Abstract: A system for X-ray analysis, includes: (a) an X-ray analysis assembly configured to (i) direct an X-ray beam to impinge on a surface of a sample, and (ii) receive fluorescence radiation excited from the sample in response to the impinged X-ray beam, (b) a target assembly including measurement targets: placed in an optical path between the X-ray analysis assembly and the sample, and configured to move between (i) one or more first positions in which one or more of the measurement targets are positioned in the X-ray beam, and (ii) one or more second positions in which the optical path is unobstructed by the target assembly, and (c) a processor, configured to control movement of the target assembly between the first and second positions, for alternately, (i) monitoring properties of the X-ray beam using the measurement targets, and (ii) performing the X-ray analysis at a measurement site of the sample.

Abstract: A method for measuring a thickness of a deposit layer on a metal or alloy substrate using an X-ray fluorescence (XRF) spectrometer, where the deposit layer includes scale deposits or corrosion products. As part of the method, an elemental composition of the deposit layer or the metal or alloy substrate is measured using the XRF spectrometer. The thickness of the deposit layer is obtained from the elemental composition using a calibration relationship between deposit layer thicknesses and corresponding elemental compositions of the deposit layer or the metal/alloy substrate. The method can be applied to determine the rate of deposit layer formation and evaluate the effectiveness of a treatment.

Abstract: A system to characterize a film layer within a measurement box is disclosed. The system obtains a first mixing fraction corresponding to a first X-ray beam, the mixing fraction represents a fraction of the first X-ray beam inside a measurement box of a wafer sample, the measurement box represents a bore structure disposed over a substrate and having a film layer disposed inside the bore structure. The system obtains a contribution value for the measurement box corresponding to the first X-ray beam, the contribution value representing a species signal outside the measurement box that contributes to a same species signal inside the measurement box. The system obtains a first measurement detection signal corresponding to a measurement of the measurement box using the first X-ray beam. The system determines a measurement value of the film layer based on the first measurement detection signal, the contribution value, and the first mixing fraction.

Abstract: A protective film thickness measuring method includes a step of applying light to a top surface of a wafer in a state in which no protective film is formed and measuring a first reflection intensity of the light reflected from the top surface, a step of forming the protective film including a light absorbing material, a step of irradiating the protective film with exciting light of a wavelength at which the light absorbing material fluoresces and measuring a second reflection intensity including fluorescence of the protective film and the light reflected from the top surface, and a step of excluding reflection intensity of patterns formed on the top surface, by subtracting the measured first reflection intensity from the measured second reflection intensity, and calculating fluorescence intensity of the protective film.

Abstract: To enable the particle size distribution of a measurement target to be accurately measured regardless of the presence of a particle which is similar in shape to the measurement target and which is not the measurement target, a particle size distribution measuring device includes an image processing unit that receives image data obtained by capturing an image of a particle group including a first particle and a second particle of a type different from the first particle, at least the first particle being translucent; and a particle discriminating unit that discriminates whether a particle depicted in the image is the first particle or the second particle on the basis of light and dark regions that appear as a result of refraction of light passing through the particle.

Abstract: Described are system and method embodiments for measuring a thickness of a material layer using electromagnetic radiation. In some embodiments, a system includes a radiation source configured to direct first radiation towards a first surface of a layer of material having a thickness between the first surface and a second surface opposite the first surface. The first radiation causes the material layer to emit secondary radiation. A filter is positioned between the material layer and a radiation detector and in the beam path of the second radiation in order to attenuate a portion of the second radiation associated with fluorescence of the material to emit third radiation. Then, the radiation detector is configured to detect the third radiation and a controller is configured to provide a measurement corresponding to the thickness of the material layer based on the detected third radiation.

Abstract: Disclosed are Computer Aided Diagnosis (CAD) apparatus and method to combine information on sequential image frames and to provide a superior classification result for the ROI in the image frame. The CAD apparatus may include a Region of Interest (ROI) detector configured to detect an ROI from image frames, a categorizer configured to create groups of image frames having successive ROI sections from among the image frames based on a result of the detection, a classifier configured to classify an ROI detected from each of the image frames belonging to the groups, and a result combiner configured to combine classification results for the image frames belonging to each group from the groups and to calculate a group result for the each group.

Abstract: Disclosed are Computer Aided Diagnosis (CAD) apparatus and method to combine information on sequential image frames and to provide a superior classification result for the ROI in the image frame. The CAD apparatus may include a Region of Interest (ROI) detector configured to detect an ROI from image frames, a categorizer configured to create groups of image frames having successive ROI sections from among the image frames based on a result of the detection, a classifier configured to classify an ROI detected from each of the image frames belonging to the groups, and a result combiner configured to combine classification results for the image frames belonging to each group from the groups and to calculate a group result for the each group.

Abstract: Disclosed are Computer Aided Diagnosis (CAD) apparatus and method to combine information on sequential image frames and to provide a superior classification result for the ROI in the image frame. The CAD apparatus may include a Region of Interest (ROI) detector configured to detect an ROI from image frames, a categorizer configured to create groups of image frames having successive ROI sections from among the image frames based on a result of the detection, a classifier configured to classify an ROI detected from each of the image frames belonging to the groups, and a result combiner configured to combine classification results for the image frames belonging to each group from the groups and to calculate a group result for the each group.

Abstract: A method for X-ray measurement includes, in a calibration phase, scanning a first X-ray beam, having a first beam profile, across a feature of interest on a calibration sample and measuring first X-ray fluorescence (XRF) emitted from the feature and from background areas of the calibration sample surrounding the feature. Responsively to the first XRF and the first beam profile, a relative emission factor is computed. In a test phase, a second X-ray beam, having a second beam profile, different from the first beam profile, is directed to impinge on the feature of interest on a test sample and second XRF emitted from the test sample is measured in response to the second X-ray beam. A property of the feature of interest on the test sample is computed by applying the relative emission factor together with the second beam profile to the measured second XRF.

Abstract: System and method for determining the composition of deposited thin films by acquiring multiple sequential X-ray spectra for a film of interest during the deposition process as the film thickness increases, computing intensities of peaks found in the X-ray spectra corresponding to elements present in the film material, followed by computing, for each pair of elements, ratios of corresponding peak intensities, graphing the intensities and ratios against a parameter correlated to the film thickness, and applying a physically meaningful function to the graphed data for best fitting the data down to a ratio RA/B(0) for each pair of the elements for a virtual film of zero thickness. Elemental concentrations ratio for each pair of elements is subsequently computed as a product of RA/B(0) and a factor which is specific for the pair of elements, constant for the instrument as set up, and independent of elements concentrations, and of film thickness.

Abstract: A method for X-ray Fluorescence (XRF) analysis includes directing an X-ray beam onto a sample and measuring an XRF signal excited from the sample, in a reference measurement in which the sample includes one or more first layers formed on a substrate, and in a target measurement after one or more second layers are formed on the substrate in addition to the first layers, so as to produce a reference XRF spectrum and a target XRF spectrum, respectively. A contribution of the first layers to the target XRF spectrum is reduced using the reference XRF spectrum. A parameter of at least one of the second layers is estimated using the target XRF spectrum in which the contribution of the first layers has been reduced.

Abstract: A method for detecting particles in a fluid stream includes generating a measurement field that can be passed through by the fluid stream, acquiring and evaluating measurement values of the fluid stream passing through the measurement field, and detecting at least one particle by way of a distinctive sequence of measurement values. Each of the distinctive successions of measurement values is acquired and evaluated to determine if a particle or a gas bubble is passing through the measurement field.

Abstract: Disclosed herein is a method for forming a test key system for characterizing wafer processing states, the method comprising forming a plurality of shallow trench isolation structures (STIs) on a substrate of a wafer and in a scribe line of the wafer and forming a test key on the substrate of a wafer and in the scribe line of the wafer. Forming the test key comprises forming at least one test key group having a plurality of test key series, each of the plurality of test key series having a plurality of test pads, each one of the plurality of test key series having a first physical characteristic different from the first physical characteristic of other test key series the at least one first test key group.

Abstract: A Compton radiation detection device for determining of Compton radiation of iron, includes a sensor and a filter arrangement. The filter arrangement is adapted such that the radiation emitted by a test object due to Compton scattering passes a nickel layer and an iron layer before being detected by the sensor. A dispersive ionization chamber includes an ionization chamber having a plurality off ionization volumes and a window. Each ionization volume includes an electrode. Radiation can enter through the window. The ionization volumes are arranged in a beam propagation direction behind each other. Radiation having lower energy is statistically absorbed in ionization volumes located more proximal to the window. Radiation having higher energy is statistically absorbed in the ionization volumes located more distal from the window.

Abstract: Provided is a method for determining the presence of an alumina layer on a surface of a component. The method includes illuminating a surface of a component with radiation; detecting radiation emitted at a particular wavelength; analyzing the detected radiation; to determine the thickness of the alumina at at least one point on the surface of the component; and comparing the determined thickness of the alumina at the at least one point on the surface of the component with a predetermined thickness of alumina at that point to decide if the thickness of alumina at the at least one point on the surface of the component is satisfactory.

Abstract: Techniques disclosed herein include systems and methods for identifying counterfeit gold jewelry and other counterfeit gold items. Techniques include determining—using a non-destructive mechanism—whether an item of interest (such as an article represented as true gold) is solid gold or a gold-plated object. Techniques include using an X-ray fluorescence (XRF) analyzer to differentiate true gold from gold plating. The XRF analyzer can distinguish between gold plating and bulk gold material by comparing a ratio of L-alpha and L-beta x-ray lines of gold. The analyzer measures a ratio of intensities of characteristic L-lines of gold using X-ray fluorescence (XRF) spectroscopy. When implemented using an XRF analyzer, the system nondestructively determines whether a test object is made of solid gold/gold alloy or has gold plating only.

Abstract: We provide an apparatus and method for analysing a security document. An x-ray source is adapted to illuminate at least one inspection region of the security document when located at an inspection position. An x-ray detector adapted to receive x-rays from the at least one inspection region of the document and to generate a corresponding detector response. A processor analyses the detector response and generates an output signal indicative of the structure of the document in the at least one inspection region.

Abstract: To provide a method and device for testing the size and conductivity of a foreign material adhered to a substrate for a liquid crystal display device, there is provided a method of testing whether a foreign material including a metal element is adhered to a substrate for a liquid crystal display device, the method including a first test step of detecting the size and position of the foreign material adhered to the substrate and a next step of testing whether the foreign material includes the metal element at the position detected in the first test step.

Abstract: A method of determining the feasibility of a proposed structure analysis process is disclosed. The process involved the electron beam excitation of x-rays from a multi-layered structure. The method comprises generating predicted x-ray data represents the x-ray excitation response of the multi-layered structure according to one or more sets of process conditions. The x-ray data are generated using structure data defining the structure and composition of the layers. The effects upon the x-ray data of changes to the structure data are then analyzed in accordance with one or more predetermined feasibility criteria, so as to determine the feasibility of performing the proposed structure analysis process upon the multi-layered structure.

Abstract: A Compton radiation detection device for determining of Compton radiation of iron, includes a sensor and a filter arrangement. The filter arrangement is adapted such that the radiation emitted by a test object due to Compton scattering passes a nickel layer and an iron layer before being detected by the sensor. A dispersive ionization chamber includes an ionization chamber having a plurality off ionization volumes and a window. Each ionization volume includes an electrode. Radiation can enter through the window. The ionization volumes are arranged in a beam propagation direction behind each other. Radiation having lower energy is statistically absorbed in ionization volumes located more proximal to the window. Radiation having higher energy is statistically absorbed in the ionization volumes located more distal from the window.

Abstract: A method of processing a mammogram image to derive a value for a parameter useful in detecting differences in breast tissue in subsequent images of the same breast or relative to a control group of such images, said derived parameter being an aggregate probability score reflecting the probability of the image being a member of a predefined class of mammogram images, comprises computing for each of a multitude of pixels within a large region of interest within the image a pixel probability score assigned by a trained statistical classifier according to the probability of said pixel belonging to an image belonging to said class, said pixel probability being calculated on the basis of a selected plurality of features of said pixels, and computing said parameter by aggregating the pixel probability scores over said region of interest. Saud features may include the 3-jet of said pixels.

Abstract: Determining an unknown step coverage of a thin film deposited on a 3D wafer includes exposing a planar wafer comprising a first film deposited thereon to X-ray radiation to create first fluorescent radiation; detecting the first fluorescent radiation; measuring a number of XRF counts on the planar wafer; creating an XRF model of the planar wafer; providing a portion of the 3D wafer comprising troughs and a second film deposited thereon; determining a multiplier factor between the portion of the 3D wafer and the planar wafer; exposing the portion of the 3D wafer to X-ray radiation to create second fluorescent radiation; detecting the second fluorescent radiation; measuring a number of XRF counts on the portion of the 3D wafer; calculating a step coverage of the portion of the 3D wafer; and determining a uniformity of the 3D wafer based on the step coverage of the portion of the 3D wafer.

Abstract: A method is provided of calculating the structure of an inhomogeneous sample in which an electron beam is used to cause excitation of x-rays from the sample under known conditions of beam energy and geometry with respect to the sample. Notably the beam current is unknown. Measured x-ray intensity data for the sample corresponding to one or more sets of beam conditions and beam currents are firstly obtained, together with comparative x-ray intensity data for samples having known structures. A beam current factor for each beam condition is estimated and effective x-ray intensity data for each of the sets of conditions are then calculated using the measured and comparative x-ray intensity data and the beam current factor. The structure of the sample is then calculated for each of the sets of conditions using the effective x-ray intensity data. Predicting x-ray intensity data are produced corresponding to the calculated structure and compared with the effective x-ray intensity data.

Abstract: In an energy dispersive spectrometer wherein event (particle/photon) detection is performed by counting events spaced by greater than a shaping time, events which are spaced by less than the shaping time are also collected and counted. These “combined events” are treated similarly to “single events” which are spaced by greater than the shaping time, and can be used to generate combined-event spectra for comparison and/or use with the conventional single-event spectra. The combined-event spectra can be compared to the single-event spectra to provide an indication of data quality; can be subtracted from the single-event spectra to remove artifacts, and/or can be deconvolved into a single-event spectrum to increase the resolution of the single-event spectrum.

Abstract: A method for nondestructively obtaining measurement information of a region within one or more ultra-hard polycrystalline constructions comprises conducting a first measurement using x-ray fluorescence by directing x-rays onto a surface of the diamond body, receiving x-ray fluorescence from the diamond body, and deriving measurement information regarding the region therefrom. A second method can be used on the same or other ultra-hard polycrystalline constructions to obtain measurement information regarding the region in a manner that is relatively more time efficient than the first method to facilitate use of the measurement method on a large number of constructions. The second measurement can be selected from the group including beta backscatter, x-ray radioscopy, eddy current, magnetic induction, and microresistance. In an example embodiment, the method is used to determine the thickness of a region within the diamond body that comprises less catalyst material than another region within the body.

Abstract: An object of the present invention is to provide a method and an apparatus which solve problems such as a measurement error due to air bubbles in a scattering method and a light-shielding method, count loss due to different elements and impossible measurement due to emulsification, and can easily and accurately measure the number, the particle size and the like of fine particles in a fluid at a low cost.

Abstract: To provide a method and device for testing the size and conductivity of a foreign material adhered to a substrate for a liquid crystal display device, there is provided a method of testing whether a foreign material including a metal element is adhered to a substrate for a liquid crystal display device, the method including a first test step of detecting the size and position of the foreign material adhered to the substrate and a next step of testing whether the foreign material includes the metal element at the position detected in the first test step.

Abstract: A hand-held, self-contained x-ray fluorescence (XRF) analyzer produces a small x-ray spot on a sample to interrogate the elemental composition of a sample region of millimeter-size characteristic dimension. The analyzer includes a collimator for aiming an x-ray beam toward a desired location on the sample and for determining the size of the spot produced on the sample. The analyzer may include a digital camera oriented toward the portion of the sample that is, or would be, interrogated by the x-ray spot to facilitate aiming the analyzer. The analyzer may generate a reticule in a displayed image to indicate the portion of the sample that is, or would be, illuminated by the x-ray beam. The analyzer may automatically annotate the image of the sample with text or graphics that contain information about the analyzed sample. The image may be stored in the hand -held analyzer or provided for external storage or display.

Abstract: The invention is a method for estimating a skeletal maturity value of a human from a radiograph of one or more bones in the hand. The borders of the bones are represented by shape points, which are subjected to principal component analysis (PCA). Image intensities are sampled at points located relative to the shape point, and also compressed with PCA. From the features a skeletal maturity value is determined.

Abstract: A method for inspection of a sample includes directing an excitation beam to impinge on an area of a planar sample that includes a feature having sidewalls perpendicular to a plane of the sample, the sidewalls having a thin film thereon. An intensity of X-ray fluorescence (XRF) emitted from the sample responsively to the excitation beam is measured, and a thickness of the thin film on the sidewalls is assessed based on the intensity. In another method, the width of recesses in a surface layer of a sample and the thickness of a material deposited in the recesses after polishing are assessed using XRF.

Abstract: An apparatus is disclosed for predicting bone fracture risk in an osteoporotic patient. The apparatus comprises a Dual X-ray Absorptiometry scanner for scanning a body area of the patient and producing a Dual X-ray Absorptiometry image of the body area, and image analysis means for analyzing pre-determined aspects of the Dual X-ray Absorptiometry image. The apparatus further comprises data comparison means comprising a database of comparative data sets from Dual X-ray Absorptiometry images of control subjects to predict the risk of bone fracture in the patient. The image analysis means preferably analyses the shape of a body past using an Achieve Shape Model or analyses the texture of a body past using Fourier Transforms and Principal Component Analysis.

Abstract: A method for inspection includes irradiating a sample using an X-ray beam, which is focused so as to define a spot on a surface of the sample. At least one of the sample and the X-ray beam is shifted so as to scan the spot along a scan path that crosses a feature on the surface. Respective intensities of X-ray fluorescence emitted from the sample responsively to the X-ray beam are measured at a plurality of locations along the scan path, at which the spot has different, respective degrees of overlap with the feature. The intensities measured at the plurality of the locations are processed in order to compute an adjusted value of the emitted X-ray fluorescence over the scan path. A thickness of the feature is estimated based on the adjusted value.

Abstract: The press formability of a galvanized steel sheet including an oxide film, which has a thickness of 10 nm to 100 nm, as a surface layer is nondestructively speedily evaluated.

Abstract: A method for nondestructively obtaining measurement information of a region within one or more ultra-hard polycrystalline constructions comprises conducing a first measurement using x-ray fluorescence by directing x-rays onto a surface of the diamond body, receiving x-ray fluorescence from the diamond body, and deriving measurement information regarding the region therefrom. A second method can be used on the same or other ultra-hard polycrystalline constructions to obtain measurement information regarding the region in a manner that is relatively more time efficient than the first method to facilitate use of the measurement method on a large number of constructions. The second measurement can be selected from the group including beta backscatter, x-ray radioscopy, eddy current, magnetic induction, and microresistance. In an example embodiment, the method is used to determine the thickness of a region within the diamond body that comprises less catalyst material than another region within the body.

Abstract: An instrument and method for measuring the elemental composition of a test material. The instrument has a source of penetrating radiation for irradiating an irradiated region of the test material, a detector for detecting fluorescence emission by the test material and for generating a detector signal, and a controller for converting the detector signal into a spectrum characterizing the composition of the test material. A platen of attenuating material extends outward from adjacent to, and surrounding, the irradiated surface of the test material. In certain embodiments, the thickness of the attenuating platen is tapered such as to decrease with increasing radial distance from the central irradiated region of the test material.

Abstract: One aspect relates to inducing at least one induced X-ray fluorescing photon at a X-ray fluorescence event within an at least some matter of an at least a portion of an at least one individual responsive to an at least some input energy being applied to the at least some matter of the at least the portion of the at least one individual. The aspect can relate to detecting the at least one induced X-ray fluorescing photon, wherein the inducing at least one induced X-ray fluorescing photon and the detecting the at least one induced X-ray fluorescing photon is configured to be performed at least partially with at least one device which is configured to be transported portably by a person.

Abstract: A method for inspection of a sample includes directing an excitation beam to impinge on an area of a planar sample that includes a feature having sidewalls perpendicular to a plane of the sample, the sidewalls having a thin film thereon. An intensity of X-ray fluorescence (XRF) emitted from the sample responsively to the excitation beam is measured, and a thickness of the thin film on the sidewalls is assessed based on the intensity. In another method, the width of recesses in a surface layer of a sample and the thickness of a material deposited in the recesses after polishing are assessed using XRF.

Abstract: A method comprising obtaining a first set of spectral data for a first sample film measured by a first system, extracting intensities for one or more elemental species associated with the first sample film to provide a first set of extracted intensities using a function, and determining a first quantitative characteristic associated with the first sample film using the first set of extracted intensities. Next, obtain a second set of spectral data measured for a comparable sample film measured by a second photoelectron spectroscopy system. Next, apply the same function and continually adjust the function to extract intensities for the respective elemental species associated with the comparable sample film to provide a second set of corrected-extracted intensities. A second quantitative characteristic for the comparable sample is determined. The function is continually adjusted until the determined second quantitative characteristic closely or substantially matches the first quantitative characteristic.

Abstract: A scanning X-ray fluorescence spectrometer includes a quantitatively analyzing device (18) which calculates the concentration of hexavalent chrome based on the fact that the peak spectroscopic angle, at which the maximum intensity is attained in Cr—K? line (22), changes depending on the ratio of the concentration of the hexavalent chrome vs. the concentration of the intensity of the total chrome. A plurality of detecting device (23) having different resolutions as a combination of a divergence slit (11), a spectroscopic device (6), a receiving slit (20) and a detector (8) is provided such that when the change of the peak spectroscopic angle is to be detected, a detecting device (23B) having a higher resolution than that of the detecting device (23A), which is selected when the concentration or the intensity of the total chrome is to be determined, is selected.

Abstract: An ionising particle analyser comprises a source of ionising particles, a charged particle detector, and an ionisable gas located between the source and the detector. The analyser further comprises a charged particle impeding device located between the source and the detector. The charged particle impeding device is arranged to be maintained in a first configuration at a potential to impede the passage of charged particles and pass uncharged particles.

Abstract: According to one embodiment of the invention, photoelectron spectroscopy is used to determine the thickness of one or more layers in a single or multi-layer structure on a substrate. The thickness may be determined by measuring the intensities of two photoelectron species or other atom-specific characteristic electron species emitted by the structure when bombarded with photons. A predictive intensity function that is dependent on the thickness of a layer is determined for each photoelectron species. A ratio of two predictive intensity functions is formulated, and the ratio is iterated to determine the thickness of a layer of the structure. According to one embodiment, two photoelectron species may be measured from a single layer to determine a thickness of that layer. According to another embodiment, two photoelectron species from different layers or from a substrate may be measured to determine a thickness of a layer.

Abstract: A method for inspection includes irradiating a sample using an X-ray beam, which is focused so as to define a spot on a surface of the sample. At least one of the sample and the X-ray beam is shifted so as to scan the spot along a scan path that crosses a feature on the surface. Respective intensities of X-ray fluorescence emitted from the sample responsively to the X-ray beam are measured at a plurality of locations along the scan path, at which the spot has different, respective degrees of overlap with the feature. The intensities measured at the plurality of the locations are processed in order to compute an adjusted value of the emitted X-ray fluorescence over the scan path. A thickness of the feature is estimated based on the adjusted value.

Abstract: Methods for correcting a bone density value for an effect of lead are disclosed. One method includes determining an apparent bone density in a patient; applying a correction factor to the apparent bone density, the correction factor being based on a blood lead level; and deriving a corrected bone density value for the patient.

Abstract: A method and device to accurately obtain very small quantity of wear of the order of nanometers of a protective film on the surface of a sliding member. A quantity of wear on the surface of a measurement sample including a base and a coating layer is measured by making a spectrum of the surface elements in a reference sample using a surface-element analysis device which analyzes elements on the surface of a substance from an energy spectrum of charged particles obtained by applying excited ionization radiation on the reference sample equivalent to the measurement and by measuring charged particles generated from the surface of the substance. A step of obtaining signal intensity ratios of plural elements from the spectrum is repeated a plurality of times while the surface of the reference sample is being etched and calibration curves which indicate a distribution of the signal intensity ratios of the plural elements in the reference sample are made.

Abstract: The material composition of a thin film formed on a substrate or covered by a cap layer that shares one or more elements with the thin film can be determined by combining characteristic material data, such as characteristic x-ray data, from a material composition analysis tool, such as an electron probe-based x-ray metrology (EPMA) operation, with thickness data and (optionally) possible material phases for the thin film. The thickness data and/or the material phase options can be used to determine, for example, the penetration depth of a probe e-beam of the EPMA tool. Based on the penetration depth and the thin film thickness, the characteristic x-ray data from the EPMA operation can be analyzed to determine the composition (e.g., phase or elemental composition) of the thin film. An EPMA tool can include ellipsometry capabilities for all-in-one thickness and composition determination.

Abstract: An X-ray fluorescence spectrometer includes an X-ray source 7 for irradiating a sample 1 at a predetermined incident angle ø with primary X-rays 6, and a detecting device 9 for measuring an intensity of fluorescent X-rays 8 generated from the sample at a predetermined detection angle ? and ?, wherein with two combinations of the incident angle ø and the detection angle ? and ?, in which combinations the incident angles ø and/or the detection angles ? and ? are different from each other, each intensity of the fluorescent X-rays 8 is measured and, also, the incident angle ø and the detection angle ? and ? in each of the combination are so set that with respect to a measurement depth represented by the coating weight, at which the intensity of the fluorescent X-rays 8 attains a value equal to 99% of the uppermost limit when the coating weight of a target coating to be measured is increased, respective measurement depths in the two combinations may be a value greater than the coating weight of a coating 3.

Abstract: A method and computer program software product for establishing an areal density of an elemental constituent of one layer of a stack of layers of material overlying a substrate. Incident penetrating radiation excites characteristic x-ray fluorescent radiation in multiple lines associated with each of one or more elements. Areal densities of successive layers are determined by self-consistent solution of equations relating the ratios of intensities of the characteristic fluorescence lines of successive elements.

Abstract: In a continuously operating tomography apparatus and an operating method therefore, a scanner unit is rotated around a system axis and first and second examination subjects are successively moved into the scanner unit and respective examinations of the first and second examination subjects are conducted without interruption of rotation of the scanner unit. The rotation frequency of the scanning unit is set differently dependent on the type of examination to be conducted, and when no examination of an examination subject is taking place, the scanning unit is rotated at a predetermined rest rotation frequency, that is smaller than a smallest of the available rotation frequencies for the examinations, or is an average of the rotation frequencies available for the examinations.

Abstract: A method for testing a material applied to a surface of a sample includes directing an excitation beam, having a known beam-width and intensity cross-section, onto a region of the sample. An intensity of X-ray fluorescence emitted from the region responsively to the excitation beam is measured. A distribution of the material within the region is estimated, responsively to the measured intensity of the X-ray fluorescence and to the intensity cross-section of the excitation beam, with a spatial resolution that is finer than the beam-width.