Abstract: A handling device and method utilizes a clamping arm that is screwed on a guide rod. The axial direction of the guide rod is in the vertical direction, and the rotating direction of the guide rod is in the horizontal direction. Makes the clamping arm rotate in the horizontal direction when the clamping arm is not restricted, and makes the clamping arm move in the vertical direction when the clamping arm is restricted. By such arrangements, the clamping arm can perform handling in the horizontal direction and in the vertical direction.

Abstract: An industrial robot able to reliably prevent fall of an elevating part and able to improve a degree of freedom of design, that is, an industrial robot comprising a base body; an elevating part able to rise and descend with respect to the base body; an elevation drive source; a transmission mechanism for transmitting the drive force of the elevation drive source; a drive mechanism for making the elevating part rise and descend by the drive force transmitted via the transmission mechanism; a sensor for detecting an abnormality of the transmission of the drive force from the drive source to the elevating part; and a fall prevention part supported by one of the base body and the elevating part and abutting against the other of the base body and the elevating part and preventing fall of the elevating part when the sensor detects an abnormality of the transmission mechanism.

Abstract: An integrated high speed robotic mechanism is disclosed for improving transport equipment, integrating an object movement with other functionalities such as alignment or identification. The disclosed integrated robot assembly typically comprises an end effector for moving the object in and out of a chamber, a rotation chuck incorporated on the robot body to provide centering and theta alignment capability, and an optional identification subsystem for identifying the object during transport. The present invention also discloses a transfer robot system, employing a plurality of integrated robot assemblies; a transfer system where a transfer robot system can service a plurality of connected chambers such as FOUP or FOSB; a front end module (FEM); or a sorter system. Through the use of these incorporated capabilities into the moving robot, single object transfer operations can exceed 500 parts per hour.

Abstract: A handling manipulator assembly comprises a vertical extending main support (2) arranged on a rotary plate (3). Arranged on the main support (2) is a vertically travelling vertical carriage (9) to which a horizontal extension arm (12) is secured. Mounted on the horizontal extension arm (12) is an articulated arm (14) provided at the end with a manipulator gripper (18). Such a handling manipulator assembly (1) is suitable to advantage to feed/remove tools or workpieces to/from a machine tool provided with a front portal.

Abstract: An articulated robot includes a first arm which is horizontally angularly movable, a sectorial support plate coaxial with a center about which the first arm is angularly movable, an auxiliary arm parallel to the first arm, and a joint member connected to respective distal ends of the first arm and the auxiliary arm. An arcuate rail is mounted on the support plate. The first arm, the auxiliary arm, and the joint member make up a parallel link mechanism. The arcuate rail engages an engaging assembly mounted on an upper surface of the first arm. A second arm is angularly movably connected to the joint member, and a third arm is angularly movably connected to the distal end of the second arm. An end effector for attracting a workpiece is connected to the distal end of the third arm.

Abstract: A transfer robot (100) for transferring a silicon wafer includes a base support (110), an end-effector (130) having a main body (131) and two spaced fingers (132) extending from the main body, an articulated arm (120) assembly interconnecting the base support and the end-effector, a pair of first linear optical sensors (1331, 1332) arranged on the respective fingers of the end-effector, a second linear optical sensor (1333) arranged on the main body of the end-effector, and a plurality of displacement sensors (134) arranged non-collinearly on the end-effector, for ascertaining a vertical position and a leveling of the silicon wafer. The first and second linear optical sensors are arranged non-collinearly on the end-effector for ascertaining a center of the silicon wafer.

Abstract: A cable holding device for a work transfer device that transfers a work between mutually adjacent press machines. The cable holding device is used for the work transfer device that is provided with a supporting portion (3) disposed on a support member (2) placed between press machines (P1, P2) and swingably supports a transfer arm (5). The cable holding device (10) comprises a rack arm (11) that is swingably connected to the top end of the transfer arm (5) and holds a part of the cable; a slide supporter (12) that is disposed above the transfer arm, swingably connects the rack arm (11), and vertically moved via the rack arm as the transfer arm moves; and a cable support (13) that has its one end connected to the slide supporter and its other end connected to a cable fixing portion (6) that is disposed in a direction intersecting a transfer direction of the work with respect to the slide supporter, supports a part of the cable.

Abstract: A method determines axial alignment between the centroid of an end effector and the effective center of a specimen held by the end effector. The method is implemented with use of an end effector coupled to a robot arm and having a controllable supination angle. A condition in which two locations of the effective center of the specimen measured at 180° displaced supination angles do not lie on the supination axis indicates that the centroid is offset from the actual effective center of the specimen.

Abstract: A substrate handling robot includes an arm drive mechanism. A first arm is connected to the arm drive mechanism. A multiple substrate batch loader is connected to the first arm. A second arm is also connected to the arm drive mechanism. A single plane end effector is connected to the second arm. The multiple substrate batch loader produces a vacuum signal indicative of how many substrates are held by the multiple substrate batch loader. A vacuum signal interpreter alters the movement of the first arm in response to the substrate load number. An object sensor is connected to the second arm. The object sensor assesses the number of substrates in a cassette adjacent to the multiple substrate batch loader. A substrate loading sequence controller controls the first arm and the second arm in response to the number of substrates in the cassette, such that the second arm removes substrates from the cassette in such a manner as to facilitate complete loading of the multiple substrate batch loader.

Abstract: An integrated system is disclosed for workpiece handling and/or inspection at the front end of a tool. The system comprises a rigid member of unitary construction such as a metal plate which mounts to the front of a tool associated with a semiconductor process. The front end components, including the load port assemblies, prealigners and workpiece handling robot, are mounted to the plate to provide precise and repeatable positioning of the front end components with respect to each other.

Abstract: A robot arm positioning error is corrected by employing a specimen gripping end effector in which a light source and a light receiver form a light transmission pathway that senses proximity to the specimen. A robot arm old position is sensed and recorded. The robot arm retrieves the specimen from the old position and employs old position information to replace the specimen at a new position that is ideally the same as the old position. A robot arm new position is sensed and recorded. A difference between the new and old positions represents a position error. A correct position is obtained by processing the position error and the old position information.

Abstract: A loadlock chamber assembly includes a loadlock chamber, a sub-chamber removably attached to the loadlock chamber and a first robot arm having a primary pivot axis within the sub-chamber, wherein the first robot arm can move a substrate from a position approximately in a center of the loadlock chamber to a position outside the loadlock chamber.

Abstract: The integrity of control signals used to control a wafer handling robot is monitored by a monitor connected to various points of the robotic control system. The monitor includes a memory for storing data sets representing correct, reference characteristics of the control signals. The monitor samples control signals at various points in the control system and compares these sampled signals with the stored reference characteristics in order to determine whether a signal disparity exists. If a disparity exists, the monitor generates an error.

Abstract: The aim of the invention is to make it as easy as possible to change a spindle in a lifting device (2) for substrates, which device comprises a support (10). To this end the support is configured such that it can be made to engage the substrate holder (25) by rotation or by pivoting.

Abstract: An apparatus for processing wafers one at a time. The apparatus has a vacuum chamber 1 into which wafers are loaded through a pair of loadlocks 3, 4 which are spaced one above the other. A robot within the vacuum chamber 1 has a pair of gripper arms 22, 29 which are moveable along and rotatable about a vertical axis 23 so as to be moveable between the loadlocks 3, 4 and a wafer processing position. Each of the loadlocks 3, 4 has a vertically moveable portion 8, 26 which is moveable away from the remainder of the loadlock to provide access in a horizontal plane for one of the gripper arms 22, 29.

Abstract: A loadlock chamber assembly includes a loadlock chamber, a sub-chamber removably attached to the loadlock chamber and a first robot arm having a primary pivot axis within the sub-chamber, wherein the first robot arm can move a substrate from a position approximately in a center of the loadlock chamber to a position outside the loadlock chamber.

Abstract: A transfer robot includes a machine base, at least one hand for holding a workpiece, a hand moving mechanism for moving the hand horizontally reciprocally at least in an X direction, a first arm pivotally connected to the machine base for rotation about an axis extending in the X direction. The robot further includes an intermediate arm pivotally connected to the first arm for rotation about another axis extending in the X direction, a second arm pivotally connected to the intermediate arm for rotation about a further axis extending in the X direction. The second arm is also connected to the hand moving mechanism which is rotatable about a still another axis extending in the X direction. A driving mechanism is provided for rotating the first arm, the second arm, the intermediate arm and the hand moving mechanism about the respective axes.

Abstract: The present relates to a machine tool for machining a workpiece by moving a tool and the workpiece relative to each other and to a pallet changer thereof. The machine tool is provided with a spindle for mounting the tool thereon, a table for a pallet (P) having the workpiece mounted thereon to be placed on the table, a pallet loading station for setting up the workpiece to the pallet (P) on the pallet loading station, and a pair of pallet change arms arranged to swivel about a vertical axis between the table and the pallet loading station, one pallet change arm (37) of which is arranged to be able to move independently of the other pallet change arm (37) in the vertical direction.

Abstract: A wafer handling robot is disclosed for transporting workpieces such as semiconductor wafers and flat panel displays between process tools and/or workpiece storage locations within a wafer fab. The robot includes a base comprising a rigid backbone for providing a significant degree of structural stability to the robot. The base further includes a mast, a linear drive system for translating the mast, and a shoulder drive system for rotating the mast. The shoulder drive system includes a harmonic drive reduction system for providing a stiff, smooth and precise output rotation of the mast section. The robot further includes a proximal link fixedly mounted to the mast for rotation with the mast, and a distal link rotatably mounted to the proximal link. An end effector for supporting various workpieces is rotationally mounted to the distal end of the distal link.

Abstract: A robotic self-feeding device uses a multiplicity of dishes, utensils and control methods to handle a wide variety of food, including sandwiches. Its operating sequence has a hover mode in which a utensil is automatically steered over a food holder and is constrained from moving away from the food holder. The user points to the desired food with the utensil and triggers pickup which is automatically accomplished. Its gripper can operate tong utensils to grasp food. It can cut food. The process of eating is thus easy and intuitive for people who may have a wide variety of severe paralysis disabilities.

Abstract: The semiconductor material handling system is an EFEM that may either mount to the front end of a processing tool or be integrated into the processing tool. The EFEM is built from a unified frame that the EFEM components, such as a wafer engine and a SMIF pod advance plate, may mount to. The frame serves as a common mounting structure that the EFEM components may use as a reference for alignment purposes. Since the EFEM components do not have to align with respect to the position of each other, the calibration, if any is required, is greatly simplified. The EFEM also has a reduced footprint, allowing the EFEM to mount to the front end of a processing tool and not extend to the fab floor. Thus, space is freed up between the EFEM and the fab floor. By way of example only, this space may be used as a maintenance access area to the processing tool without having to first remove the EFEM.

Abstract: A substrate transporting method including inputting process data and determining whether a number of units required for processing a wafer is an odd number or an even number. Depending on the number of units required for processing the wafer, steps of transporting the wafer, taking out the wafer from a cassette section, loading the wafer, unloading the wafer and loading the wafer into a cassette section are performed via predetermined arms and with predetermined processing units.

Abstract: The objective of the present invention is to provide a transfer device for substrate capable of preventing deformation or breakage of substrate due to bending stress, by reducing the amount of dead weight deflection of substrate, such as large mother glass boards, etc.

Abstract: A three DOF SCARA arm, adapted for transporting semiconductor wafers, includes an end-effector assembly at a distal joint of the arm. In one configuration, the end-effector turns a workpiece over. The arm includes a support column having an open column assembly that projects above a base. Within the assembly, a Z-axis drive energizes extension and retraction of a hollow tube carried by the support column. A shaft, rotatable about the Z-axis and having a distal end furthest from the support column's base, receives an arm assembly. An arm-assembly rotary-drive energizes the shaft's rotation. An arm base-plate, secured to the shaft's distal end, supports the arm assembly therefrom. The arm base-plate carries a wrist joint that is displaced from the Z-axis, and receives the end-effector whose rotation about a wrist-joint axis is energized by an end-effector rotary-drive.

Abstract: A computerized method/system is provided for planning motion of a robot within a free space confined by obstacles, from an initial position to a goal position. In executing the method/system, a plan is generated so that the robot can hold and maneuver a workpiece throughout a sequence of bending operations to be performed by a bending apparatus. A plurality of proposed movements to be made by the robot are proposed for an mth movement within a sequence of movements, and at least a portion of the robot and the obstacles that confine the free space are modeled. A determination is made as to whether a collision will occur between the robot and an obstacle for each proposed movement, and a plan is generated including the sequence of movements by choosing for each movement in the sequence of movements, a proposed movement that will not result in a collision and that will bring the robot closer to the goal position.

Abstract: An article transfer apparatus suitable for an operation requiring a large vertical working distance. The apparatus includes a first link driven by a motor, at least one second link coupled to the first link, and a mounting member coupled to the last one of the second link and loaded with an article to transfer. The individual links are pivotally moved using a combination of a supporting shaft, a rotating shaft and a swiveling shaft which are provided on the previous link, and the mounting member is moved upward by the shafts provided on the last link. Bevel gears are provided on the ends of the supporting shaft and the swiveling shaft and on both ends of the rotating shaft, and engaged with one another. The gear ratio between the bevel gear of the rotating shaft and that of the swiveling shaft is 2:1 on the first link and 1:2 on the last link. The other bevel gears are engaged with each other at a gear ratio of 1:1.

Abstract: A pick-up member for use with an apparatus for transporting a container from a pick-up station to a deposit station. The pick-up member being substantially formed of plastic and includes a bell-shaped head having a longitudinal bore for receiving containers and transverse bores intersecting the longitudinal bore and causing transverse movement engaging members for engaging with the containers. A control mechanism is provided to control the position of the engaging members.

Abstract: A wafer handling system for a wafer processing apparatus includes a wafer load lock chamber, a wafer processing chamber and a transfer chamber operatively coupled to the wafer load lock chamber and the wafer processing chamber. The transfer chamber includes a wafer transfer mechanism comprising a transfer arm pivotably coupled to a portion of the transfer chamber which forms an axis. The transfer arm is operable to rotate about the axis to transfer a wafer between the wafer load lock chamber and the process chamber in a single axis wafer movement. The invention also includes a method of transferring a wafer to a wafer processing apparatus. The method includes loading a wafer into a wafer load lock chamber and rotating a transfer arm into the wafer load lock chamber to retrieve the wafer therein.

Abstract: A robotic arm has a pair of gripper fingers designed to grip a variety of containers, including capped and uncapped test tubes as well as containers having unique gripping means. The fingers each have upper and lower projections separated by a groove, the respective projections facing each other when mounted to grippers on the robotic arm. The projections and groove serve to firmly hold the containers as well as self-align the unique gripping means on initially unaligned containers within the fingers as the fingers close around the containers. The fingers have clearance to avoid contact with caps on capped test tubes. Stops are provided at the top of each finger to engage one another and prevent fully closed fingers from deforming. The robotic arm may be transported along a rail mounted above the instrument and a gripper assembly, having a gripper arm, mounted to the robotic arm may be rotated above the instrument to move the container to various locations within the instrument.

Abstract: A substrate processing apparatus includes a transport robot (TR1) formed with a telescopic vertical movement mechanism of a so-called telescopically nestable multi-tier construction. A drive mechanism (D1) is initially driven to move a support member (48) upwardly to simultaneously elevate a vertical movement member (42d). As the vertical movement member (42d) rises, a pulley (47c) simultaneously moves upwardly. As the pulley (47c) moves upwardly, a vertical movement member (42c) is lifted upwardly by a belt (L1). Similar actions elevate a pair of transport arms (31a, 31b) provided on the top of a vertical movement member (42a). The increase in the number of tiers of the nestable multi-tier structure precludes the increase in height of the transport robot (TR1) in its retracted position.

Abstract: A self-teaching robot arm positioning method that compensates for support structure component alignment offset entails the use of a component emulating fixture preferably having mounting features that are matable to support structure mounting elements. Robot arm mechanism motor angular position data measured relative to component emulating fixture features are substituted into stored mathematical expressions representing robot arm vector motion to provide robot arm position output information. This information indicates whether the actual relative alignment between the robot arm mechanism and a semiconductor wafer carrier is offset from a nominal relative alignment. For manual correction, robot arm mechanism position output information provides the angular offset between the actual and nominal radial distances between the robot arm mechanism shoulder axis and two locating features of the component emulating fixture.

Abstract: A method and apparatus for transferring a semiconductor wafer in both a theta axis and a z-axis is provided. The apparatus is able to maintain maximum process and wafer throughput while minimizing the footprint of the processing machine by utilizing the concept of “vertical integration” to maximize the use of process slots and minimize the machine foot print. The wafer lift apparatus includes a bipolar electrostatic pick-up for engaging the article at an off-center position near an edge thereof. The electrostatic pick-up is positioned near one end of a transfer arm, the other end of the transfer arm being connected to a drive means for rotating the transfer arm and electrostatic pick-up in the theta axis, or vertically moving the transfer arm and electrostatic pick-up in the z-axis. The electrostatic pick-up is preferably connected to a power source by inductive coupling.

Abstract: An apparatus for processing wafers one at a time. The apparatus has a vacuum chamber 1 into which wafers are loaded through a pair of loadlocks 3, 4 which are spaced one above the other. A robot within the vacuum chamber 1 has a pair of gripper arms 22, 29 which are moveable along and rotatable about a vertical axis 23 so as to be moveable between the loadlocks 3, 4 and a wafer processing position. Each of the loadlocks 3, 4 has a vertically moveable portion 8, 26 which is moveable away from the remainder of the loadlock to provide access in a horizontal plane for one of the gripper arms 22, 29.

Abstract: An unloader for a tire vulcanizer includes a linear motion guide rail fixed vertically to a main frame of a tire vulcanizer; a slider movably engaged with the linear motion guide rail; a movable carriage having the slider so as to elevate along the linear motion guide rail; a revolving suspension member which is attached to the movable carriage and has revolving rods vertically supported by bearings; and a chuck boom which is provided to the revolving rods so as to be turnable in the horizontal direction and supports the chuck mechanism.

Abstract: A basket storage and retrieval apparatus and method has spaced parallel rows of storage racks with multiple horizontal tiers having aisles between the storage racks. Guides are connected to the aisle and a stacker retriever is connected to the guides. The stacker retriever has at least one vertical member. A carriage is mounted on the vertical member for moving up and down the vertical member and for aligning with storage rack tiers on opposite sides of the aisle. Carriers are mounted on the carriage for moving into horizontal tiers and for lowering baskets within the tiers for resting on the tiers and raising baskets from the tiers for moving the raised baskets toward the carriage. A robotic input lane extends through the storage racks. A robotic output lane extends through the storage racks. An input transfer conveyor is connected to the robotic input lane and an output transfer conveyor is connected to the robotic output lane.

Abstract: Lifting device, in particular a pallet device (10), comprising a pivotal arm (19) at the free end of which in the area of a controllable rotary mount (42) is mounted a separate support element for a lifting head (43), i.e. a pivotal support arm (46) at the free end of which the lifting head (43) is rotary mounted, and the rotary movements of the lifting head (43) are carried out by an operating cylinder (49), preferably with two end positions.

Abstract: In a thin substrate transferring apparatus of this invention, the transfer stroke of a hand of a robot is lengthened and the swivel radius is made small resulting in a more compact apparatus. The apparatus has cassettes, housing a substrate, a robot transferring the substrate, and at least one processing unit. The robot has a vertical swivel arm body swiveling in the vertical direction on a machine bed, and a horizontal swivel arm body having two arm sets swiveling in the horizontal direction on a movable machine bed. The vertical swivel arm body has a first arm and a second arm respectively joined rotatable in the vertical direction and a hand is moved substantially in parallel in the vicinity of the cassettes, or the processing unit, and the horizontal swivel arm body has a first link and a second link and the hand is moved into the cassettes, or the processing unit.

Abstract: A door transport system includes a carriage slidably mounted on an upright column for movement therealong. A swing arm, pivotally mounted to the carriage, carries at its distal end a gripper mechanism. The gripper mechanism is connected to the swing arm so that as the swing arm is moved through an arc to place its distal end over selected ones of door pickup stations for door pickup and transport to a workstation, the orientation of the gripper mechanism remains unchanged.

Abstract: A wafer sorting system is provided. The wafer sorter system is used to simultaneously sort multiple semiconductor wafers of a cassette. The wafer sorter system includes multiple arms which extend from a tower. These arms are at different vertical locations along the tower. The wafer sorter system also comprises a robotic arm which may move the tower to a position where the arms contact wafers. These wafers are in different vertical slots of a cassette. Further included in the wafer sorter system is a belt which may rotate to move arms vertically through slots of the tower. Wafers may become attached to arms by applying a vacuum suction to each arm. The arms having wafers may be rotated to the belt in a clockwise or counterclockwise direction about a portion of the tower via a slot in the tower. The arms may then be attached to the belt. After the belt moves the arms to new levels of the tower, the arms may then be rotated back to their original positions.

Abstract: An apparatus and method for loading products into a pneumatic tube carrier. The apparatus having a support with a linear truster mounted thereto. A rotary actuator is mounted at the lower end of the linear thruster for rotating action. A connecting arm is mounted on the lower end of the rotary actuator having a dual rod cylinder mounted thereon. A gripper is mounted at the end of the dual rod cylinder for gripping products. A logic controller is used for controlling and monitoring the loading of the products into the carrier.