Abstract: A stationary exit window for an X-ray lithography beamline having a shape and thickness such that the exit window can withstand a pressure differential of 14.7 psi and allows an X-ray beam as passed through the window to have X-rays above and below a desired energy band substantially attenuated. The exit window includes a thin material having a window section disposed within an opening of a frame. The window section has a cylindrical sector shape to capitalize on the pressure load bearing ability of hoop stress to keep the thin material from tearing apart. A method of scanning the X-ray beam through a stationary exit window and onto an exposure field on a wafer is also disclosed.

Abstract: The present invention is directed to an x-ray source for irradiating a surface defining a body cavity in accordance with a predetermined dose distribution. The source comprises a housing, an elongated tubular probe, a target assembly, and an inflatable balloon. The housing encloses an electron beam source and includes elements for generating an electron beam along a beam path. The tubular probe extends along a central axis from the housing about the beam path. The target assembly extends along the central axis and is coupled to the end of the probe distal from the housing. The target assembly includes a target element is positioned in the beam path. The target element is adapted to emit x-rays in response to electrons incident thereon from the beam. The probe tip assembly and associated control electronics include elements for positioning the target element in the beam path, and is substantially x-ray transparent.

Abstract: Methods and apparatus for performing a computed tomography scan are described. In one embodiment of the apparatus, a twin beam computed tomography scanner includes a beam splitter, an x-ray source for generating an x-ray to be projected generally towards, and at least partially through, an object, and a detector array comprising a plurality of detector cells arranged to form at least two cell rows. The beam splitter is positioned so that the x-ray projected from the x-ray source is substantially split to form at least two beams prior to being projected at least partially through the object.

Abstract: A slit radiography apparatus is provided with an absorption device comprising electrically controllable piezoelectric tongues. Upper and/or lower deflections of the tongues are limited to a maximum by trips outside the X-ray fan beam. More than one strip can be present as seen in the length direction from the fixed ends of the tongues. Thus deflections of the tongues are limited and great phase changes in the control signals without resultant oscillations can take place during the time the tongue are restricted in their movement by the strip.

Abstract: An exposure method using X-rays from a synchrotron radiation source includes determining a relationship between an X-ray intensity distribution and an exposure amount distribution in an exposure area; and effecting exposure operation while controlling a dose amount for respective positions in the exposure area using the relationship, wherein the dose amount is controlled by changing a driving profile of a movable shutter for controlling the exposure operation, and wherein the relationship is in the form of a proportional coefficient between an X-ray intensity and the exposure amount as a function of position information in the exposure area.

Abstract: An optical system for x-rays combines at least two spherical or near spherical mirrors for each dimension in grazing incidence orientation to provide the functions of a lens in the x-ray region. To focus x-ray radiation in both the X and the Y dimensions, one of the mirrors focusses the X dimension, a second mirror focusses the Y direction, a third mirror corrects the X dimension by removing comatic aberration and a fourth mirror corrects the Y dimension. Spherical aberration may also be removed for an even better focus. The order of the mirrors is unimportant.

Abstract: An exposure apparatus includes a holder for holding a substrate to be exposed, and a movable shutter movable across a path of exposure light, having an intensity distribution in a predetermined direction, and in a direction intersecting the predetermined direction, wherein the movable shutter has an edge with a protruded portion being protruded in the movement direction and having a shape and size determined on the bases of the intensity distribution of the exposure light.

Abstract: An X-ray lens includes a plurality of hollow cylinders of prescribed radius bored in a lens material piece having a phase lag coefficient appropriate for the wavelength of the X-rays to be focused such that the axes of the hollow cylinders are parallel and perpendicularly intersect a straight array axis.

Abstract: For use with dental position indicating devices for dental x-ray machines that are collimated and are of round transverse cross sectional configuration defining a bore for the length of same, with such bore having its internal surfacing lined for x-ray absorption and having an x-ray emitting end, a snap-fit collimator device therefor for use with rectangular dental instrumentation that is in the form of a body providing a collimator of rectangular form in the size of such instrumentation, with the body being arranged for snap-fit mounting of same on the x-ray emitting end of such round type position indicating devices, with the arrangement involved providing for rotational adjustment of said body relative to such position indicating device for permitting the collimator of same to be aligned with rectangular dental instrumentation, when the position indicator device in question is secured to an x-ray machine in the course of practicing dental radiography.

Abstract: A mirror unit includes a mirror having a reflecting surface, a holding member for supporting the mirror and an airtight chamber incorporating the mirror, supported by the holding member, in an airtight state. Either the mirror or the holding member constitutes a portion of a side wall of the airtight chamber. The mirror unit can be suitably used in an exposure apparatus which uses a synchrotron radiation light source or the like as a light source.

Abstract: A system comprising a novel combination of a multiple-channel monolithic capillary optic and an x-ray source with a spot size of less than 300 microns to produce a high intensity small diameter x-ray beam is described. A system of this invention can be easily adapted for use in the analysis of small samples where an intense quasi-parallel, or converging x-ray beam is required.

Abstract: The present invention is directed to a kit for delivering x-rays to the interior surface of a body cavity. The kit includes an x-ray source and an x-ray source guidance tube. The guidance tube includes an inflatable inelastic balloon disposed about and affixed at its distal end such that when inflated, the central axis of the balloon is coaxial with and is disposed about the central axis of the tubular element. Inflation and deflation of the balloon is controllable from the proximal end of the tubular element. The x-ray source may include an electron activated target for generating x-rays in response to electrons incident on the target. The x-ray source may also includes means for generating an electron beam and steering the beam so that it is incident on the target. The target end is slidably positionable within an interior channel of the source guidance tube.

Abstract: In an X-ray computerized tomography apparatus, a water phantom is interposed between an X-ray tube unit and an X-ray detector in place of a subject under examination and a plurality of pieces of data detected by a plurality of X-ray detector elements are previously measured as a pieces of compensation data while shifting the X-focal point to different positions. Compensation data corresponding to the actual position of the X-ray focal point, which shifts according to the thermal state of the X-ray tube unit, is selected to correct detect data obtained for a subject under examination, permitting optimum compensation of variations in sensitivity among the X-ray detector elements for any position of the X-ray focal point, thereby preventing a ring-like artifact from being produced on a tomography image.

Abstract: An X-ray microscope has the following features: a pulsed x-ray source that delivers an intense line radiation, an annular condenser that focuses the radiation of the X-ray source on the object to be investigated, an X-ray optics constructed as a micro zone plate that images the object with high resolution on an X-ray detector, and a phase ring positioned in the rear focal plane of the micro zone plate and applies to the zero order X-ray radiation coming from the object a phase shift, with respect to the higher order radiation deflected by the object structures, which is determined by the thickness and material of the phase ring. The phase shift amounts, for example, to 90.degree. or 270.degree..

Abstract: A vacuum optical system has a vacuum chamber for housing an optical system used In a vacuum. The vacuum chamber is equipped with a member, on which the optical system is at least mounted, supported by such parts that when a pressure in the vacuum chamber changes to deform the vacuum chamber, the amount of displacement transmitted to the optical system is smaller than a predetermined tolerance depending on an accuracy necessary for the optical system. Thus, the vacuum optical system can be obtained which does away with the need for readjustment of optical alignment and is compact.

Abstract: An x-ray tube has an annular vacuum housing through which an electron beam passes in an annular path, an annular target from which x-radiation emanates during operation of the x-ray tube when the electron beam strikes it at a point of incidence, and a beam deflector which is movable along the circumference of the vacuum housing and which deflects the electron beam such that it is incident onto the target at a point of incidence that is dependent on the position of the deflector along the circumference of the vacuum housing. An x-ray beam emanating from the target is thus caused to move around the interior of the vacuum housing in the manner necessary for producing computed tomograms of a subject disposed in the interior of the vacuum housing.

Abstract: An apparatus is disclosed for imaging a patient's breast (18) by scanning an imaging signal (58) and a receiver (30) across the patient's breast (18) and then constructing a time-delay integration composite image based on the scan. The receiver (30) includes an array of radiation sensitive detector elements (132). Read out of the array (132) is synchronized with the scanning motion of the receiver (30) based on output from position encoder (104) such that synchronization is maintained despite scan drive variances. A novel assembly (106) is also disclosed for allowing selection of an appropriate radiation filter based on particular imaging conditions.

Abstract: X-ray dispersive and reflective structures utilizing special materials which exhibit improved performance in the specific ranges of interest. The structures are formed of alternating thin layers of uranium, uranium compound or uranium alloy and another spacer material consisting of elements or compounds with low absorptance chosen to match the wavelength of interest. These low index of refraction elements or compounds are those best suited for water window microscopy and nitrogen analysis, or are similar elements or compounds best suited for carbon analysis, boron analysis, and x-ray lithography. The structures are constructed using standard thin layer deposition techniques such as evaporation, sputtering, and CVD, or by novel methods which allow thinner and smoother layers to be deposited.

Abstract: An x-ray interface (40) provides increased x-ray collection efficiency for use in x-ray photolithography. The interface (40) comprises a housing (44) having a plurality of mirrored funnels (46) for collecting the x-rays. The mirrored funnels (46) are shaped to partially collimate and focus the x-rays. The interface (40) collects a greater percentage of the available x-rays from an x-ray source, and the interface (40) also permits a greater number of beamlines to be coupled to the x-ray source.

Abstract: An x-ray CT system modulates x-ray tube current as a function of gantry angle to reduce the total patient dose without significantly increasing image noise. A modulation waveform is stored in a table as a function of gantry angle, and during a slice acquisition, values are periodically read from this table and employed to calculate tube current commands. Tube current is monitored and compared with the latest command to ensure the proper x-ray dose is applied.

Abstract: Absorption filters are positioned in an x-ray examination apparatus according to the invention by adjusting them on the basis of the posture of the carrier supporting the x-ray source and the x-ray detector. To that end adjustment curves relating carder posture to filter adjustment are employed. The posture of the carder determines the orientation of the x-ray beam path. Because there are relatively few anatomical differences among patients to be examined, the adjustment of absorption filters on the basis of the beam orientation is quite adequate. Further improvement is achieved by providing sets of adjustment curves, each set pertaining to a class of patients, such as e.g. corpulent or slender patients, or infants or adults.

Abstract: A method for the x-ray inspection of materials making use of the Moire effect is described. The Moire effect results when two patterns are superimposed, a third pattern is produced. Any change in either of the first two patterns creates a change in the third. Moire inspection is common with visible light, this invention allows the technique to be extended to locations inaccessible to visual inspection. A first pattern of high radio contrast material is attached to or included in the sample. X-rays are projected through the sample. A second pattern is imposed at the observation point, either before or after the formation of the x-ray image. The two patterns interact to create a third, Moire, pattern. As the material is stressed the Moire pattern changes, the degree of change indicating the degree of stress.

Abstract: An x-ray machine, such as a mammography machine, comprises a source of a narrow beam of radiation which scans across an object, e.g., a breast, to be imaged. A sensor for the narrow beam moves in the same direction as the narrow beam. The sensor generates an output signal which indicates the position of the beam relative to a specific location on the sensor. A control circuit receives the signal from the sensor and outputs a control signal to regulate the position of the beam relative to the sensor.

Abstract: An X-ray mirror has a silicon carbide substrate having a convex cylindrical surface, and a carbon layer coated on a surface of said substrate to a thickness ranging from 10 nm to 1 .mu.m by evaporation, such as CVD. In the X-ray mirror in which the carbon layer is coated thereon beforehand, changes in the intensity of reflected light, caused by a contaminating carbon layer attached to the surface of the mirror, can be restricted. When such a mirror is used in an X-ray lithographic apparatus, the number of times the intensity of X-rays is measured or corrected or the mirror is cleaned can be greatly reduced.

Abstract: The invention is directed to a grid used in x-ray imaging applications to block scattered radiation while allowing the desired imaging radiation to pass through, and to process for making the grid. The grid is composed of glass containing lead oxide, and eliminates the spacer material used in prior known grids, and is therefore, an air-core grid. The glass is arranged in a pattern so that a large fraction of the area is open allowing the imaging radiation to pass through. A small pore size is used and the grid has a thickness chosen to provide high scatter rejection. For example, the grid may be produced with a 200 .mu.m pore size, 80% open area, and 4 mm thickness.

Abstract: A beam position detecting device wherein the intensity of a radiation beam from a synchrotron ring is measured on the basis of electric currents flowing through two wires, while accumulated electric current in the synchrotron ring is measured by using a current transformer. The beam position can be determined accurately on the basis of these measured values.

Abstract: A method is disclosed for selecting the minimum width of individual leaves of a multileaf adjustable collimator having sawtooth top and bottom surfaces between adjacent leaves of a first stack of leaves and sawtooth end edges which are capable of intermeshing with the corresponding sawtooth end edges of leaves in a second stack of leaves of the collimator. The minimum width of individual leaves in the collimator, each having a sawtooth configuration in the surface facing another leaf in the same stack and a sawtooth end edge, is selected to comprise the sum of the penetration depth or range of the particular type of radiation comprising the beam in the particular material used for forming the leaf; plus the total path length across all the air gaps in the area of the joint at the edges between two leaves defined between lines drawn across the peaks of adjacent sawtooth edges; plus at least one half of the length or period of a single sawtooth.

Abstract: A vacuum optical system has a vacuum chamber for housing an optical system used in a vacuum. The vacuum chamber is equipped with a member, on which the optical system is at least mounted, supported by such parts that when a pressure in the vacuum chamber changes to deform the vacuum chamber, the amount of displacement transmitted to the optical system is smaller than a predetermined tolerance depending on an accuracy necessary for the optical system. Thus, the vacuum optical system can be obtained which does away with the need for readjustment of optical alignment and is compact.

Abstract: Disclosed is a device for determining an angle of incident light or a shift in incident light based on the output value of a detector. In a predetermined angle detection range, a beam of light incident on a detector for detecting the intensity of light incident thereon is restricted such that the amount of light continuously increases or decreases in accordance with the angle between an optical axis of the incident light and a referential axis of an exposure apparatus. Outside of the predetermined angle detection range, the amount of light is restricted depending on the direction in which the optical axis of the light is shifted from the angle detection range. The amount of light incident on the detector continuously increases or decreases in accordance with the angle between the optical axis of the incident light and the referential axis when the light is made incident within the angle detection range by means of the light restriction means.

Abstract: A displacement measuring system includes means for focusing x-rays into a narrow, intense beam which can be used to excite targets that fluoresce secondary x-rays. By precisely measuring the focused image position as the focused image is caused to overlap the fluorescing target, relevant changes in target position can be determined. The x-rays are focused using a novel Johansson ground and bent crystal which, along with the x-ray tube, is mounted on a common base for lineal scanning. This common base preferably comprises a linear translation table. By scanning the beam onto fluorescing targets, edge detection can be accomplished by monitoring subsequent x-ray fluorescing using an appropriate detector whose output is measured and recorded. In a preferred embodiment, the detector is formed integral with an enclosure for enclosing the x-ray tube and bent crystal on the linear translation table.

Abstract: X-ray dispersive elements comprise a stacked array of layer pairs of boron nitride and either nickel, tungsten, chromium, vanadium, iron, manganese, cobalt and combinations thereof. The boron nitride is preferably deposited through a planar magnetron sputtering process.

Abstract: An X-ray lithography beamline imaging system has a single condenser mirror with an aspherical reflecting surface, with symmetry only about a plane, without axial symmetry. For an X-ray beam emitted along a y axis and diverging along x and z axes, the reflecting surface is asymmetrical about the y axis and has different focusing power in directions along the x and z axes in an imaging plane orthogonal to the y axis and spaced from the mirror along the y axis such that the mirror reflects and focuses the X-ray beam to a point along the y axis in the imaging plane and to a line along the x axis in the imaging plane.This invention was made with United States Government support awarded by the National Science Foundation (NSF), Grant No. ECS-8921165, and the Naval Research Laboratory (NRL), Grant No. N00014-91-J-1876. The United States Government has certain rights in this invention.

Abstract: The invention is directed to a radiation diaphragm comprising a diaphragm lamella at which adjustment means engage, so that the diaphragm lamella is adjustable in the beam path of a radiation transmitter. Inventively, the diaphragm lamella is composed of an elastic material. The diaphragm lamella can thus be matched to the shape of an examination subject in a simple way.

Abstract: A device for compensating large absorption differences when photographing the thorax by means of X-ray radiation, whereby a compensating filter is placed close to the X-ray tube in the beam of the X-ray tube perpendicular to the optical axis of the X-ray radiation, whereby a support running in the direction of the optical axis is placed on the X-ray tube housing above the optical axis at an angle of 93.degree. to 105.degree. to the vertical, at which a filter holder, which can be displaced in the direction of the support, is arranged with the compensating filter, allowing optimum matching of the compensating filter to each patient.

Abstract: Optimum solutions for three-mirror lenses for projection lithography cameras using X-ray radiation to image a mask on a wafer are represented as single points within regions of two-dimensional magnification space defined by the magnification of a convex mirror as one coordinate and the ratio of the magnifications of a pair of concave mirrors optically on opposite sides of the convex mirror as another coordinate. Lenses within region 30, 50, and preferably within region 40, 60, of such magnification space represent potential solutions that are optimizable by standard computer optical design programs and techniques to achieve extremely low distortion lenses having a resolution of about 0.1 micron or less. Two of these lens systems having large chief ray angles at the mask and chief rays inclined away from the optical axis of the lens system in a direction from the source toward the mask are described in more detail.

Abstract: An X-ray apparatus includes an X-ray pickup window through which synchrotron radiation light is projected, the X-ray pickup window having an X-ray transmission film; and a correcting system for correcting an intensity distribution of the synchrotron radiation light; wherein the X-ray transmission film has at least one of a film thickness distribution and a transmissivity distribution changing substantially in a predetermined direction; and wherein the X-ray transmission film is so disposed that the predetermined direction is substantially aligned with the direction of change of the intensity distribution of the synchrotron radiation light.

Abstract: A composite window structure is described for transmitting x-ray radiation and for shielding radiation generated debris. In particular, separate layers of different x-ray transmissive materials are laminated together to form a high strength, x-ray transmissive debris shield which is particularly suited for use in high energy fluences. In one embodiment, the composite window comprises alternating layers of beryllium and a thermoset polymer.

Abstract: On a substrate materials of different X-ray refractive indexes, for example, silicon (si) and molybdenum (Mo), are alternately deposited to form a multilayer film composed of silicon nd molybdenum layers and a hydrogenated interface layer is formed between each pair of adjacent layers.

Abstract: A mirror for reflecting radiation at a desired wavelength in the soft x-ray region, comprises a substrate and a coating on the substrate. The coating contains a first section and a second section. The first section comprises at least one layer made up of at least a spacer sublayer and a nodal sublayer. The optical thickness of each spacer sublayer is selected so that, upon application of the radiation of desired wavelength, the mirror generates a standing wave having a node in the middle of each nodal sublayer. The second section is disposed between the first section and the substrate, and comprises a plurality of optically absorptive layers.

Abstract: In one aspect, the invention involves an optical element in an x-ray imaging system. The element comprises a substrate overlain by a multilayer coating. The multilayer coating comprises plural first and at least second material layers in alternation. This coating is soluble in at least one etchant solution at an etching temperature less than 100.degree. C. The optical element further comprises a barrier layer intermediate the substrate and the multilayer coating. The barrier layer is relatively insoluble in the etchant solution at the etching temperature. In a second aspect of the invention, the optical element comprises a substrate and a multilayer coating as described above, and further comprises a release layer that underlies the multilayer coating. The release layer comprises a material that is relatively soluble in at least one etchant solution at an etching temperature less than 100.degree. C. In contrast to release layers of the prior art, the inventive release layer comprises germanium.

Abstract: A slit radiography device scans a body under examination with a fan shaped X-ray beam. A number of absorption elements placed next to each other can be moved into the X-ray beam to a greater or lesser extent in order to influence the X-ray radiation incident on the body per sector of the X-ray beam.As seen in the longitudinal direction of the slit the absorption elements are designed such that a certain distance is present between them. As seen in the direction of the X-ray radiation the thickness of the material of the absorption elements is always the same, i.e. there are no gaps between the absorption elements that the X-ray radiation can shine through.

Abstract: A computerized three-dimensional x-ray tomographic microscopy system is disclosed, comprising:a) source means for providing a source of parallel x-ray beams,b) staging means for staging and sequentially rotating a sample to be positioned in the path of thec) x-ray image magnifier means positioned in the path of the beams downstream from the sample,d) detecting means for detecting the beams after being passed through and magnified by the image magnifier means, ande) computing means for analyzing values received from the detecting means, and converting the values into three-dimensional representations. Also disclosed is a process for magnifying an x-ray image, and apparatus therefor.

Abstract: A condenser optical system is provided for bringing a beam of light from a light source to a focus at a desired position. The condenser optical system has a reflecting surface including a quadric surface of revolution represented by Equation (1) described below. The reflecting surface satisfies the conditions of Equations (2) and (3) described below when the condenser optical system is disposed so that the light beam from the light source is incident, substantially parallel to a rotary axis of the quadric surface, on the reflecting surface:z=Cy.sup.2 /{1+(1-pC.sup.2 y.sup.2).sup.1/2 } (1)Ch<22 (2)78-4.theta..sub.

Abstract: A collimator assembly for removing selected radiation output from a specimen. The assembly includes collimator elements with each element having walls comprised of a first material covered by an inner layer of a second material which preferentially absorbs inelastic scattered radiation created in the first material.

Abstract: In order to perform stereoradiography, an X-ray apparatus utilizes an X-ray tube having a pair of X-ray focal points. The X-ray beams are alternately irradiated from the focal points toward an image intensifier through a patient and are limited by an X-ray beam limiting device. The device shapes the irradiated X-ray beams onto a circular detection surface of the image intensifier into a polygon such as octagon. The X-ray irradiation field on the detection surface can be circumscribed to a circular input window (i.e. effective input area), preventing the field from going beyond the detection surface. Thus, direct X-ray leaking over the image intensifier is avoidable.

Abstract: In order to compensate offsets in an X-ray irradiated field, an X-ray diagnostic system comprises: an X-ray source including a movable X-ray diaphram unit; an X-ray camera unit for radiographing a patient as an object; a holding means for holding the X-ray tube and the X-ray camera unit in opposition and maintaining sufficient operating space between them; a seeking means for seeking a offset in an X-ray irradiated field; a controlling means for controlling the X-ray diaphragm unit according to an output of the seeking means.

Abstract: In printing patterns on a mask onto a wafer with high accuracy via a reflective reduction projection optical system by using an X-ray or vacuum ultraviolet beam there is an elliptical mirror having a source position defined in an X-ray source and a position of reflection image of entrance pupil of an imaging optical system with respect to the mask as foci and introducing means for synchronously scanning the mask and wafer. Due to inserting a plane mirror for bending an X-ray by approximately 90.degree. at at least one point in the imaging optical system so that the plane of incidence may be perpendicular to the polarization plane the reflectivity does not lower even when the angle of incidence is 45.degree..

Abstract: Optimum solutions for three-mirror lenses for projection lithography cameras using X-ray radiation to image a mask on a wafer are represented as single points within regions of two-dimensional magnification space defined by the magnification of a convex mirror as one coordinate and the ratio of the magnifications of a pair of concave mirrors optically on opposite sides of the convex mirror as another coordinate. Lenses within region 30, 50, and preferably within region 40, 60, of such magnification space represent potential solutions that are optimizable by standard computer optical design programs and techniques to achieve extremely low distortion lenses having a resolution of about 0.1 micron or less.

Abstract: A dislocation-free, composite-substance crystal having a lattice constant which decreases over the length of the crystal (38) convergently focuses beams of hard X-rays or gamma rays (11). A single-substance, dislocation-free crystal (34) collimates diffuse beams of hard X-rays or gamma rays and projects the collimated radiation (11') to the focusing crystal (38). A mask (36) is interposed between the collimating crystal (34) and the focusing crystal (38) causing the collimated radiation (11'') to carry an image of the mask (36). The focusing crystal (38) produces a convergent hard X-ray beam or gamma ray beam (11''') to focus a reduced image of the mask (36) upon the photosensitive layer (41) of a wafer (39). An example of a dislocation-free crystal having a lattice constant which decreases over its length (38) is a dislocation-free silicon-germanium crystal (20) wherein the proportion of germanium to silicon varies over the length of the crystal.

Abstract: In an equalization radiography device an X-ray fan beam (3,4) is used to scan a body (7) under examination. The X-ray fan beam comprises a number of adjacent sectors. A modulator device (5) comprising a number of controllable beam sector modulators is present for controlling per sector the quantity of X-ray radiation transmitted. A detector (11) placed behind the body generates per sector a measurement signal representing a desired position of the beam sector modulator for that sector. During operation the instantaneous position of each beam sector modulator is continuously detected (20,21). Signals representing those positions are generated and compared with the respective measurement signals. Control signals are derived from the comparisons to control the positions of the respective beam sector modulators.