Abstract: Substrate transport systems, apparatus, and methods are described. The systems are adapted to efficiently put or pick substrates at a destination by rotating a boom linkage to a position adjacent to the destination and then independently actuating an upper arm link housing and one or more wrist members to put or pick one or more substrates at the destination wherein the wrist member is independently actuated relative to the forearm link housing and the motion of the forearm link member is kinematically linked to the motion of the upper arm link housing. Numerous other aspects are provided.

Abstract: Boom drive apparatus for substrate transport systems and methods are described. The boom drive apparatus is adapted to drive one or more multi-arm robots rotationally mounted to the boom to efficiently put or pick substrates. The boom drive apparatus has a boom including a hub, a web, a first pilot above the web, and a second pilot below the web, a first driving member rotationally mounted to the first pilot, a second driving member rotationally mounted to the second pilot, a first driven member rotationally mounted to the boom above the a web, a second driven member rotationally mounted to the boom below the a web, and a first and second transmission members coupling the driving members to driven members located outboard on the boom. Numerous other aspects are provided.

Abstract: A robot includes an arm having a base end portion rotatably installed through a joint part and a tip end portion in which an output shaft is installed; and a drive mechanism arranged within the arm and configured to drive the output shaft at a reduced speed. The drive mechanism includes a motor having a motor shaft, a driving pulley attached to the motor shaft, a driven pulley attached to the output shaft, at least one intermediate pulley provided between the driving pulley and the driven pulley, and a plurality of belts for operatively interconnecting the driving pulley and the driven pulley through the intermediate pulley.

Abstract: A drive section for a substrate transport arm including a frame, at least one stator mounted within the frame, the stator including a first motor section and at least one stator bearing section and a coaxial spindle magnetically supported substantially without contact by the at least one stator bearing section, where each drive shaft of the coaxial spindle includes a rotor, the rotor including a second motor section and at least one rotor bearing section configured to interface with the at least one stator bearing section, wherein the first motor section is configured to interface with the second motor section to effect rotation of the spindle about a predetermined axis and the at least one stator bearing section is configured to effect at least leveling of a substrate transport arm end effector connected to the coaxial spindle through an interaction with the at least one rotor bearing section.

Abstract: A robot for use in semiconductor vacuum chambers is disclosed. The robot may include two independently-driven arms configured for wafer handling. The robot may include three motors or drive systems and a tri-axial seal to realize independent extension/retraction of each arm and overall simultaneous rotation of the arm assembly. The robot may provide enhanced throughput efficiency over other robot designs.

Abstract: A robot arm apparatus includes an arm mechanism including a base member and a link pivotally connected to the base member for pivotal motion in a horizontal plane through a rotational shaft. The link holds a regular circular transport object at its distal end. The apparatus also includes an edge detector, provided on the base member, that detects two edges of the regular circular transport object as the link pivotally rotates with respect to the base member, a pivotal angle detector that detects a pivotal angle of the link with respect to the base member, and a center position calculator that calculates a center position of the regular circular transport object with respect to the link. The calculation is based on two pivotal angles detected by the pivotal angle detector when the edge detector detects the two edges of the regular circular transport object.

Abstract: The present disclosure relates to a wafer transfer robot having a robot blade that can be used to handle substrates that are patterned on both sides without causing warpage of the substrates. In some embodiments, the wafer transfer robot has a robot blade coupled to a transfer arm that varies a position of the robot blade. The robot blade has a wafer reception area that receives a substrate. Two or more spatially distinct contact points are located at positions along a perimeter of the wafer reception area that provide support to opposing edges of the substrate. The two or more contact points are separated by a cavity in the robot blade. The cavity mitigates contact between a backside of the substrate and the robot blade, while providing support to opposing sides of the substrate to prevent warpage of the substrate.

Abstract: A dual arm robot assembly has two arms each having a set of joint/link pairs that, in conjunction with an actuator assembly. Define at least three degrees of freedom to provide independent horizontal translation and rotation of a distalmost link. A vertical motion mechanism is also provided.

Abstract: Included are: a support mechanism configured to change a pitch at which a plurality of substrate retaining units are arranged; urging mechanisms provided for the respective substrate retaining units and configured to urge the movable units to cause movable retaining members to press-hold substrates; and a push back mechanism configured to release the press-holding of the substrates by the movable retaining members. It is configured to position a push back portion of the push back mechanism at a standby position, at which the push back portion makes no contact with the movable units.

Abstract: A robot arm for transporting semiconductor wafers includes a hand, a lower arm link, and an upper arm link. The hand is connected to the lower arm link via a first joint, and the upper arm link is connected to the lower arm link via a second joint. The lower arm link is capable of being separated at a location between the first joint and the second joint.

Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.

Abstract: A vacuum actuator includes a vacuum partition wall, the interior of which can be evacuated to a vacuum, a rotor supported by the vacuum partition wall to be free to rotate, a permanent magnet provided on the outer peripheral surface of the rotor, a coil opposed to the permanent magnet, and a stator provided with the coil. The stator and the vacuum partition wall are formed integrally with each other.

Abstract: An industrial robot is provided with the first hand, the second hand, the arm and the main unit section. The base end portion of the first hand and the base end portion of the second hand are joined to the front end portion of the arm such that they overlap with each other in the top-bottom direction. The first hand and the second hand are independently rotatable with respect to the arm and also rotatable about the common center of rotation with respect to the arm in the view from the top-bottom direction. Also, the first hand and the second hand are formed being bent in the view from the top-bottom direction, and also formed to have line symmetry about a predetermined imaginary line passing through the center of rotation in the view from the top-bottom direction.

Abstract: An industrial robot may include a first hand and a second hand on which an object is mounted, a first arm which turnably holds the first hand on a first end side, a second arm which turnably holds the second hand on a first end side, a common arm which turnably holds a second end side of the first arm and a second end side of the second arm, a first turning center part which is a turning center of the first arm with respect to the common arm, a second turning center part which is a turning center of the second arm with respect to the common arm, and a main body part which turnably holds the common arm. The first hand and the second hand may be disposed so as to superpose each other, and the first hand and the second hand may be formed with an escape part.

Abstract: An object is to transmit an operation of a first parallel link to a second parallel link through a plurality of rotatably supported arms, to prevent the second parallel link from meandering or rolling so that a wafer can be transported smoothly. Arms (61 to 63) of a transmission arm unit (6) are provided for transmitting an operation of a first parallel link (4) to a second parallel link (5). An operation of the first parallel link (4) is transmitted to the second parallel link (5) so that an angle between an arm (53) and an arm (52) in the second parallel link(5) always coincides with an angle between an arm (41) and an arm (42) in the first parallel arm unit (4).

Abstract: A camera is used to take an image of an end surface of a honeycomb structure gripped by a hand. Based on the image, an initial rotation angle of the honeycomb structure around a vertical axis at a reference position where the image has been taken is recognized. An arm turning section is driven to convey the honeycomb structure gripped by the hand from the reference position to above a plugging mask. A rotation angle required to adjust the rotation angle of the honeycomb structure on the plugging mask to a desired final rotation angle is acquired based on the initial rotation angle recognized at the reference position and a rotation angle of the honeycomb structure around the vertical axis associated with the driving of the arm turning section from the reference position to above the plugging mask. The honeycomb structure is rotated based on the required rotation angle.

Abstract: A method for operating a system including at least two robots for handling parts and a robot control unit arranged for control of said at least two robots. Each of the robots is arranged with a parts handler device including a rigid arm with one end connected to the end element of an arm of the robot by a first swivel arranged for radial movement of the rigid arm in relation to the end element. Each of the robots is also arranged with a gripper connected to the rigid arm by a second swivel arranged for free, passive rotation of the gripper in relation to the rigid arm. The method includes generating instructions for the at least two robots to pick and/or move and/or place a part and sending the instructions to each robot simultaneously.

Abstract: A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.

Abstract: Robot apparatus, substrate transport systems, and methods are described. The robot apparatus and systems are adapted to efficiently put or pick substrates at a destination by rotating a boom linkage to a position adjacent to the destination and then actuating robot assemblies to put or pick the substrates at the destination. Numerous other aspects are provided.

Abstract: A transfer robot according to the embodiment includes an arm unit, a base unit, a guide unit, a lifting unit, and a vent part. The arm unit includes a robot hand capable of holding an object to be transferred. The base unit is formed into a substantially box shape. The guide unit includes a vertical shaft vertically arranged in the base unit. The lifting unit is provided to be raisable and lowerable along the vertical shaft and supports the arm unit at an upper end portion. The vent part is opened in an upper surface of the base unit and vents downflow from an outside to an inside of the base unit.

Abstract: A robot hand includes a mounting surface to which a work unit is mounted with some freedom of horizontal movement. A pair of anti-fall hooks is formed at a tip portion of the mounting surface to support a front edge portion of the work unit so as to prevent the work unit from falling off the mounting surface. A pair of support section is provided at a rear edge portion of the mounting surface to support a rear edge portion of the work unit. If, during placement of the work unit into a cassette, the work unit collides with the cassette, the work unit comes into contact with one of the support sections, and the work unit is rotated on the mounting surface about the contact point as a fulcrum so as to correct the misalignment of the work unit.

Abstract: Substrate transport systems, apparatus and methods are described. The systems are adapted to efficiently put or pick substrates at a destination by rotating a boom linkage to a position adjacent to the destination and then actuating a robot assembly to put or pick the substrate at the destination. Numerous other aspects are provided.

Abstract: A horizontal multijoint type robot is so constructed that it comprises a first arm connected through a first joint shaft to a base, a second arm connected through a second joint shaft to the first arm, and a working shaft provided rotatably and movably up and down on the distal end of the second arm, and that the arm length L1 of the first arm and the arm length L2 of the second arm are equal to each other so that the second arm is able to overlap the first arm.

Abstract: A substrate transporting robot apparatus is disclosed which is adapted to transport a substrate to and from a chamber of an electronic device processing system. The apparatus may include an upper arm rotatable in an X-Y plane, a forearm rotatable relative to the upper arm in the X-Y plane, and a wrist member rotatable relative to the forearm in the X-Y plane, the wrist member including an end effector adapted to carry a substrate. The wrist member may be subjected to independent rotation such that various degrees of yaw may be imparted to the wrist member. In some aspects, the independent rotation is provided without a motive power device (e.g., motor) being provided on the arms or wrist member, i.e., the wrist member may be remotely driven. Systems and methods using the robot apparatus are also provided as are numerous other aspects.

Abstract: An apparatus for storing contamination-sensitive flat articles, in particular for storing semiconductor wafers, comprises a plurality of box-like compartments stationary arranged on a fixed mounting rack. The compartments are open on a front side and are arranged in rows and columns side by side and one above the other on the fixed mounting rack. The compartments each have a plurality of slotted holders for receiving the flat articles, and they surround a first handling unit configured for automatically inserting and removing the flat articles into and out of the slotted holders. A closed housing forms a clean room where both the plurality of compartments and the first handling unit are arranged.

Abstract: A clamping device comprising: a distal end side stationary blocks which are provided on a side of a distal end of a workpiece retaining base, and in which stationary tilt faces tilting downwardly to a central direction of the workpiece are formed; a proximal end side stationary blocks which are provided on a side of a proximal end of the workpiece retaining base, and in which upward stationary tilt faces tilting downward toward the central direction of the workpiece are formed; and a movable block which is arranged at a position proximal to the proximal end side stationary blocks, and is capable of advancing to or retracting from a side of the distal end side stationary blocks with the workpiece being held between the blocks, and in which a downward movable tilt face tilting upwardly toward the central direction of the workpiece is formed.

Abstract: A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.

Abstract: A substrate transport apparatus including a first shaftless rotary motor including a first stator and a first rotor, the first stator being linearly distributed and the first rotor being coupled to a first arm, a second shaftless rotary motor including a second stator and second rotor, the second stator being linearly distributed and the second rotor being coupled to a second arm, the second arm being connected to the first arm and a first substrate support being coupled to at least one of the first and second arms, wherein the first stator and second stator are configured so that the first and second arms and the first substrate support are inside the stators and a motor output at a connection between the first and second shaftless rotary motors and a respective one of the first and second arms is a resultant force disposed peripheral to the first and second arms.

Abstract: A transferring apparatus 1 includes a revolving base 13, two hand mechanisms 13 and 14, and two hand drive mechanisms 30 and 40. The hand mechanisms 13 and 14 are provided at a revolving base 13 so as to be rotatable about rotation axes L2 and L3, respectively. The hand mechanisms 13 and 14 are configured to be individually rotatable by hand drive mechanisms 30 and 40, respectively. Each of the hand mechanisms 13 and 14 includes an arm 20, a hand 21, and an interlock mechanism 26. The arms 21 are provided at the revolving link so as to be rotatable about the rotation axes L2 and L3, respectively. The hands 20 are respectively provided at the arms 21 so as to be rotatable about the hand axes L4 and L5, respectively. The interlock mechanism 26 is configured such that a reduction ratio of the hand 21 to the arm 20 is 1.55, and the arm 20 and the hand 21 operate in conjunction with each other.

Abstract: Embodiments include multi-arm robots for substrate transport systems that include a boom, first and second forearms rotationally coupled to the boom, the second forearm being shorter than the first forearm, a first wrist member rotationally coupled to the first forearm, and a second wrist member rotationally coupled to the second forearm. Each of the boom, first and second forearms, and the first and second wrist members are configured to be independently rotated to carry out substrate motion profiles. Electronic device processing systems and methods of transporting substrates are described, as are numerous other aspects.

Abstract: A robot arm includes an extensible/retractable arm unit, which is configured to extend and retract in a horizontal direction and provided with a pulley arranged in a tip end portion thereof, and a robot hand rotatably connected to the tip end portion of the extensible/retractable arm unit through the pulley. The robot arm further includes a belt drive device including one or more drive power sources, which are arranged close to the robot hand and configured to directly drive a belt wound around the pulley.

Abstract: A robot hand and a robot according to an embodiment include supporting units. The supporting units are arranged on a base and contact the peripheral border of a board to grip the board. At least one of the supporting units rotates while abutting on the peripheral border of the board.

Abstract: A parallel robot of the SCARA type includes a base or a body to which two articulated elements are attached, each including an arm and a forearm that are connected by a joint and are mounted in a manner allowing rotation about one and the same geometrical axis. The two articulated elements are attached to two annular segments, respectively, that form two movable parts of a circular motor whose stator at least partially forms the body, these two movable parts being assigned to one and the same circular path of the stator. Preferably, the two movable parts are guided through one and the same guideway in order to ensure that these two movable parts rotate very precisely about the same geometrical axis.

Abstract: An industrial robot includes a hand on which a workpiece is placed, an arm that takes out the hand from a predetermined position of the workpiece and supplies the hand, an up-down moving mechanism connected to the arm by a support member, a pedestal provided at a lower portion of the up-down moving mechanism, and a pendulum stopper provided on a base on which the pedestal turns.

Abstract: A horizontal articulated robot includes a first arm and a second arm respectively supported at their base end portions by a body and the tip end portion of the second arm to be rotatable about a first joint and a second joint; and a fork including its base end portion supported by the tip end portion of the second arm to be rotatable about a third joint. The first arm includes a first enlarged portion, formed in its tip end portion, with an upper surface positioned higher than an upper surface of the base end portion of the first arm. The second arm includes a second enlarged portion, formed in its tip end portion, with a lower surface positioned lower than a lower surface of the base end portion of the second arm. The first and the second enlarged portion are at least partially overlapped with each other horizontally.

Abstract: A transporting device includes a base, a driving assembly, a first linking mechanism, and a second linking mechanism. The first linking mechanism includes first and second connecting links that re hinged together. The second linking mechanism includes third and fourth connecting links that are hinged together. The first and the third connecting links are rotatably driven by the driving assembly, such that the first linking mechanism and the second linking mechanism are movable relative to the base toward each other, away from each other, or in a same direction, for transporting a workpiece.

Abstract: A substrate transport apparatus including a drive section having at least one drive shaft and at least two scara arms operably coupled to the at least one drive shaft, the at least one drive shaft being a common drive shaft for the at least two scara arms effecting extension and retraction of the at least two scara arms, wherein the at least two scara arms are coupled to each other so that, with the at least one drive shaft coupled to the at least two scara arms, rotation of the drive shaft effects extension and retraction of one of the at least two scara arms substantially independent of motion of another of the at least two scara arms.

Abstract: A handling device which has a first bearing device forming a pivot point for two inner pivot arms, to each of which one outer pivot arm is pivotally attached. The two outer pivot arms support a platform. The platform is pivotally connected to the outer pivot arms by an outer three-ring bearing.

Abstract: A wafer handling robot includes a body and an arm having a plurality of links. A wafer holder is provided on one end of the arm. A base of the arm serves as a drive link and is rotatably connected to the body. The arm is configured such that, when the drive link is rotated by a motor, the arm end is constrained to move along a straight or curved trajectory. A starting point and an end point of the trajectory are located equal distantly from a center of rotation of the drive link. Further, the direction of the arm end at the starting point is a mirror image of the direction of the arm end at the end point with respect to a straight reference line passing through the center of rotation and a middle point between the starting and the end points.

Abstract: A self-propelled robotic hand includes: a base capable of self-propulsion; an arm attached to the base; a hand attached to the arm for grasping an object; and a base securing unit attached to the base and configured to secure the base in place by electrostatic adhesion to a surface of a structure external to the self-propelled robotic hand.

Abstract: A robot includes an arm member, a rotary actuator that swings the arm member, a hand member provided at an end of the arm member, a joint member that connects the arm member and the hand member to each other such that the arm member and the hand member are rotatable with respect to each other, a linear actuator that supports and linearly moves the rotary actuator, and a controller that operates the rotary actuator and the linear actuator in association with each other to linearly move the hand member in a forward-backward direction.

Abstract: A transfer robot according to the embodiment includes an arm unit, a base unit, a guide unit, a lifting unit, and a vent part. The arm unit includes a robot hand capable of holding an object to be transferred. The base unit is formed into a substantially box shape. The guide unit includes a vertical shaft vertically arranged in the base unit. The lifting unit is provided to be raisable and lowerable along the vertical shaft and supports the arm unit at an upper end portion. The vent part is opened in an upper surface of the base unit and vents downflow from an outside to an inside of the base unit.

Abstract: A transfer robot includes a hand section, a horizontal arm mechanism, and a lift mechanism. An object is to be placed on the hand section. The horizontal arm mechanism is connected to the hand section and includes at least two rotary joints. The horizontal arm mechanism is configured to extend and contract so as to move the hand section along one direction. The lift mechanism is configured to move the horizontal arm mechanism up and down and includes a plurality of link mechanisms disposed on a base member. The horizontal arm mechanism is disposed between parts of the lift mechanism when the horizontal arm mechanism is moved to a lowest position.

Abstract: A vacuum robot adapted to grip and transport a substrate. The robot includes a robot drive coupled to an arm and having an end-effector adapted to support the substrate. A robot gripper system is coupled to the end-effector including a front support having at least one hard stop, a movable contact element coupled to the end-effector, a bias device coupled to the contact element, and at least one actuator coupled to the end-effector configured to move the contact element between a release position and a grip position. The bias device is configured to passively bias the contact element in the grip position such that the contact element contacts an edge of the substrate to urge the substrate against the at least one hard stop to secure the substrate in the grip position and to passively bias the contact element in the release position such that the contact element is retained in the release position.

Abstract: A substrate transport apparatus having a frame, a drive section and an articulated arm. The drive section has at least one motor module that is selectable for placement in the drive section from a number of different interchangeable motor modules. Each having a different predetermined characteristic. The articulated arm has articulated joints. The arm is connected to the drive section for articulation. The arm has a selectable configuration selectable from a number of different arm configurations each having a predetermined configuration characteristic. The selection of the arm configuration is effected by selection of the at least one motor module for placement in the drive section.

Abstract: A ball bearing having external surfaces coated with ceramic materials is provided. The raceways of the ball bearing may advantageously be formed of metal such as stainless steel. The ceramic coating acts as an insulator increasing the resistance of the ball bearing to heat within the ball bearing environment. The balls within the raceway of the ball bearing may advantageously be coated with a lubricant to decrease friction in the ball bearing because the insulating ceramic coating prevents the environmental heat from causing the degradation of the lubricant.

Abstract: The invention provides a robotic arm for transporting a substrate in an ultrahigh vacuum including a carrier module and a drive module. The drive module includes a magnetic coupling, a first transmission module, a second transmission module, and a third transmission module. The magnetic coupling includes an inner shaft and an outer shaft. The first transmission module drives the first active unit of the magnetic coupling to turn a first passive unit of the inner shaft by magnetic force. The second transmission module drives the second active unit of the magnetic coupling to turn a second passive unit of the outer shaft by magnetic force. The third transmission module drives the magnetic coupling and the carrier module to perform vertical movement. The carrier module will achieve rotational motion or extending motion when the inner shaft and the outer shaft are driven by the first transmission module and the second transmission module of the drive module.

Abstract: The present invention provides a technology for holding an object to be reliably conveyed for the sake of high speed conveyance not only in a low temperature environment but also in a high temperature environment, and for reducing dust while conveying the object to be conveyed. A conveying device includes a link mechanism, which can expand and contract, has a plurality of arms to which power from a drive source is transmitted, and a mounting section which is connected to an operating tip section of the link mechanism through a drive link section and on which a substrate is mounted. The mounting section has latch sections for making contact with and latching side portions of the substrate.

Abstract: A robot includes an arm unit having a base end portion rotatably installed through a joint part. The arm unit includes a housing and a specified member arranged within the housing. At least a portion of the housing is made of a transparent material.

Abstract: A conveying system according to an embodiment includes a robot and a controller. The controller includes a switching unit. The robot includes an arm unit formed of a hand and a plurality of arms connected rotatably with respect to one another, and a base unit. An arm on a rear end side is connected to the base unit rotatably about a rotation axis, and the hand is rotatably connected to an arm on a front end side. The switching unit switches cylindrical coordinate control for controlling the arm unit such that a trajectory of the hand overlaps with any one of lines radiating from the rotation axis and rectangular coordinate control for controlling the arm unit such that the trajectory of the hand overlaps with none of the lines at a predetermined timing.