Optical System Structure (e.g., Lens) Patents (Class 374/130)
  • Patent number: 9986175
    Abstract: Various techniques are disclosed for providing a device attachment configured to releasably attach to and provide infrared imaging functionality to mobile phones or other portable electronic devices. For example, a device attachment may include a housing with a tub on a rear surface thereof shaped to at least partially receive a user device, an infrared sensor assembly disposed within the housing and configured to capture thermal infrared image data, and a processing module communicatively coupled to the infrared sensor assembly and configured to transmit the thermal infrared image data to the user device. Thermal infrared image data may be captured by the infrared sensor assembly and transmitted to the user device by the processing module in response to a request transmitted by an application program or other software/hardware routines running on the user device.
    Type: Grant
    Filed: June 23, 2015
    Date of Patent: May 29, 2018
    Assignee: FLIR SYSTEMS, INC.
    Inventors: Jeffrey D. Frank, Nicholas Högasten, Theodore R. Hoelter, Katrin Strandemar, Pierre Boulanger, Barbara Sharp, Andrew C. Teich, Dwight Dumpert, Mark Nussmeier, Eric A. Kurth
  • Patent number: 9617636
    Abstract: A vapor deposition system and its wafer and thin-film temperature control method are disclosed. A susceptor carries a plurality of wafer holders with each bearing a wafer. The susceptor makes revolution around a center axle and each wafer holder rotates around its own axis. A carrier gas approaches a first surface of the wafer and is heated to form a thin film to be deposited on the first surface. An isothermal plate is placed at a second surface of the wafer and the second surface is opposite to the first surface. One or more remote temperature-measuring elements measure a temperature of a rear surface of the isothermal plate and the rear surface is opposite to the wafer, and a wafer-side temperature is calculated by the measured rear surface temperature of the isothermal plate.
    Type: Grant
    Filed: August 31, 2015
    Date of Patent: April 11, 2017
    Assignee: HERMES-EPITEK CORPORATION
    Inventors: Chung-Yuan Wu, Bu-Chin Chung
  • Patent number: 9236552
    Abstract: A thermoelectric micro-platform includes a suspended micro-platform, the suspended micro-platform being configured as a support layer with a device layer disposed thereon. Two arrays of series-connected thermoelectric devices are disposed partially on the micro-platform. One array is operated as Peltier coolers and the other array is operated as Seebeck sensors.
    Type: Grant
    Filed: April 2, 2015
    Date of Patent: January 12, 2016
    Inventor: William N. Carr
  • Patent number: 9217852
    Abstract: An optical inspection system for nondestructive internal visual inspection and non-contact infra-red (IR) temperature monitoring of an online, operating power generation turbine. The optical inspection system includes an optical tube having a viewing port, at least one reflective mirror or a mirror array having a reflectivity spectral range from 550 nm to 20 ?m, and capable of continuous operation at temperatures greater than 932 degrees Fahrenheit (500 degrees Celsius), and a transparent window with high transmission within the same spectral range mounted distal the viewing port. The same optical mirror array may be used to measure selectively surface temperature of metal turbine blades in the near IR range (approximately 1 ?m wavelength) and of thermal barrier coated turbine blades in the long IR range (approximately 10 ?m wavelength).
    Type: Grant
    Filed: August 29, 2012
    Date of Patent: December 22, 2015
    Assignee: Siemens Energy, Inc.
    Inventor: Erwan Baleine
  • Patent number: 9151152
    Abstract: A fiber optic sensing tool assembly is deployed in a wellbore that penetrates a hydrocarbon-bearing formation of interest to measure fluid composition and other fluid characteristics. This measurement is implemented by deploying the tool in a region in which there is substantially no fluid flow and by heating the tool through an optical delivery system. Parameters of the fluid are monitored as a function of the heating of the tool to derive information that is indicative of fluid composition and other fluid characteristics.
    Type: Grant
    Filed: June 20, 2012
    Date of Patent: October 6, 2015
    Assignee: Schlumberger Technology Corporation
    Inventors: Dominic Brady, Arthur H. Hartog
  • Patent number: 9039276
    Abstract: A control unit sets a time interval for measuring a temperature of a liquid crystal panel as a first time interval (1 second), and thereafter measures the temperature of the liquid crystal panel each time the first time interval elapses. When the temperature of the liquid crystal panel is stabilized, the control unit sets a time interval for measuring the temperature of the liquid crystal panel as a second time interval (5 seconds). The control unit measures the temperature of the liquid crystal panel each time the second time interval elapses. Moreover, if an operation to change the amount of light reaching the liquid crystal panel is performed, the control unit restores the time interval for measuring the temperature of the liquid crystal panel to the first time interval.
    Type: Grant
    Filed: January 5, 2012
    Date of Patent: May 26, 2015
    Assignee: SEIKO EPSON CORPORATION
    Inventor: Shinsuke Fujikawa
  • Publication number: 20150131698
    Abstract: Embodiments of the present invention generally relate to methods and apparatus for monitoring substrate temperature uniformity in a processing chamber, such as an RTP chamber. Substrate temperature is monitored using an infrared camera coupled to a probe having a wide-angle lens. The wide-angle lens is positioned within the probe and secured using a spring, and is capable of withstanding high temperature processing. The wide angle lens facilities viewing of substantially the entire surface of the substrate in a single image. The image of the substrate can be compared to a reference image to facilitate lamp adjustments, if necessary, to effect uniform heating of the substrate.
    Type: Application
    Filed: October 17, 2014
    Publication date: May 14, 2015
    Inventors: Kim VELLORE, Dinesh KANAWADE, Leonid M. TERTITSKI, Norman L. TAM, Aaron Muir HUNTER
  • Publication number: 20150130119
    Abstract: A device to measure a temperature of molten metal may include an infrared sensor effective to measure the temperature of the molten metal, a sheath having an open end, a sealed end, and a channel extending from the open end to the sealed end, and an infrared-transparent window disposed between the infrared sensor and the channel of the sheath. The open end of the sheath is disposed near the infrared sensor and the sealed end of the sheath extends into the molten metal. The infrared-transparent window or rod is disposed between the infrared sensor and the channel of the sheath such that the infrared sensor can measure the temperature through the infrared-transparent window or rod, the channel, and the sealed end. The infrared-transparent window or rod seals the infrared sensor from the channel in the sheath.
    Type: Application
    Filed: November 6, 2014
    Publication date: May 14, 2015
    Applicant: CCPI INC.
    Inventor: Gary W. Hallum
  • Patent number: 9028136
    Abstract: A method for determining a blackbody temperature of an electrical discharge may include providing a radiometer with a sensor aperture, positioning a viewing aperture sheet between the sensor aperture and the electrical discharge, and providing the viewing aperture sheet with a viewing aperture therethrough, determining an area of the viewing aperture, determining a distance of the sensor aperture from the viewing aperture, observing the electrical discharge with the sensor aperture through the viewing aperture to obtain radiometer data, and calculating the blackbody temperature based at least on the radiometer data, the area of the viewing aperture and the distance of the sensor aperture from the viewing aperture.
    Type: Grant
    Filed: May 3, 2013
    Date of Patent: May 12, 2015
    Assignee: The Boeing Company
    Inventor: Michael M. Ladd
  • Patent number: 9028139
    Abstract: A component in a processing chamber of a substrate processing apparatus, where a temperature may be accurately measured by using a temperature measuring apparatus using an interference of a low-coherence light, even when a front surface and a rear surface are not parallel due to abrasion, or the like. A focus ring used in a vacuum atmosphere and of which a temperature is measured includes an abrasive surface exposed to an abrasive atmosphere according to plasma, a nonabrasive surface not exposed to the abrasive atmosphere, a thin-walled portion including a top surface and a bottom surface that are parallel to each other, and a coating member coating the top surface of the thin-walled portion, wherein a mirror-like finishing is performed on each of the top and bottom surfaces of the thin-walled portion.
    Type: Grant
    Filed: July 30, 2013
    Date of Patent: May 12, 2015
    Assignee: Tokyo Electron Limited
    Inventors: Jun Yamawaku, Chishio Koshimizu, Tatsuo Matsudo
  • Patent number: 9022648
    Abstract: A composite photonic crystal comprising an inverse opal structure defining an ordered array of voids with a filler composition received within the voids. A property of the filler composition changes in response to a stimulus, such as a temperature change, thereby changing the band gap of radiation that is reflected by the composite photonic crystal.
    Type: Grant
    Filed: November 11, 2010
    Date of Patent: May 5, 2015
    Assignee: PRC-DeSoto International, Inc.
    Inventors: Noel R. Vanier, Eldon L. Decker, Stuart D. Hellring, Xiangling Xu, Sean Purdy, Gregory J. McCollum
  • Patent number: 9006857
    Abstract: An IR sensor includes a suspended micro-platform having a support layer and a device layer disposed thereon. IR absorbers are disposed in or on the device layer. IR radiation received by the IR absorbers heats an on-platform junction of each of a plurality of series-connected thermoelectric devices operating in a Seebeck mode, the devices producing a voltage indicative of the received IR. Other thermoelectric devices are used to cool the platform, and a pressure sensing arrangement is used to detect loss of vacuum or pressure leaks.
    Type: Grant
    Filed: April 4, 2014
    Date of Patent: April 14, 2015
    Inventor: William N. Carr
  • Patent number: 8998485
    Abstract: The laser anemometry probe (LAP) system with continuous coherent detection, with single-particle mode, comprises means (AN) for analyzing the measurement signals of the said probe (LAP) and means (MES_T) for measuring the temperature (T). The system comprises, furthermore, means (DET_CG) for determining icing conditions when means (DET_GEL) for detecting the presence of a liquid water drop detect the presence of a liquid water drop, and when the said temperature (T) is below the said third threshold (S3).
    Type: Grant
    Filed: November 27, 2012
    Date of Patent: April 7, 2015
    Assignee: Thales
    Inventors: Jean-Pierre Schlotterbeck, Xavier LaCondemine
  • Patent number: 8986494
    Abstract: A plasma processing apparatus includes a temperature measuring unit; airtightly sealed temperature measuring windows provided in a mounting table, for optically communicating to transmit a measurement beam through a top surface and a bottom surface of the mounting table; and one or more connection members for connecting the mounting table and a base plate, which is provided in a space between the mounting table and the base plate. In the plasma processing apparatus, a space above the mounting table is set to be maintained under a vacuum atmosphere, and a space between the mounting table and the base plate is set to be maintained under a normal pressure atmosphere, and each collimator is fixed to the base plate at a position corresponding to each temperature measuring window, thereby measuring a temperature of the substrate via the temperature measuring windows by the temperature measuring unit.
    Type: Grant
    Filed: February 2, 2010
    Date of Patent: March 24, 2015
    Assignee: Tokyo Electron Limited
    Inventors: Tatsuo Matsudo, Chishlo Koshimizu, Jun Abe
  • Publication number: 20150043614
    Abstract: Provided are an infrared sensor and an infrared sensor device that are less susceptible to effects from the casing and lead wires, can be surface-mounted, and can measure the temperature of the object to be measured in a more accurate manner. This invention has: an insulating film; a first and a second heat sensitive element provided on the insulating film; a first and a second wiring film that are respectively connected to the heat sensitive elements; an infrared reflecting film; a terminal support body, arranged on the one face; and a plurality of mounting terminals provided to the terminal support body, wherein the mounting terminals have support convex parts protruding upward, the support convex parts are connected to the corresponding first and second wiring films, and the insulating film is supported such that a gap is provided between the terminal support body and the insulating film.
    Type: Application
    Filed: January 1, 2013
    Publication date: February 12, 2015
    Inventors: Kazuyoshi Tari, Mototaka Ishikawa, Keiji Shirata, Kenzo Nakamura
  • Publication number: 20150037056
    Abstract: An electronic apparatus includes a thermopile array sensor, a reflector, and a temperature detection unit. The thermopile array sensor includes a plurality of thermopile elements arranged in a two-dimensional array pattern and a temperature detection surface divided into a plurality of predetermined regions aligned in vertical and horizontal directions, and the thermopile elements output a temperature detection signal corresponding to a temperature of the respective predetermined regions. The reflector is set at an angle to reflect infrared light emitted from a measurement point located outside of a viewing angle of the thermopile array sensor, so as to allow the infrared light to be incident on the temperature detection surface. The temperature detection unit detects the temperature on the basis of the temperature detection signal outputted from each of the thermopile elements. The thermopile array sensor and the reflector are located inside the electronic apparatus.
    Type: Application
    Filed: July 11, 2014
    Publication date: February 5, 2015
    Inventors: Kentaro Naruse, Rie Tezuka
  • Patent number: 8926173
    Abstract: A distributed optical fiber sensor system is provided. In this system, backward-scattered light generated in a test optical fiber is filtered to separate the backward-scattered light into Raman scattered light and Brillouin scattered light. The separated Raman scattered light and Brillouin scattered light are each converted into digital data. A change in temperature with respect to the distance of the test optical fiber is measured from the digital data of the Raman scattered light. A change in temperature and a change in the degree of deformation with respect to the distance of the test optical fiber are measured from the digital data of the Brillouin scattered light. The change in temperature and the change in the degree of deformation with respect to the distance of the test optical fiber are separately output using the measured data.
    Type: Grant
    Filed: June 27, 2008
    Date of Patent: January 6, 2015
    Assignee: UTO International Corporation
    Inventor: Michael Lee
  • Patent number: 8920024
    Abstract: The present invention provides a steel plate quality assurance system and facilities thereof, wherein the steel plate quality assurance system measures, with a steel plate manufacturing line including a finishing mill of a steel plate manufacturing line, and accelerated cooling equipment disposed on the downstream side of the finishing mill in the advancing direction of the steel plate manufacturing line, temperature of at least the whole area of the upper surface of a steel plate, or the whole area of the lower surface of a steel plate to perform quality assurance, and includes temperature measurement means; temperature analysis means; and mechanical property determining means.
    Type: Grant
    Filed: March 26, 2009
    Date of Patent: December 30, 2014
    Assignee: JFE Steel Corporation
    Inventors: Koji Narihara, Toshikazu Akita, Yukihiro Okada, Yutaka Wada, Kouhei Obara, Toru Takahashi
  • Publication number: 20140376590
    Abstract: A system for optically monitoring a gas turbine engine includes a viewport having an opening disposed within a casing of the gas turbine engine. The opening extends from an interior side of the casing to an exterior side of the casing, and the viewport is configured to receive an image from inside the casing. The system also includes an optical connection positioned outside the casing and optically coupled to the viewport. The optical connection is configured to convey the image from the viewport to a detector array, and the optical connection includes multiple optical fibers fused to one another to form a unitary substantially rigid fiber bundle.
    Type: Application
    Filed: June 24, 2013
    Publication date: December 25, 2014
    Inventors: Wontae Hwang, William Albert Challener, Jason Harris Karp
  • Publication number: 20140376589
    Abstract: A system for optically monitoring a gas turbine engine includes a viewport into the gas turbine engine, and an optical connection having a first axial end and a second axial end. The first axial end is optically coupled to the viewport and configured to receive an image from the viewport, the optical connection includes a substrate having multiple hollow passages each extending from the first axial end to the second axial end, and each hollow passage includes a reflective coating disposed on an inner surface of the hollow passage to facilitate transmission of a respective portion of the image from the first axial end to the second axial end. In addition, the system includes a detector array in optical communication with the second axial end of the optical connection. The detector array includes multiple detection elements configured to receive multiple respective portions of the image from the hollow passages.
    Type: Application
    Filed: June 24, 2013
    Publication date: December 25, 2014
    Inventors: Jason Harris Karp, Wontae Hwang
  • Publication number: 20140321502
    Abstract: A thermometer includes a substrate; an optical resonator disposed on the substrate and including an optical resonance, the optical resonator being configured to receive a resonant frequency corresponding to the optical resonance; and a waveguide disposed on the substrate proximate to the optical resonator to receive input light, to communicate the resonant frequency to the optical resonator, and to transmit output light; wherein an aperture is interposed between: the substrate and the optical resonator, the substrate and the waveguide, or a combination comprising at least one of the foregoing, and the thermometer is configured to change the optical resonance in response to a change in temperature of the optical resonator.
    Type: Application
    Filed: June 11, 2014
    Publication date: October 30, 2014
    Applicant: NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY
    Inventors: ZEESHAN AHMED, STEVE SEMANCIK, JACOB M. TAYLOR, JINGYUN FAN, MOHAMMAD HAFEZI, HAITAN XU, GREGORY STROUSE
  • Patent number: 8870452
    Abstract: An optical system and a focusing structure for an infrared thermometer are provided. The optical system includes a focusing ocular barrel (100) and an objective focusing ring (300), provided at the rear end of an optical probe. The shift of the ocular (101) and the objective (201) can be controlled. The rear end of the probe includes a cap (507), which can be used for locking the detective image distance of the objective (201) and sealing and protecting the portion of the focusing operation.
    Type: Grant
    Filed: April 15, 2011
    Date of Patent: October 28, 2014
    Inventor: Guobing Yuan
  • Publication number: 20140314121
    Abstract: There are provided an optical non-destructive inspection apparatus that can inspect a measurement object such as a wire bonding portion. The apparatus includes a focusing-collimating unit, a heating laser beam source, a heating laser beam guide unit, a first infrared detector, a second infrared detector, an emitted-infrared selective guide unit, and a control unit. The control unit controls the heating laser beam source, measures a temperature rise characteristic that is a temperature rise state of a measurement spot based on a heating time, on the basis of a ratio between a detected value from the first infrared detector and a detected value from the second infrared detector, determines a state of a measurement object based on the temperature rise characteristic, and changes at least one of wavelengths of infrared light beams guided to the first infrared detector and the second infrared detector based on a measured temperature during measurement.
    Type: Application
    Filed: April 10, 2014
    Publication date: October 23, 2014
    Applicant: JTEKT CORPORATION
    Inventors: Naoki MATSUMOTO, Kouya YOSHIDA, Jun MATSUMOTO
  • Patent number: 8853632
    Abstract: An IR sensor comprises a heat sink substrate (10) having portions (12) of relatively high thermal conductivity and portions (14) of relatively low thermal conductivity and a planar thermocouple layer (16) having a hot junction (18) and a cold junction (20), with the hot junction (18) located on a portion (14) of the heat sink substrate with relatively low thermal conductivity. A low thermal conductivity dielectric layer (22) is provided over the thermocouple layer (16), and has a via (24) leading to the hot junction (18). An IR reflector layer (26) covers the low thermal conductivity dielectric layer (22) and the side walls of the via (24). An IR absorber (30; 30?) is within the via. This structure forms a planar IR microsensor which uses a structured substrate and a dielectric layer to avoid the need for any specific packaging. This design provides a higher sensitivity by providing a focus on the thermocouple, and also gives better immunity to gas conduction and convection.
    Type: Grant
    Filed: September 7, 2009
    Date of Patent: October 7, 2014
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Mohamed Boutchich, Benoit Bataillou
  • Publication number: 20140286376
    Abstract: A thermometer comprises an emitting unit, a light receiving unit, a lens unit, and a calculation unit. The emitting unit is configured to emit a measurement light into a flue, wherethrough a gas that contains light dispersing particles flows. The light receiving unit is configured to receive, of the measurement light, dispersed measurement light dispersed by the light dispersing particles. The lens unit is configured to set its focal point at a prescribed position inside the flue and along the light receiving axis. The calculation unit is configured to calculate the temperature inside the flue based on an intensity ratio of absorption spectra at a plurality of wavelengths.
    Type: Application
    Filed: March 20, 2014
    Publication date: September 25, 2014
    Applicant: HORIBA, Ltd.
    Inventors: Takuya Ido, Tetsuya Mori
  • Patent number: 8821010
    Abstract: A temperature measuring method comprises a step of detecting, by an infrared thermometer, the intensity of an infrared radiation coming from a region of interest of a patient for determining the patient's temperature, and a step of pointing a target area that is coincident with the region of interest and is the even and smooth surface of a body having a homogeneous underlying vascularization, and being preferably devoid of hair or chitinous or keratinous skin formations.
    Type: Grant
    Filed: June 4, 2010
    Date of Patent: September 2, 2014
    Assignee: Tecnimed S.R.L.
    Inventor: Francesco Bellifemine
  • Patent number: 8817843
    Abstract: A method for receiving a chirp signal at a receiver, the chirp signal communicated over a link from a transmitter, the chirp signal comprising at least one symbol, each symbol comprising a plurality of identical chirps, each chirp encoding a symbol value, the method comprising: determining a measure indicative of error in the received chirp signal; determining the number of coherent integrations and non-coherent integrations to apply per symbol in dependence on the indicated error; for each symbol, coherently and non-coherently integrating the plurality of chirps in accordance with the determined numbers so as to form an integrated symbol; and for each symbol, decoding the symbol value from the integrated symbol.
    Type: Grant
    Filed: June 15, 2012
    Date of Patent: August 26, 2014
    Assignee: Cambridge Silicon Radio Limited
    Inventor: Paul Dominic Hiscock
  • Patent number: 8807832
    Abstract: Apparatus for a spatially resolved temperature measurement, with at least one optical fiber (6) for the spatially resolved temperature measurement, and at least one laser light source (2) producing light (3, 23) which can be coupled into the optical fiber (6), wherein the portions of the light (3, 23) backscattered in the optical fiber (6) can be coupled out of the optical fiber (6) and evaluated. The apparatus further includes means for reducing polarization-induced effects, wherein the means may be, for example, a polarization modifier (4) capable of at least partially depolarizing the light (3).
    Type: Grant
    Filed: November 12, 2010
    Date of Patent: August 19, 2014
    Assignee: Lios Technology, GmbH
    Inventor: Wieland Hill
  • Patent number: 8794828
    Abstract: A method for measuring temperature of an object using the longitudinal mode output by a short cavity fiber laser, includes steps of: a) arranging the short cavity fiber laser, which laser comprises sequentially coupled laser diode pumping source, a wavelength division multiplexer, a fiber bragg grating, an active optical fiber and a loop mirror which are; b) contacting the short cavity fiber laser with the object whose temperature will be measured; c) measuring the drift amount of longitudinal mode output by the short cavity fiber laser; and d) calculating the temperature of the object to be measured. According to the present invention, the temperature can be measured accurately utilizing the features of the short cavity fiber laser. The arranged fiber laser has a small and simple structure, high measuring accuracy, good portability, and can be used in a variety of occasions.
    Type: Grant
    Filed: October 9, 2013
    Date of Patent: August 5, 2014
    Assignee: Beijing Information Science & Technology University
    Inventors: Lianqing Zhu, Fei Luo, Mingli Dong, Yinmin Zhang, Wei He, Xiaoping Lou
  • Patent number: 8790006
    Abstract: A thermal measurement system that includes a light collection device and a detection system in communication with the device. The detection system includes two detection subsystems, wherein one subsystem is configured to detect light from a surface of an object, while the other subsystem is configured to detect light from the surface and a gas. The present invention has been described in terms of specific embodiment(s), and it is recognized that equivalents, alternatives, and modifications, aside from those expressly stated, are possible and within the scope of the appending claims.
    Type: Grant
    Filed: November 30, 2009
    Date of Patent: July 29, 2014
    Assignee: General Electric Company
    Inventors: Hejie Li, Samhita Dasgupta, Edward Randall Furlong, Nirm Velumylum Nirmalan, Anquan Wang, Guanghua Wang, Stephen Thomas Walls, Lesley Ellen Brown
  • Patent number: 8777483
    Abstract: The temperature measuring apparatus includes: a light source; a first wavelength-dividing unit which wavelength-divides a light from the light source into m lights whose wavelength bands are different from one another; m first dividing units which divides each of the m lights from the first wavelength-dividing unit into n lights; a transmitting unit which transmits lights from the m first dividing unit to measurement points of an object to be measured; a light receiving unit which receives a light reflected by each of the measurement points; and a temperature calculating unit which calculates a temperature of each of the measurement points based on a waveform of the light received by the light receiving unit.
    Type: Grant
    Filed: September 13, 2011
    Date of Patent: July 15, 2014
    Assignee: Tokyo Electron Limited
    Inventors: Jun Yamawaku, Chishio Koshimizu, Tatsuo Matsudo, Kenji Nagai
  • Patent number: 8753007
    Abstract: A system includes a sensing cell having a walled structure configured to receive a fuel sample within an interior space of the walled structure. The sensing cell also has at least one cooling surface located on at least a portion of the walled structure and configured to cool the fuel sample. The sensing cell further has an optical port configured to couple to one or more optical fibers and to provide first radiation to the fuel sample. In addition, the sensing cell has a mirror configured to reflect the first radiation in order to provide second radiation to the optical port. The optical port defines a collinear optical geometry for providing the first radiation to the fuel sample and receiving the second radiation through the fuel sample. The system also includes at least one cooler configured to cool the fuel sample in the sensing cell by cooling the at least one cooling surface.
    Type: Grant
    Filed: August 17, 2010
    Date of Patent: June 17, 2014
    Assignee: Honeywell ASCa Inc.
    Inventors: Frank M. Haran, Sebastien Tixier, Stuart J. Heath
  • Publication number: 20140153611
    Abstract: A temperature distribution measurement system includes an optical fiber, a laser light source optically connected to the optical fiber, a photodetector configured to detect light backscattered in the optical fiber, and a temperature distribution measurement unit configured to perform correction calculation using a transfer function on a measured temperature distribution obtained from an output from the photodetector. The temperature distribution measurement unit acquires an actual temperature distribution in a location where the optical fiber is laid and determines appropriateness of the transfer function by computing a difference between the measured temperature distribution after the correction and the actual temperature distribution.
    Type: Application
    Filed: February 5, 2014
    Publication date: June 5, 2014
    Applicant: FUJITSU LIMITED
    Inventors: Takeo Kasajima, Kazushi Uno, Minoru Ishinabe, Kyoko Tadaki, Fumio Takei
  • Patent number: 8740455
    Abstract: An apparatus for measuring environmental parameters includes: an optical fiber sensor configured to be disposed along a path in an environment to be measured, the path of the optical fiber sensor defining a longitudinal axis; and at least one section of the optical fiber sensor configured so that an entire length of the at least one section is exposed to an at least substantially homogeneous environmental parameter, at least part of the at least one section extending in a direction having a radial component relative to the longitudinal axis.
    Type: Grant
    Filed: December 8, 2010
    Date of Patent: June 3, 2014
    Assignee: Baker Hughes Incorporated
    Inventor: Travis S. Hall
  • Patent number: 8734008
    Abstract: An active sensor apparatus includes an array of sensor elements arranged in a plurality of columns and rows of sensor elements. The sensor apparatus includes a plurality of column and row thin film transistor switches for selectively activating the sensor elements, and a plurality of column and row thin film diodes for selectively accessing the sensor elements to obtain information from the sensor elements. The thin film transistor switches and thin film diodes are formed on a common substrate.
    Type: Grant
    Filed: November 3, 2009
    Date of Patent: May 27, 2014
    Assignee: Next Biometrics AS
    Inventor: Matias N. Troccoli
  • Publication number: 20140140712
    Abstract: An infrared temperature sensor including: a sensor case made of metal and including a first airspace (a light guiding region) that guides infrared rays entering from an infrared entrance window, and a second airspace (a light shielding region) that is adjacent to the light guiding region via a partition wall, and where an upper wall that blocks entrance of the infrared rays is formed on an entrance side of the infrared rays; a film that absorbs the infrared rays reaching the film through the light guiding region, and converts the infrared rays to heat; a sensor cover that is made of metal and arranged opposing the sensor case via the film; an infrared detection element and a temperature compensation element arranged on the film, wherein the light guiding region and the light shielding region have substantially symmetrical forms with respect to the partition wall.
    Type: Application
    Filed: January 24, 2014
    Publication date: May 22, 2014
    Applicant: SHIBAURA ELECTRONICS, CO., LTD.
    Inventors: Noriyuki Nakayama, Morihisa Hamada, Tatsuya Konno, Shingo Maruyama
  • Publication number: 20140140370
    Abstract: A medical thermometer including a curved mirror and a radiation sensor is disclosed. The radiation sensor is disposed relative to the mirror in a configuration whereby the mirror reflects away from the sensor radiation that passes through the radiation entrance and that is oriented outside a range of angles relative to the mirror, and reflects toward the sensor radiation that passes through the radiation entrance and that is oriented within a range of angles relative to the mirror.
    Type: Application
    Filed: November 18, 2013
    Publication date: May 22, 2014
    Applicant: Kaz USA, Inc.
    Inventors: Aleksan Yildizyan, James Christopher Gorsich
  • Patent number: 8726837
    Abstract: A system for monitoring a process inside a high temperature semiconductor process chamber by capturing images is disclosed. Images are captured through a borescope by a camera. The borescope is protected from high temperatures by a reflective sheath and an Infrared (IR) cut-off filter. Images can be viewed on a monitor and can be recorded by a video recording device. Images can also be processed by a machine vision system. The system can monitor the susceptor and a substrate on the susceptor and surrounding structures. Deviations from preferred geometries of the substrate and deviations from preferred positions of susceptor and the substrate can be detected. Actions based on the detections of deviations can be taken to improve the performance of the process. Illumination of a substrate by a laser for detecting deviations in substrate geometry and position is also disclosed.
    Type: Grant
    Filed: June 23, 2008
    Date of Patent: May 20, 2014
    Assignee: Applied Materials, Inc.
    Inventors: Kailash K. Patalay, Craig Metzner, David K. Carlson
  • Patent number: 8727610
    Abstract: The object is to provide a laser processing apparatus, a laser processing temperature measuring apparatus, a laser processing method, and a laser processing temperature measuring method which can highly accurately detect the processing temperature when carrying out processing such as welding with laser light. A laser processing apparatus 1A for processing members DR, UR to be processed by irradiating the members with laser light LB comprises a laser (semiconductor laser unit 20A) for generating the laser light LB; optical means for converging the laser light LB generated by the laser onto processing areas DA, UA; and a filter 30, disposed between the members DR, UR to be processed and the optical means, for blocking a wavelength of fluorescence generated by the optical means upon pumping with the laser light LB; wherein light having the wavelength blocked by the filter 30 is used for measuring a temperature of the processing areas DA, UA.
    Type: Grant
    Filed: November 24, 2009
    Date of Patent: May 20, 2014
    Assignee: Hamamatsu Photonics K.K.
    Inventors: Satoshi Matsumoto, Tsuyoshi Kosugi
  • Patent number: 8696197
    Abstract: A method and system are disclosed for determining at least one optical characteristic of a substrate, such as a semiconductor wafer. Once the optical characteristic is determined, at least one parameter in a processing chamber may be controlled for improving the process. For example, in one embodiment, the reflectivity of one surface of the substrate may first be determined at or near ambient temperature. From this information, the reflectance and/or emittance of the wafer during high temperature processing may be accurately estimated. The emittance can be used to correct temperature measurements using a pyrometer during wafer processing. In addition to making more accurate temperature measurements, the optical characteristics of the substrate can also be used to better optimize the heating cycle.
    Type: Grant
    Filed: March 9, 2012
    Date of Patent: April 15, 2014
    Assignee: Mattson Technology, Inc.
    Inventor: Paul Janis Timans
  • Patent number: 8672539
    Abstract: A multiple sensor fiber optic sensing system. A method of sensing distributed temperature and at least another property in a well includes the steps of: interconnecting an optical switch to an optical fiber which extends along a wellbore in the well; operating the optical switch to optically connect the optical fiber to an interferometric measurement system; and operating the optical switch to optically connect the optical fiber to a distributed temperature measurement system. Another method includes the steps of: installing an optical fiber along a wellbore in the well, the optical fiber being a first distributed temperature sensor, the installing step including providing a substantial length of the optical fiber proximate a second sensor which senses the well property; and calibrating the second sensor using a temperature sensed by the first sensor in the substantial length of the optical fiber.
    Type: Grant
    Filed: June 8, 2009
    Date of Patent: March 18, 2014
    Assignee: Halliburton Energy Services, Inc.
    Inventor: Neal G. Skinner
  • Patent number: 8668383
    Abstract: Methods and apparatus for wafer temperature measurement and calibration of temperature measurement devices may be based on determining the absorption of a layer in a semiconductor wafer. The absorption may be determined by directing light towards the wafer and measuring light reflected from the wafer from below the surface upon which the incident light impinges. Calibration wafers and measurement systems may be arranged and configured so that light reflected at predetermined angles to the wafer surface is measured and other light is not. Measurements may also be based on evaluating the degree of contrast in an image of a pattern in or on the wafer. Other measurements may utilize a determination of an optical path length within the wafer alongside a temperature determination based on reflected or transmitted light.
    Type: Grant
    Filed: April 16, 2012
    Date of Patent: March 11, 2014
    Assignee: Mattson Technology, Inc.
    Inventor: Paul Janis Timans
  • Publication number: 20140064328
    Abstract: Systems, methods and apparatus are provided through which in some implementations a non-contact thermometer includes a square-angled waveguide.
    Type: Application
    Filed: April 17, 2013
    Publication date: March 6, 2014
    Applicant: BROOKLANDS, INC.
    Inventor: Jason Roth
  • Publication number: 20140033737
    Abstract: A temperature measurement system includes at least one filament configured to emit thermal radiation in a relatively broad and substantially continuous wavelength band that is at least partially representative of a temperature of the at least one filament. The system also includes an optical system configured to receive at least a portion of the thermal radiation emitted from the filament. The optical system includes a wavelength splitting device configured to split the emitted thermal radiation into at least one relatively narrow wavelength band of thermal radiation. The optical system also includes a detector array configured to receive the at least one relatively narrow wavelength band of thermal radiation and to generate electrical signals at least partially representative of the received thermal radiation. The temperature measurement system further includes a controller communicatively coupled to the detector array.
    Type: Application
    Filed: July 31, 2012
    Publication date: February 6, 2014
    Applicant: GENERAL ELECTRIC COMPANY
    Inventors: Guanghua Wang, Nirm Velumylum Nirmalan, Todd Garrett Wetzel, Ronald Scott Bunker, Robert Michael Zacharias, Shawn David Wehe, Robert David Briggs, Jonathan Edward Slepski
  • Patent number: 8628237
    Abstract: A method for measuring a contacting thermal resistance of one-dimensional structures is provided. A first one-dimensional structure and A second one-dimensional structure are crossed and in contact with each other to form a suspended junction. A point P of the first one-dimensional structure is heated until the first one-dimensional structure and the second one-dimensional structure reach a thermal equilibrium. A point A and a point B are selected on the first one-dimensional structure and a point C and a point D are selected on the second one-dimensional structure, wherein the point B, the point A, the suspended junction, the point C and the point D are arranged equidistantly with a distance ?x. A temperature difference ?Tj is calculated by the formula ?Tj=?TAC??TBA??TCD. The heat flux Qj is calculated by the formula Qj=2k?TCD/?x. The contacting thermal resistance Rj is calculated by the formula Rj=?Tj/Qj.
    Type: Grant
    Filed: January 24, 2013
    Date of Patent: January 14, 2014
    Assignees: Tsinghua University, Hon Hai Precision Industry Co., Ltd.
    Inventors: Jun-Ku Liu, Qun-qing Li, Yuan Zou, Shou-Shan Fan
  • Patent number: 8622612
    Abstract: A focus error signal resulting from the photothermically-induced expansion is measured in a sample of material under analysis. A laser is disposed as a periodically modulated heating source which is directed to the sample and a device for focus error measuring which is directed to the surface being heated. A device measuring focus error generates a signal representative of the displacement of the surface of material in perpendicular direction due to the expansion produced by the periodic heating, which is filtered, either analogically or digitally, to discriminate the displacement component at the frequency in which it was modulated or at any other related frequency, such any harmonic or a sum with any other modulation. The focus error signal, appropriately calibrated, gives a precise and sensitive measure of the magnitude the expansion.
    Type: Grant
    Filed: February 12, 2010
    Date of Patent: January 7, 2014
    Assignee: Consejo Nacional de Investigaciones Cientificas y Tecnicas (Conicet)
    Inventors: Oscar Eduardo Martínez, Esteban Alejo Domené, Nélida Mingolo, Francisco Balzarotti, Andrea Verónica Bragas
  • Patent number: 8608375
    Abstract: A method of measuring a temperature of a noble gas in a chamber includes providing the noble gas in the chamber. The noble gas is characterized by a pressure and a temperature. The method also includes directing a first laser beam into the chamber and directing a second laser beam into the chamber. The first laser beam is characterized by a first frequency and the second laser beam is characterized by a second frequency. The method further includes converting at least a portion of the first laser beam and the second laser beam into a coherent anti-Stokes beam, measuring a Doppler broadening of the coherent anti-Stokes beam, and computing the temperature using the Doppler broadening.
    Type: Grant
    Filed: October 15, 2010
    Date of Patent: December 17, 2013
    Assignee: Lawrence Livermore National Security, LLC
    Inventor: Mark Rhodes
  • Patent number: 8602640
    Abstract: A sensing system is configured to detect physical parameters of a fluid sample. In particular, the sensing system is configured to detect the dew point of the fluid by reducing temperature of a sensing medium and detecting the fluid condensate on a sensing surface by directing light from a light source to the sensing surface and detecting the light reflected off the sensing surface onto a light detector. The light source and the light detector are on the opposite side of the sensing medium from the sensing surface.
    Type: Grant
    Filed: May 20, 2009
    Date of Patent: December 10, 2013
    Assignee: Entegris—Jetalon Solutions, Inc.
    Inventors: Ronald P. Chiarello, Christopher Andrew Wacinski, Charles Eric Boyd, Stewart Robin Shearer
  • Patent number: 8591103
    Abstract: An infrared thermometer includes a probe and an infrared sensor. The probe with an infrared target absorbs thermal radiation to provide a substantially consistent source of infrared radiation and an aperture for preventing contamination of the infrared target while permitting the transmission of thermal radiation to the target. The infrared sensor is configured for sensing infrared radiation from the infrared target. The infrared target is positioned within the probe such that it absorbs thermal radiation that comes from the aperture and thereafter emits thermal radiation to the infrared sensor.
    Type: Grant
    Filed: August 26, 2010
    Date of Patent: November 26, 2013
    Assignee: Welch Allyn, Inc.
    Inventors: John A. Lane, David E. Quinn
  • Patent number: 8568025
    Abstract: A temperature probe for use in oil-filled transformers comprises an optical fiber, a temperature sensitive member, and a protective cylindrical sheath. The optical fiber and the sensitive member are located in the protective sheath, and continuous longitudinal slit is defined along the length of the sheath to allow oil to flow therein. The optical fiber is mounted in and to the sheath using a bonding material and at a distance from the sheath. The sensitive member is adhesively mounted to the optical fiber, within the sheath, and at a distance thereof.
    Type: Grant
    Filed: October 17, 2008
    Date of Patent: October 29, 2013
    Inventors: Jean-François Meilleur, Jean-Noël Bérubé, Michel Plourde