Abstract: A system (10) and method for positioning a hot glass sheet G on a roll conveyor 24 for further processing utilizes sensors (60, 62, 64) for sensing a conveyed glass sheet position and a turntable (72) having an actuator (74) for providing axial shifting of rolls (26) supported on the turntable to properly locate the glass sheet G, without any sliding between the glass sheet and the conveyor rolls, both rotationally and laterally for further processing which is specifically disclosed as forming.

Abstract: A feed mechanism to feed objects for insertion into tobacco industry products including a rotary member for receiving objects, the rotary member having a plurality of channels, each channel being adapted so that in use objects assemble in a row in the channel which rotates with the rotary member, each channel having an outlet for dispensing an object from the channel, and a pneumatic mechanism configured to hold an object in a row prior to the object being dispensed.

Abstract: A handling device includes a support seat defining an inserting hole, a first driving member, and a handling assembly. The first driving member is assembled to the support seat and is aligned with the inserting hole. The handling assembly includes a mounting seat, a transmission subassembly, a second driving member, and a suction subassembly. The mounting seat is assembled to a side of the support seat opposite to the first driving member, the mounting seat is adjacent to the inserting hole. The transmission subassembly is assembled to the support seat. The second driving member is assembled to the mounting seat and connected to the transmission subassembly. The suction subassembly is assembled to the transmission subassembly. Wherein the first driving member extends through the inserting hole and supports a workpiece, the suction subassembly sucks the workpiece, the second driving member drives the transmission subassembly to handle the workpiece to a workstation.

Abstract: A laboratory sample distribution system is presented. The laboratory sample distribution system comprises a plurality of container carriers. The container carriers each comprise at least one magnetically active device such as, for example, at least one permanent magnet, and carry a sample container containing a sample. The system further comprises a transport plane to carry the multiple container carriers and a plurality of electro-magnetic actuators stationary arranged below the transport plane. The electro-magnetic actuators move a container carrier on top of the transport plane by applying a magnetic force to the container carrier. The system also comprises at least one transfer device to transfer a sample item, wherein the sample item is a container carrier, a sample container, part of the sample and/or the complete sample, between the transport plane and a laboratory station such as, for example, a pre-analytical, an analytical and/or a post-analytical station.

Abstract: In an embodiment, the present invention discloses a EUV cleaner system and process for cleaning a EUV carrier. The euv cleaner system comprises separate dirty and cleaned environments, separate cleaning chambers for different components of the double container carrier, gripper arms for picking and placing different components using a same robot handler, gripper arms for holding different components at different locations, horizontal spin cleaning and drying for outer container, hot water and hot air (70 C) cleaning process, vertical nozzles and rasterizing megasonic nozzles for cleaning inner container with hot air nozzles for drying, separate vacuum decontamination chambers for outgassing different components, for example, one for inner and one for outer container with high vacuum (e.g., <10?6 Torr) with purge gas, heaters and RGA sensors inside the vacuum chamber, purge gas assembling station, and purge gas loading and unloading station.

Abstract: 1.

Abstract: A substrate support apparatus has a substrate holding portion to be inserted into a center hole formed in a substrate to support the substrate in a vertical orientation, and includes a first connecting plate connected to the substrate holding portion and a second connecting plate which faces the first connecting plate and is connectable to a transport robot that transports the substrate to a substrate holder. In addition, a shock absorbing member is arranged between the first connecting plate and the second connecting plate so as to allow a movement of the first connecting plate relative to the second connecting plate in horizontal and vertical directions. Support members are configured to connect the first connecting plate to the second connecting plate while allowing the movement of the first connecting plate relative to the second connecting plate.

Abstract: A cryopreservation vessel of the present invention includes a vessel body which holds a low-temperature liquefied gas, a cap which closes an opening section of the vessel body and has a plurality of through holes that are formed so as to pass through in a vertical direction, and ampoule storing tools which are housed so as to be able to pass through the through holes of the cap, and the ampoule storing tools are each comprised of a support pillar and a plurality of ampoule storing sections which are equipped with the support pillar so as to be arrayed in a vertical direction of the support pillar.

Abstract: An integrated grip arm for transfer reticles and carrier boxes is disclosed for improving throughput, yield and reliability of transport equipment. The integrated grip arm comprises a plurality of grippers to accommodate a plurality of reticles and carrier boxes without the need of separate arm or gripper changes. The integrated grip arm can further comprise sensor or means to select the right gripper for the right reticles or carrier boxes.

Abstract: A vacuum processing apparatus includes a plurality of vacuum containers; a vacuumized transfer unit connected with the vacuum containers and having a transfer chamber; a plurality of lock chambers connected to the vacuumized transfer unit; a vacuumized transferring section arranged in the transfer chamber to transfer the sample between each of the lock chambers and each of the processing chambers inside the plurality of vacuum containers; an atmospheric transfer container having a space through which the sample is transferred under the atmospheric pressure; an atmospheric transfer unit arranged in the atmospheric transfer container and adapted to transfer the sample from a cassette; and a controller operative on the basis of schedule information of a plurality of operations to adjust the operations, the information including times of stagnation of the plurality of samples and set therefor.

Abstract: A substrate treatment system includes a plurality of treatment apparatuses, a position adjustment apparatus adjusting a center position of the substrate, a substrate transfer apparatus transferring the substrate to the treatment apparatuses and the position adjustment apparatus, and a control unit controlling operations of the apparatuses. The substrate transfer apparatus includes an arm part curved along a peripheral edge portion of the substrate with a radius of curvature larger than a radius of the substrate, and a holding part projecting inward from the arm part and holding a rear surface of the substrate. The position adjustment apparatus includes a mounting table which holds a central portion of the rear surface of the substrate and is rotatable and horizontally movable. The control unit controls the mounting table such that the center position of the substrate held on the mounting table is aligned with a center position of the arm part.

Abstract: A glass-plate working apparatus includes a glass-plate supporting portion 20a of a feed conveyor 7, a glass-plate supporting portion 20b of a cutting section 2, a glass-plate supporting portion 20c of a bend-breaking section 4, a glass-plate supporting portion 20d of a grinding section 3, and a glass-plate supporting portion 20e of a discharge conveyor 8; a cutting head 9, a bend-breaking device 66, and a grinding head 10 for processing glass plates 5 which are respectively supported by the supporting portions 20b, 20c, and 20d; and a transporting device 89 for transporting the glass plate 5 on the supporting portion 20a onto the supporting portion 20b, the glass plate 5 on the supporting portion 20b onto the supporting portion 20c, the glass plate 5 on the supporting portion 20c onto the supporting portion 20d, and the glass plate 5 on the supporting portion 20d onto the supporting portion 20e, respectively.

Abstract: For the transport of a substrate from a cassette to a back surface cleaning processing unit in a cleaning processing block, a transfer robot rotates the substrate through 90 degrees from a horizontal attitude in which the front surface of the substrate is positioned to face upward into a standing attitude while transporting the substrate out of a cassette to a substrate passing part, and passes the substrate in the standing attitude to the substrate passing part. The substrate passing part holds the substrate in the standing attitude. A main transport robot receives the substrate held in the standing attitude. The main transport robot rotates the substrate through 90 degrees from the standing attitude into a horizontal attitude in which the back surface of the substrate is positioned to face upward while transporting the substrate from the substrate passing part to the back surface cleaning processing unit.

Abstract: A grasping device includes a first member, a fixed member fixed to the first member, a first finger member fixed to one end of the first member, a slide mechanism fixed to the first member, a first slider member slidably attached to the slide mechanism, a second member fixed to the first slider member at one end thereof, a guide mechanism fixed to the second member, a second slider member slidably attached to the guide mechanism, a second finger member fixed to the second slider member, and a displacement increasing mechanism that transmits a relative displacement between the fixed member and the first slider member to the second slider member.

Abstract: The invention is a transfer arrangement for transporting and/or positioning and/or aligning a workpiece and is used in particular in presses or press lines. A cross member can be moved and/or pivoted in a plurality of directions in space. The movement of the cross member is controlled or regulated by means of a control unit and by means of a corresponding number of axial drives. A servomotor is located on the cross member. A base support can be coupled to the cross member and a drivable shaft is arranged on the base support. A coupling arrangement of the cross member interacts with a mating connecting means on the base support to establish the mechanical fastening. A coupling means interacts with a mating coupling means to establish a rotational connection between the servomotor and the drivable shaft. A workpiece gripping arrangement is present on the base support.

Abstract: An integrated grip arm for transfer reticles and carrier boxes is disclosed for improving throughput, yield and reliability of transport equipment. The integrated grip arm comprises a plurality of grippers to accommodate a plurality of reticles and carrier boxes without the need of separate arm or gripper changes. The integrated grip arm can further comprise sensor or means to select the right gripper for the right reticles or carrier boxes.

Abstract: A workpiece transport device for transporting a workpiece having a substrate layer and a layer to be processed on a portion of the substrate layer is provided. This workpiece transport device has a workpiece holding mechanism arranged to operate so as to hold and release the workpiece. The workpiece holding mechanism has at least one tapered workpiece holding surface on which the substrate layer of the workpiece is held in a state where the layer to be processed is positioned below the substrate layer. The tapered workpiece holding surface is formed so that a clearance equal to or larger than a predetermined distance R exists between the workpiece holding surface and the layer to be processed of the workpiece when the workpiece is held by the workpiece holding mechanism.

Abstract: A manufacturing system includes a gantry module, having an end effector, for moving workpieces from a conveyor system to a working area, such as a swap module. The swap module removes a matrix of processed workpieces from a load lock and place a matrix of unprocessed workpieces in its place. The processed workpieces are then moved by the gantry module back to the conveyor. Due to the speed of operation, the end effector may build up excessive electrostatic charge. To remove this built up charge, grounded electrically-conductive brushes are strategically positioned so that, as the end effector moves during normal operation, it comes in contact with these brushes. This removes this built up charge on the end effector, without affecting throughput. In another embodiment, the end effector moves over the brushes while the swap module is moving matrix to and from the load lock.

Abstract: A substrate processing apparatus includes a loading/unloading unit including a mounting table on which a storage container accommodating a target substrate is mounted; a processing unit set including a plurality of processing units that perform a process on the target substrate; a plurality of transit units that transit the target substrate between the loading/unloading unit and the processing unit set; a selection unit that receives input for selecting a storage container for loading, a storage container for unloading, and a processing unit to be used for processing the target substrate; and a transfer recipe creating unit that automatically selects a transit unit to be used among the plurality of transit units based on the storage container for loading, the storage container for unloading, and the processing unit selected through the selection unit, automatically generates a transfer route of the target substrate, and creates a transfer recipe.

Abstract: Provided is a specimen carrier supply and delivery device having at least one specimen carrier magazine with separate compartments for receiving interchangeably specimen carriers and a magazine lift, which is adjustable in height in a magazine carrier frame for receiving interchangeably specimen carrier magazines. Two pairs of bars, which stand vertically and parallel to one another, are arranged in the magazine carrier frame, wherein the magazine lift is guided in a height adjustable manner on the two complementary first bars of the bar pairs. An equal-sided coupling frame, which is aligned vertically to the plane formed by the first bars, with a bridge, which is arranged parallel to the plane, is mounted in a sliding manner on the two complementary second bars of the pairs of bars. A linear scale, which is aligned parallel to the direction of the bars, is fastened to the magazine lift.

Abstract: Systems, apparatus and methods for transporting substrates between system components of an electronic device manufacturing system are provided. The systems and apparatus include an electrostatic end effector having a base, an electrode pair on the base, and spacer members for spacing the substrate from the electrode pairs to provide a gap between the electrode pair and the substrate. Methods of the invention as well as numerous other aspects are provided.

Abstract: A method for loading and unloading a machining machine for machining boards that includes for loading the machining machine, the changing table is loaded with a board to be machined, whereby the board is separated from the first storage place and is deposited on a changing table. The changing table is conveyed together with the board to the machining machine. For unloading the machining machine, the changing table is conveyed together with a machined board to the second storage place and is then unloaded, wherein the machined board is separated from the changing table and deposited on the second storage place, wherein the unloading of the changing table includes conveying the changing table and the machined board to an unloading place in an area above the second storage place and the machined board is separated from the changing table at the unloading place.

Abstract: A feed mechanism (1) to feed objects for insertion into tobacco industry products comprises a rotary member for receiving objects, the rotary member (4) having a plurality of channels (9), each channel (9) being adapted so that in use objects assemble in a row in the channel (9) which rotates with the rotary member (4), each channel (9) having an outlet (13) for dispensing an object from the channel (9); and a pneumatic mechanism (5) configured to hold an object in a row prior to the object being dispensed.

Abstract: Embodiments of the invention generally include a robot assembly comprising a robot operable to position a substrate at one or more points within a plane, and a motion assembly having a motor operable to position the robot in a direction generally parallel to a first direction. The motion assembly comprises a robot support interface having the robot coupled thereto, and one or more walls that form an interior region in which the motor is enclosed. The walls define an elongated opening through which the robot support interface travels, and the motor is operable to move the robot support interface laterally in the elongated opening. The motion assembly further comprises one or more fan assemblies that are in fluid communication with the interior region. The fan assemblies are operable to create a subatmospheric pressure in the interior region thereby causing gas to flow through the elongated opening into the interior region.

Abstract: Systems and methods to control particle generation in a reticle inspection system are presented. The number of particles added to a reticle during an entire load-inspect-unload sequence of a reticle inspection system is reduced by performing all reticle contact events in a controlled, flowing air environment. In one embodiment, the reticle is fixed to a carrier by clamping outside of the vacuum environment, and the carrier, rather than the reticle, is coupled to the reticle stage of the inspection system. In this manner, the high levels of back-side particulation associated with electrostatic chucking are avoided. In addition, the carrier is configured to be coupled to the reticle stage in any of four different orientations separated by ninety degrees.

Abstract: Embodiments of the invention relate to a system for storing and/or transporting platforms of pipette tips. The system includes packaging in which a stacked tower of platforms may be transported. Embodiments of the present invention further include a loader for transferring platforms from the packaging to a rack for holding pipette tip platforms. The loader transfers the platforms by accessing the uppermost platform in the stack.

Abstract: A carrier transfer for automatically transferring a substrate carrier includes a gripper detachably coupled to the substrate carrier, the substrate carrier including a plurality of substrates and at least one open gate through which the plurality of substrates are loaded into or unloaded from the substrate carrier. The gripper includes a gate blocking unit secured to the gripper and configured to shift to a blocking position, the blocking position being a position of the gate blocking unit that partially blocks the gate to prevent the plurality of substrates from being separated from the substrate carrier during the automatic transferring of the substrate carrier.

Abstract: A handler includes a device holding portion, which holds an uninspected device and loads the device in a measuring socket on a device tester, having a suction means for sucking the device by a very weak pushing force at the time of sucking the device from an uninspection tray and for loading the device in a measuring socket and also having a clamper capable of outputting a pushing force which can be changed at the time of the measurement contact. The device holding portion includes a position correcting mechanism for making a device position correction executed by an image recognizing and position correcting means.

Abstract: An automatic slide loading device for microarray scanner comprises slide holders (1), a carrier device (2) and a positioning chamber (3), wherein the slide holder (1) can hold microarray slides (6) and the slide holder (1) is placed out of the scanning platform of the microarray scanner when the microarray scanner is in off work state, wherein the carrier device (2) is connected to the positioning chamber (3) and the carrier device (2) can load the slide holder (1) into the positioning chamber (3), wherein the positioning chamber (3) is placed above the scanning platform of the microarray scanner and is used to precisely locate the working surface of the microarray slides (6) in the slide holder (1).

Abstract: A system and a method for maintaining, transferring and transporting a flexible package. The system includes a manipulating system, preferably a five axis robot, for transferring and displacing the flexible package and a lift-assist platform positioned within a reach of the manipulating system for transporting the package and for supporting a weight of the flexible package. The system may be used more specifically for the transport and transfer of upright flexible packages. The system simplifies the tool supported by the robot, thus allowing use of a smaller robot.

Abstract: A handling mechanism for handling workpieces includes a first sliding assembly, a second sliding assembly, a driving assembly, a loading assembly and a clamping assembly. The driving assembly is connected to the first sliding assembly and the second sliding assembly. The loading assembly is slidably clamped between the first sliding assembly and the second sliding assembly. The clamping assembly is fixed to the loading assembly for clamping and placing workpieces one by one. The first sliding assembly and the second sliding assembly are driven by the driving assembly to slide along a same direction or in two opposing directions, to enable the loading assembly to slide with the first sliding assembly or to slide along a direction perpendicular to the sliding direction of the first sliding assembly. A punching machine using the handling mechanism is also disclosed, in which workpieces are placed by clamping assembly on lower mold for punching.

Abstract: A handling mechanism to convey workpieces, includes a mounting seat, a first sliding member, a first driving assembly, a second sliding member, a second driving assembly, and a clamping assembly. The first sliding member is slidably mounted on the mounting seat. The first driving assembly is mounted on the mounting seat and capable of driving the first sliding member to slide along the longitudinal direction of the mounting seat. The second sliding member is slidably mounted on the first sliding member. The second driving assembly is mounted on the first sliding member and capable of driving the second sliding member to slide along a direction perpendicular to the longitudinal direction of the mounting seat. The clamping assembly is fixed to the second sliding member for clamping workpieces. The present invention further discloses a punching machine using the same.

Abstract: An apparatus (4) for inserting preformed electrical bar conductors (8) into an associable twisting device (12), comprising a supply device (28) of conductors (8), which are bent in a manner so as to have two substantially-rectilinear arms (16), parallel to each other, connected to each other by a curved portion (20), said electrical bar conductors (8) being arranged according to a supply direction (X-X). The apparatus (4) also comprises a transfer device (32) which draws a conductor (8) from the supply device (28) and rotates it 90 degrees into an insertion position in which it is arranged according to an insertion direction (Y-Y), perpendicular to said supply direction (X-X) and parallel to pockets (24) of an associable twisting device (12) of the conductors (8).

Abstract: A method for inspecting a wafer and a system. The system includes: a chuck; and a robot that includes a movable element connected to a detachable adaptor selected from a group of diced wafer detachable adaptors and non-diced wafer detachable adaptors; wherein a diced wafer detachable adaptor is shaped such to partially surround the diced wafer and comprises at least one vacuum groove adapted to apply vacuum on a tape that supports the diced wafer; and wherein the robot is adapted to fetch the wafer from a cassette and to place the wafer on the chuck.

Abstract: A transfer robot includes an arm unit having a hand capable of holding one of transferred objects, a base unit mounted to an installation frame and horizontally rotatably supporting the arm unit, an attachment member for attaching the base unit to the installation frame, and an elevation mechanism arranged within the base unit and provided with an elevation member linked to the arm unit. The elevation mechanism is configured to move the arm unit up and down within an arm-unit up/down movement range defined above the base unit by moving the elevation member up and down along a vertical shaft. The base unit is fixed to the installation frame in a state that a portion of the base unit extending by a specified height from a bottom wall of the base unit to the attachment member is embedded in the base receiving recess of the installation frame.

Abstract: A loading mechanism includes a fastening board, a cam, a rotary pivot, and a load module. The fastening board defines a pivot hole at the center portion of the fastening board and a sliding guide adjacent to the pivot hole. The cam defines a locating hole and an annular guide. The load module includes two guiding poles, a follower fastened to one end of the two guiding poles, and a clamping member fastened to the other end of the two guiding poles. The distance between a part of the annular guide and the locating hole is gradually decreased, and the cam can be driven to rotate. The cam drives the follower to slide along the annular guide to drive the load module to slide along the sliding guide.

Abstract: A handler includes at least one transport section which transports a transport target onto a base. The transport section includes a plurality of first elevating sections which respectively move up and down a plurality of gripping sections which grip the transport target, and a single second elevating section which moves up and down all the plurality of first elevating sections. In connection of the transport target to a connection destination, a part of the plurality of first elevating sections are driven to descend, and the remaining part thereof are driven to ascend.

Abstract: An integrated grip arm comprises a plurality of grippers to accommodate a plurality of reticles and carrier boxes without the need of separate arm or gripper changes. The integrated grip arm can comprise an edge gripper for gripping a reticle or a carrier box at the edges, and a fork gripper for gripping a reticle or a carrier box at a top and a bottom portions. The integrated grip arm can comprise an edge gripper for gripping a wafer from the edges and an end effector for holding a wafer from the bottom. The integrated grip arm can comprise a vertical gripper for gripping a workpiece from a vertical position and a horizontal gripper for gripping a workpiece from a horizontal position.

Abstract: A manipulator includes a first base, a second base, a rotating shaft, a swing arm, and a grasping member. The second base is mounted to the first base, and capable of moving along an X-axis with respect to the first base. The rotating shaft is mounted to the second base, and capable of rotating around a Z-axis perpendicular to the X-axis. The swing arm is mounted to the rotating shaft, and capable of moving along the Z-axis. The grasping member is mounted to a swinging arm wherein the grasping member is taken by the swing arm to rotate on a plane perpendicular to the Z-axis.

Abstract: In recent years, frames have gotten larger in size and thinner, and warping of the frames has posed a problem. If a warp of a frame is large, there is a high possibility that fetching the frame may fail. If fetching the frame fails, that is, if the frame cannot be fetched, the lead time of mounting gets longer. Further, the frame that cannot be fetched has to be manually removed by an operator. Therefore, a man-hour increases. According to the present invention, before a loader feeder fetches a frame from a frame magazine, a loader lifter is moved in a Y direction. Thereafter, the loader feeder fetches the frame from the frame magazine.

Abstract: A substrate chuck comprising a frame forming a support adapted to support an adhering surface thereon and a Bernoulli chuck surface coupled to the frame and adapted to support the substrate, the Bernoulli chuck surface being axially moveable relative to the support. The Bernoulli chuck surface has a first position adjacent the substrate with the substrate coupled to the adhering surface and wherein the Bernoulli chuck surface is moveable from the first position to a second position separating the substrate from the adhering surface without contact between the substrate and the Bernoulli chuck surface.

Abstract: An OHT conveyer vehicle places a FOUP on first and second on platforms. A third platform can move to a position overlapping with the first and second platform by a moving device, and then to a position at which an upper surface of the third platform is above upper surfaces of the first and second platforms by an elevation device. Therefore, the FOUP is placed on the third platform. Subsequently, the third platform can move to a position overlapping with fourth and fifth platforms by the moving device, and then to a position at which the third platform is lower than the fourth and fifth platforms by the elevation device. Therefore, the FOUP is placed on the fourth and fifth platforms.

Abstract: In an embodiment, the present invention discloses cleaned storage processes and systems for high level cleanliness articles, such as extreme ultraviolet (EUV) reticle carriers. A decontamination chamber can be used to clean the stored workpieces. A purge gas system can be used to prevent contamination of the articles stored within the workpieces. A robot can be used to detect the condition of the storage compartment before delivering the workpiece. A monitor device can be used to monitor the conditions of the stocker.

Abstract: An improved apparatus for debonding temporary bonded wafers includes a debonder, a cleaning module and a taping module. A vacuum chuck is used in the debonder for holding the debonded thinned wafer and remains with the thinned debonded wafer during the follow up processes steps of cleaning and mounting onto a dicing tape. In one embodiment the debonded thinned wafer remains onto the vacuum chuck and is moved with the vacuum chuck into the cleaning module and then the taping module. In another embodiment the debonded thinned wafer remains onto the vacuum chuck and first the cleaning module moves over the thinned wafer to clean the wafer and then the taping module moves over the thinned wafer to mount a dicing tape onto the wafer.

Abstract: An automated ply layup system uses a robot and an end effector for selecting plies from a kit and placing the plies at predetermined locations on a tool.

Abstract: Provided is a fully automatic gravure preparation processing system having high degrees of freedom, which is capable of manufacturing a gravure printing roll more quickly as compared to a conventional case, achieving space saving, performing an unattended operation even in the nighttime, flexibly customizing a manufacturing line, and satisfying various customer needs. The fully automatic gravure preparation processing system includes: a processing room-A having a handling area of a first industrial robot for chucking and handling a roll to be prepared; and a processing room-B having a handling area of a second industrial robot for chucking and handling the roll to be prepared. The first industrial robot and the second industrial robot are configured to transfer the roll to be prepared therebetween when preparation processing is performed.

Abstract: A substrate processing apparatus includes a conveying arm configured to convey a substrate and including an electrostatic chuck for attracting the substrate placed on the conveying arm; and a control unit configured to not apply a voltage for causing the electrostatic chuck to attract the substrate between electrodes of the electrostatic chuck when the substrate is placed on the conveying arm but the conveying arm is not moving, and to apply the voltage between the electrodes of the electrostatic chuck when the substrate is placed on the conveying arm and the conveying arm is moving.

Abstract: An apparatus for machining workpieces has a frame having a vertical front wall and defining a work station, an intake station, and an output station. Conveyors move the workpieces into the intake station and out of the output station. At least one tool is provided in the work station. A vertical guide on the front wall carries a vertical slide movable vertically by a drive. A horizontal guide on the vertical slide extends along the working, intake, and output stations and carries a horizontal slide movable by another drive means along the horizontal guide. A workpiece holder/grab rotatable about a vertical axis on the horizontal slide is shiftable between respective positions alignable with the working, intake, and output stations on movement of the horizontal slide along the horizontal guide.

Abstract: Methods and apparatus for cleaning electrostatic chucks in processing chambers are provided. The process comprises flowing a backside gas comprising a reactive agent into a zone in a process chamber, the zone defined by a space between a surface of an electrostatic chuck or of a cleaning station and a surface of a substrate. The surface of the electrostatic chuck is etched with the reactive agent to remove debris. An apparatus for cleaning an electrostatic chuck is also provided, the apparatus comprising: a process chamber; an elongate arm having a reach disposed through a wall of the process chamber; an electrostatic chuck attached to the elongate arm; a cleaning station located within the reach of the elongate arm; and a reactive gas source that is operatively connected to the cleaning station.

Abstract: A plant for building tyres includes a plurality of working locations, at least one first working location being associated with at least two loading/unloading locations, a proximal one and a distal one, each of said working locations and loading/unloading locations being associable with a forming drum. The production cycle is controlled by the method of: (i) loading a first forming drum into the at least one first working location; (ii) loading a second forming drum into the loading/unloading location; (iii) at the end of the working provided in the at least one first working location, unloading the first forming drum into the proximal loading/unloading location.