Abstract: A detachable etching tool for etching a plurality of silicon carbide pieces has a first supporting column and a second supporting column, both of which are fixed through a tool fixing block. A bracket is arranged on the tool fixing block, and a limiting rod is installed on the lower end surface of the bracket. The bracket is inserted into the tool fixing block through the limiting rod and fixed on the tool fixing block with a fastening mechanism that comprises a base, a fixing seat, a telescopic spring, a telescopic guide column, a sliding block, a guide block, an inserting rod and a push-pull mechanism. The etching tool addresses low productivity per unit time and long time consumption in the etching processing.

Abstract: A conveying unit of a processing apparatus includes a clamping section that clamps a workpiece, and a conveying arm that enables the clamping section to be moved in a height direction and in directions of advancing toward and retracting away from a cassette. The clamping section includes a support section that supports a lower surface of the workpiece, a presser section that makes contact with an upper surface of the workpiece and clamps the workpiece between itself and the support section, and a driving unit that relatively moves the support section and the presser section away from and toward each other. The conveying unit further includes a light reflection type sensor that irradiates the workpiece accommodated in the cassette with light, the light reflection type sensor being fixed to the clamping section and being disposed at a same height as a height when the clamping section clamps the workpiece.

Abstract: A method for producing an arm structure in which the arm structure is produced by: forming an arm precursor member having an external shape of the arm structure by, in a state in which a die is closed with a metal pipe member being disposed in a cavity thereof, pressurizing the pipe member with liquid supplied to an inside thereof to cause an external surface of the thus expanded pipe member to be pressed against an inner surface of the cavity; and forming a flange portion to be attached to a driven body by machining at least an end of the formed arm precursor member.

Abstract: An automatic baggage-packing device for urban terminals based on artificial intelligence is provided. The automatic baggage-packing device includes a baggage transfer rack, baggage transfer rack forms a baggage transfer channel through a transfer stick, baggage transfer rack is equipped with several selectors located above the baggage transfer channel, the selectors are arranged in turn in the extension direction of the baggage transfer channel. The automatic baggage-packing device also includes an automatic loading device set outside of the baggage transfer rack to cooperate with the selectors to load the selected baggage. The invention has the effect of making baggage freight more convenient and quicker in use.

Abstract: A system for motion planning for autonomous vehicles can include a plurality of sensors, a plurality of detectors in electrical communication with the plurality of sensors, and a motion planning module in electrical communication with the plurality of detectors and a computing system of an autonomous vehicle. The motion planning module stores a planning graph with each node representing, explicitly or implicitly, time and variables defining a state of the autonomous vehicle, an operating environment, or both the state of the autonomous vehicle and the operating environment. A reconfigurable processor can include a collision detection module and, optionally, a shortest path module. Pre-computed collision data and planning graph data reflecting logical/physical node mapping can be communicated to the processor during a programming phase and used during runtime.

Abstract: There is provided a chamber structure which greatly facilitates maintenance, such as installation and removal of a transfer robot. In this chamber structure, a transfer robot is attached, via a robot base member, to an opening provided in a base portion of a transfer compartment of a transfer chamber. A robot base member is provided below the opening, and the transfer robot includes a base unit and an arm unit provided on an upper part of the base unit. A robot flange member with the same shape as an opening hole in the robot base member is provided above the base unit. The arm unit is freely insertable through the opening hole, and the robot flange member is detachably connected to a peripheral portion of the opening hole.

Abstract: A system for motion planning for autonomous vehicles can include a plurality of sensors, a plurality of detectors in electrical communication with the plurality of sensors, and a motion planning module in electrical communication with the plurality of detectors and a computing system of an autonomous vehicle. The motion planning module stores a planning graph with each node representing, explicitly or implicitly, time and variables defining a state of the autonomous vehicle, an operating environment, or both the state of the autonomous vehicle and the operating environment. A reconfigurable processor can include a collision detection module and, optionally, a shortest path module. Pre-computed collision data and planning graph data reflecting logical/physical node mapping can be communicated to the processor during a programming phase and used during runtime.

Abstract: A transport apparatus including a frame, a drive section connected to the frame, the drive section having at least one drive axis, at least one arm having an end effector configured for holding a substrate, the at least one arm being connected to the drive section by a transmission link and having at least one degree of freedom axis effecting extension and retraction of the end effector with respect to the at least one arm, and a bearing connected to the frame and the end effector, the bearing defining a guideway that defines the at least one degree of freedom axis.

Abstract: Unmanned ground vehicle (UGV) includes a rotary joint having an axis of rotation. A rotary joint actuator is responsive to at least one control signal and is configured to cause a rotatable portion of the rotary joint to rotate relative to the vehicle chassis about the rotary joint axis of rotation. A stabilizer flipper having an elongated length is attached to the rotatable portion. Consequently, rotation of the rotatable portion about the rotary joint axis of rotation results in a change of orientation of the stabilizer flipper relative to the chassis. This change in orientation can range between a lateral direction and an longitudinal direction with respect to the vehicle chassis.

Abstract: A vacuum chamber having a vacuum chamber; at least one processing region arranged in the vacuum chamber; and a substrate holding arrangement for transporting and/or positioning a substrate or multiple substrates in the processing region, wherein the substrate holding arrangement has: a first drive train with a first substrate holder, the first substrate holder being configured to rotatably hold one or more substrates, a second drive train with a first support arm, wherein the first substrate holder is held rotatably by the first support arm, a third drive train with a second substrate holder, the second substrate holder being configured for rotatably holding one or more substrates, and a fourth drive train with a second support arm, wherein the second substrate holder is held rotatably by the second support arm, and wherein the first, second, third and fourth drive trains are each configured to be controllable independently of one another.

Abstract: Provided is surface treatment system for a large object having high versatility. In a surface treatment system for a large object configured to cause a treatment machine for treating a surface of the object to be held by a leading end portion of a work arm of a work robot and to move the treatment machine relative to the surface of the object by a movement of the work robot thus treating the surface of the object by the treatment machine, there is provided a trackless type work machine mounting the work robot on a self-propelled cart. The work machine mounts a robot moving device for moving the work robot relative to the self-propelled cart at least in a height direction and mounts also a battery capable of supplying traveling power for the self-propelled cart.

Abstract: The invention discloses an automatic-sensing transfer device based on an edge-tracing alignment algorithm, which is characterized by comprising a device body, a rotating device, a lifting device, a stretchable device, a sensing device, a gripping device and a control device. The rotating device, the stretchable device, the lifting device, the sensing device, the gripping device and the control device are all arranged on the device body. The control device is connected to the rotating device, the stretchable device, the lifting device, the gripping device and the sensing device. Accurate positioning of the gripping device can be realized through the transfer device, so that the production efficiency is improved.

Abstract: A capillary transport device is capable of inserting, without manpower, a capillary into a mounting section of an ultrasonic horn. The capillary transport device includes: a first tube for transporting a capillary; an ultrasonic horn with a mounting section for mounting the capillary; a first movement mechanism for relatively moving the ultrasonic horn and a first end of the first tube; and a mechanism for blowing gas into a second end of the first tube.

Abstract: A loose component supply device includes a loose component support section that supports multiple components in a loose state, an imaging device that images the components supported on the loose component support section, a component holding head provided with at least one component holding tool capable of picking up and holding each of the components supported on the loose component support section, a holding head moving device that moves the component holding head at least to and from the loose component support section and a component transfer section at which transfer to a next process is possible, and a holding tool changing device that changes at least one of the one component holding tools based on image data obtained by the imaging of the imaging device.

Abstract: A high-performance four-axis robot (1) with horizontal joints includes a robot body (11), a first arm assembly (12) connected to the robot body 11, a second arm assembly (13) that one end thereof is connected to the first arm assembly, and a R-axis rotation assembly arranged at the other side of the second arm assembly opposite to the first arm assembly. Assembly of the robot body includes a linear assembly unit (115) arranged in a vertical direction, a fixed seat (111) capable of moving up and down along the linear assembly unit, and a drive assembly (14) configured to drive the fixed seat to move and arranged at a lower portion of the linear assembly unit. The drive assembly includes a first drive motor (141) arranged at the lower portion of the linear assembly unit and a coupling (142) connected to an output shaft of the first drive motor.

Abstract: An upper limb exoskeleton rehabilitation device having man-machine motion matching and side-to-side interchanging, includes a chassis bracket assembly, a shoulder girdle abduction assembly, a side-to-side interchanging assembly and a mechanical arm coupling member. The chassis bracket assembly includes a frame and a lifting unit mounted on the frame. The shoulder girdle abduction assembly is mounted on the lifting unit to be driven by the lifting unit to move up and down. The side-to-side interchanging assembly is rotatably connected to the shoulder girdle abduction assembly and the mechanical arm coupling member, and the mechanical arm coupling member is configured to mount the mechanical arm and drive the mechanical arm to rotate with the respective rotating joints.

Abstract: An exoskeleton apparatus includes a base unit, a support unit, and upper and lower arm units. The support unit is rotatable about a vertical first axis relative to the base unit. The upper arm unit includes a linking axle, a main arm that has a connecting end rotatable about a horizontal second axis, and a linkage mechanism for rotating the linking axle relative to the main arm about a horizontal third axis. The lower arm unit is rotatable relative to the upper arm unit, and includes a lower arm set co-rotatably coupled to the linking axle, a hand-receiving seat rotatably connected to the lower arm set, and a lower arm receiving seat connected to the hand-receiving seat, and a drive member for rotating the hand-receiving seat about a horizontal fourth axis.

Abstract: A robot that enables a stopper to be installed even when it is difficult to allow a space for providing the stopper. The robot includes a first component; a second component movably coupled to the first component; a first stopper provided on one of the first component and the second component, the first stopper extending along an axis parallel to a movement direction of the second component relative to the first component; and a second stopper provided on the other of the first component and the second component, the second stopper configured to come into contact with the first stopper when the second component moves relative to the first component and limit a movement range of the second component relative to the first component.

Abstract: A portable work module includes a combination of prismatic and revolute joints for positioning and orienting a robotic end effector for performing a task within confined space. For example, the portable work module may include telescoping arm integrated with wrist having a plurality of degrees of freedom with respect to telescoping arm. The portable work module includes an insert that is secured with respect to an access port of confined space, said access port serving as a reference location for calculating the position of the robotic end effector within confined space. The portable work module is configured to have a compacted configuration for insertion into confined space, and an extended configuration for performing tasks within confined space. In some examples, the portable work module is modular, such that the robotic end effector or other components may be selectively removed and replaced.

Abstract: The innovation disclosed herein is an improved palletiser for loading and packaging unstable articles, such as plastic, glass, steel, aluminium, etc. containers onto a pallet for bulk storage and/or transport. The innovation includes a pallet station having a pallet housing that receives pallets, a layer pad store substantially aligned with the pallet housing, a container lifting sub-assembly that receives a predetermined row of containers, a pusher assembly that urges the predetermined row of containers onto a pallet, and a layer pad transfer assembly.

Abstract: The invention relates to a liquid handling apparatus for transferring liquid into and out of containers that are arranged in a substantially horizontal plane that is spanned by an X axis and a Y axis standing perpendicular to the X axis in the direction of a substantially vertical Z axis standing perpendicular to this plane. The liquid handling apparatus comprises an X slide which is travelable in the direction of the X axis and at which an arm having a Y slide is provided that is travelable in the direction of the Y axis and that is optionally configured for attaching at least one Z slide travelable in the Z axis. An X drive motor serves for driving the X slide via an X force transmission means and a Y drive motor serves for driving the Y slide via a Y force transmission means. Both motors are in fixed positions.

Abstract: A robotic handling apparatus includes a vertical motion mechanism and a first arm member connected to the vertical motion mechanism. The first arm member is movable in a vertical direction by the vertical motion mechanism. The robotic handling apparatus includes a second arm member connected to the vertical motion mechanism via the first arm member, and a first drive unit configured to drive the second arm member to pivot about a first axis. An end effector is connected to the second arm to transfer an article from a first position to a second position by the motion of the vertical motion mechanism, first arm member, and second arm member, the first arm member being mounted to a side of the vertical motion mechanism relative to the vertical direction.

Abstract: A device comprising a tower covered by a shell, the tower having a base with a first axis of movement around a first joint, a first arm connected to the tower via a second joint along a second axis of movement, a second arm connected to the first arm at a proximal end of the second arm via a third joint defining a third axis of movement, the second arm having an end effector interface configured to hold a variety of end effectors usable for different applications, the end effectors being exchangeable allowing the device to perform digital fabrication and desktop manufacturing, an autolevelling function configured to sense a height of a work surface, and a training function allowing a user to teach either arm to perform or repeat specific actions and/or collaborate with the other arm to achieve a common assembly or fabrication task.

Abstract: There is provided a capillary transport device capable of inserting, without manpower, a capillary into a mounting section of an ultrasonic horn. According to an aspect of the present invention, a capillary transport device includes: a first tube 17 for transporting a capillary 13; an ultrasonic horn 11 with a mounting section for mounting the capillary; a first movement mechanism for relatively moving the ultrasonic horn and a first end 17a of the first tube; and a mechanism for blowing gas into a second end 17b of the first tube.

Abstract: A loose component supply device includes a loose component support section that supports multiple components in a loose state, an imaging device that images the components supported on the loose component support section, a component holding head provided with at least one component holding tool capable of picking up and holding each of the components supported on the loose component support section, a holding head moving device that moves the component holding head at least to and from the loose component support section and a component transfer section at which transfer to a next process is possible, and a holding tool changing device that changes at least one of the one component holding tools based on image data obtained by the imaging of the imaging device.

Abstract: An industrial robot may include a plurality of hands structured to mount the transfer objects; an arm comprising a front end side and a base end side, the hands being rotatably joined with the front end side of the arm; and a main body portion to which the base end side of the arm is rotatably joined. The main body portion may include an elevating unit to which the base end side of the arm is rotatably joined on a top surface side thereof, a housing which holds the elevating unit to be raised/lowered and in which at least part of a bottom end of the elevating unit is housed, and an elevating mechanism structured to raise and lower the elevating unit. The elevating mechanism may be accommodated in the housing so as to align with the elevating unit when viewed from a top-bottom direction.

Abstract: A robot performs an appropriate operation in accordance with a position control, whereby an operation is carried out to pass a hook as a second engagement member through a hooking hole as a first engagement member. Thereafter, the robot is switched to a servo float control, and receives a command to raise the hook relatively with respect to the hooking hole. An amount of rising of the hook is compared with a maximum allowable amount of rising (threshold value) of the hook.

Abstract: The present disclosure relates to a work-in-process management control method and a work-in-process management control system using the work-in-process management control method.

Abstract: The present invention is to provide an industrial robot, which is placed in vacuum for use, capable of efficiently cooling down hand- or arm-driving motors which are arranged inside the arm in air. The industrial robot is provided with a motor for rotating a second arm unit with respect to a first arm unit, a motor for rotating a hand with respect to the second arm unit, a reduction gear for reducing the rotation of the motor and transmitting it to the second arm unit, and a reduction gear for reducing the rotation of the motor and transmitting it to the hand; the hand and the arm are placed in vacuum. The reduction gears and are coaxially arranged so that the center of rotation of the second arm unit with respect to the first arm unit coincides with the axial centers of the reduction gears. The interior space of the hollow first arm unit is kept at atmospheric pressure in which the motors and the reduction gears are arranged.

Abstract: A handling module for handling vehicle wheels in an installation for the surface treatment thereof and having at least two gripping units which are supported by a frame structure and each of which comprises a plurality of press-on elements which are pressable onto one or more counter surfaces of an individual vehicle wheel. At least one of the gripping units includes a translation device by which the press-on elements are movable in relation to the frame structure with a movement component which is parallel to the axis of rotation of a gripped vehicle wheel.

Abstract: An apparatus for picking and placing a plate-like product comprises: a base; at least two guide rods disposed on said base vertically; a picking and placing device mounted on each of said guide rods vertically slidably, the picking and placing device is telescopic in a horizontal direction to smoothly and steadily pick and place the plate-like product; a driving device disposed on said base, said driving device connects with said picking and placing device for driving said pick and place device to slide along the respective guide rods.

Abstract: Example systems and methods may allow for closed-loop control of robotic operation. One example method includes receiving input data that identifies data sources to monitor and indicates adjustments to make in response to deviations by at least one of the data sources from at least one predicted state during subsequent execution of sequences of operations by robotic devices, receiving data streams from the data sources during execution of the sequences of operations by the robotic devices, identifying a deviation by one of the data sources from a predicted state for which the received input data indicates adjustments to the sequences of operations for the robotic devices, providing instructions to the robotic devices to execute the adjusted sequences of operations, and providing instructions to a second computing device to update a visual simulation of the robotic devices based on the adjusted sequences of operations.

Abstract: A kinematic holding system for a placement head of a placement apparatus comprises a placement head alignment device which comprises at least one length-variable holding member arranged at a distance from a joint between a placement head support and the placement head. This holding member determines the pivoting position of the placement head relative to the placement head support. The length of the holding member is changeable during the placement operation depending on a deformation of the placement head guide device caused by the pressing force of the placement head against the substrate in such a way that an axis error (tilt) of the placement head caused by the deformation of the placement head guide device is compensated.

Abstract: A robot includes: a base; an arm which is provided to be rotatable with respect to the base using a predetermined rotation shaft as the center of rotation; and an elongated object including a portion present in the base and in the arm, in which the elongated object is bound in a first binding position which is on the rotation shaft and in the base and a second binding position which is on the rotation shaft and in the arm.

Abstract: In a device for transferring vehicle wheels, an individual vehicle wheel can be gripped by a gripping module having at least one gripping unit which is supported by a frame structure and includes multiple pressing elements that can be pressed against one or more mating surfaces of an individual vehicle wheel. A first gripping module and a second gripping module are mounted on a common rigid support structure which can be rotated about a main axis of rotation by a rotating mechanism. Furthermore, the pressing elements move with a movement component running parallel to the main axis of rotation.

Abstract: A method and apparatus for a transfer robot that having at least one image sensor disposed thereon is provided. The transfer robot includes a lift assembly having a first drive assembly for moving a first platform relative to a second platform in a first linear direction, an end effector assembly disposed on the second platform and movable in a second linear direction by a second drive assembly, the second linear direction being orthogonal to the first linear direction, at least one image sensor, and a lighting device associated with the at least one image sensor.

Abstract: An industrial robot includes a robot main body and an elevating mechanism to raise and lower the robot main body. The robot main body may include a hand, an arm to which the hand is joined, a main body portion to which the arm is joined, and an arm-elevating mechanism. The center of rotation on the base end side of the arm may be located farther toward the third direction side than the center of the main body unit when viewed in the up-down direction. In the standby state, part of the arm may be positioned farther toward the fourth direction side than the main body unit. The main body unit may be secured to the elevating mechanism. The elevating mechanism may be arranged on one or both sides of the main body unit in the first direction and/or on the fourth direction side.

Abstract: An apparatus for palletizing a plurality of objects, for example bottle packs or containers, is provided. A conveying and sorting system to form an ordered set of objects is provided. A handling system having a support column and movably arranged thereon a first handling member suitable to handle the ordered set of objects from a discharge position of the conveying and sorting system to a pallet arranged at a workstation is provided. A handling system having a support column and movably arranged thereon a second handling-suitable to handle a pallet from a pallet stack to the workstation and/or a cardboard flap from a respective stack to said workstation is provided.

Abstract: A medical robotic system (10) for performing medical procedures comprises a robot manipulator (14) for robotically assisted handling of a medical instrument, in particular a laparoscopic surgery instrument (18). The robot manipulator (14) comprises a base (24); a manipulator arm (26) with an essentially vertical part (27) supported by the base and with an essentially horizontal part (29) supported by the vertical part (27); a manipulator wrist (28) supported by the manipulator arm (26); and an effector unit (30) supported by the manipulator wrist and configured for holding a medical instrument. The manipulator arm (26) has a cylindrical PRP kinematic configuration for positioning the manipulator wrist.

Abstract: A robot includes a base, a first arm rotatably connected to the base around a first rotating axis, a second arm rotatably connected to the first arm around a second rotating axis orthogonal to the first rotating axis, a third arm rotatably connected to the second arm around a third rotating axis parallel to the second rotating axis, and a three-axis inertial sensor provided in the third arm and including a first detection axis, a second detection axis, and a third detection axis orthogonal to each other, the first detection axis and the third rotating axis being parallel to each other.

Abstract: When a die to be stripped out of plural dies (semiconductor chips) bonded to a dicing film is to be tossed and stripped from the dicing film, the dicing film corresponding to predetermined positions out of the peripheral portion of the die is tossed to form stripping start points. The dicing film corresponding to portions other than the above predetermined positions is then tossed to strip the die from the dicing film.

Abstract: A liquid processing system to process liquid biological material includes: a trunk provided turnable on an axis, set within a predetermined work space; a first arm provided to the trunk and having at least three degrees of freedom or higher degrees of freedom; a second arm provided to the trunk and having at least three degrees of freedom or higher degrees of freedom; a driving mechanism configured to drive each of the trunk, the first arm, and the second arm; and physiochemical equipment situated within the work space and within the range of movement of at least one of the first and the second arm. The driving mechanism is operated by teaching playback based on the positions and shapes of the physiochemical equipment, and the biological material is processed using the physiochemical equipment.

Abstract: To provide a drive device rigid enough to endure a stress due to a reaction during driving of an arm unit, and to provide a conveyance device including the same. A drive device includes a frame and an actuator installed in the frame. The frame is formed by integral molding by casting. The frame includes a connecting portion connectable to a division wall of a conveyance chamber, a bottom plate portion serving as an opposed portion provided to be opposed to the connecting portion, and a plurality of coupling portions that couple the connecting portion and the bottom plate portion to each other. The actuator includes three coaxial shafts (two rotating shafts and single turning shaft), three motors, and a transmission mechanism that transmits a rotational driving force by the three motors to the three shafts. The frame is formed by the integral molding, and hence it is possible to realize a drive device having a high rigidity.

Abstract: A rotation mechanism includes a mandrel, a rotation axle, a needle roller bearing and an angular bearing. The mandrel includes a shaft portion, a first annular contact portion and a second annular contact portion. The shaft portion has an outer surface, and the first annular contact portion and the second annular contact portion are located on the outer surface and respectively surround the axis of the mandrel. The rotation axle includes an annular portion, a third annular contact portion and a fourth annular contact portion. The annular portion has a shaft hole and an inner surface forming the shaft hole. The third annular contact portion and the fourth annular contact portion are located on the inner surface, and the mandrel passes through the shaft hole. The needle roller bearing is in contact with the first annular contact portion and the third annular contact portion, and is located between them.

Abstract: A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, is provided. In one embodiment of the invention, a robot assembly is provided. The robot assembly includes a first motion assembly movable in a first direction, and a second motion assembly, the second motion assembly being coupled to the first motion assembly and being movable relative to the first motion assembly in a second direction that is generally orthogonal to the first direction. The robot assembly further comprises an enclosure disposed in one of the first motion assembly or the second motion assembly, the enclosure containing at least a portion of a vertical actuator assembly, a support plate coupled to the enclosure, and a first transfer robot disposed on the support plate.

Abstract: In an automated process of handling slides, such as in an imaging system, a slide hander must be able to get a hold of, lift up, and move slides, with tissues samples thereon, to multiple locations quickly and efficiently. To perform this function, the arm of the slide handler needs to be free to move from one location to the next and to advantageously respond in the event of encountering any unexpected or misplaced objects and/or other obstacles without jamming, being damaged and/or causing damage to a slide. A system described herein provides for the use of a slide handler having a crash head assembly with a spring-loaded flexible joint that may disengage if an unexpected obstacle is encountered and spring back to its proper location once the obstacle is cleared. Additionally, because the crash head assembly can flex, it is less likely to break or chip the glass slides.

Abstract: A transfer robot according to an embodiment includes an arm and a body. The arm is provided, at a terminal end thereof, with a robot hand transferring a thin plate-like workpiece, and operates in horizontal directions. The body includes a lifting and lowering mechanism that lifts and lowers the arm. In the transfer robot, at least a part of the body is disposed outside a side wall of a transfer room that is connected to an opening and closing device opening and closing a storage container for the thin plate-like workpiece and to a processing room processing the thin plate-like workpiece.

Abstract: A fluid delivery system includes a laboratory instrument that operates using fluid retained in one or more containers. The containers are supported on a motor-driven lift that is configured to transport the containers between a lowered position suitable for handling and an elevated position suitable for the delivery of fluid to the instrument by gravity. The lift includes a bench-mountable base, a tubular column extending upward from the base, an elongated lead screw extending longitudinally through the column, a drive mechanism for rotatably driving the lead screw, a carriage slidably mounted over the tubular column and mechanically coupled to the lead screw, a platform removably coupled to the carriage for supporting the containers, and a control system for regulating operation of the drive mechanism. During operation, a slot provided in the column restricts travel of the platform along a predefined path that is linear in part and helical in part.

Abstract: The present invention relates to an apparatus for transferring a substrate. The apparatus includes a supporting member; an elevating and rotating member; a transferring unit; a first arm whose one end is supported by the elevating and rotating member to be rotatable; a second arm whose one end is supported by the transferring unit to be rotatable and whose the other end is supported by the other end of the first arm to be rotatable; and an arm driving part, installed on the first arm, which drives the other end of the second arm to pivot on the other end of the first arm to allow the first arm and the second arm to be folded or unfolded and thus removes the state of singularity by rotating the other end of the second arm based on the other end of the first arm.

Abstract: The present invention relates to an apparatus for transferring a substrate. The apparatus includes a supporting member; an elevating and rotating member; a transferring unit; a first arm whose one end is supported by the elevating and rotating member to be rotatable; a second arm whose one end is supported by the transferring unit to be rotatable and whose the other end is supported by the other end of the first arm to be rotatable; and an arm driving part, installed on the first arm, which drives the other end of the second arm to pivot on the other end of the first arm to allow the first arm and the second arm to be folded or unfolded and thus removes the state of singularity by rotating the other end of the second arm based on the other end of the first arm.