Change Of Optical Property Patents (Class 374/161)
  • Patent number: 11385130
    Abstract: Multi-spectral feature sensing techniques and sensor and related digital signal processing circuitry and methods. A method of operating a digital signal processing circuitry includes acquiring optical frequency domain reflectometry (OFDR) data from an interferometer operably coupled to a tunable laser and a sensing fiber, separating sensor signals corresponding to sensors of the sensing fiber from the OFDR data, and inferring a relative shift of a separated sensor signal. A digital signal processing circuitry includes a front end circuitry and a back end circuitry. The front end circuitry is configured to isolate sensor responses from an input signal including OFDR data. The back end circuitry is configured to determine a phase shift corresponding to each isolated sensor response.
    Type: Grant
    Filed: April 13, 2021
    Date of Patent: July 12, 2022
    Inventor: Ryan Seeley
  • Patent number: 11369525
    Abstract: A flexible sensing panel includes a flexible substrate having first and second major surfaces, first and second separated side edges, and first and second ends, the flexible substrate being at least partly disposed between a flexible protective layer and a flexible fastening layer, and at least one sensing element being disposed on the flexible substrate. The protective layer is secured to the first major surface of the flexible substrate and is folded over the first and second side edges onto the second major surface of the flexible substrate and secured thereto to position at least part of the first and second side edges within the so formed folds, and wherein the fastening layer is at least partly disposed on the second major surface of the flexible substrate and secured thereto.
    Type: Grant
    Filed: July 5, 2019
    Date of Patent: June 28, 2022
    Assignee: ESSITY HYGIENE AND HEALTH AKTIEBOLAG
    Inventors: Kent Hermansson, Anders Jonsson
  • Patent number: 11359976
    Abstract: Examples of a fiber optic temperature measuring system for measuring a temperature of a surface at multiple points simultaneously in real time is provided. The fiber optic temperature measuring system comprises a fiber optic probe with fiber bundle with plurality of individual fibers with thermographic phosphor at the fiber's tip and a high-speed camera. Invention allows accurate multipoint measurement of ESC' surface temperature. The thermographic phosphor is embedded in a nudge at the tip of each individual fibers or on the surface (under the surface) at predetermined positions.
    Type: Grant
    Filed: October 22, 2021
    Date of Patent: June 14, 2022
    Assignee: Accelovant Technologies Corporation
    Inventors: Ondrej Mecl, Noah John Joe Johnson
  • Patent number: 11359968
    Abstract: Disclosed herein is an apparatus for adjusting the installation location of a temperature sensor configured to measure the surface temperature of a wafer in a semiconductor wafer cleaning apparatus. The apparatus includes: a bracket which is disposed in the upper end of the side wall of each of multi-station processing chambers (MPCs); a first fastening member which fastens a cable; a second fastening member which fastens a temperature sensor; a location adjustment member which fastens and supports the temperature sensor; the temperature sensor which is fixedly coupled to an end of the location adjustment member; a jig which includes a location adjustment plate and a control substrate, and which adjusts the detection location of the temperature sensor; and a controller which is provided with a wafer surface monitoring system configured to separate the surface temperature into a plurality of channels and to display the surface temperature.
    Type: Grant
    Filed: September 25, 2019
    Date of Patent: June 14, 2022
    Assignees: AJ TECH CO., LTD.
    Inventor: Jongpal Ahn
  • Patent number: 11308245
    Abstract: A system for facilitating evaluation of characteristics related to quality associated with a machine design may include a user input device configured to generate a query related to one or more characteristics related to quality associated with a machine design. The system may also include a display device configured display images, and a processor in communication with the user input device and the display device. The processor may be configured to receive a query from the user input device, access data representative of the machine design, and generate image data representative of characteristics related to quality associated with the machine design. The image data may be communicated to the display device to display a machine image including a color-coded representation of at least a portion of a machine and a textual image including textual representations of information related to the machine design.
    Type: Grant
    Filed: January 8, 2019
    Date of Patent: April 19, 2022
    Assignee: Caterpillar Inc.
    Inventors: Yihong Yang, Amit Kashyap, Abdul Aziz Baig Mirza, Abhishek Ramaswamy, Mihai Sandulescu, Jeffrey Paul Sayre, Cody LeRoy Webster, Scott Antonio Zacek
  • Patent number: 11287408
    Abstract: A gas detector sensor node includes a first sensor conductor having a terminal end, a second sensor conductor including an end section, and a coupler joining the terminal end of the first sensor conductor with the end section of the second sensor conductor. The coupler is permeable to gas.
    Type: Grant
    Filed: April 30, 2019
    Date of Patent: March 29, 2022
    Assignee: BAKER HUGHES, A GE COMPANY, LLC
    Inventors: Jason Harris Karp, William Albert Challener
  • Patent number: 11261382
    Abstract: A method for non-combustive gasification of a hydrocarbon material includes introducing a mass of hydrocarbon material into a chamber, wherein a transmissive wall of the chamber has a pass band in the infrared frequency spectrum, removing air from the chamber; heating the hydrocarbon material within the chamber by radiating, from an infrared emitter, infrared radiation at a frequency corresponding to the pass band to convert at least one component of the hydrocarbon material to a gas, and turning the hydrocarbon material within the chamber to expose inner material to the infrared radiation.
    Type: Grant
    Filed: July 8, 2020
    Date of Patent: March 1, 2022
    Inventor: James William Masten, Jr.
  • Patent number: 11255734
    Abstract: In some examples, a temperature distribution sensor may include a laser source to emit a laser beam that is tunable over a wavelength range. The wavelength range may be less than a Raman bandwidth in a device under test (DUT), or of-the-order-of the Raman bandwidth in the DUT. A pulsed source may apply a pulse drive signal to the laser beam or to a modulator to modulate the laser beam that is to be injected into the DUT. A bandpass filter may be operatively disposed between the laser source and the DUT, and may be configured to an anti-Stokes wavelength that is narrower than the Raman bandwidth. A photodiode may be operatively disposed between the bandpass filter and the DUT to acquire, from the DUT, anti-Stokes optical time-domain reflectometer traces for two preset wavelengths of the laser beam to determine a temperature distribution for the DUT.
    Type: Grant
    Filed: August 17, 2020
    Date of Patent: February 22, 2022
    Assignee: VIAVI SOLUTIONS INC.
    Inventor: Vincent Lecoeuche
  • Patent number: 11204286
    Abstract: Aspects of the present disclosure describe single mode fiber distributed temperature sensing (DTS) with improved noise characteristics employing superluminescent emitting diodes (SLEDs) and/or amplified spontaneous emission (ASE) light sources.
    Type: Grant
    Filed: May 21, 2020
    Date of Patent: December 21, 2021
    Inventors: Yaowen Li, Ming-Fang Huang, Shuji Murakami, Philip Ji, Ting Wang
  • Patent number: 11067458
    Abstract: An OFDR based fiber-optics sensor for distributed real-time temperature rise monitoring of a transformer in operation has been disclosed. The fiber-optic sensor provides an effective solution to monitoring the physical structures of the transformer core, as well as accurately detecting the non-uniform temperature distribution inside the transformer, and thus provides innovative feedback to the transformer design by minimizing the core losses. Additionally, the method may be responsive to the presence of magnetic and electric fields, as well as responsive to various chemical species. The method allows novel approaches to real-time asset monitoring of power transformers while operational.
    Type: Grant
    Filed: September 6, 2018
    Date of Patent: July 20, 2021
    Assignee: CARNEGIE MELLON UNIVERSITY
    Inventors: Paul Ohodnicki, Michael McHenry, Alex Leary, Richard Beddingfield, Michael Buric
  • Patent number: 10876711
    Abstract: A color conversion element includes: a phosphor layer that includes at least one type of phosphor; a reflecting layer stacked on the phosphor layer; a substrate disposed in a position opposite to the reflecting layer; a joining portion interposed between the reflecting layer and the substrate for joining the reflecting layer and the substrate; and an absorbing portion disposed above a principal surface of the substrate closer to the joining portion. The absorbing portion is covered with the joining portion and absorbs laser light having a wavelength that excites the phosphor.
    Type: Grant
    Filed: June 16, 2017
    Date of Patent: December 29, 2020
    Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
    Inventor: Takanori Aketa
  • Patent number: 10641720
    Abstract: The present application thus provides a thermal barrier coating spallation detection system for a gas turbine. The thermal barrier coating spallation detection system may include a hot gas path component with a phosphor layer and a thermal barrier coating, a stimulant radiation source, and an optical device such that the optical device directs stimulant radiation at the thermal barrier coating and receives emission radiation. A change in the received emission radiation indicates spallation of the thermal barrier coating.
    Type: Grant
    Filed: October 6, 2017
    Date of Patent: May 5, 2020
    Assignee: General Electric Company
    Inventors: Andrew David Ellis, Kurt Kramer Schleif, Zachary John Snider
  • Patent number: 10502754
    Abstract: An apparatus for measuring fluid speed by using the refraction of light is disclosed. The apparatus includes: a channel in which a passage is formed to allow the flow of a fluid; a first and a second light source that are located in any one region of an upper part and a lower part of the channel; a sensor installed in an opposite region of the region where the first and second light sources are located with respect to the channel, to receive the light emitted from the first and second light sources; a speed calculation unit configured to calculate a speed of the fluid by using the intensity of the light received at the sensor.
    Type: Grant
    Filed: June 24, 2015
    Date of Patent: December 10, 2019
    Assignee: INTEKBIO Co., LTD.
    Inventors: Seok Chung, Jung Hyo Yoon, Eun Doo Lee, Se Woon Han, Jae Ho Kim, Young Kyu Cho, David Lim, Yong Hun Jung, Seung Hun Hong
  • Patent number: 10387215
    Abstract: A method for analyzing a motherboard for detecting an abnormally heated element of the motherboard includes placing the motherboard in a sealable container and powering on the motherboard, adjusting a temperature inside the sealable container to a predetermined temperature/temperature range, capturing a first image of the motherboard under ultraviolet light, capturing a thermal image of the motherboard, calibrating a position of the first image and the thermal image, combining the calibrated first image and the calibrated thermal image into a second image, and carrying out differential and image binarization processing on the second image and a template image to identify an abnormally heated element of the motherboard. A motherboard analysis device is also provided.
    Type: Grant
    Filed: November 16, 2017
    Date of Patent: August 20, 2019
    Assignees: Fu Tai Hua Industry (Shenzhen) Co., Ltd., HON HAI PRECISION INDUSTRY CO., LTD.
    Inventor: Cheng-Xiang Liu
  • Patent number: 10383564
    Abstract: Indicating panels adapted to provide a qualitative or quantitative indication of a characteristic of a liquid absorbed by the indicator panel. The indicating panels include a porous inner sheet that is impregnated with a first indicator selected to respond to a target analyte by creating a detectable response, and a porous outer sheet impregnated with a polymeric mordant selected to stabilize indicators.
    Type: Grant
    Filed: May 23, 2016
    Date of Patent: August 20, 2019
    Assignee: Pixie Scientific, LLC
    Inventors: Scott Meek, Yaroslav Faybishenko
  • Patent number: 10302566
    Abstract: A method evaluates the mobility of a polymer composition in a high-temperature region of 150° C. or above. The method for evaluating a physical property of a polymer composition, the method comprising the steps of: obtaining a thin film sample which is formed on a substrate and which comprises: a fluorescent probe including a fluorescent rare earth complex having a melting point of 200° C. or higher; and a target polymer composition; and obtaining a relationship between a temperature and a fluorescent characteristic of the thin film.
    Type: Grant
    Filed: May 8, 2015
    Date of Patent: May 28, 2019
    Assignees: Kyushu University, Fuji Electric Co., Ltd.
    Inventors: Keiji Tanaka, Daisuke Kawaguchi, Atsuomi Shundo, Mika Aoki, Tatsuya Ganbe, Nobuyuki Sekine, Kenji Okamoto
  • Patent number: 10087351
    Abstract: Materials are disclosed that include or are based on thermally reversible gels, such as thermally reversible gelled fluids, oil gels and solvent gel resins. In an exemplary embodiment, a material includes at least one filler in a thermally reversible gel.
    Type: Grant
    Filed: September 25, 2017
    Date of Patent: October 2, 2018
    Assignee: LAIRD TECHNOLOGIES, INC.
    Inventors: Karen J. Bruzda, Jason L. Strader
  • Patent number: 9771508
    Abstract: Thermal interface materials are disclosed that include or are based on thermally reversible gels, such as thermally reversible gelled fluids, oil gels and solvent gel resins. In an exemplary embodiment, a thermal interface material includes at least one thermally conductive filler in a thermally reversible gel.
    Type: Grant
    Filed: February 15, 2016
    Date of Patent: September 26, 2017
    Assignee: Laird Technologies, Inc.
    Inventors: Karen J. Bruzda, Jason L. Strader
  • Patent number: 9766139
    Abstract: The present invention, in one aspect, provides systems and methods for using a single slug or multiple slugs containing one or more calibrators to determine a relationship between temperature and an electrical characteristic of the thermal sensor for use in connection with calibrating thermal sensors. In some embodiments, the present invention uses the described calibrator systems and methods to calibrate thermal control elements on a microfluidic device. In non-limiting embodiment, the calibrator can be one or more of droplets, plugs, slugs, segments or a continuous flow of any appropriate solution that, when heated, yields a thermal response profile with a plurality of features (e.g., maxima, minima, inflection points, linear regions, etc.).
    Type: Grant
    Filed: March 20, 2013
    Date of Patent: September 19, 2017
    Assignee: Canon U.S. Life Sciences, Inc.
    Inventors: Johnathan S. Coursey, Kenton C. Hasson
  • Patent number: 9631983
    Abstract: An optical fiber temperature distribution measuring device measures a temperature distribution along an optical fiber by using backward Raman scattering light generated in the optical fiber. The device includes an arithmetic controller that changes a plurality of calibration parameters in conjunction with each other on the basis of a measured temperature value and a reference temperature value at a to-be-measured point, thereby converging a calibrated value of the measured temperature to a true value.
    Type: Grant
    Filed: May 11, 2015
    Date of Patent: April 25, 2017
    Assignee: Yokogawa Electric Corporation
    Inventors: Kazushi Oishi, Teruaki Umeno
  • Patent number: 9625656
    Abstract: The present invention relates to an MCF and others with a structure for accurately aligning each of core arrangement directions of one or more MCFs to be fixed in a connector. Each of the MCFs has a marker as an index for rotational position. The ends of the MCFs are rotated while monitoring positions of the respective markers with a CCD camera or the like, whereby each of the core arrangement directions is aligned with a specific direction.
    Type: Grant
    Filed: December 22, 2014
    Date of Patent: April 18, 2017
    Assignee: SUMITOMO ELECTRIC INDUSTRIES, LTD.
    Inventors: Takashi Sasaki, Osamu Shimakawa, Tetsuya Nakanishi, Yasuomi Kaneuchi
  • Patent number: 9464945
    Abstract: A probe sensor has a probe structure having a probe body inserted into an experiment subject, a block body disposed on the probe body to transmit or reflect an incident light, and a light irradiation body for inputting a first incident light to the block body; a first light source for generating the first incident light and transmitting to the light irradiation body; and a light analyzer for analyzing a first reflection light which is a reflection light of the first incident light reflected by the block body, wherein the length of the block body changes according to a temperature change, and wherein the light analyzer measures a temperature change of the experiment subject by detecting a wavelength change of the first reflection light according to the length change of the block body.
    Type: Grant
    Filed: October 18, 2013
    Date of Patent: October 11, 2016
    Assignee: Korea Institute of Science and Technology
    Inventors: Jin Seok Kim, Jun-Kyo Francis Suh, Hyowon Moon
  • Patent number: 9448119
    Abstract: A radiation thermometer utilizing an off-focus telecentric lens arrangement in chemical vapor deposition reactors. An object assembly of one or more optical components is positioned at a distance equal to its focal length from an aperture stop. The aperture stop is dimensioned so that the chief rays are substantially parallel with the optical axis of the object assembly, and so that the rays that pass through the aperture stop define a narrow solid angle about the chief rays. The off-focus telecentric arrangement thus configured is focused at infinity, but is utilized to capture radiation from a relatively proximate target (e.g., within a couple meters) that is out of focus. The capture of collimated radiation from the target diminishes the contribution of stray radiation, particularly with targets having a highly specular surface.
    Type: Grant
    Filed: June 22, 2012
    Date of Patent: September 20, 2016
    Assignee: Veeco Instruments Inc.
    Inventors: Guray Tas, Jing Zhou, Daewon Kwon
  • Patent number: 9376235
    Abstract: A container for beverages has a hollow container body, an electronic device attached to the hollow container body and provided with a display for displaying a running light message, a microprocessor operative for generating a running light message on the display, and a control unit for controlling the microprocessor for carrying out the generation of the running unit message on the display.
    Type: Grant
    Filed: November 2, 2009
    Date of Patent: June 28, 2016
    Assignee: Medea Inc.
    Inventor: Tim Goldburt
  • Patent number: 9335211
    Abstract: The disclosed scanner allows detecting decay time characteristics of light emitted by a luminescent marking on an item which is transported, even at high speed, on a distribution/production line. The detection zone of the scanner's light sensor has a shape elongated along a path of the moving item, and the responsivity of the light sensor, within the wavelength range of the emitted luminescence light, is uniform over the detection zone. The control unit of the scanner is further operable to adapt the drive current, or drive voltage, powering its excitation light source to accordingly adapt the intensity of the excitation light delivered to the marking so that its light sensor can reliably measure the corresponding luminescence light response, and thus accurately determine a corresponding decay time value.
    Type: Grant
    Filed: June 1, 2012
    Date of Patent: May 10, 2016
    Assignee: SICPA HOLDING SA
    Inventors: Milan Vasic, Nicola Duca
  • Patent number: 9291564
    Abstract: Aligning measurements of fluorescent spectral radiance factors taken by a first instrument with measurements of fluorescent spectral radiance factors taken by a second instrument, without knowledge of the matrix of bispectral luminescent radiance factor of any sample, includes obtaining a fluorescent spectral radiance factor of a reference sample, measured by the first instrument, obtaining the fluorescent spectral radiance factor of the reference sample, measured by the second instrument, obtaining a fluorescent spectral radiance factor of a test sample, measured by the first instrument, and estimating the fluorescent spectral radiance factor of the test sample that would be measured by the second instrument, based on the fluorescent spectral radiance factor of a reference sample, measured by the first instrument, on the fluorescent spectral radiance factor of the reference sample, measured by the second instrument, and on the fluorescent spectral radiance factor of the test sample, measured by the first ins
    Type: Grant
    Filed: April 5, 2013
    Date of Patent: March 22, 2016
    Assignee: Datacolor Holding AG
    Inventors: Zhiling Xu, Michael H. Brill
  • Patent number: 9239265
    Abstract: The invention is an optical method and apparatus for measuring the temperature of semiconductor substrates in real-time, during thin film growth and wafer processing. Utilizing the nearly linear dependence of the interband optical absorption edge on temperature, the present method and apparatus result in highly accurate measurement of the absorption edge in diffuse reflectance and transmission geometry, in real time, with sufficient accuracy and sensitivity to enable closed loop temperature control of wafers during film growth and processing. The apparatus operates across a wide range of temperatures covering all of the required range for common semiconductor substrates.
    Type: Grant
    Filed: July 6, 2010
    Date of Patent: January 19, 2016
    Assignee: k-Space Associates, Inc.
    Inventors: Charles A. Taylor, II, Darryl Barlett, Douglas Perry, Roy Clarke, Jason Williams
  • Patent number: 9234849
    Abstract: Methods (600) and systems (100) for inspecting an indirect bandgap semiconductor structure (140) are described. A light source (110) generates light (612) suitable for inducing photoluminescence in the indirect bandgap semiconductor structure (140). A short-pass filter unit (114) reduces long-wavelength light of the generated light above a specified emission peak. A collimator (112) collimates (616) the light. A large area of the indirect bandgap semiconductor structure (140) is substantially uniformly and simultaneously illuminated (618) with the collimated, short-pass filtered light. An image capture device (130) captures (620) images of photoluminescence simultaneously induced by the substantially uniform, simultaneous illumination incident across the large area for the indirect bandgap semiconductor structure.
    Type: Grant
    Filed: June 12, 2012
    Date of Patent: January 12, 2016
    Assignee: BT IMAGING PTY LIMITED
    Inventors: Thorsten Trupke, Robert Andrew Bardos
  • Patent number: 9151811
    Abstract: A temperature monitoring system for a medical device comprises an optical transmit/receive unit, an elongate optical fiber having a proximal end, a distal end, and an inner core extending between the proximal end and the distal end, and one or more fiber Bragg grating elements formed in the inner core of the optical fiber. The optical fiber is operably coupled to the transmit/receive unit at the proximal end. At least a portion of the optical fiber is also operably coupled to a medical device and is structured to measure temperature at one or more temperature sensing locations on the medical device.
    Type: Grant
    Filed: March 4, 2010
    Date of Patent: October 6, 2015
    Assignee: IMRICOR MEDICAL SYSTEMS, INC.
    Inventors: Steven J. Jester, Gregg S. Stenzel, Steven R. Wedan, Peter Gabrail
  • Patent number: 9039276
    Abstract: A control unit sets a time interval for measuring a temperature of a liquid crystal panel as a first time interval (1 second), and thereafter measures the temperature of the liquid crystal panel each time the first time interval elapses. When the temperature of the liquid crystal panel is stabilized, the control unit sets a time interval for measuring the temperature of the liquid crystal panel as a second time interval (5 seconds). The control unit measures the temperature of the liquid crystal panel each time the second time interval elapses. Moreover, if an operation to change the amount of light reaching the liquid crystal panel is performed, the control unit restores the time interval for measuring the temperature of the liquid crystal panel to the first time interval.
    Type: Grant
    Filed: January 5, 2012
    Date of Patent: May 26, 2015
    Assignee: SEIKO EPSON CORPORATION
    Inventor: Shinsuke Fujikawa
  • Publication number: 20150139276
    Abstract: A method of measuring a temperature of a noble gas in a chamber includes providing the noble gas in the chamber. The noble gas is characterized by a pressure and a temperature. The method also includes directing a first laser beam into the chamber and directing a second laser beam into the chamber. The first laser beam is characterized by a first frequency and the second laser beam is characterized by a second frequency. The method further includes converting at least a portion of the first laser beam and the second laser beam into a coherent anti-Stokes beam, measuring a Doppler broadening of the coherent anti-Stokes beam, and computing the temperature using the Doppler broadening.
    Type: Application
    Filed: November 18, 2013
    Publication date: May 21, 2015
    Inventor: Mark A. Rhodes
  • Publication number: 20150131700
    Abstract: A system and method for rapid thermometry using intrapulse spectroscopy can include a laser for propagating pulses of electromagnetic radiation to a region. Each of the pulses can be chirped. The pulses from the region can be detected. An intrapulse absorbance spectrum can be determined from the pulses. An instantaneous temperature of the region based on the intrapulse absorbance spectrum can be determined.
    Type: Application
    Filed: November 10, 2014
    Publication date: May 14, 2015
    Applicant: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY
    Inventors: Robin Chrystie, Aamir Farooq
  • Patent number: 9029765
    Abstract: Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like). In certain embodiments, the ion sources, systems and methods can enhance the ability to make tips having desired physical attributes (e.g., the number of atoms on the apex of the tip). This can enhance performance (e.g., increase reliability, stability and the like).
    Type: Grant
    Filed: May 13, 2013
    Date of Patent: May 12, 2015
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: Richard Comunale, Alexander Groholski, John A. Notte, IV, Randall G. Percival, Billy W. Ward
  • Patent number: 9022648
    Abstract: A composite photonic crystal comprising an inverse opal structure defining an ordered array of voids with a filler composition received within the voids. A property of the filler composition changes in response to a stimulus, such as a temperature change, thereby changing the band gap of radiation that is reflected by the composite photonic crystal.
    Type: Grant
    Filed: November 11, 2010
    Date of Patent: May 5, 2015
    Assignee: PRC-DeSoto International, Inc.
    Inventors: Noel R. Vanier, Eldon L. Decker, Stuart D. Hellring, Xiangling Xu, Sean Purdy, Gregory J. McCollum
  • Patent number: 9022645
    Abstract: A plasma processing apparatus and a temperature measuring method that may measure a temperature of an object in a processing chamber by a low-coherence interferometer without forming a hole in a holding stage or an upper electrode of the plasma processing apparatus, thereby performing a plasma process of a substrate with high precision and uniformity. The plasma processing apparatus is implemented by disposing a light source collimator outside of a light source window, disposing a light-receiving collimator outside of a light-receiving window, allowing a measurement light emitted from the light source collimator to pass through the light source window to be obliquely emitted to a surface of the object to be measured, and allowing the reflected measurement light to pass through the light-receiving window to be incident on the light-receiving collimator. The temperature of the object in the processing chamber may be measured by the low-coherence interferometer.
    Type: Grant
    Filed: March 23, 2012
    Date of Patent: May 5, 2015
    Assignee: Tokyo Electron Limited
    Inventor: Tatsuo Matsudo
  • Patent number: 9022649
    Abstract: A temperature sensor includes a photon source, a fluorescent element and a photodetector. The fluorescent element includes a temperature-insensitive first fluorophore and a temperature-sensitive second fluorophore. The photodetector includes a first photosensor exhibiting a first spectral responsivity and a second photosensor exhibiting a second spectral responsivity. To measure a temperature of a surface, the fluorescent element may be placed adjacent to the surface and irradiated with a photon beam. First photons emitted from the first fluorophore and second photons emitted from the second fluorophore are collected. The first and second photons may be transmitted as a single dichromatic beam to the photodetector. The photosensors generate two different photodetector output signals, the ratio of which may be correlated to temperature.
    Type: Grant
    Filed: October 5, 2012
    Date of Patent: May 5, 2015
    Assignee: Research Triangle Institute
    Inventors: John Lewis, Ethan Klem, Jeffrey Robert Piascik, Garry Brian Cunningham
  • Publication number: 20150117493
    Abstract: High precision phosphor temperature sensors are disclosed. The sensors include a light source that emits an excitation light through one or more optical fibers to one or more phosphors that produce fluorescent emission(s) when engaged by the excitation light. The fluorescent emission(s) is transmitted optically from the phosphor(s) directly to a detector or an optical diffraction grating before the light is received at a detector. The detector is linked to a controller, which measures the lifetime(s) of the fluorescent emission(s) and calculates the temperature at the phosphor(s) from said lifetime(s).
    Type: Application
    Filed: July 23, 2014
    Publication date: April 30, 2015
    Inventor: Bruce Hockaday
  • Publication number: 20150113942
    Abstract: A phosphor thermometer is disclosed. The phosphor thermometer may comprise a light source configured to emit an excitation light, and an input waveguide configured to transmit at least a portion of the excitation light from the light source to a temperature sensing end. A phosphor may be located at the temperature sensing end and it may be configured to emit a fluorescence signal upon absorption of at least a portion of the excitation light transmitted by the input waveguide. The phosphor thermometer may further comprise an output waveguide configured to transmit at least a portion of the fluorescence signal from the phosphor to a detector. The detector may determine a fluorescence decay constant from the time dependent decay of the fluorescence signal, and the fluorescence decay constant may be correlated with a temperature.
    Type: Application
    Filed: June 11, 2014
    Publication date: April 30, 2015
    Inventor: Bruce Hockaday
  • Publication number: 20150110156
    Abstract: Systems and methods for characterizing one or more properties of a material are disclosed. In some embodiments, the one or more properties include one or more thermal properties of the material, one or more thermoelectric properties of the material, and/or one or more thermomagnetic properties of the material. In some embodiments, a method of characterizing one or more properties of a sample material comprises heating the sample material and, while heating the sample material, obtaining one or more temperature measurements for at least one surface of the sample material via one or more thermoreflectance probes and obtaining one or more electric measurements for the sample material that correspond in time to the one or more temperature measurements. The method further comprises computing one or more parameters that characterize one or more properties of the sample material based on the measurements.
    Type: Application
    Filed: October 17, 2014
    Publication date: April 23, 2015
    Inventors: Ian Patrick Wellenius, Pablo Cantu, Allen L. Gray
  • Publication number: 20150103865
    Abstract: An optical writing device having; a plurality of light-emitting points; a photodiode configured to output a signal which represents a quantity of incident light from a predetermined light-emitting point selected from the plurality of light-emitting points; and a calculation section for calculating a temperature of the photodiode based on a magnitude of a photodiode dark current included in the signal output from the photodiode while the predetermined light-emitting point is OFF.
    Type: Application
    Filed: October 10, 2014
    Publication date: April 16, 2015
    Applicant: KONICA MINOLTA, INC.
    Inventors: So YANO, Satoshi Masuda, Makoto Obayashi, Masayuki Iljima, Yoshikazu Watanabe
  • Publication number: 20150097551
    Abstract: This patent application discloses techniques and devices for sensing or measuring electric currents and/or temperature based on photonic sensing techniques. An optical current sensor head is located near or at a current-carrying conductor so that a magnetic field associated with the current is present at a Faraday material and the optical detection unit detects the light from the Faraday material to determine a magnitude of the current. An optical temperature sensor head is located near or at a location so that the temperature at a temperature-sensing Faraday material is reflected by the optical polarization rotation which is detected to determine the temperature.
    Type: Application
    Filed: October 7, 2014
    Publication date: April 9, 2015
    Inventor: Xiaotian Steve Yao
  • Patent number: 9002152
    Abstract: A DTS system resistant to radiation induced attenuation losses during the service life of an installation at both low and high temperatures using matched multi-wavelength distributed temperature sensing automatic calibration technology in combination with designed Pure Silica Core (PSC) optical fibers and an in process photo bleaching method provided by the light sources of the distributed temperature sensing system.
    Type: Grant
    Filed: April 30, 2011
    Date of Patent: April 7, 2015
    Assignee: SensorTran, Inc.
    Inventor: Mikko Jaaskelainen
  • Publication number: 20150092818
    Abstract: Apparatus for monitoring a reactor surface with a sensor cable, which is during operation at least partially arranged in the region of the reactor surface, has at least two optical fibers (1, 2) arranged in the sensor cable, has at least one laser light source whose light is coupled at least partially into the optical fibers (1, 2) during the operation of the apparatus, and evaluation means, in which portions of the light coupled out of the optical fibers (1, 2) are evaluated during the operation of the apparatus, for monitoring at least partially the reactor surface with respect to at least one physical size in a spatially resolved manner. The apparatus includes magnetic retaining means (8) for attaching the sensor cable (10) on the reactor surface.
    Type: Application
    Filed: September 29, 2014
    Publication date: April 2, 2015
    Inventors: Wieland HILL, Jochen KUEBLER
  • Patent number: 8980381
    Abstract: Coating compositions containing resins with dispersed nanoparticle precursors and methods for using said coatings as visual indicators of thermal and impact damage. The nanoparticle precursor/resin system reduces the nanoparticle precursor to its nanoparticle state when subjected to heat and/or physically impacted. The nanoparticles formed impart a color upon the coating at the point of exposure due to surface plasmon resonance. Microencapsulated leuco dyes are utilized to impart color when the coating is struck. The dye within the microcapsule is released as the microcapsule wall bursts or melts. Solubilizing agents can be utilized to improve the solubility of the nanoparticle precursor in the resin.
    Type: Grant
    Filed: August 29, 2007
    Date of Patent: March 17, 2015
    Assignee: Topasol LLC
    Inventors: Uschi M. Graham, Rajesh A. Khatri
  • Publication number: 20150063418
    Abstract: An apparatus for estimating a parameter includes: an optical fiber sensor including at least one optical fiber configured to be disposed in a downhole location and including at least one sensing location configured to generate measurement signals; at least one light source configured to transmit a measurement signal having a wavelength to interrogate a sensing location and cause the sensing location to return a reflected measurement signal indicative of a measured parameter, and configured to transmit a reference signal and cause a reflected reference signal to be returned from a location associated with the sensing location, the reflected reference signal having a known relationship to hydrogen concentration; and a processor configured to receive the reflected measurement signal and the reflected reference signal, estimate the hydrogen concentration based on the reflected reference signal, and calibrate the first reflected signal based on the estimated hydrogen concentration.
    Type: Application
    Filed: August 27, 2013
    Publication date: March 5, 2015
    Applicant: BAKER HUGHES INCORPORATED
    Inventors: Paul F. Wysocki, Christopher H. Lambert, Ashwin Chandran
  • Patent number: 8961006
    Abstract: Fiber optic sensing systems and methods. In a described embodiment, a fiber optic sensing system includes an optical fiber transmitting energy to a chemical vapor deposited diamond material proximate a substance in a well. The diamond material is deposited as a coating on a substrate. The substrate and coating are heated when the energy is transmitted by the optical fiber. This heats the substance in the well, which is detected to determine a property of the substance. In another embodiment, light energy is transmitted through the diamond material.
    Type: Grant
    Filed: February 20, 2008
    Date of Patent: February 24, 2015
    Assignee: WellDynamics, B.V.
    Inventor: Daniel D. Gleitman
  • Publication number: 20150023389
    Abstract: An optical fiber for a temperature sensor and a power device monitoring system that can measure temperatures at different measurement positions by a simple construction are provided. An optical fiber for the sensor 10 comprises a temperature assurance FBG 20 and temperature measurement FBGs 30 as FBGs wherein the refractive index of a core changes periodically. Wavelength band of light incident to the optical fiber for the sensor 10 includes Bragg wavelengths of the temperature assurance FBG 20 and the temperature measurement FBGs 30. The power device monitoring system 1 measures temperatures of the temperature assurance FBG 20 and the temperature measurement FBGs 30 based on their Bragg wavelengths.
    Type: Application
    Filed: January 21, 2013
    Publication date: January 22, 2015
    Applicants: KABUSHIKI KAISHA TOYOTA JIDOSHOKKI, NATIONAL UNIVERSITY CORPORATION KAGAWA UNIVERSITY, INSTITUTE OF NATIONAL COLLEGES OF TECHNOLOGY, JAPAN
    Inventors: Ko Imaoka, Yoshifumi Suzaki, Hiromu Iwata, Kiyoshi Nakagawa
  • Patent number: 8926173
    Abstract: A distributed optical fiber sensor system is provided. In this system, backward-scattered light generated in a test optical fiber is filtered to separate the backward-scattered light into Raman scattered light and Brillouin scattered light. The separated Raman scattered light and Brillouin scattered light are each converted into digital data. A change in temperature with respect to the distance of the test optical fiber is measured from the digital data of the Raman scattered light. A change in temperature and a change in the degree of deformation with respect to the distance of the test optical fiber are measured from the digital data of the Brillouin scattered light. The change in temperature and the change in the degree of deformation with respect to the distance of the test optical fiber are separately output using the measured data.
    Type: Grant
    Filed: June 27, 2008
    Date of Patent: January 6, 2015
    Assignee: UTO International Corporation
    Inventor: Michael Lee
  • Patent number: 8928872
    Abstract: The present invention is directed to temperature modulated refractive index measurement. In accordance with the invention a method for determination of the complex temperature coefficient of the refractive index of a sample is provided, wherein the determination of the complex temperature coefficient of the refractive index of the sample is based on a refractive index measurement. Furthermore, the refractive index of the sample is measured over a period of time, wherein the temperature of the sample is modulated over said period of time and the complex temperature coefficient of the refractive index is calculated on the basis of the refractive index measurement over the period of time and the temperature modulation over the period of time. Additionally, a measurement system, in particular comprising a temperature control system and a processing system to carry out the above method, is disclosed.
    Type: Grant
    Filed: August 2, 2011
    Date of Patent: January 6, 2015
    Assignee: Anton Paar Optotec GmbH
    Inventors: Ulrich Muller, Jan Kristian Kruger
  • Publication number: 20150003496
    Abstract: A method for measuring the temperature of rotating machining tools, comprising providing an optical fiber sensor; inserting said optical fiber sensor into the rotating machining tool; directing light from a light source into said optical fiber of said fiber sensor; detecting changes of optical properties of said optical fiber sensor as a function of temperature in the reflected light leaving said optical fiber; and correlating said changes of optical properties to the temperature of the machining tool. The apparatus comprises the respective elements. The present invention proposes a solution for the temperature measurement in rotating machining tools which avoids the transmission of electrical signals, and which can be integrated even in very small machining tools such as small dental drills. It continuously measures the temperature of the machining tool and is not sensitive to liquid coolants.
    Type: Application
    Filed: June 26, 2014
    Publication date: January 1, 2015
    Inventors: Bert WILLING, Patrick Assal