Vapor Deposition Patents (Class 427/109)
  • Patent number: 10131991
    Abstract: A method of preparing light transmitting conducting metal oxide (TCO) films using atomic layer deposition (ALD) of a metal precursor multiple oxidizing reactants. The multiple metal oxidizing reactants may be selected to enhance growth of the TCO film. In a particular embodiment, an indium oxide TCO film is prepared using a cyclopentadienyl indium precursor and a combination of water and oxygen.
    Type: Grant
    Filed: September 30, 2010
    Date of Patent: November 20, 2018
    Assignee: UChicago Argonne, LLC
    Inventors: Jeffrey W. Elam, Joseph A. Libera
  • Patent number: 9981872
    Abstract: A single layered smart window may include a substrate; and a single layered coating formed on the substrate, wherein the coating includes a composite of a vanadium oxide and a low reflective material. The single layered smart window has high visible light transmittance and is capable of blocking infrared ray as a temperature is increased.
    Type: Grant
    Filed: December 5, 2016
    Date of Patent: May 29, 2018
    Assignee: AJOU UNIVERSITY INDUSTRY-ACADEMIC COOPERATION FOUNDATION
    Inventors: Kyung Hyun Ko, Jun Oh Choi
  • Patent number: 9751254
    Abstract: Apparatus for coating a substrate with a material in a chamber subject, during use, to substantial evacuation, which includes a coating station within the chamber for coating a substrate by sputtering and/or by evaporation; at least one treating station disposed in serial with the coating station and equipped with a plasma treater incorporating a plasma generator in sufficient proximity to the substrate to treat the substrate; a magnetic device for generating a magnetic field; at least one cylindrical electrode surrounding the magnetic device, the plasma treater incorporates a device for rotating the electrode about its longitudinal axis.
    Type: Grant
    Filed: October 1, 2012
    Date of Patent: September 5, 2017
    Assignee: BOBST MANCHESTER LTD
    Inventors: Gary Barlow, Nicholas Copeland
  • Patent number: 9537030
    Abstract: Methods of fabricating solar cells with tunnel dielectric layers are described. Solar cells with tunnel dielectric layers are also described.
    Type: Grant
    Filed: May 29, 2015
    Date of Patent: January 3, 2017
    Assignee: SunPower Corporation
    Inventors: Tim Dennis, Scott Harrington, Jane Manning, David D. Smith, Ann Waldhauer
  • Publication number: 20140326697
    Abstract: A method for the production of a transparent conductor deposit on a substrate, the method comprising: providing a substrate formed from a first material; depositing a film of a second material on the substrate; causing the film to crack so as to provide a plurality of recesses; depositing a conductive material in the recesses; and removing the film from the substrate so as to yield a transparent conductive deposit on the substrate.
    Type: Application
    Filed: May 5, 2014
    Publication date: November 6, 2014
    Applicant: NanoLab, Inc.
    Inventors: David Carnahan, Krzysztof Kempa, Nolan Nicholas
  • Publication number: 20140313562
    Abstract: A hybrid transparent conductive film, and methods for fabricating such hybrid transparent conductive films, involving the assembly of two-dimensional graphene-based materials with one-dimensional silver and/or copper nanowires with high optical transmittance and good electrical conductivity. The hybrid films are characterized by a good degree of control of the architecture at the nanoscale level, where the weakness(es) of each component are offset by the strengths of the other components. By rational design of the structure and using simple and locate-cost fabrication methods, hybrid films with sheet resistance of 26 ohm/sq and optical transmittance (at ?=550 nm) of 83% for reduced graphene oxide/silver nanowire films, and 64 ohm/sq and optical transmittance of 93.6% for monolayer graphene/silver nanowire films have been fabricated. These values are comparable to transparent conductive films based on indium tin oxide but are now able to be used in flexible electronics due to their good mechanical properties.
    Type: Application
    Filed: April 10, 2014
    Publication date: October 23, 2014
    Applicant: Board of Regents, The University of Texas System
    Inventors: Rodney S. Ruoff, Iskandar Kholmanov
  • Patent number: 8859104
    Abstract: The invention provides a transparent conducting film which comprises a compound of formula (I): Zn1-x[M]xO1-y[X]y(I) wherein: x is greater than 0 and less than or equal to 0.25; y is from 0 to 0.1; [X] is at least one dopant element which is a halogen; and [M] is: (a) a dopant element which is selected from: a group 14 element other than carbon; a lanthanide element which has an oxidation state of +4; and a transition metal which has an oxidation state of +4 and which is other than Ti or Zr; or (b) a combination of two or more different dopant elements, at least one of which is selected from: a group 14 element other than carbon; a lanthanide element which has an oxidation state of +4; and a transition metal which has an oxidation state of +4 and which is other than Ti or Zr. The invention further provides coatings comprising the films of the invention, processes for producing such films and coatings, and various uses of the films and coatings.
    Type: Grant
    Filed: February 26, 2009
    Date of Patent: October 14, 2014
    Assignee: ISIS Innovation Limited
    Inventors: Peter P. Edwards, Martin Owen Jones, Malek Moshari Al-Mamouri, John Stuart Abell
  • Publication number: 20140285866
    Abstract: Embodiments of the invention generally provide electrochromic devices and materials and processes for forming such electrochromic devices and materials. In one embodiment, an electrochromic device contains a lower transparent conductor layer disposed on a substrate, wherein an upper surface of the lower transparent conductor layer has a surface roughness of greater than 50 nm and a primary electrochromic layer having planarizing properties is disposed on the lower transparent conductor layer. The upper surface of the primary electrochromic layer has a surface roughness less than the surface roughness of upper surface of the lower transparent conductor layer, such as about 50 nm or less.
    Type: Application
    Filed: June 3, 2014
    Publication date: September 25, 2014
    Inventor: Paul Phong NGUYEN
  • Publication number: 20130077036
    Abstract: A method is provided for improving metallic nanostructure stability. The method provides a substrate, and using a physical vapor deposition (PVD) process for example, deposits metallic nanostructures having a first diameter overlying the substrate. Some examples of metallic nanostructures include Ag, Au, and Al. The metallic nanostructures are annealed in an atmosphere including an inert gas and H2. The annealing temperature is less than the melting temperature the metal material in bulk form. In response to the annealing, stabilized metallic nanostructures are formed. If the stabilized metallic nanostructures are exposed to an ambient air environment the stabilized metallic nanostructure maintain the first diameter. Typically, the metallic nanostructures are initially formed having a rectangular shape with corners. After annealing, the stabilized metallic nanostructures have a dome shape.
    Type: Application
    Filed: March 29, 2012
    Publication date: March 28, 2013
    Inventors: Akinori Hashimura, Liang Tang, David R. Evans
  • Publication number: 20130050639
    Abstract: An ophthalmic lens including an electro-active optical element including a substrate; a liquid crystalline material; and at least one first layer. The at least one first layer can include a layer of silicon oxide (SiOx) disposed between the liquid crystalline material and the substrate, and deposited onto a surface of the substrate at an oblique angle in reference to a plane normal to the mean surface of the substrate facing the liquid crystalline material.
    Type: Application
    Filed: August 20, 2012
    Publication date: February 28, 2013
    Applicant: PixelOptics, Inc.
    Inventors: Anita Trajkovska, Joshua N. Haddock, Ronald Blum, Amitava Gupta, Marko Theodoor Blom, Peter Tijssen
  • Publication number: 20130025672
    Abstract: A transparent glass substrate, associated with a transparent electrically conductive layer capable of constituting an electrode of a photovoltaic module, and composed of a doped oxide, characterized by the interposition, between the glass substrate and the transparent electrically conductive layer, of a layer of one or more first nitride(s) or oxynitride(s), or oxide(s) or oxycarbide(s) having good adhesive properties with the glass, then of a mixed layer of one or more second nitride(s) or oxynitride(s), or oxide(s) or oxycarbide(s) having good adhesive properties with the glass, and of one or more third nitride(s) or oxynitride(s), or oxide(s) or oxycarbide(s) capable of constituting, optionally in the doped state, a transparent electrically conductive layer.
    Type: Application
    Filed: February 4, 2011
    Publication date: January 31, 2013
    Applicant: SAINT-GOBAIN GLASS FRANCE
    Inventors: Stéphane Auvray, Clément Briquet, Bertrand Kuhn
  • Patent number: 8309165
    Abstract: The present invention discloses a color filter by copper and silver film, comprising: a lower copper layer; a lower silver layer formed on the lower copper layer; a medium formed on the lower silver layer; an upper copper layer formed on the medium; and an upper silver layer formed on the upper copper layer.
    Type: Grant
    Filed: December 15, 2011
    Date of Patent: November 13, 2012
    Assignee: Pixart Imaging Inc.
    Inventors: Sen-Huang Huang, Chin-Poh Pang, Hsin-Hui Hsu
  • Publication number: 20120269960
    Abstract: A manufacturing method of a conductive laminated film suppressing a wrinkle has a metal layer forming step in which a conductive metal layer is continuously formed on a surface of a long transparent conductive film where a transparent conductive layer is formed while the transparent conductive film, including a long transparent film base containing a polyester resin as a constituting material and the transparent conductive layer formed thereon, is transported. The metal layer forming step is performed under a reduced pressure atmosphere of 1 Pa or less. The long transparent conductive film is continuously transported by application of a transport tensile force, and the conductive metal layer is continuously deposited on the surface where the transparent conductive layer is formed in a state in which a surface where the transparent conductive layer is not formed contacts the surface of a film-forming roll.
    Type: Application
    Filed: April 19, 2012
    Publication date: October 25, 2012
    Applicant: NITTO DENKO CORPORATION
    Inventors: Nozomi Fujino, Kuniaki Ishibashi, Yoshimasa Sakata
  • Patent number: 8263174
    Abstract: Disclosed is a light emitting device manufacturing apparatus including a plurality of processing chambers for performing a substrate processing for forming, on a target substrate, a light emitting device having multiple layers including an organic layer, wherein each of the plurality of processing chambers is configured to perform a substrate process on the target substrate while maintaining the target substrate such that its device forming surface, on which the light emitting device is to be formed, is oriented toward a direction opposite to a direction of gravity.
    Type: Grant
    Filed: June 13, 2007
    Date of Patent: September 11, 2012
    Assignees: Tokyo Electron Limited, National University Corporation Tohoku University
    Inventors: Yasushi Yagi, Shingo Watanabe, Toshihisa Nozawa, Chuichi Kawamura, Kimihiko Yoshino, Tadahiro Ohmi
  • Publication number: 20120196053
    Abstract: Creating an electrically conductive transparent structure. Liquid droplets comprising electrically conductive nanomaterial are deposited randomly onto a surface of a supporting substrate at a desired density to form an electrically conductive transparent network wherein the droplets are released from an applicator. A rate of drying of the liquid is controlled such that the liquid is able to evaporate without substantially damaging the supporting substrate.
    Type: Application
    Filed: January 28, 2011
    Publication date: August 2, 2012
    Inventors: Richard COULL, Vittorio Scardaci, Kevin Dooley
  • Patent number: 8197914
    Abstract: The present invention discloses plasma enhanced chemical vapor deposition (PECVD) process for depositing n-type and p-type zinc oxide-based transparent conducting oxides (TCOs) at low temperatures with excellent optical and electrical properties on glass and temperature sensitive materials such as plastics and polymers. Specifically, it discloses PECVD process for depositing n-type ZnO by doping it with B or F and p-type ZnO by doping it with nitrogen excellent optical and electrical properties on glass and temperature sensitive materials such as plastics and polymers for TCO application. The process utilizes a mixture of volatile zinc compound, argon and/or helium as a diluent gas, carbon dioxide as an oxidant, and a dopant or reactant to deposit the desired ZnO-based TCOs.
    Type: Grant
    Filed: November 21, 2005
    Date of Patent: June 12, 2012
    Assignee: Air Products and Chemicals, Inc.
    Inventors: Diwakar Garg, Philip Bruce Henderson, Daniel Joseph Tempel, Thomas N. Jackson, Jie Sun
  • Publication number: 20120127578
    Abstract: Antireflective transparent EMI shielding optical filters are provided that can be laminated to optical display devices using optically clear adhesives. The provided filters include electrically-conductive metal or metal alloy layers that can be continuous and patterned or unpatterned. Also included are methods of making the provided filters and touch sensors made using the provided filters.
    Type: Application
    Filed: July 26, 2010
    Publication date: May 24, 2012
    Inventors: Clark I. Bright, Robert C. Fitzer, John D. Le
  • Publication number: 20120107491
    Abstract: Thin films containing a transparent conducting oxide and a high permittivity material are disclosed. Exemplary thin films may exhibit increased transmission in the visible-to-near infrared (vis-NIR) spectrum without a decrease in electrical conductivity compared to the thin film without the high permittivity material. Methods for making thin films having enhanced optical properties without substantially decreased electrical quality are also disclosed.
    Type: Application
    Filed: January 5, 2012
    Publication date: May 3, 2012
    Applicant: ALLIANCE FOR SUSTAINABLE ENERGY, LLC
    Inventors: Xiaonan Li, James Burst, Timothy A. Gessert
  • Patent number: 8067702
    Abstract: The production process of an electromagnetic wave shielding material of the present invention comprises screen printing a conductive paste containing conductive particles, binder and solvent in a geometrical pattern on the surface of a transparent porous layer of a transparent resin substrate provided with the transparent porous layer, the porous layer containing as a main component thereof at least one type selected from the group consisting of an oxide ceramic, a non-oxide ceramic and a metal, followed by forming a conductive portion in a geometrical pattern on the surface of the transparent porous layer by heat treatment. An electromagnetic wave shielding material produced according to this production process has high electromagnetic wave shielding effects and superior transparency and visibility.
    Type: Grant
    Filed: May 26, 2006
    Date of Patent: November 29, 2011
    Assignees: Gunze Limited, DIC Corporation
    Inventors: Wataru Suenaga, Atsushi Okada, Kohtaro Tanimura
  • Patent number: 8063553
    Abstract: To reduce brightness variation by wiring resistance of an upper part transparent electrode in an organic luminescence element, a stripe-shape first auxiliary wiring 11 extending in a direction parallel to a signal line is formed on the upper part transparent electrode, by a precise mask vapor deposition method. Then, a stripe-shape second auxiliary wiring 12 extending in a direction parallel to a scanning line is formed by a precise mask vapor deposition method.
    Type: Grant
    Filed: March 4, 2008
    Date of Patent: November 22, 2011
    Assignee: Hitachi Displays, Ltd.
    Inventors: Shingo Ishihara, Eiji Matsuzaki, Hiroshi Kageyama
  • Publication number: 20110262628
    Abstract: Disclosed are an inline chemical vapor deposition method and system for fabricating a device. The method includes transporting a web or discrete substrate through a deposition chamber having a plurality of deposition modules. A buffer layer, a window layer and a transparent conductive layer are deposited onto the substrate during passage through a first deposition module, a second deposition module and a third deposition module, respectively. Advantageously, the steps for generating the buffer layer, window layer and transparent conductive layer are performed sequentially in a common vacuum environment of a single deposition chamber and the use of a conventional chemical bath deposition process to deposit the buffer layer is eliminated. The method is suitable for the manufacture of different types of devices including various types of solar cells such as copper indium gallium diselenide solar cells.
    Type: Application
    Filed: June 9, 2011
    Publication date: October 27, 2011
    Applicant: AVENTA TECHNOLOGIES LLC
    Inventors: Piero Sferlazzo, Thomas Michael Lampros
  • Patent number: 7867636
    Abstract: A ZnO-based transparent conductive film is produced by growing ZnO doped with a group III element oxide on a substrate and has a region with a crystal structure in which a c-axis grows along a plurality of different directions. The transparent conductive film produced by growing ZnO doped with a group III element oxide on a substrate has a ZnO (002) rocking curve full width at half maximum of about 13.5° or more. ZnO is doped with a group III element oxide so that the ratio of the group III element oxide in the transparent conductive film is about 7% to about 40% by weight. The transparent conductive film is formed on the substrate with a SiNx thin film provided therebetween. The transparent conductive film is formed on the substrate by a thin film formation method with a bias voltage applied to the substrate.
    Type: Grant
    Filed: November 22, 2006
    Date of Patent: January 11, 2011
    Assignee: Murata Manufacturing Co., Ltd.
    Inventors: Osamu Nakagawara, Hiroyuki Seto, Yutaka Kishimoto
  • Publication number: 20100225882
    Abstract: A process for producing an optical article having an antireflection layer formed directly or via another layer on an optical base material, includes: forming a primary layer contained in the antireflection layer; and forming a light transmissive conductive layer containing a metal containing germanium as a main component and/or a compound of germanium and a transition metal on a surface of the primary layer.
    Type: Application
    Filed: February 23, 2010
    Publication date: September 9, 2010
    Applicant: SEIKO EPSON CORPORATION
    Inventors: Keiji NISHIMOTO, Takashi NOGUCHI, Hiroyuki SEKI
  • Publication number: 20100206628
    Abstract: The present invention aims to provide a transparent electromagnetic wave shield member, which is free from a moirè phenomenon which could not be solved by the prior art, and in which an excellent electromagnetic wave shielding properties and a sufficient total light transmittance based on an appropriate network structure are compatible, and a method for manufacturing the same. The transparent electromagnetic wave shield member of the present invention is a transparent electromagnetic wave shield member in which a metal layer of an electroconductive metal network structure having a geometrical shape is formed on a transparent substrate, and which is characterized in that a spacing of said network structure is 200 ?m or less, an opening ratio of the network structure is 84% or more, and in addition, a thickness of the electroconductive metal layer is 2 ?m or less.
    Type: Application
    Filed: September 4, 2007
    Publication date: August 19, 2010
    Applicant: TORAY INDUSTRIES, INC.
    Inventors: Yoshitaka Matsui, Masaaki Kotoura, Osamu Watanabe, Tadashi Yoshioka, Keitaro Sakamoto
  • Publication number: 20100189883
    Abstract: A continuous process whereby carbon nanotubes, usually in the form of an aerogel are harvested from a high temperature reactor by means of an adhesive substrate that is passed across an outlet port at a predetermined rate whereby the carbon nanotube aerogel is fixed and transported away from the reactor and associated apparatus for suitable storage.
    Type: Application
    Filed: April 28, 2008
    Publication date: July 29, 2010
    Inventor: Martin Pick
  • Patent number: 7740901
    Abstract: An atmospheric chemical vapor deposition method of making a zinc oxide coated glass article, made by directing one or more streams of gaseous reactants, specifically a zinc containing compound, and an oxygen containing compound, onto a surface of a transparent substrate material heated to a temperature of 400° C. or less.
    Type: Grant
    Filed: May 3, 2007
    Date of Patent: June 22, 2010
    Assignees: Pilkington Group Limited, Arkema, Inc.
    Inventors: Michael B. Abrams, Roman Y. Korotkov, Gary S. Silverman, Ryan C. Smith, Jeffery L. Stricker
  • Publication number: 20100045610
    Abstract: A transparent conductive film comprised of a carbon nanotube network and indium tin oxide composite and a method for manufacturing the transparent conductive film are provided.
    Type: Application
    Filed: August 20, 2008
    Publication date: February 25, 2010
    Applicant: SNU R&DB FOUNDATION
    Inventors: Seunghun Hong, Moon Gyu Sung
  • Publication number: 20100018765
    Abstract: The production process of an electromagnetic wave shielding material of the present invention comprises screen printing a conductive paste containing conductive particles, binder and solvent in a geometrical pattern on the surface of a transparent porous layer of a transparent resin substrate provided with the transparent porous layer, the porous layer containing as a main component thereof at least one type selected from the group consisting of an oxide ceramic, a non-oxide ceramic and a metal, followed by forming a conductive portion in a geometrical pattern on the surface of the transparent porous layer by heat treatment. An electromagnetic wave shielding material produced according to this production process has high electromagnetic wave shielding effects and superior transparency and visibility.
    Type: Application
    Filed: May 26, 2006
    Publication date: January 28, 2010
    Applicant: Dainippon Ink and Chemicals ,Inc.
    Inventors: Wataru Suenaga, Atsushi Okada, Kohtaro Tanimura
  • Publication number: 20090323157
    Abstract: An electrically controllable/electrochemical device, having variable optical and/or energy properties, including at least one carrier substrate including a first electronically conductive layer, a first electrochemically active layer capable of reversibly inserting ions such as cations, H+, or Li+, or anions, OH?, or anions made of an anodic (or respectively cathodic) electrochromic material, an electrolyte layer, a second electrochemically active layer capable of reversibly inserting the ions, or made of a cathodic (or respectively anodic) electrochromic material, and a second electronically conductive layer. At least one of the electrochemically active layers capable of reversibly inserting the ions, or made of an anodic or cathodic electrochromic material, has a sufficient thickness to allow all the ions to be inserted without electrochemically disfunctioning the active layers.
    Type: Application
    Filed: July 26, 2007
    Publication date: December 31, 2009
    Applicant: Saint-Gobain Glass France
    Inventors: Emmanuel Valentin, Samuel Dubrenat
  • Patent number: 7608294
    Abstract: The present invention provides a transparent substrate with a transparent conductive film that is thin but has a surface with concavities and convexities of increased height. A manufacturing method of the present invention includes a process of forming a transparent conductive film containing crystalline metal oxide as its main component on a transparent substrate by a pyrolytic oxidation method. In the method, a gaseous material containing a metal compound, an oxidizing material, and hydrogen chloride is supplied onto the transparent substrate. The process includes sequentially: a first step in which a mole ratio of the hydrogen chloride to the metal compound in the gaseous material is 0.5 to 5; and a second step in which the mole ratio is 2 to 10 and is higher than the mole ratio to be employed in the first step.
    Type: Grant
    Filed: November 18, 2004
    Date of Patent: October 27, 2009
    Assignee: Nippon Sheet Glass Company, Limited
    Inventors: Yasunori Seto, Hidemasa Yoshida, Akira Fujisawa, Yukio Sueyoshi
  • Publication number: 20090229667
    Abstract: A translucent solar cell has a transparent substrate and a first translucent electrode that is in anode. A transparent active layer, that is a substantially organic material layer, is formed on top of the anode. On top of the active layer, a second translucent electrode is formed. The second translucent electrode is the cathode. In a variation, the first translucent electrode is the cathode and the second translucent electrode the anode. The flexibility in choosing the order of the anode and cathode relative to the transparent substrate allows for an increase in processing techniques and, thus, the amount of utilizable materials to increase the power conversion efficiency of translucent solar cells.
    Type: Application
    Filed: March 14, 2008
    Publication date: September 17, 2009
    Applicant: SOLARMER ENERGY, INC.
    Inventors: Vishal Shrotriya, Gang Li
  • Publication number: 20090022886
    Abstract: A method and product produced by the method for forming an interactive information device with a conductively coated panel includes forming a reduced contrast, increased light transmitting, conductively coated panel by providing a transparent substrate and applying a transparent, conductive layer on at least one surface of the substrate in a predetermined pattern with at least one area having a conductive layer thereon and a second area without a conductive layer. The method further includes applying a transparent layer of a metal oxide such that the metal oxide layer, such as silicon dioxide, overlies both areas whereby visible contrast between the areas is reduced and light transmission through the coated panel is increased. The coated panel is then attached to an electro-optic display for displaying information when electricity is applied thereto.
    Type: Application
    Filed: August 28, 2008
    Publication date: January 22, 2009
    Applicant: DONNELLY CORPORATION
    Inventors: Eugene Halsey, IV, Catherine A. Getz
  • Publication number: 20080286448
    Abstract: A method and system for preparing a light transmitting and electrically conductive oxide film. The method and system includes providing an atomic layer deposition system, providing a first precursor selected from the group of cyclopentadienyl indium, tetrakis (dimethylamino) tin and mixtures thereof, inputting to the deposition system the first precursor for reaction for a first selected time, providing a purge gas for a selected time, providing a second precursor comprised of an oxidizer, and optionally inputting a second precursor into the deposition system for reaction and alternating for a predetermined number of cycles each of the first precursor, the purge gas and the second precursor to produce the oxide film.
    Type: Application
    Filed: May 16, 2007
    Publication date: November 20, 2008
    Inventors: Jeffrey W. Elam, Alex B.F. Martinson, Michael J. Pellin, Joseph T. Hupp
  • Publication number: 20080063793
    Abstract: An atmospheric chemical vapor deposition method of making a zinc oxide coated glass article, made by directing one or more streams of gaseous reactants, specifically a zinc containing compound, and an oxygen containing compound, onto a surface of a transparent substrate material heated to a temperature of 400° C. or less.
    Type: Application
    Filed: May 3, 2007
    Publication date: March 13, 2008
    Inventors: Michael B. Abrams, Roman Y. Korotkov, Gary S. Silverman, Ryan C. Smith, Jeffery L. Stricker
  • Publication number: 20080050595
    Abstract: A ZnO-based transparent conductive film has practicable moisture resistance, desired characteristics of a transparent conductive film, and excellent economy. The transparent conductive film is produced by growing ZnO doped with a group III element oxide on a substrate and has a region with a crystal structure in which a c-axis grows along a plurality of different directions. The transparent conductive film produced by growing ZnO doped with a group III element oxide on a substrate has a ZnO (002) rocking curve full width at half maximum of about 13.5° or more. ZnO is doped with a group III element oxide so that the ratio of the group III element oxide in the transparent conductive film is about 7% to about 40% by weight. The transparent conductive film is formed on the substrate with a SiNx thin film provided therebetween. The transparent conductive film is formed on the substrate by a thin film formation method with a bias voltage applied to the substrate.
    Type: Application
    Filed: November 22, 2006
    Publication date: February 28, 2008
    Applicant: MURATA MANUFACTURING CO., LTD.
    Inventors: Osamu NAKAGAWARA, Hiroyuki SETO, Yutaka KISHIMOTO
  • Patent number: 7179508
    Abstract: Conducting polymers having improved optical properties, and a method of manufacturing the conducting polymers, are disclosed. The conducting polymers are prepared by a process wherein organic ions and neutral oligomers are deposited simultaneously on a substrate surface to provide a conducting polymer film.
    Type: Grant
    Filed: May 17, 2004
    Date of Patent: February 20, 2007
    Assignee: The Board of Trustees of the University of Illinois
    Inventors: Luke Hanley, Sanja Tepavcevic, Yongsoo Choi
  • Patent number: 6933013
    Abstract: In order to allow application of any coating under a vacuum over a volatile gelatinous layer, such as polymer dispersed liquid crystal (PDLC) on an optical glass substrate with a transparent electrode, such as indium tin oxide (ITO) on its surface, a layer of an intermediate stress absorbing polymeric material is first applied to cover the volatile gelatinous layer to prevent evaporation and escape of volatiles, thereafter the coating is applied under a very high vacuum using for example a technique called Physical Vapor Deposition (PVD) or sputtering.
    Type: Grant
    Filed: October 14, 2003
    Date of Patent: August 23, 2005
    Assignee: Photon Dynamics, Inc.
    Inventors: Rajiv Pethe, Pramod Gupta, Xianhai Chen, Alexander Nagy
  • Patent number: 6902642
    Abstract: Using a hydraulic transfer film wherein a transfer layer is composed of a decorative layer made of a printing ink coating film or a paint coating film, the transfer layer is hydraulically transferred onto a target body for transfer made of a metal substrate having a cured coating film layer in which a xylene absorption amount is within a range from 3.5 to 100 g/m2. Alternatively, using a hydraulic transfer film wherein a transfer layer has a protective layer made of a radiation-curable resin or a thermosetting resin, the transfer layer is hydraulically transferred onto a target body for transfer made of a metal substrate having a cured coating film layer in which a xylene absorption amount is within a range from 10 to 100 g/m2.
    Type: Grant
    Filed: October 24, 2002
    Date of Patent: June 7, 2005
    Assignees: Dainippon Ink and Chemicals, Inc., Nippon Decor, Inc.
    Inventors: Yukihiko Kawaharada, Akihiro Sawaguchi, Mitsutaka Nanbo, Hiroyuki Tabe, Shinji Kato, Shuzo Mizuno
  • Patent number: 6855369
    Abstract: In a transparent laminate, n thin-film units (n=3 or 4) are laminated unit by unit successively on a surface of a substrate, and a high-refractive-index transparent thin film is deposited on a surface of the laminate of the n thin-film units, each of the n thin-film units consisting of a high-refractive-index thin film and a silver transparent conductive thin film. When the silver transparent conductive thin films are deposited by a vacuum dry process, the temperature T(K) of the transparent substrate at the time of film deposition is set to be in a range 340?T?410, whereby the transparent laminate having a standard deviation of visible light transmittance which is not larger than 5% in a wave range of from 450 to 650 nm can be produced.
    Type: Grant
    Filed: December 26, 2000
    Date of Patent: February 15, 2005
    Assignee: Nitto Denko Corporation
    Inventors: Toshitaka Nakamura, Kazuaki Sasa, Yoshihiro Hieda, Kazuhiko Miyauchi
  • Patent number: 6846428
    Abstract: Metal oxide films such as lithium niobate are formed in an amorphous state on a substrate such as lithium niobate and can be readily etched by conventional liquid or dry etchants. The amorphous film may then be converted by annealing to a crystalline form well suited to formation of electro-optical devices.
    Type: Grant
    Filed: March 14, 2002
    Date of Patent: January 25, 2005
    Assignee: Wisconsin Alumni Research Foundation
    Inventors: Leon McCaughan, Thomas F. Kuech, Dovas A. Saulys, Vladimir A. Joshkin, Aref Chowdhury
  • Publication number: 20040247796
    Abstract: Conducting polymers having improved optical properties, and a method of manufacturing the conducting polymers, are disclosed. The conducting polymers are prepared by a process wherein organic ions and neutral oligomers are deposited simultaneously on a substrate surface to provide a conducting polymer film.
    Type: Application
    Filed: May 17, 2004
    Publication date: December 9, 2004
    Inventors: Luke Hanley, Sanja Tepavcevic, Yongsoo Choi
  • Patent number: 6689203
    Abstract: Composition containing a chlorinated organotin derivative and a polyfluoroalkenyl compound and/or a halo polyfluoroalkenyl compound useful for CVD formation of fluorine doped tin oxide coatings.
    Type: Grant
    Filed: May 15, 2002
    Date of Patent: February 10, 2004
    Inventor: Gilles Merienne
  • Patent number: 6679977
    Abstract: A method for producing flat panels for TFT or plasma display applications includes forming a sputter source within a sputter coating chamber, the source having at least two electrically mutually isolated stationery bar-shaped target arrangements. A controlled magnet arrangement provided under each target with a time-varying magnetron field.
    Type: Grant
    Filed: September 6, 2002
    Date of Patent: January 20, 2004
    Assignee: Unakis Trading AG
    Inventors: Walter Haag, Pius Grunenfelder, Urs Schwendener, Markus Schlegel, Siegfried Krassnitzer
  • Patent number: 6641937
    Abstract: The present invention is for a transparent conductive film of nitrogen-containing indium tin oxide 5 nm to 100 &mgr;m thick formed on a substrate. The process for producing the transparent film includes exciting the surface of the substrate in a vacuum and depositing vaporized indium tin oxide on the surface of the substrate. The surface may be excited with irradiation with an ion beam. The indium tin oxide may be deposited through vacuum deposition, laser abrasion, ion plating, ion beam deposition, or chemical vapor deposition. Vapor deposition of indium tin oxide may be performed using a sintered product of indium oxide and tin oxide or with indium metal and tin metal.
    Type: Grant
    Filed: November 9, 2000
    Date of Patent: November 4, 2003
    Assignee: Agency of Industrial Science and Technology
    Inventors: Masato Kiuchi, Kensuke Murai, Shigeharu Tamura, Norimasa Umesaki, Jiro Matsuo, Isao Yamada
  • Patent number: 6630058
    Abstract: A tensile force is applied to at least a surface of a film to which a conductive material is applied within an elastic limit by a tensile force applying means, the conductive material is applied to a first surface of the film by a coating means in a tensioned state, and thereafter the tensile force is released by a tensile force releasing means to form the film having a conductive sheet for a touch-panel. Preferably, the tensile force applying means is a barrel-shaped roller.
    Type: Grant
    Filed: February 2, 2001
    Date of Patent: October 7, 2003
    Assignee: Fujitsu Takamisawa Component Limited
    Inventor: Toru Muraoka
  • Patent number: 6610374
    Abstract: A thin film layer can be formed on a glass substrate by preheating the substrate, depositing an amorphous silicon precursor layer on the substrate at a first temperature, and annealing the substrate in a thermal processing chamber at a second temperature sufficiently higher than the first temperature to substantially reduce the hydrogen concentration in the precursor layer. The preheating and annealing steps can occur in the same thermal processing chamber. Then the precursor layer is converted to a polycrystaline silicon layer by laser annealing.
    Type: Grant
    Filed: September 10, 2001
    Date of Patent: August 26, 2003
    Assignee: Applied Materials, Inc.
    Inventors: Chuang-Chuang Tsai, Takako Takehara, Regina Qiu, Yvonne LeGrice, William Reid Harshbarger, Robert McCormick Robertson
  • Patent number: 6602541
    Abstract: A process for depositing an antimony-containing coating upon a surface of a heated glass substrate includes dissolving an antimony halide in an organic solvent to form an antimony halide containing solution. This solution is then vaporized to form a gaseous antimony precursor. The gaseous antimony precursor is then directed toward and along the surface of the heated glass substrate. The antimony precursor is reacted at or near the surface to form an antimony containing coating.
    Type: Grant
    Filed: March 3, 2000
    Date of Patent: August 5, 2003
    Assignee: Libbey-Owens-Ford Co.
    Inventors: Richard J. McCurdy, Michel J. Soubeyrand, David A. Strickler
  • Patent number: 6579422
    Abstract: A whole organic EL display fabricating apparatus is provided inside a vacuum chamber. In this case, a first patterning unit B through a third patterning unit D for sequentially forming luminescent layer patterns of GREEN, BLUE, and RED on an anode pattern on a strip-shaped flexible substrate 1, and a fourth patterning unit E for forming a cathode pattern on the subsequent stage are provided. The first patterning unit B is provided with a first cooling can 21 and a vacuum vapor deposition unit below for forming the luminescent layer pattern of GREEN. The structures of the second patterning unit through the fourth patterning unit are similar to that of the first patterning unit. In fabricating a display, the substrate 1 is caused to travel from the first cooling can 21 toward a fourth cooling can 64 by the roll-to-roll system.
    Type: Grant
    Filed: March 6, 2001
    Date of Patent: June 17, 2003
    Assignee: Sony Corporation
    Inventor: Masayasu Kakinuma
  • Patent number: 6447963
    Abstract: A light quantity correction filter that can implement the desired transmittance distribution precisely and easily without complicating an exposure system, a method of making the light quantity correction filter, and a method of manufacturing a color cathode ray tube using the light quantity correction filter are provided.
    Type: Grant
    Filed: October 4, 1999
    Date of Patent: September 10, 2002
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventor: Hiromi Wakasono
  • Patent number: RE41799
    Abstract: A composition for coating glass by chemical-vapor deposition comprises a mixture of a tin oxide precursor monobutyltin trichloride, a silicon dioxide precursor tetraethylorthosilicate, and an accelerant such as triethyl phosphite; the composition is gaseous below 200° C., and permits coating glass having a temperature from 450° to 650° C. at deposition rates higher than 350 ?/sec. The layer of material deposited can be combined with other layers to produce an article with specific properties such as controlled emissivity, refractive index, abrasion resistance, or appearance.
    Type: Grant
    Filed: April 7, 1999
    Date of Patent: October 5, 2010
    Assignee: Arkema Inc.
    Inventors: David A. Russo, Ryan R. Dirkx, Glenn P. Florczak