Abstract: A pump comprises a body for at least partially defining a pumping chamber (28); a pump member which undergoes displacement when acting upon a fluid in the pumping chamber; and a piezoelectric element which responds to the displacement of the pump member to generate an electric current. The electric current generated by the piezoelectric element is preferably applied to a charge storage device which is coupled to the piezoelectric element. The storage device can take various forms, including but not limited to a battery (50, 150, 250), a capacitor (52, 152, 252), and a power supply for the pump (54). In one example embodiment, the pump member is a diaphragm (26) which undergoes the displacement when acting upon a fluid in the pumping chamber. In this example embodiment, the piezoelectric element responds to the displacement of the diaphragm to generate the electric current.

Abstract: An electrically-powered fluid sprayer employs a piezoelectric fluid pump that includes an inlet port, an outlet port, a pump chamber, and a piezoelectric element that is deformed and displaced by electrical signals supplied thereto to vary the volume of the pump chamber. Such displacement pumps fluid into the inlet port and into the pump chamber and discharges fluid from the pump chamber out the outlet port. The inlet port is in fluid-communication with a fluid reservoir. Spin mechanics may be disposed downstream from the outlet port of the fluid pump and upstream from the discharge nozzle. The piezoelectric fluid sprayer may be extended to include a dual chamber piezoelectric pump that pumps different fluids (e.g., a liquid and air). The output of the dual chamber pump is mixed in a manifold and supplied downstream to the discharge nozzle. Spin mechanics may be employed in the fluid stream upstream from the discharge nozzle after the mixing.

Abstract: Thin chamber diaphragm-operated fluid handling devices, including thin chamber pumps and thin chamber valves, facilitate device compactness and, in some configurations, self-priming. Diaphragm actuators of the thin chamber devices either comprise or are driven by piezoelectric materials. The thinness of the chamber, in a direction parallel to diaphragm movement, is in some embodiments determined by the size of a perimeter seal member which sits on a floor of a device cavity, and upon which a perimeter (e.g. circumferential or peripheral portion) of the diaphragm actuator sits. The diaphragm actuator is typically retained in a device body between the floor seal member and another seal member between which the perimeter of the actuator is sandwiched. The devices have an input port and an output port.

Abstract: A miniature pump has at least one controllable expansion-and-contraction chamber, and associated pair of tiny ducts interconnecting a fluid source and destination. The ducts communicate with the chamber(s); an linking tunnel links the ducts. Valves interact with fluid pressures due to expansion and contraction, imposing directionality on flow in the ducts and tunnel. Preferences: making the valve a passive flapper, implanting the pump in a creature, making the source a medication reservoir for supplying the creature; making the source a fuel tank and destination a tiny engine; making the source provide a specimen for assay and destination an observation slide; human or automatic examination of the slide under a microscope (e. g. electron microscope); making the source a reagent and destination a process stream; making the source a colorant and destination a colorant application system. Preferably included is an optical channel with intersecting fluid duct for optically monitoring pumped fluid.

Abstract: A pump is provided having a pump chamber that is capable of changing a volume thereof by a diaphragm, an inlet passage permitting an operating fluid to flow into the pump chamber; an outlet passage permitting an operating fluid to flow out from the pump chamber; and a check valve provided on the inlet passage. An inertance value of the inlet passage is smaller than the inertance value of the outlet passage. The diaphragm is driven by a frequency f (Hz) satisfying the following formula: f ? 0.26 X ? L ? ? S wherein the inertance value of the outlet passage is L (kg/m4), the displacement from an upper end point to a bottom end point of the diaphragm is X (m), and the cross section area of the pump chamber is S (m2).

Abstract: A Peristaltic micropump includes a first membrane region with a first piezo-actor for actuating the first membrane region, a second membrane region with a second piezo-actor for actuating a second membrane region, and a third membrane region with a third piezo-actor for actuating the third membrane region. A pump body forms, together with the first membrane region, a first valve whose passage opening is open in the non-actuated state of the first membrane region and whose passage opening may be closed by actuating the first membrane region. The pump body forms, together with the second membrane region, a pumping chamber whose volume may be decreased by actuating the second membrane region. The pump body forms, together with the third membrane region, a second valve whose passage opening is open in the non-actuated state of the third membrane region and whose passage opening may be closed by actuating the third membrane region. The first and the second valve are fluidically connected to the pumping chamber.

Abstract: Disclosed herein is a micro fluid transferring system that comprises a micropump having a chamber, a first fluid transferring portion connected to the chamber, and a second fluid transferring portion connected to the chamber. This system is characterized in that at least one of the first and second fluid transferring portions comprises a pressure absorbing section for absorbing or alleviating a liquid vibrational pressure therein.

Abstract: The invention provides a pump which has reduced pressure loss by using fewer mechanical on-off valves, which has increased reliability, which can be used under a high load pressure, which can be driven at a high frequency, and which has good drive efficiency by increasing discharge fluid volume per pumping period. A circular diaphragm, disposed at the bottom portion of a case, has its outer peripheral edge secured to and supported by the case. A piezoelectric device to move the diaphragm is disposed at the bottom surface of the diaphragm. A space between the diaphragm and the top wall of the case is a pump chamber. An inlet flow path, having a check valve serving as a fluid resistor disposed thereat, and an outlet flow path, which opens to the pump chamber during operation of the pump, open towards the pump chamber.

Abstract: The invention provides a pump with high driving efficiency in which the number of mechanical switching valves is decreased to reduce pressure loss and increase reliability, and which is ready for high load pressure and high-frequency driving, and which increases the discharged fluid volume for one cycle of pumping. A circular diaphragm arranged on the bottom of a casing has the outer edge fixed to the casing. The diaphragm includes a piezoelectric element to move the diaphragm on the bottom surface thereof. The space between the diaphragm and the top wall of the casing serves as a pump chamber, wherein a suction channel and a discharge channel are opened to the pump chamber, the suction channel having a check valve serving as a fluid resistive element and the discharge channel being always communicated with the pump chamber, even during the operation of the pump.

Abstract: A closed-loop piezoelectric pump is disclosed for use in a fluid delivery system. The pump housing includes a movable diaphragm that defines a pumping chamber within the pump housing, the pumping chamber having an inlet for admitting fluid and an outlet for emitting fluid. A piezoelectric transducer is coupled to the moveable diaphragm and operates to produce a pumping action by varying the volume of the pumping chamber. The piezoelectric transducer may be used to generate an acoustic pressure pulse within the fluid delivery system and to sense reflections of the acoustic pressure pulse caused by impedance changes downstream of the pump. Properties of the fluid path downstream of pump may be determined from the characteristics of the sensed reflections.

Abstract: Disclosed is a method and a machine (displacement machine or similar) used to convey transportable media (gaseous, liquid, pasty or trickling). The drive produces a migrating wave.

Abstract: A microvalve sensor for sensing fluid flow therethrough and generating an electrical signal indicative thereof comprises: a housing connectable inline with a fluid passageway; a microvalve disposed in the housing to permit fluid to flow unidirectionally through the housing, the microvalve including: a substrate; an insulating layer disposed over the substrate, the substrate and insulating layer including an orifice to accommodate fluid flow through the housing; and a diaphragm element disposed over the insulating layer, the diaphragm element including: a solid center portion having an area sufficient to cover the orifice, and an outer portion surrounding the center portion having a plurality of apertures for passing fluid from the orifice through the housing, the outer portion being affixed to the insulating layer around a periphery thereof, the diaphragm element and substrate forming opposite plates of a capacitor having a capacitance which changes with fluid flow through the housing; and a circuit coupled a

Abstract: A pump according to the present invention has a circular diaphragm 4 placed at the bottom of a casing 2. At the bottom of the diaphragm 4, a piezoelectric element 6 is installed in contact with the diaphragm 4. A narrow space between the diaphragm 4 and the top wall of the casing 2 constitutes a pumping chamber 8. An inlet flow path 12 and an outlet flow path 14 are open to the pumping chamber 8, wherein a check valve 10 is installed in the inlet flow path 12. Immediately downstream of the pumping chamber, the outlet flow path 14 has a narrow segment 16. The narrow segment 16 of the outlet flow path has ½ the diameter and ¼ the cross sectional area of the outlet flow path 14. The outlet flow path 14 has a return inlet 22, which is connected to a return outlet 23 in the inlet flow path via an active valve 24. The active valve 24 is opened and closed freely by an actuator 26 made of shape-memory alloy.

Abstract: An exemplary system and method for manufacturing micropump systems having integrated piezoresistive sensors is disclosed as including inter alia: a substrate, an inlet channel, an outlet channel, a pumping cavity, a first valve for permitting fluid flow from the inlet channel to the pumping cavity and restricting backflow of purged fluid from the pumping cavity to the inlet channel; a second valve for permitting fluid flow from the pumping cavity to an outlet channel and restricting backflow of purged fluid from the outlet channel to the pumping cavity; a pump actuator element; a pressure sensing cavity surface capable of at least partial mechanical deformation; a plurality of piezoresistors disposed within the sensing cavity; a plurality of contact pads; a plurality of conductive pathways connecting the piezoresistors and the contact pads; and a substantially monolithic device package, wherein the sensing cavity is substantially contained within the micropump device package.

Abstract: An actuating device for hydraulically securing a camshaft of an engine of a motor vehicle in a start position has a solenoid valve controlling the flow of a pressure medium to a camshaft adjuster with a rotary slide valve that is fixedly connected to the camshaft and moves the camshaft into the required start position according to the pressure medium supplied to it by the solenoid valve.

Abstract: Various application are provided for an enclosure having a first wall and two or more second walls surrounding a cavity. The enclosure also has an inlet and outlet each in fluid communication with the cavity. The second walls each have at least a portion shaped such that a force acting on the first wall tending to deflect the element causes an amplified deflection of the second walls into the cavity. Such applications include a pump, a structure comprised of one or more enclosures, structural elements, and apparatus for storing and releasing energy.

Abstract: A micropump has two chambers separated by an actuator for causing fluid to flow in the chambers. Each chamber is equipped with a ball that acts as a valve for allowing flow in a desired direction. The balls are heavier than the fluid being pumped, and reside at an interface between the chambers and passages feeding fluid into the chambers and provide a tight seal between the chambers and passages feeding the chambers when fluid pressure forces the fluid back toward the feeding passages.

Abstract: A valveless micropump includes a hollow pump chamber having a driving element coupled thereto, an inlet channel coupled to the hollow pump chamber, and an outlet channel coupled to the hollow pump chamber. The inlet channel, the hollow pump chamber, and the outlet channel define a fluid flow path through the inlet channel, the hollow pump chamber, and the outlet channel. At least one direction-sensitive element disposed in the flow path within one of the inlet and outlet channels and comprising a direction-sensitive element, is installed at an angle which produces a drag ratio greater than unity on fluid in the flow path. The driving element may comprise an electrostatic/piezoelectric member. Various embodiments of the valveless pump include one or more of the airfoil elements mounted in one, the other or both of the inlet and outlet channels, including embodiments in which one or more cascades of the airfoil elements are mounted in the inlet channel and the outlet channel.

Abstract: An exemplary device and method for microfluidic transport is disclosed as providing inter alia a passive check valve (100), a fluid inlet channel (210), a fluid outlet channel (220) and a pumping cavity (240). The fluid inlet channel (210) is generally configured to flow a fluid through the check valve (100). The check valve (100) generally provides substantially passive means for preventing or otherwise decreasing the incidence of purged outlet fluid re-entering either the pumping cavity (240) or the fluid inlet channel (210). Accordingly, the reduction of backflow generally tends to enhance overall pumping performance and efficiency. Disclosed features and specifications may be variously controlled, adapted or otherwise optionally modified to improve micropump operation in any microfluidic application.

Abstract: A piezoelectrically driven fluid pump includes a chamber having two opposite sidewalls formed by flexible membranes, and an inlet and an outlet each regulated by a valve. Separate piezo elements are fixed to each of the membranes, to flex the membranes and increase or reduce the chamber volume and thereby draw fluid into the chamber or expel fluid from the chamber. The valves are each formed by two adjacent piezo elements that are supported or flexibly joined together at two opposite ends. When actuated, the valve piezo elements flex outward between the two opposite ends, opening the valve to form an aperture between the two piezo elements. In another embodiment, a fluid pump includes a chamber having one flexible membrane sidewall. A valve-regulated inlet or outlet aperture through the membrane communicates with the pump chamber. A ring-shaped piezo centered around the aperture, on the membrane, flexes the membrane.

Abstract: The present invention provides a membrane with magnetic particles. In one embodiment the membrane is created by mixing particles in a non-magnetic base. The membrane may act as an actuator, a sensor, a pump, a valve, or other device. A magnet is operatively connected to the membrane. The magnet acts on and changes the shape of the membrane.

Abstract: A micropump comprising a pump body including a fluid inlet channel, a fluid outlet channel and pumping reservoir, the fluid inlet channel and the fluid outlet channel communicating with the pumping reservoir, a diaphragm covering the pumping reservoir, a piezoelectric strip actuator attached to the diaphragm such that by applying a voltage to the actuator, the diaphragm can be raised or lowered relative to the pumping chamber, a valve on the inlet channel and the outlet channel, the valve opening and closing the inlet and the outlet channel in response to the raising and lowering of the diaphragm.

Abstract: Air managers for power supplies such as metal-air batteries or fuel cells are described. In some embodiments, the air managers can include a diaphragm, the movement of which can cause air to be exchanged, for example, between the interior and exterior of the casing of a metal-air battery or fuel cell.

Abstract: A microfluidic device including a fluidic pumping system is provided. Some embodiments include a fluid-carrying channel, a plurality of acoustic pumping elements arranged along the fluid-carrying channel, wherein the acoustic pumping elements are configured to form an acoustic wave focused within the channel, and a controller in electrical communication with the plurality of acoustic pumping elements, the controller being configured to activate the acoustic pumping elements in such a manner as to cause the acoustic wave to move along the channel to move the fluid through the channel.

Abstract: A closed-loop piezoelectric pump is disclosed for use in a fluid delivery system. The pump housing includes a movable diaphragm that defines a pumping chamber within the pump housing, the pumping chamber having an inlet for admitting fluid and an outlet for emitting fluid. A piezoelectric transducer is coupled to the moveable diaphragm and operates to produce a pumping action by varying the volume of the pumping chamber. The piezoelectric transducer may be used to generate an acoustic pressure pulse within the fluid delivery system and to sense reflections of the acoustic pressure pulse caused by impedance changes downstream of the pump. Properties of the fluid path downstream of pump may be determined from the characteristics of the sensed reflections.

Abstract: A pump having a shape memory actuator and a fuel cell system including the same.

Abstract: Methods and apparatus for electrostatically pumping fluids without passing the fluids through the electric field of the pump are contemplated. Electrostatic forces are preferably used to move the diaphragms in one direction, while elastic and/or other restorative forces are used to move the diaphragms back to their original un-activated positions. In some embodiments, this may allow fluid to be pumped without passing the fluid between actuating electrodes. This may be particularly useful when the fluids have dielectric, conductive, polar or other qualities that may affect traditional electrostatic pump performance. Pumps having various elementary cells are contemplated, including two-celled pumps disposed within a single chamber and pumps having greater numbers of cells wherein each cell is disposed within a different chamber.

Abstract: The present invention relates to a piston pumping system for substantially gas-free measurement and/or pumping of predetermined quantities of liquids, preferably pharmaceutical liquids containing oxidation-prone ingredients. Preferably, the system is used as a micropump or as a component thereof in medical devices such as transdermal therapeutic systems, for example.

Abstract: A miniature pump includes a miniature pump portion including a suction passage through which a liquid flows in, and a discharge passage through which the liquid flows out, and a bubble trap portion for blocking an entry of air bubbles into the miniature pump portion. Since the bubble trap portion prevents the entry of air bubbles into the miniature pump portion, a deterioration of pump characteristics owing to the entry of air bubbles can be suppressed, making it possible to obtain a miniature pump that achieves both a large discharge flow rate and stable discharge flow rate characteristics.

Abstract: An exemplary device and method for microfluidic transport is disclosed as providing inter alia a valve membrane sheet (400), an inlet channel (140) and an outlet channel (150). The valve membrane sheet effectively confines transport of fluid from the inlet channel to the outlet channel where fluid may be purged. The valve membrane sheet also generally provides means for preventing or otherwise substantially decreasing the incidence of purged fluid re-entering the inlet channel. Accordingly, the reduction of backflow generally tends to enhance overall pumping performance and efficiency. Disclosed features and specifications may be variously controlled, adapted or otherwise optionally modified to improve micropump operation in any microfluidic application.

Abstract: A micro pump having at least one pump member for conveying a fluid by action of pressure includes a pump unit formed by at least one actuator member for generating a pressure fluctuation and a fluid channel in which the fluid flows. The actuator member provided with a cell formed by disposing two side walls made of piezoelectric/electrostrictive elements or antiferrodielectric elements on a connecting plate, and covering a surface facing the connecting plate between the side walls with a cover plate. The actuator member selectively forms the fluid channel and generates pressure fluctuation in the fluid channel member due to displacement of the cell caused by expansion/contraction of the side walls. The micro pump is small and thin in size, while attaining increasing fluid ejection amounts, and a thigh speed in response.

Abstract: An exemplary method for making a micropump device is disclosed as providing inter alia a substrate (300), an inlet opening (310), and outlet opening (340), a pump chamber (370) and flapper valves (350, 360). The fluid inlet channel (310) is generally configured to flow a fluid through/around the inlet opening flapper valve (350). The outlet opening flapper valve (360) generally provides means for preventing or otherwise decreasing the incidence of outlet fluid re-entering either the pumping cavity (370) and/or the fluid inlet channel (310). Accordingly, the reduction of backflow generally tends to enhance overall pumping efficiency. Disclosed features and specifications may be variously controlled, adapted or otherwise optionally modified to improve micropump operation in any microfluidic application.

Abstract: An oscillating displacement pump, particularly a diaphragm pump (P) for liquid or gaseous delivery media, having a delivery space which on the one side is delimited by a pump head and on the other side by a delivery element, particularly formed by a diaphragm (6). The delivery element is drivingly connected to an eccentric drive, and an inlet valve connected to an inlet connection and an outlet valve connected to an outlet connection are connected to the delivery space. The pump has a pulsation damper (45) on the pressure side, and also an excess pressure limiting device (27) between the pressure and suction sides, these devices being integrated into the pump head. In use as a liquid pump, an oscillation chamber (16) is integrated into the suction side of the pump head. Pressure peaks are thereby diminished both on the suction side and the pressure side, and a pressure rise on the pressure side is limited to a predeterminable value.

Abstract: A microfluidic device including a fluidic pumping system is provided. Some embodiments include a fluid-carrying channel, a plurality of acoustic pumping elements arranged along the fluid-carrying channel, wherein the acoustic pumping elements are configured to form an acoustic wave focused within the channel, and a controller in electrical communication with the plurality of acoustic pumping elements, the controller being configured to activate the acoustic pumping elements in such a manner as to cause the acoustic wave to move along the channel to move the fluid through the channel.

Abstract: An apparatus for electrostatically pumping fluids without passing the fluids through the electric field of the pump is contemplated. Electrostatic forces are preferably used to move the diaphragms in one direction, while elastic and/or other restorative forces are used to move the diaphragms back to their original un-activated positions. In some embodiments, this may allow fluid to be pumped without passing the fluid between actuating electrodes. This may be particularly useful when the fluids have dielectric, conductive, polar or other qualities that may affect traditional electrostatic pump performance. Pumps having various elementary cells are contemplated, including two-celled pumps disposed within a single chamber and pumps having greater numbers of cells wherein each cell is disposed within a different chamber.

Abstract: The micro pump 100 comprises a first flow pass 115 for changing the flow pass resistance in accordance with the differential pressure, a second flow pass 117 wherein the percentage change in flow pass resistance relative to the differential pressure is less than that of the first flow pass 115, pressure chamber 109 connected to the first flow pass 115 and the second flow pass 117, and a piezoelectric element 107 for changing the pressure within the pressure chamber 109 so as to transport minute amounts of fluid with high precision using a simple construction. The ratio of the flow pass resistance of the first flow pass 115 and the flow pass resistance of the second flow pass 117 differs by changing the pressure within the pressure chamber 109 via the piezoelectric element 107, such that fluid can be transported in a standard direction and an opposite direction.

Abstract: The fluid-flow device (100) of the invention comprises a stack (30) covered by a closure wafer (20), said stack (30) comprising a support wafer (36), a layer of insulating material (34), and a silicon layer (32). The closure wafer (20) and/or said silicon layer (32) are machined so as to define a cavity (38) between said closure wafer (20) and said silicon layer (32), said support wafer (36) has at least one duct (102) passing right through it, said layer of insulating material (34) presenting at least one zone (35) that is entirely free of material placed at least in line with said duct (102) so as to co-operate with said cavity (38) to define a moving member (40) in said silicon layer (32), the moving member being suitable under the pressure of liquid in said cavity (38) for reversibly moving towards said support wafer (36) until contact is made between said moving member (40) and said support wafer (36).

Abstract: The fluidic drive for miniature acoustic-fluidic pump and mixer is comprised of an acoustic transducer attached to an exterior or interior of a fluidic circuit or reservoir. The transducer converts radio frequency electrical energy into an ultrasonic acoustic wave in a fluid that in turn generates directed fluid motion through the effect of acoustic streaming. Acoustic streaming results due to the absorption of the acoustic energy in the fluid itself. This absorption results in a radiation pressure and acoustic streaming in the direction of propagation of the acoustic propagation or what is termed “quartz wind”.

Abstract: A micro pump member is provided, in which a plurality of cells formed in a base part are used as pressurizing chambers, and side walls forming the pressurizing chambers are constructed by piezoelectric/electrostrictive elements. The volume of the pressurizing chambers is changed by the displacement of the piezoelectric/electrostrictive elements to produce a pressure in the pressurizing chambers. The pressurizing chambers are formed independent of adjacent pressurizing chambers. Activation can be carried out by applying a driving electric field having a high field strength to the pressurizing chambers, so that a greater displacement and a higher response can be obtained with a smaller field strength.

Abstract: An exemplary method for making a micropump device is disclosed as providing inter alia a substrate (300), an inlet opening (310), and outlet opening (340), a pump chamber (370) and flapper valves (350, 360). The fluid inlet channel (310) is generally configured to flow a fluid through/around the inlet opening flapper valve (350). The outlet opening flapper valve (360) generally provides means for preventing or otherwise decreasing the incidence of outlet fluid re-entering either the pumping cavity (370) and/or the fluid inlet channel (310). Accordingly, the reduction of backflow generally tends to enhance overall pumping efficiency. Disclosed features and specifications may be variously controlled, adapted or otherwise optionally modified to improve micropump operation in any microfluidic application.

Abstract: An exemplary device and method for microfluidic transport is disclosed as providing inter alia a passive check valve (100), a fluid inlet channel (210), a fluid outlet channel (220) and a pumping cavity (240). The fluid inlet channel (210) is generally configured to flow a fluid through the check valve (100). The check valve (100) generally provides substantially passive means for preventing or otherwise decreasing the incidence of purged outlet fluid reentering either the pumping cavity (240) or the fluid inlet channel (210). Accordingly, the reduction of backflow generally tends to enhance overall pumping performance and efficiency. Disclosed features and specifications may be variously controlled, adapted or otherwise optionally modified to improve micropump operation in any microfluidic application.

Abstract: The invention provides a pump with high driving efficiency in which the number of mechanical switching valves is decreased to reduce pressure loss and increase reliability, and which is ready for high load pressure and high-frequency driving, and which increases the discharged fluid volume for one cycle of pumping. A circular diaphragm arranged on the bottom of a casing has the outer edge fixed to the casing. The diaphragm includes a piezoelectric element to move the diaphragm on the bottom surface thereof. The space between the diaphragm and the top wall of the casing serves as a pump chamber, wherein a suction channel and a discharge channel are opened to the pump chamber, the suction channel having a check valve serving as a fluid resistive element and the discharge channel being always communicated with the pump chamber, even during the operation of the pump.

Abstract: Various application are provided for an enclosure having a first wall and two or more second walls surrounding a cavity. The enclosure also has an inlet and outlet each in fluid communication with the cavity. The second walls each have at least a portion shaped such that a force acting on the first wall tending to deflect the element causes an amplified deflection of the second walls into the cavity. Such applications include a pump, a structure comprised of one or more enclosures, structural elements, and apparatus for storing and releasing energy.

Abstract: A pump having a main pump body including a casing to which a fluid is supplied, and a pump section, an input valve section, and an output valve section which are provided opposingly to one surface in the casing. Each of the pump section, the input valve section, and the output valve section has an actuator section. The input valve section, the pump section, and the output valve section are provided opposingly to the back surface of the casing for selectively forming a flow passage on the back surface of the casing in accordance with selective displacement action of the input valve section, the pump section, and the output valve section in a direction approaching or separating from the back surface of the casing. The fluid is controlled for its flow in accordance with the selective formation of the flow passage.

Abstract: The invention provides a pump which has reduced pressure loss by using fewer mechanical on-off valves, which has increased reliability, which can be used under a high load pressure, which can be driven at a high frequency, and which has good drive efficiency by increasing discharge fluid volume per pumping period. A circular diaphragm, disposed at the bottom portion of a case, has its outer peripheral edge secured to and supported by the case. A piezoelectric device to move the diaphragm is disposed at the bottom surface of the diaphragm. A space between the diaphragm and the top wall of the case is a pump chamber. An inlet flow path, having a check valve serving as a fluid resistor disposed thereat, and an outlet flow path, which opens to the pump chamber during operation of the pump, open towards the pump chamber.

Abstract: A micropump comprising a pump body including a fluid inlet channel, a fluid outlet channel and pumping reservoir, the fluid inlet channel and the fluid outlet channel communicating with the pumping reservoir, a diaphragm covering the pumping reservoir, a piezoelectric strip actuator attached to the diaphragm such that by applying a voltage to the actuator, the diaphragm can be raised or lowered relative to the pumping chamber, a valve on the inlet channel and the outlet channel, the valve opening and closing the inlet and the outlet channel in response to the raising and lowering of the diaphragm.

Abstract: A pump having a main pump body including a casing to which a fluid is supplied, and a pump section, an input valve section, and an output valve section which are provided opposingly to one surface in the casing. Each of the pump section, the input valve section, and the output valve section has an actuator section. The input valve section, the pump section, and the output valve section are provided opposingly to the back surface of the casing for selectively forming a flow passage on the back surface of the casing in accordance with selective displacement action of the input valve section, the pump section, and the output valve section in a direction approaching or separating from the back surface of the casing. The fluid is controlled for its flow in accordance with the selective formation of the flow passage.

Abstract: A micromechanical pump has a membrane (2) positioned above a substrate (1). The substrate is provided with a cavity (8) which is formed in an endlessly continuous shape (e.g., circular) to provide a channel for a drive fluid. A cover (9) is positioned above the substrate with the membrane being between the substrate and cover. The cover is provided with an inlet (11) and outlet (10). Electrodes (3, 4) are provided around the floor of the cavity. The electrodes are selectively actuated so as to attract selected areas of the membrane resulting in a gap forming between the cover and the selected areas of the membrane. The areas of the membrane above the non-selected electrodes form a seal with the cover. By selectively actuating the electrodes a peristaltic pumping action results in a pumped fluid traveling from the inlet, through the gaps and out the outlet.

Abstract: Disclosed herein is a micro fluid transferring system that comprises a micropump having a chamber, a first fluid transferring portion connected to the chamber, and a second fluid transferring portion connected to the chamber. This system is characterized in that at least one of the first and second fluid transferring portions comprises a pressure absorbing section for absorbing or alleviating a liquid vibrational pressure therein.

Abstract: A hydraulic actuator that is capable of substantial actuation but does not require a conventional pump, uses only deflectable membranes and passive valves, or, at most, a minimum of active valves, and, under certain circumstances, may be free to move when the actuator is de-energized, is provided. The actuator utilizes the deflectable membranes to move fluid throughout the actuator. The movement of the fluid actuates a shaft or other suitable device, as required.