: Temperature of a body is determined by measuring the infrared radiation emitted by the body while simultaneously viewing the body. The body is viewed through a viewing cone with visible wavelength light conducted to the body from a remote source by optical fibers. Infrared radiation emitted by the body is collected by infrared-transmitting fibers which conduct the infrared energy to a remote sensor.

Abstract: Pyrometer with a probe beam superimposed on its field-of-view for furnace temperature measurements. The pyrometer includes a heterodyne millimeter/sub-millimeter-wave or microwave receiver including a millimeter/sub-millimeter-wave or microwave source for probing. The receiver is adapted to receive radiation from a surface whose temperature is to be measured. The radiation includes a surface emission portion and a surface reflection portion which includes the probe beam energy reflected from the surface. The surface emission portion is related to the surface temperature and the surface reflection portion is related to the emissivity of the surface. The simultaneous measurement of surface emissivity serves as a real time calibration of the temperature measurement. In an alternative embodiment, a translatable base plate and a visible laser beam allow slow mapping out of interference patterns and obtaining peak values therefor.

Abstract: Apparatus having a plurality of temperature sensors (probes) positioned at a number of locations upon a platform such as a placebo or dummy wafer and a method of fabricating and using the apparatus. The temperature sensors are photoemissive temperature sensors. To fabricate each of the photoemissive sensors, a thermally conductive epoxy is placed in a mound at each sensor location upon the platform. Upon one side of this mound, a coating of phosphorous material is applied. One end of a fiber optic cable abuts the phosphor material, and a an encapsulation layer such as a polyimide tape is positioned atop the conductive epoxy and the fiber optic cable such that the fiber optic cable is maintained in a stationary position relative to the phosphor material to obtain a local temperature of the wafer surface.

Abstract: An infrared sensor is particularly well suited for the detection of heat sources, specifically from fires. It comprises an infrared detector receiving infrared radiation from a focused refractive optical unit. An optical chopper and electronic amplifier enable the sensor to operate without drift and with immunity to temperature changes in the sensor itself. The infrared radiation from the optical unit is appropriately filtered so as to optimize reception in a frequency band between 2.6 and 2.8 microns. In this band, there exists negligible energy from the sun due to absorption by gas molecules in the earth's atmosphere. Consequently, the sensor can be used in full sunlight without becoming saturated by the large magnitude infrared radiation of the sun. The sensor contains circuitry providing an audible output signal whose pitch is proportional to the intensity of the infrared radiation received from nearby heat sources. The device does not require any visual attention from a firefighter.

Abstract: A temperature measuring device includes an optical fiber; a metallic protective tube for covering the optical fiber to form a metal-covered optical fiber; and a radiation thermometer connected to the metal-covered optical fiber. A heat insulation coating may be added to cover the metallic protective tube.

Abstract: A method and apparatus for measuring a true temperature using a consumable optical fiber, wherein received light emitted from a high temperature liquid is divided into two light beams through a branching filter. A light of a first wave band from a first light beam of the two light beams is detected by a first radiation thermometer, and the light of the first wave band is converted into temperature to output a first temperature. A light of a second wave band from a second light beam of the two light beams is detected by a second radiation thermometer, and the light of the second wave band is converted into temperature to output a second temperature.

Abstract: A temperature sensor comprising: a wave guide with a cylindrical wall; a material of low emissivity included at the cylindrical wall for generating black body radiation into the wave guide, wherein at least a portion of the generated black body radiation is carried through the wave guide; a first sensor receiving the generated black body radiation and providing a first output signal indicative of a first magnitude of a first bandwidth of the generated black body radiation; and a second sensor receiving the generated black body radiation and providing a second output signal indicative of a second magnitude of a second bandwidth of the generated black body radiation, wherein a difference between the first and second output signals is a linearized indication of temperature of at least a portion of the wave guide.

Abstract: The present invention relates to a method of detecting and/or measuring changes in a physical magnitude by means of a distributed sensor, changes being detected and/or measured at a plurality of "measurement" points along said sensor, said sensor comprising an optical fiber having an optical core for guiding the majority of light waves, said optical core including a plurality of diffraction gratings distributed along said optical fiber, each situated at one of said measurement points, said diffraction gratings all having substantially the same central reflection wavelength in the absence of strain, the method comprising the following steps: injecting a "detection" light signal into an "inlet" end of said optical fiber, the wavelength of the light signal being close to said central reflection wavelength; determining the power of one of the reflected signals, referred to as the "detected reflected power", as a function of time; comparing said detected reflected power as a function of time with the power reflect

Abstract: A light detector is disclosed for measuring the temperature of an object. The light detector includes a lens assembly for accepting light emitted from the object, an aperture, and a mirror for reflecting the infrared energy of the object into a fiber optic cable. The fiber optic cable is connected to a depolarizing element to which pressure is externally applied. The depolarization element relays the infrared energy into a detection portion and a signal processing portion for calculating temperature. Before the infrared light enters the fiber optic cable, a chopper, controlled by a driving circuit, chops the infrared energy reflected by the mirror.

Abstract: An improved tympanic thermometer incorporates twin thermopiles, each including a set of sensing junctions and a set of reference junctions configured so that three of the four sets of junctions sense only the temperature of an ambient environment, while the fourth set of junctions receives energy from both the ambient environment and from the tympanic membrane of a patient whose temperature is being taken. The energy received from the tympanic membrane is intentionally not bandwidth limited, enabling an accurate temperature measurement to be calculated which is substantially independent of wavelength. A light pipe is optionally included to assist in carrying radiation from the tympanic membrane to the fourth set of thermocouple junctions used for temperature sensing. In the preferred embodiment a dielectric coating is internally applied within the light pipe, and interchangeable tubes may be provided which conform to the aural physiology of different patients, including children.

Abstract: A system for aiming a remote IR temperature sensing device includes a beam splitter assembly and mirror assembly mounted on opposite sides of the body of the device. Both assemblies provide for adjusting the vertical and azimuthal positions of alignment beams to facilitate the use of inexpensive, low-tolerance parts while providing high accuracy to improve sensitivity, accuracy, and resolution. A dual action trigger initiates temperature measurement and logs currently measured temperature information.

Abstract: A system for determining the cleanliness of a boiler having a plurality of tube banks by obtaining a temperature profile of the boiler heat transfer surfaces includes extending an extension arm, such as a soot blower lance, near the tube banks of the boiler. A separate temperature reading is taken at intervals along the length of the extension arm by utilizing either a plurality of infrared non-contact temperature sensors or a plurality of optical fibers. Each separate temperature reading enables a temperature profile to be determined along the length of the extension arm which, in turn, allows deposit accumulation on the tube banks to be determined.

Abstract: A contamination-resistant, temperature-sensing device for sensing the extent of conductive heat flow from a metal surface. A heat transfer member is mounted to one end of a thermally insulative tube. The heat transfer member has two oppositely facing surfaces, one of which engages the metal surface to receive conductive heat flow therefrom, the other of which radiates transferred heat through the tube. A sensor is mounted to the other end of the tube to detect the extent of heat radiated through the tube and hence the extent of conductive heat flow from the metal surface. The sensing device also includes a housing surrounding the tube and the sensor. In addition, the sensing device includes a variable rate coil spring to allow the heat transfer member to bear against the metal surface at a constant contact force. A controller is electrically coupled to the sensor for controlling the extent of conductive heat flow from the metal surface based on the detected heat radiated through the tube.

Abstract: An apparatus and method for measuring a temperature of a high temperature liquid contained in a furnace. An optical fiber covered with a metallic tube is inserted through a passageway inside a nozzle arranged on a furnace wall of the furnace. The nozzle communicates with an interior of the furnace containing the liquid, and gas is supplied into the passageway inside the nozzle to prevent the nozzle from clogging. The metal-covered optical fiber is fed through the passageway inside the nozzle into the liquid such that spectral light radiated from the liquid enters a tip of the metal-covered optical fiber and is propagated therealong. The temperature of the liquid is determined by a radiation thermometer, coupled to the metal-covered optical fiber, based on the spectral light propagated along the metal-covered optical fiber.

Abstract: Radiometer with a probe beam superimposed on its field-of-view for furnace temperature measurements. The radiometer includes a heterodyne millimeter/submillimeter-wave receiver including a millimeter/submillimeter-wave source for probing. The receiver is adapted to receive radiation from a surface whose temperature is to be measured. The radiation includes a surface emission portion and a surface reflection portion which includes the probe beam energy reflected from the surface. The surface emission portion is related to the surface temperature and the surface reflection portion is related to the emissivity of the surface. The simultaneous measurement of surface emissivity serves as a real time calibration of the temperature measurement.

Abstract: A high temperature, short time microwave heating system 10 for heat-sensitive liquid material to inactivate or reduce pathogenic agents or organisms, such as viral contaminants. The system 10 includes a disposable cartridge 26 consisting of a preheater 32, a microwave heating coil 56 and cooler 58 with the heating coil 56 adapted to be easily inserted in and removed from the microwave heating field.

Abstract: A clinical thermometer for measuring the temperature of a living body in a noncontacting manner by receiving infrared radiation from an eardrum or a body surface. An infrared sensor senses infrared radiation incident through an opening portion for narrowing the angle of the field of view of the infrared sensor. An electrical signal from the infrared sensor is converted into the value of the temperature of an object to be measured. A maximum value TP.sub.ob of the converted temperature values is detected. In this manner, the maximum value TP.sub.ob detected when a predetermined time has elapsed from the start of the measurement is determined as the temperature of the object to be measured. The predetermined time at which the measurement is ended is extended in accordance with the time elapsed when the maximum value TP.sub.ob is detected, thereby determining the temperature of the object to be measured.

Abstract: A cardiac blood flow sensor includes a light source and a photodetector within a housing. The light source projects a beam through a fiber optic line having a first end optically connected to the housing and a distal tip positioned within the patient's heart. A ruby positioned at the distal tip is heated by the beam, and fluoresces for a period of time after illumination ceases. The period of time depends on the temperature of the ruby, so that the fluorescent light is transmitted back through the optic line to the photodetector. The signal generated by the photodetector may be analyzed to estimate the blood flow rate, due to the thermal effect of blood flowing past the heated ruby. The flow sensor may be contained in a common housing with a defibrillator that is implanted in a patient. The sensor may remain inactive until a tachycardia or rapid heart rate is detected, upon which the light source is activated.

Abstract: A bichromatic pyrometer for detecting the high temperature of a surface element of an object comprises two photodiodes (18, 19) receiving radiation from the object, each of the photodiodes having a large forbidden band and being sensitive to radiation in a given range of wavelengths, said sensitivity ranges being different and being situated in the visible or near visible regions of the spectrum, said ranges being obtained by selecting the value of the forbidden band of the material constituting each of the photodiodes (18) and (19), said forbidden band being greater than or equal to that of silicon (.gtoreq.1.11 eV). The pyrometer is capable of measuring rapidly changing surface temperatures with great accuracy.

Abstract: An interferometric temperature sensing system provides a simplified design for accurately processing an interference fringe pattern using self coupling effects of a laser detection element, where a laser diode and an optical detection element are combined in one package. Accordingly, the present invention is easily made and the measurement of temperatures within a wide range can be easily performed.

Abstract: A non-contact temperature measuring system and a dual-reference body structure employed therein is described, wherein a moving object whose temperature is to be determined, is passed by first and second reference bodies having a same form factor with respect to the moving object. Each of the reference bodies has a heat flow sensor embedded at the end of a cavity formed in the reference body such that the heat flow sensor primarily responds to radiation heat flow generated by a temperature differential between the moving object and its respective reference body.

Abstract: Surface temperature measurements of the tubes of operating power boilers are facilitated by using ganged and preferably scannable hollow-core sapphire probes to capture infrared radiation emanating from discrete tube surface areas. By selectively overlapping the tube surface areas scanned, the greater diameter of the scanning beam in relation to the tube diameter is compensated for and individual tubes can be assessed for surface temperature. Multiplexing the outputs of many probes to a remote signal processor which also controls the scanning regimens provides systematic automated temperature readings.

Abstract: A pyrometer for measuring thermal radiation and emissivity for both diffusely and specularly reflecting surfaces of an object which includes, a thermal radiation detector and an optical system connected to the detector for concentrating thermal radiation originating from an object surface area on the detector, an emissivity meter connected to the optical system, the meter further comprising a radiation source supplying measuring radiation and a measuring radiation detector, an optical integrator adjacent to the object surface area arranged in the radiation path of the measuring radiation between the radiation source and the measuring radiation detector, wherein the radiation source extends through an aperture of the optical integrator and diffusely irradiates the object surface, and a shield connected to the optical integrator for preventing measuring radiation from irradiating the object surface area directly, is described.

Abstract: A light receiving section of an optical pyrometer enables accurate temperature measurement of molten metal with minimum cost. The light receiving section of the optical pyrometer comprises a cylindrical member 1 made of a paper sleeve 2 with a quartz cap 4 sealed to the front end of the paper sleeve 2 using refractory material 3. An open end of the quartz cap 4 is oriented outwardly with respect to the cylindrical member 1 while the closed end 41 of the quartz cap 4 provides a light transmission window for transmitting radiant rays from the molten metal 24 to the optical pyrometer 21.

Abstract: A temperature measuring device comprises a light emitter, a nitrogen-containing diamond sensor, a light receiver, and lengths of fibre optics which connect the light emitter and the light receiver to the diamond sensor. The diamond sensor has a base through which the emitted and reflected light pass and sloping surfaces which lead to an apex. The amount of light which is absorbed by the diamond sensor will vary according to the temperature in which the diamond sensor is placed.

Abstract: An optical interferometer comprises a multi-mode sapphire fiber as a high temperature sensor. One end of the sapphire fiber is coupled to a silica fiber and, in turn, to the sapphire fiber. The sapphire fiber sensor produces reference and sensor reflections that produce optical fringes at the output of a detector coupled to the silica optical fiber via an opto-coupler. The optical fringes are related to displacements of the sensor which, in turn, can provide an indirect measurement of pressure, strain or temperature of the surface.

Abstract: An optical infrared thermometer has a sole core, refractive rod waveguide in an optical path between the infrared reception portion of the thermometer and the infrared sensor of the thermometer.

Abstract: A high temperature optical probe for an optical gas temperature sensor includes a support, a generally conical hollow tip, and a joint physically interconnecting the support and the tip. The tip includes as an electromagnetic radiation emitter a sapphire-free ceramic selected from the group consisting of silicon carbide and silicon nitride. An optical lens supported in the tip is removable from the tip for repair and replacement. The joint is of a material and geometry to accommodate the thermal stresses caused by differences in thermal coefficients of expansion between the tip, joint and support, and the mechanical stresses caused by the interaction of the probe and the gas stream during high velocity movement of the gas stream past the tip. The joint sidewall is welded to the support and has a thickness of 0.008-0.012 inch where it overlaps the tip.

Abstract: A blackbody high temperature probe is formed by thermally fusing a coating of composite ceramic material on the tip of a high temperature lightpipe or fiber. The ceramic coating replaces conventional sputtered metallic thin films to form a blackbody optical cavity. The ingredients of the composite ceramic material include a mixture of refractory metal oxides forming the bulk of the material, various pigments and/or refractory metal powders, and binding agents. A firing process is used to thermally fuse the coating onto the lightpipe. Embodiments of the firing process include using a flame or furnace technique, or alternatively using various flame- or plasma- spraying techniques.

Abstract: An optical fiber is laid in a spiral shape on a surface of an iron skin of a hot-air oven constituting a blast furnace facility, and one end of the optical fiber is connected to a temperature measuring apparatus. A temperature distribution of an optical fiber laid area is measured based on the intensity of Raman back scattering light of a light pulse transmitted into the optical fiber and based on a time interval until the Raman back scattering light returns to the transmission end of the optical fiber. The temperature distribution is displayed on a display screen to monitor the temperature distribution of the whole area of the iron skin of the hot-air oven to detect an abnormal condition thereof.