Abstract: A Fourier transform microscope for use in imaging a source of x-ray and/or gamma-ray radiation includes first and second grids arranged in proximity to the source. The first grid includes an arrangement of first subgrids elements with a first predetermined number n of approximately parallel, equally-spaced linear first ribs which are opaque to the radiation of interest, and first radiation-transparent regions which are arranged in alternation with the first ribs. The second grid includes an arrangement of second subgrids elements which are larger than the first subgrids elements, and which have a common field of view with corresponding first subgrid elements. Each second subgrid element has a second predetermined number n+m of approximately parallel, equally-spaced linear second ribs which are opaque to the radiation of interest, and second radiation-transparent regions which alternate with the second ribs. Each first subgrid element and its corresponding second subgrid element is termed a `subgrid system`.

Abstract: A direct conversion X-ray photo-electron cathode has specially designed secondary electron emission layers which provides high efficiency, low noise, high speed and broad band X-ray photon detection. The X-ray photocathode is integrated with a micro channel plate and an output phosphor display screen to form a panel type X-ray intensifier. The X-ray intensifier is combined with a micro-focus X-ray source to provide projection type X-ray microscope for use in X-ray microscopic diagnostic applications.

Abstract: Samples of particulate soil contaminated with solid particles having higher -ray absorption coefficients than the soil, are irradiated with a microfocused X-ray beam within an analysis zone to produce X-ray images of such samples. By controlling relative scanning and magnifying movements between the samples within the analysis zone and the X-ray beam, image features corresponding to the solid particles in the soil are rendered detectable for measurement purposes and to provide data from which size and distribution of contaminants in the soil are calculated.

Abstract: Submicron device fabrication entailing ringfield x-ray pattern delineation is facilitated by use of a condenser including a faceted collector lens. The collector lens is constituted of paired facets, symmetrically placed about an axis of a laser-pumped plasma source. Each of the members of a pair produce an image of the entire illumination field so that inhomogeneities in illumination intensity are compensated within each composite image as produced by a particular pair.

Abstract: A soft X-ray microscope comprising a soft X-ray radiation source which is substantially a spot radiation source, a condenser for leading soft X-rays from the radiation source to a sample, a reflecting mirror for grazing incidence which is disposed between the radiation source and the condenser, and has a rough reflecting surface, an objective optical system for forming a magnified image of the sample, and a soft X-ray detector for receiving the soft X-rays from the objective optical system. This microscope exhibits excellent imaging characteristic even when it uses a spot radiation source.

Abstract: A Schwarzschild optical system comprising a concave mirror having an opening formed at the center thereof and a convex mirror arranged in opposite to the opening of the concave mirror, and has a numerical aperture of at least 0.25 on the object side, the concave mirror being formed to have an aspherical surface. This Schwarzschild optical system has a relatively large numerical aperture, a relatively large departure between the centers of curvature of the concave mirror and the convex mirror, and favorably corrected aberrations.

Abstract: An apparatus and a method are provided for employing hard monochromatic x-rays to generate high resolution, dimensionally altered undistorted images of either the internal structure or surface feature details of a specimen at the submicron level in up to three-dimensions. A monochromatic hard x-ray beam is applied to the specimen and thereafter is directed to arrive at a small angle of incidence at a preferably flat, optically polished surface of a nearly perfect crystal, to be diffracted at the surface thereof to carry a first one-dimensional alteration of the image of the observed structure of the specimen. This x-ray beam is then directed, at a small angle of incidence, to the surface of a second nearly perfect crystal, the receiving surface being oriented orthogonal to the surface of the first nearly perfect crystal, to generate a further diffracted beam containing an undistorted two-dimensionally altered inverted image of the specimen with micrometer spatial resolution.

Abstract: A computerized three-dimensional x-ray tomographic microscopy system is disclosed, comprising:a) source means for providing a source of parallel x-ray beams,b) staging means for staging and sequentially rotating a sample to be positioned in the path of thec) x-ray image magnifier means positioned in the path of the beams downstream from the sample,d) detecting means for detecting the beams after being passed through and magnified by the image magnifier means, ande) computing means for analyzing values received from the detecting means, and converting the values into three-dimensional representations. Also disclosed is a process for magnifying an x-ray image, and apparatus therefor.

Abstract: For obtaining a high reflectivity, even when the thickness of periodic structure is reduced, in a multi-layered mirror consisting of alternate layers of a first substance showing a larger difference vacuum in the refractive index in the soft X-ray region and a second substance showing a smaller difference, a nickel-chromium alloy containing chromium in at least 5 wt. % is used as the first substance of larger difference. In a preferred form of the mirror, the second substance of smaller difference in refractive index is vanadium oxide.

Abstract: A method and apparatus for imaging of an atomic environment are disclosed. The method includes detecting and measuring the intensity of a diffuse low energy electron diffraction pattern. The diffraction pattern may be formed by directing a beam of electrons against the surface of a sample, or by directing a beam of X-rays against the surface of a sample. The diffraction pattern may be energy-filtered to obtain a diffraction pattern corresponding to the lower energy electrons emitted by the surface. Data corresponding to reconstructed amplitudes of a waveform is generated by operating on the intensity data. The data corresponding to the reconstructed amplitude is capable of being displayed as a variety of slices or two-dimensional planes of the three-dimensional image of an atomic environment, and is capable of being displayed holographically.

Abstract: The invention is directed to an X-ray microscope having a pulsed X-ray radiation source which supplies an intensive line radiation such as a plasma focus source. The microscope includes a reflecting condenser which focusses the radiation of the radiation source on the specimen to be investigated and an X-ray optic configured as a zone plate. With the zone plate, the specimen is imaged on an X-ray detector with a high resolution. The above combination of elements makes it possible to free an adequately high amount of X-ray energy at the location of the specimen while providing a high resolution free of image errors so that the required short exposure times are provided for the investigation of living cells.

Abstract: An X-ray microscope has an X-ray filter for transmitting a wavelength between 43.7 and 65 .ANG. and a light source for emitting ultraviolet light of a wavelength of at least 100 nm in an optical path so that a specimen is irradiated with X rays and an image of an object is formed by an X-ray detector, in which the ultraviolet light is reflected from the X-ray filter to irradiate the specimen. Thus, the X-ray microscope allows biological observation to be made with a transmitted microscopic image of high quality and has advantages in design and choice of materials in fabricating its system.

Abstract: A method and device for imaging an object illuminated by an X-ray beam, through a zone plate, is disclosed. A concave mirror with a multilayered film is disposed on a path of the X-ray beam to reflect the same and collect the same onto the object.

Abstract: An image formation-type soft X-ray microscopic apparatus comprises:a pulse X-ray source for applying X-rays;a single concave aspherical multilayer film condenser for reflecting the X-rays emitted from the pulse X-ray source so as to condense the X-rays on a sample;a two-dimensional X-ray imaging element;a phase zone plate objective optical system for forming a image of the sample on the two-dimensional imaging element by using the X-rays;an image processing circuit connected to the two-dimensional X-ray imaging element; andan output circuit connected to the image processing circuit for the purpose of outputting an image of the sample.

Abstract: A reflection soft X-ray microscope is provided by generating soft X-ray beams, condensing the X-ray beams to strike a surface of an object at a predetermined angle, and focusing the X-ray beams reflected from the surface onto a detector, for recording an image of the surface or near surface features of the object under observation.

Abstract: An X-ray multilayer film reflecting mirror comprises a plurality of substance layers formed on a substrate to be applied to X-rays having a wavelength of 100 .ANG. or less so that a deviation .DELTA. of the film thickness of each layer from a standard value is within a range defined by ##EQU1## where .theta. is the grazing angle of an X-ray being incident and .lambda. is the wavelength of the X-ray. Thus, the multilayer film reflecting mirror having the reflectance which is advantageous in practical use can be stably provided, and a product yield is improved.

Abstract: An X-ray exposure apparatus includes a stage for holding a mask having a pattern for circuit manufacturing, a stage for holding a wafer to be exposed to the pattern of the mask with X-rays, and a reflection reduction imaging system, disposed between the mask stage and the wafer stage, including a reflecting mirror arrangement, containing at least three, but not more than five, reflecting mirrors coated with multi-layer films for receiving X-rays from the mask and directing them to the wafer to expose the wafer to the pattern of the mask with the X-ray in a reduced scale.

Abstract: A multispectral variable magnification glancing incidence x-ray telescope capable of broadband, high resolution imaging of solar and stellar x-ray and extreme ultraviolet radiation sources includes a primary optical system which focuses the incoming radiation to a primary focus. Two or more rotatable mirror carriers each providing a different magnification are positioned behind the primary focus at an inclination to the optical axis, each carrier carrying a series of ellipsoidal mirrors each having a concave surface coated with a multilayer (layered synthetic microstructure) coating to reflect a different desired wavelength. The mirrors of both carriers are segments of ellipsoids having a common first focus coincident with the primary focus. A detector such as an x-ray sensitive photographic film is positioned at the second respective focus of each mirror so that each mirror may reflect the image at the first focus to the detector at the second focus.

Abstract: An X-ray microscope is provided with an X-ray source, a converging optical system collecting radiation emitted from the X-ray source, a stage on which an object is placed, and a detector having sensitivity with respect to radiation of wavelengths ranging from an X-ray region to a vacuum ultraviolet ray region, in which a filter eliminating long wavelength components from the radiation emitted from the X-ray source is disposed in an optical path from the X-ray source to the detector. Whereby, the X-ray microscope has important advantages in practical use that radiation of a desired wavelength region can be sensitively detected from the X-ray source, without bringing about large size and high cost of the optical instrument even where the X-ray source is used as a radiation source for white light.

Abstract: An imaging X-ray microscope having an X-ray radiation source, a condenser for condensing X-rays radiated from the X-ray source on an object, an objective for forming an image of the object by the X-rays transmitted through or diffracted by the object, and an X-ray detector for receiving the image formed by the objective, the objective comprising a Schwarzschild optical system in which a concave mirror with an opening in the center thereof and a convex mirror are coaxially arranged in such a manner that the convex mirror opposes to the opening of the concave mirror, the object-side numerical aperture is at least 0.24, and the following condition is satisfied:(N.A.-0.6)/12.ltoreq.(W.sub.2 -W.sub.1)/f.ltoreq.-0.005where N.A. is the object-side numerical aperture of the Schwarzschild optical system, W.sub.1 is the distance from the object to the center of curvature of the concave mirror, W.sub.

Abstract: An X-ray optical apparatus comprises an X-ray optical system which is capable of projecting an enlarged sample image by soft X-rays and a visible optical system to observe the sample with a visible radiation. To enable simultaneous observation using both optical systems, the systems utilize a common objective zone plate. The objective zone plate includes a base plate having an opening at the center thereof to pass the soft X-rays which have passed through the sample and also having a visible radiation passing section to the outside of the opening. A zone plate is supported centrally on the base plate for converging soft X-rays which have passed through the sample and forming the sample image at a predetermined position. An eyepiece is provided in a position displaced from the X-ray optical axis to enable visual observation of the sample with the light passed through the visible radiation transmitting section of the objective zone plate.

Abstract: A high resolution x-ray microscope for imaging microscopic structures within biological specimens has an optical system including a highly polished primary and secondary mirror coated with identical multilayer coatings, the mirrors acting at normal incidence. The coatings have a high reflectivity in the narrow wave bandpass between 23.3 and 43.7 angstroms and have low reflectivity outside of this range. The primary mirror has a spherical concave surface and the secondary mirror has a spherical convex surface. The radii of the mirrors are concentric about a common center of curvature on the optical axis of the microscope extending from the object focal plane to the image focal plane. The primary mirror has an annular configuration with a central aperture and the secondary mirror is positioned between the primary mirror and the center of curvature for reflecting radiation through the apertture to a detector.

Abstract: A scanning spectral-analysis micro-probe subsystem, for a surface imaging system, utilizes a micro-probe to detect the precise position of a point on a sample object surface having surface dimensions changing responsive to surface absorption of incident radiation from a modulated radiation source. The modulated incident radiation causes the sample region dimensions, in the vicinity of the micro-probe, to be modulated, so that the micro-probe detects this dimensional modulation, with a detected modulation strength directly proportional to the incident radiation absorption.

Abstract: A photoelectron microscope wherein a normal conductive coil is used to produce a divergent magnetic field to form an enlarged photoelectron image of a specimen to be examined. The coil is only momentarily energized by pulse current, and in synchronism with the energization of the coil and while the change of the resultant magnetic field with time is small, the radiation source is actuated to produce a radiation pulse so that the photoelectrons produced upon irradiation of a specimen with the pulse flies through the magnetic field so as to be received by an image forming device. The image forming device is operated in synchronism with and a predetermined variable period of time after the actuation of the radiation source thereby to obtain photoelectron images of the specimen of different energy levels. By skimming only those photoelectrons of low energy which are emitted close to the axis of the magnetic field, it is possible to obtain images of high resolution.

Abstract: A method of investigating materials, especially biological specimens, utilizes a focused accelerated beam of electrons within an evacuated chamber, striking a metal foil within the chamber and exposing a specimen outside the evacuated chamber to x-rays generated in the metal foil. The apparatus of the invention functions as an x-ray microscope and in a preferred embodiment, as a scanning x-ray microscope.

Abstract: Method and apparatus for producing sharp, chromatic, magnified images of X-ray emitting objects, are provided. The apparatus, which constitutes an X-ray microscope or telescope, comprises a connected collection of Bragg reflecting planes, comprised of either a bent crystal or a synthetic multilayer structure, disposed on and adjacent to a locus determined by a spherical surface. The individual Bragg planes are spatially oriented to Bragg reflect radiation from the object location toward the image location. This is accomplished by making the Bragg planes spatially coincident with the surfaces of either a nested series of prolate ellipsoids of revolution, or a nested series of spheres. The spacing between the Bragg reflecting planes can be tailored to control the wavelengths and the amount of the X-radiation that is Bragg reflected to form the X-ray image.

Abstract: An optical system for X rays having a multilayer reflecting mirror which has high reflectances for X rays of different wavelengths. One type of multilayer reflecting mirror is such that the mirror surface of the multilayer reflecting mirror is divided into a plurality of regions, and the regions are provided with multilayers which are such that the reflectance of each multilayer is maximum for X rays of a corresponding wavelength. Another type of multilayer reflecting mirror has a substrate and a plurality of multilayer laid on the substrate, wherein the wavelength of X rays to be reflected with a maximum reflectance varies from multilayer to multilayer. The optical system for X rays according to the present invention is a focusing optical system having a plurality of such multilayer reflecting mirrors and can obtain object images by using X rays of a plurality of wavelengths.

Abstract: The invention provides a method and apparatus for focusing and imaging x-rays. An opaque sphere is used as a diffractive imaging element to diffract x-rays from an object so that the divergent x-ray wavefronts are transformed into convergent wavefronts and are brought to focus to form an image of the object with a large depth of field.

Abstract: A variable magnification variable dispersion glancing incidence x-ray spectroscopic telescope capable of multiple high spatial revolution imaging at precise spectral lines of solar and stellar x-ray and extreme ultraviolet radiation sources includes a pirmary optical system which focuses the incoming radiation to a primary focus. Two or more rotatable carries each providing a different magnification are positioned behind the primary focus at an inclination to the optical axis, each carrier carrying a series of ellipsoidal diffraction grating mirrors each having a concave surface on which the gratings are ruled and coated with a mutlilayer coating to reflect by diffraction a different desired wavelength. The diffraction grating mirrors of both carriers are segments of ellipsoids having a common first focus coincident with the primary focus.

Abstract: A microscope consisting of an x-ray contact microscope and an optical microscope. The optical, phase contrast, microscope is used to align a target with respect to a source of soft x-rays. The source of soft x-rays preferably comprises an x-ray laser but could comprise a synchrotron or other pulse source of x-rays. Transparent resist material is used to support the target. The optical microscope is located on the opposite side of the transparent resist material from the target and is employed to align the target with respect to the anticipated soft x-ray laser beam. After alignment with the use of the optical microscope, the target is exposed to the soft x-ray laser beam. The x-ray sensitive transparent resist material whose chemical bonds are altered by the x-ray beam passing through the target materGOVERNMENT LICENSE RIGHTSThis invention was made with government support under Contract No. De-FG02-86ER13609 awarded by the Department of Energy. The Government has certain rights in this invention.

Abstract: An apparatus and method for finishing an X-ray mirror, having a substantially cylindrical mirror body and a reflecting mirror surface on the inner surface of the mirror body, includes a support post supporting the mirror body, and a male member which is inserted into an unfinished mirror body. The male member includes a chamber therein, an outer circumferential surface shaped in correspondence with the reflecting mirror surface, and a number of fine holes open to the outer circumferential surface. The male member is supported by a support section so that the outer circumferential surface faces the reflecting mirror surface with a required gap. An abrasive solution containing free abrasive grains is ejected toward the reflecting mirror surface from the outer circumferential surface of the male member through the fine holes, thereby polishing the reflecting mirror surface.

Abstract: For producing phase-contrast images with a microscope which scans the object point-by-point with a beam of illuminating radiation, the illuminating radiation is focused by an objective (31, 32) including a phase-shifting element (33) of preselective geometry. A radiation-sensitive detector (36) is positioned directly behind the object plane (34), seen in the direction of the light; and the shape of the radiation-sensitive area of the detector is adapted to encompass the path of the radiation passing through the geometry of the phase-shifting element (33) of the objective (31, 32), e.g., where the phase-shifting elements (33) comprise an annular aperture, an appropriately conforming annular diaphragm (35) is arranged in front of the detector (36). The advantage of this arrangement is that it does not use any radiation-collecting lens system between the object plane (34) and the detector (36).

Abstract: A multispectral glancing incidence X-ray telescope is illustrated capable of broadband, high-resolution imaging of solar and stellar X-ray and extreme ultraviolet radiation sources which includes a primary optical system preferably of the Wolter I type having a primary mirror system (20, 22). The primary optical system further includes an optical axis (24) having a primary focus (F1) at which the incoming radiation is focused by the primary mirrors. A plurality of ellipsoidal mirrors (30a, 30b, 30cand 30d) are carried at an inclination to the optical axis behind the primary focus (F1). A rotating carrier (32) is provided on which the ellipsoidal mirrors are carried so that a desired one of the ellipsoidal mirrors may be selectively positioned in front of the incoming radiation beam (26). In the preferred embodiment, each of the ellipsoidal mirrors has an identical concave surface carrying a layered synthetic microstructure coating tailored to reflect a desired wavelength of 1.5 .ANG. or longer.

Abstract: The X-ray image microscope according to this invention comprises an X-ray absorption imaging unit having a glazing incidence mirror, and an electron imaging unit having an electron lens connected to the X-ray absorption imaging unit. A thin support film is provided on the boundary between the X-ray absorption imaging unit and the electron imaging unit. On the support film is formed a photocathode screen which emits photoelectrons in response to an incident X-ray. The X-ray absorption image of an X-ray which has penetrated a specimen, e.g. a living cell, is magnified by the X-ray imaging unit, and the electron image corresponding to the X-ray image is magnified by an electron lens. The magnified electron image is converted into a light image by a phosphor screen, and the light image is caught by a TV camera. In this way biological materials can be observed, magnified in their living states.

Abstract: An x-ray microscope in which the object is illuminated coherently or partially coherently via a condenser with quasi-monochromatic x-radiation and is imaged enlarged in the image plane by a high resolution x-ray objective. To obtain the highest possible image contrast, there is arranged in the Fourier plane of the x-ray objective an element which imparts a phase shift to a preselected order of diffraction of the radiation. The element extends over the surface region in the Fourier plane which is acted on here by the diffracted radiation to be influenced. The utilization of the phase shift of a preselected order of diffraction of the radiation as compared with the uninfluenced radiation makes it possible to carry out examinations, in particular of biological structures, with a low dose of radiation and nevertheless to produce a high image contrast.

Abstract: X-ray dispersive and reflective structures and materials are provided which exhibit improved resolution and reflectivity in specific ranges of interest without substantial fluorescence or absorption edges. The structures are formed of metallic and non-metallic layer pairs and can include a buffer layer between each layer to prevent interdiffusion to stabilize the structures. The materials can be thermally activated to control the desired properties, during or post deposition. The structures can be deposited by ion beam absorption techniques to form the structures in a precise manner. The index of the refraction of the structures can be continuously varying throughout the structures.

Abstract: A virtually punctiform plasma source of high-intensity radiation in the X-ray region is produced at the open downstream end of a gas-filled discharge space defined by and between concentric cylindrical inner and outer electrodes. At the closed upstream end, the electrodes which define this discharge space are directly connected to a low-inductance high-power switch which serves for momentarily connecting the electrodes to a source of stored electric energy. At the closed end of the discharge space, the inner electrode is concentrically surrounded by an insulator which has a high coefficient of secondary-electron emission. In closely opposed adjacency to the insulator region of the inner electrode is an annular emission electrode which is at the potential of the outer electrode, the emission electrode being positioned at close radial offset from the insulator, and the offset being less than the mean free path in the gas of the discharge space.

Abstract: A telescope (A) for viewing high frequency radiation. This telescope has a long focal length with a selection of magnifications despite a short housing (20). Light enters the telescope and is reflected by the telescope's primary optical system (10) and (12) to one of several secondary mirrors (14) at different locations on a movable frame (40). The secondary mirrors (14) have varying degrees of magnification and select narrow spectral slices of the incident radiation. Thus, both the magnification and effective focal length field of view and wavelength can be altered by repositioning moving frame (40).

Abstract: An X-ray source for producing high intensity X-rays. The X-ray source includes a vessel filled with an inert gas. An energizing mechanism such as a magnetic coil causes the gas to enter a pinch, plasma state which produces high intensity X-rays. The vessel includes a window through which the X-rays are radiated. In a second embodiment, a laser or electron beam bombards a crystal of selected material to produce the X-rays. The material, when gasified, does not interfere with radiation of the X-rays.

Abstract: A curved glass X-Ray reflector having a curve depth d' including a glass plate having a stiffness S.sub.1 ; a backing plate having a stiffness S.sub.2 and a curved surface with curve depth d; and bonding means for joining the glass plate to the curved surface, the resulting curved glass reflector having curve depth d', where d' is equal to d/R and R is the ratio of (S.sub.1+ S.sub.2)/S.sub.2 ; and a method of making such a reflector.

Abstract: An X-ray telescope system comprises a tubular mount having a collecting region at one axial end for receiving X-rays from a remote source, and a detector region remote from the one axial end. A soft X-ray/XUV subsystem associated with the collecting region directs only relatively soft, near on-axis X-rays/XUV radiation incident on a first portion of the collecting region into a first detector sensitive to relatively soft X-rays/XUV radiation. A hard X-ray subsystem associated with the collecting region directs only relatively hard near on-axis X-rays incident on a second portion of the collecting region into a second detector sensitive to relatively hard X-rays.