Beam Control Patents (Class 378/145)
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Patent number: 6307917Abstract: A soller slit includes a plurality of metal foils and a plurality of spacers. The spacers are laminated alternatively with the metal foils to support one end portions of the metal foils with a space between adjacent metal foils. The other end portions of the metal foils are opened to be unsupported as a free end. When the soller slit is used in an X-ray apparatus, other X-ray optical components, such as monochromator or a specimen to be analyzed, then the soller slit can be arranged in contact with or in the vicinity of the unsupported end portions of the soller slit. That is, it is possible to unify the soller slit and other X-ray optical components in an assembled state. Therefore, a space dedicated to the soller slit becomes unnecessary. Further, since it is possible to shorten a passage of X-rays correspondingly, attenuation of X-rays to be detected by the X-ray detector can be avoided.Type: GrantFiled: November 15, 1999Date of Patent: October 23, 2001Assignee: Rigaku CorporationInventors: Katsuhiko Shimizu, Kazuhiko Omote, Go Fujinawa
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Publication number: 20010028699Abstract: A multilayer mirror 1 that has elliptical reflection faces and provides a divergent angle &dgr; of X-rays, is included. The elliptical reflection faces of the multilayer mirror 1 have two focal points. When an X-ray source 2 is arranged at one focal point A, and X-rays that are diverged from the X-ray source 2 are reflected at the multilayer mirror 1, the reflected X-rays converge on another focal point B. The X-ray source 2 is arranged at one focal point A of the multilayer mirror 1. Additionally, a distance L2 from the center of the reflection faces of the multilayer mirror 1 to another focal point B (in other words, convergent point of reflected X-rays) is set to make a convergent angle &thgr;c of X-rays at the focal point B nearly twice as great as the divergent angle &dgr;. With the above-noted configuration, both small angle resolution and intensity of incident X-rays to a sample may be optimized, and small angle scattering may be performed with high precision.Type: ApplicationFiled: April 10, 2001Publication date: October 11, 2001Applicant: Rigaku CorporationInventor: Yoshio Iwasaki
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Patent number: 6295334Abstract: In a synchrotron radiation light transmission system, a mirror is disposed in a mirror box for reflecting synchrotron radiation light, the mirror box being formed with an incoming opening and an outgoing opening through which the synchrotron radiation light having a horizontally elongated cross section passes. A swinging mechanism supports the mirror so as to allow the synchrotron radiation light entered the mirror box via the incoming opening to be reflected by the mirror and to change a travelling direction in a vertical plane and for swinging the mirror to change a change angle of the travelling direction. The swing axis is on a cross line, or on its extension, between an incidence plane of the synchrotron radiation light and a tangential plane of the mirror at a reflection point and also on an incidence side of the synchrotron radiation light from the reflection point.Type: GrantFiled: October 11, 2000Date of Patent: September 25, 2001Assignee: Sumitomo Heavy Industries, Ltd.Inventor: Eijiro Toyota
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Publication number: 20010021242Abstract: The invention describes a method and a device for the focussing of X-rays by means of glass capillary optics and serves, in particular, the purpose of realization of X-ray-zoom-optics. The method is based on the fact that, by means of the alteration of the distances of two semi-lenses arranged opposite each other, the focal lengths can be adjustably set.Type: ApplicationFiled: March 7, 2001Publication date: September 13, 2001Applicant: IFG Institut fur Geratebau GmbHInventors: Aniouar Bjeoumikhov, Johannes Rabe, Norbert De Langhoff
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Patent number: 6266392Abstract: A soller slit is disclosed, which includes a plurality of metal foils and functions to restrict divergence of X-rays when arranged on an X-ray optical path. The metal foils are prepared by sintering a metal material such that surface thereof have high harmonic surface roughness. Alternatively, the metal foil has oxides formed by oxidation on the surfaces thereof such that the oxides can provide the high harmonic surface roughness. The high harmonic surface roughness of the metal foil restricts total reflection of X-rays at the metal foil. Therefore, it is possible to form high precision parallel X-ray beams by the soller slit to thereby improve resolution in an X-ray measurement.Type: GrantFiled: October 27, 1999Date of Patent: July 24, 2001Assignee: Rigaku CorporationInventors: Go Fujinawa, Shiro Umegaki
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Patent number: 6266553Abstract: In a computed tomography apparatus, and a method for operating same, for obtaining cardiac images, a spiral scan of a measurement volume containing a patient's heart is conducted, the production of the scanning data during the spiral scanning being synchronized with an ECG signal from the patient, in order to produce a graphic representation of the examination volume, and thus an image of the patient's heart. The ECG signal is employed to control the generation of the data during the spiral scanning at phase of the cardiac cycle wherein minimum movement of the heart takes place. The chronological correlation between the recording of the scanning data and the ECG signal is fixed, so that within each number of successive time intervals, a dataset is obtained completely within that time interval. The datasets from the successive time intervals are then combined to produce an image of the heart.Type: GrantFiled: September 11, 1998Date of Patent: July 24, 2001Assignee: Siemens AktiengesellschaftInventors: Manfred Fluhrer, Klaus Klingenbeck-Regn, Andreas Lutz, Judith Regn
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Patent number: 6259097Abstract: A transmission pre-scan of a patient is used in a nuclear medicine imaging system to determine the duration of a subsequent transmission scan of the patient. The transmission scan is for acquiring an attenuation map of the patient to correct emission data of the patient for non-uniform attenuation. As a result, the patient's exposure to radiation during the transmission scan is not excessive, yet transmission image quality is maintained. A radiation transmission source and a radiation detector are operated to perform the transmission pre-scan of the object, during which the transmission source remains in a fixed position. Downscatter correction is applied to correct the transmission pre-scan data for emission contamination. Count values from the pre-scan data are integrated axially.Type: GrantFiled: May 28, 1999Date of Patent: July 10, 2001Assignee: ADAC LaboratoriesInventors: Lingxiong Shao, Jinghan Ye, Soo Kuen Hom
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Patent number: 6256371Abstract: An x-ray illumination device which illuminates an object by reflecting an x-ray irradiated from a SR emission point with at least one x-ray mirror comprises: first measuring means for measuring the position of the emission point; first control means for controlling the position of the emission point based on the measurements of the first measuring means; second measuring means for measuring the position of the x-ray near the x-ray mirror; and second control means for controlling the position or the attitude of the x-ray mirror based on the measurements of the second measuring means. The control frequency of the first control means of the x-ray illumination device here is of a frequency range higher than the control frequency of the second control means, and the ranges of the two control frequencies thereof partially overlap.Type: GrantFiled: December 8, 1998Date of Patent: July 3, 2001Assignee: Canon Kabushiki KaishaInventors: Takayuki Hasegawa, Yutaka Watanabe
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Patent number: 6233306Abstract: Generally known conventional X-ray tubes include a window opening which is covered by an X-ray transparent X-ray window which is usually made of beryllium. A significant absorption of X-rays of comparatively long wavelength, for example of the order of magnitude of from 1 nm to 10 nm, occurs in such windows. According to the invention, a bundle of X-ray conducting capillary tubes (46) is connected to the window opening of the X-ray tube, the other end (48) of the bundle being provided with a very thin X-ray window (50) which seals the interior of the capillary tubes (46), being in vacuum contact with the vacuum space of the X-ray tube, from the environment in a vacuum tight manner.Type: GrantFiled: October 7, 1999Date of Patent: May 15, 2001Assignee: U.S. Philips CorporationInventor: Hendrik A. Van Sprang
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Patent number: 6229874Abstract: A base member obtained by cutting a cylindrical body having a center axial line at a maximum asymmetric angle &agr;0 with respect to a plane orthogonal to the center axial line of cylindrical body is prepared. Next, the thus obtained ellipsoidal asymmetric cut surface of the base member is shaped along a peripheral surface of an imaginary cylindrical body having a radius R0, into an asymmetric cut curved-surface. Then, a monochromator Si crystal is bonded to the asymmetric cut curved-surface of the base member. Both the asymmetric angle and the radius of curvature for a desired wavelength within a wide wavelength range can be simultaneously tuned only by the &phgr;-axis rotation.Type: GrantFiled: November 15, 1999Date of Patent: May 8, 2001Assignee: The University of TsukukaInventors: Noriyoshi Sakabe, Nobuhisa Watanabe
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Patent number: 6223068Abstract: The radiology instrument contains a source emitting X-radiation, a radiological image receiver, a chassis arranged between the X-ray source and the image receiver in order to accommodate an object to be radiographed, and a positioning and guiding device which can be connected to the chassis and can intercept the X-radiation so as to position and guide probes intended to interact with the object. The positioning and guiding device has first means forming a retractable guide grid having holes whose respective axes converge towards the focal point of the source when the first means intercept the conical radiation, and a retractable positioning grid with holes.Type: GrantFiled: November 2, 1998Date of Patent: April 24, 2001Assignee: GE Medical Systems, S.A.Inventors: René Romeas, Eric Maurincomme
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Patent number: 6198793Abstract: The invention concerns an illumination system for wavelengths ≦193 nm, particularly for EUV lithography, with at least one light source, which has an illumination A in a predetermined surface; at least one device for producing secondary light sources; at least one mirror or lens device comprising at least one mirror or one lens, which is or are organized into raster elements; one or more optical elements, which are arranged between the mirror or lens device comprising at least one mirror or one lens, which is or are organized into raster elements and the reticle plane, whereby the optical elements image the secondary light sources in the exit pupil of the illumination system.Type: GrantFiled: May 4, 1999Date of Patent: March 6, 2001Assignee: Carl-Zeiss-Stiftung Trading As Carl ZeissInventors: Jörg Schultz, Johannes Wangler, Karl-Heinz Schuster, Udo Dinger
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Patent number: 6167112Abstract: Light-intensive zone plates (4) are disclosed which are useful as condensers and X-ray objectives for high resolution X-ray microscopes. They have high refraction effectiveness in a high refraction order thanks to a high aspect ratio (H/P) and a suitably adjusted line-slot ratio (P.sub.1 /P.sub.2) lower than 1. Additional improvements may be obtained by zones (6, 7) inclined relative to the optical axis (3). The zone plates (4) may also be operated in Bragg reflection. They thus provide efficient optics with a high numeric aperture and make X-ray microscopes with 10 nm resolution possible. The zone plates (4) may have a relatively coarse structure, and thus they are easy to produce in a relatively short time. The zone plates (4) with high numerical aperture may be used in a particularly advantageous manner as small condensers in laboratory X-ray microscopes, as they can capture light from a microplasma X-ray radiation source in a particularly wide solid angle and focus it on an object.Type: GrantFiled: July 13, 1998Date of Patent: December 26, 2000Assignees: Bastian Nieman, Gerd SchneiderInventor: Gerd Schneider
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Patent number: 6160867Abstract: X-ray-reflecting mirrors are disclosed that exhibit reduced internal stress without any significant reduction in reflectance to X-rays. The mirrors comprise a substrate on a surface of which a multi-layer structure is formed. The multi-layer structure is formed by alternately and superposedly layering, on a surface of the substrate, a first material (e.g., molybdenum) and a second material (silicon with a dopant such as boron). Net internal stress of the multi-layer structure is controllably reduced by controlling the amount of diffused dopant in the second material.Type: GrantFiled: July 14, 1998Date of Patent: December 12, 2000Assignee: Nikon CorporationInventor: Katsuhiko Murakami
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Patent number: 6128367Abstract: An x-ray tube has a cathode and an anode which are arranged in a vacuum housing, with an electromagnet for deflecting the electron beam traveling from the cathode to the anode. This electromagnet is formed by a C-shaped yoke with two legs that are connected to each other by a base section surrounded by a winding. Respective pole shoes with opposing pole faces are disposed at the ends of the legs. The electron beam passes between the two pole shoes as it propagates from the cathode to the anode. Each pole face has a width which does not exceed the width of its pole shoe.Type: GrantFiled: July 22, 1998Date of Patent: October 3, 2000Assignee: Siemens AktiengesellschaftInventors: Bernhard Foerst, Marion Meusel, Roland Schmidt
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Patent number: 6094471Abstract: X-ray diagnostic system. The system includes a source of x-rays which communicates with an x-ray beam concentrator spaced apart from the x-ray source and disposed for receiving x-rays from the x-ray source. An x-ray spectrometer is disposed for receiving x-rays from the concentrator. In a preferred embodiment, the concentrator is formed of a cylindrical spiral of a metal-coated plastic material having a surface for reflecting x-rays. In another embodiment, the concentrator includes a plurality of concentric nested cylinders of a metal-coated plastic material for reflecting x-rays. In yet another embodiment, the concentrator is a glass capillary bundle. The concentrator allows the spectrometer to be spaced away from the source of x-rays such as scanning electron microscope.Type: GrantFiled: April 22, 1998Date of Patent: July 25, 2000Assignee: Smithsonian Astrophysical ObservatoryInventors: Eric H. Silver, Herbert W. Schnopper, Russel Ingram
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Patent number: 6091798Abstract: An apparatus and method for focusing X-rays. In one embodiment, his invention is a commercial-grade compound refractive X-ray lens. The commercial-grade compound refractive X-ray lens includes a volume of low-Z material. The volume of low-Z material has a first surface which is adapted to receive X-rays of commercially-applicable power emitted from a commercial-grade X-ray source. The volume of low-Z material also has a second surface from which emerge the X-rays of commercially-applicable power which were received at the first surface. Additionally, the commercial-grade compound refractive X-ray lens includes a plurality of openings which are disposed between the first surface and the second surface. The plurality of openings are oriented such that the X-rays of commercially-applicable power which are received at the first surface, pass through the volume of low-Z material and through the plurality openings. In so doing, the X-rays which emerge from the second surface are refracted to a focal point.Type: GrantFiled: June 23, 1998Date of Patent: July 18, 2000Assignee: The Regents of the University of CaliforniaInventors: David R. Nygren, Robert Cahn, Bjorn Cederstrom, Mats Danielsson, Jonas Vestlund
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Patent number: 6081581Abstract: An X-ray illumination system includes first and second X-ray mirrors for reflecting a synchrotron radiation beam, sequentially, a driving system for changing at least one of position and attitude of each of the first and second X-ray mirrors, a first measuring system for detecting a synchrotron radiation beam impinging on the first X-ray mirror, a second measuring system for measuring at least one of position and attitude of the first X-ray mirror with respect to a predetermined reference, or at least one of relative position and relative attitude between the first and second X-ray mirrors, a first control system for controlling drive of the first X-ray mirror on the basis of the measurement by the first measuring system, and a second control system for controlling drive of the second X-ray mirror on the basis of the measurement by the second measuring system.Type: GrantFiled: July 13, 1998Date of Patent: June 27, 2000Assignee: Canon Kabushiki KaishaInventor: Takayuki Hasegawa
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Patent number: 6055296Abstract: A radiographic grid with reduced line density artifacts. The radiographic grid includes a grid housing sized to receive a plurality of x-ray radiation absorbing lamellae. Each of the plurality of lamellae has a foil strip applied to its lower end portion. The foil eliminates the lamella line artifacts otherwise emanating from the lamellae.Type: GrantFiled: February 13, 1998Date of Patent: April 25, 2000Inventors: Daniel J. Ferlic, Randolph M. Ferlic
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Patent number: 6055295Abstract: A method for automatically setting a collimator of an x-ray imaging system during image acquisition includes receiving rapid scout images at an imaging station. The location of the body regions in one of said images is then automatically detected. The detected location of the body regions is used to generate settings for the collimator. The settings are used for automatically adjusting the collimator to substantially cover the non-body regions and substantially expose the body regions.Type: GrantFiled: January 29, 1998Date of Patent: April 25, 2000Assignee: Siemens Corporate Research, Inc.Inventors: Sreerama K. Murthy, Jianzhong Qian
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Patent number: 6054708Abstract: The methods and apparatuses for the control of neutron beams are herewith presented. Through the application of the methods and apparatuses presented one can manipulate various characteristics of neutron beams such as shape, velocity, density, polarization and other traits. In general three sequential operations are performed on the neutron beam, although variations of these steps are described to suit various purposes. First, a neutron beam is passed through a gradient magnet field which causes rotation of the beam in phase space. Second, the spin direction of a neutron beam is reversed through the application of a spin flipper. Third, the neutron beam is compressed in the longitudinal direction of the neutron beam in phase space. This produces a neutron beam having small divergence in phase space. The resultant neutron beam corresponds to a thin dense beam in real space. Variations of this paradigm allow for the manipulation of many characteristics of neutron beams to suit ones purpose.Type: GrantFiled: March 3, 1998Date of Patent: April 25, 2000Assignee: The Institute of Physical and Chemical ResearchInventor: Hirohiko Shimizu
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Patent number: 6052431Abstract: An X-ray converging mirror that can be positioned adjacent an X-ray source for reflecting X-ray beams from the X-ray source includes an X-ray converging mirror having a reflecting surface of a cross-sectional profile expressed by a curve of the following equation:x=y tan .theta.[1-ln(y/b)]wherein x and y denote a coordinate system, .theta. is equal to or less than a Bragg critical angle of reflection for the X-ray beams, and b denotes a point on the y-axis when dx/dy is 0.Type: GrantFiled: June 5, 1998Date of Patent: April 18, 2000Assignee: Horiba, Ltd.Inventors: Akira Onoguchi, Kozo Kashihara
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Patent number: 6047044Abstract: A stray radiation grid for penetrating radiation is produced by starting with a carrier material and producing holes in a first surface thereof, and subsequently filling the holes with penetrating radiation absorbing material. A second, opposite surface of the carrier block is etched away to reduce the thickness of the carrier block, leaving a carrier which is flexible and bendable, from which the radiation absorbing material projects as a number of free-standing absorption elements.Type: GrantFiled: July 7, 1998Date of Patent: April 4, 2000Assignee: Siemens AktiengesellschaftInventors: Volker Lehmann, Dieter Schmettow
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Patent number: 6031889Abstract: X-rays transmit through a vacuum duct along an axial direction of the vacuum duct. A plurality of first partition plates are disposed in the vacuum duct. Each of the first partition plates is formed with a first through hole at a central area thereof. The first partition plates divide the inner space of the vacuum duct in the axial direction and define a plurality of partitioned spaces. A plurality of second partition plates are provided each corresponding to each of the first partition plates. The second partition plate is disposed at a certain gap relative to a corresponding one of the first partition plates, each of the second partition plates being formed with a second through hole at a central area thereof, the X-rays transmitting through the vacuum duct passing through the second through hole. A support member connects the second partition plates together and fixes a relative position of the second partition plates.Type: GrantFiled: March 27, 1998Date of Patent: February 29, 2000Assignee: Sumitomo Heavy Industries, Inc.Inventor: Eijiro Toyota
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Patent number: 6018566Abstract: An X-ray collimator grid is formed within a wafer of monocrystalline silicon material by forming a plurality of spaced parallel elongate slots within a planar surface of a silicon crystal wafer, and forming slats of heavy metal in situs within each of said slots, including squeegeeing the heavy metal into the slots, from particles of heavy metal, each said slat gripping the walls of an associated slot.Type: GrantFiled: October 24, 1997Date of Patent: January 25, 2000Assignee: TRW Inc.Inventors: Carol D. Eberhard, George G. Pinneo, Moshe Sergant
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Patent number: 5978445Abstract: The invention relates to a spectrometer for X-radiation, including a disk which is impervious to the radiation and which has a first and a second surface provided with a plurality of channels or bores measuring a maximum of 50 .mu.m. The bores are disposed in such a manner that they extend from the first to the second disk surface and their extensions point toward a common line or a common point, with the common line or common point being located opposite the second surface. Also provided is a device with the aid of which the arching of the disk can be altered in such a way that the distance of the common line or common point from the concave surface changes.Type: GrantFiled: March 19, 1997Date of Patent: November 2, 1999Assignee: Forschungszentrum Karlsruhe GmbHInventors: Christoph Schultheiss, Waldemar Jakobi, deceased
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Patent number: 5974112Abstract: A photon beam dose enhancement is controlled by configuring a topical magnetic field, the magnetic field configuration having a magnetic field component across the beam path and having a magnetic field gradient component along the beam path which cause the dose enhancement, the dose enhancement being changeable during beam use by changing the magnetic field configuration during beam use, wherein the topical magnetic field can be produced by an array of magnet coils.Type: GrantFiled: November 18, 1998Date of Patent: October 26, 1999Inventor: Leonard Reiffel
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Patent number: 5970168Abstract: The present invention resides in a Fourier filter to detect defects on semiconductor wafers. The present invention relates to a Fourier filter to detect defects on semiconductor wafers which is less susceptible to having the filter output affected by vibrations and which avoids the physical contact from conventional damping.Type: GrantFiled: August 5, 1997Date of Patent: October 19, 1999Assignee: KLA-Tencor CorporationInventors: Steve Montesanto, Gershon Perelman, Rudolf Brunner
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Patent number: 5949850Abstract: Methods for making large area grids consisting of focused and unfocused holes in sheets of metal. The grid consists of thin metal walls surrounding hollow openings. The projection of all walls converge to a focal spot in the focused grid, and on parallel or substantially parallel in an unfocused grid. A grid having a large area is made by interlocking together smaller grid pieces. A tall device is made by stacking layers of focused grids. Methods to make unfocused grids that detect parallel incoming x-rays are also described. The opening of the grid can be filled with phosphor or other scintillating materials to make a integrated grid/scintillator structure. These grids can also be applied to many applications such as x-ray antiscatter for diagnostic medical imaging, non-destructive testing, x-ray collimation, filters for liquids or electromagnetic radiation.Type: GrantFiled: June 19, 1997Date of Patent: September 7, 1999Assignee: Creatv MicroTech, Inc.Inventor: Cha-Mei Tang
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Patent number: 5926522Abstract: An x-ray collimator for wavelength dispersive spectroscopy and the like includes a grazing incidence mirror optic having a polycapillary x-ray optic nested therein. The polycapillary x-ray optic is mounted in a hollow bore of the grazing incidence mirror optic so as not to interfere with operation of the grazing incidence mirror. The polycapillary x-ray optic extends the range of the grazing incidence mirror optic to higher energy ranges. The x-ray collimator of the present invention may be employed in a wavelength dispersive x-ray spectrometer including a diffracting element positioned to receive x-rays collimated by the x-ray collimator, and an x-ray detector positioned to receive the x-rays defracted by the diffracting element. A wavelength dispersive x-ray spectrometer in accordance with the present invention may be used in combination with an energy beam microscope, such as an electron microscope, to analyze x-rays emanating from a sample specimen.Type: GrantFiled: January 25, 1999Date of Patent: July 20, 1999Assignee: Noran Instruments, Inc.Inventors: Jon J. McCarthy, James V. Howard
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Patent number: 5893549Abstract: Mirror support means having a metal block machined with a first pair of slots shaped to receive a first pair of curved mirrors and a second pair of slots shaped to receive a second pair of curved mirrors. The block is sufficiently resiliently deformable to enable the slots to be widened to receive the mirrors and then for the mirrors to be clamped in position, the slots being accurately machined so that the mirrors are bent into their required forms of curvature. The use of a unitary block simplifies the construction and setting up of the support means for the mirrors.Type: GrantFiled: November 27, 1996Date of Patent: April 13, 1999Assignee: Medical Research CouncilInventors: Ladislav Pina, Adolf Inneman, Ulrich Wolfgang Arndt, David Keith Bowen
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Patent number: 5881126Abstract: A phase-contrast X-ray imaging system according to the present invention comprises an X-ray interferometer, wherein X-ray interfering beams thicker than 2 cm.times.2 cm are formed enabling observation of comparatively large objects. The X-ray interferometer is constituted by two crystal blocks which each are monolithically cut out from ingots of crystal and have two wafers which function as X-ray half mirrors. Optical equipment, a chamber, and a feedback system are incorporated to adjust and stabilize the crystal blocks. A device is also incorporated to obtain an image showing the distribution of the X-ray phase shift with which diagnosis become easier and reliable.Type: GrantFiled: March 28, 1997Date of Patent: March 9, 1999Assignee: Hitachi, Ltd.Inventor: Atsushi Momose
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Patent number: 5866914Abstract: A system for shaping a radiation beam exiting from a radiation source. The system includes a mount coupleable to the radiation source. The mount has a beam aperture with a tapered inner surface extending through the mount, through which the radiation beam passes. The system further includes a die having a tapered outer surface capable of engaging the tapered inner surface of the beam aperture. The die has a beam window extending through the die which is substantially transparent at at least a selected radiation power such that the radiation emerging from the beam window has the same size and shape as the beam window.Type: GrantFiled: January 15, 1997Date of Patent: February 2, 1999Assignee: Northwest Medical Physics Equipment, Inc.Inventor: Andrew D. Jones
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Patent number: 5859893Abstract: An x-ray imaging system according to the present invention comprising a stepped scanning-beam x-ray source and a multi-detector array. The output of the multi-detector array is input to an image reconstruction engine which combines the outputs of the multiple detectors over selected steps of the x-ray beam to generate an x-ray image of the object. A collimating element, preferably in the form of a perforated grid containing an array of apertures, interposed between the x-ray source and an object to be x-rayed. A maneuverable positioner incorporating an x-ray sensitive marker allowing the determination of the precise position coordinates of the maneuverable positioner.Type: GrantFiled: May 31, 1996Date of Patent: January 12, 1999Assignee: Cardiac Mariners, Inc.Inventors: Jack W. Moorman, Brian Skillicorn, John W. Wilent, deceased
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Patent number: 5825844Abstract: An X-ray optical apparatus includes a mirror element for reflecting an X-ray beam and a mechanism for applying vibrations of a predetermined excitation frequency to the mirror element to produce elastic vibrations to cause deformation of the surface of the mirror element. An illumination method and a device manufacturing method utilize such an X-ray optical apparatus for irradiating an object to be illuminated, such as a mask and a wafer, with the reflected X-ray beam, so that a pattern of the mask is transferred to the wafer.Type: GrantFiled: March 22, 1996Date of Patent: October 20, 1998Assignee: Canon Kabushiki KaishaInventors: Akira Miyake, Yutaka Watanabe
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Patent number: 5822393Abstract: In a method for adaptively modulating the power level of an x-ray tube of a computer tomography (CT) system for reducing an x-ray dose of an x-ray beam radiating through a patient and reaching detector means of said CT system during the acquisition of projections of body slices of the patient, the value of the maximum attenuation level per projection is established out of the patient projection data acquired for the respective projection and stored in a memory. The value of the maximum attenuation level for the next projection is predicted based on at least one of the stored values of the maximum attenuation levels and the respective power level of the x-ray tube for the next projection is established. Finally the respective power level of the x-ray tube for the next projection is accordingly adjusted.Type: GrantFiled: April 1, 1997Date of Patent: October 13, 1998Assignee: Siemens AktiengesellschaftInventor: Stefan Popescu
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Patent number: 5812631Abstract: A method for manufacturing the monolithic capillary X-ray lens, comprising the steps of Drawing a hollow glass raw-tube into monocapillaries in a heating furnace by a drawing tower; Stacking monocapillaries into a symmetric mould to form a multibundle; Feeding the multibundle into the heating furnace to be heated at uniform speed or variable speed; Drawing the multibundle by a drawing tower at uniform speed and variable speed to form a first integrated lens billet; Cutting the monolithic lens billet into desired shape according to usage to form said first monolithic capillary X-ray lens. A monolithic capillary X-ray lens produced by using said method comprises a plurality of X-ray channels passing from one end through another end, and is a single glass solid formed by melting together the walls themselves of said X-ray channels.Type: GrantFiled: February 14, 1997Date of Patent: September 22, 1998Assignee: China Aerospace Corporation and Beijing Normal UniversityInventors: Yiming Yan, Yejun He, Xunliang Ding, Dachun Wang, Andong Liu, Baozhen Chen, Fuzhong Wei
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Patent number: 5805663Abstract: A radiation imaging system for an object comprises a convergence type radiation generating unit for producing radiations having a radiation bundle so that it converges onto a given location, a radiation sensor unit opposed to the radiation generating unit with the object interposed therebetween, a pinhole member placed between the object and the radiation sensor unit, and a signal processing unit for processing an output signal of the radiation sensor unit.Type: GrantFiled: May 8, 1997Date of Patent: September 8, 1998Assignee: Futec, Inc.Inventor: Toshiro Mihara
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Patent number: 5768339Abstract: The invention claimed is a collimator for x-rays and the fabrication process for said collimator. The collimator, in its preferred embodiment, displays the general shape of a tube, having two apertures, an entrance aperture and an exit aperture. The walls of the collimator tube are not parallel to each other but rather are paraboloidal in longitudinal section. The geometry of the collimator tube is, therefore, circular in transverse cross-section and paraboloidal in longitudinal section, thereby resulting in a tube whose entrance aperture is of a smaller diameter than its exit aperture. The collimator geometry described is referred to herein as a tubular paraboloid.Type: GrantFiled: February 11, 1997Date of Patent: June 16, 1998Inventor: David B. O'Hara
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Patent number: 5747821Abstract: A monocapillary has a first region of constant inner dimension where the angle of reflection remains essentially constant as radiation is guided therethrough. The monocapillary also has a second region of decreasing inner dimension in a direction toward the outlet where the radiation is guided therethrough. In another embodiment, the monocapillary also has a third region at the inlet of increasing inner dimension toward the outlet direction where the radiation is guided therethrough.Type: GrantFiled: August 4, 1995Date of Patent: May 5, 1998Assignee: X-Ray Optical Systems, Inc.Inventors: Brian R. York, Oi-fan Xiao, Ning Gao
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Patent number: 5745547Abstract: A multiple-channel optic with each channel having a radius of curvature that varies directly with channel size (i.e., as the radius of curvature increases or decreases, so does the channel size, although not necessarily at the same rate).Type: GrantFiled: August 2, 1996Date of Patent: April 28, 1998Assignee: X-Ray Optical Systems, Inc.Inventor: Qi-Fan Xiao
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Patent number: 5721761Abstract: A radiographic grid with reduced line density artifacts. The radiographic grid includes a grid housing sized to receive a plurality of x-ray radiation absorbing lamellae. Each of the plurality of lamellae has a foil strip applied to its outer walls. The foil eliminates the lamella line artifacts otherwise emanating from the lamellae.Type: GrantFiled: September 20, 1996Date of Patent: February 24, 1998Inventors: Daniel J. Ferlic, Randolph M. Ferlic
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Patent number: 5696807Abstract: The present invention, in one form, is a system for modulating x-ray tube current as a function of gantry angle and slice location in a computed tomography system. In one embodiment, a desired noise level for a final image is selected, and a desired minimum x-ray photon reading and a desired average x-ray photon reading are identified to produce an image in accordance with the desired noise level. During scanning, actual x-ray photon readings are used with the desired average x-ray photon reading and the desired minimum x-ray photon reading to generate an x-ray modulating factor. This modulating factor is then used to modulate the x-ray tube current.Type: GrantFiled: September 5, 1996Date of Patent: December 9, 1997Assignee: General Electric CompanyInventor: Jiang Hsieh
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Patent number: 5684852Abstract: An X-ray lens includes a plurality of hollow cylinders of prescribed radius bored in a lens material piece having a phase lag coefficient appropriate for the wavelength of the X-rays to be focused such that the axes of the hollow cylinders are parallel and perpendicularly intersect a straight array axis.Type: GrantFiled: October 25, 1996Date of Patent: November 4, 1997Assignee: Agency of Industrial Science & Technology, Ministry of International Trade & IndustryInventor: Toshihisa Tomie
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Patent number: 5684855Abstract: Only an umbra of an X-ray beam is allowed to enter a designated detecting device arrays of an X-ray detector, whereby stable and good X-ray detection signals and images are provided. Even if a focal spot in an X-ray tube shifts, occurrence of artifacts or shifts of CT numbers is prevented to improve image quality. An X-ray CT scanner comprises an X-ray tube and X-ray detector, which are opposed to each other with a patient lying down on a couchtop between them, and a pre-collimator inserted between the X-ray tube and patient for restricting the width in a slice direction of an X-ray beam irradiated by the X-ray tube. The X-ray detector consists of, for example, a two-dimensional detector in which a plurality of detecting device arrays are arranged in the slice direction, each detecting device array including a plurality of detecting channels.Type: GrantFiled: February 15, 1996Date of Patent: November 4, 1997Assignee: Kabushiki Kaisha ToshibaInventors: Hiroshi Aradate, Tatsuro Suzuki
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Patent number: 5661774Abstract: The disclosed dual energy baggage scanning assembly includes a CT scanning system, and a conveyor belt for transporting items through the CT scanning system, and an improved power supply for the X-ray source of the CT scanner so that a dual energy beam is provided. The power supply alternately powers the X-ray tube of the scanning system at high and low voltage levels at a predetermined rate and comprises at least one high voltage DC power supply for providing a stable, high DC voltage the X-ray tube; means, including at least one waveform generator, for providing a periodic time varying waveform; and coupling means, including a transformer, for coupling the waveform generator to said DC voltage supply so that the total voltage across the cathode and anode of the tube is periodically changed between the high and low voltage levels at the predetermined rate in response to the periodic time varying waveform provided by the waveform generator.Type: GrantFiled: June 27, 1996Date of Patent: August 26, 1997Assignee: Analogic CorporationInventors: Bernard M. Gordon, Hans Weedon, Iosif Izrailit, Timothy R. Fox, John F. Moore
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Patent number: 5657364Abstract: An attenuator and detector cell arrangement for generating a signal ratio representative of focal spot position is described. The ratio is highly sensitive to focal spot position and facilitates generating, or reconstructing, a high quality image from the projection data. Further, and importantly, even if one detector cell is fully flooded, the signal intensity from such cell will vary depending upon the alignment between the focal spot and attenuator slot. Therefore, the focal spot movement detector is effective for detecting fan beam movement even if the detector cell is fully flooded. In one embodiment, the x-ray beam attenuator is configured to be positioned over the detecting surface of z-position detection cells. Slots or openings extend through the attenuator so that at least a portion of each detector cell is in free communication with an x-ray beam from the x-ray source.Type: GrantFiled: December 14, 1995Date of Patent: August 12, 1997Assignee: General Electric CompanyInventor: Armin Horst Pfoh
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Patent number: 5644614Abstract: The present invention, in one form, is a pre-patient collimator for reducing patient x-ray dose during a scan with a computed tomography system. The collimator has a contoured aperture for emitting a generally rectangular shaped x-ray fan beam. The fan beam approximates the rectangular shape of x-ray detectors which gather data for producing an image.Type: GrantFiled: December 21, 1995Date of Patent: July 1, 1997Assignee: General Electric CompanyInventors: Thomas Louis Toth, Willi Walter Hampel
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Patent number: 5633908Abstract: The invention relates to a measuring element for a portable micro-X-ray spectrometer, said element comprising a radiation protected housing, at least an X-ray source, a detector, cooling parts for the detector and means for activating the X-ray source and the detector. In accordance with the invention, in order to advantageously guide the X-rays obtained by the X-ray source away from the radiation protected housing (1), at least one capillary tube (3) has been mounted in the X-ray source (4), said capillary tube (3), at the opposite end of the tube as seen from the X-ray source, being connected to a hole formed in the detector (5) for conducting the X-rays out of the radiation protected housing (1). The inner section of the capillary tube (3) is smaller at the end which, seen from the X-ray source, is opposite than at the end at the X-ray source (4).Type: GrantFiled: November 28, 1995Date of Patent: May 27, 1997Assignees: Metorex International Oy, X-ray Capillary Optics ABInventors: Anders Rindby, Panu Jalas
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Patent number: 5629971Abstract: A scan speed procedure and method wherein a minimum radiation exposure period is determined on an object by object basis for a transmission study. Two transmission scans are performed including a prescan followed by a second transmission scan phase. The first transmission prescan is performed using a radiation source over the object. This prescan is of a rapid and predetermined duration (Tp). A resultant count density associated with the object is then generated and examined. The portion having the smallest count density (Cm) is determined and a value (Co) representing the minimum required number of counts for transmission study is given. From the above, a transmission period (Ts) is determined by the system and the second transmission scan phase is performed for the duration Ts using a multi-pass scan phase.Type: GrantFiled: May 11, 1995Date of Patent: May 13, 1997Assignee: ADAC LaboratoriesInventors: Steven M. Jones, Michael J. Janicki, Thomas F. Lang, John R. Liebig, Xiaohan Wang