Abstract: An apparatus comprising a spherical vessel, where the spherical vessel further includes a wall, where the wall is formed from one or more layers of material and a gas, where the gas may be lighter-than-air and is enclosed by the wall.

Abstract: A substrate for biochips, in which carboxyl groups are immobilized on a substrate whose surface at least is composed of carbon; and a method for producing the substrate are disclosed. The substrate for biochips comprises a substrate whose surface at least is composed of carbon; and an acrylic polymer having free carboxyl groups in the molecular structure thereof, which acrylic polymer is immobilized on the surface of the substrate. The method for producing the substrate comprises irradiating the substrate whose surface at least is composed of carbon with ultraviolet light during the acrylic polymer having free carboxyl groups in the molecular structure thereof contacts the substrate.

Abstract: A substrate for biochips which has a high probe loading amounts and a uniform immobilization density, and which further has a high detection sensitivity and a high reproducibility by preventing a non-specific adsorption of proteins, when used as a substrate for biochips for immobilizing probes composed of biologically relevant substances such as proteins and nucleic acids, is disclosed. Amino groups can be bound to the surface of the substrate uniformly, at a high density and stably by covalently immobilizing an amino group-containing polymer on the surface of the substrate. The probe immobilization rate is high and immobilizing density was uniform by immobilizing a probe composed of a biologically relevant substance such as a protein or nucleic acid by utilizing the amino groups. Further, detection sensitivity and reproducibility are high by inhibiting non-specific adsorption of proteins.

Abstract: Methods and systems include supplying pulsed microwave radiation through a waveguide, where the microwave radiation propagates in a direction along the waveguide. A pressure within the waveguide is at least 0.1 atmosphere. A supply gas is provided at a first location along a length of the waveguide, a majority of the supply gas flowing in the direction of the microwave radiation propagation. A plasma is generated in the supply gas, and a process gas is added into the waveguide at a second location downstream from the first location. A majority of the process gas flows in the direction of the microwave propagation at a rate greater than 5 slm. An average energy of the plasma is controlled to convert the process gas into separated components, by controlling at least one of a pulsing frequency of the pulsed microwave radiation, and a duty cycle of the pulsed microwave radiation.

Abstract: This patent relates to 1) primary tool designs for a chemical vapor deposition (CVD) synthesis system in the form of open tray stacks or more readily accessible, quasi-gas-tight enclosure boxes, to 2) system designs for low volume and high volume CVD graphene production, and to 3) methods for CVD graphene and other two-dimensional (2D) film CVD synthesis. Scaling of higher quality CVD 2D-film production is thereby enabled both in substrate size and productivity and at reduced costs. This invention provides a wider process window for CVD Synthesis of 2D films and, particularly of graphene films, thereby allowing increased film quality and/or production throughput.

Abstract: Methods of growing a multilayer graphene film (10) include flowing a weak oxidizing vapor (OV) and a gaseous carbon source (CS) over a surface (SGC) of a carbonizing catalyst (GC) in a CVD reaction chamber (2). Carbon atoms (C) deposit on the carbonizing catalyst surface to form sheets of single-layer graphene (12) upon cooling. The method generates a substantially uniform stacking of graphene layers to form the multilayer graphene film. The multilayer graphene film is substantially uniform and has a relatively large scale as compared to graphene films formed by prior-art methods.

Abstract: A method for applying a graphene coating to a substrate comprising iron or aluminium, the method comprising: providing a metallic layer on a surface of the substrate; and contacting said metallic layer with a source of carbon atoms to provide a graphene coating on the metallic layer. There is also described an iron- or aluminium-containing substrate, for example a component of a chain, with a metallic layer on a surface of the substrate and a graphene coating disposed on said metallic layer.

Abstract: Technologies are generally described for method and systems effective to at least partially alter a defect in a layer including graphene. In some examples, the methods may include receiving the layer on a substrate where the layer includes at least some graphene and at least some defect areas in the graphene. The defect areas may reveal exposed areas of the substrate. The methods may also include reacting the substrate under sufficient reaction conditions to produce at least one cationic area in at least one of the exposed areas. The methods may further include adhering graphene oxide to the at least one cationic area to produce a graphene oxide layer. The methods may further include reducing the graphene oxide layer to produce at least one altered defect area in the layer.

Abstract: A method of forming a graphene film (20) on one or more surfaces (10) of a copper-containing substrate (12) comprising the steps of: (i) heating a copper-containing substrate (12) defining one or more surfaces (10) to an exposure temperature; (ii) exposing the substrate (12) to a carbon-containing precursor gas at the exposure temperature for a predetermined period of time to dissolve carbon atoms into the substrate (12) and saturate the substrate (12) with carbon atoms; and (iii) cooling the substrate (12) so as to segregate the dissolved carbon atoms (16) from the substrate (12) to form a graphene film (20) on the or each surface (10) of the substrate (12); wherein the method further includes the step of selecting the copper-containing substrate (12) on the basis of its thickness to control the depth of the graphene film (20) formed on the or each surface (10) of the substrate (12) on cooling the substrate (12) so as to segregate the dissolved carbon atoms from the substrate (12).

Abstract: The disclosure is relates to nanotechnology and nanofabrication of few-crystal hexagonal graphene. The method includes contacting a copper film with a gas. The method further includes raising a temperature of the copper film to about 1000° C. over of period of about 40 minutes. The method further includes heating the copper film at about 1000° C. for a period of about 1 hour. The method further includes contacting the copper film with a carbon-containing gas for about 5 minutes. The method further includes cooling the copper film to room temperature to produce a graphene layer on the copper film.

Abstract: This invention relates to a board and method for forming a graphene layer, and more particularly, to a board for use in forming a graphene layer, which has a structure able to improve properties of the graphene layer formed thereon, and to a method of forming a high-quality graphene layer using the same. The board of the invention includes a board layer, a metal catalyst layer formed on the board layer and functioning as a catalyst for forming the graphene layer, and a stress reduction layer disposed between the board layer and the metal catalyst layer so as to reduce stress of the metal catalyst layer, wherein the stress reduction layer able to reduce stress of the metal thin film is provided, thus improving crystallinity and surface roughness of the metal thin film, thereby effectively forming a high-quality graphene layer.

Abstract: Method of growing carbon nanotubes which are substantially vertically aligned on a diamond-based substrate via a chemical vapor deposition system utilizing an iron-based catalyst is disclosed.

Abstract: A substrate for biochips which has a high probe loading amounts and a uniform immobilization density, and which further has a high detection sensitivity and a high reproducibility by preventing a non-specific adsorption of proteins, when used as a substrate for biochips for immobilizing probes composed of biologically relevant substances such as proteins and nucleic acids, is disclosed. Amino groups can be bound to the surface of the substrate uniformly, at a high density and stably by covalently immobilizing an amino group-containing polymer on the surface of the substrate. The probe immobilization rate is high and immobilizing density was uniform by immobilizing a probe composed of a biologically relevant substance such as a protein or nucleic acid by utilizing the amino groups. Further, detection sensitivity and reproducibility are high by inhibiting non-specific adsorption of proteins.

Abstract: Aspects of the invention are directed to a method of forming a film on a substrate. The substrate and a solid carbon source are placed into a reactor. Subsequently, both the substrate and the solid carbon source are heated. Optionally, one or more process gases may be introduced into the reactor to help drive the formation of the film. The film comprises graphene.

Abstract: A PG-coated product is produced by: producing a body by using PBN; providing a traceability display made of purified graphite in an arbitrary section of the body surface; and covering the body surface including the traceability display with a PG film. By setting the thickness of the PG film to 100 ?m or less, preferably 80 ?m or less, it is possible to provide transparency sufficient for reading the product serial number displayed on the body surface. Thus, this is a suitable way of displaying traceability. Because graphite does not adversely affect the physical properties of PBN and PG, the functions and durability intrinsic to the product are not impaired, even when the traceability display, which is formed by using graphite, is placed between the body surface made of PBN and the PG film.

Abstract: A carbon nanotube device has a substrate (1), a layer (3) having a space (5) which penetrates in the vertical direction of the substrate (1), and carbon nanotubes (7) formed on the surface of the substrate facing the space (5) in such a manner as to have number density distributions successively changed according to the distances from the center of the space (5), the supply amount of catalyst substances is diluted by supplying the catalyst substances through an opening of a coating film (4) opposite to the substrate (1) and the hole (5), a catalyst having a nominal thickness distribution according to the way how the space (5) appears is formed on the substrate (1) facing the space (5), and a carbon source is supplied, thereby forming carbon nanotubes having the number density distribution are formed on the substrate (1).

Abstract: Technologies are presented for growing graphene by chemical vapor deposition (CVD) on a high purity copper surface. The surface may be prepared by deposition of a high purity copper layer on a lower purity copper substrate using deposition processes such as sputtering, evaporation, electroplating, or CVD. The deposition of the high purity copper layer may be followed by a thermal treatment to facilitate grain growth. Use of the high purity copper layer in combination with the lower purity copper substrate may provide thermal expansion matching, compatibility with copper etch removal, or reduction of contamination, producing fewer graphene defects compared to direct deposition on a lower purity substrate at substantially less expense than deposition approaches using a high purity copper foil substrate.

Abstract: A method for synthesizing graphene films is disclosed. Monolayer or multilayer graphene can be directly grown on the dielectric materials. The method includes the following steps: disposing dielectric materials and metals in a reactor, introducing reaction gases into the reactor and decomposing the reaction gases by heating, thus directly depositing graphene films on the surfaces of the dielectrics. High crystalline quality and low-defect graphene films can be synthesized directly on dielectric materials, without the process of wet etching and transfer. The method opens up a more direct route to apply graphene on electronics, optoelectronics, and bio-medical devices.

Abstract: Processes for synthesizing graphene films. Graphene films may be synthesized by heating a metal or a dielectric on a substrate to a temperature between 400° C. and 1,400° C. The metal or dielectric is exposed to an organic compound thereby growing graphene from the organic compound on the metal or dielectric. The metal or dielectric is later cooled to room temperature. As a result of the above process, standalone graphene films may be synthesized with properties equivalent to exfoliated graphene from natural graphite that is scalable to size far greater than that available on silicon carbide, single crystal silicon substrates or from natural graphite.

Abstract: A method for growing a graphene nanoribbon on an insulating substrate having a cleavage plane with atomic level flatness is provided, and belongs to the field of low-dimensional materials and new materials. The method includes the following steps. Step 1: Cleave an insulating substrate to obtain a cleavage plane with atomic level flatness, and prepare a single atomic layer step. Step 2: Directly grow a graphene nanoribbon on the insulating substrate having regular single atomic steps. In the method, a characteristic that nucleation energy of graphene on the atomic step is different from that on the flat cleavage plane is used, and conditions, such as the temperature, intensity of pressure and supersaturation degree of activated carbon atoms, are adjusted, so that the graphene grows only along a step edge into a graphene nanoribbon of an adjustable size. The method is mainly applied to the field of new-type graphene optoelectronic devices.

Abstract: To provide a graphene sheet that has a large area, is homogeneous, and has a small amount of domain boundaries, a novel method for producing a graphene sheet suitable for industrial applications, such as application to electronics, that is capable of producing a graphene sheet that has well aligned crystal orientation at a low cost, and a graphene sheet. In the method for producing a graphene sheet of the present invention, a substrate containing a single crystal substrate having formed on the surface thereof an epitaxial metal film is used, and a graphene sheet is grown by making a carbon material into contact with the surface of the epitaxial metal film. In the graphene sheet of the present invention, the graphene sheet is constituted by a number of graphene domains, the domains each have an area of from 0.000001 ?m2 to 100,000 mm2, and the orientations of 6-membered rings in the domains are averagely aligned in a single direction over the graphene sheet.

Abstract: A nanosheet includes a 2H—SiC layer having a first surface and a second surface, the first and second surfaces being opposed to each other; a first graphene layer formed of 1-10 graphenes being disposed on the first surface; and a second graphene layer formed of 1-10 graphenes being disposed on the second surface.

Abstract: An object of the present invention is to provide a copper foil with carrier sheet which permits releasing of the carrier sheet from the copper foil layer even when hot pressing at a temperature exceeding 300° C. is applied in the production of a printed wiring board. In order to achieve the object, a copper foil with physically releasable carrier sheet having a copper foil layer on the surface of the carrier sheet through a bonding interface layer, characterized in that the bonding interface layer is composed of a metal layer and a carbon layer. It is preferable for the bonding interface layer to be composed of a metal layer of 1 nm to 50 nm thick and a carbon layer of 1 nm to 20 nm thick.

Abstract: Low-aspect ratio nanostructures, such as nanocups, nanorings, and arrays of nanocups and nanorings, methods of fabrication of nanostructures, and methods of using nanostructures are disclosed.

Abstract: A hollow carbon sphere having a carbon shell and an inner core is disclosed. The hollow carbon sphere has a total volume that is equal to a volume of the carbon shell plus an inner free volume within the carbon shell. The inner free volume is at least 25% of the total volume. In some instances, a nominal diameter of the hollow carbon sphere is between 10 and 180 nanometers.

Abstract: Provided is a method of depositing a graphene film. In the method includes supplying a gaseous-phase graphene source to a substrate, forming an adsorbed layer on the substrate by the graphene source, and activating the adsorbed layer by heating the adsorbed layer. Therefore, a uniform graphene film having a large area can be formed.

Abstract: A monomolecular carbon-based film can be placed on an aircraft part, such as the leading edge designed to directly impinge against air during flight, ascent or descent, in order to form a smooth surface having increased lubricity and reduced air friction. The aircraft part may be in the form of a helicopter rotor, wing, propeller, fin, aileron, nose cone, and the like. The monomolecular carbon-based film can be deposited on the aircraft part, for example, using a reactor that includes a bed of silica and through which emissions from a diesel engine are passed. The monomolecular carbon-based film decreases air friction and increased lift of a modified aircraft that includes an aircraft part treated with the film.

Abstract: Methods of fabricating graphene using an alloy catalyst may include forming an alloy catalyst layer including nickel on a substrate and forming a graphene layer by supplying hydrocarbon gas onto the alloy catalyst layer. The alloy catalyst layer may include nickel and at least one selected from the group consisting of copper, platinum, iron and gold. When the graphene is fabricated, a catalyst metal that reduces solubility of carbon in Ni may be used together with Ni in the alloy catalyst layer. An amount of carbon that is dissolved may be adjusted and a uniform graphene monolayer may be fabricated.

Abstract: A method of forming a carbon nano-material layer may involve a cyclic deposition technique. In the method, a chemisorption layer or a chemical vapor deposition layer may be formed on a substrate. Impurities may be removed from the chemisorption layer or the chemical vapor deposition layer to form a carbon atoms layer on the substrate. More than one carbon atoms layer may be formed by repeating the method.

Abstract: A method of growing a carbon nanotube includes the step of impinging a beam of carbon-containing molecules onto a substrate to grow at least one carbon nanotube on the catalyst surface.

Abstract: Graphene layers made of primarily sp2 bonded atoms and associated methods are disclosed. In one aspect, for example, a method of forming a graphite film can include heating a solid substrate under vacuum to a solubilizing temperature that is less than a melting point of the solid substrate, solubilizing carbon atoms from a graphite source into the heated solid substrate, and cooling the heated solid substrate at a rate sufficient to form a graphite film from the solubilized carbon atoms on at least one surface of the solid substrate. The graphite film is formed to be substantially free of lattice defects.

Abstract: Disclosed herein are a graphene hybrid material and a method for preparing the graphene hybrid material, the graphene hybrid material comprising: a matrix having lattice planes disconnected on a surface thereof; and layers of graphene which are epitaxially grown along the lattice planes disconnected on the surface of the matrix such that the layers of graphene are oriented perpendicularly to the matrix, and which are spaced apart from each other and layered on the matrix in the same shape. The graphene hybrid material can be usefully used in the fields of next-generation semiconductor devices, biosensors, electrochemical electrodes and the like.

Abstract: A method for making an array of carbon nanotubes includes the steps of: (a) providing a substrate with a film of a first catalyst thereon; (b) disposing the substrate in a quartz boat; (c) disposing a second catalyst adjacent to the substrate in the quartz boat; (d) disposing the quartz boat in a reaction chamber having a gas inlet configured for introducing a carbon source gas and a carrier gas into the reaction chamber and a gas outlet; (e) heating the reaction chamber to a predetermined temperature and introducing the carbon source gas into the reaction chamber along a direction from the second catalyst to the substrate, whereby the second catalyst reacts with the carbon source gas thereby producing a resultant for promoting catalytic activity of the first catalyst; and (f) growing an array of carbon nanotubes on the substrate.

Abstract: The present invention contemplates a variety of methods and techniques for fabricating an improved carbon nanotube (CNT) device such as an AFM probe. A CNT is first formed on a desired location such as a substrate. The CNT and substrate are then covered with a protective layer through a CVD or other suitable process. Then a length of the CNT is exposed through etching or other suitable process, the exposed length being formed to a length suitable for a desired application for the CNT device.

Abstract: The present invention involves methods and devices which enable discrete objects having a conducting inner core, surrounded by a dielectric membrane to be selectively inactivated by electric fields via irreversible breakdown of their dielectric membrane. One important application of the invention is in the selection, purification, and/or purging of desired or undesired biological cells from cell suspensions. According to the invention, electric fields can be utilized to selectively inactivate and render non-viable particular subpopulations of cells in a suspension, while not adversely affecting other desired subpopulations. According to the inventive methods, the cells can be selected on the basis of intrinsic or induced differences in a characteristic electroporation threshold, which can depend, for example, on a difference in cell size and/or critical dielectric membrane breakdown voltage.

Abstract: A method is disclosed for producing graphenic materials by templated growth along a preformed graphenic material lattice edge, wherein at least one of the graphenic material or template is translated during growth of the graphenic material. A method for preparing CNTs from preformed CNT substrates in the presence of cylindrical templating structures and a reactive carbon source in a fluid phase is also disclosed, wherein at least one of the CNT substrate or the cylindrical templating structure is translated during addition of carbon atoms to the CNT substrate. A method is also disclosed for preparing CNTs from preformed CNT substrates in the presence of cylindrical templating structures and a carbon source in a fluid phase, wherein non-thermalized excited states are produced on the CNT substrate and at least one of the CNT substrate or the cylindrical templating structure is translated during addition of carbon atoms to the CNT substrate.

Abstract: Disclosed herein are a graphene hybrid material and a method for preparing the graphene hybrid material, the graphene hybrid material comprising: a matrix having lattice planes disconnected on a surface thereof; and layers of graphene which are epitaxially grown along the lattice planes disconnected on the surface of the matrix such that the layers of graphene are oriented perpendicularly to the matrix, and which are spaced apart from each other and layered on the matrix in the same shape. The graphene hybrid material can be usefully used in the fields of next-generation semiconductor devices, biosensors, electrochemical electrodes and the like.

Abstract: The inventive method relates to microelectronic and consists in the application of an emission layer to elements of an addressable field-emission electrode with the aid of a gas-phase synthesis method in a hydrogen flow accompanied by a supply of a carbonaceous gas. A dielectric backing is made of a high-temperature resistant material and discrete elements of the addressable field-emission electrode are made of a high-temperature resistant metal. The growth rate of the emission layer on the dielectric backing is smaller than the growth rate of the emission layer on the metallic discrete elements as a result of a selected process of depositing the carbonaceous emission layer, namely the backing temperature, the temperature of the reactor threads, the pumping speed of a gas mixture through the reactor, a selected distance between the reactor threads and the backing and a settling time. The cathode metallic discrete elements can be made of two metallic layers.

Abstract: Nanotubes and nanotube-based devices are implemented in a variety of applications. According to an example embodiment of the present invention, a nanotube device is manufactured having a nanotube extending between two conductive elements. In one implementation, each conductive element includes a catalyst portion, wherein electrical connection is made to opposite ends of the nanotube at each of the catalyst portions. In one implementation, the conductive elements are coupled to circuitry for detecting an electrical characteristic of the nanotube, such as the response of the nanotube to exposure to one or more of a variety of materials. In another implementation, the nanotube device is adapted for chemical and biological sensing. In still another implementation, a particular functionality is imparted to the nanotube using one or more of a variety of materials coupled to the nanotube, such as metal particles, biological particles and/or layers of the same.

Abstract: An isolated thermal interface is presented. The inventive interface includes a flexible graphite sheet having two major surfaces, at least one of the major surfaces coated with a protective coating sufficient to inhibit flaking of the particles of graphite.

Abstract: The invention concerns a method for blacking components. In order to develop a method which creates black surfaces on components which are not inclined to peal off, and in which no fluids or baths are used which are expensive to produce, maintain or dispose of, it is proposed that the surfaces of the component are subjected to a heat treatment with simultaneous administration of a carbon-emitting medium inside the processing space. Furthermore, the invention concerns a device that can be operated using the method of the invention.

Abstract: A method for making a magnetic disk comprises forming first and second protective carbon layers on a magnetic layer. The first protective carbon layer is predominantly SP3 carbon. The second protective carbon layer comprises about 50% or less SP3 carbon. The second protective carbon layer is very thin, e.g. between 0.1 and 1.0 nm thick. A lubricant layer (e.g. a perfluoropolyether lubricant) is applied to the second protective carbon layer. The second protective carbon layer facilitates improved cooperation between lubricant and the disk.

Abstract: The present invention provides a method of producing an electron emitting device using a carbon fiber using a catalyst, capable of preferably growing carbon fibers at a low temperature without the need of a high temperature process for growing the carbon fibers or a high temperature alloy process on a substrate, and growing the carbon fibers by a density capable of applying an electric field necessary for the electron emission further effectively. Using alloy particles containing Pd and at least one element selected from the group consisting of Fe, Co, Ni, Y, Rh, Pt, La, Ce, Pr, Nd, Gd, Tb, Dy, Ho, Er, and Lu as the catalyst, a dispersion of the alloy particles is applied on a carbon fiber producing subject surface for providing the alloy particles so as to grow the carbon fibers.

Abstract: Carbon nanotubes are formed on a substrate by providing a coiled filament in a chemical vapor deposition chamber, supporting a substrate having a catalytic coating provided thereon inside the coiled filament, evacuating air, if present, from the chamber, heating the filament and applying a bias voltage between the filament and the substrate, introducing a reactant gas into the chamber, and pyrolyzing the reactant gas to deposit the carbon nanotubes on the catalytic coating. The substrate can be in the form of a rod or fiber and the carbon nanotubes can be deposited in a radially extending cluster on the substrate. The present invention also contemplates an apparatus for carrying out the inventive method.

Abstract: Carbon nanotubes are directly grown on a substrate surface having three metal layers thereon by a thermal chemical vapor deposition at low-temperature, which can be used as an electron emission source for field emission displays. The three layers include a layer of an active metal catalyst sandwiched between a thick metal support layer formed on the substrate and a bonding metal layer. The active metal catalyst is iron, cobalt, nickel or an alloy thereof; the metal support and the bonding metal independently are Au, Ag, Cu, Pd, Pt or an alloy thereof; and they can be formed by sputtering, chemical vapor deposition, physical vapor deposition, screen printing or electroplating.

Abstract: A method of manufacturing carbon cylindrical structures, as represented by carbon nanotubes, by growing them on a substrate using a chemical vapor deposition (CVD) method, comprising the steps of implanting metal ions to the substrate surface and then growing the carbon cylindrical structures using the metal ions as a catalyst. A method of manufacturing carbon nanotubes comprising a step of using nano-carbon material as seed material for growing carbon nanotubes is also disclosed. A biopolymer detection device comprising vibration inducing means for inducing vibration, binding means capable of resonating with the vibration induced by the vibration inducing means and capable of binding or interacting with a target biopolymer, and detection means for detecting whether or not the binding means have bound or interacted with the target biopolymer, is also disclosed.

Abstract: A method for making a magnetic disk comprises forming first and second protective carbon layers on a magnetic layer. The first protective carbon layer is predominantly SP3 carbon. The second protective carbon layer comprises about 50% or less SP3 carbon. The second protective carbon layer is very thin, e.g. between 0.1 and 1.0 nm thick. A lubricant layer (e.g. a perfluoropolyether lubricant) is applied to the second protective carbon layer. The second protective carbon layer facilitates improved cooperation between lubricant and the disk.

Abstract: A hard carbon thin film formed on a substrate has a graded structure in which a ratio of sp2 to sp3 carbon-carbon bonding in the thin film decreases in its thickness direction from a thin film/substrate interface toward a surface of the thin film. A method of forming the thin film involves varying the film-forming ion species over time to produce the composition gradient or structural gradient in the thickness direction of the thin film.

Abstract: A porous preform body is infiltrated with carbon by a thermal gradient process using a multi-portion heating element to heat the body. Selected portions of the heating element are supplied with power to create the thermal gradient between different areas of the preform body.

Abstract: A method for enabling the formation of a carbonaceous hard film having a high hardness, strong adherence to the substrate, a wide range of substrate compatibility, and structural stability, which can be formed at room temperature and may cover a large area. The method includes vapor depositing a hard film of a carbonaceous material onto a substrate under vacuum by depositing a vaporized, hydrogen free carbonaceous material, which may be ionized or non-ionized, onto the substrate surface while irradiating the carbonaceous material with gas cluster ions, generated by ionizing gas clusters to form the film.