Electrical Or Getter Type Patents (Class 417/48)
  • Patent number: 6374909
    Abstract: An electrode arrangement for electrohydrodynamic (EHD) enhancement of heat and mass transfer is disclosed. Electrodes of alternating polarity are embedded within a nonconductive heat transfer wall material and are connected to a high voltage source at either end of the heat transfer wall material where the heat transfer wall material passes through a tube sheet, fitting or other confinement. When voltage from the high voltage source is applied to the alternating electrodes, electric field gradients are created on both the interior and exterior heat transfer surfaces of the heat transfer wall material. Regions of intense electric field gradient reside in close proximity to both heat transfer surfaces, thus when nonconductive fluids pass over the heat transfer surfaces, bubbles are repelled from the regions of strong electric field gradients above the electrodes and additional fluid is attracted into these regions.
    Type: Grant
    Filed: August 1, 1996
    Date of Patent: April 23, 2002
    Assignee: Georgia Tech Research Corporation
    Inventors: Sheldon M. Jeter, Said I. Abdel-Khalik
  • Patent number: 6321561
    Abstract: A refrigeration system has a compressor, a condenser, and an evaporator connected in a loop to provide a refrigeration cycle designed for small heat loads of less than one kilowatt. The compressor has a first refrigerant compressor section connected in the loop for receiving low pressure refrigerant fluid from the evaporator and providing compressed refrigerant fluid to the condensor. A second, electrochemical gas compressor section has a gas output linked to the first compressor section for compressing the refrigerant fluid.
    Type: Grant
    Filed: October 1, 1999
    Date of Patent: November 27, 2001
    Inventor: Henri J. R. Maget
  • Patent number: 6318968
    Abstract: An improved magnetorheological fluid pumping system and method are provided which effectively dispense a predetermined amount of magnetorheological fluid for delivery to a MR device such as a damper assembly, for example, during manufacture. The fluid pumping system includes a pump having inlet and outlet valves, a reciprocally mounted piston, a stroke operator device for controlling the movement of the piston and an electronic controller for operating the stroke operator device and the inlet and outlet valves. Importantly, the inlet and outlet valves include an annular flow gap and a magnetic field generating assembly operable in an energized state to generate a magnetic field across the flow gap to cause magnetorheological fluid flowing through the gap to experience a magnetorheological effect sufficient to prevent flow through the gap and in a de-energized state to permit flow through the gap.
    Type: Grant
    Filed: March 31, 2000
    Date of Patent: November 20, 2001
    Assignee: Delphi Technologies, Inc.
    Inventors: Michael Leslie Oliver, William Charles Kruckemeyer, Richard Edward Longhouse
  • Publication number: 20010016166
    Abstract: A plasma pumping cell and method for pumping ions from a first region containing a plasma to a second region when the plasma pumping cell is interposed between the first and second regions, the plasma pumping cell including: a partition member (4) positioned between the first and second regions, the partition member (4) having a through opening defining a conduit (22); a plurality of magnets (24) positioned relative to the conduit in a manner to provide lines of magnetic force that extend through the conduit; a source of free electrons in communication with the conduit; and an electric potential source (34) disposed relative to the conduit to create an electrostatic field which accelerates ions from the conduit (22) to the second region.
    Type: Application
    Filed: December 28, 2000
    Publication date: August 23, 2001
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Raphael A. Dandl, Wayne L. Johnson, Gareth Guest
  • Patent number: 6264433
    Abstract: A sputter ion pump incorporating a corrugated style anode comprising a plurality of cylindrical adjacent hollow cells provided with cross sections having substantially the same area and an arcuated perimeter.
    Type: Grant
    Filed: April 1, 2000
    Date of Patent: July 24, 2001
    Assignee: Varian, Inc.
    Inventor: Miriam Spagnol
  • Patent number: 6241477
    Abstract: An apparatus for removing an undesirable gas in a processing chamber includes one or more getter materials disposed between a process gas inlet and a substrate support member in the processing chamber, and one or more temperature control elements disposed in thermal communication with the one or more getter materials. Preferably, a controller is connected to the one or more temperature control elements to regulate the temperature of the one or more getter materials, and a gas analyzer is disposed within the processing chamber to provide signals to the controller and indicate the presence of undesirable gases. Another aspect of the invention provides a method for removing a gas from a processing chamber comprising pumping the gas using a getter material disposed between a process gas inlet and a substrate support member in the processing chamber, wherein the getter material is activated by a temperature control element disposed in thermal communication with the getter material.
    Type: Grant
    Filed: August 25, 1999
    Date of Patent: June 5, 2001
    Assignee: Applied Materials, Inc.
    Inventors: Thomas Brezoczky, Roger Heyder, Robert E. Davenport
  • Patent number: 6220821
    Abstract: Disclosed herein is an ion pump construction having constructional components to avoid etch through failure of the vacuum housing and, additionally, constructional features to reduce the latent period within which the ion pumping function is initiated.
    Type: Grant
    Filed: May 20, 1999
    Date of Patent: April 24, 2001
    Assignee: Kernco, Incorporated
    Inventors: Robert H. Kern, Kevin D. Hosman
  • Patent number: 6171067
    Abstract: The present invention generally provides a micropump that utilizes electroosmotic pumping of fluid in one channel or region to generate a pressure based flow of material in a connected channel, where the connected channel has substantially no electroosmotic flow generated. Such pumps have a variety of applications, and are particularly useful in those situations where the application for which the pump is to be used prohibits the application of electric fields to the channel in which fluid flow is desired, or where pressure based flow is particularly desirable.
    Type: Grant
    Filed: October 20, 1999
    Date of Patent: January 9, 2001
    Assignee: Caliper Technologies Corp.
    Inventor: John Wallace Parce
  • Patent number: 6165328
    Abstract: A wafer processing system including a processing chamber, a low pressure pump coupled to the processing chamber for pumping noble and non-noble gases, a valve mechanism coupling a source of noble gas to the processing chamber, an in situ getter pump disposed within the processing chamber which pumps certain non-noble gases during the flow of the noble gas into the chamber, and a processing mechanism for processing a wafer disposed within the processing chamber. Preferably, the in situ getter pump can be operated at a number of different temperatures to preferentially pump different species of gas at those temperatures. A gas analyzer is used to automatically control the temperature of the getter pump to control the species of gasses that are pumped from the chamber.
    Type: Grant
    Filed: February 28, 1997
    Date of Patent: December 26, 2000
    Assignee: SAES Getters S.p.A.
    Inventors: D'Arcy H. Lorimer, Gordon P. Krueger
  • Patent number: 6149391
    Abstract: A hydraulic displacement machine that can operate as a pump or a motor in connection with an electrorheologic or magnetorheologic fluid includes a housing, a rotary piston arranged to rotate within a chamber in the housing, at least one displacement vane provided on the rotary piston, a plurality of field generating elements such as capacitor plate segments and/or coil arrangements that are each individually electrically energizable and that are arranged on the two sidewalls of the housing chamber distributed around the circumferential direction, and an actuator connected to each field generating element so as to move the elements of each pair selectively closer together and farther apart from each other. By applying an appropriate electric or magnetic field to the electrorheologic or magnetorheologic fluid between the field generating elements, the fluid is locally solidified in the "flow mode" to form a stationary seal plug within each fluid chamber between respective consecutive vanes.
    Type: Grant
    Filed: November 10, 1998
    Date of Patent: November 21, 2000
    Assignees: Carl Schenk AG, Bayer AG
    Inventors: Andreas Pohl, Horst Rosenfeldt, Eckhardt Wendt, Klaus Buesing
  • Patent number: 6142742
    Abstract: A getter pump module includes a number of getter disks provided with axial holes, and a heating element which extends through the holes to support and heat the getter disks. The getter disks are preferably solid, porous, sintered getter disks that are provided with a titanium hub that engages the heating element. A thermally isolating shield is provided to shield the getter disks from heat sources and heat sinks within the chamber, and to aid in the rapid regeneration of the getter disks. In certain embodiments of the present invention the heat shields are fixed, and in other embodiments the heat shield is movable. In one embodiment, a focus shield is provided to reflect thermal energy to the getter material from an external heater element and provide high pumping speeds. An embodiment of the present invention also provides for a rotating getter element to enhance getter material utilization.
    Type: Grant
    Filed: April 11, 1997
    Date of Patent: November 7, 2000
    Assignee: SAES Pure Gas, Inc.
    Inventors: Gordon P. Krueger, D'Arcy H. Lorimer, Sergio Carella, Andrea Conte
  • Patent number: 6109880
    Abstract: An improved getter pump module includes a number of getter elements and a heating element that heats the getter elements. The getter elements are preferably porous, sintered getter disks. The heating element is disposed proximate to the getter elements and provides heat to activate the getter material and cause it to pump desired gasses. The getter elements and heater element are partially surrounded by a focus shield that is positioned between the getter elements and a wall of a processing chamber that encloses the getter elements, the heater element, and the focus shield. The focus shield is provided to reflect thermal energy to the getter material from the heater element, to provide high pumping speeds or short activation/baking times, and to reduce the heat seen by the chamber from the heating element. In certain embodiments of the present invention the focus shield is angled as to be wedge shaped, and may include planar extension portions. Multiple focus shields are provided in some embodiments.
    Type: Grant
    Filed: December 24, 1997
    Date of Patent: August 29, 2000
    Assignee: SAES Pure Gas, Inc.
    Inventors: Gordon Krueger, D'Arcy Lorimer, Sergio Carella, Andrea Conte
  • Patent number: 6106237
    Abstract: A getter pump includes a one-piece, substantially U-shaped frame having a bottom, a first sidewall, and a second sidewall opposing the first sidewall. The first and second sidewalls each have a plurality of slots formed therein. A plurality of getter elements are housed in the frame. Each of the getter elements is disposed in one of the slots in the first sidewall and a corresponding slot in the second sidewall. A heating member for heating the getter elements to their operating temperature is disposed in the frame. A preformed sheet of metal for use in forming a component of a getter pump has a top surface, a bottom surface, and discontinuous perforations formed therein to define a generally rectangular frame section. This frame section is connected to the remainder of the sheet by breakaway tabs and has a pair of folding lines formed therein to define a middle section and opposing outer sections. Each of the opposing outer sections has a plurality of slots formed therein.
    Type: Grant
    Filed: February 23, 1998
    Date of Patent: August 22, 2000
    Assignee: Saes Getters, S.P.A.
    Inventors: Danilo Dominoni, Roberto Giannantonio
  • Patent number: 6077046
    Abstract: A getter assembly (38) includes a porous getter element (40) having an outer periphery (44), and a porous, thermally conductive, annular getter support (42) overlying the getter element (40) and contacting the outer surface (44) of the getter element (40). The getter assembly (38) further includes a wall (24) sized so that the annular getter support (42) is received within the wall (24) with a friction fit between an outer periphery (50) of the annular getter support (42) and an inner periphery of the wall (24). The getter support (42) supports the getter element (40) from the wall (24) and provides a thermally conductive pathway from the wall (24) to the getter element (40). The annular getter support (42) is typically a screen, a mesh, a felt, or a foam, which is deformable to conform to the inner wall (24) and to slide into the wall (24) with a friction fit that ensures good thermal contact.
    Type: Grant
    Filed: January 20, 1998
    Date of Patent: June 20, 2000
    Assignee: Raytheon Company
    Inventors: Adam M. Kennedy, Timothy S. Romano, Steven M. McCabe, Larry E. Cobb
  • Patent number: 6074171
    Abstract: A getter pump, especially suitable for the use upstream, in proximity and coaxially with respect to a turbomolecular pump, comprising inside a cylindrical cartridge (10) a getter device (20) formed of a continuous coil-shaped metal wire having turns (18, 18a) or formed of several zigzag-shaped segments mutually in series between two end points (22), such as to lie in an annular-shaped peripheral zone, concentric with respect to said cartridge (10) and coated with a sintered porous layer of non-evaporable getter material in form of powder. Said cartridge (10) is inserted into a steel stub (30) which is fastened on one side to the chamber to be evacuated and on the other side to a turbomolecular pump. The getter device (20) may be directly supplied with electric current from the outside through said ends (22).
    Type: Grant
    Filed: January 21, 1999
    Date of Patent: June 13, 2000
    Assignee: Saes Getters S.p.A.
    Inventors: Roberto Giannantonio, Andrea Conte
  • Patent number: 6071080
    Abstract: A vacuum device has an envelope and a getter assembly mounted within the envelope. The getter assembly includes a reservoir for containing getter material and a deflector having a surface located opposite the getter material and is oriented to deflect the getter material in a predetermined direction within the vacuum device. The deflector surface has raised and/or depressed portions, such as ribs or undulations, in the direction of diffusion of the getter material. These portions reduce the accumulation of getter material on the deflector during getterfiring, resulting in a much reduced likelihood that getter material particles may break loose from the deflector. By preventing loose particles within the vacuum device, the possibility of a short-circuit in the vacuum device is reduced.
    Type: Grant
    Filed: June 19, 1997
    Date of Patent: June 6, 2000
    Assignee: U.S. Philips Corporation
    Inventors: Ronald Van Der Wilk, Johannes J. M. Overbeek
  • Patent number: 6012902
    Abstract: The present invention generally provides a micropump that utilizes electroosmotic pumping of fluid in one channel or region to generate a pressure based flow of material in a connected channel, where the connected channel has substantially no electroosmotic flow generated. Such pumps have a variety of applications, and are particularly useful in those situations where the application for which the pump is to be used prohibits the application of electric fields to the channel in which fluid flow is desired, or where pressure based flow is particularly desirable.
    Type: Grant
    Filed: September 25, 1997
    Date of Patent: January 11, 2000
    Assignee: Caliper Technologies Corp.
    Inventor: John Wallace Parce
  • Patent number: 6001251
    Abstract: A method of making a solid filter material which filters a predetermined wavelength band from a broader spectrum of radiation is provided. The method includes creating a colloidal structure composed of particles dispersed within a medium, and introducing a solvent thereto. Thereafter, the solvent is evaporated and the remaining structure solidifies into a solid crystalline array. The particles can also be fused together by polymerization using one of several methods which are provided. In another embodiment, methods of filtering submicron particles have been developed which consists of establishing a gel membrane from a crystalline colloidal array with an interstice size less than or equal to the particles to be filtered are disclosed. The gel membrane may employ anisotropic interstices of submicron size and is stretchable or compressible mechanically.
    Type: Grant
    Filed: October 26, 1998
    Date of Patent: December 14, 1999
    Assignee: University of Pittsburgh
    Inventors: Sanford A. Asher, Jay Henis
  • Patent number: 5997255
    Abstract: A getter pump module includes a number of getter disks provided with axial holes, and a heating element which extends through the holes to support and heat the getter disks. The getter disks are preferably solid, porous, sintered getter disks that are provided with a titanium hub that engages the heating element. A thermally isolating shield is provided to shield the getter disks from heat sources and heat sinks within the chamber, and to aid in the rapid regeneration of the getter disks. In certain embodiments of the present invention the heat shields are fixed, and in other embodiments the heat shield is movable. In one embodiment, a focus shield is provided to reflect thermal energy to the getter material from an external heater element and provide high pumping speeds. An embodiment of the present invention also provides for a rotating getter element to enhance getter material utilization.
    Type: Grant
    Filed: January 23, 1997
    Date of Patent: December 7, 1999
    Assignee: SAES Getters S.p.A.
    Inventors: Gordon P. Krueger, D'Arcy H. Lorimer, Sergio Carella, Andrea Conte
  • Patent number: 5993165
    Abstract: A wafer processing system including a processing chamber, a low pressure pump coupled to the processing chamber for pumping noble and non-noble gases, a valve mechanism coupling a source of noble gas to the processing chamber, an in situ getter pump disposed within the processing chamber which pumps certain non-noble gases during the flow of the noble gas into the chamber, and a processing mechanism for processing a wafer disposed within the processing chamber. Preferably, the in situ getter pump can be operated at a number of different temperatures to preferentially pump different species of gas at those temperatures. A gas analyzer is used to automatically control the temperature of the getter pump to control the species of gasses that are pumped from the chamber.
    Type: Grant
    Filed: February 28, 1997
    Date of Patent: November 30, 1999
    Assignee: SAES Pure Gas, Inc.
    Inventors: D'arcy H. Lorimer, Gordon P. Krueger
  • Patent number: 5980213
    Abstract: A getter pump module includes a number of getter disks provided with axial holes, and a heating element which extends through the holes to support and heat the getter disks. The getter disks are preferably solid, porous, sintered getter disks that are provided with a titanium hub that engages the heating element. A thermally isolating shield is provided to shield the getter disks from heat sources and heat sinks within the chamber, and to aid in the rapid regeneration of the getter disks. In certain embodiments of the present invention the heat shields are fixed, and in other embodiments the heat shield is movable. In one embodiment, a focus shield is provided to reflect thermal energy to the getter material from an external heater element and provide high pumping speeds. An embodiment of the present invention also provides for a rotating getter element to enhance getter material utilization.
    Type: Grant
    Filed: January 23, 1997
    Date of Patent: November 9, 1999
    Assignee: SAES Getters S.p.A.
    Inventors: Gordon P. Krueger, D'Arcy H. Lorimer, Sergio Carella, Andrea Conte
  • Patent number: 5911560
    Abstract: A getter pump module includes a number of getter disks provided with axial holes, and a heating element which extends through the holes to support and heat the getter disks. The getter disks are preferably solid, porous, sintered getter disks that are provided with a titanium hub that engages the heating element. A thermally isolating shield is provided to shield the getter disks from heat sources and heat sinks within the chamber, and to aid in the rapid regeneration of the getter disks. In certain embodiments of the present invention the heat shields are fixed, and in other embodiments the heat shield is movable. An embodiment of the present invention also provides for a rotating getter element to enhance getter material utilization.
    Type: Grant
    Filed: December 2, 1994
    Date of Patent: June 15, 1999
    Assignee: SAES Pure Gas, Inc.
    Inventors: Gordon Krueger, D'Arcy H. Lorimer, Sergio Carella, Andrea Conte
  • Patent number: 5899666
    Abstract: An ion drag vacuum pump is installed in a body, one side of which is connected to and in communication with a sealed chamber. An ion generating device and a positive ion dragging device for dragging positive ions generated by the ion generating device to exhaust gases located near the ions by speeding up the ions is disposed in the body. The positive ions are neutralized by a positive ion neutralizing device. The ion generating device includes a corona electrode as a corona discharger to which a positive voltage is applied, a metal plate as a DC glow discharger to which a positive DC voltage is applied, or a first RF electrode and a second RF electrode to which RF power is applied. The ion dragging device includes a target electrode or a first and a second grids to which a positive and a negative voltage are respectively applied. The ion neutralizing device includes a grounded baffle plate.
    Type: Grant
    Filed: August 25, 1997
    Date of Patent: May 4, 1999
    Assignee: Korea Research Institute of Standards and Science
    Inventors: Kwang-Hwa Chung, Hong-Young Jang
  • Patent number: 5879134
    Abstract: A wafer processing system including a processing chamber, a low pressure pump coupled to the processing chamber for pumping noble and non-noble gases, a valve mechanism coupling a source of noble gas to the processing chamber, an in situ getter pump disposed within the processing chamber which pumps certain non-noble gases during the flow of the noble gas into the chamber, and a processing mechanism for processing a wafer disposed within the processing chamber. Preferably, the in situ getter pump can be operated at a number of different temperatures to preferentially pump different species of gas at those temperatures. A gas analyzer is used to automatically control the temperature of the getter pump to control the species of gasses that are pumped from the chamber.
    Type: Grant
    Filed: February 28, 1997
    Date of Patent: March 9, 1999
    Assignee: SAES Pure Gas, Inc.
    Inventors: D'Arcy H. Lorimer, Gordon P. Krueger
  • Patent number: 5827048
    Abstract: A getter support capable of permitting a getter to be compactly arranged in a vacuum envelope while keeping a space for the getter minimized. The getter support includes holders for vertically interposedly holding a getter, first support legs formed integrally with the holders so as to downwardly extend therefrom, and second support legs formed integrally with the holders so as to upwardly extend therefrom. The getter support is fixedly arranged in a getter chamber while being pressed by elasticity of the second support legs. The second support legs are varied in deflection depending on contact thereof with a second substrate of an envelope. This permits a distance between an upper surface of the getter and the second substrate of the envelope to be constantly kept at a desired value.
    Type: Grant
    Filed: October 29, 1996
    Date of Patent: October 27, 1998
    Assignee: Futaba Denshi Kogyo K.K.
    Inventors: Takeshi Tonegawa, Akira Kadowaki, Gentaro Tanaka, Shigeo Itoh, Yuuichi Kogure
  • Patent number: 5632876
    Abstract: By combining electro-osmotic and electrohydrodynamic pumps in a microchannel, both polar and non-polar fluids can be moved along said channel. The pumps can be made from pairs of wire electrodes inserted into openings in the channel and connected to a source of a pulsed DC power. By reversing the voltages on alternate pairs of pumps, fluid flow can be reversed, thereby acting as a gate or valve. By using digital drivers, for example shift registers that can apply a signal to a switching device connected to an electrode by means of enabling and latch signals to an AND gate, control of flow in individual channels in an array of channels can be had with a high degree of integration, and provide for ready manufacturability.
    Type: Grant
    Filed: June 6, 1995
    Date of Patent: May 27, 1997
    Assignee: David Sarnoff Research Center, Inc.
    Inventors: Peter J. Zanzucchi, Sterling E. McBride, Charlotte A. Burton, Satyam C. Cherukuri
  • Patent number: 5544490
    Abstract: A device for maintaining a vacuum in a thermally insulating jacket is described. The device comprises a container formed of a gas-tight material, preferably aluminum, which has an opening to the atmosphere. Inside the container is a first pellet comprising a powder of a Ba--Li alloy getter material. Arranged above, and completely covering, the first pellet is a second pellet comprising a powder of a drying material, optionally including the oxide of a noble metal and a material to prevent contraction of the drier. A process for manufacturing such a device is also described in which the first pellet is obtained by compression of its constituent powders at a pressure between about 30 bar and 1000 bar.
    Type: Grant
    Filed: June 6, 1995
    Date of Patent: August 13, 1996
    Assignee: SAES Getters S.p.A
    Inventors: Paolo Manini, Fortunato Belloni
  • Patent number: 5525861
    Abstract: An image display apparatus comprises an envelope internally provided with at least an electron emitting source, a fluorescent material member that emits light upon irradiation with an electron beam emitted from the electron emitting source and a getter that maintains the vacuum inside the envelope, and a vacuum exhaust tube that forms a vacuum inside the envelope, wherein the inside of the envelope is partitioned with a substrate into a first space having at least the electron emitting source and the fluorescent material member and a second space containing at least the getter, and the substrate has a path that communicates both the spaces.
    Type: Grant
    Filed: April 30, 1993
    Date of Patent: June 11, 1996
    Assignee: Canon Kabushiki Kaisha
    Inventors: Yoshikazu Banno, Kohei Nakata, Ichiro Nomura, Tetsuya Kaneko, Naoto Nakamura
  • Patent number: 5480286
    Abstract: An exhaust apparatus and a high vacuum pumping unit including such high vacuum device and an auxiliary vacuum pump are disclosed, wherein a high vacuum is achieved in a vacuum vessel such that the gas molecules within the vacuum vessel are ionized and accelerated to be exhausted and, further, in the high vacuum pumping unit, those gas molecules diffused back or desorbed from the vacuum pump are ionized and accelerated to be returned to the vacuum pump.
    Type: Grant
    Filed: March 25, 1994
    Date of Patent: January 2, 1996
    Assignee: Ebara Corporation
    Inventors: Kazutoshi Nagai, Tohru Satake, Hideaki Hayashi, Takanari Yasui
  • Patent number: 5401298
    Abstract: A sorption pump for high vacuum applications that is suited for use in gas analyzers such as mass spectrometers. The pump includes a housing containing a quantity of getter material and a diffusion barrier in the gas inlet to the housing. A finite period of time is required for gas molecules in the vacuum analyzer system to cross the barrier, thus providing a window during which gas pulses can be accurately analyzed.
    Type: Grant
    Filed: September 17, 1993
    Date of Patent: March 28, 1995
    Assignee: Leybold Inficon, Inc.
    Inventor: Gunter Voss
  • Patent number: 5340531
    Abstract: A method for producing a substantially silica-free composition of matter comprising a matrix of MoSi.sub.2 having SiC dispersed therein, the matrix being reinforced with a particulate ductile refractory metal, the method comprising providing a composite of the particulate ductile refractory metal and a substantially silica-free composite mechanical alloy powder comprising MoSi.sub.2 and SiC having a composition in that segment of the ternary diagram of FIG. 1 designated A, and consolidating the composite of particulate ductile refractory metal and mechanical alloy powder; the coefficient of thermal expansion of the MoSi.sub.2 matrix having SiC dispersed therein being substantially equivalent to that of the particulate ductile refractory metal. The composition of matter formed by the method and an article of manufacture comprising the same are also disclosed.
    Type: Grant
    Filed: June 1, 1993
    Date of Patent: August 23, 1994
    Assignee: University of Florida
    Inventors: S. Jayashankar, Michael J. Kaufman
  • Patent number: 5328336
    Abstract: A getter capsule comprising at least one particular container (1 or 10) containing getter particles (9) is useful for removing reactive gases in at least one vacuum space(21d or 22d). The particular container (1 or 10) may be made of a material containing sintered particles or may be made of a combination of a filtering means (11) and a perforated inorganic pipe or cup (12). At least one closing means (5 or 15) employed in each container (1 or 10) to close or cover the opening (4 or 14) of the container (1 or 10) may be particularly designed to prevent the getter particles (9) from escaping the container (1 or 10) without using any sealants, even when the container (1 or 10) is subject to vibrations.
    Type: Grant
    Filed: December 9, 1992
    Date of Patent: July 12, 1994
    Assignee: Praxair Technology, Inc.
    Inventor: Jeffert J. Nowobilski
  • Patent number: 5326227
    Abstract: An exhaust apparatus and a high vacuum pumping unit including a high vacuum device and an auxiliary vacuum pump are disclosed, wherein a high vacuum is achieved in a vacuum vessel such that the gas molecules within the vacuum vessel are ionized and accelerated to be exhausted. In the high vacuum pumping unit, those gas molecules are diffused back or released from the vacuum pump are ionized and accelerated to be returned to the vacuum pump.
    Type: Grant
    Filed: February 1, 1993
    Date of Patent: July 5, 1994
    Assignee: Ebara Corporation
    Inventors: Kazutoshi Nagai, Tohru Satake, Hideaki Hayashi, Takanari Yasui
  • Patent number: 5275537
    Abstract: A compressor with no moving parts in the traditional sense having a housing having an inlet end allowing a low pressure fluid to enter and an outlet end allowing a high pressure fluid to exit. Within the compressor housing is at least one compression stage to increase the pressure of the fluid within the housing. The compression stage has a quantity of magnetic powder within the housing, is supported by a screen that allows passage of the fluid, and a coil for selectively providing a magnetic field across the magnetic powder such that when the magnetic field is not present the individual particles of the powder are separated allowing the fluid to flow through the powder and when the magnetic field is present the individual particles of the powder pack together causing the powder mass to expand preventing the fluid from flowing through the powder and causing a pressure pulse to compress the fluid.
    Type: Grant
    Filed: March 2, 1993
    Date of Patent: January 4, 1994
    Assignee: The United States of America as represented by the Administrator of the National Aeronautics and Space Administration
    Inventor: Max G. Gasser
  • Patent number: 5269811
    Abstract: A primary fluid actuated, secondary fluid propelling system, suitable for use, for example, as an implantable, artificial heart device, comprises a unidirectional pump for pumping electrorheological fluid, two return loops connected to the pump, and for each return loop, two electrorheological valves therein in series flow, and a primary fluid actuated, secondary fluid propelling device connected to that loop at a position between the two electrorheologocal valves therein. The primary fluid actuated, secondary fluid propelling devices may comprise a casing having the interior thereof divided by a pressure transmitting flexible diaphragm into a first cavity for receiving electrorheological fluid from that return loop, and a second cavity for propelling the secondary fluid. The electrorheological valves are actuated to pressurize one first cavity while emptying the other and vice versa.
    Type: Grant
    Filed: July 25, 1991
    Date of Patent: December 14, 1993
    Assignee: National Research Council of Canada
    Inventors: William F. Hayes, John W. Tanney, deceased
  • Patent number: 5256036
    Abstract: There is disclosed an apparatus and method for pumping a flowable medium. The pump forces a volume of medium out a pumping chamber by driving an induced plasma arc the length of the pumping chamber from inlet to outlet. An electric potential generated across the medium within the pumping chamber creates the plasma arc near the inlet of the chamber. An induced magnetic field then causes the plasma arc to travel from inlet to outlet thereby forcing the medium ahead of the plasma arc out of the chamber.
    Type: Grant
    Filed: April 11, 1991
    Date of Patent: October 26, 1993
    Assignee: Southwest Research Institute
    Inventor: James J. Cole
  • Patent number: 5240381
    Abstract: An exhaust apparatus and a high vacuum pumping unit including such high vacuum device and an auxiliary vacuum pump are disclosed, wherein a high vacuum is achieved in a vacuum vessel such that the gas molecules within the vacuum vessel are ionized and accelerated to be exhausted and, further, in the high vacuum pumping unit, those gas molecules diffused back or desorbed from the vacuum pump are ionized and accelerated to be returned to the vacuum pump.
    Type: Grant
    Filed: February 12, 1992
    Date of Patent: August 31, 1993
    Assignee: Ebara Corporation
    Inventors: Kazutoshi Nagai, Tohru Satake, Hideaki Hayashi, Takanari Yasui
  • Patent number: 5228837
    Abstract: A high-pressure pump for electro-rheological fluids in which the pump coments operate with relatively large clearances and rely on the electro-rheological fluid effect for sealing. Preferably, the electro-rheological effect is induced in the fluid only in the region where a seal between relatively merging pump parts is required to generate a fluid pressure increase.
    Type: Grant
    Filed: September 30, 1992
    Date of Patent: July 20, 1993
    Assignee: The United States of America as represented by the Secretary of the Navy
    Inventors: Mark E. Shiffler, Luke W. Loy
  • Patent number: 5191980
    Abstract: A protective vessel is provided for a getter material which comprises a first sheet of thermally stable material attached to an adhesive, which in turn is attached to a second sheet of thermo-retractable organic plastic material, the first and second sheets enclosing the getter material.
    Type: Grant
    Filed: March 20, 1992
    Date of Patent: March 9, 1993
    Assignee: SAES Getters SpA
    Inventors: Claudio Boffito, Giuliano Fenati
  • Patent number: 5180288
    Abstract: An electrostatic pump includes two electrodes, which are spaced apart essentially in the pump flow direction and which are adapted to have applied thereto a potential for injecting an ion current flowing between the two electrodes. For further microminiaturization of the pump, the pump includes two semiconductor components, which are arranged one on top of the other in the pump flow direction and which are so structured that the electrodes form an integral constituent part of the semiconductor components.
    Type: Grant
    Filed: October 29, 1991
    Date of Patent: January 19, 1993
    Assignee: Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
    Inventors: Axel Richter, Herrmann Sandmeier
  • Patent number: 5118261
    Abstract: An air conditioning method and apparatus for electrochemically regulating a humidity and an oxygen-concentration within a case by the use of an ion exchanger polymer electrolyte. Where the humidity and the oxygen-concentration within the case are reduced, a cell comprising an anode, a cathode and an anion exchanger polymer electrolyte sandwiched between both the electrodes is arranged so that a surface of the anode is in contact with an atmospheric air outside the case and a surface of the cathode is in contact with an ambient atmosphere inside the case and DC voltage is applied between both the electrodes. On the other hand, where the humidity and the oxygen-concentration within the case are increased, the cell having the similar construction is arranged so that the surface of the anode is in contact with the ambient atmosphere inside the case and the surface of the cathode is in contact with the atmospheric air outside the case and DC voltage is applied between both the electrodes.
    Type: Grant
    Filed: November 16, 1990
    Date of Patent: June 2, 1992
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Shiro Yamauchi, Takeaki Hanada
  • Patent number: 5080559
    Abstract: An electrical pump for pumping liquid metals to high pressures in high temperature environments without the use of magnets or moving mechanical parts. The pump employs a non-porous solid electrolyte membrane, typically ceramic, specific to the liquid metal to be pumped. A DC voltage is applied across the thickness of the membrane causing ions to form and enter the membrane on the electrically positive surface, with the ions being neutralized on the opposite surface. This action provides pumping of the liquid metal from one side of the non-porous solid electrolyte membrane to the other.
    Type: Grant
    Filed: January 23, 1990
    Date of Patent: January 14, 1992
    Assignee: The United States of America as represented by the United States Department of Energy
    Inventors: Joseph P. Abbin, Charles E. Andraka, Laurance L. Lukens, James B. Moreno
  • Patent number: 5024060
    Abstract: A Joule-Thomson refrigeration cycle is disclosed having an electrochemical compressor with a solid polymer electrolyte membrane. The cycle includes a reversible drive power source for pumping working fluid in opposite directions through the compressor, thereby insuring that the membrane is continuously hydrated.
    Type: Grant
    Filed: June 27, 1990
    Date of Patent: June 18, 1991
    Assignee: United Technologies Corporation
    Inventor: Raymond B. Trusch
  • Patent number: 5006761
    Abstract: An arrangement for transporting air with the aid of an electric ion wind comprises a corona electrode (K) and a target electrode (M) located downstream of the corona electrode. A d.c. voltage source (3) has its terminals connected to the corona electrode and the target electrode, respectively, so that a corona discharge is generated at the corona electrode. The corona electrode (K) includes one or more wirelike electrode elements (4) located adjacent the symmetry axis of the air-flow path (1) and having, as seen in a direction perpendicular to the symmetry axis, an extension which is substantially much smaller than the cross dimension of the airflow path. The wirelike electrode elements (4) lack free, unattached ends at which the field strength exceeds the field strength at the peripheral surface of the electrode elements, thereby avoiding punctiform corona-discharge concentrations and confining the corona discharge to the peripheral surface of the electrode elements.
    Type: Grant
    Filed: May 27, 1988
    Date of Patent: April 9, 1991
    Assignee: Astra-Vent AB
    Inventors: Vilmos Torok, Andrzej Loreth
  • Patent number: 4967119
    Abstract: An arrangement for transporting air with the aid of so-called ion-wind which includes at least one corona electrode and at least one target electrode is shown and described. The corona electrode is a thin wire electrode passing from one side of a duct to another, and the target electrode has a shape such that the distance between the corona electrode and the target electrode is less in the region of the corona electrode ends than in the corona electrode middle. This placement of the electrodes closer together at the ends of the wire electrode provides a uniform corona current over the whole length of the elongated corona electrode which provides the most uniform air flow over the entire cross-sectional area of the duct in which the electrodes are mounted.
    Type: Grant
    Filed: May 27, 1988
    Date of Patent: October 30, 1990
    Assignee: Astra-Vent AB
    Inventors: Vilmos Torok, Andrzej Loreth
  • Patent number: 4961040
    Abstract: An evaporable getter device for mounting in an electron tube is provided which comprises a pan-shaped container having a vertical side wall formed around the perimeter of a disc shaped bottom wall and a pulverized getter metal vapor releasing material pressed into the space formed by said side wall and said bottom wall.There is also provided a first heat transfer retarding means which delays the transfer of heat in a circumferential direction through the getter metal vapor releasing material. There is also provided a second heat transfer retarding means which delays the transfer of heat in a radial direction through the getter vapor releasing material. When the getter device is heated by currents induced from a radio frequency field created by a coil positioned outside the tube, opposite the getter device, high yields of getter metal are released in a short time without detachment of the getter material residues from the container.
    Type: Grant
    Filed: April 14, 1989
    Date of Patent: October 2, 1990
    Assignee: SAES Getters SpA
    Inventors: Paolo della Porta, Daniele Martelli, Giuseppe Urso, Stefano Trivellato
  • Patent number: 4938667
    Abstract: A method is described for the manufacture of a vacuum insulating structure intended mainly, but not exclusively, for use in such domestic appliances as refrigerators or freezers as well as for vehicle walls including aeroplanes and in buildings. A hollow plastic or metal panel is purged to atmospheric air by means of a getterable gas. Vacuum is produced by removing the purge gas and the vacuum is subsequently maintained by contacting the residual gas with a getter material. A vacuum insulating structure thus manufactured is also described.
    Type: Grant
    Filed: June 28, 1989
    Date of Patent: July 3, 1990
    Assignee: SAES Getters SpA
    Inventor: Paolo della Porta
  • Patent number: 4907948
    Abstract: The scope of the present invention is the provision of a non-evaporable gettering ternary alloy particularly for the sorption of water and water vapor in nuclear reactor fuel elements.
    Type: Grant
    Filed: May 20, 1982
    Date of Patent: March 13, 1990
    Assignee: SAES Getters S.p.A.
    Inventors: Aldo Barosi, Claudio Boffito
  • Patent number: 4862708
    Abstract: A thermal engine is disclosed which is operable as a heat pump, refrigerator, or air conditioner. Vaporized working fluid from a first evaporator, which extracts heat from elements desired to be cooled, is fed to a first region of an osmotic pump which also has a second region containing a solution of the working fluid and a preselected solute, the second region being separated from the first region by a membrane permeable to the vaporized working fluid but not to the solute. A second evaporator, which may be driven by waste heat, is operatively coupled to the second region of the osmotic pump by means of a counterflow heat exchanger having a first path for conveying relatively dilute solution from the second region of the osmotic pump to the second evaporator and a second path for conveying relatively concentrated solution from the second evaporator to the second region of the osmotic pump.
    Type: Grant
    Filed: May 10, 1988
    Date of Patent: September 5, 1989
    Assignee: Hughes Aircraft Company
    Inventor: Algerd Basiulis
  • Patent number: 4835441
    Abstract: A heatable sorption getter body for reactive residual gas clean-up in sealed vessels is provided. The getter body includes an insulating member, two electrical contacts, and a getter composition applied over surface portions of the insulating member. The insulating member serves as a carrier for the getter composition. The getter precursor composition is applied preliminarily after which the resulting dried assembly is subjected to sintering to complete preparation of the getter composition before the getter body is positioned in a sealed vessel.
    Type: Grant
    Filed: December 2, 1987
    Date of Patent: May 30, 1989
    Assignee: Standard Elektrik Lorenz Aktiengesellschaft
    Inventors: Heinrich Feller, Peter Mammach, Manfred Kobale