Abstract: A valveless micropump includes a hollow pump chamber having a driving element coupled thereto, an inlet channel coupled to the hollow pump chamber, and an outlet channel coupled to the hollow pump chamber. The inlet channel, the hollow pump chamber, and the outlet channel define a fluid flow path through the inlet channel, the hollow pump chamber, and the outlet channel. At least one direction-sensitive element disposed in the flow path within one of the inlet and outlet channels and comprising a direction-sensitive element, is installed at an angle which produces a drag ratio greater than unity on fluid in the flow path. The driving element may comprise an electrostatic/piezoelectric member. Various embodiments of the valveless pump include one or more of the airfoil elements mounted in one, the other or both of the inlet and outlet channels, including embodiments in which one or more cascades of the airfoil elements are mounted in the inlet channel and the outlet channel.

Abstract: Since many valves are used, pressure loss is large, resulting in low reliability of a pump. Even when the period of increasing and decreasing the volume of a pump chamber is long, and a piezoelectric element is used as an actuator that drives a diaphragm, a driving operation cannot be performed at a high frequency, or a proper flow rate cannot be realized under a high load pressure. In accordance with the invention, the combined inertance value of an entrance passage used to make working fluid flow into a pump chamber is smaller than the combined inertance value of an exit passage used to make the working fluid flow out from the pump chamber. A fluid resistance member is provided at the entrance passage in which fluid resistance when the working fluid flows into the pump chamber is smaller than fluid resistance when the working fluid flows out of the pump chamber.

Abstract: The invention concerns a molecular pump for evacuating a gas from a chamber, comprising a substantially sealed box (1) having on one of its sides an intake orifice (2) to be connected to said chamber and, on the opposite side, an outlet orifice (3), to be preferably connected to a discharge pump, whereby elements (4) are mounted between those two orifices (2) and (3) at some distance from one another in substantially fixed sites inside said box (1) for the gas to pass through, said elements (4) being of such a nature as to impart to said gas molecules, coming from said chamber and coming into contact with said elements (4), a speed whereof the resultant is oriented towards the outlet orifice (3).

Abstract: A piezoelectrically driven fluid pump includes a chamber having two opposite sidewalls formed by flexible membranes, and an inlet and an outlet each regulated by a valve. Separate piezo elements are fixed to each of the membranes, to flex the membranes and increase or reduce the chamber volume and thereby draw fluid into the chamber or expel fluid from the chamber. The valves are each formed by two adjacent piezo elements that are supported or flexibly joined together at two opposite ends. When actuated, the valve piezo elements flex outward between the two opposite ends, opening the valve to form an aperture between the two piezo elements. In another embodiment, a fluid pump includes a chamber having one flexible membrane sidewall. A valve-regulated inlet or outlet aperture through the membrane communicates with the pump chamber. A ring-shaped piezo centered around the aperture, on the membrane, flexes the membrane.

Abstract: The invention disclosed is a compact, high efficiency, smart material element driven hydraulic pump comprising a diaphragm, a face plate coupled to and spanning across the diaphragm, and a smart material element. The diaphragm comprises on a first side a recess and a stiff face-seal surface surrounding the recess. On the second side of the diaphragm is a stiff center pedestal and a flexure means attached to the periphery of the center pedestal. The diaphragm and face plate coupled together form a chamber that is dynamically sealed by contact of the face-seal surface against the face plate and such chamber's compliance is primarily and effectively within the flexure means within the diaphragm. A smart material element is positioned and constrained against the stiff center pedestal such that extension and contraction of the smart material element deforms the diaphragm such that the pumping chamber compresses and expands through compliance and deformation within the flexure means alone.

Abstract: A suspended p-GaN membrane is formed using photochemical etching which membrane can then be used in a variety of MEMS devices. In the illustrated embodiment a pump is comprised of the p-GaN membrane suspended between two opposing, parallel n-GaN support pillars, which are anchored to a rigid substrate below the pillars. The p-GaN membrane bows upward between the pillars in order to relieve stress built up during the epitaxial growth of membrane. This bowing substantially increases the volume of the enclosed micro-channel defined between membrane and substrate below. The ends of membrane are finished off by a gradual transition to the flat underlying n-GaN layer in which fluidic channels may also be defined to provide inlet and outlet channels to microchannel. A traveling wave or sequential voltage applied to the electrodes causes the membrane to deform and provide a peristaltic pumping action in the microchannel.

Abstract: Various application are provided for an enclosure having a first wall and two or more second walls surrounding a cavity. The enclosure also has an inlet and outlet each in fluid communication with the cavity. The second walls each have at least a portion shaped such that a force acting on the first wall tending to deflect the element causes an amplified deflection of the second walls into the cavity. Such applications include a pump, a structure comprised of one or more enclosures, structural elements, and apparatus for storing and releasing energy.

Abstract: A pump having a main pump body including a casing to which a fluid is supplied, and a pump section, an input valve section, and an output valve section which are provided opposingly to one surface in the casing. Each of the pump sections, the input valve section, and the output valve section has an actuator section. The input valve section, the pump section, and the output valve section are provided opposingly to the back surface of the casing for selectively forming a flow passage on the back surface of the casing in accordance with selective displacement action of the input valve section, the pump section, and the output valve section in a direction approaching or separating from the back surface of the casing. The fluid is controlled for its flow in accordance with the selective formation of the flow passage.

Abstract: A multilayer ceramic micropump including a monolithic ceramic package formed of a plurality of ceramic layers defining therein an integrated first ball check valve, and a second ball check valve in microfluidic communication with the first ball check valve, and an actuator characterized as actuating a pumping motion, thereby pumping fluids through the first ball check valve and the second ball check valve.

Abstract: A microfluidic pumping apparatus and method using the apparatus. The apparatus may include a first pulse jet and working fluid in the pulse jet such that the first pulse jet, in response to activation by a set of electrical pulses, moves corresponding pulses of fluid from a first to an second side of the first pulse jet. A chamber with an opening is in pressure communication and with the first side of the first pulse jet such that activation of the first pulse jet causes a reduced pressure at the opening. The method comprising contacting the opening with a fluid and activating the first pulse jet so as to draw a sample fluid through the opening into the chamber. A second pulse jet, oppositely oriented from the first, may be provided to discharge loaded sample fluid.

Abstract: A miniature pump includes a miniature pump portion including a suction passage through which a liquid flows in, and a discharge passage through which the liquid flows out, and a bubble trap portion for blocking an entry of air bubbles into the miniature pump portion. Since the bubble trap portion prevents the entry of air bubbles into the miniature pump portion, a deterioration of pump characteristics owing to the entry of air bubbles can be suppressed, making it possible to obtain a miniature pump that achieves both a large discharge flow rate and stable discharge flow rate characteristics.

Abstract: A pump having a main pump body including a casing to which a fluid is supplied, and a pump section, an input valve section, and an output valve section which are provided opposingly to one surface in the casing. Each of the pump section, the input valve section, and the output valve section has an actuator section. The input valve section, the pump section, and the output valve section are provided opposingly to the back surface of the casing for selectively forming a flow passage on the back surface of the casing in accordance with selective displacement action of the input valve section, the pump section, and the output valve section in a direction approaching or separating from the back surface of the casing. The fluid is controlled for its flow in accordance with the selective formation of the flow passage.

Abstract: A compact pump has a pump chamber, inlet and outlet channels communicating with the pump chamber, and a pair of check valve units between the pump chamber and the inlet and outlet channels. Each check valve unit has a thin film check valve membrane, and a check valve body with a channel opened and closed by the check valve membrane due to a pressure difference.

Abstract: A fluid discharging device is provided with diaphragm members 20 and 30. The diaphragm member 30 being a valve member comprises an outlet 35 and a suction passage opening and closing portion 33, and can be moved forward and backward relative to the diaphragm member 20 being a pump member. The diaphragm member 20 comprises an outlet opening and closing portion 25 capable of opening and closing the outlet 35 and a measuring portion 26 capable of changing the volume of a measuring space 42. An outlet opening and closing means 50 opens and closes the outlet 35 by moving the outlet opening and closing portion 25 backward and forward relative to the outlet 35, and opens a liquid suction passage 40 by detaching the suction passage opening and closing portion 33 from the diaphragm member 20. A diaphragm moving means 55 changes the volume of the measuring space 42 by moving the measuring portion 26 forward and backward.

Abstract: A device for discharging a liquid raw material(fuel) is provided, including a structure for discharging liquid having at least a pressurizing means for discharging liquid, a pressure chamber, a flow path communicating with the pressure chamber, and an air bubble trap cell communicating with the pressure chamber via the flow path. According to this device, a trapped air bubble can be securely released.

Abstract: A pump comprises a first substrate having a fluid inlet port for receiving a fluid, a fluid outlet port for discharging the fluid, a first pumping section for pumping the fluid from the fluid inlet port to the fluid outlet port, a first inlet valve section disposed between the fluid inlet port and the first pumping section, and a first outlet valve section disposed between the fluid outlet port and the first pumping section. A second substrate has a second pumping section, a second inlet valve section, and a second outlet valve section. An intermediate substrate is disposed between the first and second substrates to form a first fluid feeding path and a second fluid feeding path for feeding the fluid pumped by the first and second pumping sections. The first fluid feeding path extends from the first inlet valve section to the first outlet valve section through the first pumping section.

Abstract: The invention provides microfluidic devices having valves disposed therein. The valves can be configured as one-way valves. The invention also provides microfluidic pumps using two or more microfluidic valves. The valves can be configured to rest in an open or closed position. The valves also can be single use valves or can be multiple use valves. The valves may be further responsive to actuators, including electromechanical and magnetic actuators.

Abstract: A piezoelectric vacuum pump that includes a diaphragm comprising an upper diaphragm member and a lower diaphragm member. The diaphragm members preferably comprise thin metal sheets that are plated with a noble metal, such as gold, silver, or platinum, and are mated together so as to form a hermetic seal along the length of the diaphragm. The piezoelectric vacuum pump further includes a plurality of piezoelectric bimorph elements that are mounted to the upper surface of the upper diaphragm member. When the piezoelectric bimorph elements are electrically activated, they cause a localized portion of the upper diaphragm member to flex, thereby creating a change in volume in a portion of the diaphragm proximate to that piezoelectric bimorph element.

Abstract: A microstructured element comprising a transparent substrate having a major surface; an opaque layer formed in a certain pattern on the major surface of the transparent substrate; and a microstructured layer formed on or above the major surface of the transparent substrate in a pattern corresponding to the certain pattern of the opaque layer. The microstructured layer includes a slanted lateral face extending along an edge of the opaque layer in a direction intersecting the major surface at an oblique angle. The microstructured element is produced through the steps of providing a photosensitive layer entirely on the major surface of the transparent substrate and the opaque layer; exposing the photosensitive layer to light transmitted through the transparent substrate from a back surface opposite to the major surface at an oblique angle with the major surface; and developing the photosensitive layer.

Abstract: Since many valves are used, pressure loss is large, resulting in low reliability of a pump. Even when the period of increasing and decreasing the volume of a pump chamber is long, and a piezoelectric element is used as an actuator that drives a diaphragm, a driving operation cannot be performed at a high frequency, or a proper flow rate cannot be realized under a high load pressure. In accordance with the invention, the combined inertance value of an entrance passage used to make working fluid flow into a pump chamber is smaller than the combined inertance value of an exit passage used to make the working fluid flow out from the pump chamber. A fluid resistance member is provided at the entrance passage in which fluid resistance when the working fluid flows into the pump chamber is smaller than fluid resistance when the working fluid flows out of the pump chamber.

Abstract: A valve for use in laminated plastic microfluidic structures. The valve comprises first, second, and third layers of flexible material separated by first and second spacing layers to form microfluidic channels, and having an actuator section to selectively isolate the microfluidic channels from each other. The structure can also be used as a recirculating pump.

Abstract: An automated pump including a pulse generator capable of altering the output volume of fluid flow produced by the pump. The present invention is a vibratory pump including a pulse generator connected to a vibratory generator on the pump that is used to selectively control the amount of vibration created by the vibration generator. By increasing or decreasing the amount of vibrations created by the vibration generator, an operator can control the fluid flow output of the pump to fit the desired use for the pump.

Abstract: A microfluidic pump having a substrate with a pump chamber and at least one channel in communication with the pump chamber for transporting a substance into or out of the pump chamber. A flexible diaphragm overlies the pump chamber, and a magnetic member is attached to the diaphragm. A magnet, such as an electromagnet, is positioned to attract and repel the magnetic member, thereby actuating the diaphragm, and causing a substance to be drawn into or out of the channel. A uni-directional or bi-directional check valve can be positioned in the channel to prevent backflow into the pump chamber. A control system can be coupled to the pump to adjust actuation rate of the diaphragm.

Abstract: A suspended p-GaN membrane is formed using photochemical etching which membrane can then be used in a variety of MEMS devices. In the illustrated embodiment a pump is comprised of the p-GaN membrane suspended between two opposing, parallel n-GaN support pillars, which are anchored to a rigid substrate below the pillars. The p-GaN membrane bows upward between the pillars in order to relieve stress built up during the epitaxial growth of membrane. This bowing substantially increases the volume of the enclosed micro-channel defined between membrane and substrate below. The ends of membrane are finished off by a gradual transition to the flat underlying n-GaN layer in which fluidic channels may also be defined to provide inlet and outlet channels to microchannel. A traveling wave or sequential voltage applied to the electrodes causes the membrane to deform and provide a peristaltic pumping action in the microchannel.

Abstract: A method of producing a pump body having an inlet opening provided with an inlet valve (106) and an outlet opening provided with an outlet valve (108), said method comprising as a first step the step of structuring a respective first main surface of a first and of a second semiconductor disc (200) for defining a valve flap structure (202) of the inlet valve and a valve seat structure (204) of the outlet valve in the first disc and a valve flap structure of the outlet valve and a valve seat structure of the inlet valve in the second disc. Following this, a valve flap well structure (206; 216) and a valve opening well structure (208; 218) are formed in a predetermined relationship with the valve flap structures and the valve seat structures in a respective second main surface of the first and of the second semiconductor disc.

Abstract: The invention relates to a micropump (10; 100) comprising at least a first plate (12), a second plate (20), an intermediate plate (18), a pump chamber (24), and inlet and outlet control members (28, 30). According to the invention, said inlet control member (28) is a non-return valve situated in the major portion of the thickness of said intermediate plate (18), being made of a moving member (40) and a membrane-forming portion (42) situated close to one of the plates (12, 20), connecting said moving member (40) to the remainder of said intermediate plate (18) and, by its resilience, enabling said valve (28) to move between a closed position and an open position, said moving member (40) having an orifice of limited volume passing therethrough.

Abstract: A piezoelectric micropump is disclosed for pumping fluid from a container to a delivery point in low volumes and at controlled flow rates. The pumping action is created by movement of two or three diaphragms. The movement of each diaphragm is caused by expansion and contraction of an attached piezoelectric actuator. Coordination of the movement of the diaphragms creates unidirectional flow of the fluid. The piezoelectric actuators are cantilevered between the pump body and the diaphragms to provide greater deflection of the diaphragms. The piezoelectric actuators preferably are piezoelectric bimorphs such that the diaphragms can function as both seals and pumps.

Abstract: An actuator device controlling the shape of a flexible surface having a quasi-continuum in a plurality of locations. The device includes a plurality of individual cells arranged in an array for contact with the flexible surface. The cells comprise a cell body having an upper film portion and a lower film portion and an open central portion. The upper film portion is in contact with the flexible surface. A post is mounted in the open central portion and fixedly attached to the upper film portion and the lower film portion, the post defining a vertical axis of movement. The upper and lower film portions have electrodes mounted thereon respectively, positioned on the face of the upper and lower film portions and facing each other.

Abstract: A microfluidic pumping apparatus and method using the apparatus. The apparatus may include a first pulse jet and working fluid in the pulse jet such that the first pulse jet, in response to activation by a set of electrical pulses, moves corresponding pulses of fluid from a first to an second side of the first pulse jet. A chamber with an opening is in pressure communication and with the first side of the first pulse jet such that activation of the first pulse jet causes a reduced pressure at the opening. The method comprising contacting the opening with a fluid and activating the first pulse jet so as to draw a sample fluid through the opening into the chamber. A second pulse jet, oppositely oriented from the first, may be provided to discharge loaded sample fluid.

Abstract: Provided is a liquid feed apparatus for feeding liquid by operating a diaphragm at a high frequency, in which an inlet valve and an outlet valve are integrally incorporated with a liquid feed chamber, the positions of the valve are shifted into peripheral parts of the liquid feed chamber so as to allow fluid to smoothly flow from the inlet to the outlet in order to prevent air bubbles from causing pressure fluctuation during liquid feed, from remaining in the liquid feed chamber. Further, the valve has a center beam structure in which a protrusion having a height greater than several micron meters, is formed in the seat part of the valve so as to deform a center beam for pressurizing the valve in order to enhance the shut-off ability of the valve, and the center beam has a small surface area in the direction of displacement of the valve.

Abstract: A microfluidic pumping apparatus and method using the apparatus. The apparatus may include a first pulse jet and working fluid in the pulse jet such that the first pulse jet, in response to activation by a set of electrical pulses, moves corresponding pulses of fluid from a first to an second side of the first pulse jet. A chamber with an opening is in pressure communication and with the first side of the first pulse jet such that activation of the first pulse jet causes a reduced pressure at the opening. The method comprising contacting the opening with a fluid and activating the first pulse jet so as to draw a sample fluid through the opening into the chamber. A second pulse jet, oppositely oriented from the first, may be provided to discharge loaded sample fluid.

Abstract: A microdosing device comprises a pressure chamber which is at least partly delimited by a displacer, an actuating device for actuating the displacer, the volume of the pressure chamber being adapted to be changed by actuating the displacer, a media reservoir which is in fluid comunication with the pressure chamber via a first fluid line, and an outlet opening which is in fluid communication with the pressure chamber via a second fluid line. The microdosing device additionally comprises a means for detecting the respective position of the displacer and a control means which is connected to the actuating device and to the means for detecting the position of the displacer, said control means controlling the actuating device on the basis of the detected position of the displacer or on the basis of displacer positions detected during at least one preceding dosing cycle so as to cause the discharge of a defined volume of fluid from the outlet opening.

Abstract: A piezoelectric micropump is disclosed for pumping fluid from a container to a delivery point in low volumes and at controlled flow rates. The pumping action is created by movement of two or three diaphragms. The movement of each diaphragm is caused by expansion and contraction of an attached piezoelectric actuator. Coordination of the movement of the diaphragms creates unidirectional flow of the fluid. The piezoelectric actuators are cantilevered between the pump body and the diaphragms to provide greater deflection of the diaphragms. The piezoelectric actuators preferably are piezoelectric bimorphs such that the diaphragms can function as both seals and pumps.

Abstract: A micropump comprises a first substrate, a pumping section formed in the first substrate, a second substrate connected to the first substrate and having an inlet port and an outlet port, and at least two valve sections formed in the first substrate for controlling the flow of fluid from the inlet port to the outlet port through the pumping section. The pumping section has a piezoelectric element and a diaphragm for undergoing deformation upon application of a voltage to the piezoelectric element to control the flow of fluid into and out of the pumping section. Each of the valve sections has a piezoelectric element and a diaphragm for undergoing deformation upon application of a voltage to the piezoelectric element. A flow passage is formed in the first substrate for connecting the pumping section and the valve sections in fluid communication.

Abstract: This invention provides a method by which the performance of reciprocating NMPV (No-Moving-Parts-Valve) micropumps can be optimized for a given choice of valve design, e.g. for diffuser/nozzle valves, rectifier valves etc. The method can more generally be used to design and produce NMPV micropumps with structures optimized for maximal pump performance. The method can further be used to design and construct NMPV pumps significantly smaller in size than those currently available to the art without significant loss in pump performance.

Abstract: A printhead for an inkjet printer employs an integral pump disposed in an ink feed channel, input well, or output well to circulate ink to the ink expulsion chambers in the printhead.

Abstract: A micromechanical ejection pump for extracting small fluid volumes from a flowing sample fluid is provided with a substrate, and a canal for pressurized working fluid. The micromechanical ejection pump also has a canal for ejecting a fluid volume from the sample fluid. The working fluid canal runs into the extension of the sample fluid canal discharging crosswise thereto. The ejection canal connected to the sample fluid canal branches off from the working fluid canal opposite to the sample fluid canal. The working fluid canal and the ejection canal have in particular a substantially similar cross-section of 0.01-0.12 mm2, wherein the ratio of the cross-section of the sample fluid canal to the cross-section of the working fluid canal or the ejection canal is preferably between 0.2 and 0.5, more particularly between 0.3 and 0.4 and most preferably 0.35.

Abstract: A displacement pump with a pump housing containing a pump chamber of varying volume, the limiting walls of which includes a moveable portion or diaphragm, the movement and/or deformation of which varies the pump chamber volume. The pump chamber has a fluid inlet on the suction side of the pump and a fluid outlet on the pressure side. Both the fluid inlet and the fluid outlet, or possibly only one of them, includes a flow controlling element having one diffuser and one diffuser inlet which, for the same flow, has a larger pressure drop in one flow direction (the nozzle direction) than in the opposite flow direction (the diffuser direction). A drive element is coupled to the diaphragm, whereby the diaphragm can be caused to oscillate, so that the fluid volume in the pump chamber is caused to pulsate and thereby produce a net flow of fluid through the pump.