Abstract: A beam shaping apparatus (10) for use in an X-ray analysis device (40). The beam shaping apparatus processes an input beam (32) from an X-ray beam source (20), and generates an output beam (34) with an output beam shape for irradiating a sample (112) held by a sample holder (22) of the X-ray analysis device. Movement of the output beam shape is controlled in dependence upon a varying tilt angle (?) of the sample (112), this defined by a tilt position of the sample holder (22).

Abstract: An orientation degree distribution analysis method includes steps of: inputting, to a main storage device, crystal structure information of an object to be measured, information on an intensity ratio of each diffraction peak and a crystal plane corresponding to each diffraction peak by X-ray diffraction measurement, information on a diffraction range and a diffraction sensitivity, and information on an intensity ratio of each diffraction peak of a randomly oriented sample; calculating an angle defined by an orientation plane and a crystal plane corresponding to a diffraction peak of interest from the information stored in the main storage device; calculating an existence ratio and storing the existence ratio in the main storage device; setting an orientation degree distribution function; and calculating an orientation degree distribution from the information of the inputting step and the information of the calculating step.

Abstract: Improvements in a rotor runout and concentricity jig that mimics the runout and/or concentricity of an axle of a vehicle that can be transferred to a rotor. The jig uses discs with high and low points and/or two eccentric tubes. The parts can be adjusted from in-phase to out of phase to duplicate the characteristics of the axle. The adjustments have incremental detents that correspond with the imperfections of the axle to rotor. The position of the rotor is marked on the axle and the rotor to ensure that the rotor is placed onto the axle in the exact same location. The axle and the rotor are cleaned, reinstalled and measured for runout and concentricity. The rotor is then removed and inaccuracies for runout and/or concentricity are transferred to the jig for machining the rotor.

Abstract: A ball-mapping system connectable to an X-ray diffraction apparatus, for collecting X-ray diffraction data at measurement points located on a ball-shaped sample is provided. The ball-mapping system includes a sample stage, including a sample-contacting surface and a guide assembly cooperating with the sample-contacting surface for guiding the sample-contacting surface along a first axis and along a second axis unparallel to the first axis. The ball-mapping system includes a sample holder for keeping the ball-shaped sample in contact with the sample stage and a motor assembly in driving engagement with the guide assembly, the motor assembly driving the sample-contacting surface in translational movement along the first axis and the second axis, the translational movement of the sample-contacting surface causing the ball-shaped sample to rotate, on the sample-contacting surface along the first axis and the second axis. A method for mapping the ball-shaped sample is also provided.

Abstract: A single-crystal X-ray structure analysis apparatus capable of surely and easily performing operations of removing/attaching a sample soaked in a crystalline sponge from/to the apparatus, and a sample holder attaching device thereof, are provided. There are provided a sample holder attaching device comprising a sample holder attaching mechanism 600 that attaches the sample holder 250 to a goniometer 12 in the single-crystal X-ray structure analysis apparatus in a state where the sample holder 250 is removed from the applicator 300; wherein the sample holder 250 comprises a porous complex crystal capable of soaking the sample in a plurality of fine pores formed therein, and the porous complex crystal is fixed at a position of the sample holder 250 to which X-rays are irradiated from an X-ray irradiation section, in a state where the sample holder 250 is attached to the goniometer 12.

Abstract: An analysis apparatus comprises: a moveable stage assembly; a sample holder on a top surface of the stage assembly; a first photon source and a first photon detector or detector array, the first photon source being configured to emit a first beam of photons that intercepts the surface of a sample at a first location on the sample and the first photon detector or detector array being configured to detect photons that are emitted from the first location; and a second photon source and a second photon detector or detector array, the second photon source being configured to emit a second beam of photons that intercepts the surface of the sample at a second location on the sample, the second location being spaced apart from the first location, and the second photon detector or detector array being configured to detect photons that are emitted from the second location.

Abstract: There is provided a control apparatus 40 that controls a tilt of a sample, the control apparatus comprising an input section 41 that receives an input of inclination information representing inclination of the sample with respect to a ? axis; an adjustment amount determination section 43 that determines adjustment amounts of a ? value and a ? value for correcting a deviation amount between a scattering vector and a normal line to a sample surface or a lattice plane with respect to a ? value that varies, using the inclination information; and a drive instruction section 47 that drives a goniometer according to ? axis rotation of the sample, based on the determined adjustment amounts of the ? value and the ? value, during an X-ray diffraction measurement.

Abstract: A residual stress detection device for a curved surface coating and a detection method thereof is provided, where its structure includes: a detection piece carrier, configured to fix the detection piece, so that a to-be-detected point on the detection piece remains at a highest point; an X-ray generation source, radiating an X-ray to the to-be-detected point fixedly or along a path; a detection element, including a moving mechanism, where the moving mechanism moves the detection element along a path extending toward a direction orthogonal to an incident direction of the X-ray, so that the detection element receives and detects intensity of a diffraction X-ray at a position of the diffraction X-ray; and a stress calculation module, obtaining a strain value based on an intensity peak of the diffraction X-ray detected by the detection element, and calculating a residual stress value of the detection piece by using a formula.

Abstract: Systems and methods for obtaining scattering images during computed tomography (CT) imaging are provided. Two gratings or grating layers can be disposed between the object to be imaged and the detector, and the gratings or grating layers can be arranged such that primary X-rays are blocked while scattered X-rays that are deflected as they pass through the object to be imaged reach the detector to generate the scattering image.

Abstract: A method of processing X-ray diffraction data, the data is provided by an X-ray detector configured to detect diffracted X-ray beams of a sample. The method including acquiring X-ray diffraction data from the X-ray detector while the sample is rotating with respect to an incident X-ray beam, generating a 2D image frame from the acquired X-ray diffraction data, wherein the generated 2D image frame includes 2D image data representing X-ray diffraction data for a specific rotational position of the sample, for the generated 2D image frame, distinguishing the sample relevant X-ray diffraction data from the background data; mapping the distinguished sample relevant X-ray diffraction data of the generated 2D image frame into a single 3D reciprocal space; and visualizing the 3D reciprocal space along with the mapped X-ray diffraction data on a display screen. Further provided is an apparatus and an X-ray device implementing the method.

Abstract: X-ray diffraction apparatus includes a flat graded multilayer 8 which may be used in a SAXS configuration for a sample 6. The apparatus may be adapted for Bragg-Brentano measurements by a collimator 16 without the need for alternate beam paths or complex arrangements.

Abstract: A compound x-ray lens and method of fabricating these lenses are disclosed. These compound lenses use multiple zone plate stacking to achieve a pitch frequency increase for the resulting combined zone plate. The compound equivalent zone plate includes a first zone plate having an initial pitch frequency stacked onto a second zone plate to form an equivalent compound zone plate. The equivalent zone plate has a pitch frequency that is at least twice the initial pitch frequency. Also, in one example, the equivalent zone plate has a mark-to-space ratio of 1:1.

Abstract: The invention provides an apparatus and a method of performing X-ray diffraction (XRD) and/or X-ray fluorescence (XRF) analysis of a sample, comprising: irradiating a sample with X-rays from an X-ray source; providing a combined XRD and XRF detection arrangement comprising a scanning wavelength selector and at least one X-ray detector for detecting X-rays selected by the wavelength selector; and performing XRD analysis of the sample by selecting at least one fixed wavelength of X-rays diffracted by the sample using the scanning wavelength selector and detecting X-rays of the selected fixed wavelength(s) at one or more values of the diffraction angle ? at the sample using the X-ray detector(s); and/or performing XRF analysis of the sample by scanning wavelengths of X-rays emitted by the sample using the scanning wavelength selector and detecting X-rays of the scanned wavelengths using the X-ray detector(s).

Abstract: The sample cooling apparatus is used in an X-ray diffractometer for rotating a sample supported by a sample rod about an ? axis, directing X-rays thereto, and detecting X-rays deflected from the sample using an X-ray detector. The apparatus has a nozzle for blowing a cooling gas on the sample; and a gas-suctioning device for suctioning, via an aperture, gas that has passed over the sample. The sample rod moves when rotated about the ? axis forming a conical surface having the sample as a vertex. The nozzle is provided so that the extension direction of the sample rod and the direction of the blown gas form an acute angle of 90° or less. The gas-suctioning device suctions the gas so the path of gas having contacted the sample rod bends when the extension direction of the sample rod and the blown direction of the gas form an acute angle.

Abstract: An X-ray multiple spectroscopic analyzer includes an X-ray source, an optical system inputting X-rays to a single-crystal sample, a sample stage supporting the single-crystal sample, an X-ray diffraction detector, a rotation driving system that changes the angle of the X-ray diffraction detector, an X-ray diffraction measurement data storage unit, a structural analysis data analyzing unit, an energy-dispersive X-ray fluorescence detector, an X-ray fluorescence measurement data storage unit, an X-ray fluorescence analyzing unit, an X-ray fluorescence analysis data storage unit, and X-ray fluorescence analysis data acquiring unit. The structural analysis data analyzing unit analyzes the data of the crystal structure further on the basis of the analysis data of the fluorescent X-rays output from the X-ray fluorescence analysis data acquiring unit.

Abstract: An X-ray shielding member is provided so as to confront an X-ray incident face of a sample, and a gap through which an X-ray emitted from an X-ray source is passed and irradiated to an X-ray incident face of the sample is formed between the X-ray shielding member and the X-ray incident face of the sample. A gap adjusting mechanism for moving the X-ray shielding member is further provided to move the X-ray shielding member in accordance with change of an X-ray incident angle to the sample by a goniometer, whereby the breadth of the gap formed between the X-ray shielding member and the X-ray incident face of the sample can be adjusted.

Abstract: Apparatus for inspection of a disk, which includes a crystalline material and has first and second sides. The apparatus includes an X-ray source, which is configured to direct a beam of X-rays to impinge on an area of the first side of the disk. An X-ray detector is positioned to receive and form input images of the X-rays that are diffracted from the area of the first side of the disk in a reflective mode. A motion assembly is configured to rotate the disk relative to the X-ray source and detector so that the area scans over a circumferential path in proximity to an edge of the disk. A processor is configured to process the input images formed by the X-ray detector along the circumferential path so as to generate a composite output image indicative of defects along the edge of the disk.

Abstract: A silicon strip detector having a first X-ray detection unit having plural strips arranged in parallel to one another in a first direction, and a second X-ray detection unit having plural strips arranged in parallel to one another in a second direction orthogonal to the first direction is used as an X-ray detector. The X-ray detector is mounted in an X-ray diffraction device while the first direction is matched with the tangential direction of 2?-rotation, and the second direction is matched with the tangential direction of ?-rotation for executing in-plane diffraction measurement.

Abstract: A motion control system comprising a servo motor for moving a rotary stage; a scale provided on the rotary stage or on an object that moves integrally with the rotary stage; a plurality of reading heads for detecting the scale and outputting a signal; a data processing part for calculating an average value of rotation angle data based on each of the output signals from the reading heads and outputting the average value as a signal; and a servo amplifier for controlling the motor based on the signal representing the average value of the rotation angle. The motion control system can cause the rotary stage to rotate to a desired rotation angle to a high degree of accuracy using the reading heads.

Abstract: A goniometer base for X-ray crystallography comprises a magnetic steel part with a cylindrical hole, a compliant cylindrical part that is inserted into this hole, and a cylindrical tube that is press-fit into the hole and holds the compliant part in place, such that when a crystal mounting tool is inserted through the concentric holes in each part, it is positively gripped and held in place at both T=300 K and T=100 K.

Abstract: An imaging system combines CT and XRD measurements, both measuring the XRD diffraction and the absorption as a function of energy. A goniometer 2, source 4 and two dimensional detector 10 may be used. Embodiments use relatively soft X-rays in the 5-25 keV range. An integrated mounting unit to mount the sample 8 close to detector 10 is also described.

Abstract: Apparatus for inspection of a disk, which includes a crystalline material and has first and second sides. The apparatus includes an X-ray source, which is configured to direct a beam of X-rays to impinge on an area of the first side of the disk. An X-ray detector is positioned to receive and form input images of the X-rays that are diffracted from the area of the first side of the disk in a reflective mode. A motion assembly is configured to rotate the disk relative to the X-ray source and detector so that the area scans over a circumferential path in proximity to an edge of the disk. A processor is configured to process the input images formed by the X-ray detector along the circumferential path so as to generate a composite output image indicative of defects along the edge of the disk.

Abstract: A sample plate for use in an X-ray powder diffraction apparatus, the sample plate comprising a body having an exterior circumference which rotatable about a central axis, and a self contained rotating mechanism for rotating a sample holder containing a powder about a longitudinal axis, wherein the longitudinal axis intersects central axis; and wherein rotation about the central axis and rotation about the longitudinal axis occur simultaneously.

Abstract: The present invention consists of an x-ray goniometer which is positioned directly adjacent to processing machines used in the cutting, milling, drilling and shaping of crystal boules and crystal ingots, used in conjunction with an adjustable tilt platform capable of pitch, yaw and roll movement, to allow in-situ measurement and automatic adjustment of crystal orientation with respect to the processing machine. The goniometer may be secured to either the tool itself or a portion of the machine which is adjacent the piece to be worked. Various embodiments include an x-ray goniometer and adjustable tilt platform incorporated into a core drilling machine, wire saw, surface grinder, polishing apparatus, or orientation flat or notch grinder.

Abstract: Sensing methods and a compact, sample holding pin base sensor are provided for detecting if a sample pin is, for example, properly mounted on a goniometer used for automated, high throughput macromolecular crystallography. A first magnet is used for holding a magnetic base; a second magnet is disposed spaced apart from the first magnet. The first magnet and the second magnet have opposite orientation. A Hall-effect switch is located generally centrally between the first magnet and the second magnet. A state of the Hall-effect switch indicates if a sample pin is properly mounted on a mounting member, such as a goniometer.

Abstract: A calibration technique is provided that utilizes a standard sample that allows for calibration in the wavelengths of interest even when the standard sample may exhibit significant reflectance variations at those wavelengths for subtle variations in the properties of the standard sample. A second sample, a reference sample may have a relatively featureless reflectance spectrum over the same spectral region and is used in combination with the calibration sample to achieve the calibration. In one embodiment the spectral region may include the VUV spectral region.

Abstract: The invention relates to a goniometer and a method for measuring stresses and characterizing microstructure of particles. The goniometer comprises a base (1), and a measurement head (12) including both an X-ray tube and a detector arc (11) movably adapted to the base (1) by a robot capable for three-dimensional movement. In accordance with the invention the robot has means for creating arc-formed movement of the measurement head (12) during the measurement with rotating (5, 7, 15) and tilting (3, 16, 9) joints.

Abstract: A goniometer base for X-ray crystallography comprises a magnetic steel part with a cylindrical hole, a compliant cylindrical part that is inserted into this hole, and a cylindrical tube that is press-fit into the hole and holds the compliant part in place, such that when a crystal mounting tool is inserted through the concentric holes in each part, it is positively gripped and held in place at both T=300 K and T=100 K.

Abstract: A vertical/horizontal small angle X-ray scattering apparatus, for enabling plural numbers of X-ray diffraction measurements, such as, transmission small angle X-ray diffraction, reflection small angle scattered X-ray diffraction, and in-plane X-ray diffraction, etc.

Abstract: A diffractometer for X-ray diffraction measurements has two co-exiting sample stages which are mounted on the goniometer base simultaneously. A rotation stage is used for single crystal X-ray diffraction and an XYZ stage is used for general X-ray diffraction with bulky samples. The driving bases of both stages are located away from the instrument center so the measuring space in the vicinity of the instrument center is available to either of the two sample stages. With this arrangement, the rotation axis of the rotation stage stays aligned to the instrument center even when the XYZ stage is used for data collection. Therefore, realigning of the rotation stage to the instrument center is not necessary when switching the applications between the two stages.

Abstract: An X-ray diffraction and X-ray fluorescence instrument for analyzing samples having no sample preparation includes a X-ray source configured to output a collimated X-ray beam comprising a continuum spectrum of X-rays to a predetermined coordinate and a photon-counting X-ray imaging spectrometer disposed to receive X-rays output from an unprepared sample disposed at the predetermined coordinate upon exposure of the unprepared sample to the collimated X-ray beam. The X-ray source and the photon-counting X-ray imaging spectrometer are arranged in a reflection geometry relative to the predetermined coordinate.

Abstract: The invention relates to a goniometer and a method for measuring stresses and characterizing microstructure of particles. The goniometer comprises a base (1), and a measurement head (12) including both an X-ray tube and a detector arc (11) movably adapted to the base (1) by a robot capable for three-dimensional movement. In accordance with the invention the robot has means for creating arc-formed movement of the measurement head (12) during the measurement with rotating (5, 7, 15) and tilting (3, 16, 9) joints.

Abstract: In an X-ray diffraction apparatus, a sample holder has a sample mounted on a pin extending a known distance from a cap that mates with a magnetized base on a goniometer. The sample is mechanically positioned in the center of an X-ray beam by a first movable arm which is located in a precise position relative to the goniometer base by a positioning mechanism and a mechanism that forces the pin into engagement with the first arm. The sample has a known height on the pin with respect to the cap and therefore, the sample can repeatedly be located in the center of the X-ray beam without the use of complex centering arrangements. In order to allow the sample holder to be removed from the goniometer base, a linkage is provided that releases the pin from the first arm.

Abstract: The invention relates to a goniometer (1) and a method for measuring stresses and characterizing microstructure of particles. The goniometer comprises frame (4), a measurement head (7, 8, 9, 10) movably adapted to the frame (4) by a first linear movement unit (5), second linear movement unit (6) and a tilting movement unit (16), for performing measurement at a measurement point. According to the invention the axis of rotation (12) of the tilting movement unit (16) does not coincide with the measurement point, and the device has means (17) for creating arc-formed movement of the measurement head (7, 8, 9, 10) during the measurement with said movement units (5, 6, 16).

Abstract: A measuring device for the short-wavelength X-ray diffraction for test samples or work pieces made of lower-atomic-number crystalline and a method thereof are disclosed in the present invention. The measuring device comprises: an X-ray tube, an incident diaphragm, a table, a position-restricting receiving slit for a position-restricted part of a measured sample or work piece, a goniometer, a detector and an energy analyzer, the said X-ray tube and detector are arranged in the two sides of the table on which the sample or work pieces is located, the detector is intended to receive the transmitted diffracted ray. With the short-wavelength X-ray diffraction transmission method in the present invention X-ray diffracting patterns at different depths and different parts of a thicker test sample or work piece made of crystalline material and their distribution can be obtained without destructing the test sample or work piece, and then the data are processed by a computer to obtain phase, residual stress, etc.

Abstract: A mobile equipment endowed with a neutrons source possibly in combination with other radiation sources including a robot system that, moving on a controlled trajectory, realize the conditions to observe from different positions the radiation emerging from a specimen either mobile or fixed, properly irradiated, is described.

Abstract: Sample mounts (10) for mounting microcrystals of biological macromolecules for X-ray crystallography are prepared by using patterned thin polyimide films (12) that have curvature imparted thereto, for example, by being attached to a curved outer surface of a small metal rod (16). The patterned film (12) preferably includes a tip end (24) for holding a crystal. Preferably, a small sample aperture is disposed in the film for reception of the crystal. A second, larger aperture can also be provided that is connected to the sample aperture by a drainage channel, allowing removal of excess liquid and easier manipulation in viscous solutions. The curvature imparted to the film (12) increases the film's rigidity and allows a convenient scoop-like action for retrieving crystals. The polyimide contributes minimally to background and absorption, and can be treated to obtain desired hydrophobicity or hydrophilicity.

Abstract: An X-ray scattering chamber 12 includes a housing 14 that may be mounted in X-ray diffraction equipment between an X-ray source 2 and an X-ray detector 4, for example on goniometer arm 6. The housing 14 includes sample holder 16 and beam conditioning optics 22,24, but the system also makes use of primary optics 10 outside the housing. The equipment is suitable for SAXS and/or SAXS-WAXS.

Abstract: Disclosed is an X-ray diffraction apparatus that irradiates a sample with X-ray emitted from an X-ray source by resting the X-ray using a divergence slit and detects diffracted X-ray generated from the sample using an X-ray detector. The divergence angle of the divergence slit is a fixed value, and the divergence slit is a slit that restricts the X-ray irradiation width in the sample width direction. The sample is arranged in a longitudinally-elongated manner in which its sample width is smaller than a standard sample width and its sample height is the same as a standard sample height. X-ray intensity calculated based on an output of the X-ray detector is compensated based on an effective divergence angle calculated based on the sample width to thereby obtain true X-ray intensity.

Abstract: An X-ray scattering chamber 12 includes a housing 14 that may be mounted in X-ray diffraction equipment between an X-ray source 2 and an X-ray detector 4, for example on goniometer arm 6. The housing 14 includes sample holder 16 and beam conditioning optics 22,24, but the system also makes use of primary optics 10 outside the housing. The equipment is suitable for SAXS and/or SAXS-WAXS.

Abstract: Disclosed is an X-ray diffraction apparatus that irradiates a sample with X-ray emitted from an X-ray source by resting the X-ray using a divergence slit and detects diffracted X-ray generated from the sample using an X-ray detector. The divergence angle of the divergence slit is a fixed value, and the divergence slit is a slit that restricts the X-ray irradiation width in the sample width direction. The sample is arranged in a longitudinally-elongated manner in which its sample width is smaller than a standard sample width and its sample height is the same as a standard sample height. X-ray intensity calculated based on an output of the X-ray detector is compensated based on an effective divergence angle calculated based on the sample width to thereby obtain true X-ray intensity.

Abstract: Disclosed is an X-ray apparatus having an X-ray source, an X-ray detector, a divergence slit, and a scattering slit. The incident angle ? of X-ray to be irradiated on a sample is changed at a predetermined angular speed at measurement time and diffracted X-ray detection angle 2? at which the X-ray detector detects X-ray is changed in the opposite direction to the ?-direction at an angular speed double that of the X-ray incident angle ?. The slit width of the divergence slit is changed such that the X-ray irradiation width always coincides with the sample width while the slit width of the scattering slit is retained at a constant value. The width of X-ray received by the X-ray detector is restricted by the narrower one of the divergence slit and the scattering slit. The resolution in the high angle region can be kept at a high level.

Abstract: An open beam x-ray diffraction system and method are provided including modular x-ray heads for being detachably connected to a base unit having a common drive assembly that shifts the heads in an arcuate path during an x-ray diffraction measurement operation. The heads can be tailored to different performance criteria depending on the needs of the measurement operation that is to take place. To this end, one of the heads can be a microhead that is adapted to take measurements from otherwise difficult to access surfaces, such as on the inside of tubular parts. Enhancements to the drive assembly for improved accuracy and speed are also disclosed.

Abstract: A method and apparatus for the transportation, remote and unattended mounting, and visual alignment and monitoring of protein crystals for synchrotron generated x-ray diffraction analysis. The protein samples are maintained at liquid nitrogen temperatures at all times: during shipment, before mounting, mounting, alignment, data acquisition and following removal. The samples must additionally be stably aligned to within a few microns at a point in space. The ability to accurately perform these tasks remotely and automatically leads to a significant increase in sample throughput and reliability for high-volume protein characterization efforts. Since the protein samples are placed in a shipping-compatible layered stack of sample cassettes each holding many samples, a large number of samples can be shipped in a single cryogenic shipping container.

Abstract: A sample analysis system makes use of both X-ray diffraction analysis and Raman spectroscopy of a sample. The sample is part of a sample library that is mounted on an XYZ stage that allows each sample to be examined in turn, as the XYZ stage is moved to position successive samples to a sample location. The system components may be mounted on a goniometer to allow their repositioning. A video system may be used for optical examination of the sample, and a knife edge may be used to prevent X-ray radiation from reaching a sample adjacent to the sample positioned at the sample location. A controller may be used to automatically control the operation of the analysis components and the movement of the sample holder to as to allow automated analysis of all of the samples in the sample holder.

Abstract: Sample mounts (10) for mounting microcrystals of biological macromolecules for X-ray crystallography are prepared by using patterned thin polyimide films (12) that have curvature imparted thereto, for example, by being attached to a curved outer surface of a small metal rod (16). The patterned film (12) preferably includes a tapered tip end (24) for holding a crystal. Preferably, a small sample aperture is disposed in the film for reception of the crystal. A second, larger aperture can also be provided that is connected to the sample aperture by a drainage channel, allowing removal of excess liquid and easier manipulation in viscous solutions. The curvature imparted to the film (12) increases the film's rigidity and allows a convenient scoop-like action for retrieving crystals. The polyimide contributes minimally to background and absorption, and can be treated to obtain desired hydrophobicity or hydrophilicity.

Abstract: An X-ray thin film inspection apparatus including a sample table on which an inspection target such as a product wafer or the like is mounted, a positioning mechanism for moving the sample table, a goniometer having first and second swing arms, at least one X-ray irradiation unit that are mounted on the first swing arm and containing an X-ray tube and an X-ray optical element in a shield tube, an X-ray detector mounted on a second swing arm, and an optical camera for subjecting the inspection target disposed on the sample table to pattern recognition.

Abstract: In a method for X-ray reflectance measurement in which an intensity of a reflected X-ray is observed for each incident angle, a measuring scale for the incident angle ? is corrected, before the reflectance measurement, using an analyzer crystal. In the corrective operation, the aperture width of the receiving slit is made wider than in the X-ray reflectance measurement, and the analyzer crystal is inserted in the reflection path, and then the reflected X-ray intensity is detected. In this condition, the incident angle ? of the incident X-ray to the sample surface can be determined accurately, and thus the measuring scale for the incident angle can be corrected. Thereafter, the analyzer crystal is removed from the reflection path, and the X-ray reflectance measurement for the sample surface is carried out.

Abstract: An X-ray diffraction apparatus provides analysis in either transmission or reflective mode and easy conversion between the two modes. An X-ray source and X-ray detector are each connected to a different circle of a goniometer. The two circles may be rotated independently to position the source and detector on the same side of a sample library for reflection mode operation, or on opposite sides of the sample library for transmission mode operation. The sample library has a horizontal orientation that allows open sample containers of the library to maintain the sample without spillage, and it connects to an XYZ stage that can move in three dimensions. The system may use a beamstop, and the goniometer and XYZ stage be motorized and controlled for automated sample analysis.

Abstract: An X-ray analysis apparatus is disclosed, in which X-rays emitted from an X-ray source are applied to a sample and a two-dimensional CCD sensor detects the X-rays diffracted by the sample. The X-ray analysis apparatus has a 2?-rotation drive and a program. The 2?-rotation drive moves the two-dimensional CCD sensor. The program is executed to control the motion of the CCD sensor. The 2?-rotation drive rotates the CCD sensor around ?-axis that extends over the surface of the sample. The program synchronizes the transfer of charges in the CCD sensor with the motion of the CCD sensor driven by the 2?-rotation drive. Hence, data items for the same diffraction angle can be accumulated in the pixels of the two-dimensional CCD sensor. This achieves high-speed and high-sensitivity in detection of diffracted X-rays.