Plural Coatings Applied Utilizing Vapor, Gas, Or Smoke Patents (Class 427/255.15)
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Patent number: 12116678Abstract: A component configured to be in contact with a hydrocarbon fluid and a method of preparing a contact surface of the component. The component may include a wall having the contact surface configured to be in contact with the hydrocarbon fluid. The contact surface is formed from a metal comprising a metal M, where M is selected from the group consisting of nickel (Ni), palladium (Pd), and platinum (Pt). A metal-ligand complex comprising phosphorus (P) is on the contact surface. The method of preparing a contact surface of the component may include treating the contact surface with a metal-ligand complex precursor comprising a phosphorus (P) ligand.Type: GrantFiled: May 19, 2023Date of Patent: October 15, 2024Assignee: GENERAL ELECTRIC COMPANYInventors: Lawrence B. Kool, Alfred Albert Mancini, Bangalore Aswatha Nagaraj
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Patent number: 11686003Abstract: A component configured to be in contact with a hydrocarbon fluid and a method of preparing a contact surface of the component. The component may include a wall having the contact surface configured to be in contact with the hydrocarbon fluid. The contact surface is formed from a metal comprising a metal M, where M is selected from the group consisting of nickel (Ni), palladium (Pd), and platinum (Pt). A metal-ligand complex comprising phosphorus (P) is on the contact surface. The method of preparing a contact surface of the component may include treating the contact surface with a metal-ligand complex precursor comprising a phosphorus (P) ligand.Type: GrantFiled: June 3, 2021Date of Patent: June 27, 2023Assignee: GENERAL ELECTRIC COMPANYInventors: Lawrence B. Kool, Alfred Albert Mancini, Bangalore Aswatha Nagaraj
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Patent number: 11465935Abstract: An article includes a glass substrate including two main faces defining two main surfaces separated by edges and a temporary protective layer comprising an organic polymer matrix deposited on at least one portion of a main surface of the glass substrate, wherein the temporary protective layer has a rough surface defined by a surface roughness parameter Sa, corresponding to the arithmetic mean height of the profile of the surface, of greater than 0.2 ?m.Type: GrantFiled: April 24, 2018Date of Patent: October 11, 2022Assignee: SAINT-GOBAIN GLASS FRANCEInventors: Lucie Devys, François Guillemot
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Patent number: 9418849Abstract: A method includes forming a sacrificial layer over a bottom substrate. The sacrificial layer is patterned based on a desired etching distance. A top layer is formed over the sacrificial layer. At least one release hole is formed through the top layer. The sacrificial layer is etched through the at least one release hole.Type: GrantFiled: June 6, 2013Date of Patent: August 16, 2016Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Kuei-Sung Chang, Yi Heng Tsai
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Patent number: 9352955Abstract: This invention relates generally to semiconductor manufacturing and packaging and more specifically to semiconductor manufacturing in MEMS (Microelectromechanical systems) inertial sensing products. Embodiments of the present invention improve pressure sensor performance (e.g., absolute and relative accuracy) by increasing pressure insensitivity to changes in thermo-mechanical stress. The pressure insensitivity can be achieved by using the array of pressure sensing membranes, suspended sensing electrodes, and dielectric anchors.Type: GrantFiled: November 10, 2014Date of Patent: May 31, 2016Assignee: Maxim Integrated Products, Inc.Inventors: Antonio Molfese, Luca Coronato, Gabriele Cazzaniga, Luigi Esposito
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Patent number: 9040121Abstract: Vacuum deposited thin films of material are described to create an interface that non-preferentially interacts with different domains of an underlying block copolymer film. The non-preferential interface prevents formation of a wetting layer and influences the orientation of domains in the block copolymer. The purpose of the deposited polymer is to produce nanostructured features in a block copolymer film that can serve as lithographic patterns.Type: GrantFiled: February 7, 2013Date of Patent: May 26, 2015Assignee: Board of Regents The University of Texas SystemInventors: C. Grant Willson, William Durand, Christopher John Ellison, Christopher Bates, Takehiro Seshimo, Julia Cushen, Logan Santos, Leon Dean, Erica Rausch
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Patent number: 9017762Abstract: The invention relates to sputter targets and methods for depositing a layer from a sputter target. The method preferably includes the steps of: placing a sputter target in a vacuum chamber; placing a substrate having a substrate surface in the vacuum chamber; reducing the pressure in the vacuum chamber to about 100 Torr or less; removing atoms from the surface of the sputter target while the sputter target is in the vacuum chamber (e.g., using a magnetic field and/or an electric field). The deposited layer preferably is a molybdenum containing alloy including about 50 atomic percent or more molybdenum, 0.5 to 45 atomic percent of a second metal element selected from the group consisting of niobium and vanadium; and 0.5 to 45 atomic percent of a third metal element selected from the group consisting of tantalum, chromium, vanadium, niobium, and titanium.Type: GrantFiled: April 4, 2013Date of Patent: April 28, 2015Assignee: H.C. Starck, Inc.Inventors: Gary Alan Rozak, Mark E. Gaydos, Patrick Alan Hogan, Shuwei Sun
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Patent number: 8956510Abstract: The present invention relates generally to methods for producing metallic products comprising a substrate and a metallic, external coating. In preferred embodiments, the metallic products are jewelry articles.Type: GrantFiled: June 1, 2012Date of Patent: February 17, 2015Assignee: Frederick Goldman, Inc.Inventor: Andrew Derrig
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Patent number: 8932437Abstract: The present invention relates generally to methods for producing a coated jewelry article or a coated component of a jewelry article, comprising a jewelry article or a component of a jewelry article, a first metallic coating, and a second metallic coating.Type: GrantFiled: June 1, 2012Date of Patent: January 13, 2015Assignee: Frederick Goldman, Inc.Inventor: Andrew Derrig
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Publication number: 20140312099Abstract: A friction stir welding tool for welding of metallic plates and especially steel plates. The friction stir welding tool is made of cemented carbide comprising WC grains in a binder phase and wherein the welding tool is at least partly coated with a surface coating comprising Al2O3.Type: ApplicationFiled: November 9, 2012Publication date: October 23, 2014Inventors: Stefan Ederyd, Henrik Nordenstrom
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Patent number: 8858666Abstract: A coating for a cutting tool, which includes a plurality of mutually superposed layers, characterized in that the coating has an outer cover layer with a first layer portion of metallic aluminium or an aluminium alloy and a second layer portion arranged thereover of aluminium oxide or a mixed oxide which contains aluminium and at least one further metal.Type: GrantFiled: August 26, 2010Date of Patent: October 14, 2014Assignee: Walter AGInventor: Veit Schier
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Patent number: 8859052Abstract: Methods of making components having calcium magnesium aluminosilicate (CMAS) mitigation capability include providing a component, applying an environmental barrier coating to the component, where the environmental barrier coating includes a CMAS mitigation composition selected from the group consisting of zinc aluminate spinel, alkaline earth zirconates, alkaline earth hafnates, rare earth gallates, beryl, and combinations thereof.Type: GrantFiled: November 30, 2012Date of Patent: October 14, 2014Assignee: General Electric CompanyInventors: Glen Harold Kirby, Brett Allen Boutwell, John Frederick Ackerman
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Publication number: 20140272298Abstract: A layered coating for a sapphire component is described herein. The sapphire component comprises one or more layers of alumina adhered to the surface of a sapphire member. At least the first layer of alumina adheres to the surface of the sapphire member filling all defects in the surface forming a pristine new layer that also provides isolation from damage.Type: ApplicationFiled: March 14, 2014Publication date: September 18, 2014Applicant: Apple Inc.Inventors: Dale N. Memering, Christopher D. Prest, Matthew Rogers
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Patent number: 8802183Abstract: The system of the present invention includes a conductive element, an electronic component, and a partial power source in the form of dissimilar materials. Upon contact with a conducting fluid, a voltage potential is created and the power source is completed, which activates the system. The electronic component controls the conductance between the dissimilar materials to produce a unique current signature. The system can also measure the conditions of the environment surrounding the system.Type: GrantFiled: July 11, 2011Date of Patent: August 12, 2014Assignee: Proteus Digital Health, Inc.Inventors: Jeremy Frank, Peter Bjeletich, Hooman Hafezi, Robert Azevedo, Robert Duck, Iliya Pesic, Benedict Costello, Eric Snyder
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Patent number: 8801817Abstract: A surface-coated cutting tool according to the present invention includes a base material and a coating film formed on the base material. The coating film includes at least one TiCN layer. The TiCN layer has a columnar crystal region. The columnar crystal region is characterized by having a composition of TiCxNy (in which 0.65?x/(x+y)?0.90) and having a (422) plane having a plane spacing of 0.8765 ? to 0.8790 ?.Type: GrantFiled: July 4, 2011Date of Patent: August 12, 2014Assignee: Sumitomo Electric Hardmetal Corp.Inventors: Anongsack Paseuth, Yoshio Okada, Hideaki Kanaoka, Chikako Kojima, Erika Iwai
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Patent number: 8795767Abstract: Luminescent materials and the use of such materials in anti-counterfeiting, inventory, photovoltaic, and other applications are described herein. In one embodiment, a method of forming a luminescent material includes: (1) providing a source of A and X, wherein A is selected from at least one of elements of Group 1, and X is selected from at least one of elements of Group 17; (2) providing a source of B, wherein B is selected from at least one of elements of Group 14; (3) subjecting the source of A and X and the source of B to vacuum deposition to form a set of films adjacent to a substrate; and (4) heating the set of films to a temperature in the range of 120° C. to 350° C. to form a luminescent material adjacent to the substrate, wherein the luminescent material includes A, B, and X.Type: GrantFiled: November 2, 2009Date of Patent: August 5, 2014Assignee: OMNIPV, Inc.Inventors: William M. Pfenninger, Nemanja Vockic, John Kenney
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Patent number: 8741428Abstract: A surface-coated cutting tool according to the present invention includes a base material and a coating film formed on the base material. The coating film includes at least one TiCN layer. The TiCN layer has a columnar crystal region. The columnar crystal region is characterized by having a composition of TiCxNy(in which 0.65?x/(x+y)?0.90), having a (422) plane having a plane spacing of 0.8765 ? to 0.8790 ? and having TC (220) showing a maximum value in an orientation index TC (hkl).Type: GrantFiled: July 4, 2011Date of Patent: June 3, 2014Assignee: Sumitomo Electric Hardmetal Corp.Inventors: Anongsack Paseuth, Yoshio Okada, Chikako Kojima, Hideaki Kanaoka, Erika Iwai, Hiroyuki Morimoto
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Patent number: 8728571Abstract: Provided is a fabrication method for a functional surface that has self-cleaning ability and superhydrophilic anti-reflective property, which includes a) arranging a plurality of beads having a sphere shape on a surface of a transparent substrate; b) forming a predetermined inter-bead gap by etching the plurality of beads; c) forming a surface unevenness on the surface of the substrate by etching the substrate using the plurality of the beads having the predetermined gap as an etching mask; d) removing the plurality of the beads from the surface of the substrate; and e) forming a photocatalytic layer or a compound layer having a surface tension of 18 to 28 N/m on the surface of the substrate formed with the surface unevenness.Type: GrantFiled: July 28, 2010Date of Patent: May 20, 2014Assignee: Korea Institute of Machinery and MaterialsInventors: Hyuneui Lim, Seungmuk Ji, Jun-Hee Lee, Wan-Doo Kim
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Publication number: 20140072816Abstract: A bond layer may include a composition that may be stable at temperatures above about 1410° C. An article may include a substrate, a bond layer formed on the substrate, and an overlayer formed over the bond layer. In some examples, the bond layer may include a substantially homogeneous mixture of Si and at least one of SiO2, Al2O3, ZrO2, a rare earth oxide, ZrSiO4, TiO2, Ta2O5, B2O3, an alkali metal oxide, or an alkali earth metal oxide. In other examples, the bond layer may include Si, an alkali metal oxide, and at least one of SiO2, Al2O3, ZrO2, HfO2, a rare earth oxide, ZrSiO4, HfSiO4, TiO2, Ta2O5, B2O3, or an alkali earth metal oxide. In other examples, the bond layer may include B2O3.Type: ApplicationFiled: March 22, 2012Publication date: March 13, 2014Applicant: ROLLS-ROYCE CORPORATIONInventor: Kang N. Lee
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Patent number: 8658255Abstract: Methods of making components having calcium magnesium aluminosilicate (CMAS) mitigation capability involving providing a component; applying an environmental barrier coating to the component, the environmental barrier coating having a separate CMAS mitigation layer including a CMAS mitigation composition selected from rare earth elements, rare earth oxides, zirconia, hafnia partially or fully stabilized with alkaline earth or rare earth elements, zirconia partially or fully stabilized with alkaline earth or rare earth elements, magnesium oxide, cordierite, aluminum phosphate, magnesium silicate, and combinations thereof.Type: GrantFiled: December 19, 2008Date of Patent: February 25, 2014Assignee: General Electric CompanyInventors: Glen Harold Kirby, Brett Allen Boutwell, Ming Fu, Bangalore Aswatha Nagaraj, Brian Thomas Hazel
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Patent number: 8545940Abstract: A reactor configured to subject a substrate to alternately repeated surface reactions of vapor-phase reactants is disclosed. The reactor may include a reaction chamber that defines a reaction space and a gas flow control guide structure; and a substrate holder. The gas flow control guide includes one or more channels. Each of the channels widens as the channel extends from the inlet to the reaction space. At least one of the channels is configured to generate a non-uniform laminar flow at a first portion of the periphery of the reaction space such that the laminar flow includes a plurality of flow paths that provide different amounts of a fluid. The reaction chamber may include a reactor base and a reactor cover detachable from each other; and a driver configured to independently adjust at least three portions of the reactor base to provide a substantially perfect seal to the reactor space.Type: GrantFiled: August 30, 2012Date of Patent: October 1, 2013Assignee: ASM Genitech Korea Ltd.Inventors: Seung Woo Choi, Gwang Lae Park, Chun Soo Lee, Jeong Ho Lee, Young Seok Choi
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Publication number: 20130224519Abstract: In one aspect, coated cutting tools are described herein which, in some embodiments, can demonstrate improved wear resistance in one or more cutting applications. In some embodiments, a coated cutting tool described herein comprises a substrate and a coating adhered to the substrate, the coating comprising an inner layer deposited by physical vapor deposition and an outer deposited by physical vapor deposition over the inner layer.Type: ApplicationFiled: April 10, 2013Publication date: August 29, 2013Applicant: Kennametal Inc.Inventor: Kennametal Inc.
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Patent number: 8501277Abstract: A method of providing a durable protective coating structure which comprises at least three layers, and which is stable at temperatures in excess of 400° C., where the method includes vapor depositing a first layer deposited on a substrate, wherein the first layer is a metal oxide adhesion layer selected from the group consisting of an oxide of a Group IIIA metal element, a Group IVB metal element, a Group VB metal element, and combinations thereof; vapor depositing a second layer upon said first layer, wherein said second layer includes a silicon-containing layer selected from the group consisting of silicon oxide, silicon nitride, and silicon oxynitride; and vapor depositing a third layer upon said second layer, wherein said third layer is a functional organic-comprising layer. Numerous articles useful in electronics, MEMS, nanoimprinting lithography, and biotechnology applications can be fabricated using the method.Type: GrantFiled: May 5, 2008Date of Patent: August 6, 2013Assignee: Applied Microstructures, Inc.Inventors: Boris Kobrin, Dangaria Nikunji Hirji, Romuald Nowak, Michael T. Grimes
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Patent number: 8470434Abstract: The invention relates to a transparent glass substrate, associated with a transparent electro-conductive layer capable of constituting an electrode of a photovoltaic cell and composed of a doped oxide, characterized by the interposition, between the glass substrate and the transparent electroconductive layer, of a mixed layer of one or more first nitride(s) or oxynitride(s), or oxide(s) or oxycarbide(s) having good adhesive properties with glass, and one or more second nitride(s) or oxynitride(s) or oxide(s) or oxycarbide(s) capable of constituting, possibly in the doped state, a transparent electroconductive layer; a method for producing this substrate; a photovoltaic cell, a tempered and/or curved glass, a shaped heating glass, a plasma screen and a flat lamp electrode having this substrate.Type: GrantFiled: January 14, 2008Date of Patent: June 25, 2013Assignee: Saint-Gobain Glass FranceInventors: Bernard Nghiem, Emilie Viasnoff, Bertrand Kuhn, David Le Bellac, Anne Durandeau, Fabrice Abbott, Eddy Royer, Georges Zagdoun, Olivier Dubois
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Patent number: 8449941Abstract: Disclosed is a method for formation of a thermal bather coating on a gas turbine during operation thereof, which includes addition of an organic compound containing silicon to a fuel under a first condition in order to form a base layer on the surface of a part coming into contact with a combustion gas of the fuel in the gas turbine during operation thereof, as well as addition of the organic compound containing silicon to the fuel under a second condition in order to form a porous layer having more pores than the base layer above the base layer.Type: GrantFiled: November 10, 2009Date of Patent: May 28, 2013Assignees: Korea Electric Power Corporation, Korea Southern Power Co., LtdInventors: Min Tae Kim, Doo Soo Kim, Won Young Oh
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Patent number: 8440259Abstract: A combinatorial processing chamber and method are provided. In the method a fluid volume flows over a surface of a substrate with differing portions of the fluid volume having different constituent components to concurrently expose segregated regions of the substrate to a mixture of the constituent components that differ from constituent components to which adjacent regions are exposed. Differently processed segregated regions are generated through the multiple flowings.Type: GrantFiled: January 14, 2008Date of Patent: May 14, 2013Assignee: Intermolecular, Inc.Inventors: Tony P. Chiang, Sunil Shanker, Chi-I Lang
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Publication number: 20130071566Abstract: A chemical vapor deposition process for the deposition of a silica layer on a glass substrate is provided. The process includes providing a glass substrate. The process also includes forming a gaseous precursor mixture comprising a silane compound, oxygen, water vapor, and a radical scavenger and directing the precursor mixture toward and along the glass substrate. The mixture reacts over the glass substrate to form a silica coating thereon.Type: ApplicationFiled: September 5, 2012Publication date: March 21, 2013Applicant: Pilkington Group LimitedInventor: Douglas M. Nelson
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Patent number: 8318329Abstract: The radiation-selective absorber coating (20) has two barrier layers (24a, 24b), an IR-reflecting layer (21) arranged thereon, an absorption layer (22) arranged above the IR-reflecting (21) and an antireflection layer (23) over the absorption layer (22). The absorber tube (13) is a steel tube (1) with the radiation-selective absorber coating (20) applied to the outside thereof. In the process of coating the absorber tube (13) a first oxide barrier layer (24a) is applied to a steel tube by thermal oxidation; a second barrier layer (24b) is then applied by physical gas phase deposition of silicon with supply of oxygen; the IR-reflecting layer (21) is then applied by gas phase deposition of gold, silver, platinum or copper; the absorption layer (22) is then applied by deposition of aluminum and molybdenum; and a final antireflection layer (23) is applied by deposition of silicon with supply of oxygen.Type: GrantFiled: February 17, 2009Date of Patent: November 27, 2012Assignee: Schott AGInventors: Kamel Silmy, Jan Schulte-Fischedick, Thomas Kuckelkorn, Christina Hildebrandt, Wolfgang Graf, Andreas Georg
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Patent number: 8287956Abstract: A silicon oxide layer is formed by oxidation or decomposition of a silicon precursor gas in an oxygen-rich environment followed by annealing. The silicon oxide layer may be formed with slightly compressive stress to yield, following annealing, an oxide layer having very low stress. The silicon oxide layer thus formed is readily etched without resulting residue using HF-vapor.Type: GrantFiled: October 14, 2009Date of Patent: October 16, 2012Assignee: Robert Bosch GmbHInventors: Aaron Partridge, Markus Lutz, Silvia Kronmueller
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Publication number: 20120237792Abstract: In one aspect, coated cutting tools are described herein which, in some embodiments, can demonstrate improved wear resistance in one or more cutting applications. In some embodiments, a coated cutting tool described herein comprises a substrate and a coating adhered to the substrate, the coating comprising an inner layer deposited by physical vapor deposition and an outer deposited by physical vapor deposition over the inner layer.Type: ApplicationFiled: March 18, 2011Publication date: September 20, 2012Applicant: Kennametal Inc.Inventors: Aharon Inspektor, Nicholas Waggle, JR., Michael F. Beblo, Mark J. Rowe, Zhigang Ban
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Patent number: 8236433Abstract: An antireflection structure is provided. The antireflection structure includes a substrate layer having a substrate refractive index; a first inorganic layer disposed on the substrate layer and having a first refractive index different from the substrate refractive index, where a thickness of the first inorganic layer is in a range of 1 to 40 nm; and a second inorganic layer disposed on the first inorganic layer and having a second refractive index different from the first refractive index.Type: GrantFiled: September 26, 2008Date of Patent: August 7, 2012Assignee: National Applied Research LaboratoriesInventors: Po-Kai Chiu, Wen-Hao Cho, Hung-Ping Chen, Han-Chang Pan, Chien-Nan Hsiao
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Patent number: 8211500Abstract: A Cu film is deposited on a substrate by ALD (Atomic Layer Deposition) process, in which: a Cu-carboxyl acid complex or a derivative thereof having a high vapor pressure and wettability to a base is used in a gasified state; H2 is used as a reductive gas; and a step of adsorbing a source material gas to a substrate and a step of forming a Cu film by reducing the adsorbed gas with a reductive gas are repeated alternately. With this method, a conformal Cu film having excellent quality can be formed.Type: GrantFiled: February 25, 2005Date of Patent: July 3, 2012Assignee: Tokyo Electron LimitedInventors: Yasuhiko Kojima, Naoki Yoshii
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Patent number: 8182877Abstract: A method of manufacturing a composite material, the method comprising: growing two or more layers of reinforcement in-situ; and impregnating each layer with a matrix before growing the next layer. The reinforcement layers may be formed by a chemical vapor deposition process. The method can be used as an additive layer manufacturing technique to form a component with a desired shape and physical characteristics.Type: GrantFiled: March 2, 2009Date of Patent: May 22, 2012Assignee: Airbus Operations LimitedInventors: Benjamin Lionel Farmer, Daniel Mark Johns, John Maurice Price
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Patent number: 8147909Abstract: Provided is a method for processing a wafer that includes providing an alloy susceptor including an exterior surface and a wafer contact surface. The exterior surface of the alloy susceptor is treated to produce a roughness of the exterior surface. The roughened exterior surface of is coated with a ceramic material. The alloy susceptor including the ceramic-coated roughened exterior surface is positioned in a wafer process chamber. A plurality of layers of a film are deposited on the ceramic-coated roughened exterior surface of the alloy susceptor, wherein a first adhesion exists between the plurality of layers of the film and the ceramic material coated on the roughened exterior surface of the alloy susceptor that is greater than a second adhesion that would exist between the plurality of layers of the film and a non-roughened exterior surface of the alloy susceptor without the ceramic material.Type: GrantFiled: March 26, 2009Date of Patent: April 3, 2012Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Shuo-Jieh Wu, Hsu Chun Yuan, Tung-Li Lee, Steven Li, Hs Chiu, Yen-Yu Chen, Alan Chen, Ming Jie He, Yu-Wei Hsueh
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Patent number: 8124275Abstract: To smoothly deliver a thermal energy required in an active site of a catalyst carried on a carrier. A method of manufacturing a catalyst carrier of the present invention includes the steps of: forming a mixed thin film in which at least metal and ceramics are mixed on a metal base, by spraying aerosol, with metal powders and ceramic powders mixed therein, on the metal base; and making the mixed thin film porous, by dissolving the metal of the mixed thin film into acid or alkaline solution to remove this metal.Type: GrantFiled: January 28, 2009Date of Patent: February 28, 2012Assignee: Hitachi Cable, Ltd.Inventors: Mineo Washima, Kenji Shibata, Fumihito Oka
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Publication number: 20120021137Abstract: A method for manufacturing a cutting tool includes the steps of providing a body of cermet or cemented carbide, having a cutting edge with an edge radius Re smaller than 40 ?m, a flank a rake face, applying by PVD a single or a multilayer coating to at least a part of the surface of the body, comprising at least a part of the cutting edge and applying by PVD said single or multilayer coating, comprising PVD coating with at least one oxidic layer.Type: ApplicationFiled: September 29, 2011Publication date: January 26, 2012Applicant: OERLIKON TRADING AG, TRUEBBACHInventors: Dennis T. QUINTO, Christian WOHLRAB, Jürgen RAMM
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Patent number: 8101521Abstract: The methods described herein relate to deposition of low resistivity, highly conformal tungsten nucleation layers. These layers serve as a seed layers for the deposition of a tungsten bulk layer. The methods are particularly useful for tungsten plug fill in which tungsten is deposited in high aspect ratio features. The methods involve depositing a nucleation layer by a combined PNL and CVD process. The substrate is first exposed to one or more cycles of sequential pulses of a reducing agent and a tungsten precursor in a PNL process. The nucleation layer is then completed by simultaneous exposure of the substrate to a reducing agent and tungsten precursor in a chemical vapor deposition process. In certain embodiments, the process is performed without the use of a borane as a reducing agent.Type: GrantFiled: December 11, 2009Date of Patent: January 24, 2012Assignee: Novellus Systems, Inc.Inventors: Juwen Gao, Lana Hiului Chan, Panya Wongsenakhum
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Patent number: 8071163Abstract: Methods and compositions for depositing high-k films are disclosed herein. In general, the disclosed methods utilize precursor compounds comprising Ta or Nb. More specifically, the disclosed precursor compounds utilize certain ligands coupled to Ta and/or Nb such as 1-methoxy-2-methyl-2-propanolate (mmp) to increase volatility. Furthermore, methods of depositing Ta or Nb compounds are disclosed in conjunction with use of Hf and/or Zr precursors to deposit Ta-doped or Nb-doped Hf and/or Zr films. The methods and compositions may be used in CVD, ALD, or pulsed CVD deposition processes.Type: GrantFiled: April 7, 2008Date of Patent: December 6, 2011Assignee: L'Air Liquide Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges ClaudeInventor: Christian Dussarrat
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Publication number: 20110262233Abstract: The present invention relates to a tool for metal machining comprising a tool substrate of cemented carbide, cermet, ceramics or a super hard material, and a coating comprising an inner alumina layer and an outer titanium boronitride layer, wherein said layers are separated by one or more layers comprising an oxide layer other than an alumina layer, and a method of making the tool.Type: ApplicationFiled: October 9, 2009Publication date: October 27, 2011Inventor: Per Martensson
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Patent number: 8034727Abstract: A semiconductor device manufacturing method according to the present invention uses a first raw material gas containing Si, a second raw material gas containing a metal element M and an oxidation gas, in which a first step of supplying the oxidation gas onto a substrate to be treated, and a second step of supplying the first raw material gas are sequentially performed. The method further includes, after the first and second steps, a step of supplying the second raw material gas or gas mixture of the first raw material gas and the second raw material gas.Type: GrantFiled: October 13, 2006Date of Patent: October 11, 2011Assignee: NEC CorporationInventor: Takashi Nakagawa
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Patent number: 7968201Abstract: A multi-layer thin film stack, particularly suitable as a component of a solar cell, is deposited on a transparent dielectric substrate. The multi-layer film stack comprises a transparent electrically conductive metal oxide layer deposited over the dielectric substrate, the conductive metal oxide layer having a refractive index less than 2.0, a light transmittance optimizing interlayer having a refractive index between 2.3 and 3.5, deposited over the electrically conductive metal oxide layer, and a silicon layer having a refractive index of at least 4.5 deposited over the light transmittance optimizing interlayer. The film stack can be deposited by any suitable method, but deposition of each of these layers by atmospheric chemical vapor deposition is preferred.Type: GrantFiled: August 24, 2006Date of Patent: June 28, 2011Assignees: Pilkington Group Limited, Pilkington North America, Inc.Inventors: Douglas M. Nelson, Gary Nichol, Srikanth Varanasi
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Patent number: 7968147Abstract: The present invention relates to ceramic cutting tools, such as, an aluminum oxide with zirconium oxide ceramic cutting tool with diffusion bonding enhanced layer and CVD coatings, particularly useful for machining modern metal materials. The method comprises a chemical reaction with a mixture including nitrogen and aluminum chloride introduced to form a diffusion bonding enhanced layer between the ceramic substrate and the CVD coatings. Thus formed diffusion bonding enhanced layer is highly adherent to the aluminum oxide with zirconium oxide ceramic substrate and significantly enhances the CVD coating properties, thus improving the machining performance in terms of the tool life of zirconium-based aluminum oxide with zirconium oxide ceramic cutting tools.Type: GrantFiled: March 13, 2009Date of Patent: June 28, 2011Assignee: TDY Industries, Inc.Inventors: X. Daniel Fang, David J. Wills, Gilles Festeau
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Patent number: 7919143Abstract: A carrier for an object, preferably a substrate of a semiconductor component such as a wafer, includes a receiving element for the object and gas outlets arranged below the receiving element along the object received. At least sections of the carrier are made of a material which including stabilizing fibers and having a porosity which forms the gas outlets, in order to enable a desired gas to exit from the gas outlets in a dosed and finely distributed manner.Type: GrantFiled: December 6, 2004Date of Patent: April 5, 2011Assignee: Schunk Kohlensteofftechnik GmbHInventor: Stefan Schneweis
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Patent number: 7914849Abstract: A new and refined method to produce ?-Al2O3 layers in a temperature range of from about 750 to about 1000° C. with a controlled growth texture and substantially enhanced wear resistance and toughness than the prior art is disclosed. The ?-Al2O3 layer of the present invention is formed on a bonding layer of (Ti,Al)(C,O,N) with increasing aluminium content towards the outer surface. Nucleation of ?-Al2O3 is obtained through a nucleation step being composed of short pulses and purges consisting of Ti/Al-containing pulses and oxidising pulses. The ?-Al2O3 layer according to the present invention has a thickness ranging from about 1 to about 20 ?m and is composed of columnar grains. The length/width ratio of the alumina grains is from about 2 to about 12, preferably from about 4 to about 8. The layer is characterized by a strong (104) growth texture, measured using XRD, and by low intensity of (012), (110), (113), (024) and (116) diffraction peaks.Type: GrantFiled: August 22, 2008Date of Patent: March 29, 2011Assignee: Seco Tools ABInventor: Sakari Ruppi
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Publication number: 20100285290Abstract: A coated article includes a substrate and a first coating formed over at least a portion of the substrate. The first coating includes a mixture of oxides including oxides of at least two of P, Si, Ti, Al and Zr. A functional coating is formed over at least a portion of the first coating. In one embodiment, the functional coating includes fluorine doped tin oxide. In another embodiment, the functional coating includes titania.Type: ApplicationFiled: November 19, 2008Publication date: November 11, 2010Applicant: PPG INDUSTRIES OHIO, INC.Inventors: Songwei Lu, Caroline S. Harris, James McCamy, Ilya Koltover, Mehran Arbab, Cheri M. Boykin
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Publication number: 20100255345Abstract: A coated polycrystalline cubic boron nitride cutting insert useful in a cutting tool for removing material from a workpiece, and a method for making the same. The cutting insert including a polycrystalline cubic boron nitride substrate with a rake surface and at least one flank surface, and a cutting edge formed at the juncture between the rake surface and the flank surface. A wear-resistant coating scheme is on the polycrystalline cubic boron nitride substrate. The wear-resistant coating scheme includes the following coating layers. An inner coating layer region is on at least some of the rake surface and at least some of the flank surface of the polycrystalline cubic boron nitride substrate. An alumina-containing coating layer region, which has at least one exposed alumina coating layer, is on the inner coating layer region.Type: ApplicationFiled: March 11, 2010Publication date: October 7, 2010Applicant: Kennametal Inc.Inventors: Zhigang Ban, Yixiong Liu
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Patent number: 7785665Abstract: A coated body that includes a substrate and a coating scheme on the substrate. The coating scheme on the substrate wherein the coating scheme includes an alpha-alumina coating layer that exhibits a platelet grain morphology at the surface of the alpha-alumina coating layer or a kappa-alumina coating layer that exhibits either a lenticular grain morphology or a polyhedra-lenticular grain morphology at the surface thereof or an alpha-kappa-alumina coating layer that exhibits either a large multifaceted grain morphology or a polyhedra-multifaceted grain morphology at the surface thereof.Type: GrantFiled: March 31, 2006Date of Patent: August 31, 2010Assignee: Kennametal Inc.Inventors: Alfred S. Gates, Jr., Pankaj K. Mehrotra, Charles G. McNerny, Peter R. Leicht
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Patent number: 7758929Abstract: In a plasma processing apparatus in which a radio-frequency power from a radio-frequency power source is supplied to at least one of an upper electrode and a lower electrode disposed to vertically face each other in a process vessel, to thereby generate, in the process vessel, plasma with which a substrate is processed, a chemical component emitting member which is caused to emit a chemical component necessary for processing the substrate into the process vessel by entrance of ions in the plasma generated in the process vessel is provided in the process vessel in an exposed state, and an impedance varying circuit varying impedance on the chemical component emitting member side of the plasma generated in the process vessel to frequency of the radio-frequency power source is connected to the chemical component emitting member.Type: GrantFiled: March 27, 2007Date of Patent: July 20, 2010Assignee: Tokyo Electron LimitedInventors: Yohei Yamazawa, Noriaki Imai
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Publication number: 20100166512Abstract: Disclosed is a cutting tool having excellent wear resistance. Specifically disclosed is a cutting tool having a substrate and a coating layer formed on a surface of the substrate. The cutting tool is characterized in that the substrate contains at least cobalt; the coating layer includes at least a titanium nitride layer formed on the surface of the substrate, a titanium carbonitride layer formed on the surface of the titanium nitride layer, an intermediate layer formed on the surface of the titanium carbonitride layer and an aluminum oxide layer formed on the surface of the intermediate layer; the intermediate layer contains at least oxygen and titanium, and the aluminum oxide layer incorporates particles composed mainly of cobalt.Type: ApplicationFiled: February 27, 2007Publication date: July 1, 2010Applicant: Kyocera CorporationInventor: Takahito Tanibuchi
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Patent number: 7740823Abstract: A method of growing a III group nitride single crystal by using a metal-organic chemical vapor deposition (MOCVD) process, the method including: preparing an r-plane (1-102) substrate; forming a nitride-based nucleation layer on the substrate; and growing a nonpolar a-plane nitride gallium single crystal on the nitride-based nucleation layer while altering increase and decrease of a ratio of V/III group to alternate a horizontal growth mode and a vertical growth mode.Type: GrantFiled: October 23, 2007Date of Patent: June 22, 2010Assignee: Samsung Electronics Co., Ltd.Inventors: Oleg Ledyaev, Ki Ho Park, Si Hyuk Lee, Soo Min Lee