Abstract: A system for loading/unloading sheets is disclosed, some of which also being of metal, and handling method thereof, serving a laser cutting center. The system includes a pair of rails (1, 2), supported at a preset height above a feeding tray (T) of the cutting center, whereon at least one Cartesian robotized hand is movably mounted, capable of moving along horizontal axes X and Y as well as along a vertical axis Z, mutually orthogonal, and including at least two bridge cranes (3, 4) sliding along the rails (1, 2) each of which supports at least one pair of robotized hands (5-8), and the robotized hands (5-8) have an electromagnetic pick-up head which may be coupled with a suction-cup device (103). Feeding tray (T) consists of bars whereon small tesserae (204) of ceramic material are fitted.

Abstract: A method and apparatus for transferring a workpiece, such as a large wind turbine component, in datum alignment between tools during a manufacturing process is described. The workpiece is transferred from a first tool to a second tool, and the method comprises arranging a support structure in datum registration with the first tool; attaching the workpiece to the support structure; releasing the workpiece from the first tool; arranging the support structure in datum registration with the second tool and such that the workpiece is supported by the second tool; and releasing the workpiece from the support structure. Arranging the support structure in datum registration with the first and second tools ensures correct alignment of the workpiece with respect to the second tool. The invention eliminates the requirement to provide datum features on the workpiece itself. In preferred examples, the workpiece is attached to the support structure by means of vacuum.

Abstract: A method and an apparatus for transferring a substrate are described. In the method, a substrate is provided on the surface of a first plate at a first position, the first plate is moved from the first position to a second position in an upper space of a second plate, the substrate is lifted away from the surface of the first plate, the first plate is moved away from the second position, and the substrate is put on the surface of the second plate from the upper space. The apparatus includes a first plate and a second plate each having a surface for carrying the substrate, wherein the first plate can be moved between the first position and the second position.

Abstract: An electronic device processing system is disclosed. The system includes a transfer chamber including facets and a plurality of single-entry process chambers coupled to the facets, wherein at least some process chambers are non-focalized process chambers, at least one load lock chamber, and a robot apparatus operable to transport substrates between the process chambers and the load lock chamber(s). Robot apparatus includes an upper arm, a forearm, and a wrist member adapted for independent rotation relative to the forearm about a wrist axis, and an end effector adapted to carry a substrate. Various degrees of yaw may be imparted to the wrist member in order to service the non-focalized process chambers. Systems and methods are also provided as are other aspects.

Abstract: A wafer handling system may include upper and lower linked robot arms that may move a wafer along a nonlinear trajectory between chambers of a semiconductor processing system. These features may result in a smaller footprint in which the semiconductor processing system may operate, smaller transfer chambers, smaller openings in process chambers, and smaller slit valves, while maintaining high wafer throughput. In some embodiments, simultaneous fast wafer swaps between two separate chambers, such as load locks and ALD (atomic layer deposition) carousels, may be provided. Methods of wafer handling are also provided, as are other aspects.

Abstract: A feed mechanism to feed objects for insertion into tobacco industry products including a rotary member for receiving objects, the rotary member having a plurality of channels, each channel being adapted so that in use objects assemble in a row in the channel which rotates with the rotary member, each channel having an outlet for dispensing an object from the channel, and a pneumatic mechanism configured to hold an object in a row prior to the object being dispensed.

Abstract: A transfer chamber for semiconductor device manufacturing includes (1) a plurality of sides that define a region configured to maintain a vacuum level and allow transport of substrates between processing chambers, the plurality of sides defining a first portion and a second portion of the transfer chamber and including (a) a first side that couples to two twinned processing chambers; and (b) a second side that couples to a single processing chamber; (2) a first substrate handler located in the first portion of the transfer chamber; (3) a second substrate handler located in the second portion of the transfer chamber; and (4) a hand-off location configured to allow substrates to be passed between the first portion and the second portion of the transfer chamber using the first and second substrate handlers. Method aspects are also provided.

Abstract: A feed mechanism to feed objects for insertion into tobacco industry products including a rotary member for receiving objects, the rotary member having a plurality of channels, each channel being adapted so that in use objects assemble in a row in the channel which rotates with the rotary member, each channel having an outlet for dispensing an object from the channel, and a pneumatic mechanism configured to hold an object in a row prior to the object being dispensed.

Abstract: An apparatus including at least one of a stainer module and a coverslipper module; an imaging module; a storage module; an automated transport module for transporting at least one slide between at least one of the stainer module and the coverslipper module, the imaging module and the storage module; and a controller. A method including processing at least one slide; determining whether an imaging module is available for imaging of a biological specimen on the at least one slide; transporting the at least one slide to the imaging module using an automated transport module; and transporting the at least one slide to a storage module using the automated transport module when it is determined that the imaging module is not available. A system including a processing module for processing at least one slide including a biological specimen thereon. A machine readable medium.

Abstract: This invention provides a parameter determination assisting device and a parameter determination assisting program enabling a more rapid and easy determination of a parameter to be set in a processing device, which obtains a processing result by performing a process using a set of parameters defined in advance on image data obtained by imaging a measuring target object. A user can easily select an optimum parameter set when a determination result and a statistical output are displayed in a list for each of a plurality of trial parameter candidates. For instance, while trial numbers “2”, “4”, and “5”, in which the number of false detections is zero, can perform a stable process, the parameter set of the trial number “2” is comprehensively assumed as optimum since the trial number “2” can perform the process in the shortest processing time length.

Abstract: A positioning of a motor vehicle in absence of action of a motor or engine that drives the motor vehicle includes centering the vehicle transversely with respect to a longitudinal-vertical reference plane that is invariable in a fixed frame of reference until a center of a first axle of the vehicle coincides or more or less coincides with the reference plane whatever the gauge width of the first axle of the vehicle.

Abstract: A plurality of single crystal semiconductor substrates having a rectangular shape are disposed on a tray. Depression portions are provided in the tray so that the single crystal semiconductor substrates can fit in. The single crystal semiconductor substrates disposed on the tray are doped with hydrogen ions, so that damaged regions are formed at a desired depth. A bonding layer is formed on surfaces of the single crystal semiconductor substrates. The plurality of single crystal semiconductor substrates in each of which the damaged region is formed and on which the bonding layer is formed are disposed on the tray and bonded to the base substrate. By heat treatment, the single crystal semiconductor substrates are separated at the damaged regions; accordingly, a plurality of single crystal semiconductor layers which are thinned are formed over the base substrate.

Abstract: A wind turbine includes a tower having an interior, an exterior, a lower end and an upper end; a nacelle coupled to the tower adjacent the upper end and movable to define at least two yaw positions of the nacelle; a rotor coupled to the nacelle; and an access apparatus disposed about the tower adjacent the upper end thereof, the access apparatus defining a passageway into the nacelle that is exterior of the tower, and the access apparatus providing access to the nacelle in the at least two yaw positions of the nacelle. A method for transporting equipment and personnel to the nacelle using the access apparatus is disclosed. A method for assembling a wind turbine having such an access apparatus is also disclosed.

Abstract: In an embodiment, the present invention discloses a EUV cleaner system and process for cleaning a EUV carrier. The euv cleaner system comprises separate dirty and cleaned environments, separate cleaning chambers for different components of the double container carrier, gripper arms for picking and placing different components using a same robot handler, gripper arms for holding different components at different locations, horizontal spin cleaning and drying for outer container, hot water and hot air (70 C) cleaning process, vertical nozzles and rasterizing megasonic nozzles for cleaning inner container with hot air nozzles for drying, separate vacuum decontamination chambers for outgassing different components, for example, one for inner and one for outer container with high vacuum (e.g., <10?6 Torr) with purge gas, heaters and RGA sensors inside the vacuum chamber, purge gas assembling station, and purge gas loading and unloading station.

Abstract: A substrate accommodating and processing apparatus is provided with a cassette mounting table, a processing part, a substrate transfer mechanism, a partition wall, a cassette stage, and a lid attaching/detaching mechanism. The lid attaching/detaching mechanism is provided with a key configured to be engaged with a key hole installed in the lid, and configured to switch a latch between locking and unlocking positions. The mechanism is also provided with a lid abnormality detecting sensor, a lid attaching/detaching mechanism closing sensor, a lid attaching/detaching mechanism opening sensor, a pressure sensor and a control part.

Abstract: Systems and methods are disclosed, which permit filling containers with a product. A filling arm is disposed within a chamber and an optical sensor is configured to sense openings of the containers within the chamber. Locations of the sensed openings are used to guide the filling arm to fill the containers with a product.

Abstract: A component handler (100) may include: a test plate (102) including multiple circular component-seating tracks (104) each including multiple component-seating sites (500) configured to retain an electrical component (510) such that its face (522) faces away from the test plate (102); a component receiving system (114, 106, 300, 302, 306, 308, 310, 400, 402, 502, and/or 508) positioned along a rotation path of the seating tracks (104); a component test module assembly (1502) for electrically contacting each electrical component (510) seated in a component-seating site (500); one or more collection bins (124); and a collection assembly (120) for collecting some of the electrical components (510) from component-seating sites (500) and directing the electrical components (510) into the bins (124) based on one or more tests conducted at the component test module assembly (1502).

Abstract: Systems and methods for providing wafer access in a wafer processing system are disclosed herein. The methods may include docking a first wafer cassette on the wafer processing system and removing a selected wafer from the first wafer cassette with the wafer processing system. The methods further may include performing a process operation on the selected wafer with the wafer processing system and undocking the first wafer cassette from the wafer processing system while performing the process operation. The methods also may include docking a second wafer cassette (which may be the same as or different from the first wafer cassette) on the wafer processing system, inventorying the second wafer cassette with the wafer processing system, and/or subsequently placing the selected wafer in the second wafer cassette. The systems may include wafer processing systems that include a controller that is programmed to perform at least a portion of the methods.

Abstract: The invention provides an improved robotic handler for multi-well plates. The handler comprises a vertical elevator with integral mounts for instruments used in cellular experiments. This solution reduces overall mechanical complexity while reducing the working volume of previous collections of devices with similar function.

Abstract: Provided are systems and methods for layered manufacturing using dispenser robots. The system for layered manufacturing may comprise a plurality of dispenser robots configured to dispense one or more materials. The one or more materials may be layered one on top of another to form a plurality of products. The system may also comprise a moving unit configured to enable movement of the plurality of dispenser robots in relation to the plurality of products. The plurality of dispenser robots may include a plurality of holders configured to grip and release piece of materials. Additionally, the system may comprise one or more attachment units configured to attach the one or more materials to the plurality of products.

Abstract: The present invention is directed to an apparatus for supporting an annular bead core-apex subassembly, the apparatus comprising a spacer disc for supporting the annular bead core-apex subassembly, and a clamping device comprising a supporting surface for supporting the spacer disc, as well as a plurality of clamping elements for selectively clamping the spacer disc to the supporting surface. The clamping elements are movable between an expanded position in which the spacer disc is clamped to the supporting surface, and a retracted position in which the spacer disc is released and can be lifted from the supporting surface. Moreover, the present invention is directed to a system comprising a respective apparatus for supporting an annular bead core-apex subassembly as well as the subassembly. Finally, the present invention is also directed to a method of transporting an annular bead core-apex subassembly.

Abstract: Systems, computer program products, and methods useful for handling or managing microplates are provided.

Abstract: After a cassette is mounted on a cassette mounting part, a control unit instructs a substrate treatment apparatus to start treatment on substrates in the cassette. Thereafter, the control unit indicates, to the substrate treatment apparatus, a cassette on the cassette mounting part to which a substrate is transferred at completion of the treatment. If the transfer destination cassette for the substrate at the completion of treatment has not been indicated when a number of remaining treatment steps for the substrate reaches a predetermined set number, an alarm is given from the substrate treatment apparatus. This alarm is sent from the substrate treatment apparatus to the control unit, and the control unit indicates a transfer destination cassette for the substrate.

Abstract: A vacuum processing apparatus includes a plurality of vacuum containers; a vacuumized transfer unit connected with the vacuum containers and having a transfer chamber; a plurality of lock chambers connected to the vacuumized transfer unit; a vacuumized transferring section arranged in the transfer chamber to transfer the sample between each of the lock chambers and each of the processing chambers inside the plurality of vacuum containers; an atmospheric transfer container having a space through which the sample is transferred under the atmospheric pressure; an atmospheric transfer unit arranged in the atmospheric transfer container and adapted to transfer the sample from a cassette; and a controller operative on the basis of schedule information of a plurality of operations to adjust the operations, the information including times of stagnation of the plurality of samples and set therefor.

Abstract: An automated insertion apparatus for inserting at least one insert into each of a multiplicity of reactor channels. The apparatus comprises a feed position that supports a magazine that holds a multiplicity of inserts, and a transport mechanism defining at least two support channels each configured to hold a single insert, and means to transport each support channel repeatedly between an input location adjacent to the feed position and an output location, and means to feed one insert from a magazine at the feed position into a support channel of the transport mechanism at the input location. The apparatus also includes a transfer mechanism to push an insert into a reactor channel, and an alignment mechanism to ensure that the insert that is being inserted is aligned with the reactor channel. The transfer mechanism is adjacent to the output location. The transport mechanism may be a rotary drum.

Abstract: A method and apparatus for orientating discrete objects, such as gemstones, is described. The method comprises providing the objects on a travelling path; providing a pair of opposed walls (38) extending generally along the direction of the path; and generating relative oscillatory movement (14) between the pair of walls (38) and the travelling path (in a direction generally transverse to the direction of the path), so that the pair of walls (38) imparts lateral force to the objects to thereby urge them into their most stable orientation as they progress along the path. A device for checking the orientation of the discrete objects is also described.

Abstract: A highly efficient Automated Material Handling System (AMHS) that allows an overhead hoist transport vehicle to load and unload Work-In-Process (WIP) parts directly to/from one or more WIP storage units included in the system. The AMHS includes an overhead hoist transport subsystem and at least one vertical carousel stocker having a plurality of storage bins. The overhead hoist transport subsystem includes an overhead hoist transport vehicle traveling along a suspended track defining a predetermined route, which runs adjacent to the carousel stocker, thereby allowing the overhead hoist transport vehicle to access a WIP part directly from one of the storage bins. At least one of the storage bins includes a movable shelf operative to move laterally from a first position along the carousel path to a second position near the overhead hoist transport vehicle.

Abstract: A substrate treatment system includes a plurality of treatment apparatuses, a position adjustment apparatus adjusting a center position of the substrate, a substrate transfer apparatus transferring the substrate to the treatment apparatuses and the position adjustment apparatus, and a control unit controlling operations of the apparatuses. The substrate transfer apparatus includes an arm part curved along a peripheral edge portion of the substrate with a radius of curvature larger than a radius of the substrate, and a holding part projecting inward from the arm part and holding a rear surface of the substrate. The position adjustment apparatus includes a mounting table which holds a central portion of the rear surface of the substrate and is rotatable and horizontally movable. The control unit controls the mounting table such that the center position of the substrate held on the mounting table is aligned with a center position of the arm part.

Abstract: Devices and methods for handling workpieces, in particular workpieces in the form of processing products of a metal sheet processing operation, are described. The devices include one or more retention members that are movably supported by a retention member bearing and a transverse guide device. If the transverse guide device is moved relative to the retention member along a lifting axis out of a non-operative lifting position into an operative lifting position or out of an operative lifting position into a non-operative lifting position on a fixed retention member bearing, the retention member is thereby moved from a non-operative position into an operative position or out of an operative position into a non-operative position. In the operative position, the retention member can engage behind an edge of a workpiece, but cannot do so in the non-operative position.

Abstract: A substrate processing system includes a plurality of processing chambers configured to perform a predetermined processing with respect to substrates, a transfer device configured to transfer the substrates to the processing chambers in a predetermined order, and a delivery unit configured to deliver the substrates between the delivery unit and the transfer device. The substrate processing system configured to sequentially process the substrates by repeating an operation in a predetermined transfer order. The substrate processing system includes a transfer order setting unit and a transfer control unit configured to switch the first transfer order to the second transfer order.

Abstract: An automated system and method for storing/retrieving vessel holders is presented. A first storage compartment comprises first storage sections. A first translating mechanism vertically translates one storage section to a loading level for loading holders into the first storage compartment and translates one storage section to a handing-in level for handing in holders to/from an analyzer. A second storage compartment comprises second storage sections. A second translating mechanism vertically translates one second storage sections to a handing-out level and translates one storage section to an unloading level for unloading holders from the second storage compartment. A first transport mechanism comprises a first conveyor for transporting holders from a first storage section at the handing-in level to a handing-over station. A second transport mechanism comprises a second conveyor for transporting holders from the handing-over station to a second storage section at the handing-out level.

Abstract: A substrate transfer method for transferring target substrates proceeds in a substrate processing system for performing processes including a photolithography sequence on the target substrates. The system includes a first automated substrate transfer line configured to transfer the target substrates among a plurality of process sections for respectively performing processes on the target substrates, and a second automated substrate transfer line of a cyclical type dedicated to a plurality of process apparatuses of a photolithography process section, which are configured to perform a series of processes in the photolithography sequence, the second automated substrate transfer line being located relative to the first automated substrate transfer line so as for the target substrates to be transferred therebetween.

Abstract: A glass-plate working apparatus includes a glass-plate supporting portion 20a of a feed conveyor 7, a glass-plate supporting portion 20b of a cutting section 2, a glass-plate supporting portion 20c of a bend-breaking section 4, a glass-plate supporting portion 20d of a grinding section 3, and a glass-plate supporting portion 20e of a discharge conveyor 8; a cutting head 9, a bend-breaking device 66, and a grinding head 10 for processing glass plates 5 which are respectively supported by the supporting portions 20b, 20c, and 20d; and a transporting device 89 for transporting the glass plate 5 on the supporting portion 20a onto the supporting portion 20b, the glass plate 5 on the supporting portion 20b onto the supporting portion 20c, the glass plate 5 on the supporting portion 20c onto the supporting portion 20d, and the glass plate 5 on the supporting portion 20d onto the supporting portion 20e, respectively.

Abstract: A fabrication system comprises a global system comprising a plurality of stockers and a global transportation system connected to the stockers, a local system coupled to the global system through the global transportation system, wherein the local system comprises a first buffer located at a boundary between the global system and the local system, a plurality of lithography apparatuses coupled to the first buffer through a local transportation system and an empty pod buffer.

Abstract: For the transport of a substrate from a cassette to a back surface cleaning processing unit in a cleaning processing block, a transfer robot rotates the substrate through 90 degrees from a horizontal attitude in which the front surface of the substrate is positioned to face upward into a standing attitude while transporting the substrate out of a cassette to a substrate passing part, and passes the substrate in the standing attitude to the substrate passing part. The substrate passing part holds the substrate in the standing attitude. A main transport robot receives the substrate held in the standing attitude. The main transport robot rotates the substrate through 90 degrees from the standing attitude into a horizontal attitude in which the back surface of the substrate is positioned to face upward while transporting the substrate from the substrate passing part to the back surface cleaning processing unit.

Abstract: Semiconductor processing equipment. At least some of the illustrative embodiments are systems including: a front end robot configured to pull individual wafers from at least one wafer carrier; a linear robot in operational relationship to the front end robot, the linear robot configured to move wafers along an extended length path; and a first processing cluster in operational relationship to the linear robot. The first processing cluster may include: a first processing chamber; a second processing chamber; and a first cluster robot disposed between the first and second processing chambers. The first cluster robot is configured to transfer wafers from the linear robot to the processing chambers, and configured to transfer wafers from the processing chambers to the linear robot.

Abstract: A tactile wafer lifting apparatus includes a pedestal and a vertical drive connected to the pedestal. The vertical drive is defined to provide controlled upward and downward movement of the pedestal. The tactile wafer lifting apparatus also includes a wafer support member disposed over the pedestal. A tactile switch is disposed between the wafer support member and the pedestal such that sufficient downward force on the wafer support member causes activation of the tactile switch. The tactile switch is connected to the vertical drive so as to interrupt upward movement of the pedestal and wafer support member disposed thereover upon activation of the tactile switch.

Abstract: A test rack for a storage device testing system includes a plurality of test slot carriers. Each of the test slot carriers includes a plurality of test slot assemblies. The test slot assemblies are configured to received and support storage devices for testing. The test rack also includes a chassis. The chassis includes a plurality of carrier receptacles for releasable receiving and supporting the test slot carriers. The test slot carriers are interchangeable with each other among the various carrier receptacles.

Abstract: A fab can be constructed as a round or rectangular annular tube with a primary cleanspace located in-between its inner and outer tubes. The fab can be encircled with levels upon which tools can be densely packed while preserving unidirectional air flow. If only tool ports are inside, and robotics are used, primary cleanspace size can be minimized. Highly simplified robotics can be used. Tools can be removed and repaired centrally. A secondary cleanspace can be added for tool bodies. Multilevel construction enhances use of prefabricated units for fab build or maintenance. Curves or folds, applied to a conventional planar cleanroom, can construct a wide range of fab geometries, including a tubular non-annular fab. A fab can also be constructed according to a curved or non-curved sectional cut of an annular tube. A novel fab, of a non-curved section, can include a non-segmented cleanspace or have its tools vertically stacked.

Abstract: An article storage facility includes a transport device for transporting containers to a plurality of storage sections, an inactive gas feed section which supplies inactive gas to the interior of the container stored in the storage section, and a controller for controlling operation of the device and operation of the flow rate adjusting device of the inactive gas feed section. The controller is configured to cause a state of the inactive gas feed section associated with the storage section to be both a storage feed state and an unfeeding state depending on if the carrier is stored or not stored be. The controller is also configured to store the transporting container in the storage section after changing the state of the inactive gas feed section associated with the storage section in which the container is to be stored to a pre-storage feed state from the unfeeding state.

Abstract: Product management and/or prompt defect analysis of a semiconductor device may be carried out without reducing the throughput in assembly and testing. Unique identification information is attached to a plurality of substrates (lead frames) used in manufacturing a semiconductor device (QFP) and to a transport unit for transporting a plurality of substrates, respectively. Identification information (rack ID) of the transport unit and identification information (substrate ID) of the substrate stored into the transport unit are associated with each other. The substrate is taken out from the transport unit set to a loader unit of each manufacturing apparatus and supplied to a processing unit, of the apparatus and in storing the substrate, the processing of which is complete, into a transport unit of an unloader unit of the apparatus, an association between identification information of the transport unit and the identification information of the substrate is checked.

Abstract: The present invention provides various methods for utilizing aspects of cleanspace fabricators. In some embodiments methods related to the development of tooling in applications or “apps” type models are discussed. In other embodiments methods related to product development based on crowd sourcing are discussed. In other embodiments licensing models for design blocks, process flows, assembly processing and assembly related intellectual processing are discussed.

Abstract: A transport and handing-over arrangement for disc shaped substrates, comprising a carrier (3) and a take-over arrangement (15). Both are moveable relative to each other. A relatively heavy substrate carrier (7) of magnetisable material is taken-over from the take-over arrangement (15) by distance control of a permanent magnet (17) at the take-over arrangement (15) or is returned therefrom to a carrier (3). The controlled drive of the permanent magnets (17) in the take-over arrangement (15) is performed by means of pneumatic piston/cylinder arrangements (19).

Abstract: A system and device for use in a security area, and more particularly, a rack system and holding device for placing various objects that are processed through a security area are taught.

Abstract: Systems, apparatus and methods for transporting substrates between system components of an electronic device manufacturing system are provided. The systems and apparatus include an electrostatic end effector having a base, an electrode pair on the base, and spacer members for spacing the substrate from the electrode pairs to provide a gap between the electrode pair and the substrate. Methods of the invention as well as numerous other aspects are provided.

Abstract: This robot hand includes a first finger portion and a second finger portion being relatively movable in a direction in which an object to be grasped is grasped and bar-shaped claw members fixed to the first finger portion and the second finger portion. A plurality of claw members are fixed in parallel to at least either the first finger portion or the second finger portion.

Abstract: An apparatus for transporting a wafer-shaped article, comprises a holder configured to hold a wafer-shaped article of a predetermined diameter, attached to a robot arm that is horizontally movable, via a linkage. The holder is vertically movable relative to the distal end of the robot arm via the linkage from a retracted position to an extended position.

Abstract: A substrate relay apparatus (200) includes a chassis (202) that is arranged to surround openings (144) formed at side walls of adjacent transfer apparatuses and has a dimension in the width direction between the side walls of the transfer apparatuses that is smaller than the substrate size, a gate valve (201) that is arranged inside the chassis (202) between the side walls of the adjacent transfer apparatuses and is configured to open and close with respect to the openings (144), and support pins (250) that are arranged on both sides of the gate valve (201) and are configured to support a wafer (W) that straddles the gate valve (201).

Abstract: An apparatus includes a dedicated material handling module having a dedicated automated material handling system (AMHS) defines a transport route between a first tool and a second tool selected from a plurality of tools in a fabrication facility. The dedicated ANHS is configured to transport wafer carriers between the first tool and the second tool or vice versa independent of a fabrication facility AMHS that is configured to transport wafer carriers among the plurality of tools. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.

Abstract: A palletized framing system for a motor vehicle body assembly system in which the pallet with a body structure positioned thereon is positioned at the framing station on balls to establish the vertical Z dimension with the pallet free to float on the balls in longitudinal X and lateral Y dimensions, whereafter positioners carried by one of the gates of the framing station engage and lock onto the pallet to precisely position the pallet and the body structure at the framing station at X and Y dimensions corresponding to the precisely attainable X and Y positioning of the gate.