Abstract: A substrate processing system and substrate transferring method is disclosed, which is capable of transferring a substrate bi-directionally through the use of substrate transferring device provided between two rows of processing chambers arranged linearly, thereby improving the substrate-transferring efficiency, the substrate processing system comprising a transfer chamber having at least one bi-directional substrate transferring device for bi-directionally transferring a substrate; and a plurality of processing chambers for applying a semiconductor-manufacturing process to the substrate, wherein the plurality of processing chambers are linearly arranged along two rows confronting each other, and the transfer chamber is interposed between the two rows of the processing chambers, wherein the at least one bi-directional substrate transferring device comprises a moving unit provided inside the transfer chamber, and horizontally moved by a linear motor; and a bi-directional substrate transferring unit provided in

Abstract: An apparatus and a method for handling a container product, in particular a container or a preform for producing a container, where the product is provided with an orientation mark and adapted to be rotated to a predetermined rotary angle position relative to a holder by an orienting means. To do so in a structurally simple and reliable manner, the orienting means are arranged at a transfer site between a holder of a first conveying unit and a holder of a second conveying unit, at which the holders move relative to one another in an accompanying movement, and the rotary movement of the product to the predetermined rotary angle position is derived from the relative movement of the holders.

Abstract: A substrate transfer method of delivering a substrate transferred by a transfer arm to a mounting unit and associated apparatus. The method includes moving the transfer arm to a position above the mounting unit, and, when delivering the substrate onto the mounting unit, detecting a mounting portion of the mounting unit by a mounting portion detector having a light emitting element and a light receiving element provided at opposite positions across a center point of the transfer arm on a bottom surface of the transfer arm, and then lowering the transfer arm in an oblique direction to mount the substrate on the mounting unit.

Abstract: A method is provided to regulate a conveying stream composed of articles of the tobacco-processing industry between at least one tray discharger and connected to at least one feed device by a conveying element that conveys a mass flow of the articles. The feed device has at least one chamber designed to receive the articles, and each chamber has at least two feed units running independently of each other to feed the articles to subsequent apparatuses. Each feed unit has an individual feed rate (P1, P2, . . . Pn). The method includes monitoring a level within the feed device using monitoring elements; sending a signal to each of the at least one tray dischargers for regulating the speed of transport of the conveying element and the feed rate (in articles/min) as a function of a current level within the feed device, and adapting the speed of transport to a desired level.

Abstract: A transfer chamber for a substrate processing tool includes a main body having side walls adapted to couple to at least one processing chamber and at least one load lock chamber. The main body houses at least a portion of a robot adapted to transport a substrate between the processing chamber and the load lock chamber. A lid couples to and seals a top of the main body of the transfer chamber. The transfer chamber also has a domed bottom adapted to couple to and to seal a bottom portion of the main body of the transfer chamber.

Abstract: The invention related to dispensing discrete products at the end of a production line to be placed loosely or in an orderly manner into packaging containers. The dispensing line according to the invention comprises a means for alternately controlling, particularly on the basis of location information gathered in a visiometric checkpoint through which the products are caused to pass, the routing of products to be placed loosely into packaging containers to a comb sort where they are regrouped by lot, or the individual inputting of products to be placed into packaging containers in an orderly manner by robotic grasping and transferring means.

Abstract: The invention relates to a method and to an apparatus for the rapid transport of glass sheets between different manufacturing stations in a spacious manufacturing plant for producing photovoltaic elements, wherein said manufacturing plant is subject to clean room conditions, comprising the following features: a) a freely movable mounting for conveying a lifting portal, b) at least one vertical lifting carriage for vertically transporting a glass sheet by means of a telescoping jack plate, wherein said plate can be extended in two opposite directions, has a local lowering and raising function and can transport a glass sheet continuously from one side of the vertical lifting carriage to the other side, c) for operation, the mechanically moved parts are encapsulated free of emissions in a clean room and made of abrasion-proof material, d) a cordless energy supply unit for operating the mounting.

Abstract: Embodiments of the present invention provide apparatus and methods for loading and unloading a multiple-substrate processing chamber segment by segment. One embodiment of the present invention provides an apparatus for processing multiple substrates. The apparatus includes a substrate supporting tray having a plurality of substrate pockets forming a plurality of segments, and a substrate handling assembly configured to pick up and drop off substrates from and to a segment of substrate pockets of the substrate supporting tray.

Abstract: There is provided a method of detecting a stop of a transport means in which the stop of the transport means after operation can be quickly and easily detected and in which the throughput and the ratio of utilization can be improved without incurring an increase in the number of parts. An apparatus is used which is provided with a drive motor and a transport arm one side of which is mounted on a rotary shaft of the drive motor. As the drive motor there is used one in which an induced electromotive force is generated when a force in the direction of rotation is applied to the rotary shaft. Then, an article S to be transported is held on the other side of the transport arm. When the above-described drive motor is operated to drive the rotary shaft by a predetermined angle of rotation and then stopped, the above-described induced electromotive force to be generated due to the vibrations of the transport arm is detected.

Abstract: Disclosed herein is a semiconductor manufacturing apparatus including a transfer chamber provided with a substrate moving device to move substrates, a load lock chamber to align the substrates and to load and unload the substrates into and out of the transfer chamber, and at least one process chamber to process the substrates transferred from the transfer chambers. Each of the at least one process chamber includes a chamber body provided with a substrate entrance formed on a side surface thereof, a substrate support provided within the chamber body such that at least two substrates are disposed on the substrate support, and at least one divider provided within the chamber body to align the at least two substrates.

Abstract: In a substrate processing apparatus, a storage device, an indexer block, a processing block and an interface block are arranged to line up in this order. The storage device includes a plurality of openers on which a carrier storing a plurality of substrates can be placed. The carrier is carried in the storage device. In the storage device, the carrier is transported among the plurality of openers by a transport device. The transport device includes first and second hands configured to be able to hold the carrier and move in a horizontal direction and a vertical direction. The second hand is provided below the first hand.

Abstract: Only a wafer for QC check may be transferred and a production wafer may prevent from being transferred into an assigned process chamber whose QC check is not completed after a maintenance task, and the production wafer may be processed the assigned process chamber after the completion of the QC check. The wafer for QC check is transferred while inhibiting a transfer of the production wafer into the assigned process chamber, and the production wafer is transferred into each of the process chambers of the plurality except the assigned process chamber.

Abstract: The present invention is related to a method for transferring substrates. The method comprise simultaneously transferring two substrates, by means of a transfer unit, between first support plates disposed to be vertically spaced apart from each other and second support plates arranged abreast in a lateral direction. The transfer unit comprises a top blade and a bottom blade converted to a folded state where they are vertically disposed to face each other and an unfolded state where they rotate at a preset angle in opposite directions. The transfer unit place/take a substrate on/out of the first support plates under the folded state and place/take a substrate on/out of the second support plates under the unfolded state.

Abstract: Even when a module constituting a multi-module becomes an unavailable module, transfer of substrates can be promptly performed, while restricting generation of inferior products. When a destination module of a multi-module becomes unavailable before a substrate is transferred to the destination module, a destination of the substrate is changed to a module to which a substrate subsequent to the substrate is to be loaded. Upon generation of an unavailable module, before the transfer unit accesses the module on an upstream end of the transfer cycle, the transfer cycle proceeds until a precedent substrate becomes ready to be unloaded from the changed destination module. Alternatively, upon generation of an unavailable module, when the transfer unit is located on an upstream side of the unavailable module in the transfer cycle, the transfer operation of the transfer unit is made standby until a precedent substrate becomes ready to be unloaded in the changed destination module.

Abstract: An organic light-emitting (OLED) display panel cell transfer apparatus that includes: a base; a scribing table to cut OLED display panel sticks into cells; a cell transfer unit disposed above the base, to transfer the cells from the scribing table to a loading location; a first shuttle to receive the cells from the cell transfer unit, at the loading location, and to transfer the cells from the loading location to a testing location; and a second shuttle to receive the cells from the cell transfer unit, at the loading location, and to transfer the cells from the loading location to the testing location.

Abstract: Systems and methods that process a plurality of surgical instruments for cleaning and/or packaging. A device identifies a robot-ready insert having a predetermined configuration for accepting at least one type of surgical instrument. The surgical instruments are identified and oriented according to type using an automated apparatus. Specialized tools are also provided for automatically opening and closing surgical instruments, flipping instruments and assisting in the processing and maintenance of surgical instruments. The automated apparatus then places each of the surgical instrument types in one or more predetermined areas of the insert, configured to accept a predetermined set of surgical instrument types.

Abstract: A substrate carrying device decides whether or not a substrate received from a substrate supporting device is supported therein in a correct position. A support arm provided with support lugs and strain gages attached to the support lugs, respectively, is advanced to a forward position, and then the support arm is raised relative to lifting pins supporting a wafer to receive the wafer from the lifting pins. The strain gages measure strains produced in the support lugs, respectively, when load is placed on the support lugs. Decision about whether or not the wafer is supported in a correct position on the support lugs is made on the basis of strains measured by the strain gages. When it is decided that the wafer is supported in an incorrect position on the support lugs, the retraction of the support arm is inhibited.

Abstract: Methods and apparatus for selecting and combining packages in an outbound container by employing autonomous transfer and transport vehicles which move on a network of roadways to carry a plurality of individual cases each containing the same kind of product from a loading station and to a destination station where individual packages are combined in the outbound container. The travel of each vehicle through the roadway network is computer controlled, and each vehicle includes means for automatically loading and unloading packages from predetermined locations on the network.

Abstract: Disclosed herein is a method for transferring die from a wafer that includes picking two or more die from a wafer using a multi-spindle picking head, wherein the multi-spindle picking head is rotatable. The method includes moving the multi-spindle picking head from the wafer feeder to a placement machine, and presenting the two or more picked die to the placement machine for subsequent placement. Further disclosed herein is an apparatus for transferring die from a wafer that includes a picking head with a plurality of spindles. Each spindle is configured to pick a die from a wafer of die. The multi-spindle picking head is rotatable and moveable in at least one direction.

Abstract: A sorter, method, and software product are provided for sorting mail pieces. The mail pieces are fed into a sorter, sorted, and then deposited into mail trays. The mail trays are then moved from the deposit area to a dispatch area, in the order they will be loaded into a truck. That order is preferably the same as the order in which the containers received the mail pieces.

Abstract: A work machining apparatus capable of reducing the stand-by time in each main spindle as much as possible and can improve the operation ratio is provided. In a work machining apparatus having at least one movable spindle 22 which moves forward and backward between the work supply position and the work take-out position, in which a work is supplied to movable main spindle 22 at the supply position, the movable main spindle 22 is moved from the supply position to the take-out position and the work is taken out from the movable main spindle 22 at the supply position, whereby the work is conveyed from the supply position to the take-out position, wherein a tool rest 6 corresponding to the movable main spindle 22 is provided integrally with the movable main spindle 22 and movably on the movable spindle 22, thereby enabling the tool on the tool rest 6 to process the work held on the movable main spindle 22 during the conveyance movement of the work by the movable main spindle 22.

Abstract: An apparatus (1) and a related method for automatic transfer of socks (4) from a linking machine (2) to a sock-modeling piece for boarding operation (36) according to a predetermined orientation, the apparatus comprising reversing means (20) comprising feeding means (21) for picking up the sock (4) from a sewing station (22) of the linking machine and loading means (31) for automatically loading the sock (4) onto the sock-modeling piece, the reversing means (20) comprising a supporting element (23) and at least one pair of lower rollers (24) disposed around said supporting element (23).

Abstract: A sample processing apparatus comprising: a plurality of sample processing units, each processing a sample contained in a sample container; a transport apparatus that transports a sample rack holding a sample container to at least any one of the plurality of sample processing units; a rack feeding section that receives a sample rack and feeds the received sample rack to a transport line of the transport apparatus; and a controller configured to instruct the transport apparatus, according to a quantity of sample racks received by the rack feeding section, to transport a sample rack fed by the rack feeding section to either (a) a sample processing unit which can accept a subsequent sample rack more rapidly than any other sample processing unit or (b) a sample processing unit having a lower processing load than any other sample processing unit. Also, a sample rack transporting method.

Abstract: A glass-plate working apparatus includes a glass-plate supporting portion 20a of a feed conveyor 7, a glass-plate supporting portion 20b of a cutting section 2, a glass-plate supporting portion 20c of a bend-breaking section 4, a glass-plate supporting portion 20d of a grinding section 3, and a glass-plate supporting portion 20e of a discharge conveyor 8; a cutting head 9, a bend-breaking device 66, and a grinding head 10 for processing glass plates 5 which are respectively supported by the supporting portions 20b, 20c, and 20d; and a transporting device 89 for transporting the glass plate 5 on the supporting portion 20a onto the supporting portion 20b, the glass plate 5 on the supporting portion 20b onto the supporting portion 20c, the glass plate 5 on the supporting portion 20c onto the supporting portion 20d, and the glass plate 5 on the supporting portion 20d onto the supporting portion 20e, respectively.

Abstract: A system for simultaneously treating multiple workpieces is configured with treatment sites, configured to hold respective workpieces, fixed on a rotatable base. Treatment stations are equipped with respective active components operable simultaneously to treat respective workpieces identically on respective aligned treatment sites. For loading and unloading the treatment sites are rotated through distinct loading and unloading stations of the treatment stations which allow loading of a second batch while a first batch is being unloaded.

Abstract: Laundry articles (20) are spread out by means of what are known as input machines in front of a feed conveyor (27) which feeds the spread-out laundry article (20) to a mangle. The respective laundry article (20) is previously fed by a transfer device (23) to a draw-on device (24) onto which the laundry article (20) is drawn. In known input machines of this type, relatively complicated transfer devices (23) are provided. According to the invention, the transfer device (23) is provided with a rectilinear conveying section ascending to the draw-on device (24). The laundry article (20) is thereby transported to the draw-on device (24) by the transfer device (23) in the plane in which it is transferred to the transfer device (23). Such a transfer device (23) needs to have only a simple set-up.

Abstract: A system for treating distinct batches of workpieces to serial procedures comprises first and second multi-site structures. In each multi-site structure the sites are rotatable for alignment in turn with loading and unloading stations together constituting treatment or process stations. Workpieces of a batch are loaded onto all of the treatment sites and then simultaneously and identically treated by operation of treatment stations with which the process sites are aligned. After treatment in the first structure, workpieces of a batch are transferred from the unloading stations of the first structure to the loading stations of the second structure for further processing.

Abstract: A substrate carry-out device carries out an exposed substrate mounted on a substrate stage from a substrate holder by moving the substrate in one axis direction (X-axis direction) parallel to a horizontal plane in a state where the substrate is mounted on a substrate tray housed in the substrate holder. Meanwhile, a substrate carry-in device makes an unexposed substrate to be carried into the substrate stage wait at a substrate exchange position in a state where the unexposed substrate is mounted on another substrate tray, and after the exposed substrate is carried out from the substrate stage, lowers the another substrate tray, thereby mounting the unexposed substrate onto the substrate holder.

Abstract: Methods and systems are provided for handling materials, including materials used in semiconductor manufacturing systems. The methods and systems include linear semiconductor processing facilities for vacuum-based semiconductor processing and handling, as well as linkable or extensible semiconductor processing facilities that can be flexibly configured to meet a variety of constraints.

Abstract: Provided is a substrate-processing apparatus including a plurality of process chambers, a buffer unit, and a transfer member. The transfer member transfers the substrate between the process chambers and the buffer unit, and collects the substrates processed in at least two of the process chambers where processes are simultaneously finished, to transfer the processed substrates to the buffer unit at once. Accordingly, a number of times during which the transfer member transfers substrates is decreased, so that the substrate-processing apparatus reduces the process time and improves the productivity.

Abstract: A method for processing substrates for a substrate processing facility includes the steps of: performing ventilation of a container with a fan filter unit while a lid of the container is in a closed state, when the container is stored in a storage shelf, and when the container is transferred with a substrate transfer device, and ventilating the container with the fan filter with the lid of the container in an open state, when substrates are transferred in a substrate loading/unloading section with the substrate transfer device.

Abstract: Semiconductor wafer inspection device comprising a wager transport arm provided with at least one wafer support element, a wafer gripper, the gripper having two distant branches designed to take hold of the opposed edges of the wafer, the gripper being mounted so as to rotate on a shaft in order to be able to rotate the wafer between an approximately horizontal position and an approximately vertical position, and at least two inspection systems placed on one side of the wafer and on the other, in an approximately vertical position symmetrically with respect to the plane passing through the wafer.

Abstract: Increasing in size of a reaction force cancel system is suppressed. The reaction force cancel system is provided in a stage device including: a surface plate having a plurality of plate surfaces with different heights from each other, and installed on a floor via a vibration-isolating spring; and stages disposed on the plate surfaces respectively, and moving on the plate surfaces, and cancels reaction forces generated on the surface plate upon movements of the stages. In addition, the reaction force cancel system includes a first and a second reaction force canceling actuator that apply counter-thrusts to the surface plate, and a control section that controls the magnitudes of the counter-thrusts. In the reaction force cancel system, the heights of action points of counter-thrusts in the surface plate are different from each other, and the control section controls the counter-thrusts so as to counterbalance the reaction forces as resultant forces and resultant moments.

Abstract: An apparatus includes: a process chamber for treating a substrate; a susceptor in the process chamber; a supporting frame over the susceptor; and at least one wire connected to the supporting frame.

Abstract: A system for loading workpieces into a process chamber for processing in a matrix configuration includes a conveyor configured to transport multiple workpieces in a linear fashion. A workpiece hotel is configured to receive the multiple workpieces from the conveyor. The workpiece hotel comprises a matrix of cells arranged in N columns and M floors. A pick blade is configured to insert into the hotel and retract from the hotel in order to unload a plurality of substrates from a first floor into a single row of the pick blade, and to repeat the unloading operation to form a matrix comprising a plurality of rows of substrates disposed on the pick blade. In one example, the workpiece hotel has a staggered configuration that provides individual accessibility of each hotel cell.

Abstract: A device including a sample compartment, a coil and an arm for mechanical manipulation of a sample vessel placed in the sample compartment and containing a sample is described. In at least one embodiment, the coil is surrounding the sample compartment and the sample compartment has an opening for insertion and removal of the sample vessel. A method, using the device according to at least one embodiment of the invention for detection of magnetic permeability, relative magnetic permeability or relative magnetic susceptibility, is also described.

Abstract: A system for managing semiconductor production includes a conveyor to convey a wafer carrier to or from an overhead hoist transfer system. The system also includes a cross-system transport apparatus to transfer the wafer carrier between the conveyor and an overhead shuttle system.

Abstract: In one aspect, a first apparatus is provided that is adapted to transfer a substrate between a transfer chamber and a processing chamber. The first apparatus includes a robot having a first blade, a second blade spaced from the first blade, and a central hub coupled to the first blade by at least a first arm and coupled to the second blade by at least a second arm. The first blade and the second blade are spaced so as to allow (a) both blades to simultaneously extend through a slit valve that separates a transfer chamber from a processing chamber coupled to the transfer chamber when the robot is positioned within the transfer chamber; and (b) the first and second blades to transfer substrates to and remove substrates from the processing chamber without raising or lowering the first and second blades or the robot. Numerous other aspects are provided.

Abstract: A disclosed process module includes a substrate receiving part on which a substrate is placed and a process is carried out with respect to the substrate on the substrate receiving part; and a substrate transfer mechanism including plural substrate holding members, each of which can be positioned in a first position where the substrate is transferred to/from a substrate transfer apparatus provided outside the process module and a second position above the substrate receiving part, wherein each of the substrate holding members can hold the substrate.

Abstract: A method of transferring a wafer is disclosed. The method comprises providing a pedestal and at least one spray orifice extending through the pedestal; disposing a wafer above the pedestal using a first robot, wherein the wafer has a first surface and a second surface, the first surface faces the pedestal, a fluid is sprayed onto the first surface simultaneously to avoid a contact of the first surface with the pedestal, and the fluid contains a charge-forming chemical substance dissolved therein; and taking the wafer using a robot for delivery. Due to the charge-forming chemical substance dissolved in the fluid, the waterfall effect to cause discharge damage on the wafer is avoided in the spraying of the fluid.

Abstract: Systems, methods and apparatus relate to handling and processing glass, such as glass for use in liquid crystal displays, involving a measurement device, such as a distortion gauge, residing in an environmentally controlled measurement room, and a cassette loading device for storage and conveyance of glass between the measurement device and other components of a glass handling and processing system residing with the cassette loading device in a preparation room. A mail-slot opening may be present in a wall separating the measurement room from the preparation room. A gauge conveyor may convey glass between the cassette loading device and the measurement device. A distortion gauge may measure a reference value of the product glass with respect to reference marks on a glass reference plate of the distortion gauge. Other examples of a measurement device include a warp gauge, a stress gauge, a thickness gauge, and a compaction gauge.

Abstract: A method for estimating the effective volumetric capacity of a truck body is provided. The method includes the step of establishing a side-to-side profile of a generic load model by extending load side lines upward at a predetermined material angle of repose from the upper edge of each of the side walls of the truck body. A front-to-rear profile of the generic load model is also established by extending a front load line upward from the upper edge of the front wall of the truck body at the predetermined material angle of repose and a rear load line upward from at or near a rear edge of the floor of the truck body at the predetermined material angle of repose. Load plateau lines having predetermined dimensions are established in the front-to-rear and side-to-side profiles and the height of the plateau lines are determined. A top profile of the generic load is then created from the side-to-side and front-to-rear profiles and the shape of the load plateau is adjusted into a closed curve shape.

Abstract: Embodiments of the present invention provide apparatus and method for heating one or more substrates during transfer. One embodiment provides a robot blade assembly for supporting a substrate or a substrate carrier thereon. The robot blade assembly comprises a base plate, an induction heating assembly disposed on the base plate, and a top plate disposed above the induction heating assembly. Another embodiment provides an induction heating assembly disposed over a transfer chamber having a substrate transfer mechanism disposed therein.

Abstract: A method and an apparatus for producing plastic bottles, including a blow molding machine, a labeler, at least one further treatment machine, and transfer starwheels provided and arranged for the machine-to-machine transportation of the bottles in such a way that the bottles are transported without buffers between the at least three machines.

Abstract: A method for transporting inventory items includes moving a mobile drive unit to a first point within a workspace. The first point is a location of an inventory holder. The method further includes docking the mobile drive unit with the inventory holder and moving the mobile drive unit and the inventory holder to a second point within the workspace. The second point is associated with conveyance equipment. The method further includes moving the inventory holder to a third point within the workspace using the conveyance equipment.

Abstract: At the battery exchange station a discharged battery is removed and a charged battery is inserted into an electric vehicle. The battery is inserted and removed along a vertical axis, i.e., into and out of the bottom of the vehicle. The battery exchange system is located in a service bay under the vehicle. A sliding door system creates an opening above the service bay. A vehicle is received over the sliding door system, such that at least one wheel of the vehicle rests on the conveyor system. The door slides in a first direction while allowing the conveyor system to slide in a direction opposite the first direction. The conveyor system also supports the at least one wheel of the vehicle while the door and conveyor slide in opposite directions. The sliding of the door and the sliding of the conveyor system occur at least partially simultaneously.

Abstract: Methods and apparatuses for a batch processing system with in-line interfaces are provided to batch processing substrates in an in-line processing facility. In an embodiment, the batch processing system comprises carrier assembling and carrier disassembling stations interfacing the in-line path and the batch processing stations.

Abstract: In a substrate processing apparatus consisting of an indexer block and a processing block, a substrate is transported between the indexer block and the processing block by an indexer robot. The indexer robot includes two hands that are provided one above the other on a rotating stage. The other hand moves in a vertical direction to one hand. A difference in height between the one hand and the other hand can be adjusted so as to be equal to spacing between substrate storing grooves of a carrier where the substrate that is to be carried into the indexer block is stored. In addition, the difference in height between the one hand and the other hand can be adjusted so as to be equal to spacing between support plates of a substrate platform provided between the indexer block and the processing block.

Abstract: The present invention relates to a transfer line for the transfer of identical filled two-piece capsules between two successive processing stations comprising a and on unloading area, a plurality of identical transfer units each comprising a plurality of cavities each adapted to receive a capsule at the loading area and to let such capsule being unloaded at the unloading area, said plurality of cavities of each transfer unit being designed so as to receive in a first relative configuration the groups of filled two-piece capsules when located at a loading position in the loading area and so as to discharge these groups when located at an unloading position in the unloading area, a conveyor device adapted to temporarily and individually support the transfer units so as to transfer them from the loading position to the unloading position and vice-versa, while keeping them substantially in a same orientation in the loading and unloading positions, and at least from the loading position to the unloading position.

Abstract: A vacuum processing apparatus and method in which the apparatus includes vacuum processing chambers for subjecting a sample to vacuum processing, a vacuum carriage, a switchable chamber, a cassette support for supporting a plurality of cassettes capable of housing samples, and a waiting cassette support for supporting a waiting cassette that differs from the cassettes supported on the cassette support and capable of having a number of samples. An atmospheric carriage enables carrying a sample among a given cassette of the plurality of cassettes or the waiting cassette. A controller effects control for carrying unprocessed and processed samples among the given cassette, the waiting cassette and the vacuum processing chamber, so that a mixture of both processed and unprocessed samples does not exist in the given cassette or the waiting cassette.