Abstract: A method of manufacturing high aspect ratio plated through holes in a circuit carrying substrate. High aspect ratio apertures or holes (16) are formed in a substrate (10). A thin film of copper (20) is sputtered onto the substrate and in the apertures that a macroscopically discontinuous copper film (26) is formed on part of the aperture walls. The macroscopically discontinuous copper film is substantially thinner than the copper film that is deposited on the surface. A catalytic copper coating (30) is plated directly on the vacuum deposited thin film of copper by electroless copper plating in a manner sufficient to form a macroscopically continuous copper layer on the aperture walls.

Abstract: A plasma assisted deposition of a very thin inner surface coating inside a plastic or metal container is achieved using insoluble, inert, inorganic substances such as silica, or insoluble metal oxides, or by using mixtures of substances, for example of metals, metal oxides, metal salts and carbon and/or organic radicals, so as to form a flexible structure or lattice, or by using different layers of such structures. It involves locating the container in an evacuated enclosure, placing a vaporizer containing inert inorganic material of a predetermined constituency inside the container, generating a vapor of said material, forming a plasma of said vapor, and depositing a relatively thin coating of said material over a predetermined area of an inside surface of said container, whereby the high temperature of the particles of said coating penetrate said surface due to their heat energy while causing no overall rise in surface temperature because of the low mass flow.

Abstract: Aircraft brakes are refurbished by a rapid chemical vapor deposition method utilizing a liquid carbon-precursor as a carbon source for carbon densification. Inductive and resistive heating means are utilized to carry out the method.

Abstract: A plasma is generated within the interior of a hollow form held within a vacuum chamber enclosure by utilizing a radio frequency coil mounted within the vacuum chamber and defining a working volume which closely conforms to the shape of the hollow form. The hollow form and the interior of the vacuum chamber are evacuated to a low pressure, and a gas is introduced into the interior of the hollow form to maintain the pressure within the form higher than the pressure in the vacuum chamber outside of the form. Radio frequency electrical power is supplied to the coil to induce an electric field within the form which is sufficient to break down the gas within the form to form a plasma at the pressure of the gas within the form, but does not break down the gas at the lower pressure in the vacuum chamber outside of the hollow form.

Abstract: Crystal articles are treated at high temperature by a gas produced by the vaporization of sulfate(s) of ammonium and of aluminum or of iron. For example, a temperature of 480.degree. C. is maintained for 15 minutes to 3 hours. After the article has cooled, the initial purity of the treated surface can be restored simply by washing the treated surface with water or soapy water. The process is carried into practice by placing the treatment powder 4 at the bottom of the article 1 to be treated and closing the opening 2 of the article 1 by means of a graphite plate 5. A device 8 holds the plate 5 in the opening 2. The invention provides a means of limiting the migration of heavy metals, such as lead, for articles made from crystal.

Abstract: A method is disclosed to deposit aluminum and a metal oxide on substrates for improved corrosion, oxidation, and erosion protection. Low temperature chemical vapor deposition is used. A homogeneous biphase coating may be deposited, as well as layers of aluminum and metal oxides.

Abstract: A method is disclosed to deposit aluminum and platinum on substrates for improved corrosion, oxidation, and erosion protection. Low temperature chemical vapor deposition is used. A homogeneous biphase coating of aluminum and platinum may be deposited, as well as sequential layers of aluminum and platinum.

Abstract: A process is disclosed for pretreating aluminum-bearing surfaces in a vacuum deposition chamber after a previous step of cleaning the chamber, and prior to depositing tungsten silicide on substrates in the chamber, which first comprises treating the aluminum-bearing surfaces with a mixture of silane and a tungsten-bearing gas, such as WF.sub.6, to form a first deposition of a silane-based tungsten silicide on the aluminum-bearing surfaces. In a preferred embodiment, the process further comprises subsequently treating the already coated aluminum-bearing surfaces of the chamber in a second step with a mixture of a tungsten-bearing gas, such as WF.sub.6, and a chlorine-substituted silane such as dichlorosilane (SiH.sub.2 Cl.sub.2), monochlorosilane (SiH.sub.3 Cl), or trichlorosilane (SiHCl.sub.3) to form a chlorine-substituted silane-based tungsten silicide deposition over the previous deposited silane-based tungsten silicide.

Abstract: A process for passivating a metal surface to enhance the stability of a gas mixture containing one or more gaseous hydrides in low concentration in contact therewith, which comprises:a) purging gas in contact with said metal surface with inert gas to remove the purged gas,b) exposing the metal surface to an amount of a gaseous passivating agent comprising an effective amount of a gaseous hydride of silicon, germanium, tin or lead and for a time sufficient to passivate said metal surface, andc) purging said gaseous passivating agent using inert gas.

Abstract: The invention is a method for assembling heat transfer plates, introducing a plastic protective material into the plate interspaces as a vapor, and condensing the material on the surfaces of the heat transfer plates.

Abstract: A chemical vapor deposition method is provided for case hardening a ferrous metal interior tubular surface by exposure to diffusible boron with or without other diffusible elements such as silicon to enhance the wear, abrasion and corrosion resistance of the surface. The pack composition used allows for borosiliconizing of the interior surface without sintering or adhering to itself and/or adhering to the surface. The pack composition comprises between about 5% and about 20% by weight of a suitable source of boron; between about 2% and about 10% by weight of silicon material; between about 2% and about 15% by weight of an activator; and the balance being a non-sintering, non-adhering filler.

Abstract: In order to reduce the rate of coke formation during the industrial pyrolysis of hydrocarbons, the interior surface of a reactor is coated with a uniform layer of a ceramic material, the layer being deposited by thermal decomposition of a non-alkoxylated organosilicon precursor in the vapor phase, in a steam containing gas atmosphere in order to form oxide ceramics.

Abstract: In order to reduce the rate of coke formation during the industrial pyrolysis of hydrocarbons, the interior surface of a reactor is coated with a thin layer of a ceramic material, the layer being deposited by thermal decomposition of a non-oxygen containing silicon-nitrogen precursor in the vapor phase, in an inert or reducing gas atmosphere in order to minimize the formation of oxide ceramics.

Abstract: This invention relates to an improved process for the thermal dehydrogenation of polysilicon granules in a fluidized bed reactor, the improvement which comprises introducing a varying electromagnetic field into the reactor whereby reactor walls are coated with silicon during the dehydrogenation.

Abstract: A method for the surface treatment of a metal workpiece which involves the generation between a major exposed portion of an anode and successive restricted areas of a first surface of the workpiece serving as a cathode, a vacuum arc discharge having an arc current which is not substantially less than 50 amp. and having a positive voltage-current gradient.

Abstract: The thickness distribution of a vapor deposited layer such as an interference filter deposited on a substrate such as a glass faceplate for a projection television tube, is controlled in the plane of the substrate by employing at least one variable transmission mark to partially shield the substrate during deposition.

Abstract: A barrier coating is formed on a polymeric article, such as on the interior of a thermoplastic container. An oxidizing gas is converted to a plasma in a plasma chamber remote from the treatment chamber. The resulting plasma-activated oxidizing species are delivered to the interior of the container. An organosilicon reactant vapor is separately but simultaneously delivered to the interior of the container so that the organosilicon vapor and oxidizing active species mix within the container. An electric field is also applied to the container, so that the reaction products are deposited under the influence of the electrical field to form the barrier coating.

Abstract: A continuous dry coating method and an apparatus therefor which are capable of removing cut chips and burrs from and smoothing inner walls of small-diameter holes in a substrate material and, then, successively performing a cold coating on these small holes in a short period of time. The continuous dry process coating method comprises the steps of: arranging electrodes on opposite sides of a substrate material; performing a plasma discharge to surface-treat small holes made in the substrate material; and then performing an electron cyclotron resonance plasma (ECR plasma) coating on the surfaces of these holes.

Abstract: The present invention is directed to a process for coating the interior surfaces of an orifice in a substrate that forms a slurry fuel injection nozzle. In a specific embodiment, the nozzle is part of a fuel injection system for metering a coal-water slurry into a large, medium-speed, multi-cylinder diesel engine. In order to retard erosion of the orifice, the substrate is placed in a chemical vapor deposition (CVD) reaction chamber. A reaction gas is passed into the chamber at a gas temperature below its reaction temperature and is directed through the orifice in the substrate. The gas reaction temperature is a temperature at and above which the reaction gas deposits as a coating, and the reaction gas is of a composition whereby improved resistance to erosion by flow of the particulates in the slurry fuel is imparted by the deposited coating.

Abstract: The thickness of a layer of material deposited by chemical vapor deposition, especially a diamond layer, is monitored by providing at least one substrate on which the material is deposited, with at least one perforation of a predetermined size therein. The relationship between the thickness of the layer formed in said perforation and the thickness of the layer formed on the substrate surface is determined, so that the thickness of the surface layer can be determined from the thickness of the layer formed in the perforation.

Abstract: A coating technique for beam tubes which employs a laser to ablate a target material and produce a plasma plume containing ions of the target material which adhere to the inner wall surface of the tube forming a thin film. The device employed in the coating process includes a pulse laser, a turning mirror used to direct the laser radiation, a window attached to tubing whose function is to evacuate the setup and to support a rail on which a carriage carrying the target material and optical elements for focusing the laser light onto the targets are mounted. During the coating process, the beam tube and the rail support tubes are evacuated to a lower pressure to remove ambient air. The apparatus is then filled with an inert gas. The laser is pulsed for a predetermined duration to ablate the target material for coating the vicinal surfaces of the beam tube.

Abstract: Apparatus and method for simultaneously coating interior and exterior surfaces of articles, such as advanced turbine airfoils, the interior surfaces defined by narrow, complex passageways. The apparatus and method, in addition to providing for simultaneous coating of interior and exterior surfaces, also permits additional control over the coating process by permitting control over the partial pressure of reactive gas introduced into the reaction chamber. The apparatus also permits for subsequent thermal treatment of the coated parts in an inert gas atmosphere with no intermediate cooling step thereby reducing costs while eliminating the potential for damage due to handling by the elimination of at least one handling operation.

Abstract: An aqueous slurry process for producing a diffusion aluminide protective coating in superalloy articles, particularly on internal passages in superalloy articles.Aqueous slurry containing a source of aluminum in particulate form, an inert ceramic particulate, a halide activator compound in particulate form and a viscous aqueous base dispersant is injected into the internal passage or otherwise coated on the internal surface to be protected. The coated article is heated to dry the slurry and remove the aqueous solvent base. The dried, coated article is diffusion heat treated between about 1,350.degree. F. and 2,250.degree. F. for a period of time between approximately 4 hours and 24 hours to transfer the aluminum to the surfaces of the passages and diffuse the aluminum into the substrate material to form the protective coating.

Abstract: An improved two membered substantially crack-free water jet mixing tube of an abrasive water jet cutting device and a method of its preparation. The method comprises chemically vapor depositing diamond layer on a funnel shaped support member to form an inner member of the mixing tube, separating the inner member from the support member, depositing and then cooling an outer member on the outer side of the inner member to produce a compressive stress on the inner member that substantially prevents formation cracks on the inner member. The inner side of the inner member has a smooth bore having a microcrystalline structure and the outer member has a higher coefficient of thermal expansion than diamond. The invention is also directed to a water jet cutting device that incorporates the aforementioned improved substantially crack-free water jet mixing tube.

Abstract: A high pressure, high throughput, single wafer, semiconductor processing reactor is disclosed which is capable of thermal CVD, plasma-enhanced CVD, plasma-assisted etchback, plasma self-cleaning, and deposition topography modification by sputtering, either separately or as part of in-situ multiple step processing. The reactor includes cooperating arrays of interdigitated susceptor and wafer support fingers which collectively remove the wafer from a robot transfer blade and position the wafer with variable, controlled, close parallel spacing between the wafer and the chamber gas inlet manifold, then return the wafer to the blade. A combined RF/gas feed-through device protects against process gas leaks and applies RF energy to the gas inlet manifold without internal breakdown or deposition of the gas. The gas inlet manifold is adapted for providing uniform gas flow over the wafer.

Abstract: Porous solid bodies, especially carbon bodies, are densified by chemical vapor deposition by establishing a thermal gradient within the body, thermally decomposing a gaseous precursor so deposit an electrically and thermally conductive deposit (e.g. carbon) within the body, and shifting the thermal gradient toward the lower temperature zone as deposition proceeds, by means of induction heating.

Abstract: A pack cementation coating tape such as a nickel aluminide coating tape includes a reactive metal such as aluminum, a filler such as aluminum oxide, and a halogen carrier such as ammonium chloride held together by fibrillated polytetrafluoroethylene. The tape is useful in coating localized areas of nickel containing alloys to provide a nickel aluminide surface coating. The coating is formed by positioning the tape over the metal surface and heating the tape to a temperature of about 1250.degree. F. wherein the element metal such as aluminum reacts with the halogen carrier and in turn reacts with nickel on the surface of the nickel alloy to form the nickel aluminide coating. A masking tape formed from a separating layer, a brazing alloy layer and a nickel layer can be used to mask localized portions of the surface to prevent coating at these areas.

Abstract: Apparatus are disclosed for coating the inside surfaces of hollow objects with a coating material by vapor deposition wherein the objects are removably attached to a rotary fixture which is employed for holding the objects while the coating process is being conducted. The rotary fixture comprises a hollow chamber rotatably mounted about an axis of rotation wherein the chamber can have a plurality of connecting union assemblies which secure the objects and provide communication between the inside surfaces of the objects and the inside space of the hollow chamber. The coating material is introduced from the interior space of the hollow chamber to the interior space of the objects under vacuum conditions.

Abstract: In a method of treating a hollow article, a first gas substantially fills the inside of the article. A second gas including electrically charged species is provided on the outside of the article. The two gases are maintained separate from one another. The first gas is maintained is an electrically conductive state as, for example, in an ionized state. An electrical potential is applied to a first electrode in contact with the first gas. Because the first gas is conductive, this first potential is applied at the interior surfaces of the article and, therefore, influences the electrically charged species in the second gas on the outside of the article. The electrically charged species in the second gas interact with the exterior surfaces of the article under the influence of the electrical potential applied through the first gas. The second gas may be a plasma and a reactant may be introduced into the second gas so that reaction products are formed and deposited on the exterior surface of the article.

Abstract: Method for consolidating diamond material, substantially free of voids, has an average crystallite size greater than about 15 microns, a maximum intensity of the diamond Raman peak in counts/sec divided by the intensity of photoluminescence at 1270 cm.sup.-1 greater than about 3, a Raman sp.sup.3 full width half maximum less than about 6 cm.sup.-1 and a diamond-to-graphite Raman ratio greater than about 25. The diamond material may also comprise carbon atoms with a C.sup.13 content less than 0.05 atomic %.

Abstract: A chemical vapor deposition (CVD) method utilizing an apparatus comprising a reactor having a coating chamber at elevated temperature, means for supporting substrates to be coated at different zones in the coating chamber, and means for supplying a gaseous reactant stream to the chamber for distribution to the coating zones in a manner that the stream is heated to substantially different temperatures at different coating zones. Reactivity-altering material is disposed at the coating zones for contact by the reactant stream supplied thereto before the reactant stream contacts a substrate at the zones. The reactivity-altering material includes a composition that differs between coating zones in dependence on the reactant stream temperatures at the coating zones as necessary to alter the reactivity of the reactant (i.e., activity of a particular chemical specie of the reactant stream) stream at the coating zones in a manner to provide substantially the same reactant reactivity at all coating zones.

Abstract: A method for producing dies for extruding ceramic honeycomb structural bodies is provided which can simultaneously produce in at least one stage a number of dies having a uniform vapor deposited film formed on the dies by chemical vapor deposition, and which has high production efficiency and decreases the production cost of the dies. The method includes the steps of forming die members having extrusion grooves and a plurality of holes for supplying a batch of ceramic raw materials respectively communicated with the extrusion grooves, and coating the die members with an abrasive-resistant material by a chemical vapor deposition operation, including forming the coating of an abrasive-resistant material on a plurality of die members simultaneously by chemical vapor depositing, while regulating a raw material gas for the chemical vapor deposition supplied from gas discharge holes of a rotatable raw material gas inlet pipe to flow to the die members.

Abstract: A method for plasma treatment of a predetermined portion of a substrate. The impedance of the coil and an established normal plasma is matched with the impedance of a power source, thereby maximizing the efficiency of the transfer of energy from the power source to the coil and producing a resonant plasma. The predetermined portion of the substrate is exposed to the resonant plasma for treatment. Additionally, a method for plasma treatment of a predetermined portion of the outside surface of a filament. The filament is trained through an inlet and exit of a plasma treatment chamber, through an inlet side tubular mask within the chamber, and through an exit side tubular mask within the chamber, each mask being adjustable within the chamber axially of the filament to expose a predetermined segment of the filament to plasma in the chamber while masking the remainder of the filament within the chamber from exposure to plasma.

Abstract: A method for producing reinforced ceramic composite articles by means of chemical vapor infiltration and deposition in which an inverted temperature gradient is utilized. Microwave energy is the source of heat for the process.

Abstract: A method is provided for producing a self-supporting ceramic composite body having a plurality of spaced apart wall members, each wall member having a bounded cross-section for defining substantially continuous, fluid passageways. The wall members generally inversely replicate in opposed directions the geometry of a positive pattern. Each of the wall members, which are axially aligned, comprises a ceramic matrix having a filler embedded therein, and is obtained by the oxidation reaction of a parent metal to form a polycrystalline material which consists essentially of the oxidation reaction product of the parent metal with an oxidant and, optionally, one or more metals, e.g. nonoxidized constituents of the parent metal.

Abstract: A method for treating the surface of the inner wall of a furnace, said inner wall being lined with ceramic fibers, involves placing a source generating an alkali component in a furnace for firing a material into a product, in which at least the inner wall is lined with a ceramic fiber body, and heating the interior of the furnace to vaporize the alkali component, thereby impregnating the surface layer portion of the ceramic fiber body with the thus vaporized alkali component.

Abstract: A superconducting conductor assembly using high temperature materials. A double-walled tubular structure has at least one helical strip of superconductive material on the inner wall of the inside tube. Brittle, non-ductile superconducting materials may be used. A coolant, typically liquid nitrogen, is circulated between the tubes to maintain the superconductor below the critical temperature of the superconductor. A buffer layer is preferably included between tube wall and superconductor. A plurality of alternating layers of buffer and superconductor may be used.

Abstract: A method for the production of ceramic matrix composites by chemical vapor infiltration. The method includes exposing an infiltrated preform to microwave energy, with pressure variation of the reactant gases in the processing chamber and/or temperature variation of the preform during processing, to produce substantially improved composites. The process provides higher deposition rates within the core of the ceramic matrix composite, higher densification which advantageously initiates within the interior of the ceramic matrix composite and proceeds radially outward, and a thick wall ceramic matrix composite with an overall reduced density gradient.

Abstract: The thickness distribution of a vapor deposited layer such as an interference filter deposited on a skirted substrate such as a glass faceplate for a projection television tube, is improved by shielding the substrate from indirect flux of vapor so as to reduce the shadowing effect of the skirt upon the thickness distribution of the deposited layer thereby improving the white field uniformity of the resultant projection image.

Abstract: A metal oxidation treatment apparatus to form the passivation film on the surface of the metal to be oxidized such as stainless steel or the like, comprising an oxidation furnace, a gas inlet to introduce gas into said oxidation furnace, a discharge outlet to discharge the gas from said oxidation furnace, and a heater to heat said oxidation furnace to the predetermined temperature, so that the metal to be oxidized is heated and oxidized in dry oxidation atmosphere while gas is passed in said oxidation furnace.

Abstract: A metal oxidation treatment apparatus to form the passivation film on the surface of the metal to be oxidized such as stainless steel or the like, comprising an oxidation furnace, a gas inlet to introduce gas into said oxidation furnace, a discharge outlet to discharge the gas from said oxidation furnace, and a heater to heat said oxidation furnace to the predetermined temperature, so that the metal to be oxidized is heated and oxidized in dry oxidation atmosphere while gas is passed in said oxidation furnace.

Abstract: A glass vacuum flask coating method comprising a step to put a metal material in the gap between an inner flask and an outer flask before said inner and outer flasks being formed into a blank for a glass vacuum flask, after the process of exhausting and tipping-off said metal material being heated by a magnetic field generated from an inductance coil into a metal vapor inside said gap, permitting said metal vapor to be adhered to the glass surface inside said gap, forming into a metal reflecting film thereon.

Abstract: A method for the low temperature, microwave enhanced, chemical vacuum deposition of thin film material onto a surface of a hollow member by creating a sub-atmospheric pressure condition adjacent the surface to be coated while maintaining the applicator through which microwave energy is introduced at substantially atmospheric pressure.

Abstract: An apparatus for forming a high purity silicon carbide film on the inner surface of a cylindrical member by a chemical vapor phase deposition process is provided. The member to be coated is received in a reaction vessel and heated by a heating means. The apparatus includes a gas feed conduit having a distal end disposed for axial motion within the member, for feeding a source gas containing a carbon source and a silicon source into the interior of the member, and a gas discharge conduit having a distal end disposed for axial motion within the member, for discharging used reaction gases from within the member. The gas feed and discharge conduits are moved so that their distal ends move through the member in unison to continuously move the reaction region.

Abstract: In the manufacture of tube glass, in which following the drawing of a tube from molten glass the inside surface of the tube is treated with a chemically reactive gas or gas mixture, a gas or gas mixture which is not reactive at the drawing temperature of the glass is dispensed into the tube in the direction of drawing. At a location in the tube where the tube has cooled down so far that the diameter is constant, the gas or gas mixture is made to react by means of a plasma which is generated in the tube.

Abstract: In order to reduce the rate of coke formation during the industrial pyrolysis of hydrocarbons, the interior surface of the reactor tubes are coated with a thin layer of a ceramic material, said layer being deposited by thermal decomposition of a non-oxygen containing silicon organometallic precursor in the vapor phase, in an inert or reducing gas atmosphere in order to minimize the formation of oxide ceramics.

Abstract: A process for producing a honeycomb structure-extruding die by etching a surface of a base material for a honeycomb structure-extruding die with a gas, and coating the etched base material by CVD before an oxidized film is formed after the etching.

Abstract: A process for treating a container comprised of a normally solid, polymer surface with a sulfur-containing compound is carried out by contacting the surface at a temperature of about 120.degree. to about 140.degree. F. with a sulfur-containing compound. Subsequently, the surface is contacted with a neutralizing agent. The process is conducted for a such a period of time and with such concentrations of the sulfur-containing compound and the neutralizing agent that the container has average permeability to unleaded gasoline having octane number of 93 of not greater than about 0.021 g/hr.The surface, after the treatment, comprises about 700 to about 1800 micrograms of sulfur per square inch of the surface and it is penetrated by the sulfur-containing compound to an average depth of at least about 15 microns.

Abstract: The present invention refers to a process for inhibiting the formation of polymer buildup on the inner surfaces of a vinyl polymerization reactor by coating such surfaces with an alkaline solution of a linear or branched low molecular weight compound belonging to the poly(hydroxybenzyl) and poly(hydroxybenzylether) families and including their copolymers or blends. This process effectively reduces the adherence of polymeric material to the inner parts of the reaction vessel wherein substituted ethylene monomers are polymerized.

Abstract: In the PCVD method glass is deposited in layers on the inner wall of a glass tube by heating the tube to a temperature between 1100.degree. and 1300.degree. C., by passing a reactive gas mixture through the glass tube from a gas inlet side at a pressure between 1 and 30 hPa, by forming a plasma in the interior of the glass tube, and by reciprocating the plasma between two reversal points. After a quantity of glass corresponding to the desired fiber optical construction has been deposited, the tube is collapsed to form a solid preform from which optical fiber are draw. The range of nonconstant deposition geometry at the preform entrance, (i.e. on the gas inlet side), is reduced by interrupting the reciprocating movement of the plasma at the reversal point on the gas inlet side.