Abstract: Methods and systems for realizing a high brightness, compact x-ray source suitable for high throughput, in-line x-ray metrology are presented herein. A compact electron beam accelerator is coupled to a compact undulator to produce a high brightness, compact x-ray source capable of generating x-ray radiation with wavelengths of approximately one Angstrom or less with a flux of at least 1e10 photons/s*mm^2. In some embodiments, the electron path length through the electron beam accelerator is less than ten meters and the electron path length through the undulator is also less than 10 meters. The compact x-ray source is tunable, allowing for adjustments of both wavelength and flux of the generated x-ray radiation. The x-ray radiation generated by the compact x-ray source is delivered to the specimen over a small spot, thus enabling measurements of modern semiconductor structures.

Abstract: It is an object of the present invention to provide a method and an apparatus for measuring a scattering intensity distribution capable of measuring a scattering intensity distribution in a reciprocal space in a short time.

Abstract: There is provided a System and Method For Determining The Radiological Composition of Material Layers Within a Conduit. The system and method disclosed is equally applicable to pipes, vessels, and conduits as well as medical applications such as determining vessel thickness, occlusion, scarring, or the like in humans and animals. A phantom setup is disclosed that has a phantom containing a test standard such as a reactor water test standard, removable plates, a collimator and probe with a spectrometer display. The phantom setup provides a baseline data set that can be used in conjunction with field measurements to determine the composition of materials within the conduit, such as corrosion or the like. The baseline data set may be semi-logarithmic and contains spectrometer readings of various plate thicknesses or quantities of plates.

Abstract: A system and a method for measuring an ash content and a calorific value of a coal are provided. The system comprises: at least two dual-energy gamma ray transmission measuring devices and a computing device, in which at least one first dual-energy gamma ray transmission measuring device is disposed before an inlet of a coal combustion apparatus for measuring a first attenuation coefficient of a gamma ray from the at least one first dual-energy gamma ray transmission measuring device with regard to the coal; at least one second dual-energy gamma ray transmission measuring device is disposed after an outlet of the coal combustion apparatus for measuring a second attenuation coefficient of a gamma ray from the at least one second dual-energy gamma ray transmission measuring device with regard to a coal ash; and the computing device is configured to compute the ash content and the calorific value of the coal.

Abstract: In accordance with an embodiment, a measuring apparatus includes an electromagnetic wave applying unit, a detecting unit, a data processing unit, a film structure transforming unit, and a film structure measuring unit. The electromagnetic wave applying unit generates electromagnetic waves to apply it to a periodic structure of films on a substrate. The detecting unit detects the electromagnetic waves scattered or reflected by the substrate. The data processing unit calculates a surface shape of the periodic structure. The film structure transforming unit calculates a virtual film structure regarding the internal structure of the periodic structure. The film structure measuring unit calculates the thickness of each layer constituting the periodic structure by fitting a first reflectance profile by actual measurement regarding the periodic structure to a second reflectance profile obtained by a simulation using the virtual film structure to restructure the shape of the periodic structure.

Abstract: A method and device for obtaining a first radiation spectrum diffused through a material, in which the material is exposed to an incident irradiation beam emitted by a radiation source. A first radiation spectrum diffused through the material is measured by means of a main detector, arranged so that its observation field intersects the irradiation beam inside the material. At least one secondary radiation spectrum diffused through the material is measured by means of at least one secondary detector and a measurements matrix (X) is constructed starting from previously measured spectra. The measurements matrix is decomposed in two non-negative matrices, a weights matrix (A) and a spectra matrix (S), where the spectra matrix includes an estimated multiple diffuse radiation spectrum and an estimated primary diffuse radiation spectrum. The device includes a microprocessor and computer program. A computer program product for implementing the method is also provided.

Abstract: A method of analyzing spectroscopic data, the method comprising collecting spatially resolved measurement spectroscopic data of a sample for a series of measurements spots, assigning the measurement spots into a predefined set of spectral categories, based on characteristics of the spectroscopic data of the respective measurement spots, identifying groupings of the measurement spots based on their respective spectral categories and their spatial relationships, and assigning each grouping of measurement spots to a fundamental sample unit data object.

Abstract: A device for analyzing a film on a surface of an electrode for a rechargeable lithium battery includes: an inert chamber capable of maintaining an inert atmosphere including controlled amounts of moisture and oxygen and including an inner space for pretreating a sample including the film on the surface of the electrode; a first analyzer coupled to the inert chamber through a connection tube, the first analyzer being configured to receive the sample and being configured to provide composition and thickness information of the film; an inert holder configured to be assembled around the sample in the inert chamber and configured to maintain the inert atmosphere around the sample; and a second analyzer mounted with the inert holder therein and configured to provide shape information of the film. A method of analyzing a film on a surface of an electrode using the device is also disclosed.

Abstract: A spectrometer includes a rigid body having a first planar face with an orientation and a second planar face with a different orientation than the first planar face. The first and second planar faces are configured to position Bragg diffraction elements, and the orientation of the first planar face and the different orientation of the second planar face are arranged to convey a predetermined spectral range of the electromagnetic radiation to non-overlapping regions of the sensor location via the diffraction elements.

Abstract: According to one embodiment, a method for identifying radio-nuclides includes receiving spectral data, extracting a feature set from the spectral data comparable to a plurality of templates in a template library, and using a branch and bound method to determine a probable template match based on the feature set and templates in the template library. In another embodiment, a device for identifying unknown radio-nuclides includes a processor, a multi-channel analyzer, and a memory operatively coupled to the processor, the memory having computer readable code stored thereon. The computer readable code is configured, when executed by the processor, to receive spectral data, to extract a feature set from the spectral data comparable to a plurality of templates in a template library, and to use a branch and bound method to determine a probable template match based on the feature set and templates in the template library.

Abstract: The present invention relates to a novel system and method for the determination of depth profiling with improved accuracy and reliability. The method comprises obtaining spectroscopic data from the sample while under at least two different electrical conditions of the sample, the spectroscopic data comprising a signal of charged particles emitted from the sample, and being indicative of a change in amplitude, spectral position and spectral shape of the signal from the sample while under different electrical conditions of the sample, the change being indicative of the compositional profile and spatial distribution for at least one chemical element in the sample along a direction through the sample.

Abstract: A system and a method for measuring an ash content and a calorific value of a coal are provided. The system comprises: an X ray device, disposed over the coal and configured to emit an X ray to the coal; at least one X ray measuring device, disposed over the coal and configured to measure an energy spectrum of an X ray reflected by the coal; a distance sensor, disposed over the coal and configured to measure a distance between the coal and the at least one X ray measuring device; and a computing device, configured to receive the energy spectrum and the distance from the at least one X ray measuring device and the distance sensor and to compute the ash content and the calorific value of the coal according to the energy spectrum and the distance.

Abstract: A cup assembly for holding a sample to be analyzed spectrochemically, includes a tubular longitudinal member which is disposed symmetrical about a central axis. The tubular member extends longitudinally between a first end and a second end. An indented peripheral flange is defined at the second end. The indented flange has an inverted L shaped cross-section. An annular collar extends longitudinally between a first end and a second end. An internal peripheral flange is defined at the first end. The internal flange has an inverted L shaped cross-section complementing the indented flange of the tubular member. When a substantially thin film is interposed between the second end of the tubular member and the first end of the annular collar, the film is retained between the sample cell body and the collar between the indented flange and the internal flange. The cup may have a funnel shaped sample retaining chamber.

Abstract: A first image including a projection of a portion is generated based on data representing attenuation of higher-energy radiation having a peak energy of at least 1 MeV that passes through a portion of an inspection volume. A second image including a projection of the portion is generated based on data representing attenuation of lower-energy radiation passing through the portion of the inspection volume. A dual-pixel image is created from the first image and the second image. A region of interest is selected from the dual-pixel image. A first basis function that is derived from an attenuation characteristic associated with the region of interest is selected. The region of interest is represented in terms of an amplitude associated with the first basis function and an amplitude associated with the second basis function.

Abstract: The present invention relates to a method of identifying ammunition type and/or weapon type used to fire the ammunition from gunshot residue. This method involves providing a sample including a gunshot residue, subjecting the sample to spectroscopic analysis to produce a spectroscopic signature for the sample, and identifying the spectroscopic signature to ascertain the type of ammunition and/or the type of weapon used to fire the ammunition. A method of establishing reference spectroscopic signatures for ammunition type and/or weapon type used to fire the ammunition is also disclosed.

Abstract: This invention relates in general to the determination of silicon levels in fuel mixtures, such as petroleum products. More particularly, the present invention relates to compositions for use as standards in an x-ray analyzer for the measurement of silicon in various fuel mixtures, and to methods of using these compositions.

Abstract: Systems, devices, and methods to mitigate the pressure disturbance associated with the injection of low-pressure analyte samples into a high-pressure HPLC fluid stream, to enhance chromatographic performance related to retention time and reproducibility. The preferred embodiment coordinates the injection run with active pressure control of a binary solvent delivery system to virtually eliminate the customary pressure drop when the low-pressure loop is brought on line. An additional benefit that enhances reproducibility is accomplished by forcing a consistent timing relationship between the injection run, the mechanical position of the delivery pump pistons, and the start and subsequent gradient delivery.

Abstract: An X-ray spectroscope collects an energy-dispersive spectrum from a sample under analysis, and generates a list of candidate elements that may be present in the sample. A wavelength dispersive spectral collector is then tuned to obtain X-ray intensity measurements at the energies/wavelengths of some or all of the candidate elements, thereby verifying whether or not these candidate elements are in fact present in the sample. Additionally, the alignment of the wavelength dispersive spectral collector versus the sample can be optimized by tuning the wavelength dispersive spectral collector to the energy/wavelength of a selected one of the candidate elements—preferably one whose presence in the sample has been verified, or one which has a high likelihood of being present in the sample—and then varying the alignment of the wavelength dispersive spectral collector versus the sample until the wavelength dispersive spectral collector returns the maximum intensity reading for the selected candidate element.

Abstract: A method and device for obtaining a first radiation spectrum diffused through a material, in which the material is exposed to an incident irradiation beam emitted by a radiation source. A first radiation spectrum diffused through the material is measured by means of a main detector, arranged so that its observation field intersects the irradiation beam inside the material. At least one secondary radiation spectrum diffused through the material is measured by means of at least one secondary detector and a measurements matrix (X) is constructed starting from previously measured spectra. The measurements matrix is decomposed in two non-negative matrices, a weights matrix (A) and a spectra matrix (S), where the spectra matrix includes an estimated multiple diffuse radiation spectrum and an estimated primary diffuse radiation spectrum. The device includes a microprocessor and computer program. A computer program product for implementing the method is also provided.

Abstract: A metrology system for analyzing a semiconductor device on a substrate can include a metrology sensor.

Abstract: A calibration technique is provided that utilizes a standard sample that allows for calibration in the wavelengths of interest even when the standard sample may exhibit significant reflectance variations at those wavelengths for subtle variations in the properties of the standard sample. A second sample, a reference sample may have a relatively featureless reflectance spectrum over the same spectral region and is used in combination with the calibration sample to achieve the calibration. In one embodiment the spectral region may include the VUV spectral region.

Abstract: A method is provided of calculating the structure of an inhomogeneous sample in which an electron beam is used to cause excitation of x-rays from the sample under known conditions of beam energy and geometry with respect to the sample. Notably the beam current is unknown. Measured x-ray intensity data for the sample corresponding to one or more sets of beam conditions and beam currents are firstly obtained, together with comparative x-ray intensity data for samples having known structures. A beam current factor for each beam condition is estimated and effective x-ray intensity data for each of the sets of conditions are then calculated using the measured and comparative x-ray intensity data and the beam current factor. The structure of the sample is then calculated for each of the sets of conditions using the effective x-ray intensity data. Predicting x-ray intensity data are produced corresponding to the calculated structure and compared with the effective x-ray intensity data.

Abstract: A window arrangement on a pressure pipe, with a casing in the train or at the end of the pressure pipe, said casing featuring flanges on diametrically opposing sides having radially directed passages, whose axes are standing perpendicular to the longitudinal axis of the pressure pipe and are located in a measurement plane for an x-ray measurement device, an x-ray source being associated to the one passage on the outer side and a receiver sensitive to X-rays to the other passage, and with window plates that are transmissive for X-rays which are sealingly arranged in the associated passage and are fixed in the passage with the aid of a fastening member and which consist of a material which is resistant against high temperatures and process-due etchings by chemically aggressive substances.

Abstract: A method of and apparatus for obtaining radiation transmission data from a liquid in such manner that allows some data about relative proportions of constituent ingredients to be derived is described. A radiation source and a radiation detector system able to resolve transmitted intensity across a plurality of frequencies within the spectrum of the source are used to produce transmitted intensity data for each such frequency. Measured data is compared numerically to a mass attenuation data library storing mass attenuation data, individually or collectively, for a small number of expected constituent ingredients of the liquid to fit each intensity data item to the relationship given by the exponential attenuation law: I/IO=exp [?(?/?) ?t] in respect of the constituent ingredients and derive therefrom an indication of relative proportions of each constituent ingredient.

Abstract: Systems, devices, and methods to mitigate the pressure disturbance associated with the injection of low-pressure analyte samples into a high-pressure HPLC fluid stream to enhance chromatographic performance related to retention time and reproducibility. The injection event is coordinated with active pressure control of a binary solvent delivery system to virtually eliminate the customary pressure drop when the low-pressure loop is brought on line. Consistent timing with the injection event of the mechanical position of the delivery pump pistons, and the start and subsequent gradient delivery generates reproducible results.

Abstract: An on-line EDXRD analyser including (i) a housing defining an analysis zone and having a passageway through it to allow transport of material in a process stream to pass through the analysis zone, (ii) a collimated source of polychromatic X-rays, (iii) an energy-resolving (ER)X-ray detector, (iv) a primary beam collimator disposed between the source of X-rays and the (ER)X-ray detector comprising an annular slit which defines an incident beam of polychromatic X-rays to irradiate a portion of the analysis zone, (v) a scatter collimator disposed between the primary beam collimator and the ERX-ray detector, the scatter collimator comprising an annular slit which defines a diffracted beam of X-rays scattered by the material to converge towards the ERX-ray detector, and (vi) a detector collimator comprising a conical opening which further defines the diffracted beam of X-rays scattered by the material.

Abstract: In an X-ray diffraction method using the parallel beam method, an X-ray parallel beam is incident on a sample, and diffracted X-rays from the sample are reflected at a mirror and thereafter detected by an X-ray detector. The reflective surface of the mirror consists of a combination of plural flat reflective surfaces. The respective centers of the flat reflective surfaces are located on an equiangular spiral having a center that is located on a surface of the sample. The X-ray detector is one-dimensional position-sensitive in a plane parallel to the diffraction plane. X-rays that have been reflected at different flat reflective surfaces reach different points on the X-ray detector respectively. A corrective operation is performed for separately recognizing the different reflected X-rays on the assumption that the different reflected X-rays that have been reflected at the different flat reflective surfaces might be unfortunately mixed each other on the same detecting region of the X-ray detector.

Abstract: An X-ray diffraction and X-ray fluorescence instrument for analyzing samples having no sample preparation includes a X-ray source configured to output a collimated X-ray beam comprising a continuum spectrum of X-rays to a predetermined coordinate and a photon-counting X-ray imaging spectrometer disposed to receive X-rays output from an unprepared sample disposed at the predetermined coordinate upon exposure of the unprepared sample to the collimated X-ray beam. The X-ray source and the photon-counting X-ray imaging spectrometer are arranged in a reflection geometry relative to the predetermined coordinate.

Abstract: A method for determining a type of substance is described. The method includes determining an effective atomic number of the substance based on a measured ratio of numbers of detected x-ray scatter photons in a diffraction profile.

Abstract: The present invention discloses an XRD means for identifying the content of a volume of interest (VOI) and a method thereof. A remote XRD means is comprised inter alia of a plurality of x-ray sources target toward the VOI. A plurality of x-ray detectors adapted to receive diffracted X-rays. A processor adapted to measure the diffracted x-ray patterns. A database comprising records of patterns parameters; and, an alerting means adapted for identifying material as one of the predetermined groups in the record. This invention also discloses a method of acquiring XRD image of a material in a VOI, comprised of receiving VOI coordinates; irradiating the material in the VOI; acquiring, extracting and converting of XRD patterns of the VOI to standard powder X-ray diffraction spectrum; matching records in a database for material identification; and alerting when the material is in a matching predetermined record.

Abstract: A remote sensing device for detecting materials of varying atomic numbers and systems and methods relating thereto. A system for identifying a material includes a photon beam flux monitor for resolving a high-energy beam. A method for identifying a material includes casting an incident photon beam on the material and detecting an emerging photon beam with an array of fission-fragment detectors, a first set of scintillator paddles, and a second set of scintillator paddles.

Abstract: An electron probe X-ray analyzer capable of automatically setting appropriate analytical conditions if there are unknown compounds by performing analysis under the analytical conditions adapted for analysis points having different compositions in a case where the numerous analysis points having the plural compositions are analyzed by WDS (wavelength-dispersive X-ray spectrometer). At each analysis point, the analyzer performs quantitative analysis using EDS (energy-dispersive X-ray spectrometer) permitting easy and quick analysis. Based on the results, chemical compounds are identified. If the results indicate that there is any new compound, analytical conditions adapted for the new compound are selected. If the new compound is already registered in a database, the analytical conditions are read from the database. Then, quantitative analysis is performed using WDS.

Abstract: A method for iteratively identifying a substance is described. The method includes determining whether a function of a difference between an updated diffraction profile and an original diffraction profile of the substance exceeds a parameter.

Abstract: A method for naming a substance is described. The method includes using a crystallinity of the substance to name the substance.

Abstract: A method for naming a substance is described. The method includes using a crystallinity of the substance to name the substance.

Abstract: A method for detecting a mass density image of an object. An x-ray beam is transmitted through the object and a transmitted beam is emitted from the object. The transmitted beam is directed at an angle of incidence upon a crystal analyzer. A diffracted beam is emitted from the crystal analyzer onto a detector and digitized. A first image of the object is detected from the diffracted beam emitted from the crystal analyzer when positioned at a first angular position. A second image of the object is detected from the diffracted beam emitted from the crystal analyzer when positioned at a second angular position. A refraction image is obtained and a regularized mathematical inversion algorithm is applied to the refraction image to obtain a mass density image.

Abstract: The material composition of a thin film formed on a substrate or covered by a cap layer that shares one or more elements with the thin film can be determined by combining characteristic material data, such as characteristic x-ray data, from a material composition analysis tool, such as an electron probe-based x-ray metrology (EPMA) operation, with thickness data and (optionally) possible material phases for the thin film. The thickness data and/or the material phase options can be used to determine, for example, the penetration depth of a probe e-beam of the EPMA tool. Based on the penetration depth and the thin film thickness, the characteristic x-ray data from the EPMA operation can be analyzed to determine the composition (e.g., phase or elemental composition) of the thin film. An EPMA tool can include ellipsometry capabilities for all-in-one thickness and composition determination.

Abstract: A method for analysis of a sample includes irradiating an area of the sample with a polychromatic X-ray beam. X-rays scattered from the sample are detected using a plurality of detectors simultaneously in different, respective positions, whereby the detectors generate respective outputs. Energy-dispersive processing is applied to the outputs of the detectors so as to identify one or more X-ray diffraction lines of the sample.

Abstract: A system, including a particulate matter analyzer and collecting filter, provides a method of analyzing and collecting samples from fluids, such as collecting particulate matter from air. A mass measuring unit and composition analyzing unit can be provided for either simultaneous or immediately consecutive measurements within a single instrument. The filter material can have an antistatic electricity characteristic and can be impregnated with reference material to enable calibration of the composition analyzing unit.

Abstract: A method and apparatus for analyzing a membrane structure by fitting simulated operation data to measured data obtained by X-ray reflectivity measurement to analyze the membrane structure. The analysis result obtained by the fitting can be prevented from falling into a local solution, so as to obtain an analysis result of the membrane structure with high accuracy. The method for analyzing a membrane structure for analyzing a structure of a membrane specimen having a single layer membrane or a multi-layer membrane by an X-ray reflectivity measurement, includes a step of simultaneously analyzing plural pieces of measured data obtained by measuring the membrane specimen under plural sets of measuring conditions different from each other in at least one of a resolution and a dynamic range.

Abstract: A method and device for monitoring the position of radioactive materials in vehicles relates to a technical field of monitoring of radioactive materials.

Abstract: An analytical method for determining crystallographic phases of a measuring sample comprises the steps of acquiring a diffraction pattern of the measuring sample and qualitative phase analysis of the measured diffraction pattern, acquiring an element spectrum of the measuring sample and determining concentrations of chemical elements in the measuring sample from the acquired element spectrum, and carrying out a quantitative phase analysis of the measuring sample on the basis of the measured intensities of the acquired diffraction pattern thereby taking into consideration determined element concentrations as a boundary condition, wherein differences between calculated and measured intensities of the diffraction pattern and between calculated and determined element concentrations are simultaneously minimized in an iterative process. The inventive method permits quantitative phase determination with high reliability.

Abstract: A method for inspection of a sample that includes a first layer having a known reflectance property and a second layer formed over the first layer. The method includes directing radiation toward a surface of the sample and sensing the radiation reflected from the surface so as to generate a reflectance signal as a function of elevation angle relative to the surface. A feature due to reflection of the radiation from the first layer is identified in the reflectance signal. The reflectance signal is calibrated responsively to the identified feature and to the known reflectance property of the first layer. The calibrated reflectance signal is analyzed to determine a characteristic of the second layer. Other enhanced inspection methods are disclosed, as well.

Abstract: A method for inspection of a sample includes irradiating the sample with a beam of X-rays, measuring a distribution of the X-rays that are emitted from the sample responsively to the beam, thereby generating an X-ray spectrum, and applying a multi-step analysis to the spectrum so as to determine one or more physical properties of a simulated model of the sample. The multi-step analysis includes spectrally analyzing the spectrum so as to determine one or more characteristic frequencies and fitting the simulated model to the spectrum by an iterative optimization process beginning from an initial condition determined by the one or more characteristic frequencies.

Abstract: An object is to reduce the influence of chlorine in plastics when the metal concentrations in the plastics are analyzed. In an X-ray analyzer including an X-ray generating part for irradiating primary X-rays onto a sample and an X-ray detector for detecting an X-ray from the sample, primary X-rays is irradiated onto a plastic sample from the X-ray generating part, the X-ray intensity of chlorine is obtained from the plastic sample by the X-ray detector, and the scattered X-ray intensity where the primary X-ray has been scattered by the plastic sample is obtained by the X-ray detector. A chlorine X-ray intensity ratio calculating means for dividing the X-ray intensity of chlorine by the scattered X-ray intensity to calculate a chlorine X-ray intensity ratio is provided. The calculated chlorine X-ray intensity ratio and the chlorine concentration in the plastic sample have positive correlation each other.

Abstract: A method for measuring a bone mineral density, by use of an x-ray image, in a bone mineral density measuring system, includes the steps of: (a) obtaining an X-ray image of bone; (b) setting a region of interest on the obtained X-ray image of bone; (c) calculating a background trend due to soft tissues, at a bone portion within the selected region of interest; and (d) calculating an index of the bone mineral density by removing the background trend due to the soft tissues, at the bone portion within the selected region of interest.

Abstract: A device (1; 1a) for the examination of at least one material sample (3; 3a, 3b, 3c) which can be inserted into the device (1; 1a) and is irradiated by means of electromagnetic waves (4), notably X-rays; in the measuring position the material sample (3; 3a, 3b, 3c) can be subjected to irradiation by means of the electromagnetic waves (4) and during a change of sample the beam path (4) can be interrupted by means of a closure element (8) which can be moved into the beam path. The device is constructed in such a manner that the closure element (8) is provided with a reference sample (9) on its side which faces the rays (4) in a manner such that a reference measurement can be performed thereon during a change of sample.

Abstract: A thin film analysis system includes multi-technique analysis capability. Grazing incidence x-ray reflectometry (GXR) can be combined with x-ray fluorescence (XRF) using wavelength-dispersive x-ray spectrometry (WDX) detectors to obtain accurate thickness measurements with GXR and high-resolution composition measurements with XRF using WDX detectors. A single x-ray beam can simultaneously provide the reflected x-rays for GXR and excite the thin film to generate characteristic x-rays for XRF. XRF can be combined with electron microprobe analysis (EMP), enabling XRF for thicker films while allowing the use of the faster EMP for thinner films. The same x-ray detector(s) can be used for both XRF and EMP to minimize component count. EMP can be combined with GXR to obtain rapid composition analysis and accurate thickness measurements, with the two techniques performed simultaneously to maximize throughput.

Abstract: A method is provided of analysing the composition of a semiconductor material (3) comprising irradiating the material with energy from an energy source (1) which energy is diffracted from the material, detecting one or more portions of the diffracted energy, and analysing the or each detected portion to obtain a parameter indicative of the intensity of the or each portion. The or each portion of the diffracted energy detected may be a quasi-forbidden reflection diffracted from the material, e.g. may be a (002) reflection diffracted from the material, or a (006) reflection. The detection of the or each portion of the diffracted energy may take place at one or more detection angles (9), or at all angles of reflection/transmission of the diffracted energy source, or at a range of angles around one or more detection angles. The energy source may comprise a beam of x-rays produced by an x-ray tube (2), and one or more detectors (4) may be used to detect the or each portion of the diffracted energy.

Abstract: Methods and apparatus are providing for characterizing thin films in an integrated circuit device. A target including multiple layers is scanned using an x-ray emission inducer. X-ray emissions characteristic of materials in the target are measured. In one example, multiple beam energies are used to conduct the scan. In another example, continuously varying beam energies are used. Information such as K-ratios or the intensity of the x-ray emissions is provided to determine the thickness and/or composition of layers in the scan target.