Abstract: An apparatus includes a plurality of stacked flat Bragg diffractors having at least a first flat Bragg diffractor and a second flat Bragg diffractor. The first and second flat Bragg diffractors are positioned sequentially along an x-ray propagation axis of an x-ray beam. The x-ray beam includes x-rays and has an angular beam divergence less than 30 mrad in at least one direction.

Abstract: An X-ray source including: a liquid target source configured to provide a liquid target moving along a flow axis; an electron source configured to provide an electron beam; and a liquid target shaper configured to shape the liquid target to include a non-circular cross section with respect to the flow axis, wherein the non-circular cross section has a first width along a first axis and a second width along a second axis, wherein the first width is shorter than the second width, and wherein the liquid target includes an impact portion being intersected by the first axis; wherein the x-ray source is configured to direct the electron beam towards the impact portion such that the electron beam interacts with the liquid target within the impact portion to generate X-ray radiation.

Abstract: A method for X-ray measurement includes generating and directing an X-ray beam to a sample including at least first and second layers stacked on one another, the X-ray beam incident on a sample location at which the first and second layers include respective first and second high aspect ratio (HAR) structures. X-ray scatter profiles are measured, that are emitted from the sample location in response to the X-ray beam as a function of tilt angle between the sample and the X-ray beam. A shift is estimated, between the first and second layers and a characteristic tilt of the first and second layers, based on the X-ray scatter profiles measured as a function of the tilt angle.

Abstract: An instrumented substrate apparatus is configured to measure wavelength-resolved radiation, such as extreme ultraviolet radiation. The instrumented substrate apparatus includes a substrate and photoelectric sensors on the substrate. The photoelectric sensors include a photoemissive material, a photoelectron collector, and a measurement circuit. The measurement circuit is electrically coupled to the photoemissive material and the photoelectron collector. The measurement circuit is configured to measure a current generated by the photoelectron collectors by a current meter. Such current is used to determine the wavelength-resolved EUV measurement information by a controller on the instrumented substrate apparatus, or by communicating the current to a factory automation system.

Abstract: A rapid and automatic virus imaging and analysis system includes (i) electron optical sub-systems (EOSs), each of which has a large field of view (FOV) and is capable of instant magnification switching for rapidly scanning a virus sample; (ii) sample management sub-systems (SMSs), each of which automatically loads virus samples into one of the EOSs for virus sample scanning and then unloads the virus samples from the EOS after the virus sample scanning is completed; (iii) virus detection and classification sub-systems (VDCSs), each of which automatically detects and classifies a virus based on images from the EOS virus sample scanning; and (iv) a cloud-based collaboration sub-system for analyzing the virus sample scanning images, storing images from the EOS virus sample scanning, and storing and analyzing machine data associated with the EOSs, the SMSs, and the VDCSs.

Abstract: An X-ray imaging system including: an X-ray Talbot imaging apparatus which is provided with an object table, an X-ray source, a plurality of gratings, and an X-ray detector side by side in a direction of an X-ray radiation axis, and irradiates the X-ray detector with an X-ray from the X-ray source through an object and the plurality of gratings to obtain a moire image required for forming a reconstruction image of the object; and an object housing inside which the object is housed and an environmental condition independent of an external environment is set, wherein the object housing is provided detachably with respect to the object table.

Abstract: The presently-disclosed technology enables real-time inspection of a multitude of subcomponents of a component in parallel. For example, the component may be a semiconductor package, and the subcomponents may include through-silicon vias. One embodiment relates to a method for inspecting multiple subcomponents of a component for defects, the method comprising, for each subcomponent undergoing defect detection: extracting a subcomponent image from image data of the component; computing a transformed feature vector from the subcomponent image; computing pairwise distances from the transformed feature vector to each transformed feature vector in a training set; determining a proximity metric using said pairwise distances; and comparing the proximity metric against a proximity threshold to detect a defect in the subcomponent. Another embodiment relates to a product manufactured using a disclosed method of inspecting multiple subcomponents of a component for defects.

Abstract: A method of determining the density of an elongate rod of material as it travels in a longitudinal direction through an inspection zone of apparatus for determining the density of an elongate rod of material is disclosed. The method comprises: positioning an X-ray generator of said apparatus to transmit X-rays in a direction across the elongate rod and towards a detector of said apparatus, as the elongate rod travels in a longitudinal direction through said inspection zone of said apparatus; supplying a voltage to the X-ray generator of between 20 to 80 kV to transmit the X-rays at a predetermined intensity; detecting the intensity of the X-rays transmitted through the elongate rod using the detector, and determining a density of the elongate rod based on a comparison of the predetermined and detected intensities. A method of manufacturing tobacco industry products that includes the above inspection method is also disclosed, together with apparatus for determining the density of an elongate rod of material.

Abstract: Methods and systems for generating high resolution reconstructions of 3D samples imaged using slice and view processes where the electron interaction depth of the imaging beam is greater than slice thicknesses. Data obtained via such slice and view processes is enhanced with a depth blur reducing algorithm, that is configured to reduce depth blur caused by portions of the first data and second data that are resultant from electron interactions outside the first layer and second layer, respectively, to create enhanced first data and second enhanced data. A high-resolution 3D reconstruction of the sample is then generated using the enhanced first data and the enhanced second data. In some embodiments, the depth blur reducing algorithm may be selected from a set of such algorithms that have been individually configured for certain microscope conditions, sample conditions, or a combination thereof.

Abstract: An x-ray mirror optic includes a plurality of surface segments with quadric cross-sections having differing quadric parameters. The quadric cross-sections of the surface segments share a common axis and are configured to reflect x-rays in a plurality of reflections along a single optical axis or in a scattering plane defined as containing an incident x-ray and a corresponding reflected x-ray.

Abstract: The present teaching relates to methods, systems, and apparatus for X-ray imaging with a detector capable of resolving photon energy. In one example, an X-ray microscope is disclosed. The X-ray microscope comprises an X-ray source and a detector. The X-ray source is configured for irradiating X-ray to a sample. The detector is configured for: detecting X-ray photons from the irradiated X-ray, determining energy of each of the detected X-ray photons, and generating an image of the sample based on detected X-ray photons that have energies in a predetermined range.

Abstract: A device for the collection of X-rays includes at least one multi-reflection reflector cone. The multi-reflection reflector cone has a focal axis. A first portion of the multi-reflection reflector cone is oriented at a first angle to the focal axis, and a second portion of the multi-reflection reflector cone is oriented at a second angle to the focal axis.

Abstract: For improving sensitivity, dynamic range, and specificity of GC-MS analysis there are disclosed embodiments of novel apparatuses based on improved characteristics of semi-open source with electron impact ionization, providing much higher brightness compared to known open EI sources. In an implementation, the source becomes compatible with multi-reflecting TOF analyzers for higher resolution analysis for improving detection limit. With improved schemes of spatial and temporal refocusing there are proposed various tandem TOF-TOF spectrometers with PSD, CID, and SID fragmentation and using either singly reflecting TOF or MR-TOF analyzers.

Abstract: The invention utilizes one exposure without moving parts to provide multiple x-ray views of an object. It relies on a 3D detector, which can be a stack of film plates, and a specified focusing x-ray optic. The x-ray optic, discussed below, allows collection of x-rays from a localized volume, just like an ordinary optical lens, and the stacked film plate, or other 3D detector design, allows collection of the multiple focal plane information from one line of sight.

Abstract: To inspect a separator roll for a defect inside the separator roll with use of only a small number of defect inspection devices, a defect inspection device (1) includes: a radiation source section (2) configured to emit an electromagnetic wave (4) to a separator roll (10); and a sensor section (3) configured to detect the electromagnetic wave (4) having passed through the separator roll (10).

Abstract: A system and method for performing four dimensional multicolor nanotomography with high harmonics and attosecond pulses to attain spectrally resolved absorption data about the three-dimensional volumetric structure of a sample are disclosed. Also disclosed are embodiments of the system and method that have been adapted to perform four dimensional multicolor nanotomography absorption and index of refraction data about the three-dimensional volumetric structure of a sample, to perform five dimensional multicolor nanotomography with high harmonics and attosecond pulses to obtain spectrally resolved absorption data about the three-dimensional volumetric structure and temporal dynamics of the sample, to perform five dimensional multicolor nanotomography to obtain spectrally resolved absorption and index of refraction data about the three-dimensional volumetric structure and temporal dynamics of the sample, and to perform Fourier-domain Optical Coherence Tomography.

Abstract: The present teaching relates to methods, systems, and apparatus for X-ray imaging with a detector capable of resolving photon energy. In one example, an X-ray microscope is disclosed. The X-ray microscope comprises an X-ray source and a detector. The X-ray source is configured for irradiating X-ray to a sample. The detector is configured for: detecting X-ray photons from the irradiated X-ray, determining energy of each of the detected X-ray photons, and generating an image of the sample based on detected X-ray photons that have energies in a predetermined range.

Abstract: The present disclosure provides a method and an apparatus for apparatus for inspecting a semiconductor wafer for abnormalities by accurately measuring elemental concentration at a target area. The apparatus includes an x-ray imaging subsystem for measuring an elemental composition at the target area of the semiconductor wafer. The apparatus further includes an edxrf subsystem for measuring an elemental concentration at the target area of the semiconductor wafer. The elemental concentration may be calibrated by first correlating the elemental concentration measurements obtained using x-ray imaging system for the target area with the elemental concentration measurements obtained using the edxrf subsystem for the target area to receive an augmented and accurate elemental concentration measurement for the target area of the semiconductor wafer.

Abstract: The present disclosure provides a method and an apparatus for apparatus for accurately measuring and calibrating elemental concentration measurements for a semiconductor wafer. The apparatus includes an edxrf system for calculating an elemental concentration at a target area of the semiconductor wafer. The apparatus further includes an optical subsystem for calculating volumetric information of the target area of the semiconductor wafer. The elemental concentration may be calibrated by first correlating the elemental concentration measurements for a norm feature at the target area with the volumetric information for the norm feature of the target area to obtain a calibration data. Thereafter, the calibration data obtained is used to calibrate the elemental concentration measurements to achieve an accurate measurement thereof.

Abstract: Described herein is an x-ray backscatter apparatus for non-destructive inspection of a part. The apparatus includes an x-ray emitter and a zone plate. The x-ray emitter includes an x-ray shield, a vacuum tube, a cathode, and an anode. The x-ray shield has an emission aperture. The vacuum tube is within the x-ray shield. The cathode and anode are enclosed within the vacuum tube. The cathode generates an electron emission. The anode is located relative to the cathode to receive the electron emission and convert the electron emission to a hard x-ray emission and is located relative to the emission aperture to direct at least a portion of the hard x-ray emission through the emission aperture. The zone plate is external to the x-ray shield and located relative to the emission aperture to receive the portion of the hard x-ray emission and focus the portion into a focused hard x-ray emission.

Abstract: Improved system and method of X-ray laser microscopy that combines information obtained from both X-ray diffraction and X-ray imaging methods. The sample is placed in an ultra-cold, ultra-low pressure vacuum chamber, and exposed to brief bursts of coherent X-ray illumination further concentrated using X-ray mirrors and pinhole collimation methods. Higher resolution data from a sample is obtained using hard X-ray lasers, such as free electron X-ray lasers, and X-ray diffraction methods. Lower resolution data from the same sample can be obtained using any of hard or soft X-ray laser sources, and X-ray imaging methods employing nanoscale etched zone plate technology. In some embodiments both diffraction and imaging data can be obtained simultaneously. Data from both sources are combined to create a more complete representation of the sample. Methods to further improve performance, such as concave or curved detectors, improved temperature control, and alternative X-ray optics are also disclosed.

Abstract: A rotation unit of an image processor rotates at least any one of a securing unit for securing an object, an illumination unit for illuminating the object secured by the securing unit, and an image reading unit for reading an image of the object secured by the securing unit. A matching value calculation unit calculates the matching value for matching the image read by the image reading unit and the image in an image storing unit for storing images of objects previously read. A controller controls the rotation by the rotation unit based on the matching value calculated by the matching value calculation unit.

Abstract: Improved system and method of X-ray laser microscopy that combines information obtained from both X-ray diffraction and X-ray imaging methods. At least one sample is placed in an ultra-cold, ultra-low pressure vacuum chamber, often using a sample administration device configured to present a plurality of samples. The sample is exposed to brief bursts of coherent X-ray illumination, often further concentrated using X-ray mirrors and pinhole collimation methods. Higher resolution data from the samples is obtained using hard X-ray lasers, such as free electron X-ray lasers, and X-ray diffraction methods. Lower resolution data from the same samples can be obtained using any of hard or soft X-ray laser sources, and X-ray imaging methods employing nanoscale etched zone plate technology. In some embodiments both diffraction and imaging data can be obtained simultaneously. Data from both sources are combined to create a more complete representation of the samples.

Abstract: An imager for imaging a plurality of images of a single scene over a plurality of disparate electromagnetic wavelength sets includes front-end optics for outputting a polychromatic, collimated image beam of the scene; a beam displacer configured for splitting the collimated image beam into spatially displaced, mutually parallel beams, and an imaging-sensor array configured for registration of the spatially displaced wavelength sets at disparate locations along the imaging-sensor array. In alternative versions, the beam displacer displaces constituent light beams based on at least one of wavelength and polarization. In various implementations, a back-end focusing element focuses each constituent beam onto a predetermined location along the imaging-sensor array. The imaging-sensor array is optimally configured for simultaneous sampling of the plural images focused thereupon by the back-end focusing elements.

Abstract: There is presented an up-conversion infrared microscope (110) arranged for imaging an associated object (130), wherein the up-conversion infrared microscope (110) comprises a non-linear crystal (120) arranged for up-conversion of infrared electromagnetic radiation, and wherein an objective optical component (100) has an entrance pupil with a first diameter D1, and an optical component system which is arranged for forming an external image (136) of the back-focal plane (132) of the objective optical component (100), which has a diameter (given by the diameter of a circle enclosing all optical paths at the plane of the 10 external image) which is denominated D2 and wherein D1 is larger than a second diameter D2.

Abstract: A high resolution x-ray microscope with a high flux x-ray source that allows high speed metrology or inspection of objects such as integrated circuits (ICs), printed circuit boards (PCBs), and other IC packaging technologies. The object to be investigated is illuminated by collimated, high-flux x-rays from a movable, extended source having a designated x-ray spectrum. The system also comprises a means to control the relative positions of the x-ray source and the object; a scintillator that absorbs x-rays and emits visible photons positioned in very close proximity to (or in contact with) the object; an optical imaging system that forms a highly magnified, high-resolution image of the photons emitted by the scintillator; and a detector such as a CCD array to convert the image to electronic signals.

Abstract: A 2.5D electronic package is provided in which at least one integrated circuit is mounted on an interposer that is mounted on a package substrate. To reduce warpage, the interconnection array of the integrated circuit does not include a thick metallization layer; and at least part of the power distribution function that would otherwise have been performed by the thick metallization layer is performed by one or more metallization layers that are added to the interposer. A method is provided for optimizing the design of the electronic package by choosing the appropriate number of metallization layers to be added to the interposer.

Abstract: Improved system and method of X-ray laser microscopy that combines information obtained from both X-ray diffraction and X-ray imaging methods. The sample is placed in an ultra-cold, ultra-low pressure vacuum chamber, and exposed to brief bursts of coherent X-ray illumination further concentrated using X-ray mirrors and pinhole collimation methods. Higher resolution data from a sample is obtained using hard X-ray lasers, such as free electron X-ray lasers, and X-ray diffraction methods. Lower resolution data from the same sample can be obtained using any of hard or soft X-ray laser sources, and X-ray imaging methods employing nanoscale etched zone plate technology. In some embodiments both diffraction and imaging data can be obtained simultaneously. Data from both sources are combined to create a more complete representation of the sample.

Abstract: A measuring device (40) for measuring an illumination property of an illumination system (12), which is configured for two-dimensional irradiation of a substrate (24) arranged in an illumination plane (21) with illumination radiation (20). Two differing measurement beam paths (52, 54) are formed in the measuring device, each arranged to guide the illumination radiation emitted by the illumination system onto a spatially resolving intensity detector (42) of the measuring device. A first (52) of the measurement beam paths is arranged to measure an intensity distribution in the illumination plane and the second (54) of the measurement beam paths is arranged to measure an intensity distribution in a pupil of the illumination system. The measuring device also includes an imaging optical unit (44) arranged in the first measurement beam path (52) such that the illumination radiation guided in the first measurement beam path passes through the imaging optical unit.

Abstract: An apparatus is disclosed for the examination and inspection of integrated devices such as integrated circuits. X-rays are transmitted through the integrated device, and are incident on a photoemissive structure that absorbs x-rays and emits electrons. The electrons emitted by the photoemissive structure are shaped by an electron optical system to form a magnified image of the emitted electrons on a detector. This magnified image is then recorded and processed. In some embodiments, the integrated device and photoemissive structure are independently mounted and controlled. In other embodiments, the photoemissive device is deposited directly onto the integrated device. In some embodiments, the incidence angle of the x-rays is varied to allow internal three-dimensional structures of the integrated device to be determined. In other embodiments, the recorded image is compared with a reference data to enable inspection for manufacturing quality control.

Abstract: An X-ray tube includes a radiopaque substrate including a window portion, an X-ray transmission window closing the window portion, an X-ray target provided at the window portion from an inner surface side of the substrate, a highly-evacuated container portion attached to the inner surface of the substrate, a cathode, a first control electrode and a second control electrode provided inside the container portion. A shielding electrode is provided at the inner surface of the substrate so as to surround the window portion. Electrons collide with the X-ray target to generate X-rays. Electrons reflected on the X-ray target between the shielding electrodes are absorbed by the shielding electrodes, so an inner surface of the container portion is not charged. The electron emission from the cathode is not affected by the reflected electrons, so a change in target current is small, and thus X-rays of substantially constant intensity can be radiated.

Abstract: A system and method for single step x-ray phase contrast imaging. In one embodiment, a method for single step x-ray phase contrast imaging includes illuminating an object to be imaged with x-rays. The x-rays passing through the object are detected by a spectral detector. Image data derived from the detected x-rays is provided to an x-ray image processor. A phase image is generated based on the image data.

Abstract: A source-collector module for an extreme ultraviolet (EUV) lithography system, the module including a laser-produced plasma (LPP) that generates EUV radiation and a grazing-incidence collector (GIC) mirror arranged relative thereto and having an input end and an output end. The LPP is formed using an LPP target system wherein a pulsed laser beam travels on-axis through the GIC and is incident upon solid, moveable LPP target. The GIC mirror is arranged relative to the LPP to receive the EUV radiation therefrom at its input end and focus the received EUV radiation at an intermediate focus adjacent the output end. An example GIC mirror design is presented that includes a polynomial surface-figure correction to compensate for GIC shell thickness effects, thereby improve far-field imaging performance.

Abstract: Methods, media, and systems for assessing the quality of a digital image. In an embodiment, both a micro-analysis and macro-analysis are performed. The micro-analysis comprises dividing the digital image into a plurality of blocks, for two or more of the plurality of blocks, determining a score based on a spatial frequency of the block, and generating a score map for the digital image based on the score for each of the two or more blocks. The macro-analysis comprises detecting artifacts in the digital image, computing a degradation score based on detected artifacts, and computing a whole-slide-quality score based on the score map and the degradation score.

Abstract: A cartridge-based cryogenic imaging system includes a sample handling system. This system uses a kinematic base and cold interface system that provides vertical loading to horizontally mounted high-precision rotation stages that are able to facilitate automated high-resolution three-dimensional (3D) imaging with computed tomography (CT). Flexible metal braids are used to provide cooling and also allow a large range of rotation. A robotic sample transfer and loading system provides further automation by allowing a number of samples to be loaded and automatically sequentially placed on the sample stage and imaged. These characteristics provide the capability of high-throughput and highly automated cryogenic x-ray microscopy and computed tomography.

Abstract: A specimen supporting member (10) includes: a specimen supporting film (11) such as a silicon nitride film, a carbon film, and a polyimide film; an X-ray radiation film (13) provided on one principal surface of the specimen supporting film, and for radiating a characteristic X-ray in a soft X-ray region upon irradiation with charged particles; and a specimen adsorption film (12) which is a metal film provided on another principal surface of the specimen supporting film (11), and which fixes by adsorption a specimen (1) to be observed. Since a protein which is a constitutive substance of a biological specimen has a characteristic to easily adsorb to a metallic ion, a specimen adsorption film (12) is formed on one principal surface of the specimen supporting film (11) so that an observation specimen adsorbs thereto.

Abstract: A method for inspection includes capturing an optical image of one or more features on a surface of a sample and irradiating an area of the sample containing at least one of the features with an X-ray beam. An intensity of X-ray fluorescence emitted from the sample in response to the irradiating X-ray beam is measured. The optical image is processed so as to extract geometrical parameters of the at least one of the features and to compute a correction factor responsively to the geometrical parameters. The correction factor is applied to the measured intensity in order to derive a property of the at least one of the features.

Abstract: Systems and methods for assessing the quality of a digital slide image. In an embodiment, the digital slide image is divided into a plurality of image regions. For each of a subset of the plurality of image regions, a quality of the image region is determined based on a determined spatial frequency of the image region. In addition, a visual depiction of the digital slide image may be generated that, for each of the subset of the plurality of image regions, indicates the determined quality of that image region.

Abstract: A three-dimensional/four-dimensional (3D/4D) imaging apparatus and a region of interest (ROI) adjustment method and device are provided. An ROI is adjusted through an E image in a 3D/4D imaging mode, in which the E image is refreshed in real time when the ROI is adjusted and has a scan line range larger than that of the ROI.

Abstract: Methods, systems, and devices of Fourier ptychographic X-ray imaging by capturing a plurality of variably-illuminated, low-resolution intensity X-ray images of a specimen and computationally reconstructing a high-resolution X-ray image of the specimen by iteratively updating overlapping regions in Fourier space with the variably-illuminated, low-resolution intensity X-ray images.

Abstract: The invention discloses an x-ray system that produces highly magnified images of objects such as integrated circuits (ICs), printed circuit boards (PCBs), and other IC packaging technologies. Specifically, the object is illuminated by collimated, high-flux x-rays from an extended source, with the x-ray wavelength selected to provide contrast for the internal structures of the object. The system also comprises a stage to control the position and orientation of the object; a scintillator, positioned in close proximity to the object, that absorbs x-rays and emits visible photons; an optical imaging system that forms a high-resolution magnified image of the photons emitted by the scintillator; and a detector such as a CCD array to convert the image to electronic signals. The x-ray system may also be utilized in methods for high speed metrology or inspection, which in turn enable rapid process development, as well as manufacturing process control and yield management.

Abstract: An apparatus is disclosed for the examination and inspection of integrated devices such as integrated circuits. X-rays are transmitted through the integrated device, and are incident on a photoemissive structure that absorbs x-rays and emits electrons. The electrons emitted by the photoemissive structure are shaped by an electron optical system to form a magnified image of the emitted electrons on a detector. This magnified image is then recorded and processed. In some embodiments, the integrated device and photoemissive structure are independently mounted and controlled. In other embodiments, the photoemissive device is deposited directly onto the integrated device. In some embodiments, the incidence angle of the x-rays is varied to allow internal three-dimensional structures of the integrated device to be determined. In other embodiments, the recorded image is compared with a reference data to enable inspection for manufacturing quality control.

Abstract: A cartridge-based cryogenic imaging system includes a sample handling system. This system uses a kinematic base and cold interface system that provides vertical loading to horizontally mounted high-precision rotation stages that are able to facilitate automated high-resolution three-dimensional (3D) imaging with computed tomography (CT). Flexible metal braids are used to provide cooling and also allow a large range of rotation. A robotic sample transfer and loading system provides further automation by allowing a number of samples to be loaded and automatically sequentially placed on the sample stage and imaged. These characteristics provide the capability of high-throughput and highly automated cryogenic x-ray microscopy and computed tomography.

Abstract: A system that determines the quality of a digital microscope slide by analyzing digital slide images based on complexity and spatial frequencies. An example embodiment detailed in the application may provide visual feedback on the whole slide quality by overlaying the image with a color coded “heat map” of local area quality. A user provided with the overlap image may obtain both an absolute quality measurement for the whole image and quickly identity the quality variability within the slide.

Abstract: An image sensor integrated circuit may contain image sensor pixels. A channel containing a fluid with particles such as cells may be formed on top of the image sensor. Some of the image sensor pixels may form a calibration sensor and some of the image sensor pixels may form an imager. As the fluid and particles flow through the channel at a flow rate, the calibration sensor may measures the flow rate and illumination intensity in the channel. Based on calibration data such as measured flow rate and measured illumination intensity, adjustments may be made to ensure that the imager acquires satisfactory image data. The adjustments may include flow rate adjustments, image acquisition data rate adjustments, and illumination adjustments. A processing unit in the channel may contain a laser or other component to destroy selected cells. A flared region in the channel may be used as a chromatograph.

Abstract: A compound zone plate comprising a first zone plate frame including a first zone plate, a second zone plate frame including a second zone plate, and a base frame to which the first zone plate frame and the second zone plate frame are bonded. In examples, two more zone plates are added to make a four element optic. In the assembly process, the microbeads are used to ensure the parallelism, dial in the distance precisely between the zone plates by selecting the microbead size, possibly in response to the width of the frames, and ensure low friction lateral movement enabling nanometer precision alignment of the zone plates with respect to each other prior to being fixed by the adhesive. That is, when the frames are pressed together to ensure parallelism, it is still possible to align them to each other since the microbead layer facilitates the inplane movement of the alignment process.

Abstract: This invention teaches a method of performing gamma-ray microscopy and how to build a gamma-ray microscope. While the beam of gamma rays can not be manipulated like a beam of light or a beam of electrons, magnification is possible using a single-point source of gamma radiation. With this design, gamma rays originate from a tiny point in space and radiate outward as they travel away from the source. This results in magnification when a sample is placed between this single-point source and a detector array. The magnification factor is equal to the source-to-detector distance divided by the source-to-sample distance. A single-point source of gamma rays can be made by crossing a beam of positrons with a beam of electrons. The finer and more focused these beams are, the smaller the single-point source can be, and the higher the resolution can be. Methods of making and focusing electron beams are known in the art of making electron microscopy.

Abstract: The present disclosure presents, in various aspects and embodiments, a 3D X-ray reflection microscopy imaging technique. Some aspects are directed to various embodiments of an apparatus for use in such a technique, such as an X-ray reflection microscopy imaging system. Other aspects are directed to various embodiments of a method for use in such a technique, like a method for generating an X-ray image that has a grayscale response proportional to range. Some, though not all, aspects of the technique are computer-implemented, and so include encoded program storage media, programmed computing apparatuses, and computer-implemented methods.

Abstract: The present disclosure presents, in various aspects and embodiments, a 3D X-ray microscopy imaging technique. Some aspects are directed to various embodiments of an apparatus for use in such a technique, such as an X-ray microscopy imaging system. Other aspects are directed to various embodiments of a method for use in such a technique, like a method for generating an X-ray image that has a grayscale response proportional to range. Some, though not all, aspects of the technique are computer-implemented, and so include encoded program storage media, programmed computing apparatuses, and computer-implemented methods.

Abstract: A specimen supporting member (10) includes: a specimen supporting film (11) such as a silicon nitride film, a carbon film, and a polyimide film; an X-ray radiation film (13) provided on one principal surface of the specimen supporting film, and for radiating a characteristic X-ray in a soft X-ray region upon irradiation with charged particles; and a specimen adsorption film (12) which is a metal film provided on another principal surface of the specimen supporting film (11), and which fixes by adsorption a specimen (1) to be observed. Since a protein which is a constitutive substance of a biological specimen has a characteristic to easily adsorb to a metallic ion, a specimen adsorption film (12) is formed on one principal surface of the specimen supporting film (11) so that an observation specimen adsorbs thereto.