Abstract: A gas ejector capable of effectively dissipating heat generated from a heater while inhibiting noise generation as little as possible, an electronic device equipped with the gas ejector, and a gas-ejecting method are offered. A gas ejector (1) according to the present invention includes a vibrator (25) and ejects gas in a form of a pulsating flow such that vibration of the vibrator allows sound waves respectively generated upon ejection of the gas ejected from nozzles (23) and (24) to deaden out each other. Also, a control section (20) optimizes the frequency of the vibrator (25), hence, by increasing the gas ejection quantity as much as possible while inhibiting noise generation, heat of a heater is effectively dissipated.

Abstract: The invention relates to a device for the actively-controlled deposition of microdrops of biological solutions. The inventive device consists of at least one flat silicon lever comprising a central body and an end area which forms a point, a slit or groove being disposed in said point. The invention is characterized in that it also comprises at least one metallic track which is disposed on one face of the central body and which runs alongside said slit or groove at least partially. The invention also relates to a method of producing the inventive device and a method for the active-controlled deposition and sampling of microdrops of biological solutions using said device.

Abstract: Piezoelectric pump for a household electric appliance having a moving wall interposed between a first casing element defining a pumping chamber with the moving wall, and a second casing element applying pressure to the periphery of the moving wall in order to hold the latter in position. The moving wall has an exterior face in contact with a piezoelectric actuator designed to cause the moving wall to move so as to bring about a periodic variation in the volume of the pumping chamber under the action of the piezoelectric actuator wherein the first casing element and the second casing element are held together under stress by an elastic clip, the elastic clip applying a pressure that tends to compress the first casing element onto the second casing element.

Abstract: A micropump having a diaphragm portion, a valve portion of an intake-side check valve, and a valve portion of a discharge-side check valve formed in a single elastic-member sheet. A piezoelectric actuator is attached onto a back surface of the diaphragm portion. The elastic-member sheet is sandwiched between a first case member and a second case member, the elastic-member sheet providing sealing between both case members. A vibration chamber is defined between the elastic-member sheet and the first case member, the vibration chamber housing the piezoelectric actuator. A pump chamber is defined between the elastic-member sheet and the second case member.

Abstract: An electronic apparatus includes a housing, first and second circuit boards disposed in the housing in such a way that the first and second circuit boards are stacked on each other, and a pump block disposed between the first and second circuit boards, the pump block abutting a first electronic part mounted on the first circuit board and a second electronic part mounted on the second circuit board, the pump block sucking air outside the housing and discharging the air out of the housing.

Abstract: A variable displacement piezo-electric pump which includes a pump housing having a side housing wall defining a pump chamber, an inlet line and an outlet line communicating with the pump chamber, a flexible pump diaphragm spanning the side housing wall in the pump chamber, a diaphragm-stroking mechanism such as a piezo-electric stack engaging the pump diaphragm and a diaphragm support provided between the diaphragm-stroking mechanism and the side housing wall of the pump housing.

Abstract: In one embodiment, a cooling system is disclosed. The cooling system comprises: a cooling channel for receiving a cooling media, a substrate disposed near the cooling channel, and a fluidic jet disposed within the substrate and in fluid communication with the cooling channel. The cooling channel is for thermal communication with a component to be cooled. The cooling channel has a height of less than or equal to about 3 mm and a width of less than or equal to 2 mm. The fluidic jet comprises a cavity defined by a well and a membrane. In one embodiment, a method of cooling an electrical component comprises: passing a cooling media through a cooling channel, drawing the cooling media into one or more of the fluidic jets, expelling the cooling media from the one or more fluidic jets into the cooling channel, and removing thermal energy from the electrical component.

Abstract: The invention relates to a device provided with channel-type structures for transporting and/or storing a liquid and/or gaseous medium. The device comprises a first (1) substrate layer and a second substrate layer (2), and a functional element (3) that is sandwiched between the first and second substrate layers, the channel-type structures being embodied in the first and/or second substrate layer. The first and second substrate layers are solidly and permanently interconnected, and the functional element is clamped between the first and second substrate layers. The functional element is elastic, the first and second layers are rigid, and the channel-type structures in the first and/or second substrate layers are at least partially sealed in a gas-tight and/or liquid-tight manner due to the functional element.

Abstract: A drive circuit (18) produces a drive signal for a pump (10) having a piezoelectric actuator (14), with the piezoelectric actuator (14) forming a part of the drive circuit (18) and serving to shape a waveform of the drive signal. The drive circuit (18) comprises a pulse generator (100) which generates pulses; a converter circuit (102) which receives the pulses and produces charge packets at a rate which equals a desired drive frequency; and, the piezoelectric actuator (14). The piezoelectric actuator (14) receives the charge packets and, by its capacitive nature, integrates the charge packets to shape the waveform of the drive signal. Preferably, the piezoelectric actuator (14) integrates the charge packets to yield a drive field that approximates a sine wave. In one non-limiting example embodiment, the pulse generator (100) comprises a microcontroller-based pulsed width modulator (PWM) circuit (116) and the converter circuit (102) comprises a flyback circuit.

Abstract: A fluid conveyance device includes a substrate, and a disk-shaped piezoelectric element arranged in a bendable manner on the substrate. A plurality of substantially circular concentric segment electrodes are provided on the piezoelectric element, and are provided with voltages with phases that are shifted. A wavy ring deformation is thus produced on the piezoelectric element. A pocket produced between the piezoelectric element and the substrate is moved in a radial direction so as to convey a fluid from an outer substantially circular portion to a central portion and to discharge the fluid from the central portion.

Abstract: A piezoelectric-driven diaphragm pump is comprised of a driving unit (1) having a driving diaphragm (12) and a first housing (11), a replaceable driven unit (2) having a driven film (241) and a second housing (21), and a fixing unit (3) for fixing the driven unit (2) to the driving unit (1). A vibration transmitting face (14) of the driving diaphragm (12) from which displacement of the driving diaphragm (12) is transmitted to the driven film (241) and a vibration transmitted face (241a) of the driven film (241) to which the displacement of the driving diaphragm is transmitted are not parallel to a reference plane (11b) of the first housing (11) which faces the second housing (21), and the vibration transmitting face (14b) of the driving diaphragm (12) contacts with entire of the vibration transmitted face (241a) of the driven film (241). Thereby, the displacement of the driving diaphragm (12) is efficiently transmitted to the driven film (241), so that a capacity of a pump room (25) can be varied largely.

Abstract: A pump having a substantially cylindrical shape and defining a cavity formed by a side wall closed at both ends by end walls wherein the cavity contains a fluid is disclosed. The pump further comprises an actuator operatively associated with at least one of the end walls to cause an oscillatory motion of the driven end wall to generate displacement oscillations of the driven end wall within the cavity. The pump further comprises a valve for controlling the flow of fluid through the valve.

Abstract: A method and system for increasing cooling of an enclosure is provided. The component enclosure includes one or more sidewalls defining a volume, the sidewalls are configured to substantially surround a heat generating component positioned within the volume. The component enclosure further includes a synthetic jet assembly positioned adjacent at least one of the sidewalls. The synthetic jet assembly includes at least one synthetic jet ejector having a jet port. The jet port is aligned at least one of perpendicularly, parallelly, and obliquely with a surface of the at least one sidewall. The synthetic jet assembly is configured to direct a jet of fluid through the port at least one of substantially parallel to the surface, perpendicularly onto the surface, and obliquely toward the surface.

Abstract: An exemplary heat dissipation device includes a heat sink defining a plurality of air passages therein, and an airflow generator disposed at a side of the heat sink. The airflow generator includes airflow-generating units stacked together. Each airflow-generating unit includes a casing in which two spaced vibration diaphragms are received, and a nozzle connected to the casing. A chamber is defined between the two vibration diaphragms within the casing. The nozzle defines an air channel therein for communicating the chamber with an exterior of the casing. Two piezoelectric elements are respectively attached to the two vibration diaphragms. When the two piezoelectric elements drive the two vibration diaphragms towards each other, the two vibration diaphragms compress the air in the chamber and drive the air towards the air channel of the nozzle, thereby generating an airflow from the nozzle towards the air passages of the heat sink.

Abstract: A piezoelectric pump is capable of reliably discharging gas and reliably transporting liquid even when intermittently driven. The piezoelectric pump includes a piezoelectric vibrator, a diaphragm deflected and deformed by the piezoelectric vibrator, a pump chamber including at least one wall surface defined by the diaphragm, an inlet through which liquid, gas, or a mixture of liquid and gas flows into the pump chamber, an outlet through which the fluid is discharged, and a liquid holding member arranged to provide a gap between the liquid holding member and the inner surface of the pump chamber and to maintain the liquid in the gap using capillary effect or surface tension. A flow passage plate includes a flow passage groove provided therein.

Abstract: First and second structures are connected by helical fibers. The orientation between the first and second structures are changed, and by doing so, the positions of the helical fibers are correspondingly changed. The position of change of the helical fibers can be used for a pumping effect, or to change some other fluidic characteristics. One other fluidic characteristics, for example, may use the movement of the helical fibers as a valve.

Abstract: A blower body is provided with a first wall and a second wall, and openings are provided in the walls at positions facing the approximate center of a diaphragm. An inflow passage that allows the openings to communicate with the outside is arranged between the two walls. When the diaphragm is vibrated in response to a voltage applied to a piezoelectric element, the first wall vibrates near the opening and sucks in air from the inflow passage so that the air can be ejected from the opening. A plurality of branch passages which provide sound absorption are connected to an intermediate section of the inflow passage so as to prevent noise generated near the opening from leaking from an inlet.

Abstract: A membrane micropump includes a vibration chamber, at least one flow guide, at least one fluid inlet, at least one fluid outlet, at least one inlet rectifier, at least one outlet rectifier, a vibration membrane and an actuator. The vibration chamber includes at least one chamber inlet and at least one chamber outlet. The flow guide can be connected to the chamber inlet, the vibration chamber, the chamber outlet or in the vibration chamber, or it can have more pairs to enhance the effects. The inlet rectifier connects the chamber inlet to the fluid inlet. The outlet rectifier connects the chamber outlet to the fluid outlet. The vibration membrane is disposed on the vibration chamber. The actuator is connected to the vibration membrane to reciprocate the vibration membrane, enabling fluid to flow into the vibration chamber via the fluid inlet and flow out thereof via the fluid outlet.

Abstract: A piezoelectric element is attached to a vibrating plate. By expanding and contracting the piezoelectric element, the vibrating plate is bent. The vibrating plate includes removed regions on both sides of a portion to which the piezoelectric element is attached. The vibrating plate includes a plurality of the blades provided at one end thereof. By bending the vibrating plate, the blades swing. The blades are bent toward grooves between heat dissipating fins of a heat sink. The other end of the vibrating plate is fixed with screws to an upper portion of the heat sink with a supporting plate disposed therebetween such that the each of the blades are located in a groove between the heat dissipating fins of the heat sink and the removed regions are located over the grooves between the heat dissipating fins.

Abstract: In a liquid discharge control apparatus which uses a piezoelectric type diaphragm pump, an accumulator having a liquid accumulation cavity and a movable member is communicated to an outlet of the diaphragm pump. In discharge operation of the diaphragm pump, a quantity of the liquid in the liquid accumulation cavity is rapidly increased, and the movable member is elastically deformed so as to increase of the volume of the liquid accumulation cavity. Alternatively, in suction operation, when a back stream of the liquid occurs, the quantity of the liquid in a path communicated to the outlet of the diaphragm pump is decreased due to the back stream. The decrease of the liquid can be compensated by the decrease of the volume of the liquid accumulation cavity of the accumulator. Thereby, variation of the quantity of the liquid discharged from the outlet of the accumulator is reduced and the liquid can be discharged, smoothly.

Abstract: The invention relates to an electric household appliance comprising a pump having a pumping chamber (11) including a movable wall formed by a diaphragm (12) made of an electrically conductive material comprising an inner surface covered with at least one layer (21) made of an electrically insulating material, and an outer surface, in contact with a piezoelectric actuator (13), characterized in that power is supplied to said piezoelectric actuator (13) by the voltage of a domestic power grid without inserting an insulation transformer therebetween, and in that said inner surface of the metal diaphragm (12) is covered by at least one first electrically insulating layer (21), having flame retardant properties, and by two additional electrically insulating layers (22, 23) of a lower thickness.

Abstract: A piezoelectric micro blower includes a blower body that includes a first wall and a second wall. An opening is provided at a portion of the first wall that faces an area of the approximate center of a driver of the piezoelectric micro blower. An opening is provided at a portion of the second wall. A central space that is in communication with the openings is provided between the first and second walls. Inlet passages through which the central space is in communication with the outside are provided between the first and second walls. Bottleneck portions are provided at regions at which the inlet passages are connected to the central space. The driver vibrates when a voltage is applied to a piezoelectric element. The first wall vibrates in a corresponding manner as the driver vibrates.

Abstract: There is described a microvalve system having a first body portion having a fluid channel defined in a face, an electrode disposed in the fluid channel and electrically connectable to a power source, a channel membrane disposed over the fluid channel and aligned with the electrode, and a second body portion disposed on the first body portion, the first body portion comprising a liquid receiving cavity aligned with the membrane. The liquid receiving cavity is adapted to receive an electrical conducting liquid that is electrically connectable to the power source. The channel membrane is displaceable towards the electrode upon application of an electrical potential difference between the electrode and the electrical conducting liquid in order to at least partially obstruct the fluid channel.

Abstract: The invention relates to fluidics as used in medical and diagnostic equipment and relates further to means for purifying, abstracting, filtering, detecting and/or measuring analytes in liquid samples.

Abstract: In recent years piezoelectric actuation has been identified as a promising means of driving miniature Stirling devices. It supports miniaturization, has a high power to volume ratio, can operate at almost any frequency, good electrical to mechanical efficiencies, and potentially has a very long operating life. This invention uses a valve-less hydraulic amplification, creating an oscillating pressure wave sufficiently large to drive a high frequency miniature pulse tube cryocooler. The actuator may be separated from the main body of the cryocooler. The system lack of rubbing parts in the power conversion processes.

Abstract: A dual-chamber fluid pump is provided for a multi-fluid electronics cooling system and method. The pump has a first fluid path for pumping a first fluid coolant and a second fluid path for pumping a second fluid coolant, with the first fluid path including a first pumping chamber and the second fluid path including a second pumping chamber. The first and second pumping chambers are separated by at least one diaphragm, and an actuator is coupled to the diaphragm for transitioning the diaphragm between a first position and a second position. Transitioning of the diaphragm to the first position pumps first fluid coolant from the first pumping chamber while concurrently drawing second fluid coolant into the second pumping chamber, and transitioning of the diaphragm to the second position pumps second fluid coolant from the second pumping chamber while concurrently drawing first fluid coolant into the first pumping chamber.

Abstract: A pump arrangement includes a pump having a pump inlet and a pump outlet, and a safety valve arranged between the pump outlet and an outlet of the pump arrangement and having a valve seat and a valve lid. The valve seat, the pump outlet and the pump inlet are patterned in a first surface of a first integrated part of the pump arrangement, whereas the valve lid is formed in a second integrated part of the pump arrangement. An inlet of the pump arrangement and a fluid region fluidically connected thereto are formed in a third part of the pump arrangement. The second integrated part is arranged between the first integrated part and the third part of the pump arrangement such that a pressure in the fluid region has a closing effect on the safety valve, the pump inlet and the inlet of the pump arrangement being connected fluidically.

Abstract: The invention relates to a micropump comprising an inclusion fluid accommodated in a chamber of the microchannel, and means to convey a portion of said inclusion into the axial area of said chamber and for displacing said portion along the longitudinal axis of the microchannel, so as to cause the flow of a fluid of interest (F) along the longitudinal axis of the microchannel (10).

Abstract: The invention relates to a microfluidic device comprising an actuator for converting between mechanical and electrical energy comprising an electro-active polymer or electro-active polymer composition, wherein the stiffness of the actuator at or near a first surface or part thereof differs from the stiffness at or near a second surface or part thereof, or wherein the stiffness of the actuator at or near a first extremity differs from the stiffness at or near a second extremity.

Abstract: A piezoelectric element that is capable of achieving a larger amount of displacement and in which migration between electrodes hardly occurs, is included in a piezoelectric pump. The piezoelectric pump includes a first excitation electrode opposed to a second excitation electrode via a first piezoelectric layer in a central area of a layered piezoelectric body, a third excitation electrode opposed to a fourth excitation electrode via a second piezoelectric layer and a third excitation electrode opposed to a fourth excitation electrode via the second piezoelectric layer in peripheral portions of the layered piezoelectric body.

Abstract: Disclosed is a thermo-buckled micro actuation unit made of parylene, which is a polymer having high thermal expansion coefficient, for delivering liquid from a source liquid section to a target liquid section, including a substrate on which a thermo-buckled micro actuation unit is formed. The thermo-buckled micro actuation unit includes upper and lower films made of polymers of high thermal expansion coefficient, a metal resistor arranged between the two films, and a flow channel defined between the lower film and the substrate. When electrical power is supplied to the metal resistor, the metal resistor generates heat and the heat is conducted to the upper and lower films, of which the thicknesses are different, whereby a temperature difference is induced therebetween and causing deformation of thermo-buckling, as a result of which the liquid is pumped from the source liquid section, through the flow channel, toward the target liquid section.

Abstract: A piezoelectric pump includes a piezoelectric element, an intermediate plate, and a vibrating plate. The piezoelectric element has a substantially flat plate shape. The intermediate plate is bonded to a principal surface of the piezoelectric element and applies a residual stress in a compressive direction to the piezoelectric element. The vibrating plate is bonded to the intermediate plate such that the vibrating plate faces a principal surface of the piezoelectric element and receives a residual stress in a compressive direction from the intermediate plate. In addition, the vibrating plate defines a portion of a wall surface of a pump chamber having an open hole. A fluid passage is provided in the piezoelectric pump. The fluid passage communicates with the outside of the chamber at one end thereof, and communicates with the pump chamber through the open hole at the other end.

Abstract: A valveless micropump for transforming a pressure variation of fluid in a volume variation chamber (8) into an oscillatory flow of fluid (10) by means of a piezoelectric element (7), making the fluid (10) to flow smoothly in channels (5, 6). A channel (2) is formed as an asymmetric diffuser-shaped channel (12) having a narrow channel (5) on the diffuser inlet (3) side and a wide channel (6) on the diffuser outlet (4) side, and the volume variation chamber (8) provided with the piezoelectric element (7) is communicated with the narrow channel (5). Vibration generated by applying a voltage to the piezoelectric element (7) causes a pressure variation of the fluid in the volume variation chamber (8) to generate a nozzle flow. The fluid (10) is made to flow smoothly from the wide channel (6) to the narrow channel (5) by the nozzle flow.

Abstract: A pump body is provided including at least one inlet valve, at least one outlet valve, a substantially rigid top portion, a substantially rigid bottom portion, and collapsible side portions. The pump body also includes a base on or in the bottom portion and defining a rotational axis extending from the bottom portion. The pump body further includes a rotor shaft disposed along the rotational axis within the enclosure, a first end of the rotor shaft mechanically and rotatably coupled to the base, and a second end of the rotor shaft providing a cam surface for engaging the top portion and operable to cause motion of the top portion response to rotation of the rotor shaft. The pump body also includes at least one piezoelectric actuator engaging a surface of the rotor shaft, the piezoelectric actuator configured to cause the rotation of the rotor shaft.

Abstract: A pump chamber (15) is formed between a piezoelectric vibrator (7) and a valve main plate (10). The valve main plate (10) includes an inlet port (13) at its central portion, and an outlet port (14) in its peripheral portion, and the inlet port (13) is made in a smaller diameter than the outlet port (14). On the valve main plate (10) an inflow check valve (11) and an outflow check valve (12) are provided, so that when the inflow check valve (11) and the outflow check valve (12) open and close in response to the vibration of the piezoelectric vibrator (7), a fluid is introduced into and discharged from the pump chamber (15).

Abstract: To provide a piezoelectric pump including: a structure including a piezoelectric element and a support member that supports the piezoelectric element; and a first substrate and a second substrate that sandwich the structure, wherein the piezoelectric pump has: a pump chamber surrounded by the second substrate and the structure; and a first opening and a second opening that are communicated with the pump chamber, and wherein a space is provided so that the structure flexes in a direction opposite to the pump chamber according to an operation of the piezoelectric element.

Abstract: A fluid ejecting apparatus having a fluid chamber, an inlet flow channel, and a nozzle configured to eject fluid supplied from the inlet flow channel to the fluid chamber from the nozzle in a pulsed manner by changing the volume of the fluid chamber includes: a diaphragm; a wall surface provided so as to oppose the diaphragm; a spacer being provided between the diaphragm and the wall surface and having a cylindrical through hole; a piezoelectric element configured to displace the diaphragm; and a connecting flow channel tube communicated with the fluid chamber, wherein the nozzle is provided at an end of the connecting flow channel tube opposite to the fluid chamber, the fluid chamber is defined by the diaphragm, the wall surface, and an inner surface of the through hole of the spacer, and the inlet flow channel is defined by a groove provided on the wall surface and the spacer and is communicated with the fluid chamber.

Abstract: An actuator system includes a piezoelectric pump; an accumulator including a cylinder, a piston located in the cylinder, a port located at a first side of the piston and hydraulically connected to the pump outlet and a switching circuit, a relief port hydraulically connected to the reservoir and located at a second side of the piston, and a spring biasing the piston toward the port; and a hydraulically actuated servo including a front port hydraulically connected to the switching circuit, a back port hydraulically connected to the reservoir, and the servo causing the friction element alternately to engage and to disengage in response to a magnitude of hydraulic pressure in the servo.

Abstract: In a diaphragm pump performing electrostatic atomization, occurrence of defects such as electrolysis of liquid is restricted and enables to electrostatic atomization smoothly. The diaphragm pump 10 comprises a pump chamber unit 1 and a diaphragm unit 2, and the diaphragm unit 2 has a diaphragm driving portion 2a by a piezoelectric element 21 and a driving power transmission portion 2b to transmit variation of the driving portion 2a to a pump chamber portion 3. The pump chamber unit 1 comprises a pump chamber 31 formed of an electric conductive material, a liquid container 4, a suction flow path 34a coupling the liquid container 4 and the pump chamber 31, a discharge vent 5 from which the liquid is discharged, and a discharge flow path 34b coupling the discharge vent 5 and the pump chamber 31, and the pump chamber 31 has a driven membrane 33a which is cooperated with the driving power transmission portion 2b and formed of an electric conductive resin.

Abstract: A fluid actuator includes a piezoelectric body (31), a fluid channel (2) having the piezoelectric body (31) on a part of the inner wall thereof and enabling a fluid to move inside, and a surface acoustic wave generation portion (101) for driving the fluid in the fluid channel by surface acoustic waves generated from a interdigital electrode formed on the surface of the piezoelectric body (31) facing the fluid channel (2). The surface acoustic wave generation portion (101) is arranged at the position offset from the center of the fluid channel (2). The fluid actuator can perform drive with a low voltage and drives the fluid in a narrow fluid channel in a single direction.

Abstract: A self-contained pump is disclosed that is an integrated pump. It has a reservoir, a pumping mechanism, and at least one outlet. The pumping mechanism is for controlled compression of the reservoir to force a required volume of fluid in the reservoir through the at least one outlet.

Abstract: A piezoelectric pump for pumping a fluid at a high flow rate includes a housing and an actuator located within the housing. An electric voltage applied to the actuator causes the actuator to apply a force to a first diaphragm that is proximate to the actuator. A piston assembly is located within the housing and is moveable between at least a first position and a second position. A first fluid chamber is defined by the housing, the first diaphragm, and the piston assembly. A coupling fluid is located within the first fluid chamber for coupling the first diaphragm to the piston assembly. A second fluid chamber is defined by the housing and the piston assembly. An inlet valve is in communication with the second fluid chamber and an outlet valve is in communication with the second fluid chamber.

Abstract: A valveless MEMS micropump capable of improved efficiency and performance is disclosed. The micropump includes two adjoining chambers separated by a piezoelectric actuated pump membrane. The micropump moves fluid through the chambers through diffuser elements characterized by differential directional resistance to fluid flow by piezoelectric actuation of the pump membrane.

Abstract: A pump includes: a pump chamber for which a capacity is changeable; an inlet channel which allows a working fluid to flow into the pump chamber; an inlet side fluid resistance element disposed between the pump chamber and the inlet channel; an outlet channel which allows the working fluid to flow out of the pump chamber; and a pipeline element formed inside the outlet channel, wherein a rotational flow generation structure, which generates a rotational flow of the working fluid, is provided in the pump chamber, and wherein the outlet channel is located adjacent to the rotational center of the rotational flow.

Abstract: A piezoelectric micro-blower capable of efficiently conveying compressive fluid without use of a check valve and ensuring a sufficient flow rate. The micro-blower has a blower body with a first wall and a second wall. Openings are formed in the respective walls and face a center of a diaphragm. An inflow path allowing the openings to communicate with the outside is formed between the walls. By applying a voltage to a piezoelectric element to cause the diaphragm to vibrate, a part of the first wall close to the first opening vibrates. Thus, gas can be drawn from the inflow path and discharged from the opening in the second wall.

Abstract: A piezoelectric-driven diaphragm pump is comprised of a driving unit (1) having a driving diaphragm (12) and a first housing (11), a replaceable driven unit (2) having a driven film (241) and a second housing (21), and a fixing unit (3) for fixing the driven unit (2) to the driving unit (1). A vibration transmitting face (14) of the driving diaphragm (12) from which displacement of the driving diaphragm (12) is transmitted to the driven film (241) and a vibration transmitted face (241a) of the driven film (241) to which the displacement of the driving diaphragm is transmitted are not parallel to a reference plane (11b) of the first housing (11) which faces the second housing (21), and the vibration transmitting face (14b) of the driving diaphragm (12) contacts with entire of the vibration transmitted face (241a) of the driven film (241). Thereby, the displacement of the driving diaphragm (12) is efficiently transmitted to the driven film (241), so that a capacity of a pump room (25) can be varied largely.

Abstract: A blower body is provided with a first wall and a second wall, and openings are provided in the walls at positions facing the approximate center of a diaphragm. An inflow passage that allows the openings to communicate with the outside is arranged between the two walls. When the diaphragm is vibrated in response to a voltage applied to a piezoelectric element, the first wall vibrates near the opening and sucks in air from the inflow passage so that the air can be ejected from the opening. A plurality of branch passages which provide sound absorption are connected to an intermediate section of the inflow passage so as to prevent noise generated near the opening from leaking from an inlet.

Abstract: A piezoelectric micro-blower capable of efficiently conveying compressive fluid without use of a check valve and ensuring a sufficient flow rate. The micro-blower has a blower body with a first wall and a second wall. Openings are formed in the respective walls and face a center of a diaphragm. An inflow path allowing the openings to communicate with the outside is formed between the walls. By applying a voltage to a piezoelectric element to cause the diaphragm to vibrate, a part of the first wall close to the first opening vibrates. Thus, gas can be drawn from the inflow path and discharged from the opening in the second wall.

Abstract: Disclosed is an ultrasonic piezoelectric pump in which a piezoelectric pump is integrated with a fluid pipe without a check valve so that the structure can be simplified. The pump includes a fluid pipe having a hollow part formed therein to permit a fluid to flow from a fluid source, a piezoelectric actuator inserted into the hollow part and including a piezoelectric device and a plurality of fluid holes, a controller connected to a lead wire to apply a driving power to the piezoelectric device, and a tapered nozzle inserted into the hollow part in front of the piezoelectric actuator and tapered forward and downwardly.

Abstract: A fluid conveyance device includes a substrate, and a disk-shaped piezoelectric element arranged in a bendable manner on the substrate. A plurality of substantially circular concentric segment electrodes are provided on the piezoelectric element, and are provided with voltages with phases that are shifted. A wavy ring deformation is thus produced on the piezoelectric element. A pocket produced between the piezoelectric element and the substrate is moved in a radial direction so as to convey a fluid from an outer substantially circular portion to a central portion and to discharge the fluid from the central portion.