Telescope Or Microscope Patents (Class 378/43)
  • Patent number: 10794879
    Abstract: For improving sensitivity, dynamic range, and specificity of GC-MS analysis there are disclosed embodiments of novel apparatuses based on improved characteristics of semi-open source with electron impact ionization, providing much higher brightness compared to known open EI sources. In an implementation, the source becomes compatible with multi-reflecting TOF analyzers for higher resolution analysis for improving detection limit. With improved schemes of spatial and temporal refocusing there are proposed various tandem TOF-TOF spectrometers with PSD, CID, and SID fragmentation and using either singly reflecting TOF or MR-TOF analyzers.
    Type: Grant
    Filed: August 7, 2019
    Date of Patent: October 6, 2020
    Assignee: LECO Corporation
    Inventor: Anatoly N. Verenchikov
  • Patent number: 10741297
    Abstract: The invention utilizes one exposure without moving parts to provide multiple x-ray views of an object. It relies on a 3D detector, which can be a stack of film plates, and a specified focusing x-ray optic. The x-ray optic, discussed below, allows collection of x-rays from a localized volume, just like an ordinary optical lens, and the stacked film plate, or other 3D detector design, allows collection of the multiple focal plane information from one line of sight.
    Type: Grant
    Filed: October 30, 2018
    Date of Patent: August 11, 2020
    Assignee: Lawrence Livermore National Security, LLC
    Inventors: Bernard J. Kozioziemski, Nobuhiko Izumi, Julia K. Vogel, Louisa A. P. Pickworth
  • Patent number: 10732125
    Abstract: To inspect a separator roll for a defect inside the separator roll with use of only a small number of defect inspection devices, a defect inspection device (1) includes: a radiation source section (2) configured to emit an electromagnetic wave (4) to a separator roll (10); and a sensor section (3) configured to detect the electromagnetic wave (4) having passed through the separator roll (10).
    Type: Grant
    Filed: November 28, 2017
    Date of Patent: August 4, 2020
    Assignee: SUMITOMO CHEMICAL COMPANY, LIMITED
    Inventors: Yoshitaka Shinomiya, Koji Kashu
  • Patent number: 10724952
    Abstract: A system and method for performing four dimensional multicolor nanotomography with high harmonics and attosecond pulses to attain spectrally resolved absorption data about the three-dimensional volumetric structure of a sample are disclosed. Also disclosed are embodiments of the system and method that have been adapted to perform four dimensional multicolor nanotomography absorption and index of refraction data about the three-dimensional volumetric structure of a sample, to perform five dimensional multicolor nanotomography with high harmonics and attosecond pulses to obtain spectrally resolved absorption data about the three-dimensional volumetric structure and temporal dynamics of the sample, to perform five dimensional multicolor nanotomography to obtain spectrally resolved absorption and index of refraction data about the three-dimensional volumetric structure and temporal dynamics of the sample, and to perform Fourier-domain Optical Coherence Tomography.
    Type: Grant
    Filed: July 18, 2017
    Date of Patent: July 28, 2020
    Assignee: B.G. Negev Technologies and Applications Ltd. At Ben-Gurion University
    Inventor: Evgeny Eugene Frumker
  • Patent number: 10705031
    Abstract: The present teaching relates to methods, systems, and apparatus for X-ray imaging with a detector capable of resolving photon energy. In one example, an X-ray microscope is disclosed. The X-ray microscope comprises an X-ray source and a detector. The X-ray source is configured for irradiating X-ray to a sample. The detector is configured for: detecting X-ray photons from the irradiated X-ray, determining energy of each of the detected X-ray photons, and generating an image of the sample based on detected X-ray photons that have energies in a predetermined range.
    Type: Grant
    Filed: August 27, 2015
    Date of Patent: July 7, 2020
    Assignee: SHENZHEN XPECTVISION TECHNOLOGY CO., LTD.
    Inventors: Peiyan Cao, Yurun Liu
  • Patent number: 10697908
    Abstract: The present disclosure provides a method and an apparatus for apparatus for inspecting a semiconductor wafer for abnormalities by accurately measuring elemental concentration at a target area. The apparatus includes an x-ray imaging subsystem for measuring an elemental composition at the target area of the semiconductor wafer. The apparatus further includes an edxrf subsystem for measuring an elemental concentration at the target area of the semiconductor wafer. The elemental concentration may be calibrated by first correlating the elemental concentration measurements obtained using x-ray imaging system for the target area with the elemental concentration measurements obtained using the edxrf subsystem for the target area to receive an augmented and accurate elemental concentration measurement for the target area of the semiconductor wafer.
    Type: Grant
    Filed: May 29, 2016
    Date of Patent: June 30, 2020
    Assignee: XWINSYS LTD.
    Inventors: Doron Reinis, Michael Geffen, Roni Peretz, Colin Smith
  • Patent number: 10697907
    Abstract: The present disclosure provides a method and an apparatus for apparatus for accurately measuring and calibrating elemental concentration measurements for a semiconductor wafer. The apparatus includes an edxrf system for calculating an elemental concentration at a target area of the semiconductor wafer. The apparatus further includes an optical subsystem for calculating volumetric information of the target area of the semiconductor wafer. The elemental concentration may be calibrated by first correlating the elemental concentration measurements for a norm feature at the target area with the volumetric information for the norm feature of the target area to obtain a calibration data. Thereafter, the calibration data obtained is used to calibrate the elemental concentration measurements to achieve an accurate measurement thereof.
    Type: Grant
    Filed: May 29, 2016
    Date of Patent: June 30, 2020
    Assignee: XWINSYS LTD.
    Inventors: Doron Reinis, Michael Geffen, Roni Peretz, Colin Smith
  • Patent number: 10541102
    Abstract: Described herein is an x-ray backscatter apparatus for non-destructive inspection of a part. The apparatus includes an x-ray emitter and a zone plate. The x-ray emitter includes an x-ray shield, a vacuum tube, a cathode, and an anode. The x-ray shield has an emission aperture. The vacuum tube is within the x-ray shield. The cathode and anode are enclosed within the vacuum tube. The cathode generates an electron emission. The anode is located relative to the cathode to receive the electron emission and convert the electron emission to a hard x-ray emission and is located relative to the emission aperture to direct at least a portion of the hard x-ray emission through the emission aperture. The zone plate is external to the x-ray shield and located relative to the emission aperture to receive the portion of the hard x-ray emission and focus the portion into a focused hard x-ray emission.
    Type: Grant
    Filed: September 14, 2016
    Date of Patent: January 21, 2020
    Assignee: The Boeing Company
    Inventor: Morteza Safai
  • Patent number: 9943272
    Abstract: Improved system and method of X-ray laser microscopy that combines information obtained from both X-ray diffraction and X-ray imaging methods. The sample is placed in an ultra-cold, ultra-low pressure vacuum chamber, and exposed to brief bursts of coherent X-ray illumination further concentrated using X-ray mirrors and pinhole collimation methods. Higher resolution data from a sample is obtained using hard X-ray lasers, such as free electron X-ray lasers, and X-ray diffraction methods. Lower resolution data from the same sample can be obtained using any of hard or soft X-ray laser sources, and X-ray imaging methods employing nanoscale etched zone plate technology. In some embodiments both diffraction and imaging data can be obtained simultaneously. Data from both sources are combined to create a more complete representation of the sample. Methods to further improve performance, such as concave or curved detectors, improved temperature control, and alternative X-ray optics are also disclosed.
    Type: Grant
    Filed: September 23, 2017
    Date of Patent: April 17, 2018
    Inventors: Yiming Wang, Vincent Huang, Hanjie Zou, Eileen Guo, Ruibo Wu, Zhuotong Xian
  • Patent number: 9859029
    Abstract: Improved system and method of X-ray laser microscopy that combines information obtained from both X-ray diffraction and X-ray imaging methods. At least one sample is placed in an ultra-cold, ultra-low pressure vacuum chamber, often using a sample administration device configured to present a plurality of samples. The sample is exposed to brief bursts of coherent X-ray illumination, often further concentrated using X-ray mirrors and pinhole collimation methods. Higher resolution data from the samples is obtained using hard X-ray lasers, such as free electron X-ray lasers, and X-ray diffraction methods. Lower resolution data from the same samples can be obtained using any of hard or soft X-ray laser sources, and X-ray imaging methods employing nanoscale etched zone plate technology. In some embodiments both diffraction and imaging data can be obtained simultaneously. Data from both sources are combined to create a more complete representation of the samples.
    Type: Grant
    Filed: February 26, 2017
    Date of Patent: January 2, 2018
    Inventors: Allison Sihan Jia, Muzhi Liu, Yuhao Wang, Kevin Shaokang You, Jingyi Zhang, Zhuotong Xian
  • Patent number: 9858499
    Abstract: A rotation unit of an image processor rotates at least any one of a securing unit for securing an object, an illumination unit for illuminating the object secured by the securing unit, and an image reading unit for reading an image of the object secured by the securing unit. A matching value calculation unit calculates the matching value for matching the image read by the image reading unit and the image in an image storing unit for storing images of objects previously read. A controller controls the rotation by the rotation unit based on the matching value calculated by the matching value calculation unit.
    Type: Grant
    Filed: April 21, 2014
    Date of Patent: January 2, 2018
    Assignee: FUJI XEROX CO., LTD.
    Inventor: Kensuke Ito
  • Patent number: 9835491
    Abstract: An imager for imaging a plurality of images of a single scene over a plurality of disparate electromagnetic wavelength sets includes front-end optics for outputting a polychromatic, collimated image beam of the scene; a beam displacer configured for splitting the collimated image beam into spatially displaced, mutually parallel beams, and an imaging-sensor array configured for registration of the spatially displaced wavelength sets at disparate locations along the imaging-sensor array. In alternative versions, the beam displacer displaces constituent light beams based on at least one of wavelength and polarization. In various implementations, a back-end focusing element focuses each constituent beam onto a predetermined location along the imaging-sensor array. The imaging-sensor array is optimally configured for simultaneous sampling of the plural images focused thereupon by the back-end focusing elements.
    Type: Grant
    Filed: May 23, 2013
    Date of Patent: December 5, 2017
    Assignee: Solid State Scientific Corporation
    Inventor: Jonathan Martin Mooney
  • Patent number: 9709789
    Abstract: There is presented an up-conversion infrared microscope (110) arranged for imaging an associated object (130), wherein the up-conversion infrared microscope (110) comprises a non-linear crystal (120) arranged for up-conversion of infrared electromagnetic radiation, and wherein an objective optical component (100) has an entrance pupil with a first diameter D1, and an optical component system which is arranged for forming an external image (136) of the back-focal plane (132) of the objective optical component (100), which has a diameter (given by the diameter of a circle enclosing all optical paths at the plane of the 10 external image) which is denominated D2 and wherein D1 is larger than a second diameter D2.
    Type: Grant
    Filed: January 31, 2014
    Date of Patent: July 18, 2017
    Assignee: DANMARKS TEKNISKE UNIVERSITET
    Inventors: Jeppe Seidelin Dam, Christian Pedersen, Nicolai Højer Sanders, Peter Tidemand-Lichtenberg
  • Patent number: 9646732
    Abstract: A high resolution x-ray microscope with a high flux x-ray source that allows high speed metrology or inspection of objects such as integrated circuits (ICs), printed circuit boards (PCBs), and other IC packaging technologies. The object to be investigated is illuminated by collimated, high-flux x-rays from a movable, extended source having a designated x-ray spectrum. The system also comprises a means to control the relative positions of the x-ray source and the object; a scintillator that absorbs x-rays and emits visible photons positioned in very close proximity to (or in contact with) the object; an optical imaging system that forms a highly magnified, high-resolution image of the photons emitted by the scintillator; and a detector such as a CCD array to convert the image to electronic signals.
    Type: Grant
    Filed: August 8, 2016
    Date of Patent: May 9, 2017
    Assignee: SVXR, Inc.
    Inventors: David Lewis Adler, Benjamin Thomas Adler, Freddie Erich Babian
  • Patent number: 9583229
    Abstract: Improved system and method of X-ray laser microscopy that combines information obtained from both X-ray diffraction and X-ray imaging methods. The sample is placed in an ultra-cold, ultra-low pressure vacuum chamber, and exposed to brief bursts of coherent X-ray illumination further concentrated using X-ray mirrors and pinhole collimation methods. Higher resolution data from a sample is obtained using hard X-ray lasers, such as free electron X-ray lasers, and X-ray diffraction methods. Lower resolution data from the same sample can be obtained using any of hard or soft X-ray laser sources, and X-ray imaging methods employing nanoscale etched zone plate technology. In some embodiments both diffraction and imaging data can be obtained simultaneously. Data from both sources are combined to create a more complete representation of the sample.
    Type: Grant
    Filed: July 23, 2016
    Date of Patent: February 28, 2017
    Inventors: Yiying Cao, Roger Kim, Michael Chang, Zhuotong Xian, Katherine Han
  • Patent number: 9583431
    Abstract: A 2.5D electronic package is provided in which at least one integrated circuit is mounted on an interposer that is mounted on a package substrate. To reduce warpage, the interconnection array of the integrated circuit does not include a thick metallization layer; and at least part of the power distribution function that would otherwise have been performed by the thick metallization layer is performed by one or more metallization layers that are added to the interposer. A method is provided for optimizing the design of the electronic package by choosing the appropriate number of metallization layers to be added to the interposer.
    Type: Grant
    Filed: November 11, 2014
    Date of Patent: February 28, 2017
    Assignee: Altera Corporation
    Inventors: Arifur Rahman, Karthik Chandrasekar
  • Patent number: 9377415
    Abstract: A measuring device (40) for measuring an illumination property of an illumination system (12), which is configured for two-dimensional irradiation of a substrate (24) arranged in an illumination plane (21) with illumination radiation (20). Two differing measurement beam paths (52, 54) are formed in the measuring device, each arranged to guide the illumination radiation emitted by the illumination system onto a spatially resolving intensity detector (42) of the measuring device. A first (52) of the measurement beam paths is arranged to measure an intensity distribution in the illumination plane and the second (54) of the measurement beam paths is arranged to measure an intensity distribution in a pupil of the illumination system. The measuring device also includes an imaging optical unit (44) arranged in the first measurement beam path (52) such that the illumination radiation guided in the first measurement beam path passes through the imaging optical unit.
    Type: Grant
    Filed: September 30, 2014
    Date of Patent: June 28, 2016
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Michael Arnz, Markus Deguenther
  • Patent number: 9291578
    Abstract: An apparatus is disclosed for the examination and inspection of integrated devices such as integrated circuits. X-rays are transmitted through the integrated device, and are incident on a photoemissive structure that absorbs x-rays and emits electrons. The electrons emitted by the photoemissive structure are shaped by an electron optical system to form a magnified image of the emitted electrons on a detector. This magnified image is then recorded and processed. In some embodiments, the integrated device and photoemissive structure are independently mounted and controlled. In other embodiments, the photoemissive device is deposited directly onto the integrated device. In some embodiments, the incidence angle of the x-rays is varied to allow internal three-dimensional structures of the integrated device to be determined. In other embodiments, the recorded image is compared with a reference data to enable inspection for manufacturing quality control.
    Type: Grant
    Filed: August 3, 2012
    Date of Patent: March 22, 2016
    Inventor: David L. Adler
  • Patent number: 9263227
    Abstract: An X-ray tube includes a radiopaque substrate including a window portion, an X-ray transmission window closing the window portion, an X-ray target provided at the window portion from an inner surface side of the substrate, a highly-evacuated container portion attached to the inner surface of the substrate, a cathode, a first control electrode and a second control electrode provided inside the container portion. A shielding electrode is provided at the inner surface of the substrate so as to surround the window portion. Electrons collide with the X-ray target to generate X-rays. Electrons reflected on the X-ray target between the shielding electrodes are absorbed by the shielding electrodes, so an inner surface of the container portion is not charged. The electron emission from the cathode is not affected by the reflected electrons, so a change in target current is small, and thus X-rays of substantially constant intensity can be radiated.
    Type: Grant
    Filed: September 14, 2013
    Date of Patent: February 16, 2016
    Assignee: FUTABA CORPORATION
    Inventors: Akira Matsumoto, Kiyoyuki Deguchi, Yoshihisa Marushima, Yuuichi Kogure, Kazuhito Nakamura, Tomoyuki Okada, Toru Fujita, Tatsuya Nakamura
  • Patent number: 9237876
    Abstract: A system and method for single step x-ray phase contrast imaging. In one embodiment, a method for single step x-ray phase contrast imaging includes illuminating an object to be imaged with x-rays. The x-rays passing through the object are detected by a spectral detector. Image data derived from the detected x-rays is provided to an x-ray image processor. A phase image is generated based on the image data.
    Type: Grant
    Filed: September 20, 2013
    Date of Patent: January 19, 2016
    Assignee: UNIVERSITY OF HOUSTON SYSTEM
    Inventors: Mini Das, Do{hacek over (g)}a Gürsoy
  • Patent number: 9057962
    Abstract: A source-collector module for an extreme ultraviolet (EUV) lithography system, the module including a laser-produced plasma (LPP) that generates EUV radiation and a grazing-incidence collector (GIC) mirror arranged relative thereto and having an input end and an output end. The LPP is formed using an LPP target system wherein a pulsed laser beam travels on-axis through the GIC and is incident upon solid, moveable LPP target. The GIC mirror is arranged relative to the LPP to receive the EUV radiation therefrom at its input end and focus the received EUV radiation at an intermediate focus adjacent the output end. An example GIC mirror design is presented that includes a polynomial surface-figure correction to compensate for GIC shell thickness effects, thereby improve far-field imaging performance.
    Type: Grant
    Filed: December 2, 2012
    Date of Patent: June 16, 2015
    Assignee: Media Lario S.R.L.
    Inventors: Natale M. Ceglio, Giovanni Nocerino, Fabio Zocchi
  • Patent number: 9025839
    Abstract: Methods, media, and systems for assessing the quality of a digital image. In an embodiment, both a micro-analysis and macro-analysis are performed. The micro-analysis comprises dividing the digital image into a plurality of blocks, for two or more of the plurality of blocks, determining a score based on a spatial frequency of the block, and generating a score map for the digital image based on the score for each of the two or more blocks. The macro-analysis comprises detecting artifacts in the digital image, computing a degradation score based on detected artifacts, and computing a whole-slide-quality score based on the score map and the degradation score.
    Type: Grant
    Filed: June 16, 2014
    Date of Patent: May 5, 2015
    Assignee: Leica Biosystems Imaging, Inc.
    Inventors: Ole Eichhorn, Cindy Perz
  • Patent number: 9016943
    Abstract: A cartridge-based cryogenic imaging system includes a sample handling system. This system uses a kinematic base and cold interface system that provides vertical loading to horizontally mounted high-precision rotation stages that are able to facilitate automated high-resolution three-dimensional (3D) imaging with computed tomography (CT). Flexible metal braids are used to provide cooling and also allow a large range of rotation. A robotic sample transfer and loading system provides further automation by allowing a number of samples to be loaded and automatically sequentially placed on the sample stage and imaged. These characteristics provide the capability of high-throughput and highly automated cryogenic x-ray microscopy and computed tomography.
    Type: Grant
    Filed: November 15, 2013
    Date of Patent: April 28, 2015
    Assignee: Carl Zeiss X-ray Microscopy, Inc.
    Inventors: Chris J. Jacobsen, Wenbing Yun
  • Patent number: 8891728
    Abstract: A specimen supporting member (10) includes: a specimen supporting film (11) such as a silicon nitride film, a carbon film, and a polyimide film; an X-ray radiation film (13) provided on one principal surface of the specimen supporting film, and for radiating a characteristic X-ray in a soft X-ray region upon irradiation with charged particles; and a specimen adsorption film (12) which is a metal film provided on another principal surface of the specimen supporting film (11), and which fixes by adsorption a specimen (1) to be observed. Since a protein which is a constitutive substance of a biological specimen has a characteristic to easily adsorb to a metallic ion, a specimen adsorption film (12) is formed on one principal surface of the specimen supporting film (11) so that an observation specimen adsorbs thereto.
    Type: Grant
    Filed: February 23, 2011
    Date of Patent: November 18, 2014
    Assignee: National Institute of Advanced Industrial Science and Technology
    Inventor: Toshihiko Ogura
  • Publication number: 20140286473
    Abstract: A method for inspection includes capturing an optical image of one or more features on a surface of a sample and irradiating an area of the sample containing at least one of the features with an X-ray beam. An intensity of X-ray fluorescence emitted from the sample in response to the irradiating X-ray beam is measured. The optical image is processed so as to extract geometrical parameters of the at least one of the features and to compute a correction factor responsively to the geometrical parameters. The correction factor is applied to the measured intensity in order to derive a property of the at least one of the features.
    Type: Application
    Filed: March 23, 2014
    Publication date: September 25, 2014
    Applicant: JORDAN VALLEY SEMICONDUCTORS LTD.
    Inventors: Alex Tokar, Alex Dikopoltsev, Isaac Mazor, Matthew Wormington
  • Patent number: 8774477
    Abstract: Systems and methods for assessing the quality of a digital slide image. In an embodiment, the digital slide image is divided into a plurality of image regions. For each of a subset of the plurality of image regions, a quality of the image region is determined based on a determined spatial frequency of the image region. In addition, a visual depiction of the digital slide image may be generated that, for each of the subset of the plurality of image regions, indicates the determined quality of that image region.
    Type: Grant
    Filed: October 22, 2013
    Date of Patent: July 8, 2014
    Assignee: Leica Biosystems Imaging, Inc.
    Inventors: Ole Eichhorn, Cindy Perz
  • Patent number: 8723925
    Abstract: A three-dimensional/four-dimensional (3D/4D) imaging apparatus and a region of interest (ROI) adjustment method and device are provided. An ROI is adjusted through an E image in a 3D/4D imaging mode, in which the E image is refreshed in real time when the ROI is adjusted and has a scan line range larger than that of the ROI.
    Type: Grant
    Filed: June 17, 2011
    Date of Patent: May 13, 2014
    Assignee: Shenzhen Mindray Bio-Medical Electronics Co., Ltd
    Inventor: Bin Yao
  • Publication number: 20140126691
    Abstract: Methods, systems, and devices of Fourier ptychographic X-ray imaging by capturing a plurality of variably-illuminated, low-resolution intensity X-ray images of a specimen and computationally reconstructing a high-resolution X-ray image of the specimen by iteratively updating overlapping regions in Fourier space with the variably-illuminated, low-resolution intensity X-ray images.
    Type: Application
    Filed: October 28, 2013
    Publication date: May 8, 2014
    Applicant: California Institute of Technology
    Inventors: Guoan Zheng, Changhuei Yang, Roarke Horstmeyer
  • Publication number: 20140064445
    Abstract: The invention discloses an x-ray system that produces highly magnified images of objects such as integrated circuits (ICs), printed circuit boards (PCBs), and other IC packaging technologies. Specifically, the object is illuminated by collimated, high-flux x-rays from an extended source, with the x-ray wavelength selected to provide contrast for the internal structures of the object. The system also comprises a stage to control the position and orientation of the object; a scintillator, positioned in close proximity to the object, that absorbs x-rays and emits visible photons; an optical imaging system that forms a high-resolution magnified image of the photons emitted by the scintillator; and a detector such as a CCD array to convert the image to electronic signals. The x-ray system may also be utilized in methods for high speed metrology or inspection, which in turn enable rapid process development, as well as manufacturing process control and yield management.
    Type: Application
    Filed: September 4, 2013
    Publication date: March 6, 2014
    Inventor: David Lewis Adler
  • Publication number: 20140037052
    Abstract: An apparatus is disclosed for the examination and inspection of integrated devices such as integrated circuits. X-rays are transmitted through the integrated device, and are incident on a photoemissive structure that absorbs x-rays and emits electrons. The electrons emitted by the photoemissive structure are shaped by an electron optical system to form a magnified image of the emitted electrons on a detector. This magnified image is then recorded and processed. In some embodiments, the integrated device and photoemissive structure are independently mounted and controlled. In other embodiments, the photoemissive device is deposited directly onto the integrated device. In some embodiments, the incidence angle of the x-rays is varied to allow internal three-dimensional structures of the integrated device to be determined. In other embodiments, the recorded image is compared with a reference data to enable inspection for manufacturing quality control.
    Type: Application
    Filed: August 3, 2012
    Publication date: February 6, 2014
    Inventor: David L. Adler
  • Patent number: 8602648
    Abstract: A cartridge-based cryogenic imaging system includes a sample handling system. This system uses a kinematic base and cold interface system that provides vertical loading to horizontally mounted high-precision rotation stages that are able to facilitate automated high-resolution three-dimensional (3D) imaging with computed tomography (CT). Flexible metal braids are used to provide cooling and also allow a large range of rotation. A robotic sample transfer and loading system provides further automation by allowing a number of samples to be loaded and automatically sequentially placed on the sample stage and imaged. These characteristics provide the capability of high-throughput and highly automated cryogenic x-ray microscopy and computed tomography.
    Type: Grant
    Filed: September 14, 2009
    Date of Patent: December 10, 2013
    Assignee: Carl Zeiss X-ray Microscopy, Inc.
    Inventors: Chris J. Jacobsen, Wenbing Yun
  • Patent number: 8565503
    Abstract: A system that determines the quality of a digital microscope slide by analyzing digital slide images based on complexity and spatial frequencies. An example embodiment detailed in the application may provide visual feedback on the whole slide quality by overlaying the image with a color coded “heat map” of local area quality. A user provided with the overlap image may obtain both an absolute quality measurement for the whole image and quickly identity the quality variability within the slide.
    Type: Grant
    Filed: June 3, 2011
    Date of Patent: October 22, 2013
    Assignee: Leica Biosystems Imaging, Inc.
    Inventors: Ole Eichhorn, Cindy Perz
  • Patent number: 8538120
    Abstract: An image sensor integrated circuit may contain image sensor pixels. A channel containing a fluid with particles such as cells may be formed on top of the image sensor. Some of the image sensor pixels may form a calibration sensor and some of the image sensor pixels may form an imager. As the fluid and particles flow through the channel at a flow rate, the calibration sensor may measures the flow rate and illumination intensity in the channel. Based on calibration data such as measured flow rate and measured illumination intensity, adjustments may be made to ensure that the imager acquires satisfactory image data. The adjustments may include flow rate adjustments, image acquisition data rate adjustments, and illumination adjustments. A processing unit in the channel may contain a laser or other component to destroy selected cells. A flared region in the channel may be used as a chromatograph.
    Type: Grant
    Filed: May 24, 2011
    Date of Patent: September 17, 2013
    Assignee: Aptina Imaging Corporation
    Inventors: Kenneth Edward Salsman, Ulrich Boettiger, Dmitry Bakin, Curtis W. Stith
  • Patent number: 8526575
    Abstract: A compound zone plate comprising a first zone plate frame including a first zone plate, a second zone plate frame including a second zone plate, and a base frame to which the first zone plate frame and the second zone plate frame are bonded. In examples, two more zone plates are added to make a four element optic. In the assembly process, the microbeads are used to ensure the parallelism, dial in the distance precisely between the zone plates by selecting the microbead size, possibly in response to the width of the frames, and ensure low friction lateral movement enabling nanometer precision alignment of the zone plates with respect to each other prior to being fixed by the adhesive. That is, when the frames are pressed together to ensure parallelism, it is still possible to align them to each other since the microbead layer facilitates the inplane movement of the alignment process.
    Type: Grant
    Filed: August 12, 2010
    Date of Patent: September 3, 2013
    Assignee: Xradia, Inc.
    Inventors: Alan Francis Lyon, Michael Feser, Wenbing Yun, Sharon Chen
  • Patent number: 8433039
    Abstract: This invention teaches a method of performing gamma-ray microscopy and how to build a gamma-ray microscope. While the beam of gamma rays can not be manipulated like a beam of light or a beam of electrons, magnification is possible using a single-point source of gamma radiation. With this design, gamma rays originate from a tiny point in space and radiate outward as they travel away from the source. This results in magnification when a sample is placed between this single-point source and a detector array. The magnification factor is equal to the source-to-detector distance divided by the source-to-sample distance. A single-point source of gamma rays can be made by crossing a beam of positrons with a beam of electrons. The finer and more focused these beams are, the smaller the single-point source can be, and the higher the resolution can be. Methods of making and focusing electron beams are known in the art of making electron microscopy.
    Type: Grant
    Filed: May 3, 2010
    Date of Patent: April 30, 2013
    Assignee: PROTEOMYX Inc.
    Inventor: Nathaniel Tue Tran
  • Patent number: 8411820
    Abstract: The present disclosure presents, in various aspects and embodiments, a 3D X-ray microscopy imaging technique. Some aspects are directed to various embodiments of an apparatus for use in such a technique, such as an X-ray microscopy imaging system. Other aspects are directed to various embodiments of a method for use in such a technique, like a method for generating an X-ray image that has a grayscale response proportional to range. Some, though not all, aspects of the technique are computer-implemented, and so include encoded program storage media, programmed computing apparatuses, and computer-implemented methods.
    Type: Grant
    Filed: October 23, 2009
    Date of Patent: April 2, 2013
    Assignee: Lockheed Martin Corp.
    Inventors: Mark K. Browder, J. Richard Wood, William B. Shores
  • Patent number: 8411821
    Abstract: The present disclosure presents, in various aspects and embodiments, a 3D X-ray reflection microscopy imaging technique. Some aspects are directed to various embodiments of an apparatus for use in such a technique, such as an X-ray reflection microscopy imaging system. Other aspects are directed to various embodiments of a method for use in such a technique, like a method for generating an X-ray image that has a grayscale response proportional to range. Some, though not all, aspects of the technique are computer-implemented, and so include encoded program storage media, programmed computing apparatuses, and computer-implemented methods.
    Type: Grant
    Filed: October 23, 2009
    Date of Patent: April 2, 2013
    Assignee: Lockheed Martin Corp.
    Inventors: James Richard Wood, Mark K. Browder
  • Publication number: 20120321037
    Abstract: A specimen supporting member (10) includes: a specimen supporting film (11) such as a silicon nitride film, a carbon film, and a polyimide film; an X-ray radiation film (13) provided on one principal surface of the specimen supporting film, and for radiating a characteristic X-ray in a soft X-ray region upon irradiation with charged particles; and a specimen adsorption film (12) which is a metal film provided on another principal surface of the specimen supporting film (11), and which fixes by adsorption a specimen (1) to be observed. Since a protein which is a constitutive substance of a biological specimen has a characteristic to easily adsorb to a metallic ion, a specimen adsorption film (12) is formed on one principal surface of the specimen supporting film (11) so that an observation specimen adsorbs thereto.
    Type: Application
    Filed: February 23, 2011
    Publication date: December 20, 2012
    Applicant: National Institute of Advanced Industrial Science and Technology
    Inventor: Toshihiko Ogura
  • Publication number: 20120051496
    Abstract: This invention relates to the use of thick target materials 50 microns and thicker for an x-ray transmission tube; to possible target material compositions including various elements and their alloys, eutectic alloys, compounds, or intermetallic compounds; and applications for utilizing such thick target transmission x-ray tubes. The target comprises at lease one portion of the target with a thickness of 50 microns or greater. The target can be optionally attached to a substrate end-window essentially transparent to x-rays or be thick enough so that no such substrate is required. Applications include producing a high percentage of monochromatic line mission x-rays of said thick target for use in reduced dose medical imaging and other non-destructive testing applications.
    Type: Application
    Filed: August 25, 2010
    Publication date: March 1, 2012
    Inventors: Chia-Gee Wang, Bruce Briant Parsons
  • Patent number: 8076654
    Abstract: The present invention provides a surface inspection method and apparatus for inspecting a surface of a sample, in which a resistive film is coated on the surface, and a beam is irradiated to the surface having the resistive film coated thereon, to thereby conduct inspection of the surface of the sample. In the surface inspection method of the present invention, a resistive film having an arbitrarily determined thickness t1 is first coated on a surface of a sample. Thereafter, a part of the resistive film having the arbitrarily determined thickness t1 is dissolved in a solvent, to thereby reduce the thickness of the resistive film to a desired level. This enables precise control of a value of resistance of the resistive film and suppresses distortion of an image to be detected.
    Type: Grant
    Filed: May 19, 2008
    Date of Patent: December 13, 2011
    Assignee: Ebara Corporation
    Inventors: Masahiro Hatakeyama, Kenji Watanabe, Takeshi Murakami, Tohru Satake, Nobuharu Noji
  • Publication number: 20110266440
    Abstract: A method of investigating a sample using Scanning Electron Microscopy (SEM), comprising the following steps: Irradiating a surface (S) of the sample using a probing electron beam in a plurality (N) of measurement sessions, each measurement session having an associated beam parameter (P) value that is chosen from a range of such values and that differs between measurement sessions; Detecting stimulated radiation emitted by the sample during each measurement session, associating a measurand (M) therewith and noting the value of this measurand for each measurement session, thus allowing compilation of a data set (D) of data pairs (Pi, Mi), where 1?i?N, wherein: A statistical Blind Source Separation (BSS) technique is employed to automatically process the data set (D) and spatially resolve it into a result set (R) of imaging pairs (Qk, Lk), in which an imaging quantity (Q) having value Qk is associated with a discrete depth level Lk referenced to the surface S.
    Type: Application
    Filed: April 29, 2011
    Publication date: November 3, 2011
    Applicant: FEI Company
    Inventors: Faysal Boughorbel, Cornelis Sander Kooijman, Berend Helmerus Lich, Eric Gerardus Theodoor Bosch
  • Patent number: 7970197
    Abstract: A block of tissue is imaged and used as a reference. Later slides formed from that tissue receive numbers, and are also imaged. The imaged slides are compared to the reference image to determine identification errors.
    Type: Grant
    Filed: October 30, 2007
    Date of Patent: June 28, 2011
    Assignee: Clarient, Inc.
    Inventor: Jose de la Torre-Bueno
  • Patent number: 7928379
    Abstract: The invention concerns a phase plate for electron optical imaging, wherein the zero beam (4) is phase-shifted in order to obtain an image with optimum contrast through interference with the diffracted electron beams (5, 5?). The shading of diffracted electron beams (5, 5?) is kept to a minimum and shading that cannot be reconstructed from the obtained image data is prevented. This is achieved in that the electrode (1?) is designed as a shielded conductor (7), which is disposed to extend from a mounting (8) in a substantially radial direction towards the area of the zero beam (4), wherein the shielded conductor (7) has an end (9) in front of the area of the zero beam (4) such that a field (6) is formed between the conductor (7) and the shielding (10) surrounding it, which overlaps this area. The invention also concerns an imaging method for complete reconstruction of the image and an electron microscope (12) which is provided with the phase plate (1).
    Type: Grant
    Filed: October 26, 2007
    Date of Patent: April 19, 2011
    Assignee: CEOS Corrected Electron Optical Systems GmbH
    Inventor: Joachim Zach
  • Patent number: 7885448
    Abstract: A microscope array with staggered rows of magnifying imaging systems is used to scan a biological tissue sample in a single linear pass to produce an image and corresponding optical-density data. A conventional computerized algorithm is used to identify, isolate and produce segmented images of nuclei contained in the image. The OD values corresponding to nuclear chromatin are used to identify numerical patterns known to have statistical significance in relation to the health condition of the biological tissue. These patterns are analyzed to detect pre-neoplastic changes in histologically normal-appearing tissue that suggest a risk for the development of a pre-malignant and a potentially malignant lesion. This information is then converted to a visually perceptible form incorporated into the image of the tissue sample and is displayed for qualitative analysis by a pathologist.
    Type: Grant
    Filed: February 27, 2007
    Date of Patent: February 8, 2011
    Assignee: DMetrix, Inc.
    Inventor: Peter H. Bartels
  • Patent number: 7822174
    Abstract: An x-ray microscope stage enables alignment of a sample about a rotation axis to enable three dimensional tomographic imaging of the sample using an x-ray microscope. A heat exchanger assembly provides cooled gas to a sample during x-ray microscopic imaging.
    Type: Grant
    Filed: April 20, 2006
    Date of Patent: October 26, 2010
    Assignee: The Regents of the University of California
    Inventors: Mark Le Gros, Carolyn A. Larabell
  • Patent number: 7796725
    Abstract: An x-ray imaging system uses a synchrotron radiation beam to acquire x-ray images and at least one integrated x-ray source. The system has an imaging system including sample stage controlled by linear translation stages, objective x-ray lens, and x-ray sensitive detector system, placed on a fixed optical table and a mechanical translation stage system to switch x-ray sources when synchrotron radiation beam is not available.
    Type: Grant
    Filed: March 11, 2009
    Date of Patent: September 14, 2010
    Assignee: Xradia, Inc.
    Inventors: Ziyu Wu, Wenbing Yun, Peiping Zhu, Yuxin Wang, Qingxi Yuan, Andrei Tkachuk, Wanxia Huang, Michael Feser
  • Patent number: 7792246
    Abstract: A method and apparatus for providing image data which can be used to construct a high resolution image of a region of a target object is disclosed. An embodiment of the method includes the acts of providing incident radiation from a radiation source at a target object, via at least one detector, detecting the intensity of radiation scattered by the target object and providing the image data responsive to the detected intensity without high resolution positioning of the incident radiation or a post target object aperture relative to the target object.
    Type: Grant
    Filed: April 15, 2005
    Date of Patent: September 7, 2010
    Assignee: Phase Focus Ltd
    Inventors: John Marius Rodenburg, Helen Mary Louise Faulkner
  • Patent number: 7787588
    Abstract: The principle of reciprocity states that full-field and scanning microscopes can produce equivalent images by interchanging the roles of condenser and detector. Thus, the contrast transfer function inversion previously used for images from scanning systems can be applied to Zernike phase contrast images. In more detail, a full-field x-ray imaging system for quantitatively reconstructing the phase shift through a specimen comprises a source that generates x-ray radiation, a condenser x-ray lens for projecting the x-ray radiation onto the specimen, an objective x-ray lens for imaging the x-ray radiation transmitted through the specimen, a phase-shifting device to shift the phase of portions of x-ray radiation by a determined amount, and an x-ray detector that detects the x-ray radiation transmitted through the specimen to generate a detected image.
    Type: Grant
    Filed: July 21, 2009
    Date of Patent: August 31, 2010
    Assignee: Xradia, Inc.
    Inventors: Wenbing Yun, Michael Feser, Benjamin Hornberger
  • Patent number: 7676258
    Abstract: A system and method for enhancing images of ex-vivo or in-vivo tissue produced by confocal microscopy, optical coherence tomography, two-photon microscopy, or ultrasound, is provided by applying to the tissue a solution or gel having an effective concentration of citric or other alpha-hydroxy acid which enhances tissue structures, such as cellular nuclei, in such images. Such concentration may be 3-20% acid, and preferably 5% acid.
    Type: Grant
    Filed: December 8, 2005
    Date of Patent: March 9, 2010
    Assignee: Lucid, Inc.
    Inventor: Jay M. Eastman
  • Patent number: 7655923
    Abstract: A mesh (M) having an ellipsoid shape or a shape close to the ellipsoid shape is attached to an electrode (EL1) among electrodes (EL1 to ELn). Voltages of the later-stage electrodes (EL2 to ELn) are appropriately set. With this arrangement, a local negative spherical aberration generated by the mesh (M) is cancelled out with a positive spherical aberration. This optimizes an electric field distribution. As a result, this realizes an electrostatic lens whose acceptance angle is extended to about ±60°.
    Type: Grant
    Filed: November 9, 2004
    Date of Patent: February 2, 2010
    Assignees: National University Corporation Nara Institute of Science and Technology, Jeol, Ltd.
    Inventors: Hiroshi Daimon, Hiroyuki Matsuda, Makoto Kato, Masato Kudo