Plural Coatings Applied Utilizing Vapor, Gas, Or Smoke Patents (Class 427/255.15)
  • Patent number: 12116678
    Abstract: A component configured to be in contact with a hydrocarbon fluid and a method of preparing a contact surface of the component. The component may include a wall having the contact surface configured to be in contact with the hydrocarbon fluid. The contact surface is formed from a metal comprising a metal M, where M is selected from the group consisting of nickel (Ni), palladium (Pd), and platinum (Pt). A metal-ligand complex comprising phosphorus (P) is on the contact surface. The method of preparing a contact surface of the component may include treating the contact surface with a metal-ligand complex precursor comprising a phosphorus (P) ligand.
    Type: Grant
    Filed: May 19, 2023
    Date of Patent: October 15, 2024
    Assignee: GENERAL ELECTRIC COMPANY
    Inventors: Lawrence B. Kool, Alfred Albert Mancini, Bangalore Aswatha Nagaraj
  • Patent number: 11686003
    Abstract: A component configured to be in contact with a hydrocarbon fluid and a method of preparing a contact surface of the component. The component may include a wall having the contact surface configured to be in contact with the hydrocarbon fluid. The contact surface is formed from a metal comprising a metal M, where M is selected from the group consisting of nickel (Ni), palladium (Pd), and platinum (Pt). A metal-ligand complex comprising phosphorus (P) is on the contact surface. The method of preparing a contact surface of the component may include treating the contact surface with a metal-ligand complex precursor comprising a phosphorus (P) ligand.
    Type: Grant
    Filed: June 3, 2021
    Date of Patent: June 27, 2023
    Assignee: GENERAL ELECTRIC COMPANY
    Inventors: Lawrence B. Kool, Alfred Albert Mancini, Bangalore Aswatha Nagaraj
  • Patent number: 11465935
    Abstract: An article includes a glass substrate including two main faces defining two main surfaces separated by edges and a temporary protective layer comprising an organic polymer matrix deposited on at least one portion of a main surface of the glass substrate, wherein the temporary protective layer has a rough surface defined by a surface roughness parameter Sa, corresponding to the arithmetic mean height of the profile of the surface, of greater than 0.2 ?m.
    Type: Grant
    Filed: April 24, 2018
    Date of Patent: October 11, 2022
    Assignee: SAINT-GOBAIN GLASS FRANCE
    Inventors: Lucie Devys, François Guillemot
  • Patent number: 9418849
    Abstract: A method includes forming a sacrificial layer over a bottom substrate. The sacrificial layer is patterned based on a desired etching distance. A top layer is formed over the sacrificial layer. At least one release hole is formed through the top layer. The sacrificial layer is etched through the at least one release hole.
    Type: Grant
    Filed: June 6, 2013
    Date of Patent: August 16, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kuei-Sung Chang, Yi Heng Tsai
  • Patent number: 9352955
    Abstract: This invention relates generally to semiconductor manufacturing and packaging and more specifically to semiconductor manufacturing in MEMS (Microelectromechanical systems) inertial sensing products. Embodiments of the present invention improve pressure sensor performance (e.g., absolute and relative accuracy) by increasing pressure insensitivity to changes in thermo-mechanical stress. The pressure insensitivity can be achieved by using the array of pressure sensing membranes, suspended sensing electrodes, and dielectric anchors.
    Type: Grant
    Filed: November 10, 2014
    Date of Patent: May 31, 2016
    Assignee: Maxim Integrated Products, Inc.
    Inventors: Antonio Molfese, Luca Coronato, Gabriele Cazzaniga, Luigi Esposito
  • Patent number: 9040121
    Abstract: Vacuum deposited thin films of material are described to create an interface that non-preferentially interacts with different domains of an underlying block copolymer film. The non-preferential interface prevents formation of a wetting layer and influences the orientation of domains in the block copolymer. The purpose of the deposited polymer is to produce nanostructured features in a block copolymer film that can serve as lithographic patterns.
    Type: Grant
    Filed: February 7, 2013
    Date of Patent: May 26, 2015
    Assignee: Board of Regents The University of Texas System
    Inventors: C. Grant Willson, William Durand, Christopher John Ellison, Christopher Bates, Takehiro Seshimo, Julia Cushen, Logan Santos, Leon Dean, Erica Rausch
  • Patent number: 9017762
    Abstract: The invention relates to sputter targets and methods for depositing a layer from a sputter target. The method preferably includes the steps of: placing a sputter target in a vacuum chamber; placing a substrate having a substrate surface in the vacuum chamber; reducing the pressure in the vacuum chamber to about 100 Torr or less; removing atoms from the surface of the sputter target while the sputter target is in the vacuum chamber (e.g., using a magnetic field and/or an electric field). The deposited layer preferably is a molybdenum containing alloy including about 50 atomic percent or more molybdenum, 0.5 to 45 atomic percent of a second metal element selected from the group consisting of niobium and vanadium; and 0.5 to 45 atomic percent of a third metal element selected from the group consisting of tantalum, chromium, vanadium, niobium, and titanium.
    Type: Grant
    Filed: April 4, 2013
    Date of Patent: April 28, 2015
    Assignee: H.C. Starck, Inc.
    Inventors: Gary Alan Rozak, Mark E. Gaydos, Patrick Alan Hogan, Shuwei Sun
  • Patent number: 8956510
    Abstract: The present invention relates generally to methods for producing metallic products comprising a substrate and a metallic, external coating. In preferred embodiments, the metallic products are jewelry articles.
    Type: Grant
    Filed: June 1, 2012
    Date of Patent: February 17, 2015
    Assignee: Frederick Goldman, Inc.
    Inventor: Andrew Derrig
  • Patent number: 8932437
    Abstract: The present invention relates generally to methods for producing a coated jewelry article or a coated component of a jewelry article, comprising a jewelry article or a component of a jewelry article, a first metallic coating, and a second metallic coating.
    Type: Grant
    Filed: June 1, 2012
    Date of Patent: January 13, 2015
    Assignee: Frederick Goldman, Inc.
    Inventor: Andrew Derrig
  • Publication number: 20140312099
    Abstract: A friction stir welding tool for welding of metallic plates and especially steel plates. The friction stir welding tool is made of cemented carbide comprising WC grains in a binder phase and wherein the welding tool is at least partly coated with a surface coating comprising Al2O3.
    Type: Application
    Filed: November 9, 2012
    Publication date: October 23, 2014
    Inventors: Stefan Ederyd, Henrik Nordenstrom
  • Patent number: 8858666
    Abstract: A coating for a cutting tool, which includes a plurality of mutually superposed layers, characterized in that the coating has an outer cover layer with a first layer portion of metallic aluminium or an aluminium alloy and a second layer portion arranged thereover of aluminium oxide or a mixed oxide which contains aluminium and at least one further metal.
    Type: Grant
    Filed: August 26, 2010
    Date of Patent: October 14, 2014
    Assignee: Walter AG
    Inventor: Veit Schier
  • Patent number: 8859052
    Abstract: Methods of making components having calcium magnesium aluminosilicate (CMAS) mitigation capability include providing a component, applying an environmental barrier coating to the component, where the environmental barrier coating includes a CMAS mitigation composition selected from the group consisting of zinc aluminate spinel, alkaline earth zirconates, alkaline earth hafnates, rare earth gallates, beryl, and combinations thereof.
    Type: Grant
    Filed: November 30, 2012
    Date of Patent: October 14, 2014
    Assignee: General Electric Company
    Inventors: Glen Harold Kirby, Brett Allen Boutwell, John Frederick Ackerman
  • Publication number: 20140272298
    Abstract: A layered coating for a sapphire component is described herein. The sapphire component comprises one or more layers of alumina adhered to the surface of a sapphire member. At least the first layer of alumina adheres to the surface of the sapphire member filling all defects in the surface forming a pristine new layer that also provides isolation from damage.
    Type: Application
    Filed: March 14, 2014
    Publication date: September 18, 2014
    Applicant: Apple Inc.
    Inventors: Dale N. Memering, Christopher D. Prest, Matthew Rogers
  • Patent number: 8802183
    Abstract: The system of the present invention includes a conductive element, an electronic component, and a partial power source in the form of dissimilar materials. Upon contact with a conducting fluid, a voltage potential is created and the power source is completed, which activates the system. The electronic component controls the conductance between the dissimilar materials to produce a unique current signature. The system can also measure the conditions of the environment surrounding the system.
    Type: Grant
    Filed: July 11, 2011
    Date of Patent: August 12, 2014
    Assignee: Proteus Digital Health, Inc.
    Inventors: Jeremy Frank, Peter Bjeletich, Hooman Hafezi, Robert Azevedo, Robert Duck, Iliya Pesic, Benedict Costello, Eric Snyder
  • Patent number: 8801817
    Abstract: A surface-coated cutting tool according to the present invention includes a base material and a coating film formed on the base material. The coating film includes at least one TiCN layer. The TiCN layer has a columnar crystal region. The columnar crystal region is characterized by having a composition of TiCxNy (in which 0.65?x/(x+y)?0.90) and having a (422) plane having a plane spacing of 0.8765 ? to 0.8790 ?.
    Type: Grant
    Filed: July 4, 2011
    Date of Patent: August 12, 2014
    Assignee: Sumitomo Electric Hardmetal Corp.
    Inventors: Anongsack Paseuth, Yoshio Okada, Hideaki Kanaoka, Chikako Kojima, Erika Iwai
  • Patent number: 8795767
    Abstract: Luminescent materials and the use of such materials in anti-counterfeiting, inventory, photovoltaic, and other applications are described herein. In one embodiment, a method of forming a luminescent material includes: (1) providing a source of A and X, wherein A is selected from at least one of elements of Group 1, and X is selected from at least one of elements of Group 17; (2) providing a source of B, wherein B is selected from at least one of elements of Group 14; (3) subjecting the source of A and X and the source of B to vacuum deposition to form a set of films adjacent to a substrate; and (4) heating the set of films to a temperature in the range of 120° C. to 350° C. to form a luminescent material adjacent to the substrate, wherein the luminescent material includes A, B, and X.
    Type: Grant
    Filed: November 2, 2009
    Date of Patent: August 5, 2014
    Assignee: OMNIPV, Inc.
    Inventors: William M. Pfenninger, Nemanja Vockic, John Kenney
  • Patent number: 8741428
    Abstract: A surface-coated cutting tool according to the present invention includes a base material and a coating film formed on the base material. The coating film includes at least one TiCN layer. The TiCN layer has a columnar crystal region. The columnar crystal region is characterized by having a composition of TiCxNy(in which 0.65?x/(x+y)?0.90), having a (422) plane having a plane spacing of 0.8765 ? to 0.8790 ? and having TC (220) showing a maximum value in an orientation index TC (hkl).
    Type: Grant
    Filed: July 4, 2011
    Date of Patent: June 3, 2014
    Assignee: Sumitomo Electric Hardmetal Corp.
    Inventors: Anongsack Paseuth, Yoshio Okada, Chikako Kojima, Hideaki Kanaoka, Erika Iwai, Hiroyuki Morimoto
  • Patent number: 8728571
    Abstract: Provided is a fabrication method for a functional surface that has self-cleaning ability and superhydrophilic anti-reflective property, which includes a) arranging a plurality of beads having a sphere shape on a surface of a transparent substrate; b) forming a predetermined inter-bead gap by etching the plurality of beads; c) forming a surface unevenness on the surface of the substrate by etching the substrate using the plurality of the beads having the predetermined gap as an etching mask; d) removing the plurality of the beads from the surface of the substrate; and e) forming a photocatalytic layer or a compound layer having a surface tension of 18 to 28 N/m on the surface of the substrate formed with the surface unevenness.
    Type: Grant
    Filed: July 28, 2010
    Date of Patent: May 20, 2014
    Assignee: Korea Institute of Machinery and Materials
    Inventors: Hyuneui Lim, Seungmuk Ji, Jun-Hee Lee, Wan-Doo Kim
  • Publication number: 20140072816
    Abstract: A bond layer may include a composition that may be stable at temperatures above about 1410° C. An article may include a substrate, a bond layer formed on the substrate, and an overlayer formed over the bond layer. In some examples, the bond layer may include a substantially homogeneous mixture of Si and at least one of SiO2, Al2O3, ZrO2, a rare earth oxide, ZrSiO4, TiO2, Ta2O5, B2O3, an alkali metal oxide, or an alkali earth metal oxide. In other examples, the bond layer may include Si, an alkali metal oxide, and at least one of SiO2, Al2O3, ZrO2, HfO2, a rare earth oxide, ZrSiO4, HfSiO4, TiO2, Ta2O5, B2O3, or an alkali earth metal oxide. In other examples, the bond layer may include B2O3.
    Type: Application
    Filed: March 22, 2012
    Publication date: March 13, 2014
    Applicant: ROLLS-ROYCE CORPORATION
    Inventor: Kang N. Lee
  • Patent number: 8658255
    Abstract: Methods of making components having calcium magnesium aluminosilicate (CMAS) mitigation capability involving providing a component; applying an environmental barrier coating to the component, the environmental barrier coating having a separate CMAS mitigation layer including a CMAS mitigation composition selected from rare earth elements, rare earth oxides, zirconia, hafnia partially or fully stabilized with alkaline earth or rare earth elements, zirconia partially or fully stabilized with alkaline earth or rare earth elements, magnesium oxide, cordierite, aluminum phosphate, magnesium silicate, and combinations thereof.
    Type: Grant
    Filed: December 19, 2008
    Date of Patent: February 25, 2014
    Assignee: General Electric Company
    Inventors: Glen Harold Kirby, Brett Allen Boutwell, Ming Fu, Bangalore Aswatha Nagaraj, Brian Thomas Hazel
  • Patent number: 8545940
    Abstract: A reactor configured to subject a substrate to alternately repeated surface reactions of vapor-phase reactants is disclosed. The reactor may include a reaction chamber that defines a reaction space and a gas flow control guide structure; and a substrate holder. The gas flow control guide includes one or more channels. Each of the channels widens as the channel extends from the inlet to the reaction space. At least one of the channels is configured to generate a non-uniform laminar flow at a first portion of the periphery of the reaction space such that the laminar flow includes a plurality of flow paths that provide different amounts of a fluid. The reaction chamber may include a reactor base and a reactor cover detachable from each other; and a driver configured to independently adjust at least three portions of the reactor base to provide a substantially perfect seal to the reactor space.
    Type: Grant
    Filed: August 30, 2012
    Date of Patent: October 1, 2013
    Assignee: ASM Genitech Korea Ltd.
    Inventors: Seung Woo Choi, Gwang Lae Park, Chun Soo Lee, Jeong Ho Lee, Young Seok Choi
  • Publication number: 20130224519
    Abstract: In one aspect, coated cutting tools are described herein which, in some embodiments, can demonstrate improved wear resistance in one or more cutting applications. In some embodiments, a coated cutting tool described herein comprises a substrate and a coating adhered to the substrate, the coating comprising an inner layer deposited by physical vapor deposition and an outer deposited by physical vapor deposition over the inner layer.
    Type: Application
    Filed: April 10, 2013
    Publication date: August 29, 2013
    Applicant: Kennametal Inc.
    Inventor: Kennametal Inc.
  • Patent number: 8501277
    Abstract: A method of providing a durable protective coating structure which comprises at least three layers, and which is stable at temperatures in excess of 400° C., where the method includes vapor depositing a first layer deposited on a substrate, wherein the first layer is a metal oxide adhesion layer selected from the group consisting of an oxide of a Group IIIA metal element, a Group IVB metal element, a Group VB metal element, and combinations thereof; vapor depositing a second layer upon said first layer, wherein said second layer includes a silicon-containing layer selected from the group consisting of silicon oxide, silicon nitride, and silicon oxynitride; and vapor depositing a third layer upon said second layer, wherein said third layer is a functional organic-comprising layer. Numerous articles useful in electronics, MEMS, nanoimprinting lithography, and biotechnology applications can be fabricated using the method.
    Type: Grant
    Filed: May 5, 2008
    Date of Patent: August 6, 2013
    Assignee: Applied Microstructures, Inc.
    Inventors: Boris Kobrin, Dangaria Nikunji Hirji, Romuald Nowak, Michael T. Grimes
  • Patent number: 8470434
    Abstract: The invention relates to a transparent glass substrate, associated with a transparent electro-conductive layer capable of constituting an electrode of a photovoltaic cell and composed of a doped oxide, characterized by the interposition, between the glass substrate and the transparent electroconductive layer, of a mixed layer of one or more first nitride(s) or oxynitride(s), or oxide(s) or oxycarbide(s) having good adhesive properties with glass, and one or more second nitride(s) or oxynitride(s) or oxide(s) or oxycarbide(s) capable of constituting, possibly in the doped state, a transparent electroconductive layer; a method for producing this substrate; a photovoltaic cell, a tempered and/or curved glass, a shaped heating glass, a plasma screen and a flat lamp electrode having this substrate.
    Type: Grant
    Filed: January 14, 2008
    Date of Patent: June 25, 2013
    Assignee: Saint-Gobain Glass France
    Inventors: Bernard Nghiem, Emilie Viasnoff, Bertrand Kuhn, David Le Bellac, Anne Durandeau, Fabrice Abbott, Eddy Royer, Georges Zagdoun, Olivier Dubois
  • Patent number: 8449941
    Abstract: Disclosed is a method for formation of a thermal bather coating on a gas turbine during operation thereof, which includes addition of an organic compound containing silicon to a fuel under a first condition in order to form a base layer on the surface of a part coming into contact with a combustion gas of the fuel in the gas turbine during operation thereof, as well as addition of the organic compound containing silicon to the fuel under a second condition in order to form a porous layer having more pores than the base layer above the base layer.
    Type: Grant
    Filed: November 10, 2009
    Date of Patent: May 28, 2013
    Assignees: Korea Electric Power Corporation, Korea Southern Power Co., Ltd
    Inventors: Min Tae Kim, Doo Soo Kim, Won Young Oh
  • Patent number: 8440259
    Abstract: A combinatorial processing chamber and method are provided. In the method a fluid volume flows over a surface of a substrate with differing portions of the fluid volume having different constituent components to concurrently expose segregated regions of the substrate to a mixture of the constituent components that differ from constituent components to which adjacent regions are exposed. Differently processed segregated regions are generated through the multiple flowings.
    Type: Grant
    Filed: January 14, 2008
    Date of Patent: May 14, 2013
    Assignee: Intermolecular, Inc.
    Inventors: Tony P. Chiang, Sunil Shanker, Chi-I Lang
  • Publication number: 20130071566
    Abstract: A chemical vapor deposition process for the deposition of a silica layer on a glass substrate is provided. The process includes providing a glass substrate. The process also includes forming a gaseous precursor mixture comprising a silane compound, oxygen, water vapor, and a radical scavenger and directing the precursor mixture toward and along the glass substrate. The mixture reacts over the glass substrate to form a silica coating thereon.
    Type: Application
    Filed: September 5, 2012
    Publication date: March 21, 2013
    Applicant: Pilkington Group Limited
    Inventor: Douglas M. Nelson
  • Patent number: 8318329
    Abstract: The radiation-selective absorber coating (20) has two barrier layers (24a, 24b), an IR-reflecting layer (21) arranged thereon, an absorption layer (22) arranged above the IR-reflecting (21) and an antireflection layer (23) over the absorption layer (22). The absorber tube (13) is a steel tube (1) with the radiation-selective absorber coating (20) applied to the outside thereof. In the process of coating the absorber tube (13) a first oxide barrier layer (24a) is applied to a steel tube by thermal oxidation; a second barrier layer (24b) is then applied by physical gas phase deposition of silicon with supply of oxygen; the IR-reflecting layer (21) is then applied by gas phase deposition of gold, silver, platinum or copper; the absorption layer (22) is then applied by deposition of aluminum and molybdenum; and a final antireflection layer (23) is applied by deposition of silicon with supply of oxygen.
    Type: Grant
    Filed: February 17, 2009
    Date of Patent: November 27, 2012
    Assignee: Schott AG
    Inventors: Kamel Silmy, Jan Schulte-Fischedick, Thomas Kuckelkorn, Christina Hildebrandt, Wolfgang Graf, Andreas Georg
  • Patent number: 8287956
    Abstract: A silicon oxide layer is formed by oxidation or decomposition of a silicon precursor gas in an oxygen-rich environment followed by annealing. The silicon oxide layer may be formed with slightly compressive stress to yield, following annealing, an oxide layer having very low stress. The silicon oxide layer thus formed is readily etched without resulting residue using HF-vapor.
    Type: Grant
    Filed: October 14, 2009
    Date of Patent: October 16, 2012
    Assignee: Robert Bosch GmbH
    Inventors: Aaron Partridge, Markus Lutz, Silvia Kronmueller
  • Publication number: 20120237792
    Abstract: In one aspect, coated cutting tools are described herein which, in some embodiments, can demonstrate improved wear resistance in one or more cutting applications. In some embodiments, a coated cutting tool described herein comprises a substrate and a coating adhered to the substrate, the coating comprising an inner layer deposited by physical vapor deposition and an outer deposited by physical vapor deposition over the inner layer.
    Type: Application
    Filed: March 18, 2011
    Publication date: September 20, 2012
    Applicant: Kennametal Inc.
    Inventors: Aharon Inspektor, Nicholas Waggle, JR., Michael F. Beblo, Mark J. Rowe, Zhigang Ban
  • Patent number: 8236433
    Abstract: An antireflection structure is provided. The antireflection structure includes a substrate layer having a substrate refractive index; a first inorganic layer disposed on the substrate layer and having a first refractive index different from the substrate refractive index, where a thickness of the first inorganic layer is in a range of 1 to 40 nm; and a second inorganic layer disposed on the first inorganic layer and having a second refractive index different from the first refractive index.
    Type: Grant
    Filed: September 26, 2008
    Date of Patent: August 7, 2012
    Assignee: National Applied Research Laboratories
    Inventors: Po-Kai Chiu, Wen-Hao Cho, Hung-Ping Chen, Han-Chang Pan, Chien-Nan Hsiao
  • Patent number: 8211500
    Abstract: A Cu film is deposited on a substrate by ALD (Atomic Layer Deposition) process, in which: a Cu-carboxyl acid complex or a derivative thereof having a high vapor pressure and wettability to a base is used in a gasified state; H2 is used as a reductive gas; and a step of adsorbing a source material gas to a substrate and a step of forming a Cu film by reducing the adsorbed gas with a reductive gas are repeated alternately. With this method, a conformal Cu film having excellent quality can be formed.
    Type: Grant
    Filed: February 25, 2005
    Date of Patent: July 3, 2012
    Assignee: Tokyo Electron Limited
    Inventors: Yasuhiko Kojima, Naoki Yoshii
  • Patent number: 8182877
    Abstract: A method of manufacturing a composite material, the method comprising: growing two or more layers of reinforcement in-situ; and impregnating each layer with a matrix before growing the next layer. The reinforcement layers may be formed by a chemical vapor deposition process. The method can be used as an additive layer manufacturing technique to form a component with a desired shape and physical characteristics.
    Type: Grant
    Filed: March 2, 2009
    Date of Patent: May 22, 2012
    Assignee: Airbus Operations Limited
    Inventors: Benjamin Lionel Farmer, Daniel Mark Johns, John Maurice Price
  • Patent number: 8147909
    Abstract: Provided is a method for processing a wafer that includes providing an alloy susceptor including an exterior surface and a wafer contact surface. The exterior surface of the alloy susceptor is treated to produce a roughness of the exterior surface. The roughened exterior surface of is coated with a ceramic material. The alloy susceptor including the ceramic-coated roughened exterior surface is positioned in a wafer process chamber. A plurality of layers of a film are deposited on the ceramic-coated roughened exterior surface of the alloy susceptor, wherein a first adhesion exists between the plurality of layers of the film and the ceramic material coated on the roughened exterior surface of the alloy susceptor that is greater than a second adhesion that would exist between the plurality of layers of the film and a non-roughened exterior surface of the alloy susceptor without the ceramic material.
    Type: Grant
    Filed: March 26, 2009
    Date of Patent: April 3, 2012
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shuo-Jieh Wu, Hsu Chun Yuan, Tung-Li Lee, Steven Li, Hs Chiu, Yen-Yu Chen, Alan Chen, Ming Jie He, Yu-Wei Hsueh
  • Patent number: 8124275
    Abstract: To smoothly deliver a thermal energy required in an active site of a catalyst carried on a carrier. A method of manufacturing a catalyst carrier of the present invention includes the steps of: forming a mixed thin film in which at least metal and ceramics are mixed on a metal base, by spraying aerosol, with metal powders and ceramic powders mixed therein, on the metal base; and making the mixed thin film porous, by dissolving the metal of the mixed thin film into acid or alkaline solution to remove this metal.
    Type: Grant
    Filed: January 28, 2009
    Date of Patent: February 28, 2012
    Assignee: Hitachi Cable, Ltd.
    Inventors: Mineo Washima, Kenji Shibata, Fumihito Oka
  • Publication number: 20120021137
    Abstract: A method for manufacturing a cutting tool includes the steps of providing a body of cermet or cemented carbide, having a cutting edge with an edge radius Re smaller than 40 ?m, a flank a rake face, applying by PVD a single or a multilayer coating to at least a part of the surface of the body, comprising at least a part of the cutting edge and applying by PVD said single or multilayer coating, comprising PVD coating with at least one oxidic layer.
    Type: Application
    Filed: September 29, 2011
    Publication date: January 26, 2012
    Applicant: OERLIKON TRADING AG, TRUEBBACH
    Inventors: Dennis T. QUINTO, Christian WOHLRAB, Jürgen RAMM
  • Patent number: 8101521
    Abstract: The methods described herein relate to deposition of low resistivity, highly conformal tungsten nucleation layers. These layers serve as a seed layers for the deposition of a tungsten bulk layer. The methods are particularly useful for tungsten plug fill in which tungsten is deposited in high aspect ratio features. The methods involve depositing a nucleation layer by a combined PNL and CVD process. The substrate is first exposed to one or more cycles of sequential pulses of a reducing agent and a tungsten precursor in a PNL process. The nucleation layer is then completed by simultaneous exposure of the substrate to a reducing agent and tungsten precursor in a chemical vapor deposition process. In certain embodiments, the process is performed without the use of a borane as a reducing agent.
    Type: Grant
    Filed: December 11, 2009
    Date of Patent: January 24, 2012
    Assignee: Novellus Systems, Inc.
    Inventors: Juwen Gao, Lana Hiului Chan, Panya Wongsenakhum
  • Patent number: 8071163
    Abstract: Methods and compositions for depositing high-k films are disclosed herein. In general, the disclosed methods utilize precursor compounds comprising Ta or Nb. More specifically, the disclosed precursor compounds utilize certain ligands coupled to Ta and/or Nb such as 1-methoxy-2-methyl-2-propanolate (mmp) to increase volatility. Furthermore, methods of depositing Ta or Nb compounds are disclosed in conjunction with use of Hf and/or Zr precursors to deposit Ta-doped or Nb-doped Hf and/or Zr films. The methods and compositions may be used in CVD, ALD, or pulsed CVD deposition processes.
    Type: Grant
    Filed: April 7, 2008
    Date of Patent: December 6, 2011
    Assignee: L'Air Liquide Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude
    Inventor: Christian Dussarrat
  • Publication number: 20110262233
    Abstract: The present invention relates to a tool for metal machining comprising a tool substrate of cemented carbide, cermet, ceramics or a super hard material, and a coating comprising an inner alumina layer and an outer titanium boronitride layer, wherein said layers are separated by one or more layers comprising an oxide layer other than an alumina layer, and a method of making the tool.
    Type: Application
    Filed: October 9, 2009
    Publication date: October 27, 2011
    Inventor: Per Martensson
  • Patent number: 8034727
    Abstract: A semiconductor device manufacturing method according to the present invention uses a first raw material gas containing Si, a second raw material gas containing a metal element M and an oxidation gas, in which a first step of supplying the oxidation gas onto a substrate to be treated, and a second step of supplying the first raw material gas are sequentially performed. The method further includes, after the first and second steps, a step of supplying the second raw material gas or gas mixture of the first raw material gas and the second raw material gas.
    Type: Grant
    Filed: October 13, 2006
    Date of Patent: October 11, 2011
    Assignee: NEC Corporation
    Inventor: Takashi Nakagawa
  • Patent number: 7968201
    Abstract: A multi-layer thin film stack, particularly suitable as a component of a solar cell, is deposited on a transparent dielectric substrate. The multi-layer film stack comprises a transparent electrically conductive metal oxide layer deposited over the dielectric substrate, the conductive metal oxide layer having a refractive index less than 2.0, a light transmittance optimizing interlayer having a refractive index between 2.3 and 3.5, deposited over the electrically conductive metal oxide layer, and a silicon layer having a refractive index of at least 4.5 deposited over the light transmittance optimizing interlayer. The film stack can be deposited by any suitable method, but deposition of each of these layers by atmospheric chemical vapor deposition is preferred.
    Type: Grant
    Filed: August 24, 2006
    Date of Patent: June 28, 2011
    Assignees: Pilkington Group Limited, Pilkington North America, Inc.
    Inventors: Douglas M. Nelson, Gary Nichol, Srikanth Varanasi
  • Patent number: 7968147
    Abstract: The present invention relates to ceramic cutting tools, such as, an aluminum oxide with zirconium oxide ceramic cutting tool with diffusion bonding enhanced layer and CVD coatings, particularly useful for machining modern metal materials. The method comprises a chemical reaction with a mixture including nitrogen and aluminum chloride introduced to form a diffusion bonding enhanced layer between the ceramic substrate and the CVD coatings. Thus formed diffusion bonding enhanced layer is highly adherent to the aluminum oxide with zirconium oxide ceramic substrate and significantly enhances the CVD coating properties, thus improving the machining performance in terms of the tool life of zirconium-based aluminum oxide with zirconium oxide ceramic cutting tools.
    Type: Grant
    Filed: March 13, 2009
    Date of Patent: June 28, 2011
    Assignee: TDY Industries, Inc.
    Inventors: X. Daniel Fang, David J. Wills, Gilles Festeau
  • Patent number: 7919143
    Abstract: A carrier for an object, preferably a substrate of a semiconductor component such as a wafer, includes a receiving element for the object and gas outlets arranged below the receiving element along the object received. At least sections of the carrier are made of a material which including stabilizing fibers and having a porosity which forms the gas outlets, in order to enable a desired gas to exit from the gas outlets in a dosed and finely distributed manner.
    Type: Grant
    Filed: December 6, 2004
    Date of Patent: April 5, 2011
    Assignee: Schunk Kohlensteofftechnik GmbH
    Inventor: Stefan Schneweis
  • Patent number: 7914849
    Abstract: A new and refined method to produce ?-Al2O3 layers in a temperature range of from about 750 to about 1000° C. with a controlled growth texture and substantially enhanced wear resistance and toughness than the prior art is disclosed. The ?-Al2O3 layer of the present invention is formed on a bonding layer of (Ti,Al)(C,O,N) with increasing aluminium content towards the outer surface. Nucleation of ?-Al2O3 is obtained through a nucleation step being composed of short pulses and purges consisting of Ti/Al-containing pulses and oxidising pulses. The ?-Al2O3 layer according to the present invention has a thickness ranging from about 1 to about 20 ?m and is composed of columnar grains. The length/width ratio of the alumina grains is from about 2 to about 12, preferably from about 4 to about 8. The layer is characterized by a strong (104) growth texture, measured using XRD, and by low intensity of (012), (110), (113), (024) and (116) diffraction peaks.
    Type: Grant
    Filed: August 22, 2008
    Date of Patent: March 29, 2011
    Assignee: Seco Tools AB
    Inventor: Sakari Ruppi
  • Publication number: 20100285290
    Abstract: A coated article includes a substrate and a first coating formed over at least a portion of the substrate. The first coating includes a mixture of oxides including oxides of at least two of P, Si, Ti, Al and Zr. A functional coating is formed over at least a portion of the first coating. In one embodiment, the functional coating includes fluorine doped tin oxide. In another embodiment, the functional coating includes titania.
    Type: Application
    Filed: November 19, 2008
    Publication date: November 11, 2010
    Applicant: PPG INDUSTRIES OHIO, INC.
    Inventors: Songwei Lu, Caroline S. Harris, James McCamy, Ilya Koltover, Mehran Arbab, Cheri M. Boykin
  • Publication number: 20100255345
    Abstract: A coated polycrystalline cubic boron nitride cutting insert useful in a cutting tool for removing material from a workpiece, and a method for making the same. The cutting insert including a polycrystalline cubic boron nitride substrate with a rake surface and at least one flank surface, and a cutting edge formed at the juncture between the rake surface and the flank surface. A wear-resistant coating scheme is on the polycrystalline cubic boron nitride substrate. The wear-resistant coating scheme includes the following coating layers. An inner coating layer region is on at least some of the rake surface and at least some of the flank surface of the polycrystalline cubic boron nitride substrate. An alumina-containing coating layer region, which has at least one exposed alumina coating layer, is on the inner coating layer region.
    Type: Application
    Filed: March 11, 2010
    Publication date: October 7, 2010
    Applicant: Kennametal Inc.
    Inventors: Zhigang Ban, Yixiong Liu
  • Patent number: 7785665
    Abstract: A coated body that includes a substrate and a coating scheme on the substrate. The coating scheme on the substrate wherein the coating scheme includes an alpha-alumina coating layer that exhibits a platelet grain morphology at the surface of the alpha-alumina coating layer or a kappa-alumina coating layer that exhibits either a lenticular grain morphology or a polyhedra-lenticular grain morphology at the surface thereof or an alpha-kappa-alumina coating layer that exhibits either a large multifaceted grain morphology or a polyhedra-multifaceted grain morphology at the surface thereof.
    Type: Grant
    Filed: March 31, 2006
    Date of Patent: August 31, 2010
    Assignee: Kennametal Inc.
    Inventors: Alfred S. Gates, Jr., Pankaj K. Mehrotra, Charles G. McNerny, Peter R. Leicht
  • Patent number: 7758929
    Abstract: In a plasma processing apparatus in which a radio-frequency power from a radio-frequency power source is supplied to at least one of an upper electrode and a lower electrode disposed to vertically face each other in a process vessel, to thereby generate, in the process vessel, plasma with which a substrate is processed, a chemical component emitting member which is caused to emit a chemical component necessary for processing the substrate into the process vessel by entrance of ions in the plasma generated in the process vessel is provided in the process vessel in an exposed state, and an impedance varying circuit varying impedance on the chemical component emitting member side of the plasma generated in the process vessel to frequency of the radio-frequency power source is connected to the chemical component emitting member.
    Type: Grant
    Filed: March 27, 2007
    Date of Patent: July 20, 2010
    Assignee: Tokyo Electron Limited
    Inventors: Yohei Yamazawa, Noriaki Imai
  • Publication number: 20100166512
    Abstract: Disclosed is a cutting tool having excellent wear resistance. Specifically disclosed is a cutting tool having a substrate and a coating layer formed on a surface of the substrate. The cutting tool is characterized in that the substrate contains at least cobalt; the coating layer includes at least a titanium nitride layer formed on the surface of the substrate, a titanium carbonitride layer formed on the surface of the titanium nitride layer, an intermediate layer formed on the surface of the titanium carbonitride layer and an aluminum oxide layer formed on the surface of the intermediate layer; the intermediate layer contains at least oxygen and titanium, and the aluminum oxide layer incorporates particles composed mainly of cobalt.
    Type: Application
    Filed: February 27, 2007
    Publication date: July 1, 2010
    Applicant: Kyocera Corporation
    Inventor: Takahito Tanibuchi
  • Patent number: 7740823
    Abstract: A method of growing a III group nitride single crystal by using a metal-organic chemical vapor deposition (MOCVD) process, the method including: preparing an r-plane (1-102) substrate; forming a nitride-based nucleation layer on the substrate; and growing a nonpolar a-plane nitride gallium single crystal on the nitride-based nucleation layer while altering increase and decrease of a ratio of V/III group to alternate a horizontal growth mode and a vertical growth mode.
    Type: Grant
    Filed: October 23, 2007
    Date of Patent: June 22, 2010
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Oleg Ledyaev, Ki Ho Park, Si Hyuk Lee, Soo Min Lee