Abstract: Improved handling of multi-wafer cassettes in automated wafer processing machines is accomplished by means of an improved cassette elevator. The design of the cassette elevator is such that the receiver/sender portion of the wafer processing machine can be easily configured to accommodate single or multiple cassette elevators served by a single wafer loading spatula without increasing the width of the receiver/sender units. In addition, an automatic tilt feature of the cassette elevator substantially reduces the likelihood of wafer breakage during the cassette loading and unloading operation.

Abstract: A raking apparatus comprises a guide track, a carriage supported on the guide track for displacement thereon along a traveling path, a linkage assembly supported on the carriage and comprising a plurality of linkage levers articulated to one another by respective joints, and a rake supported on the carriage and operatively connected to the linkage assembly for varying angular positions of the rake by the linkage assembly upon pivotal motion of the levers with respect to one another. There is further provided a slide track receiving one of the joints for guiding it upon pivotal motion of the levers and a locking mechanism mounted on the carriage and cooperating with the linkage assembly. The locking mechanism has a released position permitting a pivotal motion of the levers and a locking position immobilizing the levers of the linkage assembly with respect to one another.

Abstract: A high-level dumping apparatus including an upright frame, a carriage vertically movable on said frame by a linear motor, and a load carrying chute assembly having an upward and rearward projecting tilt arm supported by a laterally shiftable lift member on the carriage for vertically reciprocable and pivotal movement of the chute assembly on the upright frame, and including a trip roller on the top portion of the upright frame in the upward path of the tilt arm to cause the tilt arm to pivot about the trip roller upon engagement of the tilt arm with the trip roller. A pivotal guide element is fixed to the tilt arm to ride in a vertical guide track for directing the vertical movement of the chute assembly and for determining the moment arm of the pivotal thrust exerted upon the chute assembly during its dumping cycle.

Abstract: A work conveying apparatus for transporting work pieces through a plurality of treating stations including a work rack for supporting the work pieces which is tiltable, according to one embodiment of the invention, in one direction when in a raised position to facilitate drainage of solution from the work pieces and is tiltable in an opposite direction to facilitate escape of gases from the work pieces when the work rack is immersed in a treating solution. The work rack further includes pivotally mounted work holders thereon which are movable to and from a work piece supporting position to a work piece discharge or unloading position to facilitate automatic loading and unloading of work pieces therefrom. The conveying apparatus further includes an unload station including a guide for retaining the work rack in a fixed position and includes a device for aligning the rack with the guide during its descending movement.