Radiant Heater Patents (Class 392/407)
  • Patent number: 11841275
    Abstract: The invention relates to a device (50) for analysing infrared radiation emitted or reflected by at least one surface (21) of a motor vehicle (1) passenger compartment (7), characterised in that said device comprises at least one infrared camera (51) arranged and oriented such as to measure at least part of the infrared radiation emitted or reflected by the at least one surface (21) of the passenger compartment (7).
    Type: Grant
    Filed: September 10, 2018
    Date of Patent: December 12, 2023
    Assignee: Valeo Systemes Thermiques
    Inventors: Daniel Neveu, Laurent Rede, Josselin Gour
  • Patent number: 11788763
    Abstract: Example air duct assemblies include a pliable air duct supported such that the duct is maintained in a generally expanded shape even when the duct is deflated. In some examples, a series of hangers suspend the duct from one or more cables, tracks or other type of overhead support. The hangers are spaced apart and distributed over the length of the duct, and each one contributes in pulling the duct taut in the duct's longitudinal direction.
    Type: Grant
    Filed: June 4, 2021
    Date of Patent: October 17, 2023
    Assignee: RITE-HITE HOLDING CORPORATION
    Inventors: Cary Pinkalla, Jeff Logic, Kevin J. Gebke, Nicholas L. Kaufmann
  • Patent number: 11729866
    Abstract: A heater according to an embodiment includes: a tubular portion; a sealing portion provided in each of both end portions of the tubular portion; a conductive portion provided inside each sealing portion; a heating portion provided inside the tubular portion, extending along a tube axis of the tubular portion, and including carbons; an inner lead provided in each sealing portion so that one end portion side is connected to the conductive portion and the other end portion side is exposed into the tubular portion; and a connection portion connected to each of both end portions of the heating portion inside the tubular portion. A bent portion is provided in an end portion opposite to the conductive portion in each inner lead. The bent portion is bent in a direction in which the sealing portions face each other and is provided inside a hole of the connection portion.
    Type: Grant
    Filed: February 27, 2020
    Date of Patent: August 15, 2023
    Assignee: Toshiba Lighting & Technology Corporation
    Inventor: Hiroki Nakano
  • Patent number: 11275059
    Abstract: An apparatus for in-situ calibration of a photoacoustic sensor is provided. The apparatus includes a calibration unit that includes at least one processor configured to calculate calibration information. A light emitter of the photoacoustic sensor is configured to emit an electromagnetic spectrum and the photoacoustic sensor is configured to provide at least two measurement signals based on at least two electromagnetic spectra. The calibration unit is configured to compare the at least two measurement signals to obtain the calibration information and apply the calibration information to the photoacoustic sensor to perform the in-situ calibration.
    Type: Grant
    Filed: December 2, 2019
    Date of Patent: March 15, 2022
    Inventors: Stefan Kolb, Alfons Dehe, Jochen Huber, Franz Jost, Horst Theuss, Juergen Woellenstein
  • Patent number: 11107708
    Abstract: A heating platform for heating a wafer is provided. The heating platform includes a support carrier, a detection module and a first heating module. The wafer is supported by the support carrier. The detection module is configured to monitor a surface condition of the wafer supported by the support carrier. The first heating module is disposed at a side of the support carrier. The first heating module includes a plurality of heating units electrically connected to the detection module, and the heating units is arranged in an array. A thermal treatment and a manufacturing method are further provided.
    Type: Grant
    Filed: January 10, 2018
    Date of Patent: August 31, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hsiao-Hua Peng, Hann-Ru Chen
  • Patent number: 10917942
    Abstract: Provided are a structure, a planar heater including the same, a heating device including the planar heater, and a method of preparing the structure. The structure includes a metal substrate, an insulating layer disposed on the metal substrate, an electrode layer disposed on the insulating layer, and an electrically conductive layer disposed on the electrode layer, wherein a difference in a coefficient of thermal expansion (CTE) between the metal substrate and the insulating layer is 4 parts per million per degree Kelvin change in temperature (ppm/K) or less.
    Type: Grant
    Filed: July 26, 2018
    Date of Patent: February 9, 2021
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Jinhong Kim, Seyun Kim, Haengdeog Koh, Doyoon Kim, Hajin Kim, Soichiro Mizusaki, Minjong Bae, Changsoo Lee
  • Patent number: 10852013
    Abstract: The present invention relates in general to a compact air handling system to supply conditioned air to a space including but not limited to, building rooms and data center server space. The present invention relates to the design and layout of the system for air handling unit system applications.
    Type: Grant
    Filed: August 16, 2017
    Date of Patent: December 1, 2020
    Assignee: REVOLVER 26 INVESTMENT CORPORATION
    Inventors: Lindsey Leckelt, Ryan Vetsch, Benoit Boudreau
  • Patent number: 10517794
    Abstract: A sauna heater, comprising two halogen tubes powered by alternating current, wired up in such a way that the current going through one halogen tube is opposite in phase from the current going through the other halogen tube, wherein the halogen tubes are parallel and close together so that the EMF emitted by the halogen tubes is canceled out.
    Type: Grant
    Filed: August 2, 2016
    Date of Patent: December 31, 2019
    Assignee: SAUNA WORKS INC.
    Inventor: Raleigh Duncan
  • Patent number: 10093059
    Abstract: An apparatus (1) for the heating of plastics material pre-forms (10) with a conveying device (2) which conveys the plastics material pre-forms (10) along a pre-set conveying path (T), with at least one heating element (4) which is arranged along the conveying path (P) of the plastics material pre-forms (10) and which heats the plastics material pre-forms (10), wherein in addition a cooling device is provided which cools the plastics material pre-forms (10) and/or at least one element of the apparatus (1) during the heating of the plastics material pre-forms (10) by acting upon them with a gaseous medium.
    Type: Grant
    Filed: December 9, 2013
    Date of Patent: October 9, 2018
    Assignee: Krones AG
    Inventor: Ulrich Lappe
  • Patent number: 9732964
    Abstract: The present invention relates to an electric oven. The electric oven according to an embodiment of the present invention includes a cavity which is provided with an oven chamber, a door for opening and closing alternatively the oven chamber, a carbon heater for providing radiant energy to the inside of a cooking room through the communication opening, a reflector for reflecting the radiant energy from the carbon heater to the inside of the cooking room, and a grate which is fixed to the reflector and is disposed on the communication opening and is provided with a forming section a part of which is formed toward the reflector. Therefore, the grate can be prevented from being damaged according to the electric oven of the present invention.
    Type: Grant
    Filed: February 11, 2011
    Date of Patent: August 15, 2017
    Assignee: LG ELECTRONICS INC.
    Inventors: Young Jun Lee, Hyun Jung Kim, Dong Seong Kwag
  • Patent number: 9636870
    Abstract: A powder transfer mechanism laminates powder layers containing water-soluble powder as a main component one by one at a modeling portion. An inkjet line head injects a water-based ink that dissolves the powder in an area of an uppermost layer of the powder layers laminated by the powder transfer mechanism, the area corresponding to a cross-sectional shape of a modeled object. Then, a heater heats the powder for each layer of the powder layers. Further, the heater heats the powder after the water-based ink is injected by the inkjet line head or before the water-based ink is injected by the inkjet line head. The present invention can be applied to a modeling apparatus, for example.
    Type: Grant
    Filed: May 14, 2009
    Date of Patent: May 2, 2017
    Assignee: Sony Corporation
    Inventors: Junichi Kuzusako, Masanobu Yamamoto, Akira Ookubo, Toshihiro Kamewa, Tomohide Koizumi, Kazuma Tamura, Takeshi Matsui
  • Patent number: 9552989
    Abstract: Methods and apparatus for processing substrates and controlling the heating and cooling of substrates are described. A radiation source providing radiation in a first range of wavelengths heats the substrate within a predetermined temperature range, the substrate being absorptive of radiation in a second range of wavelengths within the first range of wavelengths and within the predetermined temperature rang. A filter prevents at least a portion of radiation within the second wavelength range from reaching the substrate.
    Type: Grant
    Filed: August 28, 2013
    Date of Patent: January 24, 2017
    Assignee: Applied Materials, Inc.
    Inventors: Blake R. Koelmel, Norman L. Tam, Joseph M. Ranish
  • Patent number: 9082797
    Abstract: A substrate processing apparatus capable of increasing the life span of a lamp for heating a substrate is provided. The substrate processing apparatus includes: a light receiving chamber for processing a substrate; a substrate support unit inside the light receiving chamber; a lamp including an electrical wire, and a seal accommodating the electrical wire to hermetically seal the lamp with a gas therein, the lamp irradiating the substrate with a light; a lamp receiving unit outside the light receiving chamber to accommodate the lamp therein, the lamp receiving unit including a lamp connector connected to the lamp to supply an electric current through the electrical wire, a heat absorption member including a material having a thermal conductivity higher than that of the seal, and a base member fixing the heat absorption member; and an external electrical wire connected to the lamp connector to supply current to the lamp connector.
    Type: Grant
    Filed: June 28, 2012
    Date of Patent: July 14, 2015
    Assignee: Hitachi Kokusai Electric, Inc.
    Inventors: Yukinori Aburatani, Toshiya Shimada, Kenji Shinozaki, Tomihiro Amano, Hiroshi Ashihara, Hidehiro Yanai, Masahiro Miyake, Shin Hiyama
  • Publication number: 20150147709
    Abstract: A work is subjected to a heat treatment in a heat-treating furnace. First, the work is carried into the heat-treating furnace. The work in the heat-treating furnace is immersed in a heat source solvent. In the heat-treating furnace, a superheated steam atmosphere is formed. The work is exposed in the heat-treating furnace under the superheated steam atmosphere. Then, the work is carried out of the heat-treating furnace.
    Type: Application
    Filed: June 4, 2013
    Publication date: May 28, 2015
    Applicant: TOYOTA JIDOSHA KABUSHIKI KAISHA
    Inventors: Keisuke Isomura, Shinya Mizuno, Noriyuki Ueno, Takehito Kobayashi
  • Patent number: 9036987
    Abstract: A device for heating a bearing race mounted on a shaft including a quartz halogen lamp for heating the bearing race and a reflector for reflecting heat from the quartz halogen lamp towards the bearing race.
    Type: Grant
    Filed: March 14, 2013
    Date of Patent: May 19, 2015
    Assignee: General Electric Company
    Inventor: Ulrich Werner Neumann
  • Patent number: 9025942
    Abstract: A radiant heating device for a vehicle includes a radiant heater that radiates radiant heat toward a passenger and is provided together with an air-conditioner that selectively introduces air outside a passenger compartment or air inside the passenger compartment and then supplies conditioned air generated from the introduced air into the passenger compartment. The radiant heating device includes a controller that differentiates a radiant energy amount of the radiant heater when the introduced air into the air-conditioner is the air outside the passenger compartment from when the introduced air is the air inside the passenger compartment. According to the radiant heating device, the passenger can be provided with warm comfort feeling both in an outside air intake mode and in an inside air intake mode of the air-conditioner.
    Type: Grant
    Filed: May 13, 2011
    Date of Patent: May 5, 2015
    Assignee: Calsonic Kansei Corporation
    Inventor: Naohisa Kamiyama
  • Patent number: 9022298
    Abstract: A system may include a tube through which hot fluid is transported from one end to another, wherein the tube radiates heat energy and transfers heat energy to surrounding air by convection. The system may also include a reflector that reflects the radiated heat and a hood that captures the heat energy from the surrounding air through convection, wherein the hood radiates the captured heat energy. The reflector may include a bi-involute curved surface.
    Type: Grant
    Filed: September 21, 2009
    Date of Patent: May 5, 2015
    Assignee: Reznor LLC
    Inventors: Jean-Pierre Catteau, Gerald Capaldini
  • Patent number: 8983281
    Abstract: A method for cooling IR emitters in a heating device for warming preforms before processing them in a stretch blow or blow molding device. IR emitters are arranged on at least one sidewall of the heating device parallel to the transport direction of the preforms, with at least one back reflector arranged on the side of the IR emitters facing away from the performs. The preforms to be warmed include a mouth region and a longitudinal axis and the mouth region is cooled with a first coolant flow. An almost vertical second coolant flow passes between the IR emitters and the at least one back reflector, this second coolant flow being at least partially fed by the almost horizontal first coolant flow and/or is united with the almost horizontal first coolant flow. A heating device and cooling device are also provided.
    Type: Grant
    Filed: April 8, 2011
    Date of Patent: March 17, 2015
    Assignee: Krones AG
    Inventors: Wolfgang Schoenberger, Christian Holzer, Simon Fischer
  • Patent number: 8971695
    Abstract: A heater is provided with a heater core having a source of thermal energy in a heat exchange relationship with a heat exchanger. A fan moves air through the heater core from an air inlet to an air outlet. The heater core is thermally insulated by an air jacket from an exterior case.
    Type: Grant
    Filed: April 7, 2010
    Date of Patent: March 3, 2015
    Assignee: Suarez Corporation Industries
    Inventors: Neil R. Tyburk, Patrick M. Nolan
  • Publication number: 20150047777
    Abstract: The present invention discloses a heat radiator, especially an infrared radiator, having at least one radiation source by means of which supplied electrical energy is convertible into heat radiation, as well as a control. This control comprises at least one frequency converter having a first, a second and a third output so that between the first and the third output a first alternating current is providable and between the second and the third output a second alternating current is providable by means of which the at least one radiation source is operable.
    Type: Application
    Filed: August 12, 2014
    Publication date: February 19, 2015
    Inventors: Heiko Priem, Thomas Köhler
  • Publication number: 20150037016
    Abstract: A feeding fluid warming system broadly includes a liner bag and an ultraviolet light warming device. The liner bag includes an inner bag that receives feeding fluid therein and an outer bag that holds warming fluid therein. The warming device includes a container, an ultraviolet light source, a temperature sensor, and a controller. The container receives the liner bag therein and the ultraviolet light source heats the warming fluid, which in turn heats the feeding fluid to temperatures within a thermal neutral zone so as to effectively and consistently maintains the fluids at these temperatures in addition to sterilizing the warming fluid.
    Type: Application
    Filed: August 4, 2014
    Publication date: February 5, 2015
    Inventors: Scott Norman, Mark Petheram, Christian Darabant, Anthony Hash
  • Patent number: 8945435
    Abstract: The present invention relates to new compositions of matter, particularly metals and alloys, and methods of making such compositions. The new compositions of matter exhibit long-range ordering and unique electronic character.
    Type: Grant
    Filed: October 9, 2012
    Date of Patent: February 3, 2015
    Assignee: Electromagnetics Corporation
    Inventor: Christopher J. Nagel
  • Patent number: 8948579
    Abstract: Provided is an infrared radiation cooker in which heat from an infrared lamp is directly applied onto food being grilled, to thus cook the upper and inner parts of the food, as well as onto a rotatable pan, to thus simultaneously cook the lower part of the food. As a result, the food cooks evenly throughout without burning or creating residual odors from above to below as well as from outer to inner, and further the rotatable pan of respectively different structures can be selected depending on an intended cooking purpose, to thereby adjust height of the rotatable pan, which changes a heat intensity, to thus vary a cooking style, and which can be used to boil, grill or roast foods as one would like.
    Type: Grant
    Filed: January 16, 2009
    Date of Patent: February 3, 2015
    Inventor: Jin-Hee Lee
  • Publication number: 20150016810
    Abstract: Infrared heating apparatus irradiates a member to be heated with infrared rays from infrared source to heat the member, and sets heated region of the member to be heated with use of shielding member that restricts transmission of infrared rays. The infrared heating apparatus includes: a pair of holding members each having a plate shape that allow the infrared rays to be transmitted therethrough being disposed to intersect with an irradiation direction of the infrared rays between the infrared source and the member to be heated, and the shielding member being interposed and held between the holding members, and being a metal sheet, metal foil or a metal film, which has a prescribed shape that restricts transmission of the infrared rays, and the holding members being placed on each other to be in close contact with each other while the shielding member is interposed between the holding members.
    Type: Application
    Filed: June 25, 2012
    Publication date: January 15, 2015
    Applicant: TOYODA IRON WORKS CO., LTD.
    Inventor: Keitaro Mineoka
  • Publication number: 20150016809
    Abstract: A sterilized system component is disclosed for holding a container of neonate nutritional liquid during a warming of the nutritional liquid. Structurally, the system component includes a pouch-shaped receptacle having a water-filled enclosure. The receptacle includes an outer bag and an inner bag. The inner bag is conformed to be received into the outer bag with the open end of the inner bag affixed to the periphery of the outer bag opening to create a permanent, fluid-tight seal. This permanent seal then creates an enclosed fluid chamber between the inner bag and the outer bag that can be filled with warm water through a fluid port that is provided in the outer bag. Prior to the warming procedure, both the receptacle and the water that is used need are sterilized using ultraviolet radiation from a germicidal lamp.
    Type: Application
    Filed: August 14, 2013
    Publication date: January 15, 2015
    Applicant: Angele Innovations, LLC
    Inventor: Janice M. Shields
  • Publication number: 20150001202
    Abstract: An apparatus for treating a disc-shaped article comprises a spin chuck and at least three individually controllable infrared heating elements. The infrared heating elements are mounted in a stationary manner with respect to rotation of said spin chuck. The infrared heating elements are arranged in a nested configuration so as to define individually controllable inner, middle and outer heating zones adjacent a disc-shaped article when positioned on the spin chuck.
    Type: Application
    Filed: July 1, 2013
    Publication date: January 1, 2015
    Inventors: Kevin Matthew CRABB, Philipp ENGESSER, Vijay Kumar BADAM
  • Publication number: 20140370268
    Abstract: Rapidly curable electrically conductive clear coatings are applied to substrates. The electrically conductive clear coating includes to clear layer having a resinous binder with ultrafine non-stoichiometric tungsten oxide particles dispersed therein. The clear coating may be rapidly cured by subjecting the coating to infrared radiation that heats the tungsten oxide particles and surrounding resinous binder. Localized heating increases the temperature of the coating to thereby thermally cure the coating, while avoiding unwanted heating of the underlying substrate.
    Type: Application
    Filed: June 12, 2013
    Publication date: December 18, 2014
    Inventors: Mark P. Bowman, Lawrence G. Anderson, Gordon L. Post
  • Patent number: 8913884
    Abstract: The present invention relates to a heater block for a rapid thermal processing apparatus, and more particularly, to a heater block in which heating lamps are densely arranged in a tessellation. The tessellation has a structure such that the plurality of heating lamps are arranged at right angles to form a zigzag line, and the thus-formed zigzagged line is repeated such that the zigzagged line is combined with the adjacent zigzagged line. According to the present invention, a temperature gradient caused by a void between heating lamps is prevented, and heating lamps are densely arranged to increase heat density for a heat radiation area as opposed to conventional heater blocks, thus achieving improved heat treatment efficiency using less energy.
    Type: Grant
    Filed: August 4, 2010
    Date of Patent: December 16, 2014
    Assignee: AP Systems Inc.
    Inventors: Chang Kyo Kim, Tae Jong Ki, Choul Soo Kim, Ki Nam Kim
  • Publication number: 20140355971
    Abstract: An infrared heat lamp (200) includes a heating element (214) wound about and supported by an inner tubular member (224) and an outer tubular member (202) enclosing the inner tubular member (224) and heating element (214). The outer tubular member (202) includes an open first end (204) having a flange member (212) defined along an outer periphery thereof and a dome-like second end (206). The infrared heat lamp (200) further includes a base member (230) having first and second discrete portions (232, 234) secured to one another by a fastener (238) and retaining the flange member (212) of the open first end (204) of the outer tubular member (202) therebetween.
    Type: Application
    Filed: May 30, 2013
    Publication date: December 4, 2014
    Applicant: OSRAM SYLVANIA INC.
    Inventors: Arturo DeSantiago, Alfonso Barrios, German Calvo
  • Patent number: 8901463
    Abstract: A thermal management device is presently disclosed. The thermal management device includes an insulator with a maximum use temperature of at least 200 degrees Celsius, and a heating element having at least one heater leg, where the heater leg contacts the insulator and is configured to supply thermal energy. The heating element also has lead wires configured to provide a parallel electrical connection between the heater leg and a current source.
    Type: Grant
    Filed: September 16, 2011
    Date of Patent: December 2, 2014
    Assignee: General Electric Company
    Inventors: Kristopher John Frutschy, Mehmet Demiroglu, Roger Bull, Paul Sudworth, Mathew Maury
  • Patent number: 8901518
    Abstract: Embodiments of the present invention provide a heating assembly using a heat exchange device to cool a plurality of heating element. The heating assembly includes a plurality of heating elements, a cooling element having one or more cooling channels for receiving cooling fluid therein, and a heat exchange device disposed between the plurality of heating elements and the cooling element. The heat exchange device comprises a hot interface disposed adjacent to and in thermal contact with the plurality of heating elements and a cold interface disposed adjacent to and in thermal contact with the cooling element.
    Type: Grant
    Filed: March 7, 2013
    Date of Patent: December 2, 2014
    Assignee: Applied Materials, Inc.
    Inventors: Joseph M. Ranish, Aaron Muir Hunter
  • Publication number: 20140348496
    Abstract: A heater lamp for fixation and a method of producing the heater lamp are provided. The heater lamp includes a heat generator and a protective casing to cover the heat generator, in which an amount of carbon in an external surface of the protective casing as detected by an X-ray photoelectron spectroscopic method is equal to or less than 12 atomic %. The method of producing a heater lamp for fixation includes preparing a heat generator; preparing a protective casing to cover the heat generator; and heating the heat generator in an atmosphere containing oxygen gas.
    Type: Application
    Filed: May 20, 2014
    Publication date: November 27, 2014
    Inventors: Toshiyuki KABATA, Hideyuki YASUFUKU, Hiroyuki SHIMADA, Kazumi KUWATA, Takeshi SHIBUYA
  • Patent number: 8897631
    Abstract: An annealing apparatus includes heating sources provided to face a wafer W, the heating sources having LEDs emitting lights to the wafer; light-transmitting members for transmitting the lights emitted from the LEDs; and cooling members made of aluminum and provided to directly contact with the heating sources, respectively. The heating sources include a plurality of LED arrays having supporters made of AlN, each having one surface on which the LEDs are adhered by using a silver paste; and other surface on which thermal diffusion members made of copper are adhered by using a solder. The LED arrays are fixed to the cooling member by using screws via a silicone grease.
    Type: Grant
    Filed: January 19, 2009
    Date of Patent: November 25, 2014
    Assignee: Tokyo Electron Limited
    Inventors: Shigeru Kasai, Hiroyuki Miyashita, Tomohiro Suzuki, Masatake Yoneda, Kazuhiro Ooya
  • Patent number: 8866051
    Abstract: A device and a method are provided, for shrinking a protective element (101) shrinkable by means of the supply of heat onto an optical waveguide (100). The method involves generating thermal radiation, reflecting it and focusing it onto a focus zone in which the protective element (101) is held. The device contains a heating element (10), which generates thermal radiation, a reflector (30), which focuses the thermal radiation emitted by the heating element onto the focus zone, and a mount (20), by means of which the protective element (101) can be held in the focus zone.
    Type: Grant
    Filed: October 4, 2005
    Date of Patent: October 21, 2014
    Assignee: CCS Technology Inc.
    Inventor: Bert Zamzow
  • Patent number: 8861944
    Abstract: In light-irradiation heating with a total irradiation time of one second or less, two-stage irradiation is performed, including a first stage of light irradiation of a semiconductor wafer, which irradiation produces an output waveform that reaches a peak at a given emission output; and a second stage of supplemental light irradiation of the semiconductor wafer, which irradiation is started after the peak, producing an emission output smaller than the above given emission output. The emission output in the second stage is two thirds or less than the above given emission output at the peak. The first-stage light-irradiation time is between 0.1 and 10 milliseconds, and the second-stage light-irradiation time is 5 milliseconds or more. This allows the temperature of the semiconductor wafer even at a somewhat greater depth below the surface to be raised to some extent while allowing the surface temperature to be maintained at a generally constant processing temperature.
    Type: Grant
    Filed: October 22, 2012
    Date of Patent: October 14, 2014
    Assignee: Dainippon Screen Mfg. Co., Ltd.
    Inventors: Hiroki Kiyama, Kenichi Yokouchi
  • Patent number: 8859443
    Abstract: The first flash irradiation is performed on a semiconductor wafer preheated to 500° C. to heat a front surface of the semiconductor wafer. Thereafter, the second flash irradiation is performed to reheat the front surface of the semiconductor wafer before the temperature of the front surface of the semiconductor wafer becomes equal to the temperature of a back surface of the semiconductor wafer. Thus, the second flash irradiation is performed before the temperature of the front surface of the semiconductor wafer falls. Even if less energy is consumable by the second flash irradiation, the efficiency of heating of the front surface of the semiconductor wafer resulting from each iteration of the flash irradiation is improved.
    Type: Grant
    Filed: February 6, 2012
    Date of Patent: October 14, 2014
    Assignee: Dainippon Screen Mfg. Co., Ltd.
    Inventor: Kenichi Yokouchi
  • Publication number: 20140301724
    Abstract: A heater for human comfort and homeostasis is made by using a thermal laser. The heat from the thermal laser is pointed precisely with optics such as lenses and reflectors. The apparatus may be pointed with an automated pan-and-tilt. It may be targeted by a camera or similar sensor. It can turn its power levels up or down, or off, in response to the data from the sensor. The precision with which the source can be aimed leads to a higher proportion of photons hitting the target than with current heaters. This heater also maintains the power density of the photons impinging on the target or anything else within safety limits.
    Type: Application
    Filed: April 6, 2013
    Publication date: October 9, 2014
    Inventor: David Silliman Graham
  • Publication number: 20140290929
    Abstract: A heat sink is disclosed including a cold plate, a plurality of heat pipes, a plurality of fins, and a heating unit. The cold plate has a first surface adapted to thermally couple to a heat source. Each of the heat pipes has an evaporator section thermally coupled to the cold plate and a condenser section coupled to the evaporator section. The plurality of fins are thermally coupled to the condenser sections of the plurality of heat pipes. The heating unit is adapted to heat condenser sections of a subset of the plurality of heat pipes.
    Type: Application
    Filed: March 7, 2014
    Publication date: October 2, 2014
    Applicant: GE Energy Power Conversion Technology Ltd
    Inventors: Daniel Francis Opila, Stephan Fatschel
  • Publication number: 20140270735
    Abstract: Apparatus for providing pulsed or continuous energy in a process chamber are provided herein. The apparatus may include: a process chamber body of the semiconductor process chamber; one or more solid state source arrays providing pulsed or continuous energy to the process chamber, wherein each of the one or more solid state source arrays include a substrate having a plurality of solid state light sources disposed on a first surface of the substrate, wherein the plurality of solid state light sources are connected in series and in a recursive pattern on the first surface of the substrate, and a heat sink coupled to a second surface of the substrate configured to remove heat from the substrate; and a power source coupled to the one or more solid state source arrays to electrically power the plurality of solid state sources.
    Type: Application
    Filed: February 18, 2014
    Publication date: September 18, 2014
    Applicant: APPLIED MATERIALS, INC.
    Inventors: JOHN GERLING, JOSEPH M. RANISH, OLEG V. SEREBRYANOV, JOSEPH JOHNSON
  • Patent number: 8824875
    Abstract: There is provided a method for heating a part within a processing chamber of a semiconductor manufacturing apparatus having a substrate in the processing chamber and performing a process on the substrate. The heating method includes generating heating lights which is generated by a heating light source provided outside the processing chamber and has a wavelength band capable of passing through a first part in the processing chamber and being absorbed into a second part in the processing chamber made of a material different from that of the first part, and heating the second part in the processing chamber by passing the heating lights through the first part in the processing chamber and irradiating the heating lights to the second part in the processing chamber.
    Type: Grant
    Filed: February 25, 2011
    Date of Patent: September 2, 2014
    Assignee: Tokyo Electron Limited
    Inventors: Jun Yamawaku, Chishio Koshimizu, Tatsuo Matsudo
  • Publication number: 20140216643
    Abstract: A method of heating includes a process of forming a layer to be heated on one surface of a light absorption layer; and a process of heating the light absorption layer by irradiating light onto the other surface of the light absorption layer. The other surface of the light absorption layer is a surface opposite to the one surface of the light absorption layer.
    Type: Application
    Filed: January 22, 2014
    Publication date: August 7, 2014
    Applicant: RICOH COMPANY, LTD.
    Inventor: Xianfeng CHEN
  • Publication number: 20140212117
    Abstract: A capacitor, a coil, a flash lamp, and a switching element such as an IGBT are connected in series. A controller outputs a pulse signal to the gate of the switching element. A waveform setter sets the waveform of the pulse signal, based on the contents of input from an input unit. With electrical charge accumulated in the capacitor, a pulse signal is output to the gate of the switching element so that the flash lamp emits light intermittently. A change in the waveform of the pulse signal applied to the switching element will change the waveform of current flowing through the flash lamp and, accordingly, the form of light emission, thereby resulting in a change in the temperature profile for a semiconductor wafer.
    Type: Application
    Filed: March 28, 2014
    Publication date: July 31, 2014
    Inventor: Tatsufumi Kusuda
  • Patent number: 8790303
    Abstract: Surgical fluid management systems and methods of operating surgical fluid management systems which may provide one or more functions associated with suction, irrigation, distention, deficit monitoring, infusion, fluid warming, and the like. Some example embodiments may include infra-red lamps arranged to heat fluid flowing through a disposable cartridge. Some example embodiments may provide a three-dimensional fluid path through the cartridge and/or multi-stage heating capabilities. Some example fluid management systems may be selectable between pressure control and flow control modes.
    Type: Grant
    Filed: March 9, 2010
    Date of Patent: July 29, 2014
    Assignee: Thermedx, LLC
    Inventors: Jeffrey B. Williams, Kenneth R. Pyles, Steven J. Torer, Edward R. Donath
  • Patent number: 8781309
    Abstract: A capacitor, a coil, a flash lamp, and a switching element such as an IGBT are connected in series. A controller outputs a pulse signal to the gate of the switching element. A waveform setter sets the waveform of the pulse signal, based on the contents of input from an input unit. With electrical charge accumulated in the capacitor, a pulse signal is output to the gate of the switching element so that the flash lamp emits light intermittently. A change in the waveform of the pulse signal applied to the switching element will change the waveform of current flowing through the flash lamp and, accordingly, the form of light emission, thereby resulting in a change in the temperature profile for a semiconductor wafer.
    Type: Grant
    Filed: March 21, 2013
    Date of Patent: July 15, 2014
    Assignee: Dainippon Screen Mfg. Co., Ltd.
    Inventor: Tatsufumi Kusuda
  • Patent number: 8761587
    Abstract: Embodiments of the present invention provide apparatus and method for reducing heating source radiation influence in temperature measurement during thermal processing. In one embodiment of the present invention, background radiant energy, such as an energy source of a thermal processing chamber, is marked within a selected spectrum, a characteristic of the background is then determined by measuring radiant energy at a reference wavelength within the selected spectrum and a comparing wavelength just outside the selected spectrum.
    Type: Grant
    Filed: May 28, 2013
    Date of Patent: June 24, 2014
    Assignee: Applied Materials, Inc.
    Inventors: Joseph M. Ranish, Blake Koelmel, Aaron Muir Hunter
  • Patent number: 8737827
    Abstract: A high emissivity coating applied to a sauna heating element and a method for fabricating a sauna heating element with a high emissivity coating is described. In one illustrative embodiment, a sauna heating element comprises a substrate, and a film coating applied to the substrate, the film coating applied as a first liquid layer and a second powder layer. In another illustrative embodiment, a process is provided for fabricating a sauna heating element with a high emissivity coating.
    Type: Grant
    Filed: May 26, 2010
    Date of Patent: May 27, 2014
    Assignee: Sunlighten, Inc.
    Inventors: Aaron M. Zack, Ronald James Lewarchik
  • Patent number: 8731385
    Abstract: An oven is configured with a cooking cavity for receiving a cooking load, a circuit for current supplied by one or more stored energy devices such as rechargeable batteries, and a heater comprising one or more radiant lamps to be driven by the current, the one or more radiant lamps being sized and positioned for heating the cooking load. The lamps are driven by current discharged from the batteries to radiantly heat a cooking load. An application of this stove configuration is in a toaster which is capable of toasting slices of bread in a matter of seconds.
    Type: Grant
    Filed: February 27, 2012
    Date of Patent: May 20, 2014
    Assignee: De Luca Oven Technologies, LLC
    Inventor: Nicholas P. De Luca
  • Patent number: 8724976
    Abstract: Embodiments of the invention generally contemplate an apparatus and method for monitoring and controlling the temperature of a substrate during processing. One embodiment of the apparatus and method takes advantage of an infrared camera to obtain the temperature profile of multiple regions or the entire surface of the substrate and a system controller to calculate and coordinate in real time an optimized strategy for reducing any possible temperature non-uniformity found on the substrate during processing.
    Type: Grant
    Filed: March 29, 2012
    Date of Patent: May 13, 2014
    Assignee: Applied Materials, Inc.
    Inventors: Nir Merry, Stephen Moffatt, Kailash Patalay, David Keith Carlson
  • Patent number: 8723087
    Abstract: A method of manufacturing a carbon-fiber pipe which is hollow and has a net shape, by knitting carbon fibers and general fibers, applying carbon or ceramic, and heating to burn the general fibers, and a carbon fiber heating lamp using the carbon-fiber pipe are provided. The carbon fiber heating lamp includes a vacuum glass tube, a tubular carbon fiber pipe, which is knitted using carbon fiber and general fiber as a raw material and has a hollow part, and a heating element. The heating element includes the tubular carbon fiber pipe which has a predetermined length and is installed in the vacuum glass tube, and generates heat using power supplied from an exterior through both terminals provided on an outer portion of the vacuum glass tube.
    Type: Grant
    Filed: December 30, 2005
    Date of Patent: May 13, 2014
    Assignee: LG Electronics Inc.
    Inventor: Jeong-youn Cho
  • Patent number: 8724977
    Abstract: Embodiments of the present invention provide apparatus and method for reducing non uniformity during thermal processing. One embodiment provides an apparatus for processing a substrate comprising a chamber body defining a processing volume, a substrate support disposed in the processing volume, wherein the substrate support is configured to rotate the substrate, a sensor assembly configured to measure temperature of the substrate at a plurality of locations, and one or more pulse heating elements configured to provide pulsed energy towards the processing volume.
    Type: Grant
    Filed: July 13, 2012
    Date of Patent: May 13, 2014
    Assignee: Applied Materials, Inc.
    Inventors: Wolfgang R. Aderhold, Aaron Muir Hunter, Joseph M. Ranish