Abstract: Embodiments disclosed herein relate to circular lamp arrays for use in a semiconductor processing chamber. Circular lamp arrays utilizing one or more torroidal lamps disposed in a reflective trough and arranged in a concentric circular pattern may provide for improved rapid thermal processing. The reflective troughs, which may house the torroidal lamps, may be disposed at various angles relative to a surface of a substrate being processed.
Abstract: A rotary furnace for conditioning performs includes a heating wheel, a plurality of heating modules disposed on the heating wheel and a control device. Each heating module includes a heating chamber including at least one heating radiator adapted for irradiating the preform with infrared radiation, a holding and lifting device configured to lift or lower at least one of the preform and heating chamber so as to introduce the preform into the heating chamber and/or withdraw the preform from the heating chamber, and a temperature measurement device configured to measure a temperature of at least one of the preform and the heating chamber. The control device is configured to actuate the heating modules based on the measured temperature.
Type:
Application
Filed:
October 20, 2010
Publication date:
January 10, 2013
Applicant:
KRONES AG
Inventors:
Frank Winzinger, Christian Holzer, Wolfgang Schoenberger, Konrad Senn, Andreas Wutz
Abstract: A method, apparatus, and system including a reflecting device having a plurality of reflecting zones with associated reflectivities for reflecting light from a flash lamp, are described herein.
Abstract: An electric heater with a heat shield plate includes a heating body which is installed at a reflector and heated when electrical power is applied thereto. A safety net is provided which covers a front surface of the reflector and defines a space for accommodating the heating body therein. Further, the heat shield plate is installed at an upper edge of the reflector such that foreign materials are prevented from falling down onto the heating body through the safety net, and a plurality of through-holes are dispersedly formed in the heat shield plate in order to prevent the heat shield plate from being overheated. The heat shield plate includes a curved strap-like plate in which the plurality of through-holes are dispersedly formed, and fixing pieces which extend vertically from the curved plate on one lateral side thereof so that they are coupled to the reflector.
Abstract: The present invention relates to an electric heater with a heat shield plate. The electric heater of the present invention includes a heating body which is installed at a reflector 30 and heated when electrical power is applied thereto, and a safety net 31 which covers a front surface of the reflector and defines a space for accommodating the heating body therein. Further, the heat shield plate 80 is installed at an upper edge of the reflector 30 such that foreign materials are prevented from falling down onto the heating body through the safety net, and a plurality of through-holes 81 are dispersedly formed in the heat shield plate 80 in order to prevent the heat shield plate from being overheated.
Abstract: A reflector surface furnace includes an open ended ellipsoidal or near ellipsoidal reflector segment having two focal areas, there being a source of radiation in the one focal area, the material to be processed being placed into the other focal area, the furnace is completed as inventive improvement by two end segments of parabolic or near parabolic configurations each having an axis of symmetry that coincides with an axis of symmetry of the central ellipsoid and interfaces with the ellipsoid in these focal areas, the two parabolical end segments have focal points which namely coincide with the focal points of the ellipsoidal segment, but for control purposes there may be separation.